Operating Instructions

Incl. Declaration of Conformity

Prisma™
Quadrupole mass spectrometer

QMS 200

BG 805 201 BE / A (0205) 1

Product Identification In all communications with Pfeiffer, please specify the information given on the
product nameplates. For convenient reference copy the information for all items of
your system into the corresponding nameplate replicas in this document (® 2 7).

Validity This manual applies to products with part numbers

QMA 200 PTM25250 Faraday/Iridium

PTM25251 Faraday/Tungsten
PTM25252 Channeltron/Iridium
PTM25253 Channeltron/Tungsten
PTM25254 Channeltron/Iridium, Mo wiring
PTM25255 Channeltron/Tungsten, gas tight ion source, with transport brace
PTM25256 Channeltron/Iridium, gas tight ion source, with transport brace
PTM25262 Channeltron/Tungsten, gas tight ion source, without transport brace
PTM25264 Channeltron/Iridium, HPA 200
PTM25265 Channeltron/Tungsten, SPM 200
PTM25266 Channeltron/Iridium, gas tight ion source, without transport brace
PTM25268 Channeltron/Tungsten, gas tight ion source, Al wiring
PTM25270 Faraday/Iridium, 300 °C
PTM25271 Faraday/Tungsten, 300 °C
PTM25272 Channeltron/Iridium, 300 °C
PTM25273 Channeltron/Tungsten, 300 °C
PTM25275 Channeltron/Tungsten, 300 °C, gas tight ion source
PTM25277 Channeltron/Iridium, 300 °C, Mo wiring
PTM25291 Channeltron/Tungsten, Crossbeam ion source
PTM25292 Channeltron/Iridium, adjustable electron energy
PTM25293 Channeltron/Iridium, Crossbeam ion source, 300 °C
PTM25294 Channeltron/Tungsten, Crossbeam ion source, 300 °C
PTM25295 Channeltron/Iridium, adjustable electron energy, 300 °C

QME 200 PTM28500 Faraday, M=200

PTM28501 Channeltron, M=200
PTM28502 Faraday, M=300
PTM28503 Channeltron, M=300
PTM28504 Faraday, M=100
PTM28505 Channeltron, M=100
PTM28506 Faraday, M=200, Prisma with 90°connection
PTM28507 Channeltron, M=200, Prisma with 90°connection
PTM28508 Faraday, M=300, Prisma mit with 90°connection
PTM28509 Channeltron, M=300, Prisma with 90°connection
PTM28510 Faraday, M=100, Prisma with 90°connection
PTM28511 Channeltron, M=100, Prisma with 90°connection

SP 200 B5181408KY

The part number can be taken from the nameplate.

This document is based on the firmware version
BG 509 725 -H (or higher)
BG 509 726 -H (or higher)

If the unit does not function as described, check that it is equipped with this
firmware version (® & Quadstar [1]).

We reserve the right to make engineering changes without prior notice.

2 BG 805 201 BE / A (0205) QMS200.oi

Intended Use The Prisma mass spectrometer is designed for partial pressure analysis at
pressures below approx. 10-4 mbar. Typical applications are measurement,
monitoring and process control functions in vacuum systems.

Training
Training
Pfeiffer Vacuum offers application, operating and maintenance courses for the
best use of this product. Please contact your local Pfeiffer Vacuum
representative.

Trademark Prisma™ INFICON AG

BG 805 201 BE / A (0205) QMS200.oi 3

Table of Contents
Product Identification 2
Validity 2
Intended Use 3
Training 3
Trademark 3

1 Safety 5
1.1 Symbols Used 5
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 6
1.4 Liability and Warranty 6
2 Technical Data 7
2.1 System Overview 7
2.2 Standards Complied With 9
2.3 Ambient Conditions 9
2.4 QMS 200 F 9
2.5 QMS 200 M 10
2.6 QME 200 10
2.7 SP 200 11
2.8 Pin Assignment 11
3 Installation 13
3.1 Unpacking 13
3.2 Montage 13
3.2.1 Required Space [mm] 14
3.2.2 Required Tools 15
3.2.3 QMA Installation 16
3.2.4 QME Installation 17
3.3 Electrical Connections 17
3.3.1 QME Connection 17
3.3.2 Connecting the SP 200 Power Supply to Prisma 20
3.3.3 Connecting the PC 21
3.4 Installing the Software 21
4 Operation 22
4.1 Commissioning 22
4.2 Configuration 23
5 Maintenance 24
5.1 QMA 24
5.1.1 Filament Change 24
5.2 QME 25
5.2.1 Cleaning 25
5.2.2 Replacing the Filter Mat 26
5.2.3 "TUNE" of RF Generator 27
5.2.4 Optimizing the Ion Source Sensitivity 27
5.2.5 Replacing the QME 28
6 Accessories and Spare Parts 29
7 Disposal 30

Appendix 30
A: LAN Interface 31
B: Literature 32
Declaration of Contamination 33
Declaration of Conformity 34

For cross-references within this document, the symbol (® 2 XY) is used, for cross-
references to other documents, the symbol (® & [Z]).

4 BG 805 201 BE / A (0205) QMS200.oi

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Note

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

DANGER

Caution: mains voltage

Products that are not professionally connected to ground can be
extremely hazardous in the event of a fault.
Connect the product according to the local regulations and ground it
correctly.

Note

Caution: dirt sensitive area

Dirt causes malfunctions or failures.
Always wear clean, lint-free gloves and use clean tools when working
in this area.

Note

Store the transport fastening devices and re-install them before

transporting the product again.

Pfeiffer-
Vacuum

… please contact your nearest Pfeiffer Service Center.

The result is O.K.

The result is not as expected.

The lamp/display is lit.

The lamp/display is dark.

Labeling

BG 805 201 BE / A (0205) QMS200.oi 5

1.2 Personnel Qualifications
1.3 General Safety
Instructions
1.4 Liability and Warranty
6 BG 805 201 BE / A
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.
· Adhere to the applicable regulations and take the necessary precautions for the
process media used.
Consider possible reactions between the materials and the process media.
Consider possible reactions of the process media due to the heat generated by
the product.
· Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.
· Before you begin to work, find out whether any vacuum components are con-
taminated. Adhere to the relevant regulations and take the necessary precau-
tions when handling contaminated parts.
Communicate the safety instructions to other users.
Pfeiffer assumes no liability and the warranty becomes null and void if the end-user
or third parties
· disregard the information in this document
· use the product in a non-conforming manner
· make any kind of changes (modifications, alterations etc.) to the product
· use the product with accessories, not listed in the corresponding product
documentation.
The end-user assumes the responsibility in conjunction with the process media
used.
(0205) QMS200.oi
2 Technical Data

2.1 System Overview

Note

In all communications with Pfeiffer please specify the information given

on the nameplate. For convenient reference transfer this information of
all assemblies into the nameplate replicas in this manual.

QME 200

Pfeiffer Vacuum, D-35614 Asslar

Typ:
No: PTM28
F-No:
V A

QME 200 with 90° connection

Pfeiffer Vacuum, D-35614 Asslar

Typ:
No: PTM28
F-No:
V A

QMA 200 F
Faraday

Pfeiffer Vacuum
Typ: No: F-No: D-35614 Asslar

QMA 200 M
Channeltron

Pfeiffer Vacuum
Typ: No: F-No: D-35614 Asslar

BG 805 201 BE / A (0205) QMS200.oi 7

 SP 200

Power cable

Software Quadstar
QUADSTAR 422 QMS 422

Version: 6.xx RGA

Key-Nbr: xxxx

No: PT 882233 - T

Date: Copyright (C)

Accessories

® 2 29

8 BG 805 201 BE / A (0205) QMS200.oi

 2.2 Standards Complied Safety
With QME/QMA EN 61010-1:1993
IEC1010-1:1990 +A1:1992
Protection class I
SP 200 DIN EN 60950
IEC 950, UL 1950
CSA 22.2 Nr.234
EMV
Immunity EN 50082-2
Emission EN 50081-1

2.3 Ambient Conditions Operation Only in inside rooms

Altitude max. 2000 m NN
Protection IP 30
Pollution degree 2
Temperatures
Storage/transport -25 … +70 °C
Operation QME 0 … +40 °C
SP 0 … +40 °C
Relative humidity max. 80% up to 31 °C,
linearly decreasing to 50% at 40 °C

2.4 QMS 200 F QMS 200 F1 QMS 200 F2 QMS 200 F3

Mass range u 1 … 100 1 … 200 1 … 300
Detector type Faraday
-12
Detection limit mbar <1´10 <2´10-12 <4´10-12
Unit resolution (valley,
full mass range) % <10
at 10 % peak height
adjustable to u 0.5 … 2.5
Sensitivity to Argon A/mbar >1´10-3 >6´10-4 >3´10-4
Contribution to
neighboring mass 40/41
ppm <10 <20 <50
-4
Max. operating mbar 1´10
pressure
Reproducibility of peak
ratio (constant % ±0.5
conditions over 8 h, N2
and Ar from air)
QMA operating
temperature °C 0 … +150
Bakeout temperature
(QME removed) °C max. +200
HS ion source Open type, radial symmetric, 2 thoriated
iridium filaments (tungsten optional),
degassing by electron bombardment (10 mA,
300 V)
Mounting orientation any (® 2 16)
Weight kg 3 (3.3 at 90° connection)
Connection flange DN 40 CF

BG 805 201 BE / A (0205) QMS200.oi 9

2.5 QMS 200 M QMS 200 M1 QMS 200 M2 QMS 200 M3
Mass range u 1 … 100 1 … 200 1 … 300
Detector type Channeltron / Faraday
-14
Detection limit mbar <10 / <10-14 / <2´10-14 /
<5´10-12 <10-11 <2´10-11
Unit resolution (valley, % <10
full mass range)
at 10 % peak height u 0.5 … 2.5
adjustable to
Sensitivity for argon A/mbar >200 / >200 / >100 /
>5´10-4 >3´10-4 >1.5´10-4
Contribution to ppm
neighboring mass 40/41 <10 <20 <50
-4
Max. operating pressure mbar 1´10
Reproducibility of the
peak ratio (constant % ±0.5
conditions over 8 h, N2
and Ar from air)
QMA operating
temperature °C 0 … +120 / 0 … +150
Bakeout temperature °C max. +200
(QME removed)
HS ion source I Open, radial symmetric, 2 thoriated iridium
filaments (tungsten optional), degassing by
electron bombardment
(10 mA, 300 V)
Mounting orientation any
Weight kg 4.4 (4.7 at 90° connection)
Connection flange DN 40 CF

2.6 QME 200 Measurement channels 64

Measurement modes Scan analog, Scan Bargraph, MID
Measurement cycles Mono- / Multichannel 1 … 9999 Cycles
or Repeat
Measurement data buffer 128 Kbytes
MID dwell 10 ms … 60 s
Measurement speed
Scan analog + Bargraph Peak 200 ms/u … 60 s/u
Scan Bargraph Stair 20 ms/u … 60 s/u
Electrometer amplifier 10-5 … 10-12 A (f.s.), fix and autorange
Signal filter FIR Filter
Power supply 24 VDC / 2.0 A
Interfaces RS-232-C
LAN 300 … 19200 bit/s
Arcnet, fiberoptic (1000 m max.) 2.5 Mbit/s
Inputs
2 Analog differential -5.12 … +5.12 V, 11 bit, 1)
1 compact gauge head or TPR 250, PKR 250
external interlock Sink current 0.5 mA (5 VDC)
1 digital In (EXT_RUN) TTL, pull up 4.7 kOhm to +5 V
Outputs
4 Analog -5.12 … +5.12 V, 16 bit, 1 mA max., 200 Ohm
2 Relays NO contact, 24 VAC, 30 VDC, 1 A
Weight 2.5 (2.8 at 90°) kg

1)
Through series connection of two 110 kOhm resistors, 1%, in both lines, the
range is extended to ±10.24 V.
10 BG 805 201 BE / A (0205) QMS200.oi
2.7 SP 200 Voltage 90 … 260 VAC
Frequency 47 … 63 Hz
Power requirements 1.5 A @ 115 V / 60 W
0.8 A @ 230 V / 60 W
Output voltage 24 VDC, stabilized
Insulation 10 MOhm min., output to ground
Overvoltage category II (according to EN 61010)
Weight 0.7 kg

2.8 Pin Assignment

TPR or PKR Digital Input Amphenol C91b
6-pin female
Pin Assignment
1 IDENT EXT_PROT 1 2 VACUUM

2 SUPP_COM COM
6 3
tune ready

3 SIGNAL - 24V

4 SIG_COM -
control RS-232-C
LAN

5 4
5 SCREEN SCREEN
6 SUPPLY -

WARNING

When this connection is used a shielded cable is

required for EMC reasons. The shield must contact
the connector housing. The opposite end should
remain open or be grounded so that no damaging
compensating currents can occur.

control
Pin Assignment Pin Assignment D-Sub.
H-Density
15-pin, female
1 AO_CH 1 + 9 AI_CH 1 -
2 AO_CH 2 + 10 EXT_RUN 6
1 11
3 AO_CH 3 + 11 REL_1A
4 AO_CH 4 + 12 REL_1B 5 15
10
5 AO_COM 13 REL_2A
6 AI_CH 0 + 14 REL_2B
7 AI_CH 0 - 15 GND
8 AI_CH 1 + Case Shield

WARNING

When this connection is used a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.

BG 805 201 BE / A (0205) QMS200.oi 11

 LAN VACUUM

Pin Assignment JIS F07

(TOSLINK) tune ready

T Transmit
24V

T RS-232-C

R Receive
control
LAN

Pin Assignment
1 n.c
2 Received Data (RXD)
3 Transmitted Data (TXD)
4 optional signal
Data Terminal Ready
(DTR)
5 Signal Ground (SGND)
RS-232-C
Pin Assignment D-Sub.
9-pin male
6 n.c
7 optional signal
6 1
Request To Send (RTS)
8 optional signal 9 5
Clear To Send (CTS)
9 n.c
Case Shield

WARNING

When this connection is used a shielded cable is required for EMC reasons. The
shield must contact the connector housing. The opposite end should remain
open or be grounded so that no damaging compensating currents can occur.

VACUUM

24 V DC
Pin Assignment 3-pin female tune ready

24V

1 + 24 V DC 3 2
control RS-232-C
LAN

2 GND
1
3 GND
Case Screen

QMA
Pin Assignment 13-pin, male
1 Reserve
2 Extr 12 1
2
3 Focus 11
3
4 HV - 10 13
5 Filament 1
9 4
6 Filament 2
8 5
7 Anode
7 6
8 RF -
9 GND
10 GND
11 RF + DANGER
12 Filament Common This connection carries hazardous
13 EP voltages

12 BG 805 201 BE / A (0205) QMS200.oi

3 Installation

3.1 Unpacking
Note

Store the transport fastening devices and re-install them before

transporting the product again.

3.2 Montage
DANGER

Voltages up to 330 VDC appear on the QMA 200 during operation.

Other parts in the vacuum chamber (e.g. gauges) may possibly be exposed to
this voltage under unfavorable conditions. If as a result such parts (including the
lines and connected equipment!) become hazardous, they must be arranged or
protected in such a way that no sparkover and charge transfer can occur.

If the QMA can be touched while the vacuum system is open, additional
protection is needed, e.g.:
· mechanical protection against touching
· forced disconnection of the SP 200 power supply when the system is
opened.

DANGER

No external hazardous voltages are allowed to be transferred to the electrodes of

the QMA 200. If such danger sources exist in the vacuum chamber, additional
safety measures (e.g. better placement, shielding, grounding, etc.) must be taken
that reliable preclude such influences. Also lower external voltages acting on the
QMA may damage the electronics and lead to unreliable measurement results.
Suitable precautions are to be taken as mentioned above.

WARNING

The QMA must be correctly installed from a vacuum engineering point of view,
i.e. the gases to be detected must have unhindered access to the analyzer.
Vacuum coating of the analyzer must be prevented.

Note

Make sure you adhere to the special requirements concerning cleanliness and
damage prevention when working with vacuum components.

BG 805 201 BE / A (0205) QMS200.oi 13

3.2.1 Required Space [mm]
Note

Note the required installation depth. Do not kink the cables.

Note

The QMA 200 F may only be installed in flanges or rubes with an internal
diameter ³37 mm, otherwise short circuits to the wall can occur.
The diameter of the extension tube for the QMA 200 M must be at least
40.5 mm.

Faraday (100) 228 54 118

KA 117
127.5

ø37
DN 40 CF-F

141

Channeltron + Faraday (100) 228 184 83

130
KA 118
127.5

ø37
DN 40 CF-F

141

Prisma with 90° connection 54.6 27 118

Faraday
ø37

DN 40 CF-F
313

228

141

KA 138
(100)

127.5

14 BG 805 201 BE / A (0205) QMS200.oi

 Prisma with 90° connection 54.6 27 130 83
Channeltron + Faraday

ø37
DN 40 CF-F

313

228

141
KA 139

(100)

127.5

SP 200 80
5
16
56

00
30

3.2.2 Required Tools

Hexagon socket screw key, size 4

Open-end wrench (2 pieces), size 10

Screwdriver (blade width 3 … 4 mm)

BG 805 201 BE / A (0205) QMS200.oi 15

3.2.3 QMA Installation
DANGER

The analyzer flange must be properly grounded.

· By connecting with all 6 screws to the properly grounded. vacuum system.
· If the mounting flange is not grounded, the QMA 200 flange (grounding
screw M4) must be connected to the protective ground by means of a
separate ground conductor. Establish this connection with yellow/green
insulated or bare stranded copper wire.
· 2.5 mm² if mech. protected according to DIN VDE 110 T540
· 4.0 mm² if unprotected

Note

The QMA should preferably be mounted horizontally (with the guiding groove
downward). This results in optimum protection of the QME against falling objects
and affords easy installation and excellent access to the front panel.
On the Prisma with 90° connection this results in a vertically suspended
arrangement of the QME 200.

Removing the transport brace QMA 200 F QMA 200 M

and flanging the analyzer to
the vacuum chamber
Transport brace
ΠSet the QMA into the
supplied mounting tool.
 Carefully remove the
transport brace on the
QMA and save it for
possible future use.
Ž Transport brace
Carefully pull off the
ñ transport brace and save
it for possible future use

ñ  Flange the analyzer to

Žñ the vacuum chamber

Θ
Guide groove

Mounting tool Θ

16 BG 805 201 BE / A (0205) QMS200.oi

3.2.4 QME Installation
DANGER

The QME may be mounted only to a correctly installed QMA as the only ground
connection is via the QMA flange.
The 24 V feeder line from the SP 200 must never be connected if QMA is not
screw fastened to the QME.

ŒŽ


Guide groove

Grounding
tab

ΠWith a hexagon-socket-screw (size 4) key loosen the two screws on the

black plastic connection piece of the QME so that the moving part has a
play of 2 … 3 mm.

 Carefully slide the QME onto the mounted QMA up to the notch mark.Make
sure the positioning on the QME through the grounding tab and the guide
groove is correct. Do not apply excessive force.

Ž Firmly tighten the two hexagon-socket-head screws. These screws secure

the QME mechanically and ensure electrical safety by providing ground
contact.

3.3 Electrical Connections

WARNING

All electrical connections must have cable strain relief. Route the cables
separately from EMI sources.

3.3.1 QME Connection

WARNING

For reasons of electromagnetic compatibility a single central grounding point is

strongly recommended for all connected units (pumping station, SP 200,
computer, recorders, etc.). A multiple AC power outlet or a common line voltage
distributor with power switch fulfills this requirement in a simple manner.
Exception:
The LAN interface should be used for a remotely installed PC and/or an
environment with strong electromagnetic fields.

BG 805 201 BE / A (0205) QMS200.oi 17

3.3.1.1 - Connection This connection allows vacuum measurements with a TPR 265 or PKR 251
compact gauge head, and protection of the filament FIL and Channeltron SEM
against inadequate vacuum conditions.

Total pressure · TPR

measurement and protective Pirani Compact Gauge VACUUM

functions
5×10-4 … 1000 mbar
or tune ready

· PKR 24V

FullRange™ Compact Gauge

control RS-232-C
LAN

5×10-9 … 1000 mbar

or
· Digital input

· Control input for interlocking the Channeltron

and filament supply
or
· Free digital input

Control with TPR / PKR When the TPR or PKR gauge head is connected, total-pressure dependent control
and monitoring of the SEM and filament supply can be activated. The switching
thresholds can be set by software (® Quadstar Tune Up / Tune / Ion Source).
The function is selected with the SEM+FIL parameter:
® & Quadstar - Chapter "Parameter Setup: QMS-Configuration"

EXTERN:
The SEM and filament supplies are automatically turned on and off as a function of
the total pressure.
EXT_PROT:
The SEM and filament supplies are turned off when the specified total pressure
threshold (Protection) is exceeded. They are turned on under software control if the
total pressure is below the power off threshold.
INTERN:
Turned on and off under software control.

Control with contact If no gauge head is connected the filament and Channeltron can be controlled by a
floating contact between the signal lines EXT-PROT and COM.
The function is selected with the SEM+FIL parameter:
® & Quadstar - Chapter "Parameter Setup: QMS-Configuration"

EXTERN:
Direct on/off switching of the SEM and filament supplies:
Contact open ® switched off
Contact closed ® switched on

EXT_PROT:
Only the SEM and filament supply (Protection) are turned off. They are switched on
under software control, provided the contact was previously closed.
Open the contact ® Switch-off

18 BG 805 201 BE / A (0205) QMS200.oi

 Digital input If SEM+FIL control is not used, the input can be used as a digital input for a
floating contact between the signal lines EXT_PROT and COM. In this case the
configuration parameter SEM+FIL must be set to INTERN.
Logic assignment: Contact open: ® DI 0 = true
Contact closed: ® DI 0 = false

3.3.1.2 control Connection

VACUUM

tune ready

24V

control RS-232-C
LAN

Digital input Digital outputs Analog inputs Analog outputs

· External Switching thresholds Reading of · Measured
measurement or e.g. valve measured values, values, e.g. ion
cycle start or open/close e.g. pressure, currents
temperature, gas
· Free digital · Calculated
flow
input values, e.g.
(a second digital concentration
inputs is available
according to the
connection)

Specifications and connector pin assignment ® 2 10,11

External measurement cycle External measurement cycle start with a floating contact between the signal lines
start EXT_RUN and GND. There are four control methods:

Parameter: cycle /TRIG ® & Communication line QMS 200: [4]

(Frame No. 60; not supported by Quadstar):

INTERN:
The measurement cycle is started and stopped under software control.
EXT-AUTO:
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle continues until it is canceled with <halt> or until the preset
number of measurement cycles has been performed.
EXT-NORM:
The start is initiated with the positive edge of the EXT_RUN signal. The
measurement cycle keeps running as long as the trigger level is high or until it is
canceled <halt> or until the preset number of cycles has been performed.
EXT-SNGL:
The start is initiated with the positive edge of the EXT_RUN signal. However, the
unit must first be prepared by entering <run>. The measurement cycle continues
until it is canceled with <halt> or until the preset number of measurement cycles
has been performed.

BG 805 201 BE / A (0205) QMS200.oi 19

 Digital input If “External measurement cycles/Start” is not used, the EXT_RUN connection is
available as a digital input for interrogating a contact state. For this application the
cycle/TRIG parameter must be set to INTERN:
Logic assignment Contact open: ® DI 1 = true
Contact closed: ® DI 1 = false

Digital output 2 isolated relay contacts (N.O.). They can be assigned to the switching functions
(peak height monitoring) or be used as software-controlled outputs (e.g. for valve
actuation).
Signal designation: REL_1A ; REL_1B ® DO 0
REL_2A ; REL_2B ® DO 1
Logic assignment DO .. = true ® Contact closed

Analog output 4 analog output channels with a common reference point AO_COM
They can be assigned to measurement channels or be controlled directly by the
software, e.g. for outputting calculated concentration values.
Signal designation: AO_CH 1 + ; AO_COM ® AO - Channel 1
AO_CH 2 + ; AO_COM ® AO - Channel 2
AO_CH 3 + ; AO_COM ® AO - Channel 3
AO_CH 4 + ; AO_COM ® AO - Channel 4

Analog input 2 differential, high-impedance analog inputs. They can be assigned to

measurement channels or be read directly by the software.

Signal designation: AI_CH 0 + ; AI_CH 0 - ® AI - Channel 0

AI_CH 1 + ; AI_CH 1 - ® AI - Channel 1

3.3.2 Connecting the SP 200

Power Supply to Prisma WARNING

Do not yet plug in the SP 200 power plug ® 2 22

VACUUM

tune ready

24V

control
LAN
RS-232-C
SP 200

ΠSet up the power supply in such a way that:

· it cannot get wet e.g. by spilled water on the floor,
· air circulation is not impeded and the ambient conditions are satisfied.

 Insert the outlet connector of the SP 200 into the 24 VDC connector of the
QME.

20 BG 805 201 BE / A (0205) QMS200.oi

3.3.3 Connecting the PC

ΠOpen the enclosed

Balzers QuadstarTM
software package.

 Remove the enclosed

cables.

Ž Establish the connections.

VACUUM
RS-232-C Interface:
Use the supplied 9-conductor null
modem cable.
(If required use the extension
tune ready
cable and/or the DB9 male /
24V DB25 female Adapter).
® & Quadstar [1]
control RS-232-C
LAN

LAN Interface:
If a LAN interface is used
ARCNET ® 2 31
Karte im PC ® & Quadstar [1]

PC

3.4 Installing the Software

ΠSwitch on your PC and install the supplied Quadstar software.
The RGA program is also loaded during this installation procedure.
® & Quadstar [1]

The installation program creates the group "QUADSTAR 422“ (if it does not exist
yet).

BG 805 201 BE / A (0205) QMS200.oi 21

4 Operation

4.1 Commissioning
DANGER

Caution: damaged product

Putting a damaged product into operation can be extremely hazard-
ous.
In case of visible damages, make sure the product is not put into
operation.

WARNING

Make sure that the limits and ambient conditions specified in the technical data
(® 2 9,10) are met.

DANGER

The power plug may only be plugged into an AC outlet that is equipped with a
protective ground contact. Use only a matching three-conductor power cable with
correct ground connection. The protective effect must not be defeated by an
extension cable without protective ground conductor.

WARNING

Check the vacuum in the QMA before you insert the power plug of the SP 200.
Required vacuum conditions:
<10-4 mbar with Faraday type
<10-5 mbar with Channeltron type
If you use the compact gauge head connected to the QME, the power plug may
be inserted without checking the vacuum conditions. But do not turn on the
Emission and Channeltron voltage until the above limits have been attained.
Activate EXT_PROT (® 2 18) monitoring.

SP 200
ΠInsert the power plug.

WARNING

The power plug should be easily accessible. If this is not the case at the
installation site, a power switch or connector must be provided in an easily
accessible location.

22 BG 805 201 BE / A (0205) QMS200.oi

 QME
WARNING

The QME may only be turned on and off by inserting or detaching the power
plug.

LED-Status Function Remedial action

24 V supply available ---
24 VDC

24 V supply not Check the line voltage +

24 VDC available power connection

Ready for operation ---

ready

Not ready Contact Pfeiffer

ready Vacuum Service Center

 Start Quadstar
® & Quadstar [1]

4.2 Configuration The system must be configured when it is put into service for the first time.

ΠWith a double-click open the RGA program.

 Follow the instructions on the screen.

® & Quadstar, Chapter 11 [1]

Within the RGA program the Prisma works with standard parameters. For
achieving optimum results with user-defined parameters ® 2 27

Note

The system can be configured with or without QMS. However, the QMS should
preferably be connected and the interface activated. In this way Quadstar is able
to read back part of the configuration data from the QMS.

BG 805 201 BE / A (0205) QMS200.oi 23

5 Maintenance

5.1 QMA

5.1.1 Filament Change

Skilled personnel

Filaments are supplied as preassembled units. They should only be changed by

qualified personnel.

ΠDetach all electrical connections to the QME.

 Separate the QME from the analyzer by performing the same steps
described in Chapter 3.2.5 but in reverse order.

Ž Detach the analyzer from the vacuum chamber.

 Place the analyzer into the supplied mounting tool.

 ‘

’ñ 

ò
“Ê

 Grip the U-sections with flat-nose pliers and loosen the screws so that the
U-sections are just being kept in position by the screws.

‘ Take off the 3 nuts.

’ Carefully pull the filament assembly upward.

“ Dispose of the used filament assembly.

24 BG 805 201 BE / A (0205) QMS200.oi

 Support bracket

Replacement
cathode

Replacement filament
assembly

” Open the packing tube of the replacement filament assembly. Carefully lift
off the support bracket while gripping the filament assembly at the base of
the protective packing.

WARNING

Do not touch the filament, not even with gloved hands.

• Mount the replacement filament on the ion source. Slide the filament
assembly toward the setscrews so that the plate of the filament assembly is
parallel to the plate of the ion source.

Note

Do not twist the filament assembly, otherwise the ionization chamber will
be deformed.

Mount the 3 nuts on the setscrews and tighten them with the special socket
wrench.

Grip the U-sections with flat-nose pliers, introduce the electrical connections
of the filament laterally at the U-sections and tighten the screws.

5.2 QME

5.2.1 Cleaning The dust filter at the air intake must be cleaned whenever there is clearly visible
contamination. Use a vacuum cleaner to extract the dust from the filter. For this
work it is not necessary to detach the QME from the QMA

WARNING

Do not forget this cleaning, even if the unit is installed in such a way that the
contamination cannot be easily seen.

BG 805 201 BE / A (0205) QMS200.oi 25

 For cleaning the housing use only a piece of cloth lightly moistened with water, and
possibly some dishwashing detergent.

DANGER

Disconnect the 24 V power supply of the QME from the AC power source before
any moist cleaning.
Make sure the connectors do not get moist. No liquid must seep into the unit. Do
not operate the unit until it is completely dry.

5.2.2 Replacing the Filter Mat Replace the filter mat if it is decomposed or if it can no longer be cleaned as
described above.

ΠDisconnect the 24 V power supply from the AC power source and detach all
electrical connections to the QME.

 Separate the QME from the analyzer by performing the same steps as
described in Chapter 3.2.4 QME Installation but in reverse order.

Ž Set the QME on a flat surface with the front panel facing upward.

 VACUUM

tune ready

24V

control RS-232-C

 
LAN

 Unfasten the screws illustrated in the drawing (do not lose the lock washers)
and remove the front panel.

 Replace the now accessible filter mat with a new one.

‘ Reassemble the unit by performing the above steps in reverse order. Do not
forget to reinstall the lockwashers.

26 BG 805 201 BE / A (0205) QMS200.oi

5.2.3 "TUNE" of RF Generator The RF circuit has to be tuned: When the unit is put into service for the first time,
when the analyzer is changed (especially from Faraday to Channeltron), or when a
corresponding error message is displayed on the screen.
Correct tuning assures optimum measurement accuracy across the entire mass
range. An annual tuning check is, therefore, recommended.

ΠRemove the small cap at the side of the QME. This hole gives access to the
tuning screw.

 Start the Quadstar "Tune_up" program and choose

"QMS 200 Tune Data" (tune LED flashes).

Ž Turn the tuning screw (screwdriver with blade width 3 … 4 mm) to adjust the
"TUNE-VOLTAGE" to minimum. Typical value 2.0 … 2.2 V.

Note

Turn carefully, no force is required. Do not fully tighten the tuning screw
and do not turn it out completely.

Or

Ž If the monitor screen is not visible during the tuning process, use the tune
LED of the QME as an indicator. The LED flashes. In case of severe
detuning it is on continuously. In this case turn clockwise to the stop and
continue with b).
Turn the tuning screw
a) Clockwise until the LED is on.
b) Counterclockwise until the LED is off. Continue turning until the
LED is on again.
c) Turn clockwise by one full turn.
d) The RF generator is now tuned.

 Reinstall the cap.

5.2.4 Optimizing the Ion The ion source sensitivity should be optimized when the unit is put into service for
Source Sensitivity the first time or after a filament change.

ΠStart the Quadstar "Tune_up" program, followed by "Tune".

 Choose the subprogram "Ion source"

Ž If not yet selected: Choose "Faraday" even if a Channeltron unit is installed.

 Choose "Display"/ "Measure Data".

 Switch on both filaments at the same time and run it about half an hour with
2 mA Emission (PROTECTION set to 3.5 A).
If "Emission Error" is displayed repeatedly, start with a smaller emission and
increase slowly.
Then switch to a single filament (2 mA).

‘ Wait for a pressure <10-7 mbar and stabilization of the residual gas
spectrum.

’ Admit test gas (e.g. air) to 10-6 mbar.

BG 805 201 BE / A (0205) QMS200.oi 27

 “ Repeatedly measure the spectrum of the peak groups that are of interest
because in this optimization not only the intensity but also the resolution and
the peak shape are important. Standard parameters are:

SPEED: 1s/u
MODE: SCAN-N
RESOL: 50
RANGE: 10-9 or AUTO
IonRef: 150 V / Cathode: 90 V

” Adjust the Extraction and Focus voltages to max. peak height in the
following order:

EXTRACT: 6 … 30 V
FOCUS: typically 6 … 10 V Set FIELD AXIS as follows:

1. Set to 8 V.
2. Reduce the voltage so that the peak intensity drops to about 1% of the
original value.
3. Increase the voltage by 3 V.
4. If the peak structure is too pronounced, reduce the voltage accordingly.

The ion source is now optimized.

• When working with a new ion source repeat ” after several hours of
operation.

Quit the "Ion source" window and save the data.

5.2.5 Replacing the QME If the QME or QMA needs to be replaced, the procedure is the same as for the
initial installation.
The individual steps are:
1. Installing the QME ® 2 17
2. Connecting the QME ® 2 17
3. “TUNE” of RF generator ® 2 27
4. Optimizing the ion source ® 2 27

28 BG 805 201 BE / A (0205) QMS200.oi

6 Accessories and Spare Parts

Item Designation A/E/Z Ordering number.

1 Hexagon-socket-screw key M5 (SW4) Z N 5701 009 BC
2 Hexagon-socket-head screw M3 × 8 Z B 3079 191 X
3 Lock washer M3 Z B 3547 137 X
4 Filter mat E,Z B 5099 154 FE
1
5 D-Sub connector 15 pin Z BG 442 639 -T
6 Connector 6 pin Z B 4722 106 CC
7 Socket wrench size 3 / 3.2 Z BK 370 096
8 Filament assembly
Thoriated Iridium E BN 846 138 -T
Tungsten E BN 846 139 -T
9 Misc. ion source small parts Z
10 Ion source
HS-Ir E BN 846 137 -T
HS-Wo (Tungsten) E BN 846 279 -T
2, 3 11 Hexagon screw M6 × 35 Z N 3015 349 X
VACUUM
12 Hexagon nut M6 Z N 3415 043 X4
13 Washer M6 Z N 3502 418 X
4
14 Cu seal DN 40 CF Z BP 414 606 -T
tune ready

24V
15 QMA mounting tool Z BG 444 456
Channeltron E BN 846 182 -T
control RS-232-C

SP 200 E B 5181 408 KY

LAN

ARCNET board for PC/AT OPA 200 A B 5278 503 KT

5 Fiberoptic cable 10 m A B 5159 615 2H
other lengths on request

A = Optional accessory not supplied

Z = Supplied accessories
E = Replacement part

9, 10

14 11, 12, 13 15

BG 805 201 BE / A (0205) QMS200.oi 29

7 Disposal

DANGER

Caution: contaminated parts

Contaminated parts can be detrimental to health.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.

WARNING

N Caution: substances detrimental to the environment

Electronic components must be disposed of in accordance with special
regulations.
Dispose of such products in accordance with the relevant local regula-
tions.

WARNING

N Caution: substances detrimental to the environment

Products, operating fluids etc. may require disposal in accordance with
special regulations.
Dispose of such substances in accordance with the relevant local
regulations.

Separating the components After disassembling the product, separate its components according to the
following criteria:

Contaminated components Contaminated components (radioactive, toxic, caustic, or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,
separated according to their materials, and recycled.

Other components Such components must be separated according to their materials and recycled.

30 BG 805 201 BE / A (0205) QMS200.oi

Appendix

A: LAN Interface
Note

Applies to Prisma with serial No. > …. W … and OPA 200

ΠInstall the PC interface board

® & OPA 200 [3]

m
m
15
=
in
 Connect PC - Prisma rm

Note

· For fiber-optic conductors with length l < 750 m ® factory

configuration.
· For fiber-optic conductors with length l > 750 m ® reconfiguration
required
Pfeiffer-
Vacuum

… please contact your nearest Pfeiffer Vacuum service center.

Ž Connection via HUB OHA 200

® & OHA 200 [2]

OHA 200

BG 805 201 BE / A (0205) QMS200.oi 31

 & [1] www.pfeiffer-vacuum.de
B: Literature Operating Instructions
Quadstar 422
BG 805 224 BE
Pfeiffer Vacuum GmbH, D–35614 Asslar, Deutschland
& [2] www.pfeiffer-vacuum.de
Operating Instructions
Optical Hub OHA 200
BG 805 055 BE
Pfeiffer Vacuum GmbH, D–35614 Asslar, Deutschland
& [3] www.sohard.de
Operating manual
Network controller board
OPA 200
vina02e3
SoHard AG, Soft- und Hardware Engineering,
Würzburger Str. 167, D-90766 Fürth
& [4] www.pfeiffer-vacuum.de
Communication Protocol
BG 805 203 BE
Pfeiffer Vacuum GmbH, D-35614 Asslar, Deutschland

32 BG 805 201 BE / A (0205) QMS200.oi

Declaration of Contamination

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of product Reason for return

Type
Part number
Serial number

Operating fluid(s) used (Must be drained before shipping.)

Process related contamination of product

toxic no q 1) yes q
caustic no q 1) yes q
biological hazard no q yes q 2)
explosive no q yes q 2)
radioactive no q yes q 2)
other harmful substances no q 1) yes q
The product is free of any sub-
stances which are damaging to
health yes q 2) Products thus contami-
1) or not containing any amount nated will not be ac-
of hazardous residues that cepted without written
exceed the permissible ex- evidence of decontami-
posure limits nation!

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name Chemical name Precautions associated Action in case of human

Manufacturer (preferably with formula) with substance contact

Legally binding declaration:

We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company
Address Post code, place
Phone Fax
E-mail
Name

Date and legally binding signature Company stamp

This form can be downloaded Copies:

from our website. Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

BG 805 201 BE / A (0205) QMS200.oi 33

Declaration of Conformity

Product
Prisma™
Quadrupole mass spectrometer

QMS 200

EU Declaration of Conformity as We herewith declare that the above product complies with the provisions of the
defined by the listed Guidelines listed Guidelines.

Guidelines, harmonised standards, national standards in languages and specifica-

tions which have been applied:

73/23/EWG (7/93)

89/336/EWG (7/93)

EN 61010-1: 1993

EN 50081-1: 1992

EN 50082-2: 1994

Signature Asslar, 7 September 1999

Wolfgang Dondorf
Managing director

34 BG 805 201 BE / A (0205) QMS200.oi

 Notes

BG 805 201 BE / A (0205) QMS200.oi 35

 Berliner Strasse 43
D–35614 Asslar
Deutschland
Tel +49 (0) 6441 802-0
Fax +49 (0) 6441 802-202
Original: German BG 805 201 BD / A (0205) info@pfeiffer-vacuum.de

bg805201be/ a www.pfeiffer-vacuum.de