LAB REPORT RUBRIC FOR PHY 645 SEMICONDUCTOR DEVICE FABRICATION LAB)

Name of student
Semester
Title

Criteria Unacceptable Poor Average Excellent

Introduction - The objectives or -The objectives or The objectives or purposes
objectives , relevant purposes of the lab purposes of the lab is of the lab is clearly stated
concept, background is erroneous and stated but some and identified.
information variables irrelevant information is
and keywords are not unclear and All relevant concept,
mentioned or missing -Very few relevant inaccurate. background information
in the report (0) concept, and keywords are clearly
background -Only some explained and concise
information relevant concept, and well summarised
variables and background (5-6)
keywords are information and
explained and keywords are
defined(1- 2) explained and
defined

Or
the relevant
concept,
background
information and
keywords
presented are too
lengthy and
contains many
unnecessary
information
(3-4)
Material Lab materials (tools, Most lab materials All necessary lab All necessary lab
chemical etc) are not (tools, chemical etc) materials (tools, materials (tools, chemical
mentioned or missing are described chemical etc) are etc) are mentioned clearly
in the report (0) inaccurately or mentioned but and accurately.
wrongly contain some Where applicable, all
(1) minor errors or chemicals must be fully
inaccurate described (names,
(2) formulas, concentrations,
quantities)
(3)
Methodology Methodology are not Methodology are Methodology
presented at all in unclear and out of contains summarized Methodology contains
the report order and procedures that clear, summarized procedures
(0) confusing. and correct and concise that clear, correct, concise
contained some with diagram and with diagram and pictures.
major errors pictures. .
Which must include mask
Most lab materials design, fabrication process
(tools, chemical etc) Steps mentioned and MOSFET I- V testing
are described contained some minor Steps are error free and
inaccurately or errors AND MISSING can be replicated
wrongly MINOR (8-9)
(3-4) STEPS but can still be
replicated

(5-7)

Data/Results Most data Most data All required

Required data is not
presented at all in the
report (0)
(quantitative or (quantitative or (quantitative or
qualitative) is qualitative) is qualitative) data is
missing, complete and presented correctly
incomplete, accurate
inaccurate, or The purpose and
has several Contain some the location (step)
defects (e.g unnecessary data {where and when
charts, graphs, and information the data is taken)
or diagrams are is well explained
missing lines Data is organized
or labels or into, tables, Data is organized
wrongly diagrams, graphs into, tables,
presented) (1) and pictures for diagrams, graphs
easy interpretation and pictures for
but contain few easy interpretation
minor errors (4-5)
.
The purpose and
the location
(step) (where and
when) the data is
taken is not well
explained

(2-3)
Discussions Required discussion Analysis of results: Analysis of results:
is not presented at all Analysis of result is  included,  included,
in the report. (0) included but  correct and  correct and
inaccurate and has complete complete
some major errors  follow from  follow from data
(3-4) data
But has some Discussion of the results
minor errors are well supported with
appropriate theoretical
Discussion of the information
results are supported
with theoretical All possible source of
information but has errors/contamination
some minor errors which may affect the
experiments are included
Some possible (8-9)
source of errors
are included
(5-7)

Conclusions Conclusions are not Most of the Only some key All key findings and what
presented in the concluding findings and what you have learned from
report(0) statements are you have learned experiment are well
ambiguous and from the summarized and stated.
wrong experiment are Evaluation whether the
(1) presented objectives of the
Not very well experiment are met
summarized presented
(2-3) (4-5)

Format Fails to follow the Meets some of the Meets most of the Meets all the format
standard format format requirements standard format requirements
requirements (1) requirements (4-5)
(0) (2-3)

Total mark: /42