Optical Design with Zemax

for PhD - Basics

Lecture 9: Imaging
2020-01-08
Herbert Gross
Speaker: Dennis Ochse

Winter term 2019 www.iap.uni-jena.de

 2

Preliminary Schedule
No Date Subject Detailed content
Zemax interface, menus, file handling, system description, editors, preferences, updates,
1 23.10. Introduction system reports, coordinate systems, aperture, field, wavelength, layouts, diameters, stop
and pupil, solves
Basic Zemax Raytrace, ray fans, paraxial optics, surface types, quick focus, catalogs, vignetting,
2 30.10.
handling footprints, system insertion, scaling, component reversal
Properties of optical aspheres, gradient media, gratings and diffractive surfaces, special types of surfaces,
3 06.11.
systems telecentricity, ray aiming, afocal systems
4 13.11. Aberrations I representations, spot, Seidel, transverse aberration curves, Zernike wave aberrations
5 20.11. Aberrations II Point spread function and transfer function
6 27.11. Optimization I algorithms, merit function, variables, pick up’s
7 04.12. Optimization II methodology, correction process, special requirements, examples
8 11.12. Advanced handling slider, universal plot, I/O of data, material index fit, multi configuration, macro language
9 08.01. Imaging Fourier imaging, geometrical images
10 15.01. Correction I Symmetry, field flattening, color correction
11 22.01. Correction II Higher orders, aspheres, freeforms, miscellaneous
12 29.01. Tolerancing I Practical tolerancing, sensitivity
13 19.02. Tolerancing II Adjustment, thermal loading, ghosts
14 26.02. Illumination I Photometry, light sources, non-sequential raytrace, homogenization, simple examples
15 04.03. Illumination II Examples, special components
16 11.03. Physical modeling I Gaussian beams, Gauss-Schell beams, general propagation, POP
17 18.03. Physical modeling II Polarization, Jones matrix, Stokes, propagation, birefringence, components
18 25.03. Physical modeling IIICoatings, Fresnel formulas, matrix algorithm, types of coatings
Scattering and straylight, PSD, calculation schemes, volume scattering, biomedical
19 01.04. Physical modeling IV
applications
Adaptive optics, stock lens matching, index fit, Macro language, coupling Zemax-Matlab /
20 08.04. Additional topics
Python
 3

Content

1. Fourier imaging
2. Coherence and imaging
3. Phase imaging
4. Imaging with ZEMAX
Fourier imaging 4

Definitions of Fourier optics

▪ Phase space with spatial coordinate x and object

structure
1. angle 
2. spatial frequency  in mm-1 diffracted ray
3. transverse wavenumber kx direction
𝑘𝑥
sin 𝜃𝑥 = 𝜆 ⋅ 𝑣𝑥 = k
𝑘 kx
k  2 v  / g
▪ Fourier spectrum A( v x , v y )  Fˆ E ( x, y )

corresponds to a plane wave expansion

( )
A k x , k y , z   E ( x , y , z) e
(
− i xk x + yk y ) dx dy
g=1/

▪ Diffraction at a grating with period g:

deviation angle of first diffraction order varies linear with  = 1/g

1
sin      v
g
Fourier imaging 5

Abbe theory of microscopic resolution

▪ Diffraction of the illumination wave at the object structure

▪ Occurrence of the diffraction orders in the pupil
▪ Image generation by constructive interference of the supported orders
▪ Object details with high spatial frequency are blocked by the system aperture and cannot
be resolved
object imaging pupil image
source plane lens plane plane

0
-1

Ref: W. Singer
Fourier imaging 6

Resolution and spatial frequencies

▪ Grating object pupil

▪ Imaging with NA = 0.8

▪ Imaging with NA = 1.3

Ref: L. Wenke
Fourier imaging 7

Grating diffraction and resolution

diffracted orders
+2. ▪ Arbitrary object expanded into a spatial
a) diffracted orders
resolved optical frequency spectrum by Fourier +2.
+1. a)
system transform
resolved optical
incident ▪ Every frequency component is+1. system
light  considered
incident separately
0. ▪ To resolve  at least
light a spatial detail,
two orders must be supported by 0. the
object -1. system
object -1.
-2.
+2. +2.
-2.
b) not +1. +2. +1.
resolved c) off-axis
b) not +1.
illumination
resolved

0. 0.
0.
𝑔 ⋅ sin 𝜃 = 𝑚 ⋅ 𝜆
-1. -1.
𝜆 𝜆 𝜆
𝑔𝑚𝑖𝑛 = = 𝑔𝑚𝑖𝑛 = -1.
sin 𝜃 𝑁𝐴 -2. 2 ⋅ 𝑁𝐴
-2.
-2.
Ref: M. Kempe
Fourier imaging 8

Number of supported orders

▪ A structure of the object is resolved, if the first diffraction order is propagated

through the optical imaging system

▪ The fidelity of the image increases with the number of propagated diffracted orders

0. / +1. / -1. order

0. / +1. / -1.
+2. / -2.
order

0. / +1. -1. / +2. /

-2. / +3. / -3.
order
Fourier imaging 9

Resolution of Fourier components

object detail
high spatial
frequencies

numerical aperture
resolved
frequencies

object low spatial

point frequencies

image for
object
sum low NA

high spatial
frequencies
decomposition image for
of Fourier high NA
components
object
(sin waves)

Ref: D.Aronstein / J. Bentley

Fourier imaging 10

Fourier filtering

pupil complete open image

▪ Imaging of a crossed grating object
▪ Spatial frequency filtering by a slit:

▪ Case 1:
- pupil open
- Cross grating imaged

▪ Case 2: pupil truncated by slit

- truncation of the pupil by a split
- only one direction of the grating is
resolved
Fourier imaging 11

Oblique illumination in microscopy

▪ Improved resolution by oblique illumination in microscopy

▪ Enhancement only in one direction

centered illumination: oblique illumination :

supported orders in y : 0 , +1 , -1 supported orders in y : 0 , +1 , + 2
no change
in x direction

- 1st order in y

0th order y

1st order in y

2nd order in y
Coherence and imaging 12

Point spread function

▪ Optical system with magnification m

Pupil function P,
Pupil coordinates xp,yp
 
 P(x p , y p ) e
−  x p ( x ' − mx )+ y p ( y ' − my )
ik
g psf ( x, y, x' , y' )  N  z
dx p dy p

▪ PSF is Fourier transform

of the pupil function
(scaled coordinates)
 
g psf ( x, y )  N  Fˆ P (x p , y p )
object image
plane plane
source
point

point
image
distribution
Coherence and imaging 13

Fourier theory of incoherent image formation

▪ Transfer of an extended  

object distribution Iobj(x,y) I ima ( x' , y ' )   I

− −
psf ( x, x' , y, y ' )  I obj ( x, y ) dx dy

 
▪ In the case of shift invariance
(isoplanatism):
I ima ( x' , y ' )   I
− −
psf ( x − x' , y − y ' )  I obj ( x, y ) dx dy

incoherent convolution I ima ( x' , y ' )  I psf ( x, y ) * I obj ( x, y )

▪ Intensities are additive
object image
plane plane
▪ In frequency space: object
intensity image
- product of spectra intensity

- linear transfer theory

- spectrum of the psf works as
low pass filter onto the object
spectrum
- Optical transfer function
H otf (vx , v y )  FT I PSF ( x, y ) single
psf

I image (vx , v y )  H otf (vx , v y )  I obj (vx , v y )

Coherence and imaging 14

Fourier theory of coherent image formation

▪ Transfer of an extended
object distribution Eobj(x,y) 𝐸𝑖𝑚𝑎 (𝑥′, 𝑦′) = න𝐴𝑝𝑠𝑓 𝑥, 𝑦, 𝑥′, 𝑦′ ⋅ 𝐸(𝑥, 𝑦)𝑑𝑥𝑑𝑦

▪ In the case of shift invariance

𝐸𝑖𝑚𝑎 (𝑥′, 𝑦′) = න𝐴𝑝𝑠𝑓 𝑥 − 𝑥′, 𝑦 − 𝑦′ ⋅ 𝐸𝑜𝑏𝑗 (𝑥, 𝑦)𝑑𝑥𝑑𝑦
(isoplanasie):
coherent convolution of fields
𝐸𝑖𝑚𝑎 (𝑥′, 𝑦′) = 𝐴𝑝𝑠𝑓 𝑥, 𝑦 ∗ 𝐸𝑜𝑏𝑗 (𝑥, 𝑦)
▪ Complex fields additive
2
▪ In frequency space: 𝐼𝑖𝑚𝑎 (𝑥′, 𝑦′) = 𝐴𝑝𝑠𝑓 𝑥, 𝑦 ∗ 𝐸𝑜𝑏𝑗 𝑥, 𝑦
- product of spectra
object
- linear transfer theory with fields plane image
plane
- spectrum of the psf works as
low pass filter onto the object
image
spectrum amplitude
distribution
- Coherent optical transfer object
amplitude
function distribution

𝐻𝑐𝑡𝑓 (𝑣𝑥 , 𝑣𝑦 ) = 𝐹𝑇 𝐴𝑝𝑠𝑓 (𝑥, 𝑦) single point

image

𝐸𝑖𝑚𝑎 (𝑣𝑥 , 𝑣𝑦 ) = 𝐻𝑐𝑡𝑓 (𝑣𝑥 , 𝑣𝑦 ) ⋅ 𝐸𝑜𝑏𝑗 (𝑣𝑥 , 𝑣𝑦 )

Coherence and imaging 15

Fourier theory of image formation

Coherent Imaging Incoherent Imaging

Fourier Fourier object

object
object transform object transform
amplitude intensity
amplitude intensity
spectrum spectrum
U(x,y) I(x,y)
u(vx,vy) I(vx,vy)

convolution product convolution produkt

PSF Fourier coherent squared PSF, Fourier optical

amplitude- transform transfer intensity- transform transfer
response function response function
Hpsf (xp,yp) hCTF (vx,vy) Ipsf (xp,yp) HOTF (vx,vy)

result result result result

Fourier Fourier image

image
image transform image transform
amplitude intensity
amplitude intensity
spectrum spectrum
U'(x',y') I'(x',y')
u'(v'x,v'y) I'(vx',vy')
Coherence and imaging 16

Comparison coherent – incoherent image formation

object incoherent coherent

bars resolved bars not resolved bars resolved bars not resolved

1 1
1 1 1

0.9 0.9
0.9 0.9 0.9

0.8 0.8
0.8 0.8 0.8

0.7 0.7
0.7 0.7 0.7

0.6 0.6
0.6 0.6 0.6

0.5 0.5 0.5 0.5

0.5

0.4 0.4 0.4 0.4

0.4

0.3 0.3 0.3 0.3

0.3

0.2 0.2 0.2 0.2

0.2

0.1 0.1 0.1 0.1

0.1

0 0 0 0
0
-0.05 0 0.05 -0.05 0 0.05 -0.05 0 0.05 -0.05 0 0.05
-0.05 0 0.05

1
1 1 1 1

0.9
0.9 0.9 0.9 0.9

0.8 0.8 0.8 0.8 0.8

0.7 0.7 0.7 0.7 0.7

0.6 0.6 0.6 0.6 0.6

0.5 0.5 0.5 0.5 0.5

0.4 0.4 0.4 0.4 0.4

0.3 0.3 0.3 0.3 0.3

0.2 0.2
0.2 0.2 0.2

0.1 0.1 0.1

0.1 0.1

0 0 0
0 0
-0.05 0 0.05 -0.05 0 0.05 -0.05 0 0.05
-0.05 0 0.05 -0.05 0 0.05
Coherence and imaging 17

Comparison coherent – incoherent image formation

▪ Incoherent image:
homogeneous areas, good similarity between object
and image, high fidelity

▪ Coherent image:
Granulation of area ranges, diffraction ripple at
edges

incoherent coherent
incoherent

coherent
Coherence and imaging 18

Partially coherent imaging – Köhler illumination

Simulation of partially coherent illumination:

▪ Finite size of light source
▪ Every point in light source is considered to emit independent (incoherent)
▪ Off-axis point in light source plane generates an inclined plane wave in the object
▪ Angular spectrum illumination of the object describes partial coherence
▪ Intensity in image plane:

𝐼 𝑥 = ම 𝑒 2𝜋𝑖𝜈𝑠 (𝑥1 −𝑥2 ) ⋅ 𝑆(𝜈𝑠 ) 2 ⋅ ℎ 𝑥 − 𝑥1 ⋅ ℎ∗ 𝑥 − 𝑥2 ⋅ 𝑇 𝑥1 ⋅ 𝑇 ∗ 𝑥2 d𝑥1 d𝑥2 d𝜈𝑠

light object pupil image

source plane f f plane f f plane
f f

s

s() U0(x)
T(x) Uh(x)
1 (x)
s
u()
T(x) I(x)
h()
Coherence and imaging 19

Pupil illumination pattern

Coherent Disk  = 0.5 Disk  = 0.8

▪ Variation of the pupil illumination

▪ Enhancement of resolution
▪ Improvement of contrast
▪ Object specific optimization

Off Axis Annular Annular

Dipole Rotated Dipole 6 -Channel

Ref: W. Singer
Phase imaging 20

Zernike phase contrast

▪ Pure phase object is not visible 𝑃(𝑥) = 𝐵(𝑥) ⋅ 𝑒 𝑖Φ(𝑥)

▪ Approximation small phase 𝐸(𝑥) = 1 + 𝑖 ⋅ Φ(𝑥)

▪ Pupil modified: 0th order damped by factor a
𝐸′(𝑥′) = 𝑖𝑎 + 𝑖 ⋅ Φ(𝑥′)
and phase rotated by 90°

▪ Approximated image intensity 𝐼′ 𝑥 ′ = 𝑎2 + 𝑎 ⋅ Φ(𝑥′)

ring shaped
stop phase image
condenser object objective Bertrand
lens plate lens

0th order
Phase imaging 21

Comparison bright field vs. phase contrast

▪ Phase contrast methods:

Making phase object visible

sample 1 sample 2 sample 3

bright
field

phase
contrast
image
Imaging with ZEMAX 22

Overview

Possible options in Zemax:

▪ Convolution of image with PSF
1. geometrical
2. with diffraction
▪ Geometrical raytrace analysis
1. simple geometrical shapes (IMA-files)
2. bitmaps
▪ Diffraction imaging:
1. partially coherent
2. extended with variable PSF
▪ Structure of options in Zemax not clear
▪ Redundance
▪ Field definition and size scaling not good
▪ Numerical conditions and algorithms partially unclear
Imaging with ZEMAX 23

Overview

Field size definitions

▪ Total field size in data (angle or length)

▪ Selected field index
▪ Relative size of structure in the total field
▪ Shown part of the field
y
▪ Not completely consistent selected field (index)
field heigth
in the different imaging tools

plotted image size

/ pixel x Npix
relative field size
of object structure

real maximum size

of the field
Imaging with ZEMAX 24

Image simulation

▪ Field height: size of object in the specific coordinates of the system

- zero padding included (not: size = diameter)
- image size shown is product of pixel number x pixel size
- can be full field or center of local extracted part of the field
▪ PSF-X/Y points: number of field points to incorporate the changes of the PSF,
interpolation between this
coarse grid
▪ Object: bitmap
▪ PSF: geometrical or diffraction
Imaging with ZEMAX 25

Geometric image analysis

object image

7x7 pixel IMA file Spot diagram

10 000 raytraces
From random position inside object pixel
To random position in entrance pupil

Ref.: M. Eßlinger
Imaging with ZEMAX 26

Geometric image analysis

Geometrical imaging by raytrace

▪ Binary IMA-files with geometrical shapes
▪ Choice of:
- field size
- image size,
- wavelengths
- number of rays
▪ Interpolation possible
Imaging with ZEMAX 27

Geometric image analysis

Geometrical imaging by raytrace

of bitmaps
▪ Extension of 1st option:
can be calculated at any surface
▪ If full field is used, this
corresponds to a footprint with
all rays
▪ Example: light distribution
in pupil, at last surface, in image
Imaging with ZEMAX 28

Geometric bitmap image analysis

1 ray per pixel 10 rays per pixel

100 rays per pixel 1000 rays per pixel

Ref.: M. Eßlinger
Imaging with ZEMAX 29

Partially coherent image analysis

▪ Different types of partially coherent model algorithms possible

▪ Only IMA-Files can be used as objects
▪ a describes the coherence factor (relative pupil filling)
▪ Very limited source distributions
▪ Control and algorithms not clear
Imaging with ZEMAX 30

Extended diffraction image analysis

▪ Classical convolution of PSF

with pixels of IMA-File
▪ Coherent and incoherent
model possible
▪ PSF may vary over field
position
Imaging with ZEMAX 31

Imaging objects

▪ IMA (Image file)

- Illumination brightness in each point of the object
- Zemax provides basic shapes like the letter „F“
- ASCII format with 10 different grey values or binary with 256 grey values

▪ BIM (binary image)

- like IMA, but 64bit (double precision) float values

▪ ZBF (Zemax beam file)

- for sophisticated illumination optics
- many features only available in Premium Version of Zemax

▪ BMP (bmp, jpg or png)

- 3 x 8 bit RGB values ( raytrace with FdC: 656 nm, 587 nm and 486 nm)
- for greyscale detector: raytrace with FdC, averaging on detector plane

Ref.: M. Eßlinger
Imaging with ZEMAX 32

Summary

Object
File type spatial Coherence
variant pupil part.
BMP IMA BIM ZBF conv. raytrace diffraction aberr. aberr. coh. coh. incoh.
Image Simulation X X X
Geometric X X X X X
Geometric Bitmap X X X X X X
Partially Coherent X X X
Extended Diffraction X X X X

Advantages and Disadvantages of Geometric Raytracing

+ Easy to understand
+ Field dependent errors are considered automatically
- Does not include Diffraction Limit
- Requires large number of rays (slow)
- Coherent imaging is difficult

Ref.: M. Eßlinger
Imaging with ZEMAX 33

Summary

Advantages and Disadvantages of Convolution based algorithms

+ Easy to implement Diffraction Limit
+ Fast Fourier Transform based (fast)
+ Possibility to calculate also coherent imaging
- Although diffraction is considered, aberrations are calculated from tracing
geometrical rays (result is not a rigorous wave-optical solution)
- FFT-PSF in systems with pupil-aberration creates wrong results ( Only
Huygens-PSF method works correctly )
- Field dependent errors and spatial variant aberrations
are not trivial to implement (possible with Zemax, but it‘s not always clear
how this is performed)

Ref.: M. Eßlinger