Edwards Pumps3

PRODUCT CATALOGUE 2016-17
www.edwardsvacuum.com
EDWARDS
OUR MARKETS
Using our experience and expertise, we can provide the best vacuum solutions
for your application needs.
Chemical and Process Industries 7
Display 11
Industrial Vacuum 13
LED 21
Photovoltaic 23
Power Generation 25
R&D 29
Scientific Instruments 35
Semiconductor Processing 39
Steel Degassing 45
Shop online at shop.edwardsvacuum.com Contact our customer service team 3.

EDWARDS
OUR PRODUCTS
Small Pumps and Pumping Systems 49 Medium and Large Oil Sealed Pumps 177
Small Pumps and Pumping Systems 50 ES Rotary Vane Pumps 179
Electrical Data 51 ES Pump and Booster Combinations 187
Small Pumps and Accessories: E2M40 and 80 Oil Sealed Rotary Vane Pumps 194
Frequently Asked Questions 57 E2M175 and 275 Oil Sealed Rotary Vane Pumps 199
Small Pumps: Application and EM Pump and EH Booster Combinations 207
Accessory Information 58 Stokes Microvac Series Oil Sealed
Rotary Piston Pumps 208
Small Dry Pumps 61 Stokes Microvac ESI Series Oil Sealed
nXDS Dry Scroll Pumps 62 Rotary Piston Pumps 214
XDS Scroll Vacuum Pumps 68 MV Series Vertically Oriented
XDD1 Diaphragm Vacuum Pumps 72 Microvac Booster Combinations 220
D-LAB Diaphragm Vacuum Pumps 75 MV Series Oil Sealed Piston Pumps and
Mechanical Booster Combinations 221
Small Oil Sealed Pumps 81 Stokes 1700 Series Mechanical
Booster Combinations 222
E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps 82
RV Oil Sealed Rotary Vane Pumps 86 Dry Pumps and Systems
RV ATEX Oil Sealed Rotary Vane Pumps 94 for Hazardous Applications 231
EM18 and 28 Oil Sealed Rotary Vane Pumps 97
CXS Chemical Dry Pumps 233
EM18 and E2M18 Atex Oil Sealed
CDX Dry Vacuum Pumps 239
Rotary Vane Pumps 103
EDP Chemical Dry Pumps 244
Medium and Large Dry Pumps
and Systems 105 Turbomolecular Pumps 249
Drystar 80 Pump and Booster Package 109 EXT/nEXT Turbo Pumps

iXL Dry Pump Systems 112 nEXT Turbomolecular Pumps 253
GX Dry Pump Systems 115 EXT Turbomolecular Pumps 258
iXH Dry Pump Systems 118 T-Station 75 Turbopumping System 262
GXS Dry Pumps 121 nEXT Turbopumping Station 265
GXS/pXH Dry Pumps 131 Turbo and Active Gauge (TAG) Controller 267
IDX 1000/1300 Dry Pumps 137 TIC Turbo and Instrument Controller 269
EPX High Vacuum Primary Pumps 141 TIC Relay Boxes 272
Mechanical Boosters 147 STP Turbo Pumps

STP Magnetically Levitated Turbomolecular Pumps 275
EH Mechanical Booster Pumps 151 STP Integrated Controller Pumps 278
pXH Mechanical Booster Pumps 158 STP Ultra High Vacuum Pumps 293
Stokes 6” Series Mechanical Booster Pumps 160 STP High Throughput pumps 300
HV8000 Mechanical Booster Pump 169
HV30000/40000 Mechanical Booster Pumps 173
4.
Oil Vapour Diffusion Pumps 313 IPVMK Manual Operation In‑line Isolation Valves 405
PVPK Pneumatic Operation Right
HT Diffusion Pumps 316
Angle Isolation Valves 407
Vapour Booster Pumps 323
IPVPK Pneumatic Operation In-Line Isolation Valves 410
Vapour Pumps for Scientific
PVEK Solenoid Operation Right
Instruments and R&D Applications 327
Liquid Ring Pumps for the Power Industry 333 IPVEK Solenoid Operation In-Line Isolation Valves 416
LCPVEK Solenoid Operation Isolation V alves 419
Liquid Ring Pumps for The Power Industry 334 BRV Backing/Roughing Valves 421
SIPVP Soft-Start Isolation Valves 423
UHV Pumps 341 BGV Manual Gate Valves 426
Gamma ion Pumps 342 BGV MK2 Pneumatic Gate Valves 429
Combined Titanium Sublimation Pumping (TSP) GV Manual and Pneumatic Gate Valves 434
and Non-Evaporable Getter (NEG) 345 QSB Quarter Swing Butterfly Valves 438
Digitel™ ion Pump Controllers 349 AV5A Air Admittance Valve With Couplings 441
AV10K Air Admittance Valves 443
Vacuum Instruments 353 IPVA10EK Air Admit Valve NW10 445
LV10K Leak Valve NW10 Flanges 447
Vacuum Measurement and Control Systems 354
Electropneumatic Control Valves 449
APG100 Active Pirani Vacuum Gauge 358
Vacuum Components and Flange Fittings 451
APGX-H Active Linear Convection Gauge 360
Cord and Tubing 487
ATC Active Thermocouple Gauge 362
ASG2 Active Strain Gauge 365
Lubricants and Sealants 489
AIM Active Inverted Magnetron Gauge 367
WRG Active Wide Range Gauge 370 Oils, Fluids, Sealants and Greases 490
AIGX Active Ion Gauge 373 Mechanical Pump Oils 491
nAPG Active Pirani Gauge 376 Mechanical Pump Oil selection chart 493
nAIM Active Inverted Magnetron 378 Vapour Pump Fluids 495
nWRG Wide Range Gauge 380 Edwards Silicone Fluids 496
CG16K Dial Gauge 382 Vapour Pump Fluid Selection Chart 498
IS16K Vacuum Interlock Switch 384 Greases and Waxes 499
VS16K Adjustable Vacuum Switch 386
TIC Instrument Controller 388 Exhaust Gas Management 501
Profibus Communications Module 390 Exhaust Management for Semiconductor Processes 502
ADC Active Digital Controller 392 Product Selection Guide 504
GasCheck G3 394
Service 507
Vacuum Fittings and Valves 397
Global Support from Edwards 510
Speedivalve 399 Guide to Pump Selection and Pipe Installation 511
IBV Series Vacuum Ball Valves 401 Conversions 515
PVMK Manual Operation Right Material Safety Data Sheets 516
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6.
CHEMICAL AND PROCESS INDUSTRIES
MORE THAN PUMPS, COMPLETE VACUUM SOLUTIONS
Chemical and Process Industries 8

Pharmaceuticals 10
Speciality and Fine Chemicals 10
Petrochemicals 10
Chemical &
Shop online at shop.edwardsvacuum.com Contact our customer service team Process Industries 7.
CHEMICAL AND PROCESS INDUSTRIES
Many chemical processing and manufacturing applications require vacuum, for a wide variety of purposes and
benefits. Vacuum pumping systems need to handle organic solvents and compounds in a reliable and safe way
while ensuring control and reduction of environmental pollution and cost of ownership.
Our expertise in chemical processes and applications has allowed us to design rugged, non-contacting dry
mechanisms able to pump a comprehensive range of organic and inorganic materials, flammables and corrosives,
with excellent liquid and solids handling capabilities, ensuring high reliability in every condition. Our dry pumps are
designed to minimise maintenance interventions and to lower utilities consumptions for a low cost of ownership.
Pumping Technology
Mechanical Boosters
Rotary Piston Pumps

Chemical Dry Pumps
Rotary Vane Pumps
Liquid Ring Pumps
Steam Ejectors
Normal Distillation ● ● ○ ○ ● ●
Short Path Distillation ● ● ○ ○ ●
Molecular Distillation ● ● ○ ○ ○ ●
Reactor Service ● ● ○ ● ○
Central Vacuum (flammables and corrosives) ● ● ●
Fatty Acid Deodorisation, Biofuels ● ● ● ●
Drying, Evaporation, Crystallisation, Concentration ● ● ○ ○ ○ ○
Gas Recovery/Recirculation ● ●
Degassing ○ ○ ○ ● ○ ○
Key Applications
Absorption, Adsorption, Desorption ● ● ●

Pervaporation ● ● ●
Solvent Recovery ● ● ○
Isocyanates Production ● ● ○ ● ●
Impregnation ● ● ● ● ●
Polymers and Plastics Production ● ● ○ ○ ● ●
Paints, Pigments, Coatings and Ink Production ● ● ○ ● ○ ○
Soaps/ Detergents Production ● ● ○ ●
Ethylene Oxide Sterilisation ● ● ●
Oil Treatment Plants ● ● ● ○ ○ ○
Dewatering and Filtration ○ ●
Flammable and Corrosive Gases ● ● ○ ● ●
Lowest Cost of Ownership (Typically) ● Preferred Technology or Widespread Use

High Cost of Ownership (Typically) ○ Some Applications
Highest Cost of Ownership (Typically)
Chemical &
8. Process Industries
Recommended Technology: Benefits:
CXS Dry Screw Vacuum Pumps • Robust and environmentally friendly – clean, reliable
CXS is Edwards most advanced chemical dry pump dry vacuum solutions
featuring new tapered-screw technology for exceptional • Low cost of ownership – low maintenance and
energy efficiency and performance. utilities costs
• Not just pumps, complete solutions –
• Low installation costs – integral controller and safety
fully engineered vacuum systems
systems for ‘Plug and Pump’, flexible operation
• Process repeatability and traceability –
• Robust and reliable – cutting edge screw technology
programmable vacuum control and storage of
for corrosion-free operation and robust liquid and
pump parameters and events
solids handling during process upsets
-- High reliability and productivity –
• Environmentally friendly – smooth, quiet running,
high up-time solutions
<64 dB(A), no effluent generation and low utilities
-- No cross contamination – clean ability of swept
consumption
volume with automatic solvent flush routines
For non-hazardous applications we can offer our GXS • Configured for your process – optimum
range of pumps incorporating the same patented solution for your application
tapered-screw technology used in CXS. • Low carbon footprint and cost of ownership
– energy saving technology
CDX Chemical Dry Pumps • High up-time and low maintenance – robust,
The CDX1000 pump is optimised for processes requiring corrosion free operation
large pumping speeds, delivering a 900 m3h-1 pumping • Industry proven vacuum solutions –
speed and an ultimate vacuum of 0.005 mbar. specifically designed for large, continuous
petrochemical processes
• Industry proven, tried and tested – specifically
-- Peace of mind – tolerant to process malfunctions
designed for larger, continuous chemical processes
-- Environmental friendly – reduced maintenance
• Peace of mind in continuous processes – tolerant to
cost and low environmental impact
process malfunctions
• High uptime – designed for in situ preventive
maintenance
EDP Chemical Dry Pumps

In the 1980s, Edwards successfully pioneered the use of
environmentally friendly dry vacuum pumps with the EDP.
• Industry proven, tried and tested – specifically
designed for chemical applications
• Designed and tested for safety and reliability –
several built-in controls and protection
• Low cost of ownership – easy maintenance,
low utilities consumption
Chemical &
Shop online at shop.edwardsvacuum.com Contact our customer service team Process Industries 9.
Pharmaceuticals
Our first dry pump was installed in a pharmaceutical application in 1988 and it was never replaced. We have vast
experience in the pharmaceutical sector, typically covering the production of active pharmaceutical ingredients
(APIs). Our latest Dry Pump range, the CXS, is the most appropriate answer to pharmaceutical customers needs.
The advanced tapered screw technology and the on-board controller with extensive communication and
automated control capabilities will deliver:
Applications:
• Distillation
• Reactor Service
• House/Central Vacuum System
• Solvent Recovery
• API Production
• Ethylene Oxide Sterilisation
• Dewatering and Filtration
• Flammable and Corrosive Gases
Speciality and Fine Chemicals

Our application specialists have a thorough knowledge and understanding of customer processes in the specialty
and fine chemicals industries. Our combination of applications expertise, product portfolio, engineering strength and
global presence puts us in a unique position to be able to work with you to design the best solution for your process.
Applications:
• Normal Distillation • Pervaporation

• Short Path Distillation • Solvent Recovery
• Molecular Distillation • Isocyanates Production
• Reactor Service • Impregnation
• Central Vacuum (flammables and corrosives) • Polymers and Plastics Production
• Fatty Acid Deodorisation • Paints, Pigments, Coating and Ink Production
• Biofuels • Soaps/Detergents Production
• Drying, Evaporation, Crystallisation, Concentration • Ethylene Oxide Sterilisation
• Degassing • Oil Treatment Plants
• Absorption, Adsorption, Desorption • Dewatering and Filtration
Petrochemicals
We are world leaders in designing pumps and pumping systems for safe pumping of hazardous inflammable
material. We have worked with industries doing aromatics extraction and production of BTX, (Benzene, Toluene,
Xylene), LAB, (Linear Alkyl Benzene), styrene, polymer, adhesives and MMA (Methyl Meth Acrylate) and provided
customised solutions for their processes.
Applications:
• Distillation
• Reactor Service
• Drying, Evaporation, Concentration
• Degassing
• Absorption, Adsorption, Desorption
• Solvent Recovery
• Polymers and Plastics Production
• Aromatics Production
Chemical &
10. Process Industries
DISPLAY
EXPERIENCE YOU CAN TRUST
Display 12
Shop online at shop.edwardsvacuum.com Contact our customer service team Display 11.
DISPLAY
Display manufacturing processes require vacuum and abatement equipment capable of supporting huge processing
chambers and delivering high gas-flow rates with maximum reliability. Vacuum pumps are needed to pump toxic,
pyrophoric and corrosive gases, and handle a large amount of solid process by-products that are formed in the
manufacturing process chambers. Our technology leadership is clearly demonstrated by our customers who time
and time again select us as their partner of choice.
Our experience in FPD has enabled us to develop solutions which solve customers’ process issues and optimise
productivity. Our extensive range of dry and turbomolecular pumps (TMPs) are designed to maximise substrate
throughput and ultimate zero humidity process condition, while minimising power, footprint and weight. Combined
with our exhaust management systems, our pumps are capable of managing high gas flows and the efficient
abatement of toxic and flammable gases, with long service intervals and the potential to connect multiple chambers
to one tool, for a complete integrated vacuum and abatement solution. The introduction of new innovative designs
of dry pump, including iXH, iXL and iXM, has reduced the number of process pumps required per chamber yet still
delivers high production throughput with low power input there is also a Green Mode for reduced utilities during
idle periods.
Enabling the future demand for higher-resolution, more interactive, ultra-slim and flexible devices challenges us
to develop smarter solutions which will reduce the cost of ownership and improve process uptime. Whatever the
display future holds, you can rest assured we will rise to the challenge and continue to be a key enabler in display
manufacturing processes.
Applications
Touchscreen Lamination
OLED Encapsulation
OLED Evaporation
Coater Developer
Load Lock
Transfer
Implant
PECVD
Etch
PVD
Test
Cell
iXH ○ ○ ○ ○
Dry Pumps
iXL250/500/750 ○ ○ ○ ○ ○ ○ ○
GXS ○ ○
iGX ○
STP-iXR Series ○ ○ ○ ○ ○ ○
Turbo Pumps
STP-iX Series ○ ○ ○ ○ ○ ○ ○ ○ ○
STP-iXA Series ○ ○ ○ ○ ○
STP-iXL/L Series ○
ATLAS ○
Abatement
Systems
SPECTRA A/C ○
NEPTUNE ○
Integrated
EZENITH ○ ○
Solutions
ZENITH SPECTRA ZW2 ○ ○
12. Display
INDUSTRIAL VACUUM
MAXIMISE YOUR PRODUCTIVITY AND PERFORMANCE
Industrial Vacuum 14
Metallurgy 15
Heat Treatment 16
Industrial Coating 17
Industrial Drying 18
Lithium-Ion Battery Manufacturing 19
Shop online at shop.edwardsvacuum.com Contact our customer service team Industrial Vacuum 13.
INDUSTRIAL VACUUM
We encompass a vast range of subsectors and applications within the industrial vacuum market. With our breadth
of experience in the industrial market we understand the challenges that vacuum pumps face with each application
as well as customer key drivers, and are able to recommend the best technology and vacuum solution in each
industrial process. Our approach and our vacuum systems help to make manufacturing cleaner, smarter, more
economical and environmentally friendly.
Benefits:
Applications
• Right solutions for your application – broad product
portfolio and application expertise General Industrial
• Configured to your needs – choice of individual
Vacuum Insulation Panels / Glass

vacuum pumps or customised combinations
Space Simulation Chambers

• Predictable performance – advanced pumping
Cryo Interspace Evacuation
Plasma Cleaning Sterilising
Gas Recovery / Circulation

modelling techniques
Oil / Resin Degassing

• Your reliable partner – close to a century of vacuum
Gas Cylinder Filling
Food Processing
Gas Sterilisation
experience Leak Detection
House Vacuum
STP Turbomolecular Pumps ●
Pumping Technology
GXS Dry Pumps and MAXX Systems ● ●
Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
ES Single Stage and EH Booster Combinations ● ● ● ● ● ● ● ● ●
EM Double Stage and EH Booster Combinations ○ ○
● Recommended technology
○ Conventional technology
14. Industrial Vacuum

Metallurgy
Vacuum metallurgy encompasses all the processes involving the treatment of liquid metallic materials from alloying
(the preparation of a metallic solid solution) to casting (where the liquid alloy solidifies in the desired shape). Melting,
refining and casting processes involve vacuum pumps handling large amounts of dust and debris. We know that
selecting the right pumping mechanism is a critical decision – high reliability is essential, while maintaining a low cost
of ownership. Our engineers will help you select the best system to cope with the challenges of your process.
Benefits:
• High reliability – robust technologies to cope with harsh process challenges
• Variety of offerings to suit your investment – choice of dry and oil sealed pumps
• Increased productivity – low maintenance and high uptime solutions
Applications:
• Vacuum Induction Melting – VIM
• Vacuum Arc Remelting – VAR
• Electroslag Remelting – ESR Applications
• Precision Investment Casting – PIC Metallurgy

• Metal Injection Moulding – MIM
• Sintering Casting Alloying
VIM VAR ESR PIC MIM Sintering
Vapour Booster Pumps ● ● ●
HT Diffusion Pumps ○ ○
Technology
GXS Dry Pumps and MAXX Systems ● ● ● ● ● ●

Pumping
Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○
Mid-range dry pumps are available for small scale or pilot processes
Heat Treatment
Heat treatment encompasses all the processes carried out on the shaped metallic solid to alter the physical and
sometimes chemical properties of the material.
Applications:
• Carbon Vapour Impregnation – CVI
• Low Pressure Carburising – LPC
• Low Pressure Nitriding – LPN
• Nitro Carburising
• Plasma Nitriding – PN
• Welding
• Vacuum Brazing – VB
• Quenching
• Tempering
• Annealing
Benefits:
Applications
• Value for investment – cost-effective rotary
piston and single stage oil sealed pumps Heat Treatment
• Better end product quality – specialised
Reactive Assembling Heat Treatment
solutions for oil-free clean vacuum
• Single source partner – packaged offerings
Nitro Carburising
Plasma Welding
including high vacuum secondary pumps
LPC Acetylene
LPC Propane
Quenching
Tempering
Annealing
EBW
LPN
CVI
PN
VB
STP Turbomolecular Pumps ● ● ● ● ● ●
Pumping Technology
HT Diffusion Pumps ○ ○ ○ ○ ○ ○
GXS Dry Pumps & MAXX Systems ● ● ● ● ● ● ● ●
Microvac Piston Pumps & Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
ES Single Stage & EH Booster Combinations ● ● ●

Industrial Coating
Whether fast evacuation of load-locks is required or high performance process pumping in the high vacuum region,
we have the right range of product technology configured to your needs.
Benefits:
Applications
• Optimum solution for your application –
environmentally friendly dry vacuum technologies or Coating
cost effective oil sealed pumps and combinations
Surface Coating
• Assured and reproducible performance – advanced
modelling techniques for fast load lock and high
Reflective Decorative Coating

vacuum process
Optical Opthalmic Coating

• Higher productivity – advanced communications and
Hard Coating CVD DLC

control technology
Plasma Deposition
Surface Activation
Roll Web Coating
• Low cost of ownership – energy-saving vacuum
Display Coating
Glass Coating
Plasma Spary
technology and minimal planned maintenance
STP Turbomolecular Pumps ● ● ● ● ● ● ● ● ●

Pumping Technology
HT Diffusion Pumps ○ ○ ○ ○ ○ ○ ○ ○ ○
GXS Dry Pumps and MAXX Systems ● ● ● ● ●
Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○
ES Single Stage and EH Booster Combinations ● ● ○ ● ● ○
EM Double Stage and EH Booster Combinations ○ ○
Applications:
Vacuum coating processes involve providing fast pump-down of main loading chambers to a certain degree of
pressure using roughing vacuum pumps combined with high displacement blowers. The following stages involve
providing high vacuum pumping of the chamber with injection of process gases that then have to be pumped out
while ensuring stable and uniform coating on the substrates. There are several coating applications, including:
• Glass coating – glass coating systems for low emissivity processes on glass sheets comprise of large chambers
demanding fast cycle times, high vacuum requirements to yield superior layer uniformity, high throughput and
reduced cost of ownership.
• Display coating – sputtering coating processes for display applications require precision techniques to ensure
ultra-thin layers of metals and Trans Conductive Oxide materials like ITO (indium tin oxide) on display substrates.
Extremely reliable vacuum systems with the ability to manage high gas throughput are demanded for
this application.
• Roll coating – modern roll coating systems used for manufacturing printed electronic circuits on polymer films
and flexible substrates need strong vapour handling capability, and a high ultimate vacuum.
• Optical coating – optical coatings that include reflective, anti-reflective or metallic mirror coatings, using
different processes – thermal deposition, electron beam or sputtering – require stable vacuum systems in a
compact foot print.
• Hard coating – hard coating processes enhance the durability of the components by strengthening them with
tough materials that need to be deposited in a high vacuum atmosphere. This requires reliable vacuum systems
that ensure a long lifetime of the components.
Industrial Drying
As experts in vacuum technology, Edwards has an in-depth understanding of vacuum drying processes and
the importance of correct pump selection and sizing, as well as the foreline and exhaust design to ensure the
evaporated liquid is efficiently managed and reused if required. With its broad portfolio of vacuum pumps, utilising
a variety of different mechanical technologies, Edwards has all the tools necessary to optimize your drying system
for performance, cost and reliability.
Benefits:
• Higher reliability – robust dry technology to cope with high vapour load
• Variety of offerings to suit your investment – choice between dry and oil sealed technology,
• Repeatable process performances for delicate pharmaceutical compounds – programmable vacuum control
Applications:
Vacuum drying uses pressure reduction to remove moisture, typically water or organic solvent, from a material or
component. Liquid/moisture is removed by being ‘boiled’ or ‘sublimed’ while under a vacuum, therefore avoiding
the need to apply high temperatures and protecting heat sensitive materials. The process can often create a high
vapour load particularly in the early stages of the cycle. Examples of drying applications include:
• Book & leather drying

Applications
• Dehydration of insulating oils
• Drying of gas distribution pipelines Drying
• Drying of lithium-ion battery & super capacitor
electrodes
Refrigeration / Air Conditioning Drying
• Freeze drying (lypholisation) of food, pharmaceutical
Transformer Drying Vapour Phase

products, etc
• Inter-space pumping of vacuum insulated tanks
Automotive Drying / Filling
Lithium Ion Battery Drying

• Removing of water from concentrates of yeast
extracts, gelatins, etc in food products
Transformer Drying
Capacitor Drying
• Removing of moisture from insulation in
Pipeline Drying
Bushing Filling
Freeze Drying
transformers, capacitors and cables

Pumping Technology
GXS Dry Pumps and MAXX Systems ● ● ● ● ● ●
Microvac Piston Pumps and Booster Combinations ○ ○
ES Single Stage and EH Booster Combinations ● ● ● ○
EM Double Stage and EH booster Combinations ○

Lithium-Ion Battery Manufacturing
Lithium-Ion batteries are driving the world’s green agenda, and high quality reliable vacuum is a critical element
in their production. We have a range of pumps suitable for all battery manufacturing needs, supported by a global
service and support network.
Benefits: Applications
• Reduced maintenance costs and low Lithium-Ion and Super Capacity
environmental impact – dry pumps Battery Manufacturing
• Lower investment cost – oil sealed rotary
Lithium-Ion Battery Glovebox Systems

vane pumps
• Advanced control capability – intelligent pumps
• Safe operation – ATEX certified versions
Electrode Drying Process

Applications:
Electrolyte Degassing
• Assembly, filling & cell formation
Packaging Process
• Electrode degassing
Cell Formation
• Electrode drying
Mid-range Dry Pumps ● ● ● ●

Pumping Technology
GXS Dry Pumps ● ● ● ●
nXDS Dry Scroll Pumps ●
ES Single Stage Oil Sealed Pumps ○ ○ ○
RV Oil Sealed Pumps ○
Hazardous duty pumps available on request
Recommended Technology: EH Boosters
• Peace of mind – industry proven with large
Backing Pumps
installed base
• Clean – lubricant-free within the vacuum envelope • Faster pump down time – increased productivity
andd hermetically sealed to prevent cross • No need for pressure switches, bypass lines or variable
contamination frequency drives – simple installation
• User-friendly – no oil changes and disposal, simple • Proven shaft seal design – robust operation even for
routine maintenance, tip-seal change done in harsh duties
minutes with no special tools, ease of incorporating
pump into approved systems, safe product HV Boosters
• Robust – large water vapour handling capacity, no • Suitable for continuous operation over wide pressure
atmosphere to vacuum shaft seal, isolated bearings ranges on heavy duty large scale applications – stable
to prevent process attack, run cooler and last longer process for consistent output
• High performance water cooled mechanical shaft
GXS Dry Screw Pumps seal, large diameter shaft and large helical gears –
• Reduced installation costs – easy integration with no unplanned downtime
other systems with intelligent controls • Optional water cooled exhaust gas after cooler, shaft
• Safe operation, consistent output – automated seal safety purge, temperature monitoring and VFD
control of your process available – easy integration and safe
• Increased reliability and productivity – ability
to handle harsh processes with longer intervals STP Turbomolecular Pumps
between service • Quicker pump down to base pressure –
• Small carbon footprint – low power and utilities usage increased productivity
• Compact size – saves space and makes for
MAXX Modules easy installation
• The GXS pump range is complemented by the new • Low power and utilities consumption – low cost
generation of pXH large mechanical boosters for an of ownership
integrated flexible modular skid design • Maintenance free – economical
• Variety of pump combinations ensure optimised
configurations – delivering the performance required Stokes Microvac Piston Pumps
by your processes • Low rotational speed enables longest pump life cycle –
• Easy to upgrade – whenever you need more capacity value for investment
• Robust simple mechanism for high reliability and ease
Stokes Microvac Piston Pumps of rebuild – easy maintenance on site
• Low rotational speed enables longest pump life cycle • Proven, tested; peace of mind – over 80 years of
– value for investment proven time-tested performance
• Robust simple mechanism for high reliability and
ease of rebuild – easy maintenance on site Vapour Boosters and HT Diffusion Pumps
• Space saving design which saves up to 50% of • High throughput pumping – increased productivity
valuable floor space – small footprint • High backing line pressure – stable performance
• Low oil back streaming – better quality end product
ES Oil Sealed Pumps • Clean process – stainless steel body
• Stable vacuum performance – improved product quality
• In-built ISO and BSP connections – ease of integration Drystar GV80 Pumps
• Easy oil and filter changes – easy to maintain • Low capital costs and minimal maintenance –
value for investment
EM Oil Sealed Pumps • Suitable for harsh process conditions –
• Process performance – higher ultimate vacuum than reliable and robust
comparable technology • Optimised vapour handling and recovery –
• Effective lubrication even under high gas loads – increased productivity
reliable and stable process
• Oil and air suck-back protection –
no contamination of process
• Industry proven with large install base –
peace of mind

LED
CLEAN SOLUTIONS FOR A BRIGHT FUTURE
LED 22
Shop online at shop.edwardsvacuum.com Contact our customer service team LED 21.
LED
The exploding demand for LEDs is driven by their dramatic advantages relative to other lighting technologies.
Compared to incandescent bulbs, for example, they offer lifetimes as much as 10 times longer and consume less than
a quarter of the energy. The lighting possibilities are endless, with smaller sizes, faster switching and improved output,
LED manufacturers are challenged with meeting high process demands and yet reduce manufacturing costs.
Shorter wavelength LEDs (green-blue) use nitride-based materials while the longer wavelengths (red-yellow)
use phosphide-based materials. Each material poses unique process challenges in both the vacuum pump and
abatement selection, as many of the materials used are particularly noxious or dangerous to handle.
Our vast experience gained in the semiconductor field puts us in a unique position to support LED manufacturers in
the adoption of more silicon wafer processing technology, such as Etch, PECVD and ICP chip production into their
process. Our vacuum and abatement products have the capability to simultaneously handle high hydrogen and
ammonia flow rates throughout the entire critical process, with high levels of safety and efficiency.
LED manufacturing processes typically use MOCVD with high flows of light hydrogen and highly corrosive ammonia
gases. The advanced technology incorporated in our product ranges has been optimised to meet these challenges.
Our iH, iXH and iXL dry pump ranges each deliver increased powder handling capability and high resistance to
corrosive gases, with reduced footprint and weight. And the latest range of STP maglev turbomolecular pumps are
the “all-in-one” compact solution with low power for large volume, high-flow applications.
Abatement products include our award winning Spectra-G 3000 which is designed to handle high gas capacity
in GaN applications, allowing up to six MOCVD tools to be connected. For ease of use Atlas™ is proven in GaAs
applications with high flows of hydrogen and incorporates Alzeta™ inward-fired combustion technology to achieve
significantly reduced cost of ownership. All our abatement systems reduce the impact of your operations on the
environment and lower operating costs.
As the technology for LED manufacturing develops so will Edwards; we are a key enabler and our products have
played a significant part in our customers’ success. Our objective is to deliver real benefits to our customers, which
in turn will make the world cleaner and brighter for generations to come. Our applications experts can advise you
at all stages of the LED manufacturing process on the most appropriate products to meet your needs.
Applications
PVD Process
Strip/Ashing
Lithography
Metrology
Load Lock
PSS Etch
Transfer
ICP Etch
MOCVD
PECVD
iXH Series ○ ○ ○ ○
iGX Series ○ ○
Dry Pumps
iXL Series ○ ○ ○ ○ ○ ○
EPX Series ○ ○ ○ ○ ○
GXS Series ○
iH Series ○ ○ ○ ○
STP-iXR Series ○ ○ ○ ○ ○
Turbomolecu-
lar Pumps
STP-iX Series ○ ○ ○ ○ ○
STP-iXA Series ○ ○ ○
ATLAS Series ○ ○ ○ ○
Abatement
Systems
SPECTRA Series ○
GRC Series ○
22. LED
PHOTOVOLTAIC
PROVING YOUR OPERATIONAL EFFICIENCY
Photovoltaic 24
Shop online at shop.edwardsvacuum.com Contact our customer service team Photovoltaic 23.
Photovoltaic
PHOTOVOLTAIC
The demand for environmentally friendly renewable energy sources is increasing as we look for ways to reduce
our dependence on fossil fuels, without damaging the environment for future generations. One of the greenest
solutions is Solar Power. Manufacturers use various processes such as crystalline silicon, CdTe, CIGS or Silicon Thin Film
Technology to produce photovoltaic cells which will capture sunlight and convert it into energy. The last ten years has
seen significant technology developments to make solar energy economically competitive, with improved efficiencies
and lower manufacturing costs.
Edwards is leading the way when it comes to vacuum and abatement for solar applications. We have leveraged our
product capabilities and application expertise from the semiconductor field, and either transferred or developed
our most advanced technology for photovoltaic manufacturing processes. Our ability to diagnose issues and
develop innovative and practical solutions by supporting worldwide leading solar OEMs has given real end user
benefits, in quality, product yield and cost.
We are the only manufacturer that can supply photovoltaic manufacturers’ worldwide with the complete range
of dry vacuum pumps, turbomolecular pumps (TMPs) and exhaust management systems for all processes.
Either as individual product ranges or fully integrated pump and abatement solutions, our process knowledge
and technical expertise within the photovoltaic industry are key factors in helping you maintain delivery and
quality requirements.
Our dry pump ranges include iH, GXS, iXL, iXH and STP turbomolecuar pumps, each optimised to meet customer
specific applications, with exceptional process gas handling and temperature management for maximum reliability.
Green Mode technology will enable reduced power consumption, achieving low running costs and reduced
environmental impact.
Abatement products including Atlas series and Spectra ZW series burn type scrubbers are widely used within
the photovoltaic manufacturing processes, for high reliability with high flows of hydrogen and extremely toxic-
pyrophoric gases. This enables manufacturers to reduce their impact on the environment and at the same time
reduce operating costs
The award winning EZENITH integrates vacuum pumping and abatement into a single system to provide
manufacturers with a highly efficient, low cost-of-ownership solution that meets the latest manufacturing and
environmental requirements. EZENITH is easy to install and use, and it saves valuable fab floor space. It features
Green Mode, which provides significant reductions in energy consumption, resulting in reduced environmental
impact and additional cost-of-ownership savings.
Our high market share, application expertise and strong global service network is testimonial to our success and
leadership in photovoltaic manufacturing processes. We have developed cutting-edge technologies in partnership
with our customers which have enabled a faster evolving solar industry.
Applications PVD Implant

Load Lock Transfer Process Laminator INGOT Etch MOCVD PECVD LPCVD ALD
Source
iXH Series ○ ○ ○ ○
iGX Series ○ ○
Dry Pumps
iXL Series ○ ○ ○
EPX Series ○ ○ ○
GXS Series ○ ○
iH Series ○ ○ ○
STP-iXR Series ○ ○ ○
Turbomolecu-
lar Pumps
STP-iX Series ○ ○ ○ ○ ○ ○
STP-iXA Series ○ ○ ○ ○ ○ ○
ATLAS Series ○ ○ ○ ○
Abatement
Systems
SPECTRA Series ○ ○
GRC Series ○ ○
24. Photovoltaic
POWER GENERATION
VACUUM SOLUTIONS FOR POWER PLANT
Power Generation 26
Condenser Air Extraction 26
Flue Gas Desulphurisation 26
Fly Ash Handling 27
Waterbox Priming 27
Shop online at shop.edwardsvacuum.com Contact our customer service team Power Generation 25.
POWER GENERATION
By working with power sector engineers and operators, we are able to push the limits of vacuum system design,
creating solutions to meet the demands of increasingly challenging applications.
Benefits:
Applications
• Optimum solution for your requirements – standard packages configured to suit you
Condenser Air Extraction

• Reliability – compliance to global and industry standards
Vacuum Filtration (FGD)

• Peace of mind – full factory acceptance test including saturated air test capability
Waterbox Priming
Fly Ash Handling

• Your local partner of choice – local applications expertise and service support
Condenser Air Extraction

In order to increase the availability, operational SHR Series 1 Stage Liquid Ring Pump ● ● ●
performance and reliability of turbine condenser
Pumping Technology
SHR Series 2 Stage Liquid Ring Pump ●
vacuum plants, the dynamic relationship between the
vacuum pumping system, condenser performance and EHR Series 1 Stage Liquid Ring Pump ●
turbine back pressure is an important factor in the
EHR Series 2 Stage Liquid Ring Pump ●
design requirements and needs careful appraisal when
considering overall plant performance. LR1A Series 1 Stage Liquid Ring Pump ● ● ●
The air load from the turbine condenser system is LR1B Series 1 Stage Liquid Ring Pump ●
saturated with vapour; liquid ring pumps are ideal

● Recommended Technology
for handling high vapour loads, as much of the
vapour will be condensed at the pump suction (by
the direct condensing action of the inlet water spray or contact with the pump seal water). This condensing
reduces the total volume to be handled by the pump, which is a significant advantage when compared to other
pumping technologies.
Benefits:
• Standard packages for holding and hogging.

• Designed to meet HEI specifications.
• Local service and site commissioning support.
Flue Gas Desulphurisation

Flue Gas Desulphurisation systems are a common feature on modern coal-fired power plants; a by-product of the
process is gypsum which is produced at the outlet of a scrubber. Liquid ring pumps are used to provide vacuum on
the dewatering of the gypsum on a vacuum filter, usually belt or rotary drum type. The liquid ring pump, typically a
large single-stage design, is selected based upon the surface area of the vacuum filter.
26. Power Generation

Flu Ash Handling
Vacuum conveying of fly ash recovered by the Electrostatic Precipitator, ash is collected in hoppers at the base of
the ESP and is then conveyed to a storage facility or loading silo. Liquid ring vacuum pumps are tolerant to ash carry
over and the single stage pump construction ensures optimum power at pressures required for effective conveying.
Benefits:
• Pump capacities up to 5000 m3h-1

• Corrosion/erosion resistant materials available
• Systemised to meet project requirements
• Once through or partial recirculation seal water
Waterbox Priming
The ability to handle wet gases without any detrimental effect makes liquid ring vacuum pumps ideal for condenser
waterbox priming applications. Waterbox priming serves two functions to create a siphon effect reducing the
amount of power required to start the main cooling water pumps; and to ensure maximum condenser cooling
efficiency by preventing accumulation of air in the upper parts of the cooling tube bundle.
Benefits:
• 200 and 400 m3h-1 pump capacity options

• Modular package design enables customised scope of supply
• Duplex
• Simplex
• Vacuum receiver
Shop online at shop.edwardsvacuum.com Contact our customer service team Power Generation 27.
28.
R&D
THINK VACUUM, THINK EDWARDS
R&D 30
Universities & Private Laboratories 31
High Energy Physics 31
Space Simulation 33
Shop online at shop.edwardsvacuum.com Contact our customer service team R&D 29.
R&D
We offer a broad range of vacuum products to meet the challenges of Applications Universities/ Others
today’s research and development laboratories. Collaboration with major Private Labs
scientific instrument manufacturers, universities and major research
Beamlines & End Stations

institutes ensures a deep understanding of research and the role that
vacuum plays. Our focus on technological advancement in vacuum as well
Accelerators/LINAC
Gravitational Wave
Nanotech Facilities
Space Simulation
as investment in R&D enables us to develop the innovative products that
Chemical Labs
meet your specific application requirements.
Universities
Other Labs
Fusion
Lasers
Rotary vane pumps Single stage ES ○ ○ ○ ○
Two stage E2M (small) ○ ○ ○ ○ ○ ○ ○ ○
RV ○ ○ ○ ○ ○ ○ ○ ○
E2M (medium & large) ○ ○ ○ ○ ○ ○ ○ ○
Mechanical boosters EH/pXH ● ● ●
Small dry pumps Diaphragm pumps DLAB, XDD1 ● ● ● ● ●
Scroll nXDS, XDS ● ● ● ● ● ● ● ● ○ ●
Large dry pumps Multistage roots pumps iXL (clean pumping) ● ● ● ● ● ● ○ ●
& systems
iXM (medium duty) ● ● ● ● ● ● ● ● ●
Claw pumps iXH (harsh duty) ● ● ● ● ● ● ● ●
iGX (light & medium duty) ○ ○ ○ ○ ○ ○ ○ ●
iH (harsh duty) ○ ○ ○ ○ ○ ○ ○ ●
Screw pumps GXS ● ● ● ● ● ● ● ●
CXS ● ● ● ● ● ●
High vacuum primary pumps ePX
Turbomolecular pumps hybrid bearing eXT, nEXT ● ● ● ● ● ● ● ● ○ ●
Magnetic bearing sTP ● ● ● ● ● ● ● ● ●
Pumping stations turbocart ● ● ● ● ● ● ● ● ●
UHV pumps Ion getter pumps ● ● ● ● ● ● ●
Titanium sublimation pumps ● ● ● ● ● ● ●
Non-evaporable getter pumps ● ● ● ● ● ● ●
Oil vapour diffusion pumps Scientific diffusion: Diffstaks ○ ○ ○ ○ ○
Industrial diffusion HT ○ ○ ○ ○
Vapour boosters ○ ○ ○ ○
Vacuum instruments Measurement and control ● ● ● ● ● ● ● ● ● ●
Leak checkers ● ● ● ● ● ● ● ● ● ●
Vacuum hardware Valves ● ● ● ● ● ● ● ● ● ●
Pipeline components ● ● ● ● ● ● ● ● ● ●
Flanges and fittings ● ● ● ● ● ● ● ● ● ●
Lubricants and sealants Oil ○ ○ ○ ○ ○ ○ ○ ●
Grease ○ ○ ○ ○ ○ ○ ○ ●
Exhaust gas management ●
30. R&D
Universities & Private Laboratories
With over 95 years’ experience Edwards has grown to be the market leader in vacuum technology, with solutions
across a broad range of applications. We have developed advanced vacuum system modelling tools to ensure the
optimum pumping system to meet your challenges – whether you are working in a university or in a large privately
funded chemical laboratory.
Universities
Universities include a broad range of activities that require vacuum, which vary depending on discipline and
department. Typical departments that use vacuum include Chemistry, Physics and Materials but this list is not
exhaustive. Although the most common pumps used within universities are small pumps such as RV rotary vane
pumps, nXDS dry scroll pumps and nEXT turbomolecular pumps, in reality any of the products in this catalogue may
be equally applicable for use in the university sector.
Chemical Laboratories
Chemical laboratories are typically using vacuum either to remove substances by evaporation or to stop reactions
from taking place. Typically chemical vapours are involved and so vacuum pumps with good vapour handling
characteristics and ATEX internal classifications are required. Generally the most used pumps in this sector include
RV rotary vane pumps and nXDS dry scroll pumps, but also turbomolecular pumping stations are also used where
low pressures are required.
Other Laboratories
Our vacuum equipment will support a wide spectrum of laboratory activities, ranging from small privately funded
research laboratories to government national laboratories, and like universities can include a broad range of
applications. Any of the products within the Edwards range could be appropriate, but typically RV rotary vane
pumps, nXDS dry scroll pumps and nEXT turbomolecular pumps are the products of choice.
High Energy Physics

We have a deep understanding of high energy physics applications and the critical role that vacuum plays at every
stage. This experience, coupled with class leading products and application know-how, allows us to offer a broad
range of solutions enabling you to push the boundaries of modern physics. From the smallest research facility to
huge particle accelerators, our products and services are enabling education, development and scientific evolution
across the globe.
Synchrotron
A synchrotron is a type of particle accelerator able to produce intense beams of x-rays, infrared or ultraviolet light
which can be as much as 10 billion times brighter than the sun. These beams can then be used to allow scientists to
study samples of any material from metal to bacteria in incredible detail. In order to produce these high intensity
beams with particles that travel at almost the speed of light, there is a need for a vacuum similar to that of
outer space.
Vacuum pump requirements vary depending on whether the pump is used on the linear accelerator, the storage
ring or the beamlines. Our broad range of pumps, with models suitable for all these applications, includes Gamma
TiTan Ion Getter pumps, nEXT turbomolecular pumping stations, STP magnetically levitated turbomolecular pumps
and nXDS dry scroll pumps.
Nuclear Fusion
Nuclear fusion is the process of combining atomic nuclei to produce a new bigger atomic nucleus. When atomic
nuclei combine they release a large amount of energy, giving hope for a new source of power in the future.
Research in this field largely involves attempts to recreate a reaction similar to that occurring in the sun by fusing
two types of hydrogen, deuterium and tritium, to create helium. This requires considerable energy as the gas has to
be heated to very high temperatures, up to 100 million degrees Celsius, causing it to become a plasma.
Nuclear fusion research, to a large extent, involves understanding the behaviour of plasma. One of the major
challenges faced by scientists is the ability to sustain plasma by maintaining the right pressure. Hence the need for
large-scale, effective vacuum systems that ensure ultra-high vacuum in the large reactor vessels/cryogenic system
surrounding the superconducting magnetic field coils, and which can withstand very high temperatures, ionising
radiation and highly magnetic fields.
Gravitational Waves
Gravitational waves are ripples in the curvature of space-time which propagate as a wave, travelling outward from
the source. Detecting these waves would help to confirm the explanation of gravity as predicted by Einstein’s
theory of general relativity. These waves propagate as vibrations in space and travel at the speed of light, which
presents a number of experimental challenges to physicists.
Current efforts to detect them are by using interferometers on the ground and in space. It is essential that the
observatories housing the interferometers are perfectly clean and extremely stable; the whole interferometer must
remain as optically perfect as possible. Any residual gas would affect the measurements, so the light beam has to
operate under an ultra-high vacuum.
Vacuum pumps need to be clean and extremely low vibration, as such common pumps for this application are STP
magnetically levitated turbomolecular pumps and nXDS dry scroll pumps.
Colliders
Colliders are extensively used as a research tool for accelerating elementary particles to a very high kinetic energy
and letting them collide with other particles. Analysis of the by-products of these collisions gives scientists good
evidence of the structure of the subatomic world. Providing the right environment for highly evacuated beam lines
and chambers has always been a challenge but Edwards is a pioneer in the development of vacuum products and
can offer the best solutions – we understand that operating in such extreme domains is essential for the study of
successful particle physics.
Pump requirements for colliders are similar to those of Synchrotrons and so common products are the same
namely Gamma TiTan Ion Getter Pumps, nEXT turbomolecular pumping stations, STP magnetically levitated
turbomolecular pumps and nXDS dry scroll pumps.
High Powered Laser Beams

High power laser beams are being increasingly used to investigate a wide range of domains from new fields in
fundamental physics and gravitational physics to applications in medical science, material study and nuclear
material management. These laser beams travel through multiple amplifiers to produce powerful pulses in the
shortest interval possible. However, operation of these high intensity laser beams requires careful consideration in
the design and building of the large vacuum systems to ensure maximum stability.
Vacuum requirements are for high vacuum and often includes the evacuation of very large chambers and
possibly flows of explosive (e.g. Hydrogen) or rare gases (e.g. Xenon, Krypton). As such as well as the common
laboratory pumps like nXDS scroll pumps and nEXT turbomolecular pumps, recommended pumps also include high
throughput STP magnetically levitated turbomolecular pumps and GXS dry screw pumps.
32. R&D
Space Simulation
From the earliest rocket developments in the mid 20th Century through to the latest research into ionic thrusters,
we have gained vast experience in space simulation applications globally. Whether you are using small vacuum
systems for component testing or large chambers for satellite testing, our broad portfolio of pump mechanisms
ensures we have the vacuum pumping solution for your needs.
Recommended Technology:
RV Rotary Vane Pumps nXDS Scroll Pumps

• High vapour handling – quicker process • Quiet operation – better work environment and low
• Superior particulate handling – high reliability environmental impact
• Fast acting inlet valve for best in class anti-suck back • Intelligent and easy to use controls –
protection – safe process and systems simple operation
• Mode selector and two position gas ballast – • Hermetically sealed for a lubricant-free vacuum
configured to meet your vacuum needs environment – no contamination and no oil to
• Designed for easy maintenance – dispose of
no unplanned downtime • Long service interval and low power consumption –
• Quiet running – better work environment low cost of ownership
nEXT Turbomolecular Pumps Ion Pumps

• Exceptional pumping speeds and compression ratios • Vibration-free operation – stable process
– value for money • Bakeability – clean vacuum environment
• Field proven reliability in the most demanding • Ease of use of controllers – simple operation
environments – no unplanned downtime • Specialised variants available – configured to
• Standard fit in many scientific instruments – your needs
easy integration • Widest portfolio of ultra-high vacuum pumps –
• Over 200,000 turbo pumps installed – reliability for optimum solution for your needs
peace of mind
• End user serviceable – low cost of ownership Vacuum Measurement Instruments
• Measurement over the range 2000 to 10 -11 mbar –
STP Turbomolecular Pumps correct gauge to meet your needs
• Self-adjustment and re-balancing – zero maintenance, • Advanced microprocessor based controllers –
low cost of ownership robust and reliable
• Lubricant free – no contamination, clean process • Calibration of instruments to UK national standards –
• Intelligent and easy to use controls – right vacuum measurement
simple operation
• Low noise and vibration levels – stable process and Turbopumping Carts
work environment • Wide choice of turbomolecular and backing pumps –
configured to your needs
TS75 Compact Turbomolecular Pumping Station • Fully assembled – no systemisation required
• Compact – minimal footprint • Intelligent and easy to use controls with serial
• Fully assembled – no systemisation required communications – simple operation
• Robust construction, long service life – low cost
of ownership
34. R&D
SCIENTIFIC INSTRUMENTS
THE INTELLIGENT CHOICE
Scientific Instruments 36
Electron Microscopy and Surface Analysis 36
Mass Spectrometry 36
Scientific
Shop online at shop.edwardsvacuum.com Contact our customer service team Instruments 35.
SCIENTIFIC INSTRUMENTS
We are a technology leader in the manufacture of vacuum pumps, gauging and systems with products specifically
designed to meet the evolving challenges of new techniques and more cost effective instruments. Using leading
edge vacuum technology, our high quality vacuum pumps and controllers provide a clean vacuum environment
with enhanced performance and excellent reliability.
Benefits: Applications:
• Variety of choice – total vacuum spectrum from UHV • Gas Analysis
to atmospheric pumping • Leak Detection
• Configured to your need – bespoke vacuum solutions • Sample Preparation
• Right solution – advanced modelling capability • Surface Science
• Peace of mind – comprehensive product and • XRF/XRD
applications support • RGA and other techniques
Electron Microscopy and Surface Analysis

Advances in Electron Microscopy have created new challenges for vacuum equipment. The requirement for higher
image resolution means that any vibration caused by vacuum equipment can be a limiting factor. Edwards has
risen to this challenge and produced a range of low vibration turbomolecular pumps which, in combination with
vibration isolation techniques, allow OEMs to achieve the results they require. In addition, the newly introduced
nXDS dry scroll pumps with their intelligent run modes, will enhance the user experience with lower acoustic noise
and vibration levels.
Mass Spectrometry
Recent developments in the analytical marketplace have driven the need for bespoke vacuum solutions to solve
their respective challenges. We have invested considerable time and resource in advanced vacuum system
modelling capabilities. When used in collaboration with our customer base, our vacuum modelling tools have
allowed OEMs to streamline their development and manufacturing processes, resulting in a quicker time to market
and reduction in both project and manufacturing costs.
Scientific
36. Instruments
RV Rotary Vane Pumps STP Turbomolecular Pumps

• High vapour handling – quicker process • Self-adjustment and re-balancing – zero
• Patented inlet valve for best in class anti-suck back maintenance, low cost of ownership
protection – safe process and systems • Lubricant free – no contamination, clean process
• Mode selector and two position gas ballast – • Intelligent and easy to use controls – simple
configured to meet your vacuum needs operation and quick installation
• Designed for easy maintenance – • Low noise and vibration levels – stable process and
no unplanned downtime work environment
• Quiet running – better work environment
UHV Pumps
nEXT Turbomolecular Pumps • Titan Ion Pumps – CV, DI and TR elements available
• Exceptional pumping speeds and compression ratios • Non-Evaporable Getters – 50 to 300 l/s sizes
– value for money • Titanium Sublimation Pumps – for reactive
• Field proven reliability in the most demanding
gas pumping
environments – no unplanned downtime
• Multiple controller option – SPC, LPC and
• Standard fit in many scientific instruments –
MPC options
easy integration
• Splitflow variants – available with bespoke envelopes
Vacuum Measurement Instruments
• End user serviceable – low cost of ownership
• Measurement over the range 2000 to 10 -11 mbar –
correct gauge to meet your needs
nXDS and XDS Scroll Pumps
• Advanced microprocessor-based controllers – robust
• Quiet operation – more comfortable
and reliable
work environment
• Calibration of instruments to UK national standards –
• Intelligent and easy to use controls – right vacuum measurement
simple operation
• Hermetically sealed for a lubricant-free vacuum
environment – no contamination and no oil to
dispose of
• Long service interval and low power consumption –
low cost of ownership
Scientific
Shop online at shop.edwardsvacuum.com Contact our customer service team Instruments 37.
38.
SEMICONDUCTOR PROCESSING
MAXIMISING POTENTIAL
Semiconductor Processing 40
Lithography 41
Chemical Vapour Deposition 41
Etching 43
Physical Vapour Deposition 43
Metrology 44
Ion Implantation 44
Diffusion/Epitaxy/ALD 44
Semiconductor
Shop online at shop.edwardsvacuum.com Contact our customer service team Processing 39.
SEMICONDUCTOR PROCESSING
We continue to innovate leading technology solutions which will improve your process up-time, yield, throughput
and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership
through reduced environmental emissions and extended product lifetimes with a reduction in on-going
service costs.
Serving all leading process tool OEMs and with a presence at every major semiconductor fab in the world, our
systems are designed to meet the specific requirements of existing and developing processes. A variety of systems,
such as dry vacuum pumps, turbomolecular pumps and point-of-use abatement systems are offered to optimise
performance across the range of applications, from light duty to the heaviest duty processes.
Applications
Implant Source
PVD Pre-clean
PVD Process
Strip/Ashing
Lithography
Silicon Etch
Metal Etch
Oxide Etch
Metrology
Load Lock
HDP-CVD
Transfer
MOCVD
SACVD
PECVD
LPCVD
ALD
RTP
RP
CLEAN APPLICATIONS HARSH APPLICATIONS
iXH ○ ○ ○ ○ ○ ○ ○
Dry Pumps
iGX ○ ○ ○ ○
iXL ○ ○ ○ ○ ○ ○ ○ ○
EPX ○ ○ ○ ○ ○ ○
STP-iXR Series ○ ○ ○ ○ ○ ○
Turbomolecular
STP-iX Series ○ ○ ○ ○ ○ ○ ○ ○
Pumps
STP-iXA Series ○ ○ ○ ○ ○
STP-iXL ○
STP-L ○
Abatement
ATLAS ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
Systems
GRC ○
Integrated
Solutions
EZENITH ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○
Semiconductor
40. Processing
Lithography
Lithography, patterning of the wafers, is a critical step in the semiconductor process. Although conventional and
even immersion lithography generally do not require vacuum environments, extreme ultraviolet (EUV) lithography
and electron beam (e-beam) lithography do require vacuum pumps. Edwards has you covered for both of
these applications.
EUV Lithography Pumping Solutions

Multi-patterning techniques have their place, but the future will likely require the use of EUV lithography due to
the extremely short wavelength of light EUV systems deliver. The vacuum environment is absolutely critical for
optimum performance of your system. Cleanliness of the vacuum system is particularly important and helps to
extend service intervals. We have worked with EUV Lithography OEMs and light-source OEMs to develop precision
vacuum systems that deliver the maximum reliability for the large investment you make.
E-Beam Lithography Solutions

E-beam lithography has an important role to play in patterning of silicon wafers. Clean vacuum with low vibration is
essential to ensure precision and high up-time of your system.
Our Product Solutions

You will likely require a turbomolecular pump (TMP) to deliver the ultra-high vacuum on your process tool. Our
STP range of TMPs have fully magnetically-levitated rotors to reduce the risk of contamination to the chamber
and extend service intervals. Today’s products have been developed to reduce total costs and footprint through
integration of the controller into the pump itself, removing the need for an external controller and hefty control
cable between the controller and pump.
Chemical Vapour Deposition

Chemical Vapour Deposition (CVD) systems come in a variety of configurations to deposit numerous types of films.
The processes also operate at different pressures and flow regimes, many using fluorine-containing dry clean
processes. All of these variables mean you will want to consult with one of our application engineers to select the
right pump and gas abatement system to maximise your product’s service interval and increase the up-time of
your process.
Dry Pump Selection

CVD processes generally have four specific challenges to overcome that will drive your dry pump product selection.
These challenges are:
Powder
Many processes can generate large amounts of powder by-product. The vacuum pump needs to be designed to
handle this powder without seizing. In some cases, the powder may actually be sticky or require high temperature
operation to ensure that other by-products entrained in the powders do not condense inside the pump and jam
the mechanism. For nearly all powder-producing processes, you will be driven toward using a pump employing a
high-torque motor to be sure that the pump keeps rotating under stress.
Condensation
Some of the by-products of the semiconductor process contain gases that will change from gas phase to solid phase
as the partial pressure of the gas increases, or the material comes in contact with cold surfaces. When pumping
these by-products, you will need a very hot pump and, preferably, a pump that has a uniform temperature profile
from inlet to outlet as much as possible.
Semiconductor
Corrosion
Some processes will require the pumping of halides. In particular, fluorine-containing cleaning processes will be
required to maintain the cleanliness of your chamber, but the activated fluorine radicals can attack the internal
surfaces of the pump. If the process is mostly using chemicals that can corrode the pump, you will want to be sure
that the pump temperature can be set to a low value to reduce the risk of corrosion. Our pumps are designed with
selectable temperature set points and high rotational speeds to reduce the risk of corrosion and reduce the overall
rate of inevitable material loss that can occur within the pump. For some CVD processes, a balance is struck with
the temperature set point to be sure that any condensation issues are avoided without undue rates of corrosion.
Product reliability is an imperative. Our products incorporate the latest innovations in metallurgy and advanced
materials science to bolster our defence against the aggressive nature of the pumped gases.
Metal Plating
Some of today’s processes use metal-organic precursors that, as they pass through the chamber, can result in by-
products that have a high risk of depositing their metal contents onto the pump surfaces. A low temperature pump
is usually best to ensure long service intervals for these applications.
Gas Abatement Selection

Every CVD process will require some form of gas abatement device so that the toxic and dangerous by-products
of the process can be safely converted into disposable elements. We pride ourselves on our fuel-fired exhaust
gas management devices because of their ability to efficiently force recombination of the by-products into safe
compounds. Being fuel-fired with multiple-inlet capability, you can get rapid deployment of Green Mode by turning
off the main burner when you do not need to abate your process exhaust.
Integrated Systems and Sub-Fab Solutions

With just a pump and a gas abatement device, you are still not ready to run your process. You will need to connect
the pump exhaust, connect up your line heaters where required, run your water, purge and electrical lines, and
then get all of your control signals ready. You will also have to consider double-enclosure, gas leak detection, and
how you want to conduct leak checks after your tool maintenance. All of these things will cost you design time and
money. We understand the problem so we have developed integrated, process-specific solutions.
Our integrated systems are already pre-designed for most semiconductor CVD processes. The exhaust heaters are
set for the correct temperature to minimise cost and maximise up-time. We put leak check ports and gate valves
where they are required. We can mount toxic gas sensors within the unit and get the whole system enclosed and,
most importantly, you only need to provide one of each of the required utilities. We distribute the purge, water,
electricity, and control signals where they are needed and create a ready-to-go system.
All of our integrated systems have been designed based on global experience. We are leaders in vacuum and
abatement, so we know what works. We constantly innovate and improve what we do because you demand
excellence from Edwards.
Fleet Management
With all of our equipment deployed in your fab, you will want to know what’s going on all of the time. You want
to know if any product is in trouble or in need of maintenance. To answer this question, we offer our FabWorks
computer monitoring system.
The FabWorks system can use Ethernet connectivity to all of our products to constantly retrieve status signals and
store them in an automated database. More than tracking trends in such parameters as input power, current,
temperature, or purge flow, you also can see warnings or alarms, all of this data can be graphed and exported. With
FabWorks you do not need to be in the fab to monitor the equipment, once connected to your intranet, you can be
confident you have your finger on the pulse of the sub-fab.
For CVD processing, there will always be products that become stressed and will need maintenance, in worst
case scenarios, products can suddenly fail. To prevent unwanted failures, we can work with you and deploy our
automated predictive diagnostics models. These models, matched to your process, can provide warnings to you
in advance of processing your next batch of wafers so that you can maintain the pump or abatement device and
reduce the risk of stoppage mid-process.
Semiconductor
42. Processing
Etching
Etch processes have become increasingly complex due to the fine feature size of many semiconductors. Moreover,
the proliferation of MEMS devices and 3D structures has increased the use of silicon etch processes for structures
with high aspect ratio. Traditionally, etch processes could be grouped into silicon, oxide, and metal categories. The
lines between these categories have become blurred with the use of more hard masks and high-k materials being
deployed in devices today. Some of the materials used in devices today stubbornly resist vapourising during the
etch process leading to deposition within the vacuum components. Today’s processes really have become more
challenging than they were several years ago. We keep a close eye on industry and process changes and maintain
the pace of product innovation to deliver class-leading performance.
Vacuum Pump Selection

Nearly every dry etch process will require a turbomolecular pump (TMP) to deliver the low pressure you require
for your reactive ion etch (RIE) system. Edwards invented the first TMP and we continue to challenge the industry
with new technology and performance. We offer a range of products to match your application requirements.
For example, for extremely low pressure, you can use one of our all-bladed TMPs and marvel at the achieved
compression ratios and low base pressure. You can select a hybrid product that combines blades and Holweck-
designed rotors for high flow operation. We even have products tuned for excellent hydrogen performance
because, at molecular speeds, not all molecules behave the same as they travel through the TMP.
We recognise that space is at a premium so for many of our TMPs we have integrated the controller with the pump.
Not only do you no longer need to worry about routing of cumbersome control cables, you save on rack space and
spare pump management. We have also developed advanced heating technology to reduce the risk of stubborn
gases from sticking to the pump internal surfaces. We have even pioneered new high-emissivity coatings for really
difficult applications that need high running temperatures.
For dry pumps, Edwards will help you select your product to be sure that maximum up-time is achieved. Etch
processes can be very challenging to the pump because of the various gases used. For example, will your process
be mostly corrosive to the pump, likely to condense within the pump, or neither of these? The process gases you
use and the likely by-products need to be considered carefully.
Gas Abatement Selection

Dry etch processes will require some form of gas abatement to be sure you comply with your local emissions
requirements. Moreover, oxide etch, in particular, generates perfluorocarbon (PFC) emissions and you want
to be sure that your gas abatement can handle the flow rate of PFCs in your process recipe. PFCs are a known
contributor to global warming, so your abatement strategy is important for all of us. Our inward-fired burners
are particularly adept at creating a hot flame that can break down the incoming gases and reduce emissions of
unwanted chemicals.
Physical Vapour Deposition

Physical Vapour Deposition (PVD) continues to be an important process in semiconductor manufacturing. Liners
and barriers continue to make use of this well established semiconductor process.
If you are using a cluster tool, you will require a pump for your load-lock chamber and also the transfer chamber.
If your PVD tool makes use of cryo pumps, you will also need to prepare a pump to regenerate your cryo pump
once it gets full. In many cases, the pump used for the transfer chamber can also be used to regenerate your
cryo pump. Many PVD tools used for semiconductor processing deploy cryo pumps. However, increasingly,
turbomolecular pumps (TMPs) are used because the TMPs do not need maintenance and they do not need
regeneration. These two factors reduce your running costs.
Traditionally, gas abatement is not required for PVD processes. However, if your PVD process tool also includes ALD
or CVD chambers, you will need process-ready vacuum pumps and gas abatement. Our application engineers and
product specialists will assist you in further information related to these process types and help you determine the
optimum size of pump for your system. We can also make recommendations about pipe sizes to help you optimise
your PVD system.
Semiconductor
Metrology
Today’s metrology tools represent years of advanced development and continue to play a vital role to high
yield and early detection of process deviation. Clean, quiet vacuum is an important enabler to advanced
metrology tools. We provide a range of dry pumps and turbomolecular pumps (TMPs) to match your vacuum
environment conditions.
An example of our application of advanced technology is our EPX range of dry pumps. These single-axis pumps rotate
at high speeds and can deliver final vacuum pressures up to three orders of magnitude lower than conventional dry
pump and booster combinations. In many cases, using one EPX pump can eliminate the need for a TMP.
Another example of clean vacuum is our nXDS range of dry scroll pumps. Edwards’ patented technology makes
use of a precision engineered bellows that guarantees that no grease from the bearings can ever outgas into the
vacuum space. Moreover, advances in tip seal engineering means significantly extended service intervals.
Ion Implantation
Ion implant tools still have a significant role to play in front end-of-line processing. The vacuum challenges
associated with ion implantation have not become easier with time and we recognise the challenges of operating
a vacuum pump in an electrically noisy environment. We are never satisfied by testing for bare minimum
conformance to established electromagnetic immunity test standards. We know that pumps used on implant tools
will require greater immunity and special design features to be sure that the high voltage sections of the implant
tool do not interfere with pump reliability.
We also take particular care in the design of our turbomolecular pumps (TMPs) to be sure that we can provide
integrated heating to high temperatures so that maximum reliability is achieved.
Our application engineers will help you to select the right products for your implant tool, whether those products
are mounted on your tool or beneath your tool in the sub-fab. We want to be sure you experience the quality and
reliability you demand from Edwards.
Diffusion/Epitaxy/ALD
Diffusion, epitaxy, and ALD processes are critical in the manufacture of advanced semiconductor devices. Each
of these applications, well understood by Edwards, can represent challenges slightly different to normal CVD
processes. Diffusion furnaces will continue to be required as the industry follows Moore’s Law and also if it diverges
into More-than-Moore technologies. In general, large capacity pumps are required to provide rapid chamber
evacuation, chamber environment exchange, and high throughput capability.
Epitaxial film deposition equipment continues to be challenging. In many cases, very high flows of hydrogen at low
chamber pressures may be required. You will need a reliable pump with high hydrogen gas throughput capability.
More than this, you will want to take advantage of our global application experience to be sure that you design
your entire vacuum system for safe operation. By-products of the epitaxy processes can be very hazardous and will
require special attention for safe operation.
Atomic Layer Deposition (ALD) processes are becoming more common as device feature size decreases. Whether
your system processes wafers one wafer at a time, or in a batch, you will want to use our products that are
designed to minimise gas residence time and optimise pump thermal profiles and purge locations to be sure you
can achieve the longest service interval possible. ALD processes can be rather challenging.
For all of the diffusion, epitaxy, and ALD processes, we are able to give you the facts to help you select the right gas
abatement device. The materials you use in your processes and maximum flow rates will need to be considered in
configuring your abatement device.
Where appropriate an integrated system that incorporates our global knowledge and best operating practice
should be the preferred solution. Our integrated systems provide excellent value and make managing your process
tools much easier via connection to our fab-wide monitoring systems.
Semiconductor
44. Processing
STEEL DEGASSING
OUR EXTENSIVE EXPERIENCE IS KEY TO YOUR SUCCESS
Steel Degassing 46
VD and VOD Processes 47
RH Processes 47
Shop online at shop.edwardsvacuum.com Contact our customer service team Steel Degassing 45.
STEEL DEGASSING
Our leading market position as a vacuum supplier for steel degassing is built on our understanding of customers’
processes and expertise in providing vacuum solutions for vacuum degassing (VD), vacuum oxygen decarburising
(VOD) and Ruhrstahl Heraeus (RH) processes.
We have by far the largest installed base of dry pumps in the global steel industry with a global footprint of
manufacturing, sales and service.
Benefits:
• Fast return on investment – no waste disposal and lower energy

cost than steam ejectors
• Trusted and proven technology – largest dry pump installed base in the
global steel industry Pumping Technology
• Configured to your process – modular design with different pump ranges
Standard Steel Degassing System

for all heat sizes
Super Steel Degassing System

Sport Steel Degassing System
Maxx Steel Degassing System
• Ease of adoption – simple installation, fast commissioning, reliable production
• High productivity – system design concept ensures high uptime
• Low cost of ownership – robust pump design with minimal routine maintenance
• Your partner throughout the journey – all your vacuum requirements provided
by a single source, from pump manufacturing, system design, testing to service
Vacuum Degassing (VD) ● ● ●
Vacuum Oxygen Decarburising (VOD) ● ● ●

Applications
Vacuum Degassing with Oxygen Blow (VD OB) ● ● ●
Ruhrstahl Heraeus (RH) ●
Ruhrstahl Heraeus with Oxygen Blow (RH OB) ●
● Recommended Technology
46. Steel Degassing

VD and VOD Processes
Processes in the growing secondary metallurgy sector depend on several vacuum-based treatments: Vacuum
Degassing (VD) for alloy steels; Vacuum Oxygen Decarburising (VOD) for stainless steels; and combinations of both
treatments, for example Vacuum Degassing Oxygen Blowing (VDOB) and Vacuum Carbon Decarburising (VCD), for
low and ultra-low carbon steels.
Our vacuum systems have been successfully applied to all these secondary metallurgy processes at customers’
production facilities around the world. With the proven modular system design we enable degassing and
decarburising melt sizes up to 200 tonnes in electric steelmaking facilities (mini-mills).
RH Processes
In large integrated steelmaking facilities, typically equipped with basic oxygen converters, secondary metallurgical
processing is carried out mainly in Ruhrstahl Heraeus (RH) systems.
We have developed a ‘super’ degasser module to address the high volume flow rates needed to successfully degas
and decarburise steel products, using multiple high volumetric flow boosters in parallel to handle the gas loads
produced, while optimising the total number of system elements required.
Standard Steel Degassing Modules (SSDM) MAXX Modules
• Modular design with different pump ranges for all • Easy to upgrade whenever you need more capacity
heat sizes – configured to your needs • Easy integration with other systems –
• No water disposal and lower energy cost than steam reduced installation cost
ejectors – low cost of ownership • Low utilities and energy usage costs –
• Simple installation, fast commissioning, substantial savings
reliable production
Shop online at shop.edwardsvacuum.com Contact our customer service team Steel Degassing 47.
48.
SMALL PUMPS AND PUMPING SYSTEMS
Small Pumps and Pumping Systems 50

Electrical Data 51
Small Pumps and Accessories: Frequently Asked Questions 57
Small Pumps: Application and Accessory Information 58
Small Pumps and

Shop online at shop.edwardsvacuum.com Contact our customer service team Pumping Systems 49.
Small Pumps and Pumping Systems
To meet the diverse needs of applications ranging from analytical instrumentation, wet chemistry and R&D to light
industrial, Edwards offers a comprehensive range of pumping technologies.
Dry Scroll Pumps

Scroll pumps are an excellent alternative to rotary vane pumps Dry scroll pumps
where oil free pumping is desirable. The innovative XDS/nXDS
pumps in particular use a bearing shield to isolate the vacuum
environment from all forms of lubricant not only making them
totally dry, but also protecting the bearing from any process gases.
Vapour handling is enabled by a gas ballast; this allows the range of
pumps to satisfy many applications that were previously off limits
to scroll pumps.
≤ 2 x 10-2 mbar / ≤ 1.5 x 10-2 Torr
5 to 35 m3h-1 / 2.9 to 20.6 ft3min-1
Oil Sealed Rotary Vane Pumps Oil sealed rotary vane pumps
≤ 10-3 mbar / ≤ 10-3 Torr
0.9 to 32.3 m3h-1 / 0.5 to 19.5 ft3min-1
This wide range of rugged pumps offers an excellent ultimate with
good pumping speed. RV pumps have superior vapour handling
capabilities, while operating quietly.
Diaphragm Pumps
≤ 2 mbar / ≤ 1.5 Torr
0.6 to 2.0 m3h-1 / 0.35 to 1.2 ft3min-1
Oil free D-LAB diaphragm pumps are made of corrosion resistant materials to withstand attack from chemicals.
They are ideal for applications such as gel drying and other wet chemistry processes. The XDD1 diaphragm pumps
provide oil free backing for compound turbomolecular pumps.
Easy to Service Quality Manufacture

All Edwards pumps are designed for easy routine Edwards pumps are manufactured on state of the art
maintenance. Key components are easily accessible machine tools for high consistency of components.
and, with RV and XDS/nXDS pumps, no special tools are For example, RV rotors are manufactured in a robotic
required. Service kits of guaranteed parts are available cell to remove errors and inconsistencies from the
for routine service by the user. Worldwide support from manufacturing process.
the Edwards service organisation is also available.
Applications
Edwards high performance pumps are used in many industrial and laboratory applications, including the following:
• Electron microscopes, mass spectrometry, residual • Atomic emission spectrometers, nuclear physics,
gas analysers and surface analysis fusion technology and space research
• Epoxy degassing, powder materials processing • Vacuum ovens
• Solvent concentration • TV tube evacuation
• Sterilisation, distillation and centrifuges • Automotive system filling
• Gel dryers and glove boxes • Freeze drying
• Vacuum metallurgy
Small Pumps and

50. Pumping Systems
Electrical Data Rotary Valve Pump Accessories
The table shows current data and suggests a suitable This diagram shows the accessories available for oil-
fuse rating. Starting current is drawn for less than one sealed pumps. Refer to the following pages for details of
second and slow blow fuses should be used to prevent each accessory. Note that the E-LAB2 pump is supplied
unnecessary rupture during starting. Pump outfits with all required accessories.
are rated for operation above 12 °C. Pump starting at
temperatures lower than 12 °C will increase the current 4 5 6
drawn due to the higher start torque required. This may
cause the motor thermal overload to trip.
Three-phase motors should be protected by a starter
consisting of a suitably rated contactor and thermal
overload. The trip current regulator on the thermal
overload should be set according to the starter 3
manufacturer’s instructions. 7
Electrical supply Full load Start Suggested

current current fuse rating
(A) (A) (A) 2 1
E2M0.7
200-240 V 1-ph 50/60 Hz 1.0 1.0 2.8 2.3 6
100-120 V 1-ph 50/60 Hz 1.8 1.9 5.7 5.3 10 13
E2M1.5
200-240 V 1-ph 50/60 Hz 1.4 1.3 5.5 5.2 6
100-120 V 1-ph 50/60 Hz 3.1 2.6 12.0 11.2 10
RV3 and RV5
220-240 V 1-ph 50/60 Hz 2.7 2.1 17.0 17.0 5
110-120 V 1-ph 50/60 Hz 4.4 4.4 30.8 30.8 10
200 V 1-ph 50/60 Hz 2.9 2.4 17.6 17.2 5
12 11
200-220 V 3-ph 50/60 Hz 1.7 1.7 10.2 10.2 2.5 OIL
380-415/460 V 3-ph 50/60 Hz 1.0 1.0 5.7 7.0 2.5

RV8 and RV12
220-240 V 1-ph 50/60 Hz 3.4 3.4 17.0 18.0 5
110-120 V 1-ph 50/60 Hz 7.8 6.9 34.0 30.8 13 10
200 V 1-ph 50/60 Hz 4.0 4.0 17.6 17.2 5
200-220 V 3-ph 50/60 Hz 2.5 2.9 14.0 12.0 4.0
380-415/460 V 3-ph 50/60 Hz 1.5 1.5 9.0 8.7 2.5
E1M18 and E2M18
220-240 V 1-ph 50/60 Hz 4.6 5.0 33.0 33.0 15
110-120 V 1-ph 50/60 Hz 11.0 10.0 42.0 32.0 30
200 V 1-ph 50/60 Hz 6.0 5.5 44.0 44.0 15
100 V 1-ph 50/60 Hz 12.0 11.0 88.0 88.0 30
200-230 V 3-ph 50/60 Hz 3.3 2.3 16.1 15.9 10
380-415/460 V 3-ph 50/60 Hz 1.9 1.6 10.2 10.6 6
E2M28
220-240 V 1-ph 50/60 Hz 6.0 6.5 27.0 32 15 9
110-120 V 1-ph 50/60 Hz 12.0 12.0 36.0 50 30
200 V 1-ph 50/60 Hz 6.5 5.5 40.0 40 20
100 V 1-ph 50/60 Hz 12.0 12.0 80.0 80 30 8
200-230 V 3-ph 50/60 Hz 3.8 3.9 22.8 28.6 16
380-415/460 V 3-ph 50/60 Hz 2.3 2.3 14.3 14.7 10
XDS35i ① Outlet mist filter* ⑩ OB20 oil box purge adaptor
200-230 V 1-ph 50/60 Hz 6.6 6.6 - - ② Oil
16 (13 UK) 1 Outlet return
mist filter1 kit† ⑪
8 Oil change
Vibration reminder card
isolators
100-120 V 1-ph 50/60 Hz 10.6 10.6 - - 20 ③return
2 Oil Smallkit2volume inlet liquid ⑫
9 RVOil gas
drainballast
kit3 adaptor**
3 Small volume inlet liquid catchpot 10 OB20 oil box purge adaptor
catchpot ⑬
11 EBV20 solenoid operated
XDS46i and XDS100B 4 ITO20K inlet liquid catchpot
④ ITO20K inlet liquid
Oil change reminder card
5 ITC20K inlet chemical trap catchpot 12 gas ballast
RV gas valve
ballast adaptor4
200-230 V 1-ph 50/60 Hz 6.6 6.6 - - 16 (13 UK) 6 ITF20K inlet dust filter
⑤ ITC20K inlet chemical trap *
13 EMF
EBV20 filter shown
solenoid operated gas ballast
100-120 V 1-ph 50/60 Hz 10.6 10.6 - - 20 7 FL20K foreline trap valve
⑥ ITF20K inlet dust filter †
RV adjustable gas ballast oil
nXDS ⑦ filter
1 EMF FL20Kshownforeline trap return kit shown
200-240 V 1-ph 50/60 Hz 6 6 - - 10 2 RV
⑧adjustable
Vibrationgas isolators ‡
ballast oil return kit shown RV pump extension kit shown
3 RV pump extension‡ kit shown
100-127 V 1-ph 50/60 Hz 10 10 - - 13 ⑨required
Oil drain Not required for EM pumps
for kit
**
4? Not EM pumps
Small Pumps and

Outlet Mist Filters Ordering information
Product description Order no:
Benefits of the mist filter include:
Model EMF3 mist filter (0.315 kg)* A46220000
• Protection from oil mist emissions as required by
Model EMF10 mist filter (0.500 kg)† A46226000
COSHH and health and safety regulations
Model EMF20 mist filter (0.700 kg)† A46229000
• Use of optional oil return kits results in reduced
Model MF30 mist filter (1.30 kg) ‡
A46233000
oil level maintenance and savings in pump oil *
Supplied with NW10 clamp, centring-ring and O-ring, NW10 to
• If the oil element becomes blocked, an integral ⅜ inch BSP adaptor.
pressure relief valve opens †
Supplied with NW25 clamp, centring-ring and O-ring, NW25 to
¾ inch BSP adaptor.
EMF Filters
‡
Supplied with NW25 elbow, NW25 clamp, NW25 to ¾ inch BSP
adapter and NW25 Co-Seal.
The EMF3, EMF10 and EMF20 mist filters are suitable
for all small rotary vane pumps up to E2M18. Spares Order no:
(The EMF20 can be used with an E2M28 on low Odour element (pack of 5)
pressure/throughput applications; contact Edwards). EMF3 A22304081
They are very efficient at 99.999% DOP test and are EMF10 A22304079
also azide proof. The white bottom half of the body is EMF20 A22304077
semitransparent, allowing the oil level to be monitored. Oil element
The EMF filters have a unique odour element which EMF3 A22304197
neutralizes the smell of oil mist. EMF10 A22304198
EMF20 A22304199
MF30 Filter
MF30 A22304057
The MF30 is suitable for E2M28 pumps. It is very
Body seal
efficient at 99.85% DOP test.
EMF3 A27159538
Dimensions EMF10 A27159535
EMF20 A27159534
EMF filters
Oil return kits

These conserve the pump oil, by returning the oil
trapped in the mist filter to the pump. The gas ballast
oil return kit, for example, allows extended operation of
A
the pump with gas ballast.
Ordering information
FLOW

B Clean application oil return kit A50419000
(RV, Speedivac 2 to E2M0.7, E2M1.5)
Adjustable gas ballast oil return kit (RV) A50523000
A B square Inlet/outlet
Clean application oil return kit (E1M18 to E2M28) A50420000
EMF3 128 mm (5.03”) 82 mm (3.22”) NW10
EMF10 171 mm (6.73”) 97 mm (3.81”) NW25
EMF20 191 mm (7.51”) 118.4 mm (4.66”) NW25 ITO20K Inlet Liquid Catchpot
MF30 filters These catchpots minimize the entry of condensable
Ø150 (5.91)
vapours into the pump. Benefits of the catchpots include:
• Capture condensable vapours, which would
otherwise condense in the pipelines or in the pump
83 (3.27)
• Prevents froth or spray from the process from

31 (1.22)
carrying over to the pump

248 (9.76)
• Corrosion-resistant body
296 (11.65)
308 (12.13)
NW25
• Visual indication of trapped liquid level
• Hand-tightened drain plug, for easy drainage
Small Pumps and

52. Pumping Systems
Ordering information ITF20K Inlet Dust Filter
Product description Order no: The ITF inlet dust filters prevent the entry of dust
ITO20K inlet catchpot, 1.84 litres capacity, A44110000 particles into the pump. The impedance of a clean filter
weight 3.2 kg reduces the pumping speed of a pump by about 10% at
Small volume inlet catchpot 0.1 litre capacity, A44105000
weight 0.3 kg
10 mbar and 25% at 0.1 mbar.
Both supplied with NW25 clamp, centring-ring and O-ring. Depending on your application, you can normally clean
the filter element with a vacuum cleaner or a clean air
ITD20K Inlet Desiccant Trap blast, and then re-use the element.
The benefits of the ITF filters include:
The ITD desiccant trap is intended for use when pumping
• Thick aluminium casting, to withstand abrasion
limited quantities of water vapour at high pumping speeds
• Tangential entry port, to promote centrifugal
to a low vapour pressure using phosphorous pentoxide
separation of dust particles
(P2O5) as the desiccant. P2O5 (not supplied by Edwards)
• Filter efficiency better than 96% (tested to BS2831,
absorbs more than 20% (by weight) of water whilst still
dust number 2).
maintaining a low vapour pressure. The trap body is an
aluminium casting which contains a tray assembly made Dimensions
of stainless steel. The condition of the desiccant can be
observed through a glass cover fitted to the top of the trap. ITO20K, ITD20K, ITC20K and ITF20K
Ordering information Ø171 (6.73) 124 (4.88)
106 (4.17)
ITD20K Inlet Desiccant Trap A44510000
(2.70)
68.5
205 (8.07)
143 (5.63)
ITC20K Inlet Chemical Traps NW25

NW10 45 ˚
The ITC series of chemical traps provides the

following benefits:
• Protection against various aggressive vapours, which Ordering information
may attack the pump or pump oil Product description Order no:
• Prevent high molecular weight vapours (such as might ITF20K inlet dust filter (3.4) kg A44215000
arise in a resin treatment plant), from reaching the ITF20K element and gasket kit (0.3 kg) A44201800
pump. These vapours could cause lacquering or clogging
• The standard sorbent (activated charcoal), has relatively EBV Gas Ballast Control Valves
high trapping properties (absorbs around 25% of its own
weight), even when large amounts of water vapour are • Fit the EBV 20 valve to allow remote operation of the
being pumped pump’s gas ballast control.
• When filled with activated alumina on two-stage
pumps, backstreaming of pump oil can be controlled Ordering information
• See also ITO catchpots for design advantages of Product description Order no:
the body EBV20 110 V 1-ph 50/60 Hz A50006984
EBV20 (0.5 kg) 220-240 V 50/60 Hz A50006930
Ordering information Suits the E2M0.7 to E2M28 including RV A50502000
For RV and XDS pumps an adaptor is required
Product description Order no: For the E1M18/E2M28 an adapter is required A50006003
ITC20K inlet chemical trap charcoal charge 0.4 kg, A44410000
weight 3.5 kg
Sorbent charge not supplied. Supplied with NW25 clamp,
centring‑ring and O-ring.
Spares Order no:

0.5 kg activated charcoal H12205001
3 kg activated charcoal H12205002
0.45 kg activated alumina H02600050
0.2 kg activated alumina H02600056
Small Pumps and

FL20K Foreline Trap Dimensions
The FL20K foreline trap has been developed for use in Vibration Isolators
clean pumping systems, to prevent the back-migration
of rotary pump oil mist into the system. The activated Ø25 Ø22
(0.98) (0.97)
alumina sorbent has the following benefits:
• Exceptional trapping properties for oil mist (99.7%)
30 (1.18)
18 (0.71)
(0.14)
(0.20)
3.5
5
• A very long life before it is saturated
• Can be rejuvenated by baking the basket containing 74 (2.91) 61 (2.40)
60 (2.36) 50 (1.97)
the sorbent for 2 hours at 250-300 °C.
The FL20K is most useful with two-stage rotary pumps,
37 (1.46)
41 (1.61)
operating below 1 mbar. To maximize sorbent life, install
the FL20K near the vacuum system. In common with
2 x Ø5 (0.20)
other types of sorbent, activated alumina absorbs water.
2 x Ø6 (0.24)
RV Pumps, E1M18, E2M18 E2M0.7, E2M1.5

This does not affect the oil vapour trapping properties and E2M28
but may tend to prolong the roughing time on successive
pump downs. To minimize vapour absorption, we Ordering information
recommend you fit a valved by-pass line. The trap body is
made of aluminium and is fitted with a removable basket
Vibration isolators
containing the sorbent.
E2M0.7, E2M1.5 (0.3 kg) A24801407
RV, E1M/E2M18 (0.45 kg) A24801404
Dimensions
Vibration Isolators E2M28 (0.45 kg) A24801412
FL20K
Oil Box Drain Kits
Two kits are available:
(0.26)
Ø82.5 (3.25)
6.5
• RV easy oil box drain kit. This kit includes an oil drain
extension tube for use when the oil is gravity drained.
Fits E2M0.7, E2M1.5, RV, E1M18, E2M18, E2M28.
50 (1.97)
• ODP20, for use with the E1M18, E2M18 and E2M28

pumps. This accessory provides alternative methods
50 (1.97)
for draining oil where access to the pump drain plug
NW25
is difficult, or where there is no room for a receptacle
130 (5.12)
under the drain outlet. The pack includes an oil drain
Ordering information extension tube for use when oil is gravity drained,
and a pressure drain device with which the oil can be
discharged at a high level.
FL20K foreline trap weight 1 kg A13305000
(Supplied with 0.2 kg sorbent charge) Ordering information
Spares Order no: Product description Order no:
0.45 kg activated alumina H02600050 RV easy oil box drain kit A50503000
0.2 kg activated alumina H02600056 ODP20 oil box drain kit A50002000
Vibration Isolators Oil Box Purge Adaptor

You may need to fit vibration isolators to your pump if you This stainless steel adaptor enables a flow of dry inert gas
mount it into a frame or a system, if the mounting points to be introduced into the oil box to provide large scale
are not level or if you need to minimise the transmission dilution of process gases which cannot be dealt with
of vibration and noise in your application. You must fit sufficiently by the standard gas ballast facility. The adaptor
flexible bellows or other flexible pipes to the pump inlet replaces the oil filler plug, on the RV and E1M18/E2M18
and outlet. The height of these neoprene rubber isolators pumps only.
reduces by about 1 mm when the pump is fitted.

OB20 oil box purge adaptor A50034000
Small Pumps and

54. Pumping Systems
Oil Change Reminder Tag Scroll Pump Vibration Isolators
The oil change reminder tag is a useful reminder for users You may need to fit vibration isolators to your pump if you
to change the oil when it starts to go brown. Brown oil mount it into a frame or a system, if the mounting points
indicates that the oil is contaminated or degraded, and are not level or if you need to minimise the transmission
must be changed to prevent mechanical wear or failure of vibration and noise in your application. You must fit
of the pump. Tie the tag onto the pump exhaust so that it flexible bellows or other flexible pipes to the pump inlet
hangs over the oil box. and outlet. The height of these neoprene rubber isolators
reduces by about 1 mm when the pump is fitted.
Dimensions
Oil change reminder tag (pack of 10) A20003017 nXDS/XDS35i
Ø25 Ø22
(0.98) (0.97)
30 (1.18)
18 (0.71)
(0.14)
(0.20)
3.5
5
74 (2.91) 61 (2.40)
60 (2.36) 50 (1.97)
37 (1.46)
41 (1.61)
2 x Ø6 (0.24) 2 x Ø5 (0.20)

XDS35i (0.45 kg) A24801408
nXDS (0.45 kg) A24801441
Exhaust Silencers
For use on XDS pumps that are not connected to
a house exhaust system. These silencers also offer
exhaust filtration.

nXDS A50597000
XDS35i A50597001
Spares Order no:
Silencer spares kit A50597800
nXDS A50597800
XDS35i A50597801
Gas Ballast Adaptor

① Gas-ballast adaptor blank ⑤ Exhaust nozzle
Gas Ballast adaptor blank (nXDS) A73501806
② Gas-ballast adaptor ⑥ Vibration isolators
1 Gas-ballast adaptor blank
3a Inlet/exhaust filter 5 Exhaust nozzle
⑦ Chemical resistance Gas Ballast adaptor (nXDS) 0.25mm hole A73501809
2 Gas-ballast adaptor 6 Vibration isolators
3a Inlet /3b Inlet/exhaust
exhaust filter filter conversion
7 Chemical resistance kit kit
conversion Gas ballast adaptor (nXDS) no restrictor A73501811
3b Inlet / exhaust filter 8 Pump-to-controller cable (not shown)
4 ④ Silencer
Silencer ⑧ Pump-to-controller cable Gas Ballast adaptor with 0.25 mm hole A50626801
(not shown) (XDS35i/46i)
1 General view (O-ring seals not shown)
*
General view (O-ring seals not shown)
Small Pumps and

Inlet/outlet filter with 5 micron element Technical Data
Mass (RV-EM/XDS) 23 kg/37 kg
Electrical supply for cooling fans
NW25 Inlet Outlet filter A50597805 Voltage 100-120 V/200-240 V
NW40 Inlet Outlet filter (XDS35i/46i) A50597806 Fuse rating 5 A Type T 20 mm
Connector IEC320 socket
Spares Order no: Approximate noise reduction
XDS 5 Micron filter element kit A50597802 RV 7dBA
E2M28 7dBA
XDS 1 Micron filter element kit A50597803 XDS35i/46i 9dBA
Dimensions
Exhaust nozzle
Product description Order no: Acoustic Enclosure

Exhaust nozzle kit ¾’’ to 15 mm A50509000
Chemical Resistance Conversion Unit

nXDS6i, 10i &15i Chemical resistance A73501807
conversion unit
nXDS20i Chemical resistance conversion unit A73501808
Acoustic Enclosures
Designed for use in a laboratory or an industrial
Dimension RV/EM nXDS/XDS
environment, Edwards new acoustic enclosures are
A 790 mm 778 mm
compatible with all EM, RV and nXDS/XDS pumps
B 285 mm 442 mm
ranging up to the E2M28 series/XDS46i. The acoustic
C 460 mm 580 mm
enclosure reduces the noise level by up to 9dBA and
incorporates internal fans to ensure adequate air cooling
is provided to the pump. Ordering information
The design of the enclosure allows for it to be easily Product description Order no:
assembled or disassembled without tooling. A removable RV/EM acoustic enclosure 110-120 V NRD317000
front panel also allows for quick access to the oil sight RV/EM acoustic enclosure 200-240 V NRD318000
glass and if required a side panel can be removed allowing nXDS/XDS acoustic enclosure 110-120 V NRY5C0000
access to the oil filler cap (EM/RV only). The enclosure is nXDS/XDS acoustic enclosure 200-240 V NRD797000
powered via a power cable fitting into an IEC 320 socket.
Accessories & Spares Order no:
• Simple slot together assembly means no tools
2 m Electrical supply cable, UK 3 pin plug A50505000
are required
2m Electrical supply cable, N. Europe plug A50506000
• Designed to attenuate the noise of an E2M28 by
2 m Electrical supply cable, USA/Japan plug A50507000
7dBA or an XDS35i/46i by 9dBA
2 m Electrical supply cable, no plug A50508000
• Integrated cooling fans to maintain optimum pump
NW25 Aluminium nipple 100 mm long C10514409
running temperature NW40 Aluminium nipple 130 mm long C10516409
• Castor wheels with brakes for easy manoeuvrability
• Fully compatible with Edwards inlet traps, exhaust
mist filters and nXDS/XDS silencer with extension
spools (available separately)
• Over temperature buzzer alarm with battery back-up
Small Pumps and

56. Pumping Systems
Small Pumps and Accessories: Frequently Asked Questions
Oil Mist
Question: What accessory do I use to trap oil mist (which all oil sealed pumps emit during pump down or with
gas ballast)?
Answer: To meet regulations and preserve pump oil, fit a recommended Edwards oil mist filter (EMF) to the pump
outlet, and connect the exhaust to an exhaust line.
Question: If I operate an RV pump continuously or with high inlet pressure, what accessories do I need?
Answer: Fit an Edwards mist filter (EMF) and a gas ballast oil return (GBOR) kit. Then the pump can be operated
with the mode switch open and gas ballast oil return. The oil condensed in the filter will be continuously returned
to the pump oil box.
Vapour Processes
Question: Which pump and accessories should I use if my process generates vapours which could condense in
the pump?
Answer: You can choose either an nXDS/XDS pump, or rotary pump. Gas ballast should be used with both pumps;
to sweep the vapour through the pump. This prevents condensation and oil contamination. Operate the pump
with gas ballast for at least an hour before and after use. Choose the size of pump taking into account the vapour
pumping rate. If you selected a rotary pump, then you should fit a gas ballast oil return kit and mist filter. Change
the oil frequently and keep an oil change reminder tag on the pump. DLAB would also be a suitable alternative
depending on required pumping speed.
Dust and Particle Processes

Question: Which pump and accessory should I use if my process generates dust or grit, which could clog or damage
the pump?
Answer: Use a rotary pump fitted with an inlet dust filter. We do not recommend the use of scroll pumps or XDD1
pumps for these applications.
Special Chemical Cleaning Processes

Question: Which pump and accessory should I use if my process generates oxygen or ozone?
Answer: Use a rotary pump adapted to run with Fomblin® oil or nXDS/ XDS. Contact Edwards for more information.
Question: Are there any special considerations if my pump will be used in the vicinity of organic gases, like propane?
Answer: Use a rotary pump fitted with a flameproof motor. Contact Edwards for more information.
Contamination
Question: Which pump and accessories should I use if I must ensure that my process and process chamber
(operated below 0.1) are not contaminated with oil from the pump?
Answer: Use an nXDS/XDS scroll pump. Alternatively, you can use a rotary pump with a FL20K foreline trap fitted
to the system inlet. The trap contains activated alumina which traps the oil molecules. To maintain the alumina
charge, bake the charge basket or replace as required.
Question: How can I reduce the noise level of my pump?
Answer: If the noise is only obvious during pumping down then fitting the exhaust with a silencer (nXDS/XDS pumps),
or fitting an exhaust line will reduce the level. An alternative is to fit an acoustic enclosure. Contact Edwards for
more information.
Fomblin® is a registered trademark of Solvay Solexis
Small Pumps and

Small Pumps: Application and Accessory Information
Use the information in the list below to select the best pump and accessories for your application. The information
is given as a guide only; the optimum set-up may depend on your specific method of operation. Note that you need
to buy the accessories separately, unless otherwise stated.
ATEX and Flammable Gases

The following standard pump models have an internal ATEX
classification of II 3 G c IIB T4:
• E2M0.7, E2M1.5
• E1M18, E2M18 & E2M28
• RV3, RV5, RV8, RV12
• nXDS6i, nXDS10i, nXDS15i, nXDS20i, XDS35i
The following standard pump models operating on

hydrocarbon oil can be supplied with flameproof motors
providing an external classification of II 2 G IIB T4 (or IIC):
• RV3, RV5, RV8, RV12
• E1M18, E2M18
Gel Dryers MS Inlet Systems (like Electro-Spray)

Recommended pump: nXDS/XDS or DLAB. Recommended pump: XDS35i or E2M28.
Suggested accessories for DLAB: Separator. Suggested accessories for rotary vane pumps: Mist filter,
Optional accessories for DLAB: Condenser, oil return.
gas ballast valve. Suggested accessories for nXDS/XDS: Silencer.
Rotary Evaporation and Vacuum Ovens Load Locks, Fume Hoods and Glove Boxes
Recommended pump: nXDS/XDS or DLAB. Recommended pump: nXDS/XDS or rotary vane pumps.
Suggested accessories for DLAB: Separator. Suggested accessories for rotary pumps: Mist filter,
Optional accessories for DLAB: Condenser, oil return.
gas ballast valve. Suggested accessories for nXDS/XDS: Silencer.
Centrifugal Concentration Ultra High Speed Centrifuges

Recommended pump: nXDS/XDS. Recommended pump: nXDS/XDS or rotary vane pumps.
Suggested accessories: Mist filter
Vacuum Filtration Suggested accessories for rotary pumps: Mist filters,
Recommended pump: nXDS/XDS or DLAB. oil return.
Suggested accessories for DLAB: Separator.
Optional accessories for DLAB: Condenser, Leak Detection, Electron Microscopes, Mass
gas ballast valve. Spectrometers and Lasers
Recommended pump: nXDS/XDS or rotary vane pumps.
Distillation/Extraction Apparatus Suggested accessories for rotary pumps: FL20K,
Recommended pump: nXDS/XDS or DLAB. Mist filter.
Suggested accessories for DLAB: Separator. Suggested accessories for nXDS/XDS: Silencer.
Optional accessories for DLAB: Condenser,
gas ballast valve. Surface Science and Particle Size Analysers
Freeze Dryers Suggested accessories for rotary pumps: FL20K,
Recommended pump: nXDS/XDS or rotary vane pumps. Mist filter.
Suggested accessories: Mist filters, oil return. Suggested accessories for nXDS/XDS: Silencer.
Small Pumps and

58. Pumping Systems
High Energy Physics Refrigeration, Air Conditioning Systems
Recommended pump: nXDS/XDS or rotary vane pumps. Recommended pump: nXDS/XDS or rotary vane pumps.
Suggested accessories for rotary pumps: FL20K, Mist filter. Suggested accessories for rotary pumps: FL20K, Mist filter.
Suggested accessories for nXDS/XDS: Silencer. Suggested accessories for nXDS/XDS: Silencer.
Helium or Rare Gas Recirculation Vacuum Furnace

Recommended pumps: nXDS/XDS Recommended pump: nXDS/XDS or rotary vane pumps.
Suggested accessories for rotary pumps: ITF20K, Mist filter.
Backing Turbomolecular Pumps Suggested accessories for nXDS/XDS: Silencer.
Recommended pump: nXDS/XDS, XDD1 or
rotary vane pumps. Azide Forming Applications
Suggested accessories for rotary pumps: FL20K, Recommended pump: nXDS/XDS or rotary vane pumps.
Mist filter. Suggested accessories for rotary pumps: Mist filter.
Suggested accessories for nXDS/XDS: Silencer. Suggested accessories for nXDS/XDS: Silencer.
Backing Diffusion Pumps

Suggested accessories for rotary pumps: FL20K,
Mist filter.
Suggested accessories for nXDS/XDS: Silencer.
Notes
• FL20K is an inlet trap, to prevent oil back-streaming.
• ITF20K is an inlet trap, to capture dust particles.
• The gas ballast facility allows atmospheric air into the pump, minimising the formation of condensates
(which contaminate the oil in rotary pumps).
• An oil return kit is available for all RV and EM rotary vane pumps to allow oil to be returned from the mist filter
to the pump. A gas ballast oil return is also available to allow oil to return and have gas ballast flow.
Small Pumps and

60.
SMALL DRY PUMPS
THE ULTIMATE DRY CHOICE
nXDS Dry Scroll Pump 62

XDS Scroll Vacuum Pump 68
XDD1 Diaphragm Vacuum Pump 72
D-LAB Diaphragm Vacuum Pump 75
Shop online at shop.edwardsvacuum.com Contact our customer service team Small Dry Pumps 61.
nXDS DRY SCROLL PUMP
With exceptional pumping capability, ultimate vacuum performance and state-of-the-art design features,
the nXDS dry scroll pump is the best performing pump in its class. nXDS improves on the original XDS pump
technology by offering increased pumping speeds, combined with lower ultimate pressures, low power
consumption and reduced noise. The gas ballast allows for pumping of condensable vapours, including water,
solvents, dilute acids and bases. nXDS pumps feature the very latest in tip seal technology, giving a significantly
longer life between tip seal changes. nXDS-C has been modified so that it is more suitable for use on vapour
handling processes and may be used in some applications involving corrosive substances. This chemically resistant
version is fitted with Chemraz® internal valve pads and stainless steel fittings. nXDS-R has the gas ballast blanked
off so it cannot be accidently opened. This is useful for applications such as rare gas recirculation or gas recovery.
Features and Benefits Applications

• Lubricant-free within the vacuum envelope and • Backing turbomolecular pumps.
hermetically sealed means a totally clean and dry vacuum • Chamber evacuation.
to prevent cross contamination. • Chemical applications including gel dryers
• Advanced scroll-form and tip-seal technologies and solvent recovery.
deliver best‑in-class vacuum performance and • Electron microscopy.
unrivalled ultimate vacuum levels. • High energy physics.
• Unique tip seal design significantly reduces wear to • Mass spectrometry.
minimise maintenance and extend service life.
Pump Range
• Quiet operation with typical noise during operation
< 52 dB(A) for minimal environmental impact. nXDS6i nXDS15i
• Advanced interface providing a variety of traditional and -- nXDS6i -- nXDS15i
analogue and digital control methods enabling remote -- nXDS6iC -- nXDS15iC
-- nXDS6iR -- nXDS15iR
control/monitoring via RS232 or RS485.
• Integrated inverter drive with auto sensing input delivers nXDS10i nXDS20i
optimised pumping performance globally. -- nXDS10i -- nXDS20i
• Pump range includes 6, 10, 15 and 20 m3h-1. -- nXDS10iC -- nXDS20iC
-- nXDS10iR -- nXDS20iR
Chemraz® is a registered trademark of Greene Tweed
62. Small Dry Pumps

Performance Curves
nXDS6i Dry Scoll pump

nXDS6i nXDS6i Performance Curve
Peak pumping speed
6.2 m3h-1
(3.6 ft3min-1)
Ultimate Pressure
0.020 mbar
(0.015 Torr)
nXDS6i 100-127 V, 200-240 V, 1ph 50-60 Hz A73501983 1 Normal Pumping Speed 4 min Standby Power
nXDS6iC 100-127 V, 200-240 V, 1ph 50-60 Hz A73502983 2 Normal Full Power 5 min Standby Speed
nXDS6iR 100-127 V, 200-240 V, 1ph 50-60 Hz A73503983 3 Normal GB speed

nXDS10i nXDS10i Performance Curve
Peak pumping speed
11.4 m3h-1
(6.7 ft3min-1)
Ultimate Pressure
0.007 mbar
(0.005 Torr)
nXDS10i 100-127 V, 200-240 V, 1ph 50-60 Hz A73601983 1 Normal Pumping Speed 4 min Standby Power
nXDS10iC 100-127 V, 200-240 V, 1ph 50-60 Hz A73602983 2 Normal Full Power 5 min Standby Speed
nXDS10iR 100-127 V, 200-240 V, 1ph 50-60 Hz A73603983 3 Normal GB speed
nXDS15i Performance Curve nXDS15i
Peak pumping speed
15.1 m3h-1
(8.9 ft3min-1)
Ultimate Pressure
0.007 mbar
(0.005 Torr)

1 Normal Pumping Speed 4 min Standby Power nXDS15i 100-127 V, 200-240 V, 1ph 50-60 Hz A73701983
2 Normal Full Power 5 min Standby Speed nXDS15iC 100-127 V, 200-240 V, 1ph 50-60 Hz A73702983
3 Normal GB speed nXDS15iR 100-127 V, 200-240 V, 1ph 50-60 Hz A73703983

nXDS20i Performance Curve nXDS20i
Peak pumping speed
22.0 m3h-1
(13.0 ft3min-1)
Ultimate Pressure
0.030 mbar
(0.022 Torr)

1 Normal Pumping Speed 4 min Standby Power nXDS20i 100-127 V, 200-240 V, 1ph 50-60 Hz A73801983
2 Normal Full Power 5 min Standby Speed nXDS20iC 100-127 V, 200-240 V, 1ph 50-60 Hz A73802983
3 Normal GB speed nXDS20iR 100-127 V, 200-240 V, 1ph 50-60 Hz A73803983
64. Small Dry Pumps

Dimensions
nXDS dimensions Pump views
149
55
302.3
285
266
160
145
189
265
432
225
347
295
230
120
A
B
A 9 mm wide slots 4 off

B Rubber feet 4 off
All nXDS variants are of the same dimensions.
Dimensions in mm (inch).
Technical Data
Units nXDS6i nXDS10i nXDS15i nXDS20i
Nominal rotational speed rpm 1800
Displacement m3h-1 / ft3min-1 6.8 / 4.0 12.7 / 7.5 17.1 / 10.1 28.0 / 16.5
Peak pumping speed m h / ft min
3 -1 3 -1
6.2 / 3.6 11.4 / 6.7 15.1 / 8.9 22.0 / 13.0
Ultimate vacuum (total pressure) mbar / Torr 0.020 / 0.015 0.007 / 0.005 0.030 / 0.022
Minimum standby rotational speed rpm 1200
Speed control resolution 1%
(percentage of full rotation speed)
Max water vapour pumping rate gh-1 110 145 145 220
Maximum continuous inlet pressure mbar 200 50
Voltage input V 100-127, 200-240 (+/-10%)
Voltage frequency Hz 50/60
Motor power 1-ph* W 260 280 300 260
Power connector 1-ph IEC EN60320 C13
Weight kg / lb 26.2 / 58 25.8 / 57 25.2 / 56 25.6 / 56
Inlet flange NW25
Exhaust flange NW25
Noise level** dB(A) 52
Vibration at inlet flange mms-1(rms) < 4.5
Leak tightness (static) mbar ls-1 < 1 x 10-6
Operating temperature range o
C/F 10 to 40 / 41 to 104
* Typical.
** For low fan speed, typical at ultimate end when load/ambient conditions allow.
66. Small Dry Pumps

Service, Spares and Accessories
The control cable is used to connect the nXDS pump directly to the RS485 or RS232 serial input on your
control equipment or a PC, or alternatively, to an Edwards controller such as a TIC (Turbo Instrument
Controller) or TAG (Turbo & Active Gauge controller).
Pump to TIC/TAG Controller Cable

Product description Order no: Product description Order no:
Interface cable 1.0 m D39700835 2 m electrical supply cable for 1-ph pumps, UK, three-pin plug A50505000
Interface cable 2.0 m D39700836 2 m electrical supply cable for 1-ph pumps, North European plug A50506000
Interface cable 5.0 m D39700837 2 m electrical supply cable for 1-ph pumps, North America/Japan plug A50507000
2 m electrical supply cable for 1-ph pumps, no plug A50508000
Gas Ballast Adaptor

Gas Ballast adaptor blank A73501806
Gas Ballast Adaptor 0.25mm restrictor A73501809
Gas Ballast Adaptor no restrictor A73501811
Exhaust
Exhaust silencer A50597000
Silencer spares kit A50597800
NW25 inlet/outlet filter 5 micron A50597805
XDS Filter 5 micron element kit A50597802
XDS Filter 1 micron element kit A50597803
Vibration Isolator
nXDS Vibration isolator (0.45 kg) A24701441
Chemical Resistance Conversion Unit

nXDS6i, 10i & 15i Chemical resistance conversion unit A73501807
nXDS20i Chemical resistance conversion unit A73501808
nXDS Service kits

nXDS Exhaust and gas ballast kit A73501803
nXDS Tip seal service kit A73501801
nXDS Bearing replacement kit A73501802
Service
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France,
Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A. and a worldwide network of distributors.
The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training courses.
Order spare parts and accessories from your nearest Edwards company or distributor.
When you order, please state for each part required:
• Model and item number of your equipment.
• Serial number (if any).
• Item number and description of the part.
XDS SCROLL VACUUM PUMP
XDS scroll pumps have become industry standard when dry pumping is essential, proving to be a
robust and clean vacuum pump solution in a range of applications and processes.
The XDS35i pump has an innovative bearing shield that isolates the vacuum environment from all
forms of lubricant, making it not only lubricant-free but hermetically sealed. XDS35iNGB variant has
had the gas ballast feature removed for applications such as rare gas recirculation and gas recovery.
The XDS46i shares many of the same features of the XDS35i but with a peak speed of 40 m3h-1.
The pump has been optimised for maximum pumping speed at inlet pressures between 1 mbar
and 10 mbar, making it ideally suited for LCMS and ICPMS
applications requiring higher pumping speeds.
The C variant has been modified so that it is more suitable for use on vapour handling processes and
may be used in some applications using corrosive substances. The C version is fitted with Chemraz®
internal valve pads and stainless steel exhaust port.
Chemraz® is a registered trademark of Greene Tweed

• Lubricant-free within the vacuum envelope and • Automotive; brake line and
hermetically sealed means a totally clean and air conditioning evacuation.
dry vacuum to prevent cross contamination. • Backing turbomolecular pumps.
• No atmosphere to vacuum shaft seals means bearings • Chemical applications including gel dryers and
are completely isolated, this prevents process attack solvent recovery.
and enable the bearings to run cooler and last longer. • Coating systems.
• No oil to change eliminating cost of contaminated • High energy physics.
oil disposal. • Mass spectrometry.
• Simple single sided scroll design allows maintenance
to be done in minutes for low cost of ownership and Pump Range
maximum up‑time. XDS
• Inverter drive for consistent pumping speeds worldwide. -- XDS35i
• Pump range includes 35 and 40 m3h-1. -- XDS35iNGB
-- XDS35iC
-- XDS46i
-- XDS46iC
68. Small Dry Pumps

Performance Curves
XDS35i Scroll vacuum pump

XDS35i XDS35i Performance Curve
Peak pumping speed 40
35 m h
3 -1 35
1
30
(21 ft3min-1) 25
(m3 h -1)
Ultimate Pressure 20
2
15
1 x 10-2 mbar
10
XDS35i
(8 x 10-3 Torr) 5
0
10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 (mbar)
-1 0 1 2 3 4 5 (Pa)
10 10 10 10 10 10 10
XDS35i 100-120/200-230V 1 ph 50/60 Hz set to 230V A73001983 1 Speed
XDS35i NGB 100-120/200-230V 1 ph 50/60 Hz set to 230V A73005983 2 Power
XDS35iC 100-120/200-230V 1 ph 50/60 Hz set to 230V A73006983
Note: Mains leads must be ordered separately, please see accessories and
spares at the end of this section for the relevant standard XDS pump for the
correct mains lead.
XDS46i Scroll vacuum pump

XDS46i XDS46i Performance Curve
Peak pumping speed

40 m3h-1
(23.5 ft3min-1)
(m3 h -1)
Ultimate Pressure
5 x 10-2 mbar (W)
(4 x 10-2 Torr)
XDS46i
(mbar)
Ordering information (Pa)
(mbar)

XDS46i 100-120/200-230V 1 ph 50/60 Hz set to 230V A73101983 1 Speed
XDS46iC 100-120/200-230V 1 ph 50/60 Hz set to 230V A73106983 2 Power
Note: Mains leads must be ordered separately, please see accessories and
spares at the end of this section for the relevant standard XDS pump for the
correct mains lead.
Dimensions
XDS35i/46i dimensions Pump views
333 (13.11)
180
(7.09)
50
(1.97)
397 (15.63)
388 (15.28)
224 (8.82)
290 (11.42)
476 (18.74)
212
(8.35) 1
A
B
353 (13.90)
XDS35i / 46i
A 150 (5.91)
B 247.5 (9.74)
1 NW40
2 NW25
70. Small Dry Pumps

Technical Data
Units XDS35i XDS46i
Displacement 50 or 60 Hz m h / ft min
3 -1 3 -1
43 / 25 60 / 35
Peak pumping speed 50 or 60 Hz m3h-1 / ft3min-1 35 / 21 40 / 23.5
Ultimate vacuum (Total pressure) mbar / Torr 1 x 10-2 / 8 x 10-3 5 x 10-2 / 4 x 10-2
Max inlet pressure for water vapour mbar / Torr 35 / 23 40 / 30
Max water vapour pumping rate – GB I gh-1
70 -
Max water vapour pumping rate – GB II gh-1 240 -
Max allowed outlet pressure bar gauge / psig* 0.2 / 2.9
Max allowed inlet and GB pressure bar gauge / psig* 0.5 / 7
Motor power kW 0.52
Power connector IEC EN60320 C19
Nominal rotation speed rpm 1750
Weight kg / lb 48 / 105
Inlet flange NW40
Exhaust flange NW25
Noise level dB(A) 57 55.4
Vibration mms -1 (rms) < 4.5
Leak tightness (static) mbar ls-1 < 1 x 10-6
Operating temperature range ˚C / F 10 to 40 / 50 to 104
*1 bar gauge / 14 psig for short period of time only

XDS Accessories XDS kits
Exhaust silencer XDS35i A50597001 Tip seal kit XDS35i A73001801
Gas Ballast Adapter with 0.25 mm hole A50626801 Tip seal kit XDS46i A73101801
XDS NW25 Inlet Outlet filter A50597805 Silencer spares kit A50597801
XDS NW40 Inlet Outlet Filter A50597806
XDS Filter 5 micron Element kit A50597802 Electrical Supply Cable
XDS Filter 1 micron Element kit A50597803
Vibration Isolator A24801408
2 m Electrical supply cable, no plug A50508003
2 m Electrical supply cable, North America/ A50507003
Japan plug
2 m Electrical supply cable, North European plug A50506003
2 m Electrical supply cable, UK, three-pin plug A50505003
Service
XDD1 DIAPHRAGM VACUUM PUMP
XDD1 diaphragm pumps are used for backing small compound turbomolecular pumps in clean, high
vacuum applications, and also designed to be free standing bench top units. A typical ultimate pressure of
better than 5 x 10-8 mbar can be achieved when using an XDD1 to back a 70 ls-1 turbomolecular pump.
The 24 V version is designed to provide a complete pumping package using the Edwards Turbo and
Instrument Controller (TIC). The d.c. voltage motor runs on 24 V via a 15 pin DIN connector. By selecting
the appropriate mode the pump speed can be controlled by the user to provide variable pumping speed.
This version is suited to the customer who is building their own a system. The pump is a compact and
efficient. Under normal conditions the XDD1 is virtually maintenance free, the lifetime of the diaphragms
and valves is typically > 10,000 operating hours, depending on the application.

• Dry pumping, lubricant free technology eliminating the • Residual gas analysis.
need for costly oil changes and disposal. • Mass spectrometers.
• Lightweight and compact with a small footprint allowing • Cryostat and Dewar evacuation.
flexibility of use. • Ion pump evacuation.
• Ideal backing pump for small turbomolecular pumps. • Surface science.
• Complies with EN61010, EN1012, CSA/UL standards.
Pump Range
• Worldwide 115/230 V or 24 V options.
• IEC 60320 C14 connector on a.c. pumps. XDD1
-- XDD1 115/230 V AC
-- XDD1 24 V DC
72. Small Dry Pumps

Performance Curves
XDD1 Diaphragm vacuum pump

XDD1 XDD1 Performance Curve
Pumping speed 1.80
a.c. 1.2 m h 50Hz

3 -1 1.60
1.4 m3h-1 60 Hz
1.40
1.20
2
d.c. 0.6 m3h-1 600 rpm
(m 3 h -1)
1.00 1
1.4 m3h-1 1700 rpm

0.80
0.60
(factory setting)
0.40
1.7 m3h-1 2200 rpm

XDD1 A.C
0.20
0.00
Ultimate vacuum (typical) 10 0
10 1
10 2
10 3
(mbar)
< 2 mbar 10 2
10 3
10 4
10 5
(Pa)
XDD1 Diaphragm pump 100-115 V/200-230 V 50/60 Hz A74602983 1 50 Hz 2 60 Hz
XDD1 Diaphragm pump 24 V d.c. A74602991
1.80
1.60
1.40
Pumps are not supplied with connection cables. A suitable cable should 1.20
be ordered with the pump.
(m 3 h -1)
2
1.00
0.80
0.60
1
0.40
XDD1 D.C
0.20
0.00
0 1 2 3
10 10 10 10 (mbar)
2 3 4 5
10 10 10 10 (Pa)
Dimensions 1 600 rpm 2 2200 rpm
XDD1 a.c. dimensions

1
215
144
149
162
61
10
22
2 226 45 323
117 313
XDD1 d.c. dimensions

1
142
149
163
164
22
58
10
2 126 35 232
117
223
1 Inlet 2 Outlet
Technical data
Units XDD1 Units XDD1
Pumping speed Motor power
a.c. a.c. W 80
50 Hz mh3 -1
1.2 d.c. W 64
60 Hz mh3 -1
1.4 Weight
d.c. a.c. kg 6.5
d.c. kg 4.1
600 rpm (factory settings) m3h-1 0.6
1700 rpm (factory settings) mh3 -1
1.4
2200 rpm m3h-1 1.7
Ultimate vacuum (typical) mbar <2
Ambient temperature limit ˚C 10 to 40
Inlet connection NW16
The pump is fitted with a silencer which can
Exhaust connection be removed and an exhaust line connected
with a ⅛” BSP fitting
Max allowed inlet pressure bar (abs) 1

Service kit
XDD1 diaphragm service kit A74601800
2 m Electrical Supply Cable

2 m electrical supply cable for 1-ph pumps, UK plug 3A A50516000
2 m electrical supply cable for 1-ph pumps, North European plug A50506000
2 m electrical supply cable for 1-ph pumps, North America/Japan plug A50507000
Extension cable
XDD/DX/EXDC Extension cable 1 m D39700835

Service
74. Small Dry Pumps

D-LAB DIAPHRAGM VACUUM PUMP
PERFORMANCE YOU CAN RELY ON
D-LAB membrane pumps with their chemically resistant Teflon® heads, diaphragms and Kalrez®
valves, offer the chemical or pharmaceutical laboratory user a wide range of choice.
The one head, 100 mbar ultimate vacuum pumps are suitable for use with drying equipment or
for replacing water-jet pumps, whilst the two head, 8 mbar ultimate vacuum pumps are suitable
for rotary evaporation, gas transfer and a wide range of medium vacuum applications.

• 100% lubricant free, maintenance free and quiet. • Rotary evaporation.
• Six different pumping capacities and modular expansion – • Gel drying.
the D-LAB can be optimised for any application. • Vacuum desiccation.
• All parts of the pump head in contact with gases being • Vacuum filtration.
pumped are resistant against aggressive substances • Vacuum degassing.
(PTFE, FFKM, PVDF).
Pump Range
D-LAB
-- D-LAB 10-100
-- D-LAB 20-100
-- D-LAB 34-100
-- D-LAB 10-8
-- D-LAB 20-8
-- D-LAB 34-8
Performance Curves
D-LAB Diaphragm vacuum pump

D-LAB Ordering information
Pumping speed (air) Product description Order no:
10-100, 10-8 0.6 m h , 10 lmin
3 -1 -1 D-LAB 10-100, diaphragm pump, 110 V, 60 Hz, 1-ph A48015941
20-100, 20-8 1.2 m3h-1 , 20 lmin-1 D-LAB 10-100, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48015960
34-100, 34-8 2.0 m h , 34 lmin
3 -1 -1 D-LAB 20-100, diaphragm pump, 110 V, 60 Hz, 1-ph A48017941
Ultimate vacuum, 50 Hz (60 Hz) D-LAB 20-100, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48017960
D-LAB 34-100, diaphragm pump, 110 V, 60 Hz, 1-ph A48021941
10-100, 100 mbar
20‑100, 34-100 (75 mbar) D-LAB 34-100, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48021960
10-8, 20-8, 34-8 8 mbar (6 mbar) D-LAB 10-8, diaphragm pump, 110 V, 60 Hz, 1-ph A48016941
D-LAB 10-8, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48016960
D-Lab 20-8, diaphragm pump, 110 V, 60 Hz, 1-ph A48018941
110 V pumps are supplied with USA plug; 220-240 V pumps are D-Lab 20-8, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48018960
supplied with an IEC connector but mains cable with correct plug
D-LAB 34-8, diaphragm pump, 110 V, 60 Hz, 1-ph A48022941
must be ordered separately.
D-LAB 34-8, diaphragm pump, 220-240 V, 50 Hz, 1-ph A48022960
D-LAB Performance Curve
2.2 2.2
2 D-LAB, 50Hz D-LAB, 50Hz
2
1.8 1 1.8 1
2 2
1.6 3 1.6 3
1.4 1.4
(m3 h -1)
1.2 1.2
(m3 h -1)
1 1
0.8 0.8
0.6 0.6
0.4 0.4
0.2 0.2
0 0
0 100 200 300 400 500 600 700 800 900 1000 (mbar) 0 100 200 300 400 500 600 700 800 900 1000 (mbar)
0 1 2 3 4 5 6 7 8 9 10 (Pa) 0 1 2 3 4 5 6 7 8 9 10 (Pa)
1.3 1.3
1.2 D-LAB, 60Hz 1.2 D-LAB, 60Hz
1.1 1.1 1
1
1 2 1 2
0.9 3 0.9 3
(ft 3 min -1 )
0.8 0.8
(ft 3 min -1 )
0.7 0.7
0.6 0.6
0.5 0.5
0.4 0.4
0.3 0.3
0.2
0.2
0.1
0.1
0
0 (Torr)
(Torr) 0 108 217 325 434 541 649 760
0 108 217 325 434 541 649 760
1 D-LAB 34-100 1 D-LAB 34-8

2 D-LAB 20-100 2 D-LAB 20-8
3 D-LAB 10-100 3 D-LAB 10-8
76. Small Dry Pumps

Dimensions
DLAB dimensions
One head pump Two head pump
A B
A B C D E F
10-100 255 50 182 144 98 -
20-100 268 60 204 157 110 -
34-100 296 60 222 172 122 -
10-8 288 53 184 - 98 140
20-8 312 59 204 - 110 153
34-8 341 62 222 - 122 169
Technical Data
Units D-LAB
Pumping speed (air)
10-100, 10-8 m3h-1 / lmin-1 0.6 / 10
20-100, 20-8 m h / lmin
3 -1 -1
1.2 / 20
34-100, 34-8 m3h-1 / lmin-1 2 / 34
Ultimate vacuum
10-100, 20-100, 34-100 mbar, Hz / mbar, Hz 100, 50 / 75, 60
10-8, 20-8, 34-8 mbar, Hz / mbar, Hz 8, 50 / 6, 60
Inlet and outlet connection Riffled nozzle, suitable for 9 mm i.d. hose
Maximum inlet pressure bar 1
Motor power and current
10-100, 110 V 60 Hz W/A 110 / 1.3
10-100, 220-240 V 50Hz W/A 100 / 0.6
20-100, 110 V 60 Hz W/A 145 / 1.9
20-100, 220-240 V 50Hz W/A 130 / 0.9
34-100, 110 V 60 Hz W/A 220 / 3.2
34-100, 220-240 V 50Hz W/A 180 / 1.4
10-8, 100 V 60 Hz W/A 110 / 1.3
10-8, 220-240 V 50Hz W/A 90 / 0.6
20-8, 110 V 60 Hz W/A 130 / 1.2
20-8, 220-240 V 50Hz W/A 120 / 0.9
34-8, 110 V 60 Hz W/A 250 / 3.2
34-8, 220-240 V 50 Hz W/A 200 / 1.5
Enclosure rating IP44
Operating temperature o
C 5-40
Weight
10-100 kg / lbs 5.8 / 12.8
20-100 kg / lbs 7.1 / 15.6
34-100 kg / lbs 10.3 / 22.7
10-8 kg / lbs 6.9 / 15.2
20-8 kg / lbs 9.3 / 20.5
34-8 kg / lbs 12.6 / 27.7
78. Small Dry Pumps

D-LAB Accessories
D-LAB Controller 230 V A48015138
D-LAB Controller 100/110 V A48015139
D-LAB Baseplate 10+20-x A48015134
Baseplate for D-LAB pumps 34-100, 34-8 A48021134
D-LAB Separator A48015136
D-LAB Condenser A48015137
Gas Ballast for D-LAB pumps 10-100, 10-8 A48015135
Gas Ballast for D-LAB pumps 20+34-8 A48017135
Electrical Supply Cable

2 m electrical supply cable for 1-ph pumps, UK, three-pin plug A50505000
2 m electrical supply cable for 1-ph pumps, North European plug A50506000
Service kits
Service kit for D-LAB 10-100 A48015815
Service
80.
SMALL OIL SEALED PUMPS
E2M0.7 and 1.5 Oil Sealed Rotary Vane Pumps 82

RV Oil Sealed Rotary Vane Pumps 86
RV ATEX Oil Sealed Rotary Vane Pumps 94
EM18 and 28 Oil Sealed Rotary Vane Pumps 97
EM18 and E2M18 Atex Oil Sealed Rotary Vane Pumps 103
Shop online at shop.edwardsvacuum.com Contact our customer service team Small Oil Sealed Pumps 81.
E2M0.7 AND 1.5 OIL SEALED ROTARY VANE PUMPS
E2M0.7 and E2M1.5 two stage oil sealed rotary vane pumps are renowned for achieving high
ultimate vacuum and rapid pumping speeds, with quiet operation and compact size. Providing long
term reliability, these pumps have become the industry standard in range of scientific and laboratory
applications, and the ideal partner for your tubomolecular pump.
The drive is provided through and Oldham coupling by a single phase motor. The motor is totally enclosed
and cooled by the motor‑cooling fan which directs the air along the motor fins. A thermal overload device is
fitted to the motor which switches off the pump if the motor gets too hot, this will automatically reset when
the motor cools down and restarts the pump.

• Pumping speeds of either 0.7 to 1.5 m3h‑1. • Analytical instruments.
• Industry proven long term reliable performance. • Leak detectors, helium.
• Free standing, compact design providing • Research and development.
flexibility of use. • Backing turbomolecular pumps.
• Alternate side inlet connection port so that overall • Laboratory bench top vacuum.
installation height can be reduced to minimum
when required. Pump Range
• Low noise, with the E2M0.7 at just 43 dB(A). EM
• Low energy consumption, with the E2M0.7 at 0.09 kW. -- E2M0.7
• O ring sealed sight glass allows visual inspection of oil -- E2M1.5
level and condition.
• Gas ballast valve for large water vapour handling capacity.
• Simple installation and operation with no
customer wiring.
• Forced air cooling ensures low pump surface temperature.
• Internal ATEX classification of Ex II 3 G c IIB T4.
• Approved EN61010, CSA22.2 and UL61010.
82. Small Oil Sealed Pumps

Performance Curves
E2M0.7 Rotary vane pump

E2M0.7 E2M0.7 Performance Curve
Displacement
0
10
50 Hz 0.9 m3h‑1/0.5 ft3min‑1

60 Hz 1.1 m3h‑1/0.6 ft3min‑1
-1
10
(m3 h -1)
Speed
50 Hz 0.75 m3h‑1/0.4 ft3min‑1
-2
10
60 Hz 0.95 m3h‑1/0.5 ft3min‑1 50Hz

-3
10
-3 -2 -1 0 1 2
10 10 10 10 10 10 (mbar)
10
-1
10
0
10
1
10
2
10
3
10
4 (Pa)
0
10

E2M0.7 200‑230 V, 1‑ph, 50/60 Hz, IEC 60320 connectors A37141919 10
-1
(ft 3 min -1 )
E2M0.7 100‑120 V, 1‑ph, 50/60 Hz, IEC 60320 connectors A37141902
-2
10
Each EM0.7 pump is supplied with 1 litre of Ultragrade 15 oil, O ring and
60Hz
centering ring, two Allen keys and spare seals for oil drain and filter plugs. -3
10
-3 -2 -1 0 1 2
10 10 10 10 10 10 (Torr)
E2M1.5 Rotary vane pump

E2M1.5 E2M1.5 Performance Curve
Displacement 10
1
50 Hz 1.8 m3h‑1/1 ft3min‑1

60 Hz 2.2 m3h‑1/1.3 ft3min‑1 10
0
(m3 h -1)
Speed
50 Hz 1.6 m3h‑1/0.8 ft3min‑1 10
-1
60 Hz 2.0 m3h‑1/1.2 ft3min‑1

1 2 50Hz
-2
10
-3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 (mbar)
10
-1
10
0
10
1
10
2
10
3
10
4
10
5 (Pa)
Product description Order no: 10

1
E2M1.5 200‑230 V, 1‑ph, 50/60 Hz, IEC 60320 connectors A37132919

E2M1.5 100‑120 V, 1‑ph, 50/60 Hz, IEC 60320 connectors A37132902 10
0
(ft 3 min -1 )
E2M1.5 interstage 200‑230 V, 1‑ph, 50/60 Hz, A37104919

IEC 60320 connectors -1
10
E2M1.5 interstage 100‑120 V, 1‑ph, 50/60 Hz, A37104902
IEC 60320 connectors 2 60Hz
-2
10
-3 -2 -1 0 1 2 3 (Torr)
10 10 10 10 10 10 10
Each EM1.5 pump is supplied with 1 litre of Ultragrade 15 oil, O ring and
centering ring, two Allen keys and spare seals for oil drain and filter plugs.
1 Without Gas Ballast
2 With Gas Ballast
Dimensions
E2M0.7/1.5. dimensions
142 (5.59)
323 (12.71)
2 134 (5.27)
46.5 (1.83)
30 (1.18)
1 54 (2.12)
19 (0.75)
166.5 (6.55)
155 (6.10)
226.5 (8.91)
155 (6.10)
18 (0.70)
25 (0.98)
85 (3.34) 75 (2.95)
11.5 (0.45)
110 (4.33) 3 140 (5.51)
125 (4.92)
① 220-240 V motor
② Handle can be removed
③ Alternative inlet position
Technical Data
Units E2M0.7 E2M1.5

Displacement (swept volume)
50 Hz m3h‑1/ft3min‑1 0.9/0.5 1.8/1
60 Hz m h /ft min
3 ‑1 3 ‑1
1.1/0.6 2.2/1.3
Speed (Pneurop 6602)
50 Hz m3h‑1/ft3min‑1 0.75/0.4 1.6/0.8
60 Hz m h /ft min
3 ‑1 3 ‑1
0.95/0.5 2.0/1.2
Ultimate vacuum (total pressure)
without gas ballast mbar/Torr 3.0 x 10‑3/2.3 x 10‑3 3 x 10‑3/2.3 x 10‑3
with full gas ballast mbar/Torr 2.0 x 10 1.5 x 10
‑1/ ‑1
2.5 x 10‑2/1.9 x 10‑2
Inlet connection NW10 flange
Outlet connection Nozzle 11 mm external Ø removable from ⅜" BSP tapped hole
Maximum permitted pressure at outlet 0.5 bar gauge/7 psig
Maximum inlet pressure for water vapour mbar/Torr 15/11
Maximum water vapour pumping rate gh ‑1
8 16
Motor power kW 0.09 0.16
Nominal rotational speed 50/60 Hz rpm 1400/1700 2800/3400
Operating temperature range ˚C 12-40
Weight, without oil kg/lbs 10/22
Noise dB(A) 43 @ 50 Hz 54 @ 50 Hz
Noise with acoustic enclosure dB(A) E2M0.7 36 dB(A) @ 50 Hz E2M1.5 47 dB(A) @ 50 Hz
Oil capacity – maximum litre 0.28
Oil capacity – minimum litre 0.2
Recommended oil (supplied) Ultragrade 15

Model EMF3 mist filter A46220000
Ultragrade 15 oil 1 litre H11026015
2 m electrical supply cable for 1‑ph pumps, UK, three‑pin plug A50505000
2 m electrical supply cable for 1‑ph pumps, North European plug A50506000
2 m electrical supply cable for 1‑ph pumps, North America/Japan plug A50507000
2 m electrical supply cable for 1‑ph pumps, no plug A50508000
Spares Kit C&O E2M0.7/1/1.5 A37101131
Spares Kit Blade E2M0.7/1.5 A37101132
NW10 Centring Nitrile S/S Pk1 C10511396
NW10 O Ring Viton Pk 5 H02124032
NW10 x ⅜'' BSP adapter A25908064
Service
RV OIL SEALED ROTARY VANE PUMPS
The RV series of small oil sealed rotary vane pumps deliver excellent ultimate vacuum pressure,
high pumping speeds and superior vapour handling capabilities with quiet operation. With over
300,000 units produced, these pumps offer proven performance that sets the industry standard for
R&D and scientific pumping applications.
All RV pumps are approved to UL and CSA standards by an external test house and feature our
unique mode selector switch, meaning one model is suitable for both high vacuum or high
throughput applications. In summary, you can rest assured that when you choose an Edwards RV oil
sealed rotary vane pump you are choosing a product you can rely on from a company you can trust.

• High reliability – generous lubrication of moving parts. • Analytical instruments.
• Safe process and systems – fast acting inlet valve for best • Laboratory bench top vacuum.
in class anti‑suck back protection. • Backing turbomolecular pumps.
• Configured to meet your vacuum needs – mode selector • Freeze drying.
and two position gas ballast. • Research and development.
• No unplanned downtime – designed for easy maintenance.
• Better work environment – quiet running and intrusive
Pump Range
frequencies minimised. RV3 RV8
• Two position gas ballast allows either 60 g/hr or a class -- RV3 -- RV8
leading 220 g/hr (290 g/hr on RV12) of water vapour to -- PFPE RV3 -- PFPE RV8
be handled.
• Universal motor to cover the widest possible voltage and RV5 RV12
frequency range from a single variant. -- RV5 -- RV12
• Smooth controlled inlet valve opening by oil pressure to -- PFPE RV5 -- PFPE RV12
eliminate pressure surges.
• Rapid closing inlet valve within 0.4 seconds of
pump stopping.

Performance Curves
RV3 Oil Sealed Rotary Pump

RV3 RV3 Performance Curve
Displacement
1
10
50 Hz 3.7 m3h‑1 1
2
2.2 ft3min‑1
0
10
3
(m3 h -1)
60 Hz 4.5 m3h‑1
2.6 ft3min‑1
-1
10
Speed (Pneurop 6602) RV3, 50Hz
50 Hz 3.3 m3h‑1
-2
10
-3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 (mbar)
2.0 ft3min‑1
-1 0 1 2 3 4 5
10 10 10 10 10 10 10 (Pa)
60 Hz 3.9 m3h‑1
2.3 ft3min‑1
1
10
(ft 3 min -1 ) 1
RV3 115/230 V, 1‑ph, 50/60 Hz, A65201903 10
0 2
3
factory set to 230 V for Europe
RV3 100/200 V, 1‑ph, 50/60 Hz, factory set to 200 V A65201904
for Japan RV3, 60Hz
-1
10
RV3 200‑220/380‑415 V, 3‑ph, 50 Hz and 200‑230/460 V, A65201905 10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
(Torr)
3‑ph, 60 Hz factory set to 380/460 V
RV3 115/230 V, 1‑ph, 50/60 Hz, factory set to 115 V A65201906
for USA
PFPE RV3 115/230 V, 1‑ph, 50/60 Hz, A65209903
1 High vacuum mode, gas ballast = 0
PFPE RV3 100/200 V, 1‑ph, 50/60 Hz, A65209904
factory set to 200 V for Japan 2 High throughput mode, gas ballast mode = 0 and
High vacuum mode, gas ballast = I
PFPE RV3 200‑220/380‑415 V, 3‑ph, 50 Hz and A65209905
200‑230/460 V, 3‑ph, 60 Hz, factory set to 380/460 V 3 High vacuum and throughput mode, gas ballast = II
PFPE RV3 115/230 V, 1‑ph, 50/60 Hz, A65209906

factory set to 115 V for USA
Each RV pump is supplied with 1 litre of Ultragrade 19 oil, inlet

filter and O ring. For PFPE prepared pumps Fomblin® oil to be
ordered separately.
RV5 Performance Curve RV5
Displacement
1
10
50 Hz 5.8 m3h‑1
1
0
2
10
3 3.4 ft3min‑1
(m3 h -1)
60 Hz 7.0 m3h‑1
-1
4.1 ft3min‑1
10
RV5, 50Hz Speed (Pneurop 6602)

-2
10
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
(mbar) 50 Hz 5.1 m3h‑1
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
(Pa) 3.0 ft3min‑1
60 Hz 6.2 m3h‑1
3.7 ft3min‑1
1
10
1
(ft 3 min -1 )
2
10
0
3 Product description Order no:
RV5 115/230 V, 1‑ph, 50/60 Hz, factory set to 230 V for Europe A65301903
RV5 100/200 V, 1‑ph, 50/60 Hz, factory set to 200 V for Japan A65301904
RV5, 60Hz
RV5 200‑220/380‑415 V, 3‑ph, 50 Hz and 200‑230/460 V,
-1
10
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
(Torr) A65301905
3‑ph, 60 Hz, factory set to 380/460 V
RV5 115/230 V, 1‑ph, 50/60 Hz, factory set to 115 V for USA A65301906
PFPE RV5 115/230 V, 1‑ph, 50/60 Hz,
A65309903
PFPE RV5 100/200 V, 1‑ph, 50/60 Hz,
A65309904
factory set to 200 V for Japan
1 High vacuum mode, gas ballast = 0
PFPE RV5 200‑220/380‑415 V, 3‑ph, 50 Hz and
2 High throughput mode, gas ballast mode = 0 and A65309905
200‑230/460 V, 3‑ph, 60 Hz, factory set to 380/460 V
High vacuum mode, gas ballast = I
PFPE RV5 115/230 V, 1‑ph, 50/60 Hz,
3 High vacuum and throughput mode, gas ballast = II A65309906

ordered separately.

Performance Curves
RV8 RV8 Performance Curve
Displacement 10
1
1
50 Hz 9.7 m3h‑1 2
3
5.7 ft3min‑1 10
0
(m3 h -1)
60 Hz 11.7 m3h‑1
6.9 ft3min‑1 10
-1

RV8, 50Hz
50 Hz 8.5 m3h‑1 10
-2
-3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 (mbar)
5.0 ft3min‑1
-1 0 1 2 3 4 5
60 Hz 10 m3h‑1
10 10 10 10 10 10 10 (Pa)
5.9 ft3min‑1 1
10
1
0
2
(ft 3 min -1 ) 3
RV8 115/230 V, 1‑ph, 50/60 Hz, factory set to 230 V for Europe A65401903
RV8 100/200 V, 1‑ph, 50/60 Hz, factory set to 200 V for Japan A65401904 10
-1
RV8 200‑220/380‑415 V, 3‑ph, 50 Hz and 200‑230/460 V,

A65401905
3‑ph, 60 Hz, factory set to 380/460 V RV8, 60Hz
-2
RV8 115/230 V, 1‑ph, 50/60 Hz, factory set to 115 V for USA A65401906
10
-3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 (Torr)
PFPE RV8 115/230 V, 1‑ph, 50/60 Hz,

A65409903
PFPE RV8 100/200 V, 1‑ph, 50/60 Hz,
A65409904
factory set to 200 V for Japan 1 High vacuum mode, gas ballast = 0
PFPE RV8 200‑220/380‑415 V, 3‑ph, 50 Hz, and 2 High throughput mode, gas ballast mode = 0 and
A65409905
200‑230/460 V, 3‑ph, 60 Hz, factory set to 380/460 V High vacuum mode, gas ballast = I
PFPE RV8 115/230 V, 1‑ph, 50/60 Hz, 3 High vacuum and throughput mode, gas ballast = II
A65409906

ordered separately.
RV12 Performance Curve RV12
10
2
Displacement
50 Hz 14.2 m3h‑1
1
10
1 8.4 ft3min‑1
2
3
60 Hz 17 m3h‑1
(m3 h -1)
0
10
-1
10 ft3min‑1
10
RV12, 50Hz
10
-2
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
(mbar)
50 Hz 12 m3h‑1
7.1 ft3min‑1
-1 0 1 2 3 4 5
10 10 10 10 10 10 10 (Pa)
60 Hz 14.2 m3h‑1
8.4 ft3min‑1
1
10
1
3
(ft 3 min -1 )
0
RV12 115/230 V, 1‑ph, 50/60 Hz, A65501903
10
RV12 100/200 V, 1‑ph, 50/60 Hz, A65501904

factory set to 200 V for Japan
RV12, 60Hz
10
-1
RV12 200‑220/380‑415 V, 3‑ph, 50 Hz and A65501905
200‑230/460 V, 3‑ph, 60 Hz, factory set to 380/460 V
-3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 (Torr)
RV12 115/230 V, 1‑ph, 50/60 Hz, A65501906

PFPE RV12 115/230 V, 1‑ph, 50/60 Hz, A65509903
PFPE RV12 100/200 V, 1‑ph, 50/60 Hz, A65509904
1 High vacuum mode, gas ballast = 0 factory set to 200 V for Japan
2 High throughput mode, gas ballast mode = 0 and PFPE RV12 200‑220/380‑415 V, 3‑ph, 50 Hz and A65509905
High vacuum mode, gas ballast = I 200‑230/460 V, 3‑ph, 60 Hz, factory set to 380/460 V
3 High vacuum and throughput mode, gas ballast = II PFPE RV12 two stage Rotary vane pump 115/230 V A65509906
1‑ph 50/60 Hz, factory set to 115 V for USA

ordered separately.

Dimensions
RV Dimensions
37 A
32 (1.46) F
(1.26) B C
1 3 NW25 NW25
2
D
221 (8.70)
E
120
(4.72) 4 x Ø9 (0.35) 78 (3.07)
158 (6.22) 230 (9.06) 10 (0.39)
RV3/5 RV8 RV12

A 430 (16.93) 470 (18.50) 490 (19.29)
B 127 (5) 161 (6.34) 181 (7.13)
C 29 (1.14) 35 (1.38) 35 (1.38)
D 4 (0.16) 4 (0.16) 4 (0.16)
E 267 (10.51) 261 (10.28) 261 (0.28)
F 429 (16.89) 469 (18.46) 489 (19.25)
① 1‑Phase motor
② 3‑Phase motor
③ Retractable handle RV3 and 5 only. RV8 and 12 have lifting eye
Technical Data
Units RV3 RV5 RV8 RV12
Displacement
50 Hz m3h‑1/ft3min‑1 3.7/2.2 5.8/3.4 9.7/5.7 14.2/8.4
60 Hz m h /ft min
3 ‑1 3 ‑1
4.5/2.6 7.0/4.1 11.7/6.9 17/10
50 Hz m3h‑1/ft3min‑1 3.3/2 5.1/3.0 8.5/5 12/7.1
60 Hz m h /ft min
3 ‑1 3 ‑1
3.9/2.3 6.2/3.7 10/5.9 14.2/8.4
Ultimate pressure mbar/Torr 2.0 x 10 /1.5 x 10
‑3 ‑3
Ultimate pressure GB I mbar/Torr 3.0 x 10‑2/2.3 x 10‑2

1.2 x 10‑1/ 1.0 x 10‑1/
Ultimate pressure GB II mbar/Torr 6 x 10‑2/4.6 x 10‑2
9.1 x 10‑2 7.5 x 10‑2
Ultimate Pressure with Fomblin® mbar/Torr 2 x 10‑2/1.5 x 10‑2
Max inlet pressure for water vapour mbar/Torr 80/60 50/38 38/28.5 32/24
Max water vapour pumping rate – GB I gh‑1 60
Max water vapour pumping rate – GB II gh‑1 220
Max allowed outlet pressure bar gauge/psig 0.2/2.8
Max allowed inlet and gas ballast pressure bar gauge/psig 0.5/7
Motor power 50/60 Hz W 450/550
Power connector 1‑ph IEC EN60320 C13
Nominal rotation speed 50/60 Hz rpm 1500/1800
Weight (without oil) kg/lb 25/55 28/61.6 29/63.8
Oil capacity min/max litres 0.42/0.7 0.4/0.75 0.65/1
Recommended oil Ultragrade 19
Inlet flange NW25
Exhaust flange NW25
Noise level dB(A) 48 @ 50 Hz
Operating temperature range ˚C 12‑40
Service

Also see p60.
RV Accessories
2 m electrical supply cable for 1‑ph pumps, UK, three‑pin plug A50505000
2 m electrical supply cable for 1‑ph pumps, North European plug A50506000
2 m electrical supply cable for 1‑ph pumps, North America/Japan plug A50507000
2 m electrical supply cable for 1‑ph pumps, no plug A50508000
Model EMF10 mist filter A46226000
Gas Ballast adaptor A50502000
Clean application oil return kit A50419000
Adjustable gas ballast oil return kit A50523000
RV easy oil box drain kit A50503000
Acoustic Enclosure
RV acoustic enclosure 110‑120 V NRD317000
RV acoustic enclosure 200‑240 V NRD318000
Vibration Isolator
RV Vibration isolator (0.45 kg) A24801404
Spares Kits
Spares Kit Cartridge RV3 A65201032
Spares Kit Blade RV3 A65201130
Spares Kit Inlet valve RV3/5/8/12 A65201036
Spares Kit clean and overhaul kit A65201131
Spares Kit clean and overhaul kit (Nitrile) A65201137
Spares Kit outer shaft seal kit RV A65201134
RV ATEX OIL SEALED ROTARY VANE PUMPS
ATEX RV pumps have an external ATEX classification of Ex II 2G IIC T4 and are suitable for use in potentially
explosive atmospheres. They share the same internal ATEX classification as our standard RV pumps, namely
Ex II 3G c IIB T4. ATEX pumps with flameproof motors require the user to provide 2‑off hazardous area cable
glands and cables. In addition, connection of the thermistors to an appropriate safety circuit must be made
to switch off the pump if overheating occurs.
The pumps are supplied with the Gas Ballast port plugged. When pumping flammable gasses or vapours you
must fit an inert gas purge to this port to dilute such gases or vapours below the lower explosive limit.
Features and Benefits

• ATEX rated spot voltage motor.
• Dual mode. Suitable for high throughput and
high vacuum applications.
• Fast acting inlet valve for system protection.
• Efficient high pressure lubrication.
• Oil‑tight with printed gaskets, effective shaft seals.
• Clamped‑in sight glass.
• Oil box well contains filling spills.
• Hi‑tech polymer blades, large diameter, easy‑clean
oil passages.
• Consistent, built‑in quality, cast bar construction.
--

Performance Curves
RV ATEX Oil sealed rotary pump
RV ATEX RV ATEX Performance Curve
2
10 2
10
1
10 1
10
))
-1-1
0
10 0
3 3hh
10 RV3
RV3
(m
RV5
(m
RV5
RV8
-1 RV8
10 -1 RV12
10 RV12
-2
10 -2
10 10 -3 -2
10 -2
-1
10 -1
0
10 0
1
10 1 10 2
2 3
10 3 (mbar)
-3
10 10 10 10 10 10 10 (mbar)
-1 0 1 2 3 4 5 (Pa)
10 -1 10 0 10 1 10 2 10 3 10 4 10 5 (Pa)
10 10 10 10 10 10 10
RV3 RV5 RV8 RV12 1

10 1
10
Displacement
50 Hz 3.7 m3h‑1 5.8 m3h‑1 9.7 m3h‑1 14.2 m3h‑1
2.2 ft3min‑1 3.4 ft3min‑1 5.7 ft3min‑1 8.4 ft3min‑1 3 min ))
-1-1 0 RV3
(ft3 min 10 0 RV3
10 RV5
RV5
RV8
60 Hz 4.5 m h
3 ‑1
7.0 m h
3 ‑1
11.7 m h3 ‑1
17 m h3 ‑1 RV8
(ft
RV12
RV12
2.6 ft3min‑1 4.1 ft3min‑1 6.9 ft3min‑1 10 ft3min‑1

Speed (Pneurop 6602) -1
10 -1
10 -3 -2 -1 0 1 2 3
10 -3 10 -2 10 -1 10 0 10 1 10 2 10 3 (Torr)
10 10 10 10 10 10 10 (Torr)
50 Hz 3.3 m h
3 ‑1
5.1 m h
3 ‑1
8.5 m h
3 ‑1
12 m h3 ‑1
2.0 ft3min‑1 3.0 ft3min‑1 5.0 ft3min‑1 7.1 ft3min‑1

60 Hz 3.9 m h
3 ‑1
6.2 m h
3 ‑1
10 m h3 ‑1
14.2 m3h‑1 Blue No gas purge
2.3 ft3min‑1 3.7 ft3min‑1 5.9 ft3min‑1 8.4 ft3min‑1 Red With inert gas purge
ATEX RV3 115V, 1-ph, 60 Hz ExII 2G IIC T4 * A65219986
ATEX RV3 230 V, 1‑ph, 50 Hz Ex II 2G IIC T4 A65218989
* 750W motor
Each ATEX RV pump is supplied with 1 litre of Ultragrade 19 oil,
inlet filter and O ring.
Dimensions
RV ATEX Dimensions
Pump A B C
RV3 520 mm (20.47”) 127 mm (5”) 29 mm (1.06”)
RV5 520 mm (20.47”) 127 mm (5”) 29 mm (1.06”)
RV8 560 mm (22.05”) 161 mm (6.34”) 35 mm (1.38”)
RV12 580 mm (22.83”) 181 mm (7.13”) 35 mm (1.38”)
Technical Data
Units RV3 ATEX RV5 ATEX RV8 ATEX RV12 ATEX

Displacement
50 Hz m3h‑1/ft3min‑1 3.7/2.2 5.8/3.4 9.7/5.7 14.2/8.4
60 Hz m h /ft min
3 ‑1 3 ‑1
4.5/2.6 7/4.1 11.7/6.9 17/10
50 Hz m3h‑1/ft3min‑1 3.3/2 5.1/3 8.5/5 12/7.1
60 Hz m3h‑1/ft3min‑1 3.9/2.3 6.2/3.6 10/5.9 14.2/8.4
Max allowed outlet pressure bar gauge/psig 0.2/2.8
Max allowed inlet and gas purge pressure bar gauge/psig 0.5/7
Motor power 50/60 Hz W 550 (750 for 115V 1ph 60Hz)
Weight (without oil) kg/lb 28/61.6 31/68.2
Inlet flange NW25
Exhaust flange NW25
Operating temperature range ˚C 12‑40

EM18 AND 28 OIL SEALED ROTARY VANE PUMPS
The EM range of oil‑sealed rotary pumps – renowned for their high ultimate vacuum, rapid pumping
speed, quiet operation and ability to handle vapour – have become the industry standard for
laboratory and light industrial applications. The pump is a freestanding unit with the drive provided
through a flexible coupling by either a single‑phase or three‑phase (four pole) motor.

• The pump is designed for reliable, long‑term operation. • Analytical instruments.
• Thermal overload device prevents overheating • Leak detectors, helium.
(single phase only). • Research and development.
• The drive is provided through a flexible coupling by a • Backing turbomolecular pumps.
single‑phase or three‑phase (four pole) motor. • Automotive.
• The motors are totally enclosed and are cooled by the • Beam lines and high energy physics.
motor cooling fan. • Centrifuges, ultra‑high speed.
• Full height O ring sealed oil sight glass for easy checking • Coating.
of oil level and condition.
• Large sight glass and operating oil range. Pump Range
• IE3 energy efficient 3 phase motor used with E2M28. EM
• E1M18 single stage.
• E1M18 FX single stage.
• E2M18 two stage.
• E2M18 FX two stage.
• E2M28 two stage.
• E2M28 FX two stage.
Performance Curves
E1M18 One stage, E2M18 two stage rotary vane pumps

E1/E2M18 E1/E2M18 Performance Curve
Displacement 10
2
50 Hz 20.5 m h (12.1 ft min )

3 ‑1 3 ‑1
60 Hz 25 m3h‑1 (14.7 ft3min‑1) 10

1
(m 3 h -1)
2 2
50Hz
50 Hz 17 m3h‑1 (10 ft3min‑1) 10
0
E2M18
60 Hz 20.4 m3h‑1 (12.1 ft3min‑1) E1M18
-1
10
-3 -2 -1 0 1 2
10 10 10 10 10 10 (mbar)
-1 0 1 2 3 4
10 10 10 10 10 10 (Pa)
2
10
E1M18 200‑230/380‑415 V, 3‑ph, 50 Hz or A34310940
200‑230/460 V, 3‑ph, 60 Hz
1
(ft 3 min -1 ) 10
60Hz
E1M18 100/200 V, 1‑ph, 50 Hz or 100‑105/200‑210 V, A34315904 E2M18
1‑ph, 60 Hz 10
0
2 2 E1M18
E1M18 115/200‑230 V, 1‑ph, 50/60 Hz with IEC60320 A34317984

connector, factory set to 230V
E1M18 FX 115/200‑230 V, 1‑ph, 50/60 Hz A34325984
-1
10
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (Torr)
with IEC60320 connector
E2M18 200‑230/380‑415 V, 3‑ph, 50 Hz or A36310940
200‑230/460 V, 3‑ph, 60 Hz
E2M18 100/200 V, 1‑ph, 50 Hz or 100‑105/200‑210 V, A36315904
1‑ph, 60 Hz
1 Without gas ballast
E2M18 115/200‑230 V, 1‑ph, 50/60 Hz with A36317984
IEC60320 connector 2 With gas ballast
E2M18 FX 200‑230/380‑415 V, 3‑ph, 50 Hz A36321940
or 200‑230/460 V, 3‑ph, 60 Hz
E2M18 FX 100/200 V, 1‑ph, 50 Hz A36325904
or 100‑105/200‑210 V, 1‑ph, 60 Hz
E2M18 FX 115/200‑230 V, 1‑ph, 50/60 Hz A36325984
with IEC60320 connector fitted
Each EM pump is supplied with 1 litre of Ultragrade 19 oil, O ring and centering ring, two Allen keys and spares seal for oil drain
and filter plugs. For PFPE prepared FX pumps Fomblin® to be ordered separately.

E2M28 two stage Rotary vane pump
E2M28 Performance Curve E2M28
10
2 Displacement
50 Hz 32.2 m3h‑1 (19 ft3min‑1)
10
1 60 Hz 38.9 m3h‑1 (22.3 ft3min‑1)
(m 3 h -1)
Speed (Pne urop 6602)

10
0
50 Hz 27.5 m3h‑1 (16.2 ft3min‑1)
2
50 Hz 60 Hz 33 m3h‑1 (19.5 ft3min‑1)
-1
10
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (mbar)
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5 (Pa)
2
10
E2M28 115/200-230V, 1ph, 50/60 Hz with IEC60320 A37317984
connector fitted
1
10
(ft 3 min -1 )
E2M28 100/200V, 1ph, 50 Hz or 100-105/200-210V, A37315904

10
0 1ph 60Hz
E2M28 HC 3PH IE3 ASIA 50/60HZ 200V 50/60HZ, A37333934
-1
2 60 Hz
380V 60HZ
E2M28 HC 3PH IE3 EU/US 50/60HZ 380-400V 50HZ, A37333940
10
-4 -3 -2 -1 0 1 2 3 (Torr)
10 10 10 10 10 10 10 10
230 / 460V 60HZ
E2M28 FX 115/200-230V, 1ph, 50/60 Hz with IEC60320 A37325984
connector fitted
E2M28 FX 3PH IE3 ASIA 50/60HZ 200V 50/60HZ, A37343934
1 Without gas ballast 380V 60HZ
E2M28 FX 3PH IE3 EU/US 50/60HZ 380-400V 50HZ, A37343940
2 With gas ballast 230 / 460V 60HZ
Each EM pump is supplied with 1 litre of Ultragrade 19 oil, O ring
and centering ring, two Allen keys and spares seal for oil drain
and filter plugs. For PFPE prepared FX pumps Fomblin® to be
ordered separately.
Dimensions
E1M18 and E2M18 dimensions
A
170 (6.69)
B
C
Ø15 E
(0.59) 27.4 (1.08)
226.25 (8.9)
242.5 (9.55)
43 (1.53)
39
16.5 (0.65)
(1.69)
(1.53)
39
10 75
(0.79)
20
(0.39) (2.95) 4 x Ø9 (0.35)

280 (11.02) 10
150 (5.9) (0.39)
F 260 (10.24) D
Order no: A B C D E F G
A34310940 ‑ 474 247 83 159 171.4 217
A34315904 518 474 247 83 159 171.4 241
A34317984 ‑ 504 247 83 159 171.4 251
A36310940 ‑ 520 295 131 207 171.4 217
A36315904 564 520 295 131 207 171.4 241
A36317984 ‑ 550 295 131 207 171.4 251
E2M28 Dimensions
180 (7.09)
A
170 (6.69)
B
155 111
331 (13.03) (6.10) (4.37)
Ø15
240.5 25.5 (1.00)
226.25 (8.9)
(0.59)
241 (9.49)
NW25 (9.47)
(1.55)
39.3
16.5 (0.65)
(1.69)
43
(1.52)
38.7
20 60
(0.79)
20
(0.79) (2.36) 13 347 (13.66) 4 x Ø9 (0.35)

120 (4.7) (0.51)
160 373 (14.68)
(6.29)
Order no: A B C
A37333940 ‑ 625 229
A37315904 598 584 251
A37317984 ‑ 584 251
100.Small Oil Sealed Pumps

Technical Data
Units E1M18 E2M18 E2M28
Displacement
50 Hz m3h‑1/ft3min‑1 20.5/12.1 32.2/19
60 Hz m h /ft min
3 ‑1 3 ‑1
25.0/14.7 38.9/22.3
50 Hz m3h‑1/ft3min‑1 17.0/10 27.5/16.2
60 Hz m3h‑1/ft3min‑1 20.4/12.1 33.0/19.5
without gas ballast mbar/Torr 3 x 10‑2/2.2 x 10‑2 1 x 10‑3/7.4 x 10‑4 1 x 10‑3/7.5 x 10‑4
with gas ballast mbar/Torr 6.5 x 10 /4.8 x 10
‑1 ‑1
1.5 x 10 1.1 x 10
‑1/ ‑2
1.5 x 10‑2/1.1 x 10‑2
with Fomblin® mbar/Torr 3 x 10‑1/2.56 x 10‑2 1 x 10‑2/7.5 x 10‑3 1 x 10‑2/7.5 x 10‑3
Outlet connection* Nozzle 15 mm external Ø removable from 3/4 in BSP tapped hole
Max permitted pressure at outlet bar gauge/psig 0.5/7
Max inlet pressure for water vapour mbar/Torr 50/38 20/15 30/23
Max water vapour pumping rate kg h ‑1
0.65 0.3 0.7
Operating temp range 13‑40 ˚C
Nominal Rotation speed 50/60 Hz rpm 1440/1720 rpm
Power connector 1‑ph** IEC EN60320 C19
Motor power 50 Hz kW 0.55 kW 0.75 kW
Motor power 60 Hz kW 0.75 kW 0.90 kW
Weight kg/lbs 37/82 39/86 44/97
Noise @ 50 Hz dB(A) 57
Oil capacity – max litre 1.4 1.05 1.5
Oil capacity – min litre 0.9 0.75 1.2
* The FX are supplied with NW25 outlet connection
** pumps listed with IEC connector only
EM Accessories
2 m electrical supply cable, UK, three‑pin plug A50505003
2 m electrical supply cable, North European plug A50506003
2 m electrical supply cable, North America/Japan plug A50507003
2 m electrical supply cable, no plug A50508003
EMF20 mist filter (suitable for E2M28 on low throughput applications) A46229000
Model MF30 mist filter A46233000
NW25 to 28mm bore tube adaptor C10520201
¾" BSP to NW25 outlet adaptor C10501414
Spares Kits
Spares kit C&O E1M18/E2M18 A36301131
Spares kit Blade E1M18 A34301041
Spares kit Blade E2M18 A36301020
Spares kit Blade E2M28/30 A37301135
Spares kit clean and overhaul kit E2M28 A37301131
Service

EM18 AND E2M18 ATEX OIL SEALED
ROTARY VANE PUMPS
ATEX EM18 pumps have an external ATEX classification of Ex II 2G IIC T4 and are suitable for use in potentially explosive
atmospheres. They share the same internal ATEX classification as our standard EM18 pumps, namely Ex II 3G c IIB T4. ATEX
pumps with flameproof motors require the user to provide 2 off hazardous area cable glands and cables. In addition, connection
of the thermistors to an appropriate safety circuit must be made to switch off the pump if overheating occurs. The Pumps are
supplied with the gas ballast port plugged. When pumping flammable gasses or vapours you must fit and inert gas purge to this
port to dilute such gasses or vapours below the lower explosive limit.
Supplied with ultragrade 19 oil, NW25 O‑ring and centering ring.
Performance Curves
E1M18 One Stage, E2M18 two stage Rotary vane ATEX pumps
E1/E2M18 ATEX E1/E2M18 ATEX Performance Curve
Displacement 10
2
50 Hz 20.5 m3h‑1 (12.1 ft3min‑1)

60 Hz 25 m3h‑1 (14.7 ft3min‑1) 10
1
(m 3 h -1)
2 2
50Hz
50 Hz 17 m3h‑1 (10 ft3min‑1) 10
0
E2M18
60 Hz 20.4 m h (12.1 ft min )
3 ‑1 3 ‑1 E1M18
-1
10
-3 -2 -1 0 1 2
10 10 10 10 10 10 (mbar)
-1 0 1 2 3 4
(Pa)
10 10 10 10 10 10

E1M18 ATEX 115 V, 1ph, 60 Hz Ex II 2G IIC T4 A34318986 1 Without gas ballast
E1M18 ATEX 230 V, 1ph, 50 Hz Ex II 2G IIC T4 A34318989 2 With gas ballast
E1M18 ATEX 400 V, 3ph, 50 Hz Ex II 2G IIC T4 A34318992
E2M18 ATEX 230 V, 1ph, 50 Hz Ex II 2G IIC T4 A36318989 10
2

1
10
(ft 3 min -1 )
60Hz
E2M18
2 2 E1M18
0
10
-1
10
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (Torr)

2 With gas ballast
Dimensions
E1M18 and E2M18 ATEX dimensions
A
170 (6.69) B
Ø15
D
(0.59)
27.4 (1.08)
43 (1.53)
39
226.25 (8.9)
280 (11.02)
(1.69)
16.5 (0.65)
(1.53)
39
4 x Ø9 (0.35)
10 75 280 (11.02) 10
(0.79)
20
(0.39) (2.95) (0.39)

260 (10.24) C
150 (5.9)
E
A B C D E
E1M18 526 247 83 159 171.4
E2M18 576 295 131 207 171.4
Technical Data
Units E1M18 ATEX E2M18 ATEX
Displacement
50 Hz m3h‑1/ft3min‑1 20.5/12.1 20.5/12.1
60 Hz m3h‑1/ft3min‑1 25.0/14.7 25.0/14.7
50 Hz m3h‑1/ft3min‑1 17.0/10 17.0/10
60 Hz m h /ft min
3 ‑1 3 ‑1
20.4/12.1 20.4/12.1
without gas purge mbar/Torr 3 x 10‑2/2.2 x 10‑2 1 x 10‑3/7.4 x 10‑4
with gas purge mbar/Torr 6.5 x 10‑1/4.8 x 10‑1 1.5 x 10‑1/1.1 x 10‑2
with Fomblin® mbar/Torr
Outlet connection Nozzle 15 mm external Ø removable from 3/4 in BSP tapped hole
Max permitted pressure at outlet bar gauge/psig 0.5/7
Max inlet pressure for water vapour mbar/Torr 50/38 20/15
Max water vapour pumping rate kg h‑1 0.65 0.3
Operating temp range ˚C 13‑40
Motor power 50 Hz 0.55 kW 0.55
Motor power 60 Hz 0.75 kW 0.75
Weight kg/lbs 37/82 39/86
Noise @ 50 Hz dB(A) 57
Oil capacity – max litre 1.4 1.05
Oil capacity – min litre 0.9 0.75

MEDIUM AND LARGE DRY PUMPS
AND SYSTEMS
Drystar 80 Pump and Booster Package 109

iXL Dry Pump Systems 112
GX Dry Pump Systems 115
iXH Dry Pump Systems 118
GXS Dry Pump 121
GXS/pXH Dry Pump 131
IDX 1000/1300 Dry Pump 137
EPX High Vacuum Primary Pump 141
Medium and Large Dry

Shop online at shop.edwardsvacuum.com Contact our customer service team Pumps and Systems 105.
Medium and Large Dry Pumps and Systems
-- Mid-Range Dry Vacuum Pumps
-- GXS Dry Vacuum Pumps
-- IDX Dry Vacuum Pumps
Edwards is a market leader in dry pump technology and has pioneered the use of dry vacuum in some
of the harshest applications.
Why Dry?
The competitive nature of today’s business means changes are required to improve performance, lower costs, and
provide optimal process solutions. The dry pumping solution is the change from traditional oil sealed pumps to a
proven technology for this industry. Edwards, a world leader in dry pump technology, has demonstrated the ability
to provide a low-cost, tailored solution to your vacuum application. The benefits offered by Edwards dry pumping
solutions are:
Maintenance Performance Safety

• Low capital cost and minimal • Very stable pumping speed gives • Unobtrusive noise levels
maintenance requirements lead repeatability to processes • No unsightly oil spills
to lowest cost of ownership • Continuous pumping at • No hazardous oil vapours
• Extended periods between user atmosphere
interventions • Ability to handle particulates
• Lower consumable costs • Dry eliminates back‑streaming,
thus protecting reactive alloys
Environmental from contamination
• No oil disposal • Significantly higher capacity for
• No oil emissions into atmosphere water vapour pumping than
traditional oil sealed pumps
All Edwards dry pump ranges are ideally suited to:

• Heat treatment
• Metallurgy
• Coating
• Solar
• Drying
• and many more.
With such a range of pumping speeds, combinations and applications available, Edwards retains a comprehensive
Applications Engineering capability and are able to offer a solutions package that includes:
• Process design
• Equipment specification and selection
• Safety and operating procedures
• Vacuum system and control integration
• Commissioning advice.

106. Pumps and Systems
Solutions Engineering
The range and complexity of industrial applications means a ‘one size fits all’ policy does not result in system
optimisation. A detailed appreciation of the process, environmental and safety issues is required to tailor systems
to match performance and process.
Applications Design and Support

Edwards comprehensive design service is based on in-depth knowledge of the industries and applications involved.
This expertise is held in the highly focused and experienced applications team, which consists of a Central
Applications Group supported by a regional network of Applications Specialists. Proprietary software is used to
define pumping requirements and a suite of optional accessories or modules are available. For larger or more
unusual applications a custom engineering service is available.
Solutions could cover:
• Process design
• Equipment selection
• Safety and Operating Parameters
• Integration with plant control system(s)
• Co mmissioning advice and more
Contact your local office to request an initial discussion with an Applications Specialist. Typically, discussions will
include gases/materials to be pumped, cycle times and duty pressures, system capacities, control systems, utilities,
system footprint and all other aspects of the vacuum system to ensure that we are able to offer the most effective
solution for your application.

Product range
Mid-Range Dry Vacuum Pumps

Several industrial processes require mid-range vacuum pumps.
Small scale or pilot processes are the ideal size to try a dry vacuum
technology for the first time and to discover the many benefits that
dry pumping delivers. Edwards, with the largest installed base of dry
vacuum pumps in the world, is able to offer the most appropriate
solution to your needs in this performance range.
Entry Level Dry Pumping

Drystar80 – the robust and highly reliable Drystar80 is the most cost
effective introduction to dry pumping.
Intelligent Dry Vacuum Pumps

Edwards is offering 3 models of intelligent and compact dry pumps
delivered with a fully enabled on board controller providing:
• Automated start up and shut down routines.
• Vacuum speed control with inverter driven motors.
• Smart co mmunications via Ethernet, Profibus or hard-
wired interfaces.
• “Green mode” energy-saving with reduced power consumption
during idle periods.
iXL – for clean applications

GX – for medium applications
iXH – for harsh applications
GXS Dry Vacuum Pumps

The new range of GXS dry vacuum pumps takes vacuum
performance to the next level. With unique screw technology and
world leading high efficiency drives our customers are granted
best in class pumping speeds, reliable operation even in harsh
applications and low running costs for many years to come.
GXS is available in sizes from 160 to 750 m3h-1 and can be systemised
with inverter driven mechanical booster pumps from 1750 to
4200 m3h-1 displacement.
Every pump and pumping system is supplied with on-board
controller with extensive co mmunication and automated control
capabilities for a true ‘plug and pump’ solution.
IDX Dry Vacuum Pumps

Available in sizes from 1000 to 1300 m3h-1 IDX are the pumps
optimised for demanding processes requiring large pumping speeds.
Installed mainly in large, high productivity environments, these
pumps have been designed to withstand process malfunctions and
to minimise down time from line maintenance to overhaul.

DRYSTAR 80 PUMP AND BOOSTER PACKAGE
Drystar80 is the most cost effective introduction to basic dry pumping. It is available as a stand-
alone unit for 80 m3h-1 repeatable pumping performance; or in a combination with the respected
EH500 hydrokinetic drive mechanical booster, offering 500 m3h-1 displacement for applications
where increased pumping speed and/or lower vacuum levels are required. Depending upon the
application the Drystar80 can be supplied with mineral oil or PFPE lubrication.
Features and Benefits Coating

• Load lock pump down.
• Specifically designed for demanding industrial applications.
• Plasma deposition.
• Industry proven, tried and tested.
• Plasma cleaning/sterilising.
• Consistent and repeatable performance.
• Reflective/decorative coating.
• High and repeatable product quality.
• Optical/ophthalmic coating.
• No oil changes and waste oil disposal.
• Roll/web coating.
• No disposal cost, environmentally friendly.
• Hard coating/CVD.
• Surface activation.
Applications Heat Treatment
R&D/others • Tempering/annealing.
• Backing of turbomolecular pumps. • Oil or gas quenching.
• House/central vacuum. Metallurgy.
Drying • EB welding/vacuum brazing.
• Freeze drying. • Plasma nitriding.
• Refrigeration/air conditioning drying. • LPN (nitriding) and nitrocarburising.
• Transformer drying. • LPC with acetylene.
• Automotive drying/filling. • Plasma beam welding.
• Transformer vapour phase drying. • MIM/vacuum sintering.
• Bush filling. • PIC (investment casting).

Performance Curves
Drystar80/EH500 Booster Pump and Booster Package

Drystar 80/EH500 Drystar 80 Performance Curve
Peak pumping speed GV80 50Hz

GV80 60Hz
50 Hz 80/390 m3h-1 400 GV80/EH500 50Hz

GV80/EH500 60Hz
47/230 cfm 300
60 Hz 94/471 m3h-1
m³h-1
200
56/277 cfm
100
Ultimate Pressure
0
mbar < 3 x 10-1 10-3 10-2 10-1 100 101 102 103 mbar
Torr < 2 10-2
GV80 50Hz
GV80 60Hz
250
GV80/EH500 50Hz
GV80/EH500 60Hz
Ordering information 200
ft3min-1
150
100
Drystar80 SSP 380-415 V 50 Hz NR8030000
50
Drystar80 SSP 230-460 V 60 Hz NR8031000
Drystar80 PFPE SSP 380-415 V 50 Hz NR8035000 0
10-3 10-2 10-1 100 101 102 103 Torr
Drystar80 PFPE SSP 230-460 V 60 Hz NR8036000
Drystar80/EH500 SSP 380-415 V 50 Hz NRY041000
Drystar80/EH500 SSP 230-460 V 60 Hz NRY042000
Drystar80/EH500 PFPE SSP 380-415 V 50 Hz NRY046000
Drystar80/EH500 PFPE SSP 230-460 V 60 Hz NRY047000
Technical Data
Units Drystar80 Drystar80/EH500
Peak pumping speed 50 Hz m3h-1/cfm 80/47 390/230
Peak pumping speed 60 Hz m3h-1/cfm 94/56 471/277
Ultimate pressure mbar/Torr 3 x 10-2/2 x 10-2 3 x 10-3/2 x 10-3
Power @ ultimate kW 3.6 4.3
Motor Power kW 4 6.6
Inlet connection ISO40 ISO100
Outlet connection NW40 NW40
Cooling water connection ½” Quick Connect ½” Quick Connect
Nitrogen connection ¼” Quick Connect ¼” Quick Connect
Water flow lmin-1 1 1
Typical purge flow slm 15 15
Weight kg 145 220
Noise level dB(A) < 78 < 78

Dimensions
Drystar dimensions
1 Process inlet
2 Process exhaust
3 Estimated centre of gravity

IXL DRY PUMP SYSTEMS
iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of
small load lock chambers and clean process operations, with extremely low power consumption.
It is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an
inverter-driven booster delivering 930 m3h-1 peak pumping speed

• Integral controller and safety systems for ‘Plug and Pump’,
flexible operation.
• Low installation costs.
• Minimal power consumption.
• Best in class cost of ownership.
Applications
R&D/others
• Backing of turbomolecular pumps.
Drying
• Freeze drying.
Coating
• Load lock pump down.
• Plasma deposition.
• Plasma cleaning/sterilising.

Performance Curves
iXL
iXL iXL Performance Curve
1000
iXL120
800
iXL1000
m³h-1
600
400
200
0
10-3 10-2 10-1 100 101 102 103 mbar
600
500 iXL120
iXL1000
400
ft³min-1
200

0
iXL120N 200-460 V 50/60 Hz A54114010 10-3 10-2 10-1 100 101 102 103 Torr
iXL1000N 200-460 V 50/60 Hz A54154020
Dimensions
iXL120N dimensions
20 450 230
90 115
275
225
40
iXL1000N dimensions
695 280
137
265
650
ISO100
142.5
NW25
45
52
510 120 186 260

600 45

Technical Data
Units iXL120N iXL1000N
Peak pumping speed m3h-1/cfm 110/65 930/547
Ultimate pressure mbar/Torr 1.3 x 10-2/9 x 10-3 1.0 x 10-3/7.5 x 10-4
Power @ ultimate (1) kW 0.55 1
Power @ green mode kW 0.045 0.05
Motor Power kW 3 4.9
Inlet connection Vertical/Horizontal ISO63/NW50 ISO100
Outlet connection NW25 NW25
Cooling water connection ⅜" Quick Connect ⅜" Quick Connect
Nitrogen connection ¼" tube fitting ¼" tube fitting
Water flow (2) lmin-1 1 1.6
Typical purge flow slm 0-5 slm 0-40 (default 10)
Weight kg 59 168
Noise level dB(A) < 55 < 55
(1) Average power at 700T exhaust pressure

(2) Flow with Constant Flow Valve accessory fitted

GX DRY PUMP SYSTEMS
GX is the ideal choice for medium duty applications and sets new standards for zero maintenance
between overhauls and low cost of ownership. It is available as the stand-alone GX100N pump,
or combined with an inverter-driven booster as the GX600N (620 m3h-1 peak speed) and GX1000N
(800 m3h-1 peak speed) units.
Features and Benefits Heat Treatment

• Tempering/annealing
• Integral controller and safety systems for ‘Plug and Pump’
• Oil or gas quenching
flexible operation.
Metallurgy
• EB welding/vacuum brazing
• No preventive maintenance between major overhauls.
• Plasma nitriding
• Maximum uptime for high productivity.
• LPN (nitriding) and nitrocarburising
Applications Pump range

R&D/others
GX
• House/central vacuum. -- GX100N
Drying -- GX600N
• Refrigeration/air conditioning drying. -- GX1000N
• Transformer drying.
• Automotive drying/filling.
Coating
• Reflective/decorative coating.
• Optical/ophthalmic coating.

Performance Curves
GX Dry pump system

GX GX Performance Curve
Peak pumping speed 800

GX100 N
90 m3h-1 – 800 m3h-1 600 GX600 N
m³h-1
GX1000 N
400
53 cfm – 471 cfm
200
Ultimate Pressure 0
GX100N 5.0 x 10-3 mbar 10-3 10-2 10-1 100 101 102 103 mbar
3.75 x 10-3 Torr 600

500 GX100 N
GX600N 1.0 x 10-3 mbar GX600 N
ft³min-1
400 GX1000 N
7.5 x 10-4 Torr 300
200
GX1000N 1.0 x 10 mbar
-3
100
0
7.5 x 10 Torr
-4
10-4 10-3 10-2 10-1 100 101 102 103 Torr

GX100N 200-230 V 50/60 Hz A54711958
GX100N 380-460 V 50/60 Hz A54711959
GX600N 200-230 V 50/60 Hz A54731958
GX600N 380-460 V 50/60 Hz A54731959
GX1000N 200-230 V 50/60 Hz A54781958
GX1000N 380-460 V 50/60 Hz A54781959

Dimensions
GX dimensions
284 (11.2) 435 (17.1)

258 (10.2)
217.5 (8.6) 1
694 (27.3)
510 (20)
650 (25.6)
644 (25.4)
350 (13.8)
346 (13.6)
216 (8.5)
280 (11)
2
45 (1.8)
(1.8)
45
(2)
52
195 (7.7)
153 (6.0)
510 (20.1) 121
(4.7) 510 (20.1) 120.5
693 (27.3)
(4.7)
695 (27.4)
GX100 GX600, 1000

Length 693 693
Width 280 280
Height 394 694
① Inlet flange
② Exhaust flange
Technical Data
Units GX100N GX600N GX1000N
Peak pumping speed m3h-1/cfm 90/53 600/353 800/471
Ultimate pressure mbar/Torr 5.0 x 10-3/3.75 x 10-3 1.0 x 10-3/7.5 x 10-4 1.0 x 10-3/7.5 x 10-4
Power @ ultimate (1) kW 1.0 1.5 1.6
Power @ green mode kW 0.05 0.05 0.05
Motor Power kW 1.9 3.8 3.8
Inlet connection ISO63 ISO100 ISO100
Outlet connection NW25 NW25 NW25
Cooling water connection ⅜" quick connect ⅜" quick connect ⅜" quick connect
Nitrogen connection ¼" compression fitting ¼" compression fitting ¼" compression fitting
Water flow (2) lmin-1 1 2 2
Typical purge flow slm 4 to 39 4 to 39 4 to 39
Weight kg 120 220 230
Noise level dB(A) < 60 < 55 < 55
(1) Average power at 700T exhaust pressure

(2) Flow with Constant Flow Valve accessory fitted

IXH DRY PUMP SYSTEMS
iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership.
iXH pumps offer greatly increased dust and powder handling capabilities.
A wide pump temperature range allows optimisation to minimise by-product accumulation from
condensation and plating reactions. iXH is available as primary pump at 100 m3h-1 (the iXH100)
or combined with inverter-driven boosters delivering peak speeds of 665 m3h-1 (iXH610) or
1025 m3h-1 (iXH1210).
Features and Benefits Metallurgy

• LPC with acetylene.
• Integral controller and safety systems for ‘Plug and Pump’,
• Plasma beam welding.
flexible operation.
• MIM/vacuum sintering.
• Low installation costs
• PIC (investment casting).
• Cutting edge reversed claw technology for corrosion
free operation and robust dust and powder handling
capabilities.
• Robust and reliable
Applications
Drying
• Transformer vapour phase drying.
Coating
• Plasma spray.

Performance Curves
iXH
iXH iXH Performance Curve
1000
iXH100
800 iXH610
600 iXH1210
m³h-1
400
200
10-3 10-2 10-1 100 101 102 103 mbar
600 iXH100
iXH610
400 iXH1210
ft³min-1
iXH100 200-230 50/60 Hz AC0102121000 10-3 10-2 10-1 100 101 102 103 Torr
iXH100 380-460 50/60 Hz ACA102121000

iXH610 200-230 50-60 Hz AC1102121100
iXH610 380-460 V 50/60 Hz ACB102121100
iXH1210 200-230 50/60 Hz AC3102121200
iXH1210 380-460 50/60 Hz ACD102121200
Dimensions
iXH dimensions
W L
Type L W H
iXH100 784 390 526
iXH610 784 390 780
iXH1210 784 390 780

Technical Data
Units iXH100 iXH610 iXH1210
Peak pumping speed m3h-1/cfm 100/59 665/391 1025/603
Ultimate pressure mbar/Torr 2.0 x 10-2/1.5 x 10-2 5.0 x 10-3/3.7 x 10-3 5.0 x 10-3/3.7 x 10-3
Power @ ultimate (1) kW 2.1 2.6 3.2
Power @ green mode kW 0.045 0.045 0.045
Motor Power kW 4.5 6.4 9
Inlet connection ISO63 ISO100 ISO100
Outlet connection NW40 NW40 NW40
Cooling water connection ⅜" quick connect ⅜" quick connect ⅜" quick connect
Nitrogen connection ¼" compression fitting ¼" compression fitting ¼" compression fitting
Water flow (2) lmin-1 2 3 4
Typical purge flow slm 28 or 44 22 or 44 22 or 44
Weight kg 260 355 430
Noise level dB(A) 63 64 64
(1) Average power at 700 T exhaust pressure

(2) Water consumption varies with pump operating temperature; figures at 110 oC

GXS DRY PUMP
The competitive nature of today’s business means changes are required to improve performance,
lower costs, and provide optimal process solutions. The dry pumping solution is the change from
traditional oil sealed pumps to a proven technology for this industry. Edwards, a world leader in
dry pump technology, has demonstrated the ability to provide a low-cost, tailored solution to your
vacuum application.

Maintenance • Metallurgy.
• Low capital cost and minimal maintenance requirements • Coating.
lead to lowest cost of ownership. • Drying.
• Extended periods between user intervention. • Solar.
• Lower consumable costs. • Vacuum chamber evacuation.
Environmental
• No oil disposal. Pump Range
• No oil emissions into atmosphere.
Performance GXS160 GXS450
-- GXS160 -- GXS450
• Very stable pumping speed gives repeatability
-- GXS160/1750 -- GXS450/2600
to processes.
GXS250 -- GXS450/4200
• Continuous pumping at atmosphere.
• Ability to handle particulates. -- GXS250 GXS750
-- GXS250/2600 -- GXS750
• Dry eliminates back-streaming, thus protecting reactive
-- GXS750/2600
alloys from contamination.
-- GXS750/4200
Safety
• Unobtrusive noise levels.
• No unsightly oil spills. (GXSXXX/YYYY where XXX = backing screw pump
• No hazardous oil vapours. and YYYY = roots booster )

Performance Curves
GXS160 Dry pump

GXS160 & GXS160/1750 GXS160 & GXS160/1750 Performance Curve
Peak Pumping Speed

160 m3h-1 1200 m3h-1
95 cfm 706 cfm
Ultimate Pressure
with purge 1.2 x 10-2 mbar 7 x 10-4 mbar
(9 x 10-3 Torr) (5.3 x 10-4 Torr)

without 7 x 10 mbar
-3
7 x 10-4 mbar
purge
(5.3 x 10 Torr)-3
(5.3 x 10-4 Torr)
Applications
G Industrial
Pump Mechanism
S Screw
Pumps / Boosters
2 160 (7.5 kW)
5 160 (7.5 kW) / 1750 (5.5 kW)
Lubrication
1 PFPE (Drynet 25/6)
G S 0 0 0 0 0
Electrical
Low volt 200-230 V 3Ø 50/60 Hz 2
High volt 380-460 V 3Ø 50/60 Hz 5
Cooling
TMS Standard 0
Pump purges
Light duty (SSP +HVP) 0
Medium duty (SSP + HVP + Inlet + GB + Exh PM) 3
Medium duty + High Flow Purge / Solvent Flush 4
Installation
Side Exhaust and Skids 0
Rear Exhaust and Casters 5

GXS250 Dry Pump
GXS250 & GXS250/2600 Performance Curve GXS250 & GXS250/2600
Peak Pumping Speed
250 m3h-1 1900 m3h-1
148 cfm 1118 cfm
Ultimate Pressure
with purge 9 x 10-3 mbar 5 x 10-4 mbar
(6.8 x 10-3 Torr) (3.8 x 10-4 Torr)

without 4 x 10-3 mbar 5 x 10-4 mbar
purge
(3 x 10-3 Torr) (3.8 x 10-4 Torr)
Applications
G Industrial
Pump Mechanism
S Screw
Pumps / Boosters
7 250 (7.5 kW)
A 250 (7.5 kW) / 2600 (5.5 kW)
Lubrication
G S 0 0 0 0 0
Electrical
Low volt 200-230 V 3Ø 50/60 Hz 2
High volt 380-460 V 3Ø 50/60 Hz 5
Cooling
TMS Standard 0
Pump purges
Installation

Performance Curves
GXS450 Dry Pump

GXS450, GXS450/2600 & GXS450/4200 GXS450, GXS450/2600 & GXS450/4200
Performance Curve
Peak Pumping Speed

450 m3h-1 2200 m3h-1 3026 m3h-1
265 cfm 1295 cfm 1781 cfm
Ultimate Pressure
with purge
1 x 10-2 mbar 5.4 x 10-4 mbar 5.4 x 10-4 mbar
(7.5 x 10-3 Torr) (3.8 x 10-4 Torr) (3.8 x 10-4 Torr)
without purge 5 x 10-3 mbar 5 x 10-4 mbar 5 x 10-4 mbar
(3.8 x 10 Torr)
-3
(3.8 x 10 Torr)
-4
(3.8 x 10-4 Torr)
1 Fast
Ordering information 2 Slow
Applications
G Industrial
Pump Mechanism
S Screw
Pumps / Boosters
D 450 (11 kW)
F 450 (11 kW) / 2600 (7.5 kW)
G 450 (11 kW) / 4200 (7.5 kW)
Lubrication
G S 2 0 0 0 0
Electrical
Low volt 200-230 V 3Ø 50/60 Hz 2
High volt 380-460 V 3Ø 50/60 Hz 5
Cooling
TMS Standard 2
Pump purges
Installation

GXS750 Dry Pump
GXS750, GXS750/2600 & GXS750/4200 GXS750, GXS750/2600 & GXS750/4200
Performance Curve
Peak Pumping Speed

740 m3h-1 2300 m3h-1 3450 m3h-1
436 cfm 1354 cfm 2031 cfm
Ultimate Pressure
with purge
8 x 10-3 mbar 5 x 10-4 mbar 5 x 10-4 mbar
(6 x 10-3 Torr) (3.8 x 10-4 Torr) (3.8 x 10-4 Torr)
without purge 3 x 10-3 mbar 5 x 10-4 mbar 5 x 10-4 mbar
1 Fast (2.3 x 10 Torr)

-3
(3.8 x 10 Torr)
-4
(3.8 x 10-4 Torr)
2 Slow
Applications
G Industrial
Pump Mechanism
S Screw
Pumps / Boosters
L 750 (22 kW)
N 750 (22 kW) / 2600 (7.5 kW)
P 750 (22 kW) / 4200 (7.5 kW)
Lubrication
G S 2 0 0 0 0
Electrical
Low volt 200-230 V 3Ø 50/60 Hz 2
High volt 380-460 V 3Ø 50/60 Hz 5
Cooling
TMS Standard 2
Pump purges
Installation

Dimensions
GXS dimensions Pump views
( mm) A B C D E F G H J K L M
GXS160 195 220 285.9 346.5 879.5 83 209.4 568 150 1092 390 250
GXS160/1750 195 220 311.6 346.5 853.8 83 209.4 829.5 - 1092 390 250
GXS250 195 220 285.9 346.5 879.5 83 209.4 568 150 1092 390 250
GXS250/2600 195 220 311.6 346.5 853.8 83 209.4 829.5 - 1092 390 250
GXS450 258.5 283.5 394 300 871.6 83 261.4 717 150 1186 517 250
GXS450/2600 258.5 283.5 362 332 903.8 83 261.4 1031 - 1186 517 250
GXS450/4200 258.5 283.5 362 332 903.8 83 261.4 1031 - 1186 517 250
GXS750 258.5 283.5 576 413 1134 83 261.4 717 150 1622 517 250
GXS750/2600 258.5 283.5 657 332 1053 83 261.4 1031 - 1622 517 250
GXS750/4200 258.5 283.5 657 332 1053 83 261.4 1031 - 1622 517 250

GXS dimensions Pump views
(inches) A B C D E F G H J K L M
GXS160 7.7 8.7 11.3 13.6 34.6 3.3 8.2 22.4 5.9 43 15.4 9.8
GXS160/1750 7.7 8.7 12.3 13.6 33.6 3.3 8.2 32.7 - 43 15.4 9.8
GXS250 7.7 8.7 11.3 13.6 34.6 3.3 8.2 22.4 5.9 43 15.4 9.8
GXS250/2600 7.7 8.7 12.3 13.6 33.6 3.3 8.2 32.7 - 43 15.4 9.8
GXS450 10.2 11.2 15.5 11.8 34.3 3.3 10.3 28.2 5.9 46.7 20.4 9.8
GXS450/2600 10.2 11.2 14.2 13.1 33.6 3.3 10.3 40.6 - 46.7 20.4 9.8
GXS450/4200 10.2 11.2 14.2 13.1 33.6 3.3 10.3 40.6 - 46.7 20.4 9.8
GXS750 10.2 11.2 15.5 11.8 34.3 3.8 10.3 28.2 5.9 46.7 20.4 9.8
GXS750/2600 10.2 11.2 25.9 13.1 41.5 3.8 10.3 40.6 - 63.9 20.4 9.8
GXS750/4200 10.2 11.2 25.9 13.1 41.5 3.8 10.3 40.6 - 63.9 20.4 9.8

Technical Data
Units GXS160 GXS160/1750 GXS250 GXS250/2600
Peak Pumping Speed m3h-1 (cfm) 160 (94) 1200 (706) 250 (147) 1900 (1118)
Ultimate Pressure (without purge) mbar (Torr) 7x10-3 (5.3x10-3) 7x10-4 (5.3x10-4) 4x10-3 (3.0x10-3) 5x10-4 (3.8x10-4)
Full Load Power @ ultimate pressure kW (hp) 3.8 (5.1) 5.1 (6.8) 4.0 (5.4) 5.3 (7.1)
@ peak pumping load kW (hp) 5.0 (6.7) 7.4 (9.9) 9.0 (12.1) 9.7 (13.0)
Electrical Supply options High volt 380-460 V 3Ø 50/60 Hz 380-460 V 3Ø 50/60 Hz
Low volt 200-230 V 3Ø 50/60 Hz 200-230 V 3Ø 50/60 Hz
Connection High volt Harting Han K 4/4-F Harting Han K 4/4-F
Low volt
Vacuum Inlet ISO63 ISO100 ISO63 ISO160
Couplings Exhaust NW40 NW40
Cooling Water Supply pressure (max) bar (psig) 6.9 (100) 6.9 (100)
DP across pump (min) bar (psig) 1.0 (14.7) 1.0 (14.7)
Flow @ min DP lmin-1 (gal/min) 4.0 (1.1) 7.0 (1.9) 4.0 (1.1) 7.0 (1.9)
Temperature ˚C (°F) 5-40 (41-104) All variants 5-40 (41-104) All variants
Connection ⅜" BSP Male (G ⅜”) ⅜" BSP Male (G ⅜”)

Purge Gas* Pressure bar (psig) 2.5-6.9 (36-100) 2.5-6.9 (36-100)
Light Duty sl/min 12 12
Medium Duty sl/min 18-52 18-52
Connection Swagelok® Ø ¼” tube with olive Swagelok® Ø ¼” tube with olive
High Flow Supply pressure bar (psig) 2.5-6.9 (36-100) 2.5-6.9 (36-100)
Purge/ Solvent Control valve Swagelok® Ø ⅜" tube with olive Swagelok® Ø ⅜" tube with olive
Flush connection
Filter connection ½" NPT Male ½" NPT Male
Solvent connection ⅜" BSP Male (G ⅜") ⅜" BSP Male (G ⅜")
Mass kg (lbs) 305 (672) 475 (1047) 305 (672) 515 (1035)
Noise (with suitable exhaust pipe) dB(A) < 64 < 64
Operating Temperature ˚C (°F) 5-40 (41-104) 5-40 (41-104)
Exhaust Back Pressure (MAX) mbar (psia) 1400 (20) 1400 (20)
System IP rating Standard 21D 21D
Lubrication Type PFPE Drynert® 25/6 PFPE Drynert® 25/6
Volume l (gal) 0.7 (0.2) 1.4 (0.4) 0.7 (0.2) 1.4 (0.4)
Monitoring & Standard Control Front panel "Dashboard" Front panel "Dashboard"
Control Serial – RS232 Serial – RS232
Monitoring Ethernet Webserver Ethernet Webserver
Option Control Parallel – MCM MicroTIM Parallel – MCM MicroTIM
Control & Profibus DP Profibus DP
Monitoring Pump Display Terminal (PDT) Pump Display Terminal (PDT)
Monitoring FabWorks® FabWorks®
*Pump Light duty Shaft Seal Purge only Shaft Seal Purge only
combinations
Medium duty Shaft Seal Purge, High Vac Purge, Shaft Seal Purge, High Vac Purge,
Inlet Purge, variable Gas Ballast Inlet Purge, variable Gas Ballast
& Exhaust Purge (with Exhaust & Exhaust Purge (with Exhaust
Pressure Sensor) Pressure Sensor)
Medium duty + As Medium duty, plus High Flow As Medium duty, plus High Flow
Purge/Solvent Flush Purge/Solvent Flush
* Purge Gas information

Light duty: shaft seal purge only
Medium duty: Shaft seal purge, inlet purge, variable gas ballast & exhaust purge (with exhaust pressure sensor)
Medium duty plus: as Medium duty, plus High Flow Purge/Solvent Flush

GXS450 GXS450/2600 GXS450/4200 GXS750 GXS750/2600 GXS750/4200
450 (265) 2200 (1295) 3026 (1781) 740 (436) 2300 (1354) 3450 (2031)
5 x 10-3 (3.8x10-3) 5 x 10-4 (3.8x10-4) 3 x 10-3 (2.3x10-3) 5 x 10-4 (3.8x10-4)
7.2 (9.6) 8.8 (11.8) 9.4 (12.6) 10.0 (13.4) 11.1 (14.9) 11.5 (15.4)
17.3 (23.2) 20.0 (26.8) 21.1 (28.3) 37.0 (49.6) 40.0 (53.6) 40.0 (53.6)
380-460 V 3Ø 50/60 Hz 380-460 V 3Ø 50/60 Hz
200-230 V 3Ø 50/60 Hz 200-230 V 3Ø 50/60 Hz
Harting Han K 4/4-F Harting Han 100A-F Harting Han 100A-F
Harting Han 200A-F
ISO100 ISO160 ISO100 ISO160
NW50 NW50
6.9 (100) 6.9 (100)
1 (15) 1 (15) 1 (15) 0.75 (11)
10 (2.6) 12 (3.2) 12 (3.2) 15 (4)
5-40 (41-104) All variants 5-40 (41-104) High Volt variants
5-30 (41-86) Low Volt variants
⅜" BSP Male (G ⅜”) ⅜" BSP Male (G ⅜”)
2.5-6.9 (36-100) 2.5-6.9 (36-100)
12 12
18-146 18-146
Swagelok® Ø ¼” tube with olive Swagelok® Ø ¼” tube with olive
2.5-6.9 (36-100) 2.5-6.9 (36-100)
Swagelok® Ø ⅜" tube with olive Swagelok® Ø ⅜" tube with olive
½" NPT Female ½" NPT Female
½" BSP Male (G ½") ½" BSP Male (G ½")
546 (1204) 760 (1676) 818 (1804) 679 (1497) 918 (2024) 976 (2152)
< 64 < 70
5-40 (41-104) 5-40 (41-104)
1400 (20) 1400 (20)
21D 21D
PFPE Drynert® 25/6 PFPE Drynert® 25/6
1.8 (0.5) 2.5 (0.7) 3.6 (1.0) 2.4 (0.6) 3.1 (0.8) 4.2 (1.1)
Front panel "Dashboard" Front panel "Dashboard"
Serial – RS232 Serial – RS232
Ethernet Webserver Ethernet webserver
Parallel – MCM MicroTIM Parallel – MCM MicroTIM
Profibus DP Profibus DP
Pump Display Terminal (PDT) Pump Display Terminal (PDT)
FabWorks® FabWorks®
Shaft Seal Purge & High Vac Purge only Shaft Seal Purge & High Vac Purge only
Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast & Shaft Seal Purge, High Vac Purge, Inlet Purge, variable Gas Ballast &
Exhaust Purge (with Exhaust Pressure Sensor) Exhaust Purge (with Exhaust Pressure Sensor)
As Medium duty, plus High Flow Purge/Solvent Flush As Medium duty, plus High Flow Purge/Solvent Flush

Fully Integrated Inlet Valves Silencer Mounts and Connection Kits
Carbon Steel Stainless Steel Horizontal silencer mount 100CTR M58808009
GXS Inlet valve 4” ASSY - M58808004 Rear silencer MT HORIZ 100CTR M58808151
GXS Inlet valve 6” ASSY - M58828004 Horizontal silencer mount 150CTR M59838009
GXS Inlet valve 8” ASSY - M59848004 Rear silencer MT HORIZ 150CTR M59808151
Inlet Dust Filters

Check Valves
Carbon Steel Stainless Steel
C-VALVE HOR silencer 100CTR M58808012
GXS Filter 4” ASSY M58808005 M58808137
C-VALVE HOR silencer 150CTR M59838012
Instrumentation
Cleanable & Drainable Discharge Silencers Product description Order no:
Product description Order no: Pressure Indicator Assembly 90 deg M58808141
Carbon Steel Stainless Steel Pressure Transducer Assembly (ASG) M58808152
GXS Silencer 100 ctrs ASSY M58808161 M58808162 Temp Trans Assy GXS Pump Only M58808160
GXS Silencer 150 ctrs ASSY C-STL M59838161 M59838162 Temp Trans Assy GXS Combi M58828160
Drain valve ASSY - M58808010 GXS N2 STD flow switch kit A50633000
GXS N2 HIGH fow switch kit A50634000
Inlet Spools for Valves and Filters
Cooling water flow monitoring switch A50783000
GXS Auxiliary gauge cable (0-10 V) D37241017
Carbon Steel Stainless Steel
GXS Pressure input cable (4-20 mA) D37241019
ISO63 4” ANSI Spool ASSY M58808002 M58808134
MCM MicroTIM D37360320
ISO63-ISO100 Spool ASSY M58808138 M58808135
Connector kit for MCM MicroTIM D37422802
Profibus® module D39753000
ISO100-ISO100 Spool ASY M59808138 M59808135
packed
ISO100 ISO160 Spool ASSY M58828003 M58828135
ISO160 ISO160 Spool ASSY M58938003 M58938135
C-STL
ISO160 ISO200 Spool ASSY C-STL M59848003 M59848135

GXS/pXH DRY PUMP
MAXX DRY VACUUM SYSTEM
For high capacity applications our proven GXS dry pump range is available with pXH pumps, the
new generation of large mechanical boosters for an integrated flexible modular skid design.
pXH booster pumps are provided with high efficiency motor and inverter drives that integrate
directly into the GXS pump control system with a single connection. With our unique screw
technology and world leading high efficiency booster, you are guaranteed best-in-class pumping
speeds and low running cost for many years to come.

• Flexible – integrated modular skid design. • Metallurgy.
• Fast – reduced pump down times with ultimate vacuum • Coating.
< 5 x 10 -4 mbar. • Vacuum packaging.
• Robust – reliable operation even in harsh industrial • Drying.
applications. • Plasma processes.
• Intelligent – on board controller with extensive and • Steel degassing.
automated control capabilities. • Vacuum chamber evacuation.
• Economical – affordable capital investment and low cost • Other applications.
of ownership.
• Environmental – smooth, quiet running with low power Pump Range
and utilities consumption.
-- GXS250 -- pXH4500
-- GXS450 -- pXH6000
-- GXS750
-- GXS250/2600
-- GXS450/2600
-- GXS750/2600
-- GXS450/4200
-- GXS750/4200

Performance Curves
GXS/pXH Combinations
GXS/pXH Combinations Performance Curve
10-4 10-3 10-2 10-1 1 101 102 760 Torr 10-4 10-3 10-2 10-1 1 101 102 760 Torr
14000 9000 8000 5000
8500
12000 8000 7000
7000 4000
10000 6000
6000
ft3min-1
8000
m3h-1
5000 5000 3000
m3h-1
ft3min-1
6000 4000 4000
4000 3000
3000 2000
GXS450/4200 + 2x pXH6000 2000
2000 GXS750/2600 + 2x pXH6000
1000
GXS750/4200 + 2x pXH6000 2000 GXS450/2600 + pXH6000
0
GXS450/4200 + pXH6000 1000
0
1000 GXS750/2600 + pXH6000
10-4 10-3 10-2 10-1 1 101 102 103 mbar GXS750/4200 + pXH6000
0 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar
10-4 10-3 10-2 10-1 1 101 102 760 Torr 10-4 10-3 10-2 10-1 1 101 102 760 Torr
7000
2x GXS250 + pXH4500
6000 2x GXS450 + pXH4500 4000 6000 4000
2x GXS750 + pXH4500
5000 5000
3000 3000
ft3min-1
4000
m3h-1
ft3min-1
4000
m3h-1
3000 2000
3000 2000
2000
2x GXS250 + pXH6000
2000 1000
1000 1000 2x GXS450 + pXH6000
2x GXS750 + pXH6000
1000 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar
0 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar
10-4 10-3 10-2 10-1 1 101 102 760 Torr 10-4 10-3 10-2 10-1 1 101 102 760 Torr
6000 4000 8000
GXS450 + pXH4500 5000
5000 GXS750 + pXH4500 7000
3000 6000 4000
4000
ft3min-1
5000
m3h-1
ft3min-1
3000 2000 3000
4000
m3h-1
2000
3000 2000
1000
1000 2000 2x GXS250/2600 + pXH6000
2x GXS450/2600 + pXH6000 1000
0 0 1000 2x GXS750/2600 + pXH6000
10-4 10-3 10-2 10-1 1 101 102 103 mbar
0 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar
10-4 10-3 10-2 10-1 1 101 102 760 Torr 10-4 10-3 10-2 10-1 1 101 102 760 Torr
6000 4000
GXS750 + 2x pXH4500
GXS450/2600 + 2x pXH4500
5000
GXS450/4200 + 2x pXH4500
3000
12000 GXS750/2600 + 2x pXH4500 8000
GXS750/4200 + 2x pXH4500
4000
ft3min-1
10000 7000
m3h-1
6000 3000 2000

8000
ft3min-1
5000 2000
m3h-1
GXS250/ 2600 + pXH4500

6000 4000 GXS450/ 2600 + pXH4500
1000
1000 GXS750/ 2600 + pXH4500
4000 3000
GXS750/ 4200 + pXH4500
2000 0 0
2000 10-4 10-3 10-2 10-1 1 101 102 103 mbar
1000
0 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar
10-4 10-3 10-2 10-1 1 101 102 760 Torr

6000 4000
5000
3000
4000
ft3min-1
m3h-1
3000 2000
2000
1000
1000 GXS450 + pXH6000
GXS750 + pXH6000
0 0
10-4 10-3 10-2 10-1 1 101 102 103 mbar

GXS/pXH Combinations
PXH4500 pXH6000 2 x pXH4500 2 x pXH6000
2x GXS250 ● ●
GXS450 ● ●
2x GXS450 ● ●
GXS750 ● ● ●
2x GSX750 ● ●
GXS250/2600 ●
2x GXS250/2600 ●
GXS450/2600 ● ● ●
2x GXS450/2600 ●
GXS450/4200 ● ● ●
GXS750/2600 ● ● ● ●
2x GXS750/2600 ●
GXS750/4200 ● ● ● ●
MAXX system 1+1 straight spool MAXX system 3 sets of 1+1 straight spool
MAXX system 2x GXS750 + 1x pXH MAXX system 1x GXS750 + 2x pXH

Technical Data
Units GXS450 & 2x GXS750 & GXS750/2600 &
pXH4500 7.5 kW pXH6000 7.5 kW pXH6000 7.5 kW
Peak pumping speed m3h-1 (cfm) 4250 (2501) 5350 (3149) 6820 (4914)
Ultimate pressure mbar (Torr) 1.6 x 10 (1.2)
-3
1.6 x 10 mbar (1.17 )
-3 -3
2.8 x 10-4 (2.12-4)
Motor rating power kW (hp) 18.5 (24.8) 51.5 (69.0) 37 (49.6)
Full load @ ultimate kW (hp) 7.9 (10.6) 19.2 (25.7) 12.0 (16.09)
power pressure
@ peak pumping kW (hp) 16.8 (22.5) 56.2 (75.4) 30.6 (41.03)
load
Electrical Supply options High volt (GXS & pXH) 380-460 V 3Ø 50/60 Hz
Low volt (GXS & pXH) 200-230 V 3Ø 50/60 Hz
Connections High volt (GXS & pXH) Harting han K 4/4-F Harting han 100A-F
Low volt (GXS & pXH) Harting han K 4/4-F Harting han 200A-F
pXH Harting han K 4/4-F
Vacuum pXH Inlet pXH4500/ISO200 pXH6000/ISO250 pXH6000/ISO250
couplings
GXS Exhaust GXS450/NW50 GXS750/NW50 GXS750/2600/NW50
Cooling Flow GXS/pXH 12 lmin-1 (3.2 galmin-1) 26 lmin-1 (6.9 galmin-1) 18 lmin-1 (4.8 galmin-1)
water (10-25 ˚C) (10-25 ˚C) (10-25 ˚C)
Supply pressure GXS/pXH 6.9 bar (100 psig)
(max)
DP across pump GXS/pXH 1.25 bar (18 psig) 2 bar (29 psig) 2.5 bar (36 psig)
(min)
Operating ˚C (°F) 5-40 (41-104)
temperature
N2 pressure (supply pressure) bar (psig) 2.5-6.9 (36-100)
Light duty slm 12
Medium duty slm 18-146
Control valve connection Swagelok® Ø ⅜” tube with olive
Solvent Filter connection ½" NPT Male
flush
Solvent connection ⅜" BSP Male (G ⅜")
Noise dB (A) < 64 < 70

GXS exhaust back pressure mbar (psia) 1400 (20)
(max)
System IP rating 21D (IEC60529)
Lubrication Type PFPE Drynert® 25/6 (reco mmended), Fomblin® 25/6 (alternative),
Krytox® 1525 (alternative)
Volume l (US gal) 3.6 (0.9) 6.8 (1.8) 4.9 (1.3)
Monitoring & Control Profibus DP
Weight kg (lbs) 1191 (2625) 2038 (4493) 1598 (3523)

Units GXS750/4200 & GXS750/2600 & GXS750/4200 &
pXH6000 7.5 kW 2x pXH6000 7.5 kW 2x pXH6000 7.5 kW
Peak pumping speed m3h-1 (cfm) 7040 (4143) 12500 (7357) 13220 (7781)
Ultimate pressure mbar (Torr) 2.7 x 10 (2.00 )
-4 -4
3.1 x 10 (2.32 )
-4 -4
2.9 x 10-4 (2.16-4)
Motor rating power kW (hp) 37 (49.6) 44.5 (59.7) 44.5 (59.7)
Full load @ ultimate kW (hp) 12.7 (16.96) 14.0 (18.82) 14.7 (19.74)
power pressure
@ peak kW (hp) 29.9 (40.09) 31.3 (41.95) 30.5 (40.95)
pumping load
Electrical Supply options High volt (GXS & pXH) 380-460 V 3Ø 50/60 Hz
Low volt (GXS & pXH) 200-230 V 3Ø 50/60 Hz
Connections High volt (GXS & pXH) Harting han 100A-F
Low volt (GXS & pXH) Harting han 200A-F
pXH Harting han K 4/4-F
Vacuum pXH Inlet pXH6000/ISO250 pXH6000/ISO250 pXH6000/ISO250
couplings
GXS Exhaust GXS750/4200/NW50 GXS750/2600/NW50 GXS750/4200/NW50
Cooling Flow GXS/pXH 18 lmin-1 (4.8 galmin-1) 24 lmin-1 (6.3 galmin-1) 24 lmin-1 (6.3 galmin-1)
water (10-25 ˚C) (10-25 ˚C) (10-25 ˚C)
Supply GXS/pXH 6.9 bar (100 psig)
pressure (max)
DP across GXS/pXH 2.5 bar (36 psig) 2.5 bar (36 psig) 2.5 bar (36 psig)
pump (min)
Operating ˚C (°F) 5-40 (41-104)
temperature
N2 pressure (supply pressure) bar (psig) 2.5-6.9 (36-100)
Light duty slm 12
Medium duty slm 18-146
Control valve connection Swagelok® Ø ⅜” tube with olive
Solvent Filter connection ½" NPT Male
flush
Solvent connection ⅜" BSP Male (G ⅜")
Noise dB (A) < 70

GXS exhaust back pressure mbar (psia) 1400 (20)
(max)
System IP rating 21D (IEC60529)
Lubrication Type PFPE Drynert® 25/6 (reco mmended), Fomblin® 25/6 (alternative),
Krytox® 1525 (alternative)
Volume l (US gal) 6.0 (1.6) 6.6 (1.7) 7.7 (2.0)
Monitoring & Control Profibus DP
Weight kg (lbs) 1556 (3430) 2033 (4482) 2021 (4455)

Booster Vacuum Instrumentation Interface Accessories

0 None 0 None 0 None
1 pXH4500 1 GXS / GMB Interstage Active Pirani Gauge 1 Full Profibus (2x Profibus Modules)
2 pXH6000 2 pXH / GXS Interstage Active Pirani Gauge 2 One Profibus Module + pXH Serial Link
3 2x pXH4500 3 GXS / GMB Interstage Active Strain Gauge 3 Full MCMmicroTIM (2x TIMs)
4 2x pXH6000 4 pXH / GXS Interstage Active Strain Gauge 4 One MCMmicroTIM + pXH Serial Link
5 Full SIM control by Ethernet
M X
Material option
1 Carbon steel
2 Stainless steel 1x pXH & 1x GSX, straight spool
3 Stainless steel 1x pXH & 1x GXS, cross spool
4 Stainless steel 1x pXH & 2x GXS
5 Stainless steel 2x pXH & 1x GXS
6 Stainless steel extension kit 1x GXS or 1x pXH only
Pump Pump Purge / Voltage Spool & Manifold / Extension Kit

0 None 0 None 1 Straight spool *
1 2x GXS250 1 Light duty 200-230V 3Ø 50/60 Hz 2 Cross spool **
2 GXS450 2 Light duty 380-460V 3Ø 50/60 Hz 3 Standard manifold 2x GXS & 1x pXH
3 2x GXS450 3 Medium duty 200-230V 3Ø 50/60 Hz 4 Standard manifold 2x pXH & 1x GXS
4 GXS750 4 Medium duty 380-460V 3Ø 50/60 Hz 5 Extension kit 1x GXS or 1x pXH only ***
5 2x GXS750 5 Medium duty+ 200-230V 3Ø 50/60 Hz
6 GXS250/2600 6 Medium duty+ 380-460V 3Ø 50/60 Hz
7 2x GXS250/2600 7 Light duty EES 200-230V 3Ø 50/60 Hz
8 GXS450/2600 8 Light duty EES 380-460V 3Ø 50/60 Hz
9 2x GXS450/2600
A GXS450/4200
B GXS750/2600
C 2x GXS750/2600
D GXS750/4200
Notes
* Cost effective variant
** Ready for future module extension
*** Select, if already installed 1x GXS & 1x pXH with cross spool and want extension to module C or D.
Extension kit includes necessary spool(s), frame for 2x pXH, valve, bellows, hardware etc. Important: the pump or booster you select for extension must be of the same size
or type as bought previously
Material Options
1: Carbon steel except GXS valve made of iron cast & stainless steel, bellows made of st. steel / flanges CS
2 - 6: Stainless steel except GXS valve made of iron cast & st. steel, bellows made of st. steel / flanges CS, recommended for chemical applications
Pump Purge / Voltage include:

Light duty: SSP
Medium duty: SSP + Inlet + GB + Exh PM, pressure monitoring
Medium duty+ : the same as medium duty with high flow purge / solvent flush
Light duty EES includes SSP & external evacuation system
Please contact your sales representative for more information

IDX 1000/1300 DRY PUMP
The IDX1000 is the benchmark in performance for fast pump-down of large chambers and high
capacity pumping for industrial processes. Based on the double-ended screw technology, the IDX
Dry Vacuum Pump will give you all the reliability and performance you want for your process. The
IDX outperforms all other dry pumps in robustness, performance and ease of operation, giving
you faster pump-down from atmosphere and managing higher throughput at low pressures. Dry
pumping systems reduce energy costs, eliminate effluent and can give significant improvements in
product quality, making them the ideal solution for many coating and metallurgy processes.
Features and Benefits Pump Range

• Improved performance and reliability. IDX
• Continuous performance from atmosphere to ultimate. -- IDX1000
• Excellent thermal profile and temperature control. -- IDX1300
• Tolerates liquid and particles.
• Does not contaminate your process.
Applications
• Metallurgy.
• Vacuum Induction Melting (VIM).
• Vacuum Arc Refining (VAR).
• Precision Investment Casting (PIC).
• Steel Degassing.

Performance Curves
IDX1000
IDX1000 IDX1000 Performance Curve
Peak Pumping Speed 1400
1000 m3h-1 1200
(589 cfm) 1000
(m 3 h -1)
Ultimate Pressure 800
5 x 10-2 mbar
600
400
(3.75 x 10-2 Torr)
200
IDX1000
0
10 -3 10 -2 10 -1 10 0 10 1 10 2
10 3 (mbar)
IDX1000 22 kW 50 Hz safe area A70803985
IDX1000 30 kW 50 Hz safe area extended performance A70804985
IDX1000 30 hp 60 Hz safe area A70813985
IDX1000 40 hp 60 Hz safe area extended performance A70814985
IDX1300
IDX1300 IDX1300 Performance Curve
Peak Pumping Speed
1400
1300 m3h-1 1200
(766 cfm) 1000
Ultimate Pressure
(m 3 h -1)
800
5 x 10-2 mbar 600
(3.75 x 10-2 Torr) 400
200
IDX1300
0
10 -3 10 -2 10 -1 10 0 10 1 10 2
10 3 (mbar)
IDX1300 30 kW DIN Safe Area A70904985
IDX1300 40 hp ANSI Safe Area A70914985

Dimensions
IDX Dimensions
C
B
IDX1000 IDX1300
A 50 Hz 2250 mm (88.5”) 2465 mm (97”)
60 Hz 2290 mm (90.1”) 2515 mm (99”)
B 854 mm (33.6”) 1005 mm (39.6”)
C 750 mm (29.5”) 750 mm (29.5”)
Technical Data
IDX1000 IDX1300
50 Hz kg (lb) 1560 (3439) 1590 (3506)
60 Hz kg (lb) 1630 (3594) 1660 (3660 lb)
Pumping speed
Nominal m3h-1 (cfm) 1000 (589) 1300 (766)
Actual m3h-1 (cfm) 900 (560) 1250 (736)
Ultimate pressure mbar (Torr) 5 x 10-2 (3.75 x 10-2)
Noise dB(A) 82
Motor kW (hp) 30 (40 )
Optional kW (hp) 22 (30) -

Gear Box Oil
Gear Box Oil 4 Ltr Mobil SHC 629 H11023011
Coolant
Coolant 0.9/2L Drystar H12810003
* 0.9 litres (0.24 US gal) as supplied, 2.0 litres (0.53 US gal) when
diluted.
IDX Kit
IDX Routine maintenance kit A70801800
IDX Heat exchanger cleaning kit A70801801

IDX Cooling system overhaul kit A70801802
IDX Motor fitting kit A70801803
IDX Drive coupling kit A70801804
IDX Bearing and seal replacement kit A70801805
IDX Oil pump replacement kit A70801806
IDX Strip and rebuild kit A70801807
IDX Flame arrestor cleaning kit A70801808
IDX Hoses kit A70801809
IDX Flame arrestor replacement kit (inlet) A70801810
IDX Flame arrestor replacement kit (outlet) A70801811
IDX Flame arrestor tooling kit A70801812
A number of accessories are available for the CDX and IDX pumps,
as listed below. Contact your supplier or Edwards for details of
these accessories.
• Exhaust Silencers (mild steel or stainless steel)
• Flame arrestors
• Acoustic enclosures and acoustic cover kits
• Gas ballast kits
• Inlet purge kit
• Exhaust purge kit
Service

EPX HIGH VACUUM PRIMARY PUMP
MODERNISING YOUR WORLD THROUGH VACUUM
The EPX series uses a unique, patented, single-shaft regenerative/Holweck® stage mechanism that
makes them capable of pumping from atmosphere to ultimate pressures of < 1x10-4 mbar or < 1x10-6
mbar depending on model. They are ideal for applications where a better base pressure is required
than can be delivered by a typical primary pump and where otherwise a turbomolecular pump and
primary pump would be required and also for applications that cycle frequently from atmosphere to
low pressures as they can operate continuously at all inlet pressures.

• Compact footprint – the EPX is more compact than • Gas recirculation.
the equivalent turbomolecular pump and primary • Gas recovery.
pump combination. • Beamlines.
• Low cost of ownership – zero routine maintenance with • Distillation, drying and degassing.
a 5 year service interval.
• Unique patent protected pumping mechanism – the EPX Pump Range
can pump down from atmosphere to turbomolecular base
pressure and can operate continuously at all inlet pressures. EPX180
No separate “rough pumping” required. • EPX180LE
• Ultra clean mechanism – EPX pumps have no grease or oil • EPX180NE
under vacuum and present no other source of potential
EPX500
contamination.
• EPX500LE
• Extremely reliable – based on field proven IPX technology, the
• EPX500NE
EPX has a MTBFp = 13 years (SEMI E10) with service periods of
around every 5 years to maximize the life of the pump.
• Water cooled – low environmental heat load
• Low noise and vibration – better working environment.
Ideal for vibration sensitive environments.

Performance Curves
EPX180LE Dry Pump

EPX180LE EPX180LE Performance Curve
Peak speed
170 m3h-1
105 ft3min-1
2835 lmin-1
Ultimate vacuum
< 1 x 10-4 mbar
< 7.5 x 10-5 Torr
< 1 x 10-2 Pa

EPX180LE Dry Pump 208 V No TIM ⅜ water connector A41943012 1 Comparative pumping speeds from back to back testing
EPX180LE Dry Pump 400 V No TIM ⅜ water connectors A41943014 2 ISO pumping speed obtained using total pressure gauges
EPX180LE Dry Pump 208 V No TIM ¼ water connector A41943022

EPX180LE Dry Pump 400 V No TIM ¼ water connectors A41943024
EPX180LE Dry Pump 208 V MCM TIM ⅜ water connector A41943712
EPX180LE Dry Pump 400 V MCM TIM ⅜ water connectors A41943714
EPX180LE Dry Pump 208 V MCM TIM ¼ water connector A41943722
EPX180NE Dry Pump

EPX180NE EPX180NE Performance Curve
Peak speed
170 m3h-1
105 ft3min-1
2835 lmin-1
Ultimate vacuum
< 1 x 10-4 mbar
< 7.5 x 10-5 Torr
< 1 x 10-2 Pa

EPX180NE Dry pump 208 V MCM TIM ⅜ water connector A41944514 1 Comparative pumping speeds from back to back testing
EPX180NE Dry pump 400 V MCM TIM ⅜ water connectors A41944712 2 ISO pumping speed obtained using total pressure gauges
EPX180NE Dry pump 400 V MCM TIM ¼ water connectors A41944714

EPX180NE Dry pump 208 V No TIM ⅜ water connector A41944724
EPX180NE Dry pump 400 V No TIM ⅜ water connector A41944012

EPX500L Dry Pump
EPX500 Performance Curve EPX500LE
Peak speed
500 m3h-1
295 ft3min-1
8338 lmin-1
Ultimate vacuum
< 1 x 10-6 mbar
< 7.5 x 10-7 Torr
< 1 x 10-4 Pa

1 Comparative pumping speeds from back to back testing EPX500LE Dry pump 208 V No TIM ⅜ water connector A41953012
2 ISO pumping speed obtained using total pressure gauges EPX500LE Dry pump 400 V No TIM ⅜ water connectors A41953014
EPX500LE Dry pump 208 V MCM TIM ⅜ water connector A41953712
EPX500N Dry Pump

EPX500 Performance Curve EPX500NE
Peak speed
500 m3h-1
295 ft3min-1
8338 lmin-1
Ultimate vacuum
< 1 x 10-6 mbar
< 7.5 x 10-7 Torr
< 1 x 10-4 Pa

1 Comparative pumping speeds from back to back testing EPX500NE 208 V No TIM ⅜ water connector A41954012
2 ISO pumping speed obtained using total pressure gauges EPX500NE 400 V No TIM ⅜ water connector A41954014
EPX500NE 208 V No TIM ¼ water connector A41954022
EPX500NE 208 V MCM TIM ⅜ water connector A41954712
EPX500NE 400 V MCM TIM ⅜ water connectors A41954714

Dimensions
LE variant Dimensions NE variant Dimensions
Technical Data
Units EPX180 LE EPX180NE EPX500LE EPX500NE
Peak speed m3h-1 170 170 500 500
ft min
3 -1
105 105 295 295
lmin-1 2835 2835 8338 8338
Ultimate vacuum mbar < 1 x 104 < 1 x 10-4 < 1 x 10-6 < 1 x 10-6
Torr < 7.5 x 10-5 < 7.5 x 10-5 < 7.5 x 10-7 < 7.5 x 10-7
Pa < 1 x 10 -2
< 1 x 10 -2
< 1 x 10 -4
< 1 x 10-4
Warm-up time min 30 30 30 30
(to nominal performance)
Inlet flange ISO63 ISO63 ISO160 ISO160
Outlet flange NW25 NW25 NW25 NW25
Noise dB(A) < 59 < 59 < 59 < 59
Water connectors ⅜ in Quick ⅜ in Quick

Minimum cooling water lmin -1
2 2 2 2
flow rate
Cooling water temperature ˚C 15-35 15-35 15-35 15-35
Electrical Supply 200/208 V, 50/60 Hz 400 V, 50/60 Hz 200/208 V, 50/60 Hz 200/208 V, 50/60 Hz
3 phase 3 phase 3 phase 3 phase
Power at ultimate kW 1.4 1.4 1.4 1.4
Rated motor power kW 3.0 3.0 3.0 3.0
TIM none None None None
Weight kg 43.5 43.5 45.2 45.2
Nitrogen supply interface - ¼ in (6.5 mm) tube - ¼ in (6.5 mm) tube
Nitrogen supply pressure Pa - 3 x 105-7 x 105 - 3 x 105-7 x 105
Minimum nitrogen purity - 99.95% - 99.95%

Foot Adapter
IPX-EPX foot adapter A41900186
Pump Display Terminal (PDT)

Pump Display Terminal (PDT) D37272000
Protection Box Accessory

200/208 V, 50/60 Hz D37330000
400 V, 50/60 Hz D37331000
Service
The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training
courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, please state
for each part required:


MECHANICAL BOOSTERS
EH Mechanical Booster Pumps 151

pXH Mechanical Booster Pumps 158
Stokes 6” Series Mechanical Booster Pumps 160
HV8000 Mechanical Booster Pump 169
HV30000/40000 Mechanical Booster Pumps 173
Mechanical
Shop online at shop.edwardsvacuum.com Contact our customer service team Boosters 147.
Mechanical Boosters
-- EH Mechanical Booster Pumps
-- pXH Mechanical Booster Pumps
-- Stokes 6” Mechanical Booster Pumps
-- HV Mechanical Booster Pumps
Edwards provides a wide range of mechanical booster pumps to suit

all the requirements of Industrial and Chemical processes.
Product ranges
The EH Mechanical Booster range gives our customers reassurance

and peace of mind thanks to its large installed base, both in Industrial
and Chemical markets. EH pumps, available in sizes from 250 to 4200 m3h-1
displacement, feature the unique hydrokinetic drive, providing an
efficient power transmission with benefits in economy, performance
and compactness.
The pXH Pumps represent the new generation of large mechanical

boosters providing high pumping capacity with reduced footprint.
Available in sizes from 6965 to 8358 m3h-1 displacement, are packaged
as separate pumps with inverter driven controls. They are designed to
be easily integrated with GXS, the last generation Edwards Industrial
on board controlled dry pumps, into a high pumping speed dry
pumping system.
The Stokes 6” Series features a rugged design for robust and reliable
operation. Available in sizes from 1040 to 6630 m3h-1 displacement
is configurable to customer needs: bare shaft or direct drive,
1800‑3600 rpm, vertical or horizontal gas flow orientation with by-pass
versions available.
HV Pumps feature a rugged design for robust and reliable operation in

very large scale processes in Industrial and Chemical markets. Available
in sizes from 7200 to 36000 m3h-1 displacement, are configurable to
customer needs: bare shaft or with direct drive motor fitted, can be
specified with variable frequency drives for greater versatility.
Mechanical
148. Boosters
ATEX Gas Auto-Ignition Temperature
The temperature classifications applied to the chemical
ATEX classified EH boosters are annotated with the EH pumps relate to the auto-ignition temperature of
suffix “T3” or “T4”. flammable materials that can be pumped:
• EH boosters may be supplied with ATEX classification
either as part of a pump system or stand-alone. • The EH250C, EH500C, EH1200C, EH2600C, EH4200C
• ATEX compliance is typically specified for use in and ATEX EH pumps that have a T3 classification are
Europe, but may also be required in other areas. suitable for pumping flammable materials that have
an auto-ignition temperature greater than 200 °C.
ATEX compliant EH boosters are suitable for operation • ATEX EH pumps that have a T4 classification are
in ATEX systems: suitable for pumping flammable materials that have
an auto-ignition temperature greater than 135 °C.
All of the EH250C, EH250 T4, EH500C, EH500 T3,
EH1200C, EH1200 T4, EH2600C, EH2600 T3, EH2600 Flame Proof
T4, EH4200C, EH4200 T3 and EH4200 T4 chemical EH Chemical boosters are annotated with the suffix “C”.
pumps are fitted with flameproof motors: • EH boosters may be ordered with Flame proof
• Pumps suitable for 50 Hz operation are fitted with a motors either individually, or as part of an Chemical
flameproof motor approved to EEx d. Gas Group IIA, system.
lIB, Temperature Class T4. • Flame proof is generally applicable in N. America and
• Pumps suitable for 60 Hz operation are fitted with a the rest of the world (excluding Europe).
flameproof motor approved to CSA, Division 1 area, Chemical boosters will be supplied with a flame proof
Gas Class I Group C & D, and Dust Class II Group F & motor (suitable for 60 Hz operation) approved to CSA,
G, Temperature Class T3C. Division 1 area, Gas Class I Group C & D and Dust Class II
• The 60Hz pumps with flameproof motors are Group F & G, Temperature Class T3C.
designated C versions.
Internal and External Classifications

Internal External
II 1 G bc T4 II 2 G IIB T4
or or
EH500
Internal Atex is suitable for all gas types.
The notations used in these ratings are as follows:

Symbol Meaning
Specifies that the chemical EH pump can be
used in a potentially explosive atmosphere
II Equipment group II
1G Equipment category 1
b Control of ignition source
c Constructional safety
IIB Suitable to pump gas group IIB
T3 / T4 Gas auto-ignition temperature
Mechanical
EH Pumps with
Hydrokinetic Drive
EH booster pumps have a unique and patented
hydrokinetic fluid drive, which couples the motor to the
pumping mechanism. The hydrokinetic drive offers the
following advantages:
• Pump down times cut by up to 50%
• Reduced capital and operating costs
• No pressure sensors, by-pass lines or valves
• Can operate continuously at all pressures – when
used with a backing pump.
EH booster pumps have universal voltage, air-cooled

motors and are available with effective pumping speeds
of up to 4140 m3h-1 / 2440 ft3min-1. The pump bodies
of the EH1200, EH2600 and EH4200 pumps are water-
cooled.
Two versions of each EH booster pump are available,
with different oils used for the lubrication of the seals
and gears. The standard version uses mineral oils, such
as Ultragrade 20. The alternative version has PFPE
(perfluoropolyether) oils and is suitable for applications
where oxygen or other reactive and corrosive gases are
processed. Fomblin® must be purchased separately for
PFPE prepared pumps:
Pump-Down Times cut by up to 50%

The hydrokinetic drive allows the booster pump to
be started at the same time as the backing pump (at
atmospheric pressure) as it prevents motor overload.
The EH booster pump therefore assists the pumping Automatic Overload Protection
process from the start of pump-down. In comparison The hydrokinetic drive automatically varies the
pumping systems with conventional, direct drive rotational speed of the pump. This protects the motor
mechanical booster pumps (where the booster pump from overload, prevents over-heating, and allows
is switched on when the chamber pressure has been the pump to operate with high pressure differentials.
reduced to, typically, less than 10 mbar / 7.5 Torr), the Consequently, EH booster pumps are not damaged by
total evacuation time can be reduced by as much as sudden increases of inlet pressure and even by the entry
50%. The graph below shows data for a 2.8 m3 / 100 ft3 of solid debris into the pump.
chamber, with a 2600 m3h-1 / 2600 ft3min-1 mechanical
booster pump and a 255 m3h-1 / 150 ft3min-1 backing Important Cost Savings
pump: When you use EH mechanical booster pumps, you save
money on installation and operation. Your capital costs
are reduced as you do not need valves, by-pass lines and
pressure switches, and you can use a smaller backing
pump than with conventional drive booster pumps.
Operation costs are reduced because EH booster pumps
have smaller motors than direct drive pumps and, when
operating at full speed, they use only a fraction of the
rated power.
Mechanical
150. Boosters
EH MECHANICAL BOOSTER PUMP
The EH mechanical booster pumps feature the unique hydrokinetic drive, providing an efficient power
transmission with benefits in economy, performance and compactness. The hydrokinetic drive provides pump
down times cut by 50%, when compared with direct drive pumps, no bypass lines or pressure switches required,
universal voltage motors, reduced capital and operating costs, air cooled motors – with water cooled options,
and quiet, minimum vibration. The EH mechanical booster pumps, based on the simple Roots principle, remain
the favorite pumps for applications where high pumping speeds over 3000 m3h‑1/1776 ft3min-1 are required
in the pressure region of 0.01 to 50 mbar/0.0075 to 37.5 Torr. These must always be backed by another pump
which can deliver against a high pressure differential to atmospheric pressure. Operating at relatively low
pressures, the mechanical booster pump is not exposed to the same concentrations
of corrosive process media as is the backing pump, which makes it highly reliable.

• Performance – fast pump down time due to unique • Vacuum distillation.
hydrokinetic drive. • Vacuum packaging.
• Increased productivity – faster pump down time. • Steel degassing.
• More performance for less – larger displacement than • Thin film coating.
equivalent competitor models. • Industrial freeze drying.
• Stable operation – optimised clearances and after coolers. • Semiconductor processing.
• Simplicity – Continuous operation at all pressures.
• Simple installation – no need for pressure switches, Pump Range
bypass lines or variable frequency drives. EH
• Reliability – automatic overload protection, reliable -- EH250
shaft seal design. -- EH500
• Safe operation – automatic overload protection. -- EH1200
• Robust operation even for harsh duties – proven shaft -- EH2600
seal design to protect pumping mechanism and gearbox -- EH4200
from cross-contamination. -- PFPE Prepared
• High uptime and low maintenance – internal evacuation -- EH250FX
of gearboxes extends shaft seal life. -- EH500FX
-- EH1200FX
• Reassurance.
-- EH2600FX
• Peace of mind – industry proven with large installed base.
-- EH4200FX
Mechanical
Performance Curves
EH250 Mechanical Booster Pump
EH250 EH250 Performance Curve
Displacement 10
3
50 Hz 310 m3h-1
185 ft3min-1
60 Hz 375 m3h-1
(m3 h -1)
220 ft3min-1 10
2
EH250, 50Hz
Ordering information E2M40
GV80

1
10
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (mbar)
EH250 HC IE3 Asia 50 Hz 200 V 50 Hz A30105934

-2 -1 0 1 2 3 4 5
10 10 10 10 10 10 10 10 (Pa)
EH250 HC IE3 EU/CN 50 Hz 380-400 V 50 Hz A30105945
EH250 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V60 Hz A30106934 10
3
EH250 HC IE3 US 60 Hz 230/460 V 60 Hz A30106946

EH250 FX IE3 Asia 50 Hz 200 V 50 Hz A30107934 (ft 3 min -1 )
EH250 FX IE3 EU/CN 50 Hz 380-400 V 50 Hz A30154936 2

10
EH250 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A30108934
EH250 FX IE3 US 60 Hz 230/460 V 60 Hz A30108946 EH250, 60Hz
E2M40
EH250C 460 V 3-ph 60 Hz 3 hp NRA997000 GV80
EH250T4 220-240/380-415 V 3ph 50 Hz 2.2 kW NRA996000 10

1
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (Torr)
Please note that Fomblin must be purchased separately with PFPE-

prepared pumps. Fomblin YVac 16/6 is appropriate

Displacement 10
3
50 Hz 505 m3h-1
300 ft3min-1
60 Hz 605 m3h-1
335 ft3min-1
(m3 h -1)
2
10
EH500, 50Hz
E2M80
GV80
1
10
-4 -3 -2 -1 0 1 2 3

10 10 10 10 10 10 10 10 (mbar)
EH500 HC IE3 Asia 50 Hz 200 V 50 Hz A30205934 10

-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
(Pa)

3
10
EH500 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A30206934
EH500 HC IE3 US 60 Hz 230/460 V 60 Hz A30206946
EH500 FX IE3 Asia 50 Hz 200 V 50 Hz A30207934
(ft 3 min -1 )
EH500 FX IE3 EU/CN 50 Hz 380-400 V 50 Hz A30207945 10

2
EH500 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A30208934 EH500, 60Hz
EH500 FX IE3 US 60 Hz 230/460 V 60 Hz A30208946 E2M80

GV80
EH500C 460 V 3-ph 60 Hz 3 hp NRA999000

EH500T3 220-240/380-415 V 3ph 50 Hz 2.2 kW NRA998000 10
1
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (Torr)

Mechanical
152. Boosters
EH1200 Performance Curve EH1200
10
3
Displacement
50 Hz 1195 m3h-1
715 ft3min-1
60 Hz 1435 m3h-1
(m3 h -1)
10
2
845 ft3min-1
EH1200, 50Hz
E2M175
E2M80
1
10
-4 -3 -2 -1 0 1 2 3

10 10 10 10 10 10 10 10 (mbar)
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
10
5
(Pa) EH1200 HC IE3 Asia50 Hz 200 V50 Hz A30505934
10
3 EH1200 HC IE3 EU/CN50 Hz 380-400 V50 Hz A30505945
EH1200 HC IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz A30506934
EH1200 HC IE3 US60 Hz 230 / 460 V60 Hz A30506946
EH1200 FX IE3 Asia50 Hz 200 V50 Hz A30507934
(ft 3 min -1 )
10
2
EH1200 FX IE3 EU/CN50 Hz 380-400 V50 Hz A30507945
EH1200, 60Hz
E2M175
EH1200 FX IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz A30508934
E2M80
EH1200 FX IE3 US60 Hz 230 / 460 V60 Hz A30508946
EH1200C 230/460 V 3-ph 60 Hz 4 hp A30556982
1
10
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
(Torr) EH1200T4 380-415 V 3ph 50 Hz 3 kW A30557900
Please note that Fomblin must be purchased separately with PFPE-prepared

pumps. Fomblin YVac 16/6 is appropriate

EH2600 Performance Curve EH2600
10
4 Displacement
EH2600, 50Hz 50 Hz 2590 m3h-1
1525 ft3min-1
E2M175
E2M275
60 Hz 3110 m3h-1
1830 ft3min-1
(m3 h -1)
3
10
10
2
-4 -3 -2 -1 0 1 2 3
EH2600 HC IE3 Asia50 Hz 200 V50 Hz A30705934
10 10 10 10 10 10 10 10 (mbar)
EH2600 HC IE3 EU/CN50 Hz 380-400 V50 Hz A30705945

-2 -1 0 1 2 3 4 5
10 10 10 10 10 10 10 10 (Pa)
EH2600 HC IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz A30706934
EH2600 HC IE3 US60 Hz 230 / 460 V60 Hz A30706946
4
10
EH2600, 60Hz
E2M175 EH2600 FX IE3 Asia50 Hz 200 V50 Hz A30707934
E2M275
EH2600 FX IE3 EU/CN50 Hz 380-400 V50 Hz A30707945
(ft 3 min -1 )
3
EH2600 FX IE3 Asia60 Hz 200 V60 Hz, 380 V60 Hz A30708934
10
EH2600 FX IE3 US60 Hz 230 / 460 V60 Hz A30708946
EH2600C 230/460 V 3-ph 60 Hz 15 hp A30756982
EH2600T3 380-415 V 3ph 50 Hz 11 kW A30741935
10
2 EH2600T4 380-415 V 3ph 50 Hz 11 kW A30779900
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (Torr)

Mechanical
Performance Curves

Displacement 10
4
50 Hz 4140 m3h-1 EH4200, 50Hz

E2M275
2440 ft3min-1
60 Hz 4940 m3h-1
(m3 h -1)
3
2935 ft3min-1
10
2
-4 -3 -2 -1 0 1 2 3
10 10 10 10 10 10 10 10 (mbar)
Product description Order no: -2 -1 0 1 2 3 4 5

10 10 10 10 10 10 10 10 (Pa)
EH4200 HC IE3 Asia 50 Hz 200 V 50 Hz A30905934

4

10
EH4200, 60Hz
EH4200 HC IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A30906934 E2M275
EH4200 HC IE3 US 60 Hz 230/460 V 60 Hz A30906946

(ft 3 min -1 )
EH4200 FX IE3 Asia 50 Hz 200 V 50 Hz A30907934 3
10
EH4200 FX IE3 EU/CN 50 Hz 380-400 V 50 Hz A30907945

EH4200 FX IE3 US 60 Hz 230/4 60 V 60 Hz A30908946
EH4200 FX IE3 Asia 60 Hz 200 V 60 Hz, 380 V 60 Hz A30908934 138
EH4200C 230/460 V, 3-ph, 60 Hz, 15 hp A30956982 10
2 (5.43)
10
-4
10
-3 -2
77510 (30.51)
10
-1
10
0
10
1
ISO63
2
10 10
3
(Torr)
EH4200T3 380-415 V, 3-ph, 50 Hz, 11 kW A30941935

EH4200T4 380-415 V, 3ph, 50 Hz, 11 kW A30979900
270 (10.63)
(9.09)
Dimensions
231
(4.92)
125
98
EH250 dimensions 3 x M10 x 15 (0.59) ISO40
(3.86)
8
138 187.5 (0.32)
(5.43) (7.38)
775 (30.51) ISO63
270 (10.63)
(9.09)
(11.50)
(5.51)
231
140
292
861 (33.90)
(6.97)
Ø177
(4.92)
179
125
ISO100 (7.05)
98
3 x M10 x 15 (0.59) ISO40
(3.86)
234 (9.21)
(8.35)
8
212
187.5 (0.32)
(4.17)
(7.38)
106
ISO63 4 x M8 x 16 (0.63)
98
EH500 dimensions M10 x 15 (0.59)
(3.86)
(11.50)
222 196
(5.51)
140
292
(6.97)
(8.74) (7.72)
Ø177
861 (33.90)
179
ISO100 (7.05)
(5.75)
146
234 (9.21)
(4.52)
(11.50)
(8.35)
115
212
292
Ø180
(4.17)
106
ISO63 4 x M8 x 16 (0.63)
M10 x 15 (0.59) 98
(3.86)
222 196
(8.74) (7.72)
Mechanical
(5.75)
146
154. Boosters
(4.52)
(11.50)
115
292
180
1018 (40.08)
ISO160 277 (10.91)
Ø198 (7.80)
334 (13.15)
(10.55)
268
(5.20)
132
M12 x 15 (0.59) 110 (4.33)
48 (1.89)
ISO100
230 220
EH1200 dimensions (9.06) (8.66)
1018 (40.08)
380 (14.96)
ISO160 277 (10.91)
1245 (49.02)
Ø198 (7.80)
334 (13.15)
155
(10.55)
312
268
(6.10) (12.28)
(5.20)
132
(18.15)
4 x Ø18 (0.71)
461
260 (10.24)
Ø236
M12 x 15 (0.59) 110 (4.33)
48 (1.89)
ISO100
(11.22)
285
230 220
(9.06) (8.66) M16 x 16
524 275 110
(20.63) (10.83) (4.33)
380 (14.96) 220
EH2600 dimensions
(8.66)
1245 (49.02) 481
155 312 (18.94)
(6.10) (12.28)
(9.29)
236
1425 (56.10)
(14.76)
(18.15)
4 x Ø18 (0.71)
375
461
260 (10.24)
Ø236
155 402
(6.10) (15.83)
(11.22)
285
M16 x 16
(18.15)
ISO100
461
4 x Ø22 370
Ø314
524 275 110

(20.63) (14.57)
(10.83) (4.33)
(11.22)
285
220
(8.66) M16 x 16
481 533 290 185

(18.94) (20.98) (11.42) (7.28)
EH4200 dimensions 370
(14.57)
(9.29)
236
1425 (56.10)
(14.76)
481
375
155 402 (18.94)

(6.10) (15.83)
(9.33)
237
(18.15)
(14.76)
ISO100
461
4 x Ø22
375
370
Ø314
(14.57)
(11.22)
285
M16 x 16
4 x Ø22 370 ISO100
533 290 185
(20.98) (14.57)
(11.42) (7.28)
370
(14.57)
481
(18.94)
(9.33)
237
(14.76)
375
4 x Ø22 370 ISO100

(14.57)
Mechanical
Technical Data
Units EH250 EH500 EH1200 EH2600 EH4200
50 Hz m3h-1/ft3min-1 310/185 505/300 1195/715 2590/1525 4140/2440
60 Hz m h /ft min
3 -1 3 -1
375/220 605/335 1435/845 3110/1830 4985/2935
Effective pumping speed with backing pump
E2M40 m3h-1/ft3min-1 240/141 350/206 840/495 - -
E2M80 m3h-1/ft3min-1 274/161 400/236 840/495 - -
E2M175 m h /ft min
3 -1 3 -1
- 440/259 930/548 1750/1031 -
E2M275 m h /ft min
3 -1 3 -1
- 460/271 1020/601 1900/1119 3100/1825
Pressure differential across pump +
50 Hz mbar/Torr 0-180/0-140 0-110/0-83 0-90/0-68 0-120/0-90 0-70/0-52
60 Hz mbar/Torr 0-150/0-115 0-90/0-68 0-75/0-56 0-67/0-50 0-50/0-38
Inlet connection ISO63 ISO100 ISO160 ISO160 ISO250
Outlet connection ISO40 ISO63 ISO100 ISO100 ISO100
Rotational speed
50 Hz rpm 0-2900 rpm
60 Hz rpm 0-3500 rpm
Operating continuous inlet pressure mbar/Torr 0-1000 mbar/0-760 Torr
Maximum outlet pressure mbar/Torr 1000 mbar/760 Torr
Recommended backing pumps GV80, E2M40, GV80, E2M80, GXS160, GXS250, GXS450,
E2M80, ES100, ES100, ES200, GXS250, GXS400, E2M275,
212J ES300, 212J, E2M80, E2M175, ES300, ES630 ,
412J E2M175, E2M275, 412J, IDX1000,
ES200, ES300, ES300, ES630, IDX1300
ES630, 212J, 412J, IDX1000,
412J, IDX1000, IDX1300
IDX1300
Electrical supply voltage, 3-ph
50 Hz 200 V/380-400 V
60 Hz 200 V/380 V/230 V/460 V
Motor power
Hydrocarbon kW/hp 2.2/3 3/4 11/15
PFPE kW/hp 2.2/3 3/4 11/15
ATEX kW 2.2 3 11
Explosion proof 3 4 15
Ambient temperature range
Operating ˚C/F 5 to 40/40 to 104
Storage ˚C/F -10 to 80/14 to 176
Maximum operating humidity RH 90%
Cooling method Air cooled Air cooled Water cooled+ Water cooled Water cooled
Recommended oil
Standard version Ultragrade 20
PFPE version Fomblin® YVAC 16/6
Oil capacity
Gear case litre - - 1.25 3.5 3.5
Coupling cover litre 1.5 2.4 6.5 6.5 l
Shaft seal reservoir litre 0.125 1.5
Weight kg/lb 75/165 85/187 151/332 339/746 409/900
+ Depends on pressure
Mechanical
156. Boosters
EH Accessories
Inlet Mesh Assy ISO63 EH250 A60041569
Inlet Mesh Assy ISO160 EH1200/2600 A60041570

OLM500 oil level monitor* A50434000
* Not suitable for ATEX boosters
Fomblin® YVAC16/6
Fomblin® YVAC16/6
1 kg H11306019
5 kg H11306020
Ultragrade Oil
Ultragrade 20 Oil (1 litre) H11024015
Ultragrade 20 Oil (12 x 1 litre) H11024012
Ultragrade 20 Oil (4 litre) H11024013
Ultragrade 20 Oil (4 x 4 litre) H11024011
Service kits
Spares Kit Con C&O EH/QMB250/500A A30151815
Spares Kit Module EH/QMB250/500A A30151820
Spares Kit Shim EH/QMB250/500A A30151825
Spares Kit Con C&O EH/QMB1200 A30551815
Spares Kit Module EH/QMB1200 A30551820
Spares Kit Con C&O EH/QMB26/4200 A30751815
Spares Kit Module EH/QMB26/4200 A30751820
Spares Kit Shim EH/QMB12/26/4200 A30751825
Spares Kit Con C&O EH/QMB26/4200 A30751815
Spares Kit Module EH/QMB26/4200 A30751820
Spares Kit Shim EH/QMB12/26/4200 A30751825
Mechanical
pXH MECHANICAL BOOSTER PUMPS
The pXH pumps represent the new generation of large mechanical boosters providing high pumping
capacity with reduced footprint. Available in sizes from 6965 to 8358 m3h-1 displacement, are
packaged as separate pumps with inverter driven controls. Designed to withstand harsh processes,
they have a field proven reliability from the large installed base. pXH can be easily integrated with
GXS, the last generation Edwards Industrial on board controlled dry pumps, into a high pumping
speed dry pumping system.
Features and Benefits Coating

• Glass coating.
• Inverter driven control for ‘Plug and Pump’, flexible
operation and automated control of your process.
• Consistent output.
• Plasma spray.
• Designed to withstand harsh industrial applications.
• Robust and reliable. Steel Degassing
• VD vacuum degassing.
Applications • VOD vacuum oxygen decarburising.
R&D/others Metallurgy
• Space simulation chambers evacuation. • VIM vacuum induction melting.
• Load lock evacuation. • VAR vacuum arc remelting.
• Oil treatment. • MIM/vacuum sintering.
• Vacuum packaging. • PIC (investment casting).
Drying • Electroslag remelting.
• Transformer drying. • Carbon vapour impregnation.
• Transformer vapour phase drying.
• Pipeline drying.
• Capacitor drying.
• Li Ion battery drying.
Mechanical
158. Boosters
Performance Curves Dimensions
pXH Mechanical Booster Pump pXH dimensions
pXH
L
W
pXH4500 pXH6000
pXH4500 380-460 V ACG000120300
Length mm 1086 1086
pXH4500 200-230 V AC6000120300
pXH6000 380-460 V ACH000120300 Width mm 517 517
pXH6000 200-230 V AC7000120300 Height mm 531 531
Technical data
Units pXH4500 pXH6000
Displacement m3h-1 6965 8358
System inlet connection ISO200 ISO250
System outlet connection ISO160 NW160
Noise dB (A) 66
Mass kg 400 435
Cooling water Cooling water connection ⅜” BSP quick connect
Maximum supply pressure barg 6.9
Supply temperature ˚C 10-25
Minimum pressure differential barg 1.25
Typical water cooling flow rate lmin -1
6
Electrical supply type 200-230 V 50/60 Hz/380-460 V 50/60 Hz
Han K 4/4
Motor rating kW (hp) 7.5 (10.0)
Power at ultimate pressure ( kW) kW (hp) 1.9 (2.5)
Mechanical
STOKES 6” SERIES MECHANICAL BOOSTER PUMPS
Stokes 6” series mechanical boosters are designed to be used in conjunction with rotary piston, dry
vacuum, rotary vane, liquid ring or on the inlet of the backing pump to create a compact integrated
package to increase pumping speed at working pressures and reduce the pump down time significantly.
The 6” Series are available in bare-shaft or direct drive motor variants, horizontal or vertical gas flow
and with a single mechanical seal or a Process Isolation variant with 5 mechanical seals for optimum
protection from dust and particulate contamination in arduous applications. Also By-pass variants are
available which eliminate the need for pressure switches making the 6” Series one of the most versatile
and flexible boosters.

Robust • Automotive.
• Over 80 years of time tested proven performance with • Chemical processing.
experienced service and technical support. • Heat treatment.
• Increased lifetime, reliability and simple to use – large • Leak detection.
diameter shafts, ring feeder keyless gear locking system • Metallurgy.
and dynamically balanced impellers. • PET processing.
• Pharmaceuticals.
Reliable • Thermal processing.
• Easy to maintain – single mechanical seal. • Transformer drying and cable fluid conditioning.
• Increased productivity – 5 seal design for optimal • Vacuum coating.
process protection. • Vacuum melting.
• Many other industrial applications.
Versatile
• Configured for your needs – bare shaft or direct drive,
1800-3600 rpm. Vertical or horizontal gas flow orientation Pump Range
with by-pass versions available. Stokes
• Simple to service – simple maintenance requirements -- 607 -- 61B
result in long term reliability. -- 615 -- 622
Mechanical
160. Boosters
Performance Curves
Stokes 607
Stokes 607 Series Mechanical Booster Stokes 607 Series Process Isolation Booster
Displacement Displacement
Direct drive 1040 m3h-1 612 cfm Direct drive 1040 m3h-1 612 cfm
1800 rpm 1800 rpm
3000 rpm 3000 rpm
3600 rpm 3600 rpm
* Note: H = Horizontal Gas Flow * Note: H = Horizontal Gas Flow

V = Vertical Gas Flow V = Vertical Gas Flow
Ordering information Ordering information

607 MHR CE, IE3 7.5 kW, EU/US/CH 50/60Hz 900607MHR940 607 5HR CE, IE3 7.5 kW, EU/US/CH 50/60Hz 9006075HR940
380-400v 50Hz /230/460v 60Hz 380-400v 50Hz /230/460v 60Hz (3000/3600 rpm)
(3000/3600 rpm) 607 5HR CE, IE3 7.5 kW, Asia 50/60Hz 9006075HR934
607 MHR CE, IE3 7.5 kW, Asia 50/60Hz 900607MHR934 200v 50/60Hz 380v 60Hz (3000/3600 rpm)
200v 50/60Hz 380v 60Hz (3000/3600 rpm) 607 5VR CE, IE3 7.5 kW, EU/US/CH 50/60Hz 9006075VR940
607 MVR CE, IE3 7.5 kW, EU/US/CH 50/60Hz 900607MVR940 380-400v 50Hz /230/460v 60Hz (3000/3600 rpm)
380-400v 50Hz /230/460v 60Hz 607 5HR CE, IE3 7.5 kW, Asia 50/60Hz 9006075VR934
(3000/3600 rpm) 200v 50/60Hz 380v 60Hz (3000/3600 rpm)
607 MHR CE, IE3 7.5 kW, Asia 50/60Hz 900607MVR934 607 5HR (bare shaft) Horizontal flow 900-607-5HR
200v 50/60Hz 380v 60Hz (3000/3600 rpm)
607 5VR (bare shaft) Vertical flow 900-607-5VR
607 MHR (bare shaft) Horizontal flow 900-607-MHR
607 5H10, 10 hp, 230/460 V, 3-ph, 900-607-5H10
607 MHR (bare shaft) Horizontal flow 900607MHR101
900-607-5H10_60 Hz @ 1800 rpm
(pfpe pre.)
607 5V10, 10 hp, 230/460 V, 3-ph, 900-607-5V10
607 MVR (bare shaft) Vertical flow 900-607-MVR
60 Hz @ 1800 rpm
607 MVR (bare shaft) Vertical flow (pfpe prep.) 900607MVR101
607 MHR (bare shaft) Horizontal flow 900-607-MHR
607 MVR (bare shaft) Vertical flow 900-607-MVR
607 MH20, 20 hp, 230/460 V, 3-ph, 900-607-MH20
60 Hz @ 1800 rpm
607 MV05, 5 hp, 230/460 V, 3-ph, 900-607-MV05
60 Hz @ 1800 rpm
607 MV20, 20 hp, 230/460 V, 3-ph, 900-607-MV20
60 Hz @ 1800 rpm
607 MH05, 5 hp, 230/460 V, 3-ph, 900-607-MH05
60 Hz @ 1800 rpm
*Note: 607, 615 61B and 622 vertical gas flow

boosters do not include mounting feet.
6” Mounting foot kit 426-715-002
Mechanical
Performance Curves
Stokes 615
V Belt 3375 m3h-1 2000 cfm V Belt 3375 m3h-1 2000 cfm
2750 rpm 2750 rpm
1800 rpm 3000 rpm
3000 rpm 3600 rpm
Direct drive 4420 m3h-1 2600 cfm
* Note: H = Horizontal Gas Flow
3600 rpm
V = Vertical Gas Flow
* Note: H = Horizontal Gas Flow
V = Vertical Gas Flow

615 MHR CE, IE3 11 kW, EU/US/CH 50/60Hz 900615MHR940 615 5HR CE, IE3 11 kW, EU/US/CH 50/60Hz 9006155HR940
380-400v 50Hz /230/460v 60Hz (3000/3600 rpm) 380-400v 50Hz /230/460v 60Hz (3000/3600 rpm)
615 MHR CE, IE3 11 kW, Asia 50/60Hz 900615MHR934 615 5HR CE, IE3 11 kW, Asia 50/60Hz 9006155HR934
200v 50/60Hz 380v 60Hz (3000/3600 rpm) 200v 50/60Hz 380v 60Hz (3000/3600 rpm)
615 MVR CE, IE3 11 kW, EU/US/CH 50/60Hz 900615MVR940 615 5VR CE, IE3 11 kW, EU/US/CH 50/60Hz 9006155VR940
380-400v 50Hz /230/460v 60Hz (3000/3600 rpm) 380-400v 50Hz /230/460v 60Hz(3000/3600 rpm)
615 MVR CE, IE3 11 kW, Asia 50/60Hz 900615MVR934 615 5VR CE, IE3 11 kW, Asia 50/60Hz 9006155VR934
615 MHR (bare shaft) Horizontal flow 900-615-MHR 615 5HR (bare shaft) Horizontal flow 900-615-5HR
615 MHR (bare shaft) Horizontal flow (pfpe pre.) 900615MHR101 615 5VR (bare shaft) Vertical flow 900-615-5VR
615 MVR (bare shaft) Vertical flow 900-615-MVR 615 5H15, 15 hp, 230/460 V, 3-ph, 900-615-MH15
615 MVR (bare shaft) Vertical flow (pfpe prep.) 900615MVR101 60 Hz @ 3600 rpm
615 5V15, 15 hp, 230/460 V, 3-ph, 900-615-5V15
615 MH10, 10 hp, 230/460 V, 3-ph, 900-615-MH10
60 Hz @ 3600 rpm
60 Hz @ 1800 rpm
615 MH15, 15 hp, 230/460 V, 3-ph, 900-615-MH15
For performance curves of the various Stokes 6” booster coupled with
60 Hz @ 3600 rpm
a backing pump please consult Edwards
615 MV10, 10 hp, 230/460 V, 3-ph, 900-615-MV10
60 Hz @ 1800 rpm
615 MV15, 15 hp, 230/460 V, 3-ph, 900-615-MV15
60 Hz @ 3600 rpm
*Note: 607, 615 61B and 622 vertical gas flow boosters do not include
mounting feet.
Mechanical
162. Boosters
Stokes 61B
Stokes 61B Series By-Pass Mechanical Booster Stokes 61B Series Process Isolation Booster
V Belt 3375 m h
3 -1
2000 cfm V Belt 3375 m3h-1 2000 cfm
2750 rpm 2750 rpm
1800 rpm 3000 rpm
3000 rpm 3600 rpm
Direct drive 4420 m3h-1 2600 cfm
3600 rpm

61B MHR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 90061BMHR940 61B 5HR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 90061B5HR940
61B MHR CE, IE3 18.5 kW, Asia 50/60Hz 90061BMHR934 61B MHR CE, IE3 18.5 kW, Asia 50/60Hz 90061B5HR934
61B MVR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 90061BMVR940 61B 5VR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 90061B5VR940
61B MVR CE, IE3 18.5 kW, Asia 50/60Hz 90061BMVR934 61B 5VR CE, IE3 18.5 kW, Asia 50/60Hz 90061B5VR934
61B MHR (bare shaft) Horizontal flow 900-61B-MHR 61B 5HR (bare shaft) Horizontal flow 900-61B-5HR
61B MVR (bare shaft) Vertical flow 900-61B-MVR 61B 5VR (bare shaft) Vertical flow 900-61B-5VR
61B MH10, 10 hp, 230/460 V, 3-ph, 900-61B-MH10 61B 5H25, 25 hp, 230/460 V, 3-ph, 900-61B-5H
60 Hz @ 1800 rpm 60 Hz @ 3600 rpm
61B MH25, 25 hp, 230/460 V, 3-ph, 900-61B-MH25 61B 5V25, 25 hp, 230/460 V, 3-ph, 900-61B-5V25
60 Hz @ 3600 rpm 60 Hz @ 3600 rpm
61B MV10, 10 hp, 230/460 V, 3-ph, 900-61B-MV10
60 Hz @ 1800 rpm
61B MV25, 25 hp, 230/460 V, 3-ph, 900-61B-MV25
60 Hz @ 3600 rpm
*Note: 607, 615 61B and 622 vertical gas flow boosters do not include
mounting feet.
Mechanical
Performance Curves
Stokes 622
V Belt 2750 m3h-1 3000 cfm V Belt 2750 m3h-1 3000 cfm
2750 rpm 2750 rpm
3000 rpm 3000 rpm
3600 rpm 3600 rpm

622 MHR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 900622MHR940 622 5HR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 9006225HR940
622 MHR CE, IE3 18.5 kW, Asia 50/60Hz 900622MHR934 622 5HR CE, IE3 18.5 kW, Asia 50/60Hz 9006225HR934
622 MVR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 900622MVR940 622 5VR CE, IE3 18.5 kW, EU/US/CH 50/60Hz 9006225VR940
380-400v 50Hz /230/460v 60Hz(3000/3600 rpm) 380-400v 50Hz /230/460v 60Hz (3000/3600 rpm)
622 MVR CE, IE3 18.5 kW, Asia 50/60Hz 900622MVR934 622 5VR CE, IE3 18.5 kW, Asia 50/60Hz 9006225VR934
622 MHR (bare shaft) Horizontal flow 900-622-MHR 622 5HR (bare shaft) Horizontal flow 900-622-5HR
622 MVR (bare shaft) Vertical flow 900-622-MVR 622 MVR (bare shaft) Vertical flow 900-622-5VR
622 MH25, 25 hp, 230/460 V, 3-ph, 900-622-MH25 622 5H25, 25 hp, 230/460 V, 3-ph, 900-622-5H25
60 Hz @ 3600 rpm 60 Hz @ 3600 rpm
622 MV25, 25 hp, 230/460 V, 3-ph, 900-622-MV25 622 5V25, 25 hp, 230/460 V, 3-ph, 900-622-5V25
60 Hz @ 3600 rpm 60 Hz @ 3600 rpm
* Note: 607, 615 61B and 622 vertical gas flow boosters For performance curves of the various Stokes 6” booster
do not include mounting feet. coupled with a backing pump please consult Edwards
Mechanical
164. Boosters
Dimensions
Stokes 607 dimensions

Ø241 (Ø9.49) A
406 (15.98)
203 Ø 241 (9.49) A 502 (19.76)
(7.99) CL 965 (37.99)
251
(9.88)
CL
1
543 (21.38)
1
CL
406 (15.98)
432 (17.00)
(11.50)
(8.50)
292
216
(8.00)
203
16 (0.63) 4 x 19 (0.75) B 127 (5.00)
114 (4.49) 135 (5.31) 74 254
83 4 x 19
(2.91) 2 175 (10.00)
(3.27) (6.89) (0.75) B
318 965 (37.99)
TYP. 324
(12.52) 349 (13.74)
1080 (42.52) 1276 (50.24) 1184 (46.61) (12.76)
(5 HP) (20 HP) (7.5 KW) 394 (15.51) 1080 (42.52) 1276 (50.24) 1184 (46.61)
(5 HP) (20 HP) (7.5 KW)
A 6’’ pipe flange connection 11’’ (279 mm) OD x (152 mm) ID 8 x ¾-10 NC-2B x 1 ⅛’’ (29 mm) holes straddle both CL both flanges
B DIA. Holes
① STD Inlet
② Optional feet
A Ø298 (11.74)
406 (15.98)
A Ø298 (11.74)
203 CL 1
(7.99) CL
543 (21.38)
1
406 (15.98)
432 (17.00)
C
L
(11.50)
(7.99)
203
292
(8.50)
216
4 x 19 (0.75) B
16 (0.63) 235 89 175 2 70 227
74 (2.91) 4 x 19 (0.75) B
(9.25) (3.50) (6.89) (8.94)
(2.76)
83 114 (4.49) 529 (20.83) 394 (15.51)
(3.27) 524
318 1372 1391 1515 502 (19.76)
(12.52) 1372 (54.02) 1391 1515
(54.02) (54.76) (59.65) (10 HP) (54.76) (59.65)
A 8’’ pipe flange connection 13 ½’’ (343 mm) OD x 8’’ (203 mm) ID 8 x ¾-10 NC-2B x 1 ⅛’’ (29 mm) holes straddle both CL both flanges
B DIA. Holes
① STD Inlet
② Optional feet
Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage
variants.
Mechanical
Stokes 61B dimensions
Ø298
A
(11.75)
406 (15.99)
203
(7.99)
711
A
C
L 1
756 (29.75)
406 (15.98)
432 (17.00)
CL
(11.50)
(7.99)
292
203
(8.50)
216
16 (0.63) 4 x 19 (0.75) B 235 4 x 19 (0.75) B 227

83 83 175 2 70 (2.76)
74 (2.91) (9.25) (8.94)
(3.27) 114 (4.49) (3.27) (6.89)
470 (18.50) 394 (15.51) 524 (20.63)
229
(9.00) 528 (20.79)
1372 1524 1521
318 (54.02) (60.00) (59.88)
1372 1524 1521
(12.52) (54.02) (60.00) (59.88)
A 8’’ pipe flange connection 13 ½’’ (343 mm) OD x 8’’ (203 mm) ID 8 x 3/4-10 NC-2B x 1 ⅛’’ (29 mm) holes straddle both CL both flanges
B DIA. Holes
1 STD Inlet
2 Optional feet

Ø298 A
(11.74)
438 (17.24) A 501 648 (25.51)

251 1
219 1200 Ø298 CL
(9.88)
(8.62) (11.74)
438 (17.24)
473 (18.62)
1
543 (21.38)
CL
(8.62)
219
(11.50)
292
(8.50)
216
2 4 x 19 (0.75) B
175 89 324
16 (0.63) 4 x 19 (0.75) B 74 (2.91)
83 (6.89) (3.50) (12.76)
(3.27) 114 (4.49) 74 (2.91) 324 394 (15.51)
(12.76) 711 (27.99)
228
706 (27.80)
(9.00) 1702 1696
318 (67.00) (66.77)
1702 1696
(12.52) (66.77)
(67.00)
A 8’’ pipe flange connection 13 ½’’ (343 mm) OD x 8’’ (203 mm) ID 8 x ¾-10 NC-2B x 1 ⅛’’ (29 mm) holes straddle both CL both flanges
B DIA. Holes
1. STD Inlet
2. Optional feet
Product length may vary due to motor variant, contact Edwards for specific size for specific regions and voltage
variants.
Mechanical
166. Boosters
Technical Data
Units 607 607 PIB 615 615 PIB
Displacement
V belt 2750 rpm m3h-1/ft3min-1 1589/935 1589/935 3375/2000 3375/2000
Direct drive 1800 rpm m h /ft min
3 -1 3 -1
1040/612 - 2210/1300 -
Direct drive 3000 rpm m3h-1/ft3min-1 1733/1020 1733/1020 3685/2170 3685/2170
Direct drive 3600 rpm m3h-1/ft3min-1 2080/1224 2080/1224 4420 /2600 4420/2600
Inlet/outlet flanges ASA/ANSI flange 6” 8”
Motor power hp ( kW) 5/20 (7.5) 10 (7.5) 10 (11) 15 (11)
Cooling method Air cooled - Air cooled -
By-pass available
Cooling water l min-1/gal min-1 - 7.6-11.4/2-3 - 7.6-11.4/2-3
Oil capacity litre/gal 1.9/0.51 1.9/0.51 1.9/0.51 1.9/0.51
(horizontal flow)
Oil capacity litre/gal 4.1/1.1
(vertical flow)
Max pressure differential mbar/Torr 506/380
Max temp rise ˚C/F 135/275
Max discharge temp ˚C/F 191/375
Weight bare shaft kg/lbs 215/475 234/515
Weight TEFC direct drive kg/lbs 408/900 345/760 390/860 397/875
Recommended oil V- Lube H
Units 61B 61B PIB 622 622 PIB

Displacement
V belt 2750 rpm m3h-1/ft3min-1 3375/2000 3375/2000 5100/3000 5100/3000
Direct drive 1800 rpm m3h-1/ft3min-1 2210/1300 - - 5525/2350
Direct drive 3000 rpm m3h-1/ft3min-1 3685/2170 3685/2170 5525/2350 6630/3900
Direct drive 3600 rpm m3h-1/ft3min-1 4420/2600 6630/3900
Inlet/outlet flanges ASA/ANSI flange 8”
Motor power hp ( kW) 1 10/25 (8.5) 25 (18.5)
Cooling method Air cooled Air cooled
By-pass available Yes - -
Cooling water l min /gal min
-1 -1
- 7.6-11.4/2-3 - 7.6-11.4/2-3
(horizontal flow)
(vertical flow)
Max pressure differential mbar/Torr 333/250 333/250
Max temp rise ˚C/F 135/275 151/27 121/250
Max discharge temp ˚C/F 191/375 177/350
Weight bare shaft kg/lbs 284/625 335/740
Weight TEFC direct drive kg/lbs 530/1170 538/1185 617/1360 625/1370
Recommended oil - V-Lube H
Mechanical
Spares
6 Inch MSeal seal kit 607-552-001
6 Inch MSeal maintenance kit * 607-552-002
Process Isolation 6XX-5HR kit † 607-552-004
6” Vertical gas flow mounting feet 426-715-002
* This kit is the same as kit 607-552-001, but with bearings.

† This kit is for process isolation booster pumps, and must be used in conjunction with
Kit 607-552-001 or 607-552-002.
Service
Mechanical
168. Boosters
HV8000 MECHANICAL BOOSTER PUMP
The Edwards HV8000 high vacuum mechanical booster has been developed to provide high reliability
operation in aggressive environments. With a nominal pumping speed of 7200 m3h‑1 (4241 ft3 min-1)
at 50 Hz, it is ideal for large industrial and chemical applications. IE3 energy efficiency 3 phase motors
are now fitted to our standard motor pumps

Performance • Steel degassing.
• Stable process for consistent output – suitable for • Metallurgy.
continuous operation over wide pressure ranges on heavy • Coating.
duty large scale applications. • Process engineering industries.
Reliability
• No unplanned downtime – high performance water cooled Pump Range
mechanical shaft seal, large diameter shaft and large
helical gears. HV
Adaptability -- HV8000
• Easy integration and safe – optional water cooled exhaust
gas after cooler, shaft seal safety purge, temperature
monitoring and VFD available.
Flexibility
• Configured to your needs – can be supplied with standard
motor or without motor to allow a local motor to be
fitted. Horizontal or vertical flow to suit application and
system design.
Mechanical
Performance Curves
HV8000 Mechanical booster pump Ordering information

HV8000 Product description Order no:
HV8000 VF IE3 Asia 50/60 Hz 200 V 50/60 Hz A31103934
380 V 60 Hz
HV8000 VF IE3 EU/USA 50/60 Hz 18.5 kW A31103940
380‑400 V 50 Hz 230/460 V 60 Hz
HV8000 VF IE3 Asia 50/60 Hz 380 V 60 Hz A31104934
HV8000 VF IE3 EU/USA 50/60 Hz 18.5 kW A31104940
380‑400 V 50 Hz
HV8000IND VF bare shaft A31101985
HV8000IND HF bare shaft A31102985
Dimensions
HV8000 dimensions
Horizontal Flow
Vertical Flow
HV8000 pumps tend to be used in large pumping systems rather than simple combinations.
Mechanical
170. Boosters
Technical Data
Units HV8000
50 Hz m3h-1/ft3min-1 7200/4241
60 Hz m3h-1/ft3min-1 8640/5089
Max rotation speed
50 Hz rpm 3000
60 Hz rpm 3600
Max pressure differential
50 Hz mbar/Torr 190/143
60 Hz mbar/Torr 120/90
Ultimate (depends on backing set)
50 Hz mbar/Torr 1.5 x 10-4/1 x 10-4
60 Hz mbar/Torr 2 x 10-4/1.5 x 10-4
Standard motor power kW/hp 18.5/25
Standard backing set speed m h /ft min
3 -1 3 -1
2600/1530
requirements
Recommended oil Mobil SHC 629
Max oil capacity litre/US gal 8.3/2.18
(vertical gas flow config)
Inlet/outlet connection 10” class 150 ASME B16.5
Inlet/outlet cooling water Rp ½ ISO 7-1 (½ BSP)
connection
End cover purge gas inlet Rp ⅜ ISO 7-1 (⅜ BSP)
Max cooling water supply pressure bar/psi 4/58
Max cooling water supply temp ˚C/F 35/95
Cooling water flow rate lmin-1/US gal min-1 15/3.96
Noise level 82 dB(A)
Weight (without motor) kg/lb 570/1257
Weight (with standard motor) kg/lb 670/1474
Mechanical
HV Kit
HV8000 VF motor mounting kit IEC A31101002
HV8000 VF motor mounting kit NEMA A31101006
HV8000 HF motor mounting kit IEC A31102002
HV8000 HF motor mounting kit NEMA A31102006
After cooler kit HV8000 A71205550
Gear Box Oil

Gear Box Oil 4 Ltr Mobil SHC 629 H11023011
Spares
HV8000 Set of O-Rings spare A31101801

HV8000 mech seal kit spare A31101802
HV8000 mech seal + sleeve kit spare A31101803
HV8000 gear set spare A31101804
HV8000 bearings kit spare A31101805
HV8000 rotors kit spare A31101806
HV8000 oil reservoir spare A31101807
HV8000 sight glass spare A31101808
Service
Mechanical
172. Boosters
HV30000/40000 MECHANICAL BOOSTER PUMP
HV30000/40000 is a high capacity mechanical booster used in the manufacture and assembly of
large industrial vacuum systems. These pumps are backed by Edwards dry pumps or mechanical
booster pumps. This range of high capacity booster pumps is designed to operate reliably for long
periods with no need for maintenance. The HV pumps can be fitted with an inverter to allow them
to be started at atmospheric pressure, at the same time as the dry pumps.
Features and Benefits Pump Range

• Water cooled oil boxes and after cooler. HV
• Vertical flow, direct drive. -- HV30000
• Control with inverter or interlock with a pressure -- HV40000
switch input.
• Very reliable with little maintenance.
Applications
• Steel degassing.
• Metallurgy.
• Coating.
• Process engineering industries.
Mechanical
Performance Curves
HV30000/40000 Mechanical Booster Pump
HV30000 HV40000
Displacement (supply) Displacement (supply)

50 Hz 30000 m h (17660 ft min )
3 -1 3 -1 50 Hz 33333 m3h-1 (19620 ft3min-1)
60 Hz 36000 m3h-1 (21200 ft3min-1) 60 Hz 40000 m3h-1 (23540 ft3min-1)

HV30000 Vertical Flow Vacuum Booster Pump On request HV40000 Vertical Flow Vacuum Booster Pump On request
Dimensions
HV30000/40000 dimensions
Unit HV30000 HV30000 HV30000 HV30000 HV40000 HV40000 HV40000 HV40000

Motor size 200 l (30 kW) 250 m 324 td 365 td 200 l (30 kW) 250 m 324 td 365 td
(55 kW) (40 hp) (75 hp) (55 kW) (40 hp) (75 hp)
A 1959.36 1959.36 1959.36 1959.36 2099.31 2099.31 2099.31 2099.31
(77.14) (77.14) (77.14) (77.14) (82.65) (82.65) (82.65) (82.65)
B 1048.77 1048.77 1048.77 1048.77 1118.62 1118.62 1118.62 1118.62
(41.29) (41.29) (41.29) (41.29) (44.04) (44.04) (44.04) (44.04)
C 217.93 (8.58) 246.89 (9.72) 246.89 (9.72) 246.89 (9.72) 217.93 (8.58) 246.89 (9.72) 246.89 (9.72) 246.89 (9.72)
D Shaft Ø 2.3627 2.3627 2.3627 2.3627 2.3627 2.3627 2.3627 2.3627
E1 19.76 (0.78) 48.76 (1.92) 48.76 (1.92) 48.76 (1.92) 19.76 (0.78) 48.76 (1.92) 48.76 (1.92) 48.76 (1.92)
F2 20.24 (0.80) 21.24 (0.84) 20.94 (0.82) 14.44 (0.57) 20.24 (0.80) 21.24 (0.84) 20.94 (0.82) 14.44 (0.57)
① Motor face to back of coupler.

② End of shaft to front of coupler.
Mechanical
174. Boosters
Technical Data
Units HV30000 HV40000

Displacement
50 Hz m3h-1/ft3min-1 30000/17660 33333/19620
60 Hz m3h-1/ft3min- 36000/21200 40000/23540
Maximum pressure differential
50 Hz mbar 24 25
60 Hz mbar 29 24
Recommended backing pumps IDX1300 and HV8000 IDX1300 and HV8000
Maximum motor power kW/hp 55/75 55/75
Ambient operating temperature ˚C/°F -20 to 40/-4 to 140 -20 to 40/-4 to 140
Cooling water supply
Maximum supply temperature ˚C/°F 30/85 30/85
Maximum supply pressure bar/psi 5/73 5/73
Maximum operating humidity 90% RH 90% RH
Weight( without motor) kg/lb 3017/6650 3400/7495
Mechanical
HV30000/40000 Accessories
For HV30000/40000 accessories and spares please refer to the manual on our website
Service
Mechanical
176. Boosters
MEDIUM AND LARGE OIL SEALED PUMPS
ES Rotary Vane Pumps 179

ES Pump and Booster Combinations 187
E2M40 and 80 Oil Sealed Rotary Vane Pumps 194
E2M175 and 275 Oil Sealed Rotary Vane Pumps 199
EM Pump and EH Booster Combinations 207
Stokes Microvac Series Oil Sealed Rotary Piston Pumps 208
Stokes Microvac ESI Series Oil Sealed Rotary Piston Pumps 214
MV Series Vertically Oriented Microvac Booster Combinations 220
MV Series Oil Sealed Piston Pumps and Mechanical Booster Combinations 221
Stokes 1700 Series Mechanical Booster Combinations 222
Medium and Large

Shop online at shop.edwardsvacuum.com Contact our customer service team Sealed Oil Pumps 177.
Medium and Large Oil Sealed Pumps and Systems
-- ES Single Stage Oil Sealed Rotary Vane Pumps
-- E2M Two Stage Oil Sealed Rotary Vane Pumps
-- Stokes Microvac Oil Sealed Rotary Piston Pumps
Edwards believes in delivering results that bring value to our customers by using our breath of industry
experience to identify and apply solutions to your problems. Using the most up-to-date and innovative modelling
techniques, and selecting the right pumps from a wide range of dry and wet products, we can optimise the
pumping configuration to provide a system design giving the maximum performance in the most reliable and cost
effective way.
Edwards is providing a wide range of wet pumps to suit the requirements of customers carefully looking to a good
ratio between process results and investment cost.
Product ranges
The ES Single Stage Oil Sealed Rotary Vane Pump range provides a good ultimate
vacuum performance in sizes from 65 to 630 m3h-1 ES represents a step ahead in
single stage oil technology with class leading ultimate vacuum level and extended
operating pressure range.
The E2M Two Stage Oil Sealed Rotary Vane Pump is the tried and tested solution
for applications when better ultimate vacuum down to 10-3 mbar is needed.
Available in sizes from 40 to 275 m3h-1 features a robust design for reliable and
stable high vacuum performance
The Stokes Microvac Oil Sealed Rotary Piston Pump Range, available in sizes from
255 to 1240 m3h-1, features a rugged design for robust and reliable operation
even in the harshest processes. With over 80 years of time tested proven
performance Stokes Microvac low rotational speed and simple mechanism has
demonstrated longest pump life cycle, high reliability and ease of rebuild.
Medium and Large

178. Sealed Oil Pumps
ES ROTARY VANE PUMP
The Edwards ES range of pumps represents the advanced single stage oil sealed rotary vane
pumps. The pump mechanism has been refined to produce a better quality of vacuum. It extends
the pressure range over which the pump operates giving an unrivalled ultimate vacuum level. The
vacuum performance is stable without the pressure fluctuations that are often seen in single stage
pumps. Extended service intervals and easy in-house maintenance make the ES range a flexible
vacuum solution for a wide range of industrial applications. The ES range of pumps is designed to
be used in a wide range of industrial applications. They can be used individually or with mechanical
booster pumps to increase both performance and ultimate vacuum.

Enhanced performance – class leading ultimate vacuum level • Heat treatment.
and extended operating pressure range. • Drying.
Stability – stable vacuum performance, with no pressure • Coating.
fluctuations. • General industrial.
Convenience – combined ISO/BSP connection,
easily serviceable on site. Pump Range
Flexibility – use individually or with mechanical booster ES
pumps, for a wide range of applications. -- ES65
Simple and easy – fully assembled package with EH boosters, -- ES100
suits a variety of performance requirement. -- ES200
-- ES300
-- ES630
Medium and Large

Performance Curves
ES65 Rotary Vane Pump

ES65 ES65 Performance Curve
Pumping speed 10-2 10-1 1 101 102 750 (Torr)
50 Hz 59 m3h-1 1000 590
35 cfm
100
60 Hz 70 m3h-1 100
(ft3min-1)
41 cfm
(m3h-1)
10
10
Ultimate vacuum ES65
1. 50Hz
With gas ballast 1 mbar 60Hz 1
1
Without gas ballast 0.15 mbar 2. 50Hz
60Hz
0.1
0.1
10-2 10-1 1 101 102 103 (mbar)
1 10 1
10 2
10 3
10 4
10 5
(Pa)
Product description Order no.
ES65 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A35247934 1 Without gas ballast
ES65 EU/US/CN 380-400 V(50 Hz) & 230/460 V (60 Hz) IE3 A35247940 2 With gas ballast

ES100 ES100 Performance Curve
Pumping speed
10-2 10-1 1 101 102 750 (Torr)
50 Hz 90 m3h-1
1000 590
53 cfm
60 Hz 105 m3h-1 100
100
62 cfm
(ft3min-1)
(m3h-1)
10
Ultimate vacuum 10
ES100
With gas ballast 2 mbar 1. 50Hz
60Hz 1
Without gas ballast 0.15 mbar 1
2. 50Hz
60Hz 0.1
0.1
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
ES100 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A35252934 1 Without gas ballast
ES100 EU/US/CN 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A35252940 2 With gas ballast
Medium and Large

ES200 Performance Curve ES200
10 -2
10 -1
1 10 1
10 2
750 (Torr) Pumping speed
1000 590 50 Hz 190 m3h-1
112 cfm
100
100 60 Hz 225 m3h-1
(ft3min-1)
132 cfm
(m3h-1)
10
10
ES200 Ultimate vacuum
1. 50Hz
60Hz 1 With gas ballast 1 mbar
1
2. 50Hz Without gas ballast 0.08 mbar
60Hz 0.1
0.1
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
1 Without gas ballast ES200 Asia 200 V (50/60 Hz) & 380 V (60 Hz) IE3 A35257934
2 With gas ballast ES200 EU/US/CN 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A35257940

Pumping speed
10-2 10-1 1 101 102 750 (Torr)
50 Hz 275 m3h-1
1000 590
162 cfm
100
100 60 Hz 320 m3h-1
188 cfm
(ft3min-1)
(m3h-1)
10
10 Ultimate vacuum
ES300
1. 50Hz With gas ballast 2 mbar
60Hz 1
1 Without gas ballast 0.08 mbar
2. 50Hz
60Hz 0.1
0.1
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
2 With gas ballast ES300 EU/US/CN 380-400 V (50 Hz) & 230/460 V (60 Hz) IE3 A35262940

Pumping speed
10-2 10-1 1 101 102 750 (Torr)
50 Hz 575 m3h-1
1000 590
338 cfm
100
100 60 Hz 674 m3h-1
397 cfm
(ft3min-1)
(m3h-1)
10
10 Ultimate vacuum
ES630
1. 50Hz
With gas ballast 1 mbar
1
1 60Hz Without gas ballast 0.1 mbar
2. 50Hz
60Hz 0.1
0.1
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)

2 With gas ballast ES630 EU/US/CN 380-400 V(50 Hz) & 230/460 V (60 Hz) IE3 A35267940
Medium and Large

Dimensions
ES65 dimensions
ES100 dimensions
ES200 dimensions
mm
A B C D E F G H I J K L M N O P
(inches)
ES65 568 3.8 8.6 725.5 346 171 361 387 270 276 340 224 101 68 270 237
(2236) (0.15) (0.34) (28.56) (13.62) (6.73) (14.21) (15.24) (10.63) (10.87) (13.39) (8.82) (3.98) (268) (10.63) (9.33)
ES100 600.5 3.8 8.6 810 353 171 361 387 275 277 340 226 101 68 270 237
(23.64) (0.15) (0.34) (3188) (13.89) (6.73) (14.21) (15.24) (10.83) (10.9) (13.39) (8.9) (3.98) (268) (10.63) (9.33)
ES200 714 2.8 19 990 198 210 471 462 517 323 373 176 118 373 490 310
(28.11) (0.11) (0.75) (39.01) (7.8) (8.27) (17.87) (18.19) (20.35) (1271) (14.69) (6.93) (4.65) (14.69) (19.29) (12.2)
Medium and Large

ES300 dimensions
ES630 dimensions
mm
A B C D E F G H I J K L M N O P
(inches)
ES300 822 7.4 19 1103 198 210 471 462 517 323 373 222 118 375 492 356
(32.36) (0.29) (0.75) (43.42) (7.8) (8.27) (18.54) (18.19) (20.35) (12.71) (14.69) (8.74) (4.65) (14.76) (19.37) (14.02)
ES630 1234 1149 9 8 1649 589 681 329 432 507 377 145 225 334 512 524
(48.58) (45.24) (0.35) (0.31) (64.92) (23.19) (26.81) (1295) (17.01) (19.96) (14.84) (5.71) (8.86) (13.15) (20.16) (20.63)
Medium and Large

Technical Data
Units ES65 ES100 ES200 ES300 ES630

Maximum displacement
50 Hz m3h-1/cfm 64/38 96/56 198/117 293/172 635/374
60 Hz m h /cfm
3 -1
77/45 115/68 240/141 354/208 769/453
Pumping speed
50 Hz m3h-1/cfm 59/35 90/53 190/112 275/162 575/338
60 Hz m3h-1/cfm 70/41 165/62 225/132 320/188 674/397
Ultimate vacuum (total pressure) mbar/Torr 0.15/0.11 0.08/0.06 0.1/0.08
no gas ballast
Ultimate vacuum (total pressure) mbar/Torr 1/0.8 2/15 1/0.8 2/15 1/0.8
with gas ballast
Inlet connection ISO40/1” BSP ISO63/2” BSP ISO100/3” BSP
Outlet connection ISO40/11/2” BSP ISO40/2” BSP ISO100/3” BSP
Max permitted outlet pressure bar gauge 0.5
Max water vapour pumping rate
50 Hz kgh-1/lbh-1 1.3/2.8 2.6/5.7 2.2/4.8 2.3/5.1 5.6/12.3
60 Hz kgh-1/lbh-1 1.6/3.5 4.3/9.4 2.8/6.7 3/6.6 8.1/17.8
Weight kg/lb 77/170 94/207 163/359 185/408 4516/1138
Motor protection rating IP55
Motor power
50 Hz kW/hp 6/7.5 6/7.5 6/7.5 6/8.0 6/7.5
60 Hz kW/hp 1.8/2.4 3/4.0 5.8/7.7 7.5/10.0 15/20.1
Noise level
50 Hz dB(A) 64 65 67 69 75
60 Hz dB(A) 66 67 69 71 77
Oil refill capacity litre 4 5 15
Medium and Large

ES Spares
The ES series of pumps is designed for simple and easy maintenance that can be conducted by anyone with
mechanical equipment maintenance skills. With this product design the ES series has 2 standard available kits to
support a self-service approach.
The usual maintenance kits consist of the basic consumable items such as Oil, filters and ballast elements and these are
recommended to be changed at approximately 3000 hour intervals. The preventative maintenance kits consist of the
additional parts required to conduct a full specification service such as bearings, interior seals and rotary vane blades.
Service Tools
Seal assembly tool ES65/100 A22201010
Mounting base for shaft seals ES65/100 A22201012
Bearing removal tool ES 65/100 A22201014
Mounting base for bearing removal ES65/100 A22201016
D10000 complete set of tools for preventive maintenance ES65/100 A22201018
Seal 1st assembly tool ES200/300 A22201020
Mounting base for shaft seal ES200/300 A22201022
Rotor holding tool ES200/300 A22201024
Seal 2nd assembly tool ES200/300 A22201026

Seal 2nd assembly additional tool ES200/300 A22201028
Complete set of tools for preventive maintenance ES200/300 A22201030
Bearing removal tool ES630 A22201032
Mounting base for bearing removal ES630 A22201034
Mounting base for seal and bearing ES630 A22201036
Shaft seal assembly tool ES630 A22201038
Coupling assembly tool ES630 A22201040
Bearing 1st assembly tool ES630 A22201042
Complete set of tools for preventive maintenance ES630 A22201044
Service Spares
Suction valve spring ES65/ES100 A27102085
Exhaust valve ES65/ES100 A28706032
Bowex coupling ring ES65/ES100 A27103010
Exhaust valve ES200 A28706033
Suction valve spring ES200/ES300 A27102086
Suction valve spring ES630 A27102087
Additional exhaust valve ES630 A28706036
Bowex plastic ring ES630 A27103011
Bowex coupling ring ES200/ES300 A27103012
Medium and Large

Maintenance Kits
Minor service kit ES65/ES100 A35245990
Minor service kit ES200 A35255990
Major service kit ES65 A35245995
ES Accessories
There are a range of accessories available for ES pumps.
ES65/ES100 Oil level sensor A35266810
ES65/ES100 Oil level & 120 oC sensor A35266811
ES65/ES100 Oil level sensor & PT100 A35266812
ES65/ES100 PT100 Temperature sensor A35266813
ES200/ES300 Oil level sensor A35277810
ES200/ES300 Oil level & 120 C sensor

o
A35277811
ES200/ES300 Oil level sensor & PT100 A35277812
ES200/ES300 PT100 Temperature sensor A35277813
ES630 Oil level sensor A35288810
ES630 Oil level & 120 C sensor

o
A35288811
ES630 Oil level sensor & PT100 A35288812
ES630 PT100 Temperature sensor A35288813
ITO100 Inlet catchpot A44102000
ITM100 Inlet dust filter A44302000
Service
Medium and Large

ES PUMP AND BOOSTER COMBINATIONS
Edwards is able to offer a range of ES rotary vane pumps and mechanical boosters, complete
with combination kits to mount the mechanical booster. The fitting of a mechanical booster to
an ES rotary vane pump significantly increases the pumping speed and vacuum performance
of your system, as well as increasing the ultimate vacuum attainable by approximately one
decade of pressure. Edwards applications specialists are able to assist in the selection of the
combination most suited to your requirements. Individual data sheets are available on request for
all combinations showing the pumping speed of each combination together with an installation
drawing to assist in the design of your system.

The performance of ES pump is enhanced by the integration • Heat treatment.
with our range of EH boosters to increase both performance • Drying.
and ultimate vacuum thus adaptable to a wide range • Coating.
of applications. • General industrial.
The EH range of mechanical boosters (250‑4200 m3h-1,
150‑2500 cfm), with their unique hydrokinetic drive allowing Pump Range
continuous operation from atmosphere to ultimate vacuum,
-- ES100/EH250 -- ES630/EH1200
cuts pump down times by up to 50%. -- ES100/EH500 -- ES630/EH2600
They are available as fully assembled systemised unit -- ES200/EH500 -- ES630/EH4200
ready to use. Alternatively connection kits can be supplied -- ES200/EH1200
separately as a kit. -- ES300/EH500
-- ES300/EH1200
-- ES300/EH2600
-- ES300/EH4200
Medium and Large

Performance Curves
ES100 combination
ES100 ES100 Performance Curve (without gas ballast)
Pumping speed 10-3 10-2 10-1 1 101 102 750 (Torr)
With gas ballast 600 353

ES100 EH250
ES100/EH250 0.07 mbar 1.
2.
ES100/EH500 0.07 mbar 400
ES100 EH500
1. 235
(ft3min-1)
Without gas ballast 2.
(m3h-1)
ES100/EH250 0.008 mbar
200 118
ES100/EH500 0.008 mbar
0 0
10-3 10-2 10-1 1 101 102 103 (mbar)
10-1 1 101 102 103 104 105 (Pa)
Ordering information ES100 Performance Curve (with gas ballast)

10-2 10-1 1 101 102 750
Product description (Torr)
600
Please see ordering matrix at the end of this section ES100 EH250
353
1.
2.
ES100 EH500
400 1. 235
(ft3min-1)
2.
(m3h-1)
1 50 Hz
2 60 Hz 200 118
0 0
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
ES200 Combination
ES200 ES200 Performance Curve (without gas ballast)
10-3 10-2 10-1 1 101 102 750 (Torr)
Pumping speed
With gas ballast 1200
ES200 EH500
706
ES200/EH500 0.04 mbar 1.

2.
ES200 EH1200
ES200/EH1200 0.04 mbar 800 1. 471
2. (ft3min-1)
(m3h-1)
Without gas ballast

ES200/EH500 0.006 mbar 400 235
ES200/EH1200 0.006 mbar
0 0
10-3 10-2 10-1 1 101 102 103 (mbar)
10-1 1 101 102 103 104 105 (Pa)
Ordering information ES200 Performance Curve (withGas ballast)

10-2 10-1 1 101 102 750 (Torr)
Product description
1200 706
Please see ordering matrix at the end of this section ES200 EH500
1.
2.
ES200 EH1200
800 1. 471
(ft3min-1)
2.
(m3h-1)
1 50 Hz
400 235
2 60 Hz
0 0
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
Medium and Large

ES300 Combination
ES300 Performance Curve (without gas ballast) ES300
10-3 10-2 10-1 1 101 102 750 (Torr) Pumping speed
4000
ES300 EH500
2354 With gas ballast
1.
2. ES300/EH500 0.06 mbar
3000 ES300 EH1200 1766
1. ES300/EH1200 0.06 mbar
(ft3min-1)
2.
ES300 EH2600 ES300/EH2600 0.06 mbar
(m3h-1)
2000 1. 1177
2. ES300/EH4200 0.06 mbar
ES300 EH4200
1000
1.
2. 589 Without gas ballast
ES300/EH500 0.005 mbar
0 0 ES300/EH1200 0.005 mbar
10-3 10-2 10-1 1 101 102 103 (mbar)
ES300/EH2600 0.005 mbar
10-1 1 101 102 103 104 105 (Pa)
ES300/EH4200 0.005 mbar
ES300 Performance Curve (with gas ballast) Ordering information

10 -2
10 -1
1 101
10 2
750 (Torr)
Product description
3000 1766
ES300 EH500 Please see ordering matrix at the end of this section
1.
2.
ES300 EH1200
2000 1. 1177
(ft3min-1)
2.
(m3h-1)
ES300 EH2600
1. 1 50 Hz
2.
1000 ES300 EH4200
589 2 60 Hz
1.
2.
0 0
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
ES630 Combination
ES630 Performance Curve (without gas ballast) ES630
10-3 10-2 10-1 1 101 102 750 (Torr) Pumping speed
4000 ES630 EH1200 2354 With gas ballast
1.
2. ES630/EH1200 0.04 mbar
3000 ES630 EH2600 1766
1. ES630/EH2600 0.04 mbar
(ft3min-1)
2.
ES630 EH4200 ES630/EH4200 0.04 mbar
(m3h-1)
2000 1. 1177
2. Without gas ballast
1000 589 ES630/EH1200 0.006 mbar
ES630/EH2600 0.006 mbar
0 0
10-3 10-2 10-1 1 101 102 103 (mbar) ES630/EH4200 0.006 mbar
10-1 1 101 102 103 104 105 (Pa)
ES630 Performance Curve (with gas ballast) Ordering information

10 10 1 10 10 750 (Torr)
Product description
-2 -1 1 2
4000 ES630 EH1200 2354 Please see ordering matrix at the end of this section
1.
2.
3000 ES630 EH2600 1766
1.
(ft3min-1)
2.
(m3h-1)
ES630 EH4200
2000 1. 1177 1 50 Hz
2.
2 60 Hz
1000 589
0 0
10-2 10-1 1 101 102 103 (mbar)
1 101 102 103 104 105 (Pa)
Medium and Large

Technical Data
Pump Type Without gas ballast With gas ballast
ES100/EH250 0.008 mbar 0.07 mbar
ES100/EH500 0.008 mbar 0.07 mbar
ES200/EH500 0.006 mbar 0.04 mbar
ES200/EH1200 0.006 mbar 0.04 mbar
ES300/EH500 0.005 mbar 0.06 mbar
ES300/EH1200 0.005 mbar 0.06 mbar
ES300/EH2600 0.005 mbar 0.06 mbar
ES300/EH4200 0.005 mbar 0.06 mbar
ES630/EH1200 0.006 mbar 0.04 mbar
ES630/EH2600 0.006 mbar 0.04 mbar
ES630/EH4200 0.006 mbar 0.04 mbar

A-weighted sound pressure level*
ES100/EH250 71 dB(A)
ES100/EH500 71 dB(A)
ES200/EH500 72 dB(A)
ES200/EH1200 72 dB(A)
ES300/EH500 73 dB(A)
ES300/EH1200 73 dB(A)
ES300/EH2600 76 dB(A)
ES300/EH4200 76 dB(A)
ES630/EH1200 76 dB(A)
ES630/EH2600 78 dB(A)
ES630/EH4200 78 dB(A)
*Noise level with 50 Hz supply at ultimate pressure, running at 60 Hz or at a higher inlet pressure will increase noise level
ES Pump EH Booster Combination Kit

1 ES100 1 EH250 1 ES100/EH250
2 ES200 2 EH500 2 ES100/EH500
3 ES300 3 EH1200 3 ES200/EH500 or ES300/EH500
4 ES630 4 EH2600 4 ES200/EH1200 or ES300/EH1200
5 EH4200 5 ES300/EH2600 or ES300/EH4200
6 ES630/EH1200
7 ES630/EH2600 or ES630/EH4200
ET - -
Electrical Supply
1 EU_400v, 50Hz
2 USA_230/460v, 60 Hz
3 Asia_200/380v, 50 Hz
4 Asia_200/380v, 60 Hz
Pump Accessories Booster Oil Level Monitor Booster Inlet Seal with Mesh Screen
0 None 0 None 0 None
1 PT100 Temperature Sensor 1 OLM500 oil level Monitor 1 ISO63
2 Oil Level Sensor 2 ISO100
3 Oil Level Sensor + 120oC 3 ISO160
4 Oil Level Sensor + PT100
Medium and Large

EM Oil Sealed Rotary Vane Pumps
Edwards rugged two stage mechanical oil sealed pumps are available in sizes
from 40-275 m3h-1/30-206 ft3min-1 They feature:
• Advanced oil lubrication circuit
• High reliability
• Accessories to match your application needs
Application and Accessory Information EM Rotary Pumps

The use of Edwards rotary pumps with our comprehensive range of accessories will result in enhanced
performance and reliability. The information below will help you to select the correct accessories for your
application. However, we recommend that you treat this as a guide only, because the final selection of components
can be influenced by the operation of your vacuum system and the process by-products. If in doubt, please
contact Edwards or your local supplier for further advice from an Edwards application specialist. When you select
accessories for your system, the major aim is to prolong the life and the safe operation of the pumps and to ensure
that the system continues to perform at its ultimate specification. To do this, you need to ensure that the system
is able to accommodate the process media and any process by-products, including vapours, liquids or particulates,
which may damage the pumps. At the same time, you should ensure that any materials discharged from the system
to atmosphere are not harmful to the environment and to people nearby.
Broad Application Coverage

Industrial PFPE ATEX
Industrial EM primary pumps are EM primary pumps may be EM primary pumps (hydrocarbon
annotated with the suffix “IND”. supplied for use with PFPE oil. oil only) may be supplied with ATEX
EM primary pumps are safe to This enables them to be used classification either as part of a
handle non-flammable gases in harsh corrosive processes, or pump system or stand-alone. Please
and vapours within the normal where the presence of Oxygen consult Edwards. ATEX compliance
operating parameters of the pump. will result in rapid degradation of is typically specified for use in
Flammable gases and vapours may hydrocarbon oils. Fomblin® must Europe, but may also be required in
also be pumped, provided they are be purchased separately for PFPE other areas.
outside the flammable range, please prepared pumps.
consult Edwards for advice.
ATEX compliant EM primary pumps are suitable for operation in ATEX systems rated as follows:
Pump classification Internal External

classification classification
E2M40 & E2M80 II 3 Gc IIB T4 II 2 G IIB T4
E2M175 & E2M275 II 3 Gc IIB T3 II 2 G IIB T160
Where the following classification:
Symbol Meaning
Specifies that an ATEX-compliant EM pump can be used in a
potentially explosive atmosphere
II Equipment Group – II = non-mining equipment
3 (Int) 2 (Ext) G Equipment Category 3 (or 2) – G = Gas
c Constructional safety
IIB Gas group – suitable to pump gases in gas group IIB Where no gas
group is mentioned, there are no limitations
T4 T160 T3 Temperature Class – Gas auto-ignition temperature greater than:
– T4 =135 ˚C, T160 = 160 ˚C, T3 = 200 ˚C
Medium and Large

A four-pole, three-phase ATEX approved flameproof motor provides direct drive through an ATEX certified flexible
coupling to the E2M40, E2M80, E2M175 and E2M275 pumps. A cooling fan is attached to the drive coupling on the
E2M40 and E2M80 pumps. The E2M175 and E2M275 pumps are water-cooled.
Lubrication is provided by a sliding vane oil pump, which delivers pressurised oil to the vacuum pumping
mechanism. Pumps are supplied with sealed gas ballast. Plugs have been fitted to prevent flammable atmospheres
accidentally entering the pump. If the gas ballast facility is required, an N2 purge must be used, or clean air supplied
from a safe area.
For much of the operating cycle the pump operates at pressures significantly below 0.8 bar (116 psi) absolute.
However, the final stage of the pump will exhaust to atmosphere and there is a startup and shutdown period
where the whole pump is briefly operating at atmospheric pressure. A surface temperature thermal snap switch is
fitted to the body of the E2M175 and E2M275 rotary pumps. This must be connected to an intrinsically safe circuit
suitable for the hazardous zone in which it may be located; otherwise it must be located in a safe area. If the pump
temperature should rise due to a fault condition, the snap switch activates and the pump will shut-off.
Trapping Particulates EOF External Oil Filters

Use the EOFs with the EM oil-sealed rotary pumps to
In any application, first ensure that particulates in the
remove particulates trapped in the pump oil. The EOFA
process stream are trapped before they get into the
and EOFM filters use the internal pressurized oil system
pump: use the ITM or ITF inlet filters which are suitable
of the pump to continually filter a proportion of the
for use with oil-sealed and dry pumps. However, in
pump oil. These filters are only suitable for hydrocarbon
processes which generate or contain large amounts of
oil. The EOFM filter removes particulates down to 0.5
particulates, some will enter the pump: use our EOF, an
microns, and the EOFA filter both removes particulates
external oil filter, to remove particulates from the pump
and includes an active element to remove acidic and
oil during operation.
other aggressive contaminants from the oil.
ITF inlet dust filters
If the mechanical pump is a backing pump for Pumping Vapours
a diffusion pump, the diffusion pump will trap
The use of gas ballast significantly improves vapour
particulates during normal operation, but the diffusion
handling capability of oil sealed rotary pumps. We offer
pump will not trap dust during the roughing stage of
a number of accessories to improve the utility of
the process cycle. We recommend you fit an ITF filter
gas ballast.
to the mechanical pump inlet (that is, in the foreline):
this filter has a replaceable element. Note that the EBV Gas Ballast Control Valve
impedance of a clean filter will cause the pumping Fit EBV gas ballast control valve to allow remote or
speed to decrease by about 10% at 1 mbar and 20% at automated control of gas ballast.
10-2 mbar. The ITF filter is more that 96% efficient, when TCV Temperature Control Valve
tested in accordance with BS2831 The vapour pumping performance of the larger oil
ITM High Capacity Inlet sealed pumps can be enhanced by fitting a TCV. Use the
Dust Filters use an ITM filter for applications where TCV both to warm-up the pump faster (which reduces
there is a high load of dust and particulates. Fit the ITM the amount of condensation in the pump) and to
directly to the inlet of a rotary or mechanical booster reduce water usage and cost.
pump. This filter has a stainless steel mesh element ITC Inlet Chemical Traps
that can be washed and reused. It is ideal for use when Fit an ITC trap to the inlet of the pump to protect
backing diffusion pumps or for wet processes where against the aggressive process vapours that may
a paper filter may become blocked quickly. The ITM corrode the pump or degrade the oil.
filter has high conductance and is therefore ideal for
applications which require fast pump down times.
The ITM filter has an efficiency of 90%, when tested in
accordance with BS3831
Medium and Large

Trapping Liquids Back Migration
The use of gas ballast allows an oil sealed pump to When operated at ultimate pressure for extended
process significant quantities of vapour. However, oil periods of time, any oil sealed pump allows oil vapour
sealed pumps cannot pump liquid streams and it is to back migrate into the process chamber. The back-
important both to remove liquids before they reach migration of oil vapour could contaminate your process
the pump inlet and to prevent condensed liquids or your vacuum system.
from flowing back into the pump outlet. The following
ITC Inlet Chemical Trap
accessories may be suitable for your application:
Fit an ITC inlet chemical trap (filled with an alumina
ITO Inlet Trap
charge) to the pump inlet to trap oil vapour and to
The ITO inlet trap is ideal for processes where there
prevent back migration.
is a risk of liquids in the process entering the pump
inlet. Fit the ITO trap to the pump inlet or elsewhere in
Applications
the foreline.
• Refrigeration dehydration
CP Catchpot
• Brake line evacuation
Process vapours passing through the pump may
• TV aluminisers
condense after the pump outlet, in the exhaust line. Fit a
• Vacuum metallurgy
CP catchpot to the pump outlet to trap the condensates and
• Fluorescent light tube pumping
prevent them flowing back into the pump.
• Thin film coating
• IT hard disc coating
Exhaust Management
• Vacuum distillation
You should aim to minimise the impact of gases and • Cryogenic vessel evacuation
vapours which exhaust from the pump outlet. Edwards • Transformer and cable drying
offers a range of exhaust management systems for the • Pharmaceutical freeze drying
most exacting applications. However, for most straight- • Space simulation
forward applications of oil sealed rotary pumps, we • Crystal growing
recommend that you fit an oil mist filter to the pump • Automotive
outlet to remove oil mist vapour. A mist filter is not • Chemical processing
required if you vent the exhaust gases remotely or pass
them through exhaust scrubbing equipment.
MF Oil Mist Filters
The MF filters remove oil mist (vapour) from the
process gases exhausted from the outlet of an oil sealed
pump. The filters remove both odour and oil vapour
and so prevent it from reaching the atmosphere and the
workplace.
Medium and Large

E2M40 AND 80 OIL SEALED ROTARY VANE PUMPS
Edwards E2M series two stage oil sealed rotary vane vacuum pumps are renowned for their high
ultimate vacuum, rapid pumping speeds, quiet operation and ability to handle water vapour.
These direct drive rotary vane pumps are inherently compact and vibration free, and with their
finger-proof fan and coupling housings they offer excellent operator protection.
A comprehensive range of accessories is available to allow use on a wide variety of
vacuum applications.

Reliability • Vacuum metallurgy processes.
-- Reliable and stable process – effective lubrication • Thin film coating technologies.
even under high gas loads. • Pharmaceutical freeze drying.
Robust • Refrigeration and air conditioning system
-- No contamination of process – oil and air suck‑back evacuation, drying, and backfilling.
protection.
Performance Pump Range
-- Long and trouble free life – industrial roller bearings on
drive shaft. E2M40 E2M175
Reassurance -- E2M40 -- E2M175
-- Peace of mind – tried, tested and industry standard -- E2M40FX -- E2M175FX
for years. -- E2M40T4 -- E2M175T3
-- Reliable and stable – high vacuum performance.
E2M80 E2M275
-- E2M80 -- E2M275
-- E2M80FX -- E2M275FX
-- E2M80T4 -- E2M275T3
Medium and Large

Performance Curves
E2M40 Oil Sealed Rotary Pump
E2M40 E2M40 Performance Curve
Displacement 102
50 Hz 42.5 m hr/25 ft min

3 3 -1
60 Hz 50.5 m3h-1/29.7 ft3min-1 101
(m3h-1)
Speed (Pneurop)
102
1
50 Hz 37 m3h-1/21.8 ft3min-1
60 Hz 44 m3h-1/25.9 ft3min-1 101-1
2 50 Hz
10
(m3h-1)
10-4 10-3 10-2 10-1 1 101 102 (mbar)
1 10 -2
10 -1
1 10 1
10 2
103
104
(Pa)
2 50 Hz
Product description Order no. 10-1
10 -4
10-3
10 -2
10 -1
1 10 1
102 (mbar)
E2M40 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36404934 1 102 Without gas ballast
10-2 10-1 1 101 102 103 104 (Pa)
60HZ 2 With gas ballast
E2M40 HC IE3 EU/US 50/60HZ 380-400V 50HZ, 230 A36404940 101
/ 460V 60HZ (ft3min-1)
E2M40 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36417934 1012

60HZ
E2M40 FX IE3 EU/US 50/60HZ 380-400V 50HZ, 230 A36417940 101
10-1
2 60 Hz
/ 460V 60HZ
(ft3min-1)
10-4 10-3 10-2 10-1 1 101 102 (Torr)
E2M40 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36407934 1

60HZ
E2M40 AZ IE3 EU/US 50/60HZ 380-400V 50HZ, 230 A36407940 2 60 Hz
10-1
/ 460V 60HZ 10-4 10-3 10-2 10-1 1 101 102 (Torr)
Each EM pump is supplied Ultragrade 70 oil. For PFPE prepared FX pumps

Fomblin® to be ordered separately.
2 With gas ballast
Medium and Large

E2M80 Performance Curve E2M80
102 Displacement
50 Hz 80 m3h-1/47.1 ft3min-1
101 60 Hz 96 m3h-1/56.5 ft3min-1
(m3h-1)
Speed (Pneurop)
102
1
50 Hz 74 m3h-1/43.6 ft3min-1
101-1
2 50 Hz 60 Hz 90 m3h-1/53 ft3min-1
10
(m3h-1)
10-4 10-3 10-2 10-1 1 101 102 (mbar)
1 10-2 10-1 1 101 102 103 104 (Pa)

2 50 Hz
10-1 Product description Order no.
10-4 10-3 10-2 10-1 1 101 102 (mbar)
1 Without gas ballast E2M80 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36504934
102 -2
10 10-1 1 101 102 103 104 (Pa) 60HZ
2 With gas ballast
E2M80 HC IE3 EU/US 50/60HZ 380-400V 50HZ, A36504940
101
230/460V 60HZ
(ft3min-1)
E2M80 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36517934

102
1 60HZ
2
60 Hz E2M80 FX IE3 EU/US 50/60HZ 380-400V 50HZ, A36517940
101-1
10 230/460V 60HZ
(ft3min-1)
10-4 10 -3
10 -2
10 -1
1 10 1
10 2
(Torr)
E2M80 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36507934
1 60HZ
2
60 Hz E2M80 AZ IE3 EU/US 50/60HZ 380-400V 50HZ, A36507940
10-1 230/460V 60HZ
10-4 10-3 10-2 10-1 1 101 102 (Torr)
Each EM pump is supplied Ultragrade 70 oil.

For PFPE prepared FX pumps Fomblin® to be ordered separately.
2 With gas ballast
Medium and Large

Technical Data
Units E2M40 E2M80
Displacement
50 Hz m3h-1/ft3min-1 42.5/25 80/47.1
60 Hz m h /ft min
3 -1 3 -1
50.5/29.7 96/56.5
Speed (Pneurop)
50 Hz m3h-1/ft3min-1 37/218 74/43.6
60 Hz m3h-1/ft3min-1 44/25.9 90/53
Number of stages 2
without gas ballast mbar/Torr 1 x 10-3/7.7 x 10-4
with gas ballast mbar/Torr 7 x 10-3/5.4 x 10-3
Ultimate with Fomblin®
without gas ballast mbar 1 x 10-2
Inlet connection ISO40
Outlet connection 25 mm flange suitable for NW25
Max outlet pressure 0.5 bar gauge
Max inlet pressure for water vapour mbar/Torr 7/5.3 5/3.8
Max water vapour pumping rate kg h-1/lb h-1 0.2/0.4 0.3/0.7
Weight kg/lb 75/165 102/224
Motor power
50 Hz kW/hp 11/15 22/3
60 Hz kW/hp 15/2 3/4
Standard oil capacity
maximum litre 4.0 6.3
minimum litre 22 4
PFPE oil capacity
maximum litre 4.0
minimum litre 22
Noise level dB(A) 65 70
Medium and Large

Dimensions
E2M40 dimensions
E2M80 dimensions
Service and Spares

Maintenance Kits
E2M40
Clean and overhaul kit A34401131
Blade Kit A36401050
Major service kit A36401814
Interior assembly A36401100
E2M80
Interior assembly A36501100
Clean and overhaul kit A34501131
Blade kit A36501050
Major service kit A36501814
All models
Fine oil-filter A22304041
Common seals kit A34401820
Medium and Large

E2M175 AND 275 OIL SEALED ROTARY VANE PUMPS
Edwards E2M175/275 series two stage oil sealed rotary vane vacuum pumps are renowned for
their high ultimate vacuum, rapid pumping speeds, quiet operation and ability to handle water
vapour. These direct drive rotary vane pumps are inherently compact and vibration free, and
with their finger-proof fan and coupling housings they offer excellent operator protection.
This pump is suitable for most duties and is safe to handle non-flammable gases and vapours
within the normal operating parameters of the pump.

• Reliability • Vacuum metallurgy processes.
Reliable and stable process – effective lubrication • Thin film coating technologies.
even under high gas loads. • Pharmaceutical freeze drying.
• Robus • Refrigeration and air conditioning system
No contamination of process – oil and air suck-back evacuation, drying, and backfilling.
protection.
• Performance Pump Range
Long and trouble free life – industrial roller bearings
on drive shaft. E2M175
• Reassurance -- E2M175
-- E2M175FX
Peace of mind – tried, tested and industry
-- E2M175T3
standard for years.
Reliable and stable – high vacuum performance.
E2M275
-- E2M275
-- E2M275FX
-- E2M275T3
Medium and Large

Performance Curves

Displacement
50 Hz 178 m3h-1/105 ft3min-1
60 Hz 214 m3h-1/126 ft3min-1
Speed (Pneurop)
50 Hz 160 m3h-1/94 ft3min-1
60 Hz 196 m3h-1/115 ft3min-1
E2M175 HC IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36604934
60HZ
230/460V 60HZ
E2M175 FX IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36617934
60HZ
E2M175 FX IE3 EU/US 50/60HZ 380-400V 50HZ, A36617940
230/460V 60HZ
E2M175 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, 380V A36607934
60HZ
E2M175 AZ IE3 EU/US 50/60HZ 380-400V 50HZ, A36607940
230/460V 60HZ

For PFPE prepared FX pumps Fomblin® to be ordered separately. 2 With gas ballast

Displacement
50 Hz 292 m3h-1/172 ft3min-1
60 Hz 350 m3h-1/206 ft3min-1
Speed (Pneurop)
50 Hz 255 m3h-1/150 ft3min-1
60 Hz 306 m3h-1/180 ft3min-1
E2M275 HC IE3 ASIA 50/60HZ 200V 50/60HZ, A36704934
380V 60HZ
230/460V 60HZ
E2M275 FX IE3 ASIA 50/60HZ 200V 50/60HZ, A36717934
380V 60HZ
E2M275 FX IE3 EU/US5 0/60HZ 380-400V 50HZ, A36717940
230/460V 60HZ
E2M275 AZ IE3 ASIA 50/60HZ 200V 50/60HZ, A36707934
380V 60HZ
E2M275 AZ IE3 EU/US 50/60HZ 380-400V 50HZ, A36707940
230/460V 60HZ

For PFPE prepared FX pumps Fomblin® to be ordered separately. 2 With gas ballast
Medium and Large

Technical Data
Units E2M175 E2M275

Displacement
50 Hz m3h-1/ft3min-1 178/105 292/172
60 Hz m h /ft min
3 -1 3 -1
214/126 350/206
Speed (Pneurop)
50 Hz m3h-1/ft3min-1 160/94 255/150
60 Hz m h /ft min
3 -1 3 -1
196/115 306/180
Number of stages 2
with gas ballast mbar/Torr 1 x 10-3/7.7 x 10-4
without gas ballast mbar/Torr 7 x 10-3/5.4 x 10-3 5.0 x 10-3/3.8 x 10-3
Ultimate with Fomblin®
without gas ballast mbar 1 x 10-2 -
Inlet connection ISO63 blank flange with seal
Outlet connection ISO40 flange centre tapped
Max outlet pressure 0.5 bar gauge
Max inlet pressure for water vapour mbar/Torr 20/15 12/9
Max water vapour pumping rate kg h-1/lb h-1 0.3/0.7 23/5.1
Weight kg/lb 204/449 222/488
Motor power
50 Hz kW/hp 5.5/7.5 7.5/10
60 Hz kW/hp 6.5/8.5 8.5/11
Standard oil capacity
maximum litre/qt 25/26 28/29.5
minimum litre/qt 16/17 19/20
PFPE oil capacity
maximum litre/qt 18/19 -
minimum litre/qt 6.5/6.9 TBA
Noise level dB(A) 75
Water cooling requirement lmin-1 13 2
Service
Medium and Large

Dimensions
E2M175/275 dimensions
226
B C
D
E
519.5
145 F
390 112
A 800
388
A B C D E F
E2M175 290 (1142) 1011 (39.80) 55 (217) 329 (1295) 196 (7.72) 237 (9.33)
E2M275 290 (1142) 1152 (45.35) 55 (217) 425 (16.73) 294 (1158) 333 (13.11)
Service and Spares

Maintenance Kits
E2M175
Maintenance kit A36601831
Seals kit A36601840
Complete interior assembly A36601100
E2M275
Maintenance kit A36701831
Seals kit A36601840
Complete interior assembly A36701100
Service
Medium and Large

Large Pump Accessories
MF Outlet Mist Filters CP Outlet Catchpots
The MF100 and MF300 mist filters are suitable for In some industrial applications it is desirable for pumps
pumps from E2M40 to E2M275. They are very efficient to be provided with piped exhaust arrangements to
at 99.85% DOP test (pre-wetted filter; 99.5% with carry gases and vapours to the outside of the building.
dry element). The oil level sight-glass provides easy There is always a risk that some vapour carried out with
monitoring of mist filter status. the effluent gas will cool and condense as it travels up
the exhaust line and the liquid produced will drain back
The MF100AE is a version of the MF100, designed
into the pump causing serious contamination. For this
for use with corrosive gases and vapours and for
reason, it is good practice to use a catchpot between
greater security when processing toxic substances.
the pump outlet and the exhaust line to prevent this
It is very efficient at 99.1% DOP test (pre-wetted;
from happening.
98.4% with dry element). This version is leak tested to
1 × 10-4 mbar l s-1 / 3.8 x 10-3 Torr. The filter element, These catchpots are designed for fitting directly to the
sight-glasses and seals are resistant to chemical attack. pump outlet, or can be remotely mounted if required.
The MF100AE is fitted with an acrylic sight-glass A “high level” sight glass is provided to indicate the
(for use with fluorinated processes); a glass sight-glass need for draining the catchpot when the nominal
is also supplied with the filter (for use with chlorinated capacity is reached. A drain plug is also provided.
processes).
Note: When an oil mist filter is used, a separate
A version of the EMF clean application oil return kit is catchpot is generally unnecessary.
available for all the MF filters, except the MF100AE. Ordering Information
Ordering Information
Product description Order no. Model CP100 outlet catchpot, A46103000
Model MF100 mist filter (12 kg/26.5 lb)* A46203000 6.5 litre/6.2 qt capacity (12.0 kg/26.5 lb)* A46104000
Model CP300 outlet catchpot,
Model MF100AE mist filter (12 kg/26.5 lb)* A46211000
23.0 litre/22 qt capacity (28.0 kg/62 lb) †
Model MF300 mist filter (28 kg/62 lb) † A46204000
*Supplied with two NW25 “C” clamps, NW25 elbow, two NW25 centring-
*Supplied with two NW25 “C” clamps, NW25 elbow, two NW25 centring-ring
rings and O-rings, bolts, washers, mounting bracket and studs.
and O-rings, bolts, washers, mounting brackets and studs.
† Supplied with two ISO40 “C” clamps, ISO40 elbow, two 40 mm O-rings and
† 2 Supplied with two ISO40 “C” clamps, ISO40 elbow, two 40 mm Co-Seals,
centringrings, bolts, washers, mounting brackets and studs.
bolts, washers, mounting brackets and studs.
Accessories Order no.

Clean application oil return kit (E2M40 to E2M80) A50004000
Clean application oil return kit A50005000
(E2M175 to E2M275)
Spares Order no.

MF100 A22304020
MF100AE A22304052
MF300 A22304021
Spares kits
MF100, MF100AE A46203800
MF300 A46204800
MF100AE sight-glass kit A50080000
Medium and Large

External Oil Filters: EOF100A/300A Vibration Isolators
(Chemical) and EOF100M/300M (Dust) You may need to fit vibration isolators to your pump if
These filters are operated by the internal pressurized you mount it into a frame or system, if the mounting
oil system of the pump, which by-passes a proportion points are not level or if you need to minimise the
of the oil through the filter. The filters are easy to transmission of vibration and noise in your application.
install – just connect the flexible hoses supplied to the You must fit flexible bellows or other flexible pipes to
oil outlet and return connectors on the pump. The oil the pump inlet and outlet.
capacities are approximately 6 litres / 5.7 qt (EOF100) Ordering Information
and 15 litres / 14.3 qt (EOF300).
Pump Approximate Weight Set of Order No
The EOF100A and EOF300A chemical filters have a Reduction in Four
Height with
renewable highcapacity, activated earth element. Pump Fitted
The filters purify the oil by removing acidic and other (mm)
aggressive contaminants. These filters are intended for
E2M40 .5 0.6 kg/1.3 lb A24801405
use with hydrocarbon oils, and they will greatly increase
E2M80 2.5 0.6 kg/1.3 lb A24801405
the interval between oil changes.
E2M175 3 0.9 kg/2 lb A24801406
The EOF100M and EOF300M dust filters have pleated E2M275 3.5 0.9 kg/2 lb A24801406
paper elements which trap small dust particles Details of vibration isolators for use with rotary/mechanical booster pump
(down to 0.5 micron diameter). Use these filters for combinations are available on request.
applications which produce large quantities of abrasive
dust (for example, vacuum furnaces). OLM100 Oil Level Monitor
Ordering Information Fit the OLM100 in place of the oil sight glass on the
E2M 40 and 80 pumps. The OLM100 continues to allow
Product Description Order no.
visual inspection of the oil level and condition, while
External oil filter, without connection kit also providing a switched output for remote indication.
EOF100A A50024000 Technical data: 24 V a.c. or d.c., maximum current 0.5 A,
EOF100M A50025000 switching power 10 W (12 VA).
External oil filter, with E2M175 and 275
connection kit
EOF300A A50003000 Product description Order no.
EOF300M A50023000 OLM100 oil level monitor A50433000
Connection kit for E2M40 and 80
EOF100A and M A50039000
EBV Gas Ballast Control Valves
EOF300A and M A36401020 Fit the EBV300D for E2M40, 80, 175 and 275) to allow
remote operation of the pump’s gas ballast control. For
Product Description Order no. example, the EBV can be configured to switch off the
Activated earth element gas ballast when the pump is switched off, to provide
EOF100A A22304043 suckback protection. The EBV can also be configured to
EOF300A A22304033 prevent the 175 and 275 from running backwards when
Dust filter element the gas ballast valve is open and the pumps are stopped
EOF100M A22304044 under vacuum.
EOF300M A22304042 Ordering Information
EBV300D (1.0 kg) 220 – 240 V s.ph 50/60 Hz A50017930
Medium and Large

TCV300 Temperature Control Valve ITM High Capacity Inlet Dust Filters
Use the TCV300 with the E2M175 and 275 pumps. The ITM deep, stainless steel mesh elements are ideal
The valve facilitates rapid pump warm-up and higher for applications where fast pump-down times are
operation temperatures. This improves the pump’s required and which produce high levels of dust and grit
vapour pumping performance. The TCV300 also reduces (which would normally clog the ITF filters very quickly).
the use of cooling water and reduces operation costs. You can wet the stainless steel mesh element with
Ordering Information oil to improve dust adhesion. You can wash the mesh
elements and re-use them indefinitely.
The benefits of the ITM filters include:
TCV300 (1.2 kg/2.6 lb) A50001000
• Thick aluminium casting, to withstand abrasion.
ITF Inlet Dust Filters • Tangential entry port, to promote centrifugal
separation of dust particles.
The ITF inlet dust filters prevent the entry of dust • Filter efficiency better than 90% (tested to BS2831,
particles into the pump. The impedance of a clean filter dust number 2).
reduces the pumping speed of a 20 m3h-1 / 12 ft3min-1 • Glass cover, to allow a visual check of the filter
pump by about 20% at 1 mbar / 0.75 Torr and 25% at element.
10 mbar / 7.5 Torr.
Depending on your application, you can normally clean Ordering Information
the filter element with a vacuum cleaner or a clean air Product description Order no.
blast, and then re-use the element. ITM100 high capacity dust filter (7.2 kg/16 lb)* A44302000
The benefits of the ITF filters include: ITM300 high capacity dust filter (8.7 kg/19 lb)† A44303000
• Thick aluminium casting, to withstand abrasion. ITM800 inlet dust filter (20.2 kg/44 lb)** A44304000
• Tangential entry port, to promote centrifugal ITM3000 inlet dust filter†† A44312000
separation of dust particles. ITM5000 inlet dust filter A44313000
• Filter efficiency better than 96% (tested to BS2831, *Supplied with bolts, washers, 40 mm O-ring and centring-ring
dust number 2). † Supplied with 63 mm Co-Seal, bolts and washers
** Supplied with 100 mm Co-Seal, bolts and washers
Ordering Information †† Supplied with 160 mm Co-Seal, bolts and washers
Product description Order no. Spares Order no.

ITF100 inlet dust filter (7.0 kg/15 lb)* A44202000 ITM100 filter element A22305020
ITF300 inlet dust filter (8.3 kg/18 lb)† A44203000 ITM300 filter element A22305019
ITF800 inlet dust filter (20.2 kg/44 lb) ** A44204000 ITM800 filter element A22305018
ITF3000 inlet dust filter† † A44212000 ITM3000 filter element (2 required) A22305033
*Supplied with bolts, washers, 40 mm O-ring and centring-ring
† Supplied with 63 mm Co-Seal, bolts and washers
†† Supplied with 160 mm Co-Seal, bolts and washers
Spares Order no.

ITF100 element and gasket kit A44202800
ITF3000 element (2 required) A22304037
Medium and Large

ITO Inlet Catchpots ITC Inlet Chemical Traps
These catchpots minimise the entry of condensable The ITC series of chemical traps provides the
vapours into the pump. Benefits of the catchpots following benefits:
include: • Protection against various aggressive vapours, which
• Capture condensable vapours. may attack the pump or pump oil.
• Helps prevent froth or spray from the process from • Prevent high molecular weight vapours (such as
carrying over to the pump. might arise in a resin treatment plant), from reaching
• Corrosion-resistant body. the pump. These vapours could cause lacquering or
• Visual indication of trapped liquid level. clogging.
• Hand-tightened drain plug, for easy drainage. • The standard sorbent (activated charcoal), has
relatively high trapping properties (absorbs around
Ordering Information 25% of its own weight), even when large amounts of
Product description Order no. water vapour are being pumped.
ITO100 inlet catchpot, 5.47 litres/5.2 qt capacity A44102000
• When filled with activated alumina on two-stage
(6.8 kg, 15 lb)* pumps, backstreaming of pump oil can be controlled.
ITO300 inlet catchpot, 7.87 litres/7.5 qt capacity A44103000
(8.0 kg/18 lb)† Ordering Information
IT0800 inlet catchpot, 9.5 litres/10 qt capacity A44104000 Product description Order no.
(19.5 kg/43 lb) **
ITC100 inlet chemical trap*
*Supplied with bolts, washers, 40 mm O-ring and centring-ring
Charcoal charge 0.75 kg/1.7 lb, A44402000
weight 16.5 kg/ 1.7 lb
ITC300 inlet chemical trap†
A44403000
Charcoal charge 1.1 kg/2.4 lb, weight 9 kg/20 lb
ITC800 inlet chemical trap**
A44404000
Charcoal charge 3.3 kg/2.4 lb, weight 21 kg/20 lb
* Supplied with bolts, washers, 40 mm O-ring and centring-ring
Spares Order no.

0.5 kg/1.1 lb activated charcoal H12205001
3 kg/6.6 lb activated charcoal H12205002
0.45 kg/1 lb activated alumina H02600050
0.2 kg/0.5 lb activated alumina H02600056
Medium and Large

EM PUMP AND EH BOOSTER COMBINATIONS
R D 0
Rotary Pump
(Includes pump, frame and coupling
components)
2 E2M40 - with Ultragrade Oil
5 E2M80 - with Ultragrade Oil
8 E2M175 - with Ultragrade Oil Voltage
B E2M275 - with Ultragrade Oil
D E2M40FX - PFPE prepared no oil 1 EU_400v, 50Hz
E E2M80FX - PFPE prepared no oil 2 USA_460v, 60 Hz
F E2M175FX - PFPE prepared no oil 3 Japan/Korea_200/380v, 60Hz
4 Japan/China_200/380v, 50Hz
5 USA_230v, 60 Hz
Booster Pump
Oil Level Monitor
(Includes booster and coupling
components) 0 No oil level monitor
1 Oil level monitor – rotary pump only
1 EH250 - with Ultragrade Oil 2 Oil level monitor – booster pump only
3 EH500 - with Ultragrade Oil 3 Oil level monitors – both pumps
5 EH1200 - with Ultragrade Oil
7 EH2600 - with Ultragrade Oil
B EH250FX - PFPE prepared no oil On-line Starter
C EH500FX - PFPE prepared no oil
D EH1200FX - PFPE prepared no oil 0 No on-line starter
E EH2600FX - PFPE prepared no oil 1 Starter Box E2M40 / E2M80
2 Starter Box E2M175 / E2M275
Mist Filter
0 No Mist Filtr
1 MF100 Oil Filtration (Includes connection kit)
2 MF100AE 0 No oil filtration
3 MF300 1 EOF100A
4 MF100 with clean Oil Return Kit 2 EOF100M
5 MF100AE with clean Oil Return Kit 3 EOF300A
6 MF300 with clean Oil Return Kit 4 EOF300M
Note: Please copy the link: http://edwebid3.edwardshighvacuum.net/Edconfigurator/index.aspx and order your

pump and booster combination.
In North America, frame-mounted systems are also available. Please contact Edwards for further details.
Medium and Large

STOKES MICROVAC SERIES OIL SEALED ROTARY
PISTON PUMPS
The Stokes Microvac rotary piston pump has set the standard for performance, efficiency, reliability and
repairability in the industry for over 80 years. The Stokes Microvac J series rotary piston pump has been
improved, upgraded, and fine-tuned to deliver even better dependability and productivity combined with
minimal maintenance and process downtime. The integral oil distribution system eliminates external piping
and delivers leak-free operation in a stylised design. A stiffer motor mounting platform cuts flexibility to
minimise motor belt wear. A stylised oil reservoir cover and side cover ‘O’ rings improve sealing to eliminate
oil leakage. An integral gas ballast valve built into the side cover allows quick adaptation to automatic gas
ballast. A wide range of versatile accessories are available along with the ability to integrate with a range
of mechanical boosters making the Stokes Microvac easily adaptable to suit your application and pumping
requirements.
Features and Benefits Application

• Reliable • Automotive.
Over 80 years of time tested proven performance with • General applications.
experienced service and technical support. • Metallurgy.
Dependability – low rotational speed enables longest • Vacuum coating.
pump life cycle. • Vacuum melting.
• Robust • Chemical processing.
Easy on-site maintenance – robust simple mechanism for • Heat treatment.
high reliability and ease of rebuild. • Leak detection.
• Flexible • PET processing.
Configured for you – choice of pumping combinations • Pharmaceuticals.
available with a variety of boosters. • Transformer drying and cable fluid conditioning.
• Reassurance
Up to date technology – continued investment in design Pump Range
and technology improvements.
No unplanned downtime – worry free pumping backed by Stokes microvac
full warranty and after sales support. -- 212J
-- 412J
-- 612J
Medium and Large

Performance Curves
Stokes Microvac Model 212J

212J 212J Performance Curve
Pumping speed 150 255
234 m3h-1
204
(138 ft3min-1) 120 1
(ft 3 min -1 )
(m 3 h -1)
Displacement (swept volume) 2
90 102
255 m3h-1
(150 ft3min-1) 30 51
212J
0 0
Ordering information -3
10 10
-2
10
-1
1
1
10
2
10
3
10 (Torr)

212J 230/460 V, 3Ø, 60 Hz (230/460 V coil) 900-212-014 1 Without gas ballast
Explosion Proof 460V Class 1 Div 1 Group C&D 460v 916-212-014 2 With gas ballast
Coil
575v 60 Hz 575v Coil 919-212-014
230/460v 60 Hz 110v Coil 931-212-014
380v 60 Hz 380v Coil 945-212-014
212J 230/460 V 3 PH 60 Hz (230/460 V coil) 970-212-014
with water miser
212J 400 V, 3-ph, 50 Hz, IEC motor, 380 V coil 900212014501
(CE compliant)
(CE compliant)
with water miser (CE compliant)
212J 400 V, 3-ph, 50 Hz, IEC motor 415 V coil 900212014504
Medium and Large

412J 412J Performance Curve
510
Pumping speed 300
422 m3h-1 250 425
1
(260 ft3min-1) 340
(ft 3 min -1 )
200
(m 3 h -1)
2
Displacement (swept volume) 150 255
510 m3h-1 170

100
(300 ft3min-1) 85
50
412J
0
10
-3
10
-2
10
-1
1
1
10
2
10
3
10 (Torr)

412J 230/460 V, 3Ø, 60 Hz (230/460 V coil) 900-412-014 1 Without gas ballast
230/460V 60Hz 15 hp 230/460v coil 900-412-015 2 With gas ballast
Explosion Proof 460V Class 1 Div 1 Group C&D 460v 916-412-014
Coil
575v 60 Hz 575v Coil 919-412-014
230/460v 60 Hz 110v Coil 931-412-014
380v 60 Hz 380v Coil 945-412-014
412J 230/460 V 3 PH 60 Hz (230/460 V coil) 970-412-014
with water miser
212J 230/460 V 3 PH 60 Hz (230/460 V coil) with water 970-212-014
(CE compliant)
(CE compliant)
412J 400 V, 3-ph, 50 Hz, IEC motor, 380 V Coil 900412014503
412J 400 V, 3-ph, 50 Hz, IEC motor 415 V coil with 900412014504
water miser (CE compliant)

612J Performance Curve 612J
500 825
Pumping speed
1
884 m3h-1
400 680
(ft 3 min -1 )
(520 ft3min-1)
(m 3 h -1)
2
300 510
200 340 1020 m3h-1
100 170 (600 ft3min-1)
612J
0 0
-3 -2 -1 1 2 3
10 10 10 1 10 10 10 (Torr)
1 Without gas ballast 612J 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-612-014
2 With gas ballast
Medium and Large

Dimensions
Stokes 212J dimensions
P
A
N
K
R
M
L
B
S
U
C E
D T V
J
F W
G Y
H Z
I
A B C D E F G H I J K L
1111 79 194 57 192 165 333 330 667 216 16 349
M N P R S T U V W Y Z
413 695 516 241 25 19 148 291 476 514 581
N
P
A
C
Z
B
S
R
D E T V
F
U Y
G
H I
J
A B C D E F G H I J K L
1289 411 154 381 248 495 351 229 702 1022 210 940
M N P R S T U V Y Z
168 651 375 184 141 29 6 527 578 457
Medium and Large

Stokes 412ESI dimensions

H
G
F
A
E
D
B
J K
C
L
A B C D E F G H J K L
535 889 1778 124 581 876 1464 394 197 762 1156
Medium and Large

Technical Data
Units 212J 412J/ESI 612J

m h /ft min
3 -1 3 -1
255/150 510/300 1020/600
Pumping speed
m3h-1/ft3min-1 234/138 442/260 884/520
without gas ballast mbar/Torr < 3.3 x 10-2/< 25 x 10-2
with gas ballast mbar/Torr < 26 x 10 < 2 x 10
-2/ -2
< 26 x 10-1/< 2 x 10-1
Motor size (TEFC)
50 Hz kW IEC (CE variant) 5.5 11 11 (x2)
60 Hz hp TEFC 7.5 10 /15 10 (x2)
Motor speed rpm 1800
Inlet connection inch ASA/ANSI flange 3 4 6
Exhaust connection 2 inch ASA/ANSI flange 3 inch ASA/ANSI flange 2 x 3 inch ASA/ANSI
or 2 inch NPT or 3 inch NPT flange or 3 inch NPT
Water inlet/outlet connection inch NPT ½ ½ 2x½
Recommended cooling flow lmin-1/galmin-1 5.7/15 7.6/15 7.6/15 (X2)
@ 85 ˚C/30°F
Water vapour pumping rate kg h-1/11 lb h-1 5 10.45/23 20.9/46
Oil capacity litre/gal 15/4 46/12 92/24

Recommended oil V lube F V lube F V lube F
Noise dB(A) < 77 < 83 < 85
Weight kg/lbs 431/950 794/1750 1724/3800
Medium and Large

STOKES MICROVAC ESI SERIES OIL SEALED
ROTARY PISTON PUMP
The Stokes Microvac ESI series (Extended Service Interval) sets the standard for reduced maintenance and
extended service intervals in arduous applications. The ESI series incorporates all the time proven design
features of the Stokes Microvac 412J while integrating key accessories and features for improved performance
in the most demanding applications. The ESI series can be retrofitted with any Microvac and or mechanical
booster combination to suit your special application and pumping requirements.
Features and Benefits Application

• Time Proven Stokes Microvac Robust Design • Automotive.
• Extended Periods of User Intervention • General applications.
• Suited for Metal Meting and Casting, Heat Treatment, • Metallurgy.
Brazing , Sintering or any corrosive or particulate • Vacuum coating.
generating applications • Vacuum melting.
-- On board ( Integral) Positive Feed Large capacity Oil • Chemical processing.
Filter • Heat treatment.
-- (Single or Dual Canister. Particulate and Acid • Leak detection.
Neutralization Elements) • PET processing.
-- Filter Pressure Gauge for Filter Change Notification
• Pharmaceuticals.
-- Internal By-pass enables Filter change out while
• Transformer drying and cable fluid conditioning.
operational
-- Filter Visual Oil flow Indication
-- 15 hp High Efficiency Motor Pump Range
-- 4 Point Motor Platform for Consistent Belt Tension -- 412ESI
-- Integral Oil Piping
-- Ease of Clean Oil and No Leakage
Medium and Large

Stokes Microvac Model 412ESI
412ESI 412ESI Performance Curve

Pumping speed 300 510
422 m3h-1 250 425
1
(260 ft3min-1)
(ft 3 min -1 )
200 340
(m 3 h -1)
Displacement (swept volume) 150
2
255
510 m3h-1 170

100
(300 ft3min-1) 85
50
412ESI
Ordering information 0 0
1 2 3
10
-3
10
-2
10
-1
1 10 10 10 (Torr)

412ESI 230/460 V, 3Ø, 60 Hz (230/460 V coil) NRY4Q9000 1 Without gas ballast
2 With gas ballast
Refer to pages 212 and 213 for technical dimension drawings and technical data. For regional variants/voltages of
the Stokes Microvac 412ESI contact your local Edwards representative.
Medium and Large

Accessories
Water Miser Oil Mist Separators
Features and Benefits The 291 series oil mist separators are high performance air/oil
coalescing separators that will virtually eliminate all liquids and solids
• Saves cooling water, improves efficiency.
from a gas stream. These units produce exhaust liquid levels as low
• Remote bulb temperature sensor in oil reservoir of vacuum pump. as 0.05 PPMW and solids removal in excess of 99.79% efficiency for
• Throttles valve on cooling water to control oil temperature. particulate as small as 0.3 micron.
• Fits most water cooled vacuum pumps. • Features & benefits.
• Clean pump exhaust, saves oil.
Ordering Information • Two-stage design removes ail smog and traps particles as small as
0.3 microns.
Product Description For pump Order no.
• Standard and heavy models available.
Water miser 149H-612J 900-412-124
Heavy Duty Oil Mist Filter
Gas Ballast Silencer Heavy-duty oil mist separators are designed to handle the most
severe oil exhaust situations from rotary oil sealed mechanical pumps.
• Features & benefits.
For true measure of efficiency, it is important to go beyond the weight
• Cuts noise level. to consider the actual number of particles collected. The heavy-duty
• Simple thread-in unit reduces noise level. oil mist separators efficiency by weight approaches 100% and total
• Filters gas ballast intake air. particle collection 97.8%. Edwards guarantees to collect and remove
the stated percentage of particles by size, not by weight alone. The
Ordering Information HD mist separator will effectively prevent fume emissions unlike
existing separators that do not remove the sub micron particles.
Product Description For pump Order no.
151 Series gas ballast silencer/filter # required Ordering Information
1 146H, 148H, 900-151-001 Product For pump CFM Replacement Order no.
149H/S Description elements
1 212J 900-151-002 Oil mist separators with fibreglass element
2 or 4 412J/612J 900-151-002 291-30S 146H 085-021-473 900-291-025
291-50S 148H 085-021-474 900-291-022

Min-Max Cooler 291-100S 149H 085-021-475 900-291-023
The Edwards Model 170-116 mini-max compact cooler provides
291-150S 212H 085-052-035 900-291-024
closed circuit cooling specially designed for mobile pumping systems.
It includes pump, radiator, fan, motor (115/60/1), on-off switch, 291-150J 212J only 085-052-263 900-291-J24
connection kit for the microvac pumps, and has a cooling capacity of
14000 BTU/hr. The mini-max cooler is ideal when cooling water is not 291-300S 412H, 612H 085-052-036 900⅜-291-
convenient or clean enough to ensure peak performance. 025
291-300J 412J only 085-052-264 900-291-J25
Technical Data
291-750 MB 612 MB 085-021-478 900-291-027
For use with Model 149, 212 & 412 Rotary Piston Pumps
Oil mist separator with polypropylene element
Motor ¼ hp (pump and fan)
Motor voltage 115 V, 1-ph, 60 Hz 291-30SO 146H 085-039-836 900-291-031
230 V, 1-ph, 60 Hz 291-50SO 148H 085-039-837 900-291-032

Cooling capacity 14000 BTU/hour 291-100SO 149H 085-039-838 900-291-033
Hose length 5 feet 291-150SO 212H 085-039-839 900-291-034
Reservoir tank capacity 3 gallons
291-300SO 412H, 612H 085-039840 900-291-035
Overall dimensions 12 ¼” W x 23 ¼” l X 13 ¼” H
291-750SO 612MB 085-039-841 900-291-036
Weight 50 lbs
Heavy duty oil mist separators
291- 150HD 212H and 150 085-038-239 900-291-048

smaller
291-300HD 412H 300 085-038-125 900-910-049
Product Description Order no.
Minimax cooling system 900-170-116 291-600HD 612H 600 085-038-226 900-291-050
Includes: pump, radiator, fan, motors, on-off switch, piping, 291-1000HD Combinations 1000 085-044-934 900-291-054
wiring and hoses.
291-1500HD Combinations 1500 085045429 900291055
Medium and Large

Oil Reservoir Heater Flex Hose
Edwards model 212 and 412 oil reservoir heaters are recommended for The model 820 high vacuum hose from Edwards is an all-plastic hose
pre-heating oil in the reservoir prior to pump start up at temperatures with aluminium flanges tough enough for easy handling streamline
below 55 °F. Below 1 Torr., it will help maintain the oil at a temperature use. This rugged, reliable hose is suitable for use in a temperature
high enough to prevent condensation of water vapour in the oil when range of -50 °F to 150 °F, tested to 10-2 Torr absolute pressure
running with full gas ballast. The 212 and 412 oil reservoir heaters
consist of an immersion heater to be inserted into the oil reservoir and Ordering Information
an over-temperature switch with sensing bulb to control power to the
heater. The heater arrangement can be factory or field installed. Product Description For Pump Order no.
Series 820 high vacuum hose
Ordering Information Size
Product Description For Pump Order no.
2" x 20' long 085-100-28 900-820-220
Oil reservoir heater 600 W 120 V 085-034-331
3" x 20' long 023-001-141 900-820-220
Vacuum Break Solenoid 4" x 20' long 023-001-129 900-820-208
• Features & Benefits Flex Connectors

• 2-way 240 V ⅜ inch FNPT
Model 315 flexible connectors feature rugged type 321 stainless steel
• 2-way 110 V ⅜ inch FNPT
bellows to sharply ease potential alignment and thermal expansion
problems, while significantly reducing vibration transmissions from
Ordering Information other equipment. They are designed to provide years of trouble-
Product Description For Pump Order no. free service.
• Features & benefits.
Vacuum break solenoid All 240 V 085-046-623
• Free-formed bellows minimise stress concentration.
All 110 V 085-046-998 • Solve alignment problems.
• Convoluted bellows of AISI 321 stainless steel.
Gask-O-Seal • ASA standard carbon steel flanges.
• Features & Benefits • Sizes from 15 inch to 24 inch.
• For tight joint seals
• Combination anodised aluminium retainer with Buna-N seals Ordering Information
• Range to 0.0001 microns Product Description Order no.
Type Standard: Flexible connector, vacuum service, convoluted,
stainless steel bellows, carbon steel pipe flange, 150# ASA – both
Product Description Order no. ends – 63 micro finish, Mass spec tested.
Gask-O-Seal, Pipe size (inch) Pipe size (inch)
15 900-318-005 1 -1/2 900-315-005
2 900-318-006 2 900-315-006
3 900-318-007 3 900-315-008
4 900-318-008 4 900-315-009
6 900-318-010 6 900-315-011
8 900-318-011 8 900-315-012
10 900-318-012 10 900-315-013
12 900-318-013 12 900-315-014
14 900-318-014 Type CE: Flexible connector, vacuum service, convoluted, stainless
steel bellows, carbon steel weld band – one end – to fit over ASA
16 900-318-015
pipe for lap weld, carbon steel pipe flange, 150# ASA – one end –
18 900-318-016 63 micro finish, Mass spec tested.
20 900-318-017 Pipe size (inch)
24 900-318-018 1-1/2 900-315-099
3 900-315-102
4 900-315-103
6 900-315-105
Medium and Large

Type PP: Flexible connector, vacuum service, convoluted, stainless Ordering Information
steel bellows, carbon steel pipe ends – both ends – for butt Product For Pump CFM Order no.
welding, Mass spec tested. Description
Pipe size (inch) Intake Pipeline Filters
1-1/2 900-315-069 333-30A* 146H 30 900-333-031
2 900-315-070 333-50A 148H 50 900-333-032
3 900-315-072 333-100A 149H 100 900-333-033
4 900-315-073 333-165A 212J 165 900-333-034
6 900-315-075 333-330A 412J 400 900-333-035
8 900-315-076 333-750A 612J, 912J 850 900-333-036
10 900-315-077 333-1125A 1721, 1722, 1738 2000 900-333-037
12 900-315-078 333-2250A† 1739, 1733, 1754 2800 900-333-038
Spares Order no.
Type EE: Flexible connector, vacuum service, convoluted, stainless
Replacement Glastex Elements‡
steel bellows, carbon steel weld band – both ends – to fit over ASA
pipe for lap weld, Mass spec tested. 333-30A* 085-032-573
Pipe size (inch) 333-50A 085-032-576
2 900-315-090 333-100A 085-032-579
4 900-315-093 333-165A 085-032-582
6 900-315-095 333-330A 085-032-585
8 900-315-096 333-750A 085-032-079
10 900-315-097 333-1125A 085-032-588**
12 900-315-098 333-2250A† 085-032-591**
Type CP: Flexible connector, vacuum service, convoluted, stainless Replacement Polyester Elements‡
steel bellows, carbon steel pipe end – one end – for butt welding,
333-30A* 085-039-010
carbon steel pipe flange, 150# ASA – one end – 63 micro finish,
Mass spec tested. 333-50A 085-039-011
Pipe size (inch) 333-100A 085-039-012
2 900-315-080 333-165A 085-039-013
3 900-315-082 333-330A 085-039-014
4 900-315-083 333-750A 085-039-077
6 900-315-085 333-1125A 085-039-015**
8 900-315-086 333-2250A† 085-039-016**
12 900-315-088 * 146H Pump has a 2” Flange, Filter 333-30A has a 1” Flange.

Use Filter 333-100A w/2” Flange as an Option.
† 1754 and 1755 have 8” Flange. Customer must supply an adapter to
High Volume Inlet Filters mate w/10” Flange on Filter.
‡ Replacement Element is Polyester w/Maximum Temp of 200°F,
• Features & Benefits Glastex has a Maximum Temp. of 450°F.
• Traps particulates ahead of pump ** Two Elements Are Required.
• Recommended ahead of all vacuum pumps
• Provide protection to pump internals Small Volume Inlet Filter
• Extends the change interval up to 10 times
Features & Benefits
• Variety of filter elements available For small volumes and fast pump down cycles
• 146H pump has a 2 inch flange – 333-30A has a 1 inch flange. Effective protection from harmful solid particles of 0.01 inch or larger
333-100A (2 inch flange) can be used as an option Less expensive than conventional filters
• 1754 and 1755 have 8 inch flange. Customer must supply an
adaptor to mate with 10 inch flange on filter Ordering Information
• Polyester replacement element max temp 200 °F, Glastex
Product Flange For Pump Replacement Order no.
replacement element 450 °F
Description Size Elements
• 1700 Series requires 2 replacement elements
Small Volume Inlet Filters
332-3 3” 212J 085-036-701 900-332003
332-4 4” 412J 085-036-702 900-332-004
332-6 6” 612J - 912J 085-036-703 900-332-006
332-8 8” 1721-1722 085-036-704 900-332-008
Medium and Large

Oil Purifiers
Oil purifiers continuously supply clean oil to the vacuum pump to assure peak uptime while prolonging the life of both the oil and the pump.
Oil purifiers from Edwards are designed for use with rotary oil sealed pumps used in dirty applications or for corrosive and hazardous gases.
These oil purifiers are commonly used in heat creating, annealing, sintering, brazing, nitriding, and metal melting. The Edwards models are
available to handle hydrocarbon and inert oils for rotary oil sealed pumps up to 750 ft3min-1 and can filter out solids to 3 microns.
• Features & Benefits
• Keep pump fluids cleaner
• Self-contained and portable
• Suitable for mechanical vacuum pumps up to 730 ft3min-1
• Models available for hydrocarbon and inert oils
Product Description For Pump GPM Elements Order no.
Required
Vacuum Pump Oil Purifiers
339-015 (115 V, 1-ph, 60 Hz) 146, 148,149 15 1 900-339-015
339-015 CE (230 V, 1-ph, 50 Hz) 146, 148, 149 12 1 900339015501
339-015 CE (200/400 V, 3-ph, 50 Hz) 146, 148, 149 12 1 900339015502
339-030 (115 V, 1-ph, 60 Hz) 212, 412 3 1 900-339-030
339-030 CE (200/400 V, 3-ph, 50 Hz) 212, 412 23 1 900339030501
339-215 (115v 1 ph. 60 Hz) All 15 2 900-339-215
Special service (all pumps)
339-15 (115 V,1-ph, 60 Hz)* 146, 148, 149 15 1 900-339-151
339-152 (115 V, 1-ph, 60 Hz)† 146-412 15 2 900-339-152
339-252 (115 V, 1-ph, 60 Hz)† 146-412 15 4 900-339-252
Spares Order no.
Standard 339 Filter Fullers Earth 10 microns 085-033-395
Standard 339 Filter Pleated Paper 3 microns 085-039-432
Standard 339 Filter Activated Alumna 085-039-890
Special Service 339 Pleated Paper 3 microns 085-037-794
Special Service 339 Activated Alumna 085-039-956
Note: the 215 is the only one that is dual canister all the above are single canister
* Single element canister
† Double element canister
Medium and Large

MV SERIES VERTICALLY ORIENTED
MICROVAC BOOSTER COMBINATIONS
Edwards multi-stage pumping systems, backed by over a century of in-depth applications knowledge and technical
experience. These compact, efficient pumping systems feature a Stokes Microvac pump and rugged, proven Stokes
6" Series boosters or the Edwards EH series with patented hydrokinetic drive.
The MV Series Mechanical Booster Pump Packages comprises of either the Stokes 212J or 412J rotary piston pump.
Each can be directly coupled with a range of mechanical booster pumps. The range includes Edwards EH series
offering the patented Hydrokinetic Drive or the full range of Stokes 6" series. All are vertical gas flow orientation
for a compact space saving design. The MV Series offers a broad selection of configurations which enables the
flexibility to mix and match the complete range of Stokes Microvac accessories along with various electrical control
options. This enables the user to customise the pumping package to meet their application requirements.
Medium and Large

MV Series Oil Sealed Piston Pumps and Mechanical
Booster Combinations
M Y
CE Marking Motor Control Module
0 No CE mark required 0 No Motor Control / No Pressure Switch

1 CE marked system 1 Motor starter control box pedestal mount
without pressure
2 Motor starter control box wall mount
Microvac Pump without pressure
3 Motor starter control box pedestal mount
1 212J No CE Marked System with pressure
2 212J CE Marked System 4 Pressure switch only
3 412J No CE Marked System 5 Motor starter control box wall mount
4 412J CE Marked System with pressure
5 212J with base No CE Marked System
6 212J with base CE Marked System
Coil Voltage
7 412J with base No CE Marked System
8 412J with base CE Marked System 1 Coil Voltage 24 V AC 50 Hz
2 Coil Voltage 24 V AC 60 Hz
Booster 3 Coil Voltage 120 V 60 Hz / 110 V 50 Hz
4 Coil Voltage 240 V 60 Hz / 220 V 50 Hz
0 No Booster 5 Coil Voltage 380 V 50 Hz (CE)
1 EH250 6 Coil Voltage 415 V 50 Hz (CE)
2 EH500 7 Coil Voltage 480 V 60 Hz / 440 V 50 Hz
3 EH1200 8 Coil Voltage 380 V 60 Hz
4 EH2600
5 EH4200
6 EH250 with 3" ASA inlet (for EH250) Motor Voltage
7 EH500 with 4" ASA inlet (for EH500)
8 EH1200 with 6" ASA inlet 1 230V 3-ph 60 Hz
9 EH2600 with 8" ASA inlet 2 460V 3-ph 60 Hz (for Non CE marked systems)
A 607 low speed low power 3 400V 3-ph 50 Hz (only for CE Marked systems)
B 607 low speed high power 4 220V 3-ph 50 Hz (for Non CE marked systems)
B 607 low speed high power 5 380V 3-ph 50 Hz (for Non CE marked systems)
C 615 low speed 6 440V 3-ph 50 Hz (for Non CE marked systems)
D 615 high speed 7 380V 3-ph 60 Hz (for Non CE marked systems)
E 61B low speed 8 200V 3-ph 60Hz (for Non CE marked systems)
F 61B high speed 9 200V 3-ph 50Hz (for Non CE marked systems)
G 622 high speed
H 607 high speed (EU and Asia)
Gas Ballast Silencer & Vacuum Break
0 No Gas ballast, No Silencer
Oil Mist Filter
1 Gas Ballast Silencer (212J / 412J)
0 No mist filter 2 Auto gas ballast 24 V AC 60 Hz
1 MF 291-150J 3 Auto gas ballast 24 V DC DIN
2 MF 291-300J 4 Auto gas ballast 120 V 60 Hz / 110 V 50 Hz
0 No cooling options 0 No oil purifier

1 Water miser (TCV) 1 OP 339-030 115 V 1-ph 60 Hz
2 Min max cooler 115 V 1-ph 60 Hz 2 OP 339-030CE 230 V 1-ph 50 Hz
3 Min max cooler 230 V 1-ph 60 Hz 3 OP 339-030CE 200/400 V 3-ph 50 Hz
4 OP 339-215 115 V 1-ph 60 Hz
Note* Above booster combinations are direct mount vertical flow.

Note** Oil mist filters and min max coolers will ship separately unless ordered with base frame.
Note*** Oxygen service pumps are available, please contact your local Edwards representative to discuss your requirements.
Note**** Not applicable in CE versions.
For other possible combinations, please contact your local Edwards representative to discuss your requirements.
Note: please click on the link: http://edwebid3.edwardshighvacuum.net/Edconfigurator/index.aspx to order your pump & booster combination or a system.
Medium and Large

STOKES 1700 SERIES MECHANICAL
BOOSTER COMBINATIONS
Whether you need to increase the capacity of your existing system or achieve peak performance for
a new installation; Edwards makes taking advantage of the latest technology easy. These field-proven
pumping systems are the workhorse of countless industrial and large chamber applications. Each
Stokes1700 series mechanical booster pump combination includes a Stokes Microvac backing pump
and a belt driven, horizontal flow, high vacuum Stokes 6” series mechanical booster pump. In harsh
applications where chemical or particulate contamination is present, process isolation boosters are
available as an option. Controls for Stokes 1700 series mechanical booster pump combination include
a pressure switch, motor starters, overloads, remote booster selection switch and lights for pump
running and fault indication.

• Reliable • Vacuum Heat Treatment
Over 80 years of time tested proven performance with • Vacuum Melting
experienced service and technical support. • Metallurgical
• Robust • Transformer Drying
Easy on-site maintenance – robust simple mechanism • Vacuum Coating
for high reliability and ease of rebuild • General Industrial Applications
Highly reliable – ability to handle harsh processes. • Leak Detection
• Flexible
Configured for you – choice of pumping Pump Range
combinations available with a variety of 6” boosters
and rotational speed Stokes 1700
Optimise the configuration for your process. -- 1721 -- 1738BP
-- 1721S -- 1738HCBP
• Reassurance
-- 1722 -- 1739
Up to date technology – continued investment in
-- 1722S -- 1739HC
design and technology improvements. -- 1733 -- 1739BP
-- 1733HC -- 1739HCBP
-- 1738 -- 1754
-- 1738HC -- 1754HC
Medium and Large

Performance Curves
1721 & 1721S

1721 & 1721S 1721 Performance Curve
Booster Displacement
2210 -2720 m3h-1
(1300 - 1600 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
1800 - 2200 rpm
Pump Displacement
255 m3h-1
(150 ft3min-1)
(Torr)
15 Torr
Ordering information 1721S Performance Curve

1721 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-170-061
1721S 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-170-074
(ft 3 min -1 )
(m 3 h -1)
(Torr)
10 Torr
1722 & 1722S

1722 & 1722S 1722 Performance Curve
2210 -2720 m3h-1
(1300 - 1600 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
1800 - 2200 rpm

Pump Displacement
510 m3h-1
(300 ft3min-1)
(Torr)
25 Torr
Ordering information 1722S Performance Curve

1722 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-170-062
1722S 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-170-075
(ft 3 min -1 )
(m 3 h -1)
(Torr)
15 Torr
Medium and Large

1738 & 1739
1738 Performance Curve 1738 & 1739
3398-4420 m3h-1
(2000-2600 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
2750-3600 rpm
Pump Displacement
510 m3h-1
(300 ft3min-1)
(Torr)
10 Torr
1739 Performance Curve Ordering information

1738 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-038
1739 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-039
(ft 3 min -1 )
(m 3 h -1)
(Torr)
15 Torr
1738 HC & 1739 HC

1738 HC Performance Curve 1738 HC & 1739 HC
3398-4420 m3h-1
(2000-2600 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
2750-3600 rpm
Pump Displacement
1020 m3h-1
(600 ft3min-1)
(Torr)
25 Torr
1739 HC Performance Curve Ordering information

1738HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-17C-038
1739HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-17C-039
(ft 3 min -1 )
(m 3 h -1)
(Torr)
20 Torr
Medium and Large

Performance Curves
1738 BP & 1739 BP

1738 BP & 1739 BP 1738 BP Performance Curve
3398 - 4420 m3h-1
(ft 3 min -1 )
(2000 - 2600 ft3min-1)
(m 3 h -1)
Booster Speed
2750 - 3600 rpm
Pump Displacement
510 m3h-1 (Torr)
(300 ft3min-1)
Ordering information 1739 BP Performance Curve

1738BP 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-170-38B
1739BP 230/460V, 3Ø, 60 Hz with 230/460V Coil 900-170-39B
(ft 3 min -1 )
(m 3 h -1)
(Torr)
1738 HCBP & 1739 HCBP

1738 HCBP & 1739 HCBP 1738 HCBP Performance Curve
3398 - 4420 m3h-1
(2000 - 2600 ft3min-1)
(ft 3 min -1 )
(m 3 h -1)
Booster Speed
2750 - 3600 rpm
Pump Displacement
1020 m3h-1
(Torr)
(600 ft3min-1)
Ordering information 1739 HCBP Performance Curve

1738HCBP 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-17C-38B
1739HCBP 230/460V, 3-ph, 60 Hz (230/460 V coil) 900-17C-39B
(ft 3 min -1 )
(m 3 h -1)
(Torr)
Medium and Large

1733 & 1754
1733 Performance Curve 1733 & 1754
6358-5100 m3h-1
(3840-3000 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
2750-3600 rpm
Pump Displacement
510 m3h-1
(300 ft3min-1)
(Torr)
5 Torr
1754 Performance Curve Ordering information

1733 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-S33
1754 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-054
(ft 3 min -1 )
(m 3 h -1)
(Torr)
15 Torr
1733 HC & 1754 HC

1733 HC Performance Curve 1733 HC & 1754 HC
6358-5100 m3h-1
(3840-3000 ft3min-1)
(ft 3 min -1 )
Booster Speed
(m 3 h -1)
2750-3600 rpm
Pump Displacement
1020 m3h-1
(600 ft3min-1)
(Torr)
10 Torr
1754 HC Performance Curve Ordering information

1733HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-S34
1754HC 230/460 V, 3-ph, 60 Hz (230/460 V coil) 900-170-055
(ft 3 min -1 )
(m 3 h -1)
(Torr)
30 Torr
Medium and Large

Dimensions
1721/1721S dimensions
13
(0.5)
919 (36.18)
1286 (50.62)
1035 (40.75)
452 (17.81)
821 (32.31)
921 (36.25) 216 (8.5)
1410 (55.5) 127
Ø51 (2) 1099 (43.25) 762 (30)
(5)
1353 (53.25)
1722/1722S/1738/1739 dimensions
924 (36.37)
210 (8.25)
13 (0.5)
1413 (55.62)
1019 (40.12)
1060 (41.75)
1035 (40.75)
575 (22.62)
879 (34.62) 216

(8.5) Ø51 (2) 1099 (43.25) 127 (5) 762 (30)
1416 (55.75)
1353 (53.25)
1738HC/1739HC dimensions
1800 (70.87)
1016 (40) 216
(8.50)
889 (35)
1413 (55.62)
1035 (40.75)
(15.37)
391
1778 (70)
(15.37)
391
610 (24) 29 438 (17.25) 469 (18.45)

76 45 559 (22)
16 (0.63) (3) (1.13) (1.77) 102 (4)
762 (30) 495 (19.50) 762 (30)
~
1738BP/1739BP dimensions
924 (36.37)
(8.25)
209
1499 (59)
13
1019 (40.12)
(0.50)
1060 (41.75)
1035 (40.75)
575 (22.62)
216
879 (34.62) (8.50)
1416 (55.75) Ø51 (2) 762 (30)
127 1099 (43.25)
(5)
1353 (53.25)
Medium and Large

1738HCBP/1739HCBP dimensions
1800 (70.87)
1016 (40) 216
(8.50)
889 (35)
1499 (59)
1060 (41.75)
1035 (40.75)
1778 (70)
76 600 (23.62) 432 (17) 29 98 (3.87) 549 (21.62)

(3) 349
749 (29.50) (13.75) 489 (19.25) (1.12) 505 (19.87) 749 (29.50)
1754/1733 dimensions
1445 (56.87)
1111 (43.75)
1067 (42)
565 (22.25)
124 (4.87)
343
1083 (40.87) (13.5) Ø51 (2) 460 (18.12)
737 (29) 737 (29) 89 (3.5)
1695 (66.75)
1651 (65) 20 (0.75) 953 (37.5)
991 (39)
1754HC/1733HC dimensions
1778 (70)
1473 (58)
1067 (42)
889 (35)
187
(7.37)
600 (23.62) 318 486 (19.12) 899 (35.37)
1111 (43.75) 457 (18) 76
749 (29.50) (12.50) 800 (31.50) 1778 (70)
1899 (74.75) (3)
2134 (84)
Medium and Large

Technical Data
Units 1721 1721S 1722 1722S
Booster displacement m3h-1/ft3min-1 2210/1300 2720/1600 2210/1300 2720/1600
Booster speed rpm 1800 2200 1800 2200
Booster orientation Horizontal
Pump displacement m3h-1/ft3min-1 255/150 510/300
Pressure switch required Yes Yes Yes Yes
Normal cut-in pressure mbar/Torr 20/10 13/10 33/25 20/15
Continuous operation pressure limit mbar/Torr 4/3 26/2 20/15 10.7/8
Booster drive kW/hp 5.6/7.5 7.5/10 5.6/7.5 7.5/10
Pump drive (TEFC) kW/hp 5.6/7.5 6.5/7.5 7.5/10 7.5/10
Inlet connections 8 inch ASA/ANSI flange
Discharge connections 2 inch ASA/ANSI flange, 2 inch NPT 3 inch ASA/ANSI flange, 3 inch NPT
Water inlet/outlet connection ½ inch NPT
Recommended cooling flow @ 30 °C/85 °F lmin-1/galmin-1 5.7/15 7.6/2
Booster oil capacity (V lube H) litre/US gal 19/0.51
Microvac oil capacity (V lube F) litre/US gal 15/4 46/12
Inlet height mm/inch 1035/40.75
Footprint (L x W x H) mm 1419 x 919 x 1260 1407 x 1048 x 1438
inch 55.87 x 36.18 x 49.61 55.40 x 4126 x 56.61
Weight kg/lbs 1225/2700 1270/2800 1588/3500 1633/3600
Units 1738 1739 1738HC 1739HC

Booster displacement m h /ft min
3 -1 3 -1
3398/2000 4420/2600 3398/2000 4420/2600
Pressure switch required Yes
Normal cut-in pressure mbar/Torr 13/10 13/15 33/25 33/20
Continuous operation pressure limit mbar/Torr 4/3 27/2 6.7/5 3.4/25
Booster drive kW/hp 7.5/10 224/30 7.5/10 18.6/25
Pump drive (TEFC) kW/hp 7.5/10 7.5/10 7.5 (x2)/10 (x2) 7.5 (x2)/10 (x2)
(x2)
Water inlet/outlet connection ½ inch NPT ½ inch NPT (x2)
Recommended cooling flow @ 30 °C/85 °F lmin-1/galmin-1 7.6/2 7.6 (x2)/2 (x2)

Inlet height mm/inch 1035/40.75 1067/42
Footprint (L x W x H) mm 1407 x 1048 x 1905 x 1270 x
1438 1318
inch 55.40 x 4126 x 75 x 50 x 5189
56.61
Weight kg/lbs 1633/3600 1803/3975 2404/5300 2733/6025
Medium and Large

Units 1738 BP 1739 BP 1738 HCBP 1739 HCBP
Booster displacement m3h-1/ft3min-1 3398/2000 4420/2600 3398/2000 4420/2600
Pressure switch required No No No No
Continuous operation pressure limit mbar/Torr 4/3 27/2 6.7/5 4/3
Booster drive kW/hp 11/15 22/30 112/15 18.6/25
Pump drive (TEFC) kW/hp 7.5/10 7.5 (x2)/10 (x2)
(x2)
Water inlet/outlet connection ½ inch NPT ½ inch NPT (x2)
Recommended cooling flow @ 30oC/85 oF lmin-1/galmin-1 7.6/2 7.6 (x2)/2 (x2)
Weight kg/lbs 1690/3725 1837/4050 2449/5400 2767/6100
Units 1733 1754 1733 HC 1754 HC

Booster displacement m h ft min
3 -1/ 3 -1
6538/3840 5100/3000 6538/3840 5100/3000
Pump displacement m h ft min

3 -1/ 3 -1
510/300 1020/600
Pressure switch required Yes Yes Yes Yes
Normal cut-in pressure mbar/Torr 6.7/5 20/15 13.3/10 40/30
Continuous operation pressure limit kW/hp 0.8/0.6 13/1 13/1 4/3
Booster drive kW/hp 18.5/25 15/20 225/30 18.5/25
Pump drive 7.5/10 7.5 (x2)/10 (x2)
(x2)
Water inlet connection ½ inch NPT (2) ½ inch NPT (x2)
Water outlet connection ½ inch NPT
Recommended cooling flow @ 30oC/85 oF lmin-1/galmin-1 7.61/2 7.61 (x2)/2 (x2)
Booster oil capacity (V lube H) litre/US gal 19/0.51 19/0.51
Weight kg/lbs 1710/3770 1678/3700 2767/6100 2722/6000
Medium and Large

DRY PUMPS AND SYSTEMS
FOR HAZARDOUS APPLICATIONS
CXS Chemical Dry Pumps 233

CDX Dry Vacuum Pumps 239
EDP Chemical Dry Pumps 244
Dry Pumps & Systems for

Shop online at shop.edwardsvacuum.com Contact our customer service team Hazardous Applications 231.
Product ranges
• EDP Chemical Dry Pumps and Systems EDP Chemical Dry Pumps and Systems
• CXS Chemical Dry Pumps and Systems In the early 1980’s, the EDP range pioneered the
• CDX1000 Dry Vacuum Pumps use of environmentally friendly dry vacuum pumps
Edwards is a market leader in dry pump in the Chemical Process Industries. Based on the
technology and pioneer of dry vacuum for the award-winning reverse claw mechanism this pump
chemical process, pharmaceutical and fine range has been designed and tested with reliability
chemical industries. and safety in mind. With a large global installed
base, the EDP model has been tried and tested over
Why Dry?
many years on its long life and easy maintenance
Dry running pumps have no oil, steam or water in and on its ability to pump flammable gases safely,
the process volume. This eliminates, at source, the to pump corrosive gases without corroding and to
pollution traditionally associated with wet sealed handle liquid or particulate carry over.
vacuum systems and provides cost and materials
handling benefits as the sealing medium does not We offer a range of four pumps with 80-400 m3h-1
have to be replenished: capacity and ultimate vacuums of below 1 mbar.
• No contamination of the process stream CXS Chemical Dry Pumps and Systems
• No polluted effluent CXS is Edwards most advanced chemical dry pump
• No messy oil drums incorporating our many years of experience while
• Improved processing with reduced down time adding more features and benefits designed to
• Lower utility and consumable costs address the increased requirements coming from
the CPI market. The patented screw technology
The proven and rugged non contacting designs,
delivers excellent liquid and solids handling and
both screw and reverse claw mechanisms, include
pumps corrosive vapours without deterioration.
the ability to control pump body and internal gas
temperatures allowing a comprehensive range of CXS features an integral ‘hazardous area’
solvents, flammables and corrosives to be pumped. controller which allows for start-up and shut down
Systemised variants address the EU’s explosive procedures, pressure control, solvent flushing and
atmospheres (ATEX) directive for Category (Zone 0) multiple communications options. The integral
T4 operation. The mechanisms are both highly PID pressure control with inverter delivers flexible
tolerant to liquids and particles in the gas stream process control and communications options for
and are suitable for many applications including: full monitoring of process parameters. The CXS
• Distillation lowers cost of ownership with low use of power
• Drying and other utilities and stand by operation between
• Evaporation and crystallisation processes. The CXS lowers maintenance bills with
• Filter/dryers up to 5 years between services. The CXS lowers
• Solvent recovery noise level< 64dB(A) for quieter operation. CXS is
• Reactor service available now in two models 160 and 250 m3h-1 ,
• House/Central vacuum with 10-3 mbar ultimate.
CDX Dry Vacuum Pumps
Applications Engineering is a core competence CDX1000 is the pump optimised for processes
and Edwards are able to offer a comprehensive requiring large pumping speeds, delivering a
solutions package that includes: 900 m3h-1 pumping speed and an ultimate vacuum
• Process design of 0.005 mbar. Installed mainly in continuous, large,
• Equipment specification and selection high throughput environments, this pump has
• Safety and operating procedures been designed to withstand process malfunctions
• Vacuum system and control integration and to minimise down time from line maintenance
• Commissioning advice to overhaul.
Edwards have a full range of dry pumps with a set

of characteristics suited to most applications.

232. Hazardous Applications
CXS CHEMICAL DRY PUMP
SIMPLY RELIABLE
Edwards is synonymous with vacuum. Having over 90 years experience and over 150,000
dry pumps installed worldwide, our high quality products and application know-how are
renowned in the world of vacuum technology. CXS is Edwards most advanced chemical dry
pump featuring tapered-screw technology for exceptional energy efficiency and performance.
It offers high reliability and effluent-free pumping even in the most difficult of harsh chemical
and pharmaceutical processing applications. The CXS pumps up to one litre of liquid per minute
continuously or up to 25 litre-slugs without stopping, and provides an ultimate vacuum down to
10-2 mbar. CXS is available in two sizes, with capacities of 160 m3h-1 and 250 m3h-1.

• Environmental • Drying
-- No oil disposal. • Degassing
-- No oil emissions into atmosphere. • Deodorisation
• Performance • Distillation
-- Very stable pumping speed gives repeatability • Solvent recovery
to processes.
-- Continuous pumping at atmosphere.
Pump Range
-- Ability to handle particulates.
-- Dry eliminates back-streaming, thus protecting reactive CXS160
alloys from contamination. -- CXS160
• Safety -- CXS160/1200
-- Unobtrusive noise levels.
-- No unsightly oil spills. CXS250
-- No hazardous oil vapours. -- CXS250
-- CXS250/1200
Hazardous area ATEX certification for T4 and IIB3 gas groups. -- CXS250/2600

Performance Curves
CXS160 Dry Pump

CXS160 CXS160 Performance Curve
Maximum pumping speed
160 m3h-1
95 ft3min-1
Capacity at 10 mbar (7.5 Torr)
132 m3h-1
78 ft3min-1
Ultimate vacuum
< 0.02 mbar
< 0.015 Torr

CXS160 ATEX CAT2 T3 Light Duty CS2560000000
CXS160 ATEX CAT2 T3 Medium Duty + CS2561005000
CXS160/EH1200 ATEX CAT2 Light Duty CS6560000000

CXS160/EH1200 ATEX CAT2 Medium Duty + CS6561005000
-- Light Duty includes Shaft Seal Purges (SSP) only for clean applications
-- Medium Duty + includes SSP, gas ballast, inlet purge, solvent flush and
exhaust pressure monitoring for harsh processes.
The above products are our standard offering.

A comprehensive ‘matrix’ of CXS products are available including
the following:
-- Containment safety ATEX CAT2 products with integral Flame Arrestors
-- Fully systemised ATEX CAT 1 external/CAT2 external products
-- T160 and T4 products
Please consult your Edwards Sales or Applications specialist for assistance

with the correct product selection.

CXS250 Dry Pump
CXS250 Performance Curve CXS250
CXS250+EH1200 (60Hz)
CXS250+EH1200 (50Hz) 250 m3h-1
CXS250/2600 (60Hz)
CXS250/2600 (50Hz)
CXS250 148 ft3min-1
Capacity at 10 mbar (7.5 Torr)
230 m3h-1
135 ft3min-1
Ultimate vacuum
< 0.015 mbar
< 0.011 Torr

CXS250 ATEX CAT2 T3 Light Duty CS9560000000
CXS250 ATEX CAT2 T3 Medium Duty + CS9561005000
CXS250/EH1200 ATEX CAT2 T3 Light Duty CSB560000000

CXS250/EH1200 ATEX CAT2 T3 Medium Duty + CSB561005000
CXS250/EH2600 ATEX CAT2 T3 Light Duty CSD560000000
-- Light Duty includes Shaft Seal Purges (SSP) only for clean applications
-- Medium Duty + includes SSP, gas ballast, inlet purge, solvent flush and
exhaust pressure monitoring for harsh processes.
The above products are our standard offering.

A comprehensive ‘matrix’ of CXS products are available including
the following:
-- Containment safety ATEX CAT2 products with integral Flame Arrestors
-- Fully systemised ATEX CAT 1 external/CAT2 external products
-- T160 and T4 products
Please consult your Edwards Sales or Applications specialist for assistance

with the correct product selection.

Dimensions
Standard CXS pump CXS with booster combination
760
1373.4
982
202
1158.5
626
1293.4
961
605.9
633.5
646.7
507
25 647.4
1033.2
1357.5
1806.4
1535.5
300
1270
45
29
60
35
520
482
350
0.3
235
1
253
1538.5
Pump view Pump view
This example shown is for a CXS160 or CXS250 with an

EH1200 booster.

Technical Data
Specification Units CXS160 CXS250
Maximum pumping speed m3h-1/ft3min-1 160/95 250/148
Capacity at 10 mbar (7.5 Torr) m h /ft min

3 -1 3 -1
132/78 230/135
Ultimate vacuum mbar/Torr < 0.02/< 0.015 < 0.015/< 0.011
Maximum back pressure – standard mbar/psig 1,200/2.7
Power consumption at 10 mbar (7.5 Torr) kW/hp 3.6/4.8 3.8/5.1
Standard motor (380-460V ±10%, 3 ph, 50/60 Hz) kW/hp 7.5/10
Cooling water flow rate, (adjustable) lmin-1/gal min-1 4-10/1.1-2.6
Cooling water temperature* ˚C/F 5-35*/41-95*
Maximum cooling water supply pressure barg/psig 6.9/100
Cooling water supply differential pressure* bar/psi 0.6-1.7/9-25
Seal purge flow (maximum) std l min std ft min

-1/ 3 -1
12/0.424
Seal purge supply pressure, (minimum – maximum) barg/psig 2.5-6.9/36-100
Noise (maximum) with silencer dB(A) 64
Weight (with frame and standard motor) kg/lbs 470/1,034
Process connection, inlet ANSI/DIN 3"/DN80
Process connection, outlet ANSI/DIN 2"/DN50
* Data for T3. Contact Edwards for T160 and T4 options

CXS Accessories
Exhaust manual isolation valve kit M52808600
Solvent flush assembly M52808300
Exhaust silencer assembly M52808550
Water pump assembly M52809300
CXS Exhaust temperature transmitter accessory kit M52809280
CXS Inlet pressure transmitter M52809200
CXS Gas purge flow meter accessory kit M52805170
CXS Inlet pressure indicator accessory kit M52808460
CXS Exhaust pressure indicator accessory kit M52808480
CXS Inlet temperature indicator accessory kit M52809160
CXS Exhaust temperature indicator accessory kit M52809170
Service

CDX DRY VACUUM PUMP
Edwards CDX1000 represents the latest generation of dry pump technology. The CDX1000 is a
double-ended screw mechanism for the chemical process, pharmaceutical and petrochemical
industries. This innovative technology leverages Edwards latest manufacturing and design
philosophies. The CDX1000 is suited to larger processes where repeatability and reliability are key.
Technologies and manufacturing techniques have been carefully selected to produce a robust, high
performance machine that is simple to operate and maintain.

• Performance • Processes.
-- Continuous from atmosphere to ultimate. • Distillation.
-- Excellent temperature control.
• Drying.
-- Large liquid slug capability.
• Evaporation/Crystallisation.
• Environment
• Solvent/Vapour Recovery.
-- No effluent generated.
-- Dry running mechanism.
-- Efficient solvent recovery. Pump Range
-- Low power. CDX
• Maintenance -- CDX1000
-- On-site seal and bearing change.
-- Flushable with water, solvent or steam.
-- Low rotational speed.
-- Cooled and filtered oil.
-- Integral accessory modules.
• Simplicity
-- Low parts count.
-- Balanced rotor design.
-- No compression plate.
-- Industry standard motors.

Performance Curves
CDX1000 Dry Vacuum Pump

CDX1000 CDX1000 Performance Curve
900 m3h-1
530 ft3min-1
Ultimate vacuum
5 x 10-3 mbar
4 x 10-3 Torr
CDX1000, 30 kW, 50 Hz, flame proof with integral A70801985 1 Power
flame arrestors
2 Speed
CDX1000 Dry vacuum pump, 30 kW, 50 Hz, flame A70802985
proof (without integral flame arrestors)
CDX1000 Dry vacuum pump, 40 HP, 60 Hz, A70811985
flame proof with integral flame arrestors
CDX1000 Dry vacuum pump, 40 HP, 60 Hz, flame A70812985
A
proof (without integral flame arrestors)
B
Dimensions
CDX dimensions
A
C D
B C D
Note: this diagram shows a CDX with integral flame arrestors.

C D
A Side view 1 Pump inlet
B Plan view 2 Pump outlet
C End view 3 Fixing-holes: Ø18 mm (0.71 inch), 2 holes on each mounting foot
D Front fixing dimensions with mounting feet removed 4 Fixing-holes: Ø17 mm (0.67 inch), 2 holes on each mounting bracket

Technical data
Units CDX1000
Maximum pumping speed m3h-1 900
ft min
3 -1
530
Capacity at 10 mbar (7.5 Torr) m3h-1 900
ft min
3 -1
530
Ultimate vacuum mbar 5 x 10-3
Torr 4 x 10-3
Maximum back pressure – standard (optional*) mbarA 1150
psig 2.0
Power consumption at 10 mbar (7.5 Torr) kW 17.1
Hp 23.2
Standard motor (380-400 V, 3 ph, 50 Hz) kW 30
Standard motor (200-460 V, 3 ph, 60 Hz) hp 40
Cooling water flow rate (adjustable) lmin -1
10-20
gal min-1 2.64-5.28
Cooling water supply temperature range o
C/ oF 5-35/41-95
Cooling water supply pressure barg 2-10
psig 29-145
Seal purge flow (maximum), regulated to 0.3‑0.5 barg, (5‑7 psig) lmin-1 24
ft min
3 -1
0.85
Seal purge supply pressure (minimum‑maximum) barg 2-10
psig 29-145
Noise (max. with exhaust silencer) dB(A) 82
Weight (with frame and standard motor) kg 1710
lbs 3765
Process connection, inlet ANSI/DN150 6”
Process connection, outlet ANSI/DN80 3”

Systemisation
Because no two installations are identical, Edwards The requirement for these or other accessories is
offers a custom systemisation design and build clarified through expert applications engineering.
service, exactly matched to customer needs, using
Work can be carried out to a customer’s specifications,
pre-engineered modules together with an extensive
or to local or industry standard codes and practices.
CAD capability. This also allows subsequent expansion
Full documentation is provided, and full certification
or reconfiguration. A wide range of modules is
can be obtained if necessary.
available, including:
*Edwards EH Series boosters feature our unique hydrokinetic drive
which provides significant cost and performance advantages over
• EH* and HV mechanical booster pumps
direct drive machines. The hydrokinetic drive removes any need for
• Condensers pressure sensors or bypass lines or inverters, and allows the booster
• Receivers to run from atmospheric pressure to ultimate vacuum, giving faster
pump-down and more flexible operation with less maintenance.
• Knockout pots
• Dust filters
• Solvent purging
• Flame arrestors
• Isolation and throttle control valves
• Instrumentation
• Silencers
• Inverter drives and pressure controls
• Electrical control panels
• Air blast closed-loop cooling
• Base skids
Systemisation to match your process

CDX1000 + HV8000 booster combination
• Pre-engineered modules
• Customised systems
• Tailored applications support to
match performance to process HV8000
CDX1000

Flame Arrestor Kit
Flame Arrestor replacement kit (inlet) A70801810
Flame Arrestor replacement kit (outlet) A70801811

Flame Arrestor tooling kit A70801812
Flame Arrestor cleaning kit A70801808
Replacement Kit
Air bleed filter replacement kit A70901801
Bearing and seal replacement kit A70801805

Oil pump replacement kit A70801806
Kit
Routine maintenance kit A70801800
Heat exchanger cleaning kit A70801801

Cooling system overhaul kit A70801802
Motor fitting kit A70801803
Drive coupling kit A70801804
Strip and rebuild kit A70801807
Hoses kit A70801809
Mobil SHC 629 Oil

Mobil SHC 629 oil: 4 litres (1.06 US gal) H11023011
Coolant
Container of coolant*
* 0.9 litres (0.24 US gal) as supplied, 2.0 litres (0.53 US gal) when diluted. H12810003
Note: You will need 25 containers of coolant to completely fill a pump with coolant
Service

EDP CHEMICAL DRY PUMP
EDP pumps are based on Edwards’ oil-free, non-contacting, award-winning, reverse claw
mechanism. They provide consistent vacuum at high efficiencies and low costs of ownership.
Dry pumps completely eliminate all problems of process contamination and creation of polluted
effluent, which are experienced with traditional wet vacuum pump technologies.

• Staged compression for optimum temperature profile • Drying
within the pump and no requirement for cooling • Distillation
gas injection. • Reactor service
• Inherently free draining. • Solvent recovery
• Able to handle liquid or particulate carry-over. • House/central vacuum
• Short gas path eliminates particulate build-up and
corrosion – Edwards’ patented design. Pump Range
• Can flush with solvents, water or steam
EDP
• No internal valves to block or corrode and no interstage
-- EDP80
condensers to create potential for corrosion. -- EDP160
• Simple robust construction with ample power ensures -- EDP250
reliable operation even during process upsets. -- EDP400
• Non-contacting mechanisms gives long life and
high reliability.
• Pump flammable gases safely.
• Pump corrosive gases without corroding.
• Designed for long life and easy maintenance.
• Minimum of 25 years life expectancy.
• Lower cost of ownership.

Performance Curves
EDP80 Chemical Dry Pump

EDP80 EDP80 Performance Curve
Peak speed
50 Hz 83 m3h-1/49 ft3min-1
60 Hz 102 m3h-1/60 ft3min-1
Ultimate Vacuum
50 Hz 0.5 mbar/0.4 Torr
EDP80 50 Hz A70545008
EDP80 60 Hz A70545008

EDP160 EDP160 Performance Curve
Peak speed
50 Hz 163 m3h-1/96 ft3min-1
60 Hz 202 m3h-1/119 ft3min-1
Ultimate Vacuum
EDP160 50 Hz A70544008
EDP160 60 Hz A70544008

EDP250 Performance Curve EDP250
Peak speed
50 Hz 260 m3h-1/320 ft3min-1
60 Hz 153 m3h-1/188 ft3min-1
Ultimate Vacuum
EDP250 50 Hz A70543008
EDP250 60 Hz A70543008

EDP400 Performance Curve EDP400
Peak speed
50 Hz 377 m3h-1/222 ft3min-1
60 Hz 427 m3h-1/251 ft3min-1
Ultimate Vacuum

EDP400 50 Hz A70542008
EDP400 60 Hz A70541008

Dimensions
EDP dimension
Key EDP80 EDP160 EDP250 EDP400 50 Hz EDP400 60 Hz

A 1423 (56.0) 1458 (57.4) 1681 (66.2) 1730 (68.1) 1721 (67.8) 1 Pump inlet
B 1254 (49.4) 1289 (50.7) 1514 (59.6) 1562 (61.5) 1549 (61.0) 2 Pump outlet
C 974 (38.3) 974 (38.3) 1148 (45.2) 1148 (45.2) 1149 (45.2) 3 Fixing hole: Ø18 mm (4 off)
D 353 (13.9) 353 (13.9) 377 (14.8) 377 (14.8) 349 (13.7) 4 Cooling water outlet connection
E 443 (17.4) 448 (17.6) 359 (14.1) 359 (14.1) 362 (14.3) 5 Cooling water inlet connection
F 350 (13.8) 350 (13.8) 500 (19.7) 500 (19.7) 476 (18.7) 6 Nitrogen supply inlet connection
G 350 (13.8) 350 (13.8) 475 (18.7) 475 (18.7) 476 (18.7)
H 700 (27.6) 700 (27.6) 1000 (39.4) 1000 (39.4) 997 (39.3)
J 850 (33.5) 850 (33.5) 950 (37.4) 950 (37.4) 946 (37.2)

Technical Data
Units EDP80 EDP160
50 Hz 60 Hz 50 Hz 60 Hz
Maximum pumping speed m h ft min
3 -1/ 3 -1
83/49 102/60 163/ 96 202/119
Capacity at 10 mbar (7.5 Torr) m3h-1/ft3min-1 75/44 102/60 153/90 198/117
Ultimate vacuum mbar/Torr 0.5/0.4 0.3/0.2 0.5/0.4 0.3/0.2
Maximum back pressure – standard
mbar/psig 1150 (1300*)/2.2 (4.4*)
(optional*)
Power consumption at 10 mbar (7.5 Torr) kW/hp 3.3/4.4 4.0/5.4 4.9/6.6
Standard motor (380-400 V, 3 ph, 50 Hz) kW/hp 5.5/7.5 7.5/10.0 11.0/15.0
Cooling water flow rate, (adjustable) l min-1/gal min-1 1-8/0.3-2.1 1-10/0.3-2.6 1-8/0.3-2.1 1-10/0.3-2.6
Cooling water supply pressure barg/psig 2-10/29-145
Seal purge flow (maximum),
lmin-1/ft3 min-1 20/0.7
regulated to 0.3-0.5 barg, (5-7 psig)
Seal purge supply pressure,
barg/psig 2-10/29-145
(minimum – maximum)
Noise (max. with exhaust silencer) psig 73 77 78
Weight (with frame and standard motor) kg/lbs 648/1429 650/1433 747/1647 756/1667
Process connection, inlet 2”/DN50 3”/DN80
Process connection, outlet 1.5”/DN40
Pumping mechanism 3 stage reversed claw
Units EDP250 EDP400

50 Hz 60 Hz 50 Hz 60 Hz
Maximum pumping speed m h ft min
3 -1/ 3 -1
260/153 320/188 377/222 427/251
Capacity at 10 mbar (7.5 Torr) m3h-1/ft3min-1 255/ 150 315/185 377/222 422/248
Ultimate vacuum mbar/Torr 0.5/0.4 0.2/0.2 0.4/0.3 0.2/0.2
Maximum back pressure –
mbar/psig 1150 (1300*)/2.2 (4.4*)
standard (optional*)
Power consumption at 10 mbar (7.5 Torr) kW/hp 6.0/8.0 7.0/9.4
Standard motor (380-400 V, 3 ph, 50 Hz) kW/hp 11.0/15.0 15.0/20.0 18.5/25.0 25.0/30.0
Cooling water flow rate, (adjustable) lmin gal min
-1/ -1
1-10/0.3-2.6 1-10/0.3-2.7 1-10/0.3-2.6 1-10/0.3-2.7
Cooling water supply pressure barg/psig 2-10/29-145
Seal purge flow (maximum),
lmin-1/ft3 min-1 20/0.7
regulated to 0.3-0.5 barg, (5-7 psig)
Seal purge supply pressure,
barg/psig 2-10/29-145
(minimum‑maximum)
Noise (max. with exhaust silencer) psig 739 82
Weight (with frame and standard motor) kg/lbs 848/1870 860/1909 918/2024 960/2116
Process connection, inlet 3”/DN80
Process connection, outlet 2”/DN50
Pumping mechanism 3 stage reversed claw

TURBOMOLECULAR PUMPS
ULTIMATE VACUUM SOLUTIONS
EXT/nEXT Turbo Pumps

nEXT Turbomolecular Pumps 253
EXT Turbomolecular Pumps 258
T-Station 75 Turbopumping System 262
nEXT Turbopumping Station 265
Turbo and Active Gauge (TAG) Controller 267
TIC Turbo and Instrument Controller 269
TIC Relay Boxes 272
STP Turbo Pumps

STP Magnetically Levitated Turbomolecular Pumps 275
STP Integrated Controller Pumps 278
STP Ultra High Vacuum Pumps 293
STP High Throughput Pumps 300
Turbomolecular
Shop online at shop.edwardsvacuum.com Contact our customer service team Pumps 249.
EXT and nEXT Turbomolecular Pumps and Controllers
Our range of EXT and nEXT compound turbomolecular pumps and TIC Controllers use state-of-the-art technology
to provide reliable, high and ultra high vacuum.
Key Performance Factors A compound molecular pump (CMP) is based on the

A turbomolecular pump (TMP) is a multi-stage concept of combining bladed turbomolecular stages
axial‑flow turbine in which high speed rotating blades with molecular drag stages on the same rotor. This
provide compression by increasing the probability design allows:
of gas molecules moving in the pumping direction.
• High critical foreline pressures (typically up to
The turbomolecular pump is optimised for molecular
10 mbar)
flow conditions and requires a suitably sized two stage
• Options to use smaller backing pumps or dry
rotary vane pump or an oil free scroll pump to exhaust
diaphragm backing pumps
to atmosphere.
Pumping Speed (volume flow rate) is determined by the rotor diameter, inlet flange size and rotational speed.
The pumping speed reduces at high inlet pressures to a value determined by the size of the backing pump. As the
inlet pressure rises, the motor power dissipation and pump temperature increase. Maximum continuous inlet
pressure sets the maximum throughput limit for steady state pumping and depends on the cooling method used.
Above this pressure, the rotational speed of the pump reduces as temperature sensors limit the pump power.
With a water-cooled pump, the actual maximum throughput depends on the size of the backing pump.
Quiescent Electrical Power is the nominal power dissipated by a pump operating normally at full rotational
speed and with low gas throughput (inlet pressure below the 10–3 mbar range). During the run-up time, or when
operating at high gas throughput or above the critical backing pressure, the pump power dissipation will rise
and approach the maximum power output for the turbo controller used. Critical backing pressure for compound
turbomolecular pumps is typically up to 10 mbar.
Compression Ratio is determined by the rotational speed, the number of pump stages and the molecular
weight of the pumped gas. It is higher for heavier gases which explains why the suppression of hydrocarbon
backstreaming is so effective and why the ratio for hydrogen is important for ultra high vacuum applications.
Ultimate Pressure measured according to Pneurop standards, is the lowest pressure achieved in the test system,
48 hours after bakeout. The system is backed only by a two-stage rotary vane pump. Fluoroelastomer inlet seals
are used with ISO-flanged pumps and metal seals are used with CF-flanged pump models.
Turbomolecular
250. Pumps
Motor Technology
EXT pumps use brushless d.c. motors and are available
in 24 (EXT75DX), 24 to 48 (nEXT) volt variants. For the
24 volt pumps the TIC line of controllers are available
with the added benefit of integrated instrument
controllers. The drives incorporate a regenerative
back-up supply which provides power in the event of
electrical supply failure to keep the vent-valve closed
for several minutes.
Purge Port
The EXT and nEXT pumps all have purge-ports which
can be used to purge the motor and bearing cavity with
an inert gas (such as nitrogen). We recommend that
you purge the pump when you pump corrosive and
abrasive gas mixtures or those with an oxygen content
over 20%. You can use our PRX10 purge-restrictor to
set the purge gas flow rate. This typically adds up to
25 sccm to the total gas load and the backing pump
must be sized accordingly.
Venting
To maintain the cleanliness of your vacuum system,
we recommend that you vent a turbomolecular
pump at or above half rotational speed, when the
rotor is still spinning fast enough to suppress any
backstreaming of hydrocarbons from the backing line.
The vent port on the EXT and nEXT pump is part way
Bearing and Suspension Technologies up the rotor stack to ensure maximum cleanliness
We use two basic technologies: magnetic bearings and even with fluoroelastomer sealed vent-valves. Each
mechanical ceramic ball bearings. pump is supplied with a manual vent-valve. If you use
Ceramic bearings, which are lubricated by oil, have this manual valve care must be taken not to open it
replaced conventional steel bearings. The silicon too quickly, especially if the system volume is small
nitride ceramic balls are lighter, harder and smoother (typically less than the approximate volume of the
than steel equivalents, leading to longer life and lower turbomolecular pump), because if the rate of pressure
vibration characteristics. Reliability is increased because rise is too high, the pump bearing life may be reduced.
the ball and race materials are different, which prevents
micro pitting. Magnetic bearings further increase In a small volume system, the rate of pressure rise will
reliability. Our EXT and nEXT turbomolecular pumps be greater than in a large volume for a given vent flow
use a hybrid bearing arrangement with a permanent rate, and it may be necessary to restrict the vent gas
magnet upper bearing and an oil lubricated ceramic flow. We offer the VRX range of vent restrictors which
lower bearing. you can fit to your EXT or nEXT pump.
Rotor Technologies Since the rate of pressure rise cannot be accurately

We use two basic technologies: controlled by the manual vent-valve, we recommend
• Compound molecular (combining turbomolecular and that, unless you fit a suitable VRX restrictor to the vent
drag stages) on all EXT and nEXT ‘D’ variant pumps. port, you must wait until the turbomolecular pump
• The T variants (combining turbomolecular, drag and has slowed down to 50% speed, as indicated by the
fluid dynamic stages ) are available on nEXT 'T' variant controller, before you open the manual vent-valve.
pumps. These have the highest compression for light The maximum rate of pressure rise varies by pump
gases where this may be needed on UHV applications. model, and the Instruction Manual supplied with the
pump gives further guidance on this, and the size of
vent restrictor needed to meet the fastest pressure rise
allowed. Control of the rate of venting is particularly
important with pumps using fully magnetic bearings,
otherwise the safety bearings may be damaged.
Turbomolecular
The manual vent-valve can be replaced with a TAV Cooling
solenoid valve driven by the Controller to allow venting For most applications, we recommend that you use
after a 2 second delay on shut-off, or delaying vent until forced-air cooling with the appropriate ACX air-cooler
the rotational speed has dropped to 50%. The Controller connected to your EXT or nEXT pump. NB: high gas
can also control the TAV vent-valve in the event of power load, high backing pressure and rapid cycling require
or pump failure. You can choose from two solenoid more cooling. However, if the ambient temperature is
vent-valve options; the TAV5 which covers most auto-
above 35 ˚C you must water-cool the pump.
venting applications, and the TAV6 which has a higher
Water cooling reduces the running temperature of
conductance than the TAV5 and is designed either for
use on larger chambers (typically with a volume greater the pump motor and bearings and is particularly
than 10 litres), or when you want to use a two-stage recommended when you operate the pump with a
venting procedure for the fastest possible vent times. continuous high throughput (that is, inlet pressure
For two-stage venting you need two TAV valves. By above 1 x 10-3 mbar) or when you bake the pump to
using the appropriately restricted flow for the first stage above 115 ˚C (measured at the system flange). Water
vent-valve you can start venting when the pump is still cooling accessories need to be purchased separately.
at full rotational speed. Once the pump has slowed to
half rotational speed you can then introduce higher flow Scope of Supply
rates from the second stage vent-valve. EXT75DX and For end users desiring front panel controls and
nEXT also have the facility for pulsed venting to allow
indications we suggest the following:
rapid yet controlled venting of a system.
• TIC controller with EXT75DX and nEXT
Inlet-screen • TAG controller with EXT75DX and nEXT
A coarse inlet-screen is fitted as standard to all EXT
Each EXT or nEXT pump is supplied with an inlet screen,
pumps and supplied with nEXT pumps. The inlet‑screen
elastomer or copper gasket inlet seal (as appropriate)
prevents debris from falling into the pump-inlet.
and manual vent valve. Where required a water cooling
Coarse and fine inlet-screens are available.
accessory is available. Turbo controllers require the
appropriate mains cable to be selected.
Corrosive Applications
For maximum life and reliability in the exacting process
conditions encountered in semiconductor wafer
processing applications, we recommend that you use
turbomolecular pumps from our Edwards STP-C and
STP-H-C series. These Maglev pumps have magnetic
bearings and are ideal for these harsh duty applications.
Turbomolecular
252. Pumps
nEXT TURBOMOLECULAR PUMP
THE NEW EXPERIENCE IN TURBOMOLECULAR PUMPS
The nEXT is a hybrid bearing compound turbomolecular pump. nEXT pumps combine our proven
bearing technology (oil lubricated ceramic lower bearing with dry permanent magnetic upper
bearing), an improved rotor design with a new molecular drag stage to deliver improved pumping
speed and compression ratios, and user serviceability. They feature 24 V to 48 V d.c. sensor less
motors with a built in drive that is fully compatible with our range of TAG and TIC controllers.
They are available pre-set for either 80 W or 160 W maximum power, the former enabling use with
our 100 W TIC controllers are also recommended for pumping Argon, but with a longer ramp time
to full operating speed. RoHS compliant and CSA/UL approved.

• Value for money – exceptional pumping speeds and • Mass spectrometry
compression ratios • Electron microscopy
• No unplanned downtime – field proven reliability in • Research and development
the most demanding environments • High energy physics
• Easy integration – standard fit in many • Industrial
scientific instruments
• Reliability for peace of mind – over 200,000 Pump Range
turbomolecular pumps installed nEXT
• Low cost of ownership – end user serviceable -- nEXT240
-- nEXT300
-- nEXT400
Turbomolecular
Performance Curves
RoHS compliant and CSA/UL approved.
nEXT240 Turbomolecular Pump

nEXT240 nEXT240 Performance Curve
Inlet pumping speed ls-1 300
nEXT240D
240 N2 250 1
2
230 He 200
3
4
ls-1 -1 )
165 H2
(ft 3 min
150
Compression ratio
100
> 1 x 1011
50
3 x 105
0
1 x 104 10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
0 (mbar)
10˚
nEXT240D Turbomolecular Pump ISO100 Inlet Flange B81200100 1 Argon
160 W
2 Nitrogen
nEXT240D Turbomolecular Pump ISO100 Inlet Flange, 80 W B81200101
3 Helium
nEXT240D Turbomolecular Pump CF100 Inlet Flange 160W B81200200
4 Hydrogen
nEXT240D Turbomolecular Pump CF100 Inlet Flange, 80 W B81200201
nEXT 240T HC Turbomolecular Pump ISO100 Inlet Flange 160 W B81300100
nEXT 240T HC Turbomolecular Pump CF100 Inlet Flange 160 W B81300200

nEXT300D
350
300 N2 1
2
300 3
340 He 4
(ft 3 min -1 )
250
280 H2
ls-1
200
Compression ratio 150
> 1 x 1011 100
50
1 x 106
0
5 x 104 10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
0
(mbar)

nEXT300D Turbomolecular Pump ISO100 Inlet Flange B82200100 1 Argon
160 W
2 Nitrogen
3 Helium
nEXT300D Turbomolecular Pump CF100 Inlet Flange 160 W B82200200
4 Hydrogen
Turbomolecular
254. Pumps
400 N2 450 nEXT400D

1
400
390 He
2
3
350 4
325 H2 300
250
Compression ratio 200
> 1 x 1011 150
100
1 x 108
50
5 x 105 0
-6 -5 -4 -3 -2 -1
10 10 10 10 10 10 010˚ (mbar)
nEXT400D Turbomolecular Pump ISO160 Inlet Flange 160 1 Argon
B83200300
W
2 Nitrogen
3 Helium
nEXT400D Turbomolecular Pump CF160 Inlet Flange 160 W B83200400
4 Hydrogen
Turbomolecular
Dimensions
nEXT dimension
(20x) Ø8.4
Envelope Vent Port
1/8” BSP (Interstage) 18
º
Electrical Drive Unit
(32x) R4.2
4 holes M8 x 12 deep R90.55
º
30
base mounting holes R69.2
and fan mountings R65.1
(supplied with feet
Body Purge fitted but not shown)
Port 1/8” BSP
22.5º
24-48 V Supply
87.65
15
Envelope Vent Backing Port NW25 Ø124 PCD mounting points
Port 1/8” BSP
45º
nEXT240 Dimension
Ø 152
Ø 129.9 Ø 159.5
20
12
89.5 (C of G)
83.1 (to vent)
116 (C of G)
147.3 (to purge)
154.4 (to ports)
162.4
189.5
197.5
133
130
nEXT300/400 Dimension
ØH ØK
ØA
P
G
L (CofG)
B (to vent)
C (C of G)
F (to purge)
E (to ports)
N
M
D
EARTH POINT (M5)
A B C D E F G H J K L M N P
nEXT300 129.9 88.7 117 195 159.9 152.8 12 159.9 87 152 81.1 200 164.9 20
nEXT400 179.9 88.7 102 195 159.9 152.8 12 159.9 87 202.4 100.4 209.5 174.4 20
Turbomolecular
256. Pumps
Technical Data
Units nEXT240 nEXT300 nEXT400
Inlet flange DN100 ISO-K or DN100 ISO-K or DN160 ISO-K or
DN100CF DN100CF DN160-CF
Inlet pumping speed ls-1 N2 240 300 400
He 230 340 390
H2 165 280 325
Compression ratio D / T N2 > 1 x 10 11
> 1 x 10 11
> 1 x 1011
He 3 x105 / 1 x106 1 x 106 / 3 x 106 1 x 108 / >1 x 108
H2 1 x 104 / 1.5 x 104 5 x 104 / 1 x 105 5 x 105 / 1 x 106

Backing port NW25
Vent/purge port BSPP ⅛”
Critical backing pressure D / T mbar 9.5 / 20 9.5 / 20 10 / 20
Maximum continuous inlet flow (nitrogen)
Water cooling (40 ˚C ambient) sccm 45 95 105
Forced air cooling (35 ˚C ambient) sccm 30 115 90
Natural convection (30 ˚C ambient) sccm 10 35 45
Maximum continuous backing pressure
Water cooling (40 ˚C ambient) mbar 6 6.8 7.5
Forced air cooling (35 ˚C ambient) mbar 4.8 7 7.5
Natural convection (30 ˚C ambient) mbar 1 2.8 4
Recommended backing pump* RV12/nXDS10i
Normal rotational speed rpm 60,000
Start time to 90% speed D / T 160 W sec 115 / 140 155 / 175 175 / 200
Sound pressure level at 1 m dB(A) < 45 (+/-3)
Mass (kg) D (T) ISO 5.7 (6) 6.5 (6.8)
CF 8.8 (9.1) 8.5 (8.8) 9.5 (9.8)
Recommended controller TIC200 Turbo and Instrument Controller or TAG
Maximum temperature CF flange
Water cooled/air cooled °C 120/115
Ultimate pressure with RV backing pump ISO/CF mbar < 6 x 10-8/< 5 x 10-10 < 6 x 10-8/< 5 x 10-10 < 1 x 10-8/< 1 x 10-10
Maximum magnetic field pump can tolerate mT 5
Quiescent electric power W (Power set to 160 W) Typically 20
Min water cooling flow rate (water 15 °C) ls-1 15

Water temperature range °C 10 to 20
* a smaller backing pump may be used depending on application.
Turbomolecular
EXT TURBOMOLECULAR PUMP
Edwards is a world leader in the design and manufacture of turbomolecular pumps with over 200,000
units installed worldwide. The range of products includes the EXT75DX compound turbomolecular
pumps that combine the proven technology of a ceramic mechanical lower bearing, a dry permanent
magnetic upper bearing and Holweck drag stage with the added convenience of an on-board
controller and a 24 V d.c. motor.

• Compact design with high performance for • Mass spectrometry.
efficient systemisation. • Electron microscopy.
• Permanent magnetic upper bearing and oil lubricated • Research and development.
bottom bearing for reliable running. • High energy physics.
• Compatible with Edwards TAG and TIC turbo and • Industrial.
instrument controller meaning you can add up to
3 vacuum gauges without the need of an additional Pump Range
gauge controller. -- EXT75DX
• RoHS compliant and CSA/UL approved.
Turbomolecular
258. Pumps
Performance Curves
EXT75DX Turbomolecular Pump
EXT75DX
Inlet pumping speed ls-1 Product description Order no:
EXT75DX DN63ISO-K B72241000
ISO63/CF63, 61, 42, 66 N2
DN40NW) EXT75DX DN63CF B72242000
57, 49, 59 He
(ISO100) EXT75DX DN40NW B72243000
53, 48, 54 H2
EXT75DX DN100ISOK B72245000
Compression ratio
EXT75DX DN100ISO-K (DN25NW Backing) B72246000
> 1 x 1011
EXT75iDX Turbo Pump DN40NW B72235000
1 x 106
EXT75iDX Turbo Pump DN63ISO-K B72237000
5 x 104 EXT75iDX Turbo Pump DN63ISO-K B72238000
Ordering information (NW25 Interstage)
EXT75DX Performance Curve

1
100 10
75
( ls -1 )
50 0
10
3 2
25
2 EXT75DX
(ls -1ls)-1
-1
0 10
mbar
-6 -5 -4 -3 -2 -1 0
10 10 10 10 10 10 10 (mbar)
-4 -3 -2 -1 0 1 2
10 10 10 10 10 10 10 (Pa)
-2
10
1 Nitrogen EXT75DX
-3
2 Helium 10
-4 -3 -2 -1 0
10 10 10 10 10 (mbar)
3 Hydrogen
-2 -1 0 1 2
10 10 10 10 10 (Pa)
1 Nitrogen
Dimensions 2 Helium
EXT Dimension
A Manual vent valve in vent port D Backing port G Podule connector socket
B Podule E Purge port (blanked off) H Earth connection
C Logic interface connector F Interstage port (EXT75iDX only)
Turbomolecular
Technical Data
Units EXT75DX
Inlet flange DN40NW, DN63ISO-K, DN63CF or DN100ISO-K
Outlet flange DN16NW
Pumping speed NW40 ISO/CF63 ISO100
N2 ls -1
42 61 66
He ls-1 49 57 59
H2 ls -1
48 53 54
Compression ratio
N2 > 1 × 1011
He 1 x 106
H2 5 x 104
Recommended backing pump E2M0.7/XXD1/RV5/nXDS6i
Vent port inch BSP ⅛
Purge port inch BSP ⅛
Maximum continuous inlet pressure
(light gas pumping)†
Water cooling mbar 2 × 10-2
(water at 15 ˚C, ambient temp at 40 ˚C)
Forced air cooled, 35 ˚C ambient mbar 1 × 10-2
Pump rotational speed
Nominal rotational speed rpm 90000
Standby rotational speed rpm Variable from 49500 to 90000 (63000 default)
Programmable power limit settings W Variable from 50-120
(80 W default)
Start time to 90% speed sec 110 ‡
Analogue outputs Pump rotational speed; Power consumption; Pump temperature;
Controller temperature
Cooling method Δ Forced air/water
Ambient air temperature for forced air cooling ˚C 5-35
Minimum cooling water flow rate (water 15 ˚C) lh -1
15
Water temperature range ˚C 10-20
Maximum inlet flange temperature ˚C 100
Operating attitude Vertical and upright, through to horizontal
Noise level at 1 m dB(A) < 50
Maximum magnetic field pump can tolerate mT 5
Recommended controller TIC100 turbo and instrument controller or TAG
Quiescent electrical power W 10
Weight kg 2.93.04.9 3.2
† Above this inlet pressure, rotational speed drops to below nominal.

‡ Power limit set to 80 W.
Δ Air and water cooling accessories must be ordered separately.
Turbomolecular
260. Pumps
Water-cooler Vibration Isolator
Product description Pump Order no: Product description Order no:
nEXT water cooler nEXT240/300/400 B80000815 DN63CF B58101000
WCX water-cooler WCX250 EXT75DX B73600121 DN63ISO-K B58115000
DN100ISO-K B58120000
Inlet Screens
DN100CF B58105000
Spares Pump Inlet Flange Order no:
Size VRX Vent-Restrictor
Inlet flange seals with integrated inlet screen Product description Orifice Diameter (mm) Order no:
100 coarse nEXT240/300 DN100ISO B81000808 VRX10 0.1 B58066021
100 fine nEXT240/300 DN100ISO B81000809 VRX20 0.2 B58066022
160 coarse nEXT400 DN160ISO B80000825 VRX30 0.3 B58066023
160 fine nEXT400 DN160ISO B80000826 VRX50 0.5 B58066024
ISX inlet-screen VRX70 0.7 B58066025
100 coarse nEXT240/300 DN100CF B81000821
TAV vent-valve
100 fine nEXT240/300 DN100CF B80000822
160 coarse nEXT400 DN160CF B80000823 Product description Order no:
160 fine nEXT400 DN160CF B80000824 TAV5 vent-valve B58066010
63 EXT75DX DN63ISO/ B72240860 TAV6 vent-valve B58066020

DN63CF
100 EXT75DX DN100ISO B81000808 Vent-port adaptor
Inlet flange seals Product description Order no:
DN40NW Co-seal, fluoroelastomer B27158453 Vent-port adaptor B58066011
ISO63 Trapped O-ring, fluoroelastomer B27158170
63CF copper compression gasket (pack of 10) C10007490 nEXT bearing service parts and tools
100CF copper compression gasket (pack of 10) C10009290
160CF copper compression gasket (pack of 5) C10011290
Oil cartridge tool kit B80000812
BX bake out band on application
Bearing tool kit B80000805
Vibration isolator on application
Oil cartridge B80000811
Bearing and oil cartridge B80000810
Pump-to-controller cables
DX/nEXT pump profibus communications module D39755000
1 m cable D39700835 Purge-Restrictors
2 m cable D39700836
5 m cable D39700837
PRX10 purge-restrictor B58065001
Air-cooler
Interface cables
Product description Pump Order no:
ACX75 EXT75DX B58053075
TIC logic interface cable D39700833
nEXT Axial air cooler nEXT240/300/400 B58053185
nEXT Radial air cooler nEXT240/300/400 B58053175 TIC RS232 interface cable 2 m D39700834
nEXT Axial air cooler nEXT240/300/400 B58053180

with connector Active gauge cables
nEXT Radial air cooler nEXT240/300/400 B58053170
with connector Product description Order no:
0.5 m D40001005
1m D00001010
Other cable lengths also available
Please contact Edwards for further details
Turbomolecular
T-STATION 75 TURBOPUMPING SYSTEM
The T-Station 75 is Edwards’s entry level Turbopumping system. It combines our proven EXT75DX with
a choice of either an oil sealed E2M1.5 backing pump or an XDD1 diaphragm pump where a totally
dry solution is desired.
The T-Station comes with our TAG (Turbo and Active Gauge) controller fitted as standard which
enables single button start/stop of the system, the ability to control one of our Active Gauges*, vent
valve control*, and delayed start to either time or pressure if a gauge is fitted making the T-Station
ideal for general laboratory needs.
* Gauges and TAV5 vent valve must be purchased separately.

• Fully assembled and ready to use.
• Control of turbopump, backing pump and optional
gauge from integrated controller.
• NW40, ISO63 or CF63 inlet flanges.
• Choice of backing pumps, E2M1.5 oil sealed
pump. T-Station 75W or XDD1 diaphragm pump
T-Station 75D.
• Delayed turbo start option for pumping
larger volumes.
Applications
• General laboratory applications.
• Spectroscopy.
• Surface analysis.
• Small coating systems.
• Vacuum tube manufacturing.
Turbomolecular
262. Pumps
Dimensions
T-Station Dimension Pumping system view
270
218
202
395
350
T-Station 75W
208
202
395
350
T-Station 75D
Turbomolecular
Technical Data
Units T-Station 75 Units T-Station 75
Pumping speed for N2 Exhaust flange
NW40 ls-1 42 11 mm OD Nozzle or
E2M1.5
⅜ inch BSP
ISO63/CF63 ls -1
61
Fitted silencer or
Compression ratio for N2 > 1 x 1011 XDD1
⅛ inch BSP
Backing pump speed @ 50 Hz Weight
E2M1.5 m3h-1 1.6 E2M1.5 kg/lb 22/48
XDD1 m3h-1 1.2 XDD1 kg/lb 18/40
Ultimate pressure mbar < 5 x 10-8 Noise level dB(A) 55.4
Inlet flange NW40, ISO63 or CF63 Leak tightness ls-1 < 1 x 10-6 mbar
Operating temperature range ˚C/F 10 to 40/50 to 104
T-Station 75
T-Station 75D NW40 200-230 V 50/60 Hz TS75D1001
T-Station 75D NW40 100-120 V 50/60 Hz TS75D1002
T-Station 75D ISO63 200-230 V 50/60 Hz TS75D2001
T-Station 75D ISO63 100-120 V 50/60 Hz TS75D2002
T-Station 75D CF63 200-230 V 50/60 Hz TS75D3001
T-Station 75D CF63 100-120 V 50/60 Hz TS75D3002
T-Station 75W NW40 200-230 V 50/60 Hz TS75W1001
Electrical supply cable
T-Station 75W NW40 100-120 V 50/60 Hz TS75W1002 Product description Order no:
T-Station 75W ISO63 200-230 V 50/60 Hz TS75W2001 2 m electrical supply cable for 1-ph pumps, A50508000
T-Station 75W ISO63 100-120 V 50/60 Hz TS75W2002 no plug
T-Station 75W CF63 100-120 V 50/60 Hz TS75W3002 2 m electrical supply cable for 1-ph pumps, A50507000
North America/Japan plug
T-Station 75W CF63 200-230 V 50/60 Hz TS75W3001
2 m electrical supply cable for 1-ph pumps, A50506000
North European plug
Gauge 2 m electrical supply cable for 1-ph pumps, UK, A50505000
Three-pin plug
AIM-X Active inverted magnetron gauge D14642000 Mist filter
APG100 Active Pirani vacuum gauge D02603000
APGX-H Active Linear convection gauge D02391000 Model EMF3 mist filter A46220000
WRG-S Active wide range gauge D14701000
Vent valve
Active gauge cable
Product description Order no: TAV5 Vent valve 24 V DC ¼ Bsp B58066010
0.5 m Active gauge cable D40001005
1 m Active gauge cable D40001010
Turbomolecular
264. Pumps
nEXT TURBOPUMPING STATION
Our range of nEXT turbopumping stations build on our previous generation, but with a simplified
ordering matrix and expanded range to include turbopumps with speeds from 42 ls-1 to 400 ls 1.
For pumping speeds from 42 ls-1 to 66 ls-1 we offer our trusted EXT75DX pump with a choice of
various wet and dry backing pumps and a Turbo and Instrument TIC100. For pumping speeds of
240 ls-1 to 400 ls-1 the nEXT turbopumping stations are based on our nEXT pumps offering the
additional flexibility of end-user serviceability plus a choice of backing pumps and a Turbo and
Instrument TIC200.
Features and Benefits Turbopumping stations fitted with E2M1.5 or

RV pumps come with an EMF mist filter fitted, and
• Value for money – exceptional pumping speeds and
those fitted with our class leading nXDS scroll pumps
compression ratios.
have an isolation valve fitted between the turbopump
• No unplanned downtime – field proven reliability in
and backing pump as standard. All turbopumping
the most demanding environments.
stations include 4 locking castor wheels, a bench-top
• Easy integration – standard fit in many scientific
mounting kit, built in air cooling and come configured
instruments.
to suit a wide variety of applications such as: UHV
• Reliability for peace of mind – over 200,000 turbo
systems; beam lines; load locks; surface science; high
pumps installed.
energy physics.
• Low cost of ownership – end user serviceable.
Turbomolecular
Ordering
‘Plug and play’ turbopumping station
Everything about our new range of nEXT turbopumping stations has been developed to provide a comprehensive
vacuum solution with the latest technological advances for easy installation and operation.
A simplified ordering matrix and expanded range, to include turbopumps with speeds from 42 ls-1 to 400 ls-1,
enables you to select the most appropriate combination for your application, fully assembled and ready to go.
1. Choose your turbopump 2. Choose your backing pump 3. Select your voltage
OIL SEALED DRY
E2M1.5 XDD1
1.6 m3h-1 1.2 m3h-1
EXT75DX nEXT240 D or T
75 ls-1 240 ls-1
RV5 nXDS6i
5.1 m3h-1 6.2 m3h-1
nEXT300 D or T nEXT400 D or T RV12 nXDS10i

300 ls-1 400 ls-1 12 m3h-1 11.4 m3h-1
nXDS15i
15.1 m3h-1
nXDS20i
22 m3h-1
Ordering matrix
T S 0 0
Turbopump *
M EXT75DX Inlet Flange * Backing Pump Electrical Supply
B nEXT240D
C nEXT300D 1 DN40NW (EXT75DX) 1 E2M1.5 ‡ 0 Manual Vent 1 220-240 V 50/60 Hz (Europe)
D nEXT400D 2 DN63ISO-K (EXT75DX) 2 RV5 1 TAV5 Vent Valve 2 110-120 V 50/60 Hz (USA)
E nEXT240T 3 DN63CF (EXT75DX) 3 RV12 3 200 V 50/60 Hz (Japan)
F nEXT300T 4 DN100ISO-K (nEXT240/300) A XDD1 4 220-240 V 50/60 Hz (UK)
G nEXT400T 5 DN100CF (nEXT240/300) D nXDS6i
6 DN160ISO-K (nEXT400) E nXDS10i
7 DN160CF (nEXT400) F nXDS15i
G nXDS20i
* Turbopump and inlet flange must match as shown

‡ For Japan low volts on E2M1.5 please order the USA voltage variant, for all other pumps please order Japan version and specify
pumps please order Japan version and specify low volts on your order
Turbomolecular
266. Pumps
TURBO AND ACTIVE GAUGE (TAG)
CONTROLLER
Edwards Turbo and Active (TAG) controller is a small low cost pumping system controller, suitable for
a wide range of vacuum applications, and compatible with all Edwards EXT and nEXT turbomolecular
pumps. The large LED display shows the pump speed or vacuum pressure, and an easy to use push
button interface enables ease of operation and control. The TAG controller will also run a backing
pump, air vent valve, an air cooler and an Edwards active gauge, making the TAG a versatile system
controller. This compact 24 V controller is ideal for use on bench tops or suitable mobile platforms
where space is limited, yet functionality and reliability are essential.
NOTE: TAG controller does not contain an in-built power source, a 24 V power supply is available from Edwards or users must
supply their own.
Features and benefits Gauge control and display functions

• Control of a single Active gauge: APG, AIM, ASG
Turbopump control capabilities
or WRG gauge.
• Turbopump start/stop.
• Choice of pressure display: mbar, Torr, Pascal or volts.
• Display pump speed as % of full speed.
• Zero adjustment/calibration of gauges.
• Visual performance display; acceleration, deceleration
• Use of gauge signal to start/stop the turbopump.
or normal running.
• Control of a single vent valve when connected to
the turbopump controller with choice of three
Backing pump control, plus more
• TAG has the additional capability to control a
vent modes.
backing pump.
-- Vent when pumping speed drops below 50%
• 24 V XDD1 may be connected directly and will share
-- Controlled vent from full speed then hard vent
power with TAG/turbopump.
at 50%.
• nXDS and XDS35i pumps can be controlled by the
-- Fan mode, continuous power to the vent port so the
TAG logic interface.
system will not vent. Alternatively it may be used to
• Other mains backing pumps may need a relay
power an air cooler connected directly to the pump.
(see instruction manual for details).
• A single 24 V isolation valve can be controlled and
powered from the TAG.
• For pumping large chambers the TAG allows delayed start
of the turbopump to either a time or pressure set point.
Turbomolecular
Dimensions
TAG Controller Configuration
A TAG controller
E
B Mains cable/line cord
D C WRG-S-NW25
F D Backing pump
E Turbomolecular pump
F Air-cooler
B
G XDD/DX/EXDC extension cable
G
H H XDD/DX/EXDC extension cable (optional)
K J Active gauge cable
J K Power supply
A
C
B
Technical Data
TAG Controller
Max input power 240 W Ordering information
Mains input
Electrical supply 24 V d.c.
Power consumption (max) 5W
Auxiliary terminals
Air cooling fan 24V d.c. 3.6 W max
Turbo pump 24V d.c. 160 W max Product description Order no:
Dimensions 96 x 48 x 165 mm TAG Turbo and active gauge controller D39592000
Mass 0.3 kg Linecord

Operating temp 0 to 40 °C
Storage temp -30 to 70 °C Product description Order no:
90% RH non-condensing Linecord 2 m North Euro Plug D40013030
Max ambient operating humidity
at 40 ˚C Linecord 2 m UK Plug D40013025
Max operating altitude 2000 m Linecord 2 m with US Plug D40013120
IP20
Enclosure rating
IP40 when panel mounted Extension Cable
XDD/DX/EXDC Extension Cable 1 m D39700835
Power Supply
200 W power supply D39592800
Turbomolecular
268. Pumps
TIC TURBO AND INSTRUMENT CONTROLLER
A compact turbo controller with a large clear graphical display, an intuitive user interface and serial
communications providing full remote control and data logging functions via a new Windows™ based
PC program. The controller automatically recognises and supports one 24 V turbomolecular pump
from the EXT/nEXT range. Cooling and vent valve support is provided directly from the controller.
Mains backing pumps (up to nXDS20i/RV12) may be controlled via an optional relay box. Two different
power variants are available, 100W or 200W which determines the ramp speed of the turbo pump. In
addition 200W models have the ability to power a 24V d.c. backing pump such as our XDD1 or nXDS
through a 15-way ‘D’ socket. Turbo and instrument models add the ability to control up to 3 of our
range of Active gauges.

• TIC automatically recognises and controls one 24 V • In most instances, TIC systems may be simply and
turbomolecular pump from either the nEXT, DX or quickly configured using the range of standard cables
EXDC ranges. nEXT and DX turbos have full serial on offer, there is therefore no need for the customer
communication with TIC and may be both configured to prepare loom assemblies or relay boxes and
and report status via TIC. special interfaces.
• Both mains and 24 V backing pumps may be • TIC is packaged in a compact case and may be panel
controlled by TIC. For larger vacuum systems or rack (¼ 19 inch rack 3U) or bench mounted. With
the TIC may control mains backing pumps, up to the addition of the bezel it becomes an attractive
and including nXDS10i and RV12, via the optional bench‑top instrument. The large 128 x 64 pixel
relay box. backlit graphics LCD and mobile phone style menu
• The optional external relay box enables mains system simplifies programming and with a choice
backing pumps to be controlled and also provides of summary screens excellent visibility of displayed
interfaces for a turbo heater band, a backing parameters is assured.
line isolation valve and a logic bypass. See relay
box section.
Turbomolecular
Technical Data
TIC Turbo and Instrument Controller – Back view

① Gauge inputs (FCC68 (RJ45)
(turbo & instrument only)
1
② Logic interface (25-way 'D' socket)
③ Backing pump 24 V (15-way 'D' socket)
(TIC200 only)
④ Turbo Pump 24 V (15-way 'D' socket)
2 ⑤ RS232/485 (9-way 'D' socket)
⑥ Earth stud (M4)
3 ⑦ Mains input (CEE/IEC 320 plug)
9
⑧ Mains on/off switch
⑨ Auxiliary vent valve and fan terminals
4 (24 V supply) 4-way screw term.
8 7 6
TIC Turbo and Instrument Configuration

A TIC turbo and instrument controller, 200 W
E B Mains cable/line cord

C WRG-S-NW25
D Backing pump
F D E Turbomolecular pump
F Air-cooler
G XDD/DX/EXDC extension cable
H XDD/DX/EXDC extension cable (optional)
B J Active gauge cable
G
H
A
C
Turbomolecular
270. Pumps
Technical Data
Units TIC Turbo and Instrument Controller
Pump/TIC power W 100/200
EXT75DX Fast/Fast
nEXT 80 W Slow/Slow
nEXT 160 W Slow/Fast
Mains input
Electrical supply 90 to 264 V a.c. 47 to 63 Hz
Power consumption (max) 215 VA
Peak inrush current 10.3 A @ 110 V a.c./23.0 A @ 230 V a.c.
Earth stud M4
Auxiliary terminals
Air cooling fan 24 V d.c. 3 W max, ACX70, ACX75 & ACX250H
Vent valve 24 V d.c. 2 W max, TAV5 & TAV6
Dimensions
Electronics housing mm 110 high x 105 wide x 245 deep
Front panel mm 106 wide x 128 high
Weight kg 3.5
Operating temp ˚C +0 to +40
Storage temp ˚C -30 to +70
Max ambient operating humidity 90% RH non-condensing at 40 ˚C
Max operating altitude m 3000
Electronic Design EN 61010-1
Electromagnetic Compatibility EN 61326 Industrial Location, Class B Emissions
TIC Turbo and Instrument Controller

TIC Turbo & Instrument Controller, 100 W RS232 D39721000
TIC Turbo & Instrument Controller, 200 W RS232 D39722000
TIC Turbo Controller, 100 W RS232 D39711000
TIC Turbo Controller, 200 W RS232 D39712000
Extension Cable
Communications Module
XDD/DX/EXDC Extension Cable 1 m D39700835 Product description Order no:
XDD/DX/EXDC Extension Cable 2 m D39700836 TIC Profibus Communications Module D39754000
XDD/DX/EXDC Extension Cable 5 m D39700837 Active gauge cable
Linecord Product description Order no:
Product description Order no: 0.5 m Active gauge cable D40001005
Linecord 2 m UK Plug D40013025 1 m Active gauge cable D40001010
Linecord 2 m North Euro Plug D40013030 3 m Active gauge cable D40001030
Linecord 2 m With US Plug D40013120 5 m Active gauge cable D40001050
Turbomolecular
TIC RELAY BOXES
Two relay boxes are available for use with our TIC controllers:
- A small backing pump relay box is compatible with TIC turbo only and turbo and
instrument controllers
- A small backing pump and instruments relay box is compatible with TIC turbo and
instrument controllers
The small backing pump relay boxes are able to control mains backing pumps up to RV12/
nXDS10i. The relay box also controls a mains heater band and backing line isolation valve.
In addition the small backing pump and instrument relay box includes three 250 V a.c. 3 A
changeover relays, which are activated by the gauge open collector set point outputs.

• Enables TIC to control mains backing pumps, up to and
including nXDS10i and RV12.
• Provides interfaces for a turbo heater band, a backing line
isolation valve and a logic bypass. All relay boxes include a
logic bypass facility for further system integration.
• TIC relay is packaged in a compact case and may be panel or
rack (¼ 19” rack 3U) or bench mounted.
• TIC relay will operate from mains supplies with voltages up
to 240 V a.c.
Product Range
-- TIC Relay Box
Turbomolecular
272. Pumps
TIC Configuration A TIC200 turbo and instrument
B Mains cable/line cord
J
C Relay box
D APG100 Pirani gauge
E AIGX Ion gauge
F AIM Penning gauge
H
K G G nXDS scroll pump
H EXT/nEXT turbopump
J BX heater band
L
N K TAV5 vent valve
L ACX air cooler
M M TIC logic interface cable
Q
N IEC320 M/F cable
P P TIC logic interface cable
T R Q XDD/DX/EXDC extension cable
R TIC RS232 interface cable
S Active gauge cable
S C T PC with RS232 interface
S
D
B
E
Turbomolecular
TIC Relay Boxes
TIC Relay Box Sml Bkg D39711805
TIC Relay Box Inst & Sml Bkg D39721806
Linecord
Linecord 2 m North Euro Plug D40013030
Linecord 2 m UK Plug D40013025
Linecord 2 m With US Plug D40013120
Interface Cable
TIC Logic Interface Cable 2 m D39700833
TIC RS232 Interface Cable 2 m D39700834
Extension Cable
Technical Data
TIC Relay Boxes
Mains input
Connector type CEE/IEC320 inlet
Max rating 240 V a.c.
Earth stud M4
Heater band outlet
Max rating 240 V a.c. 1 A
Fuse 20 mm x 5 mm, 250 V, 1 A type F
Backing pump outlet
Max rating 240 V a.c. 10 A
Fuse 20 mm x 5 mm, 250 V, 10 A type T
Setpoint connector
Connector type 12-way positronic PLC plug
250 V a.c. 3 A (resistive) Dry non conducting
Max rating
atmosphere only or 30 V d.c. 3 A (resistive)
Mating half (supplied) 12-way positronic PLC socket with hood
Backing line isolation valve connector
Connector type 3-way DIN socket
Max rating 24V d.c. 0.5 A
Lead type 3 core 0,5 mm2
Weight 695 g
Operating temperature 0 to 40 ˚C
Storage temperature -30 to +70 ˚C
Max ambient operating humidity 90% RH non-condensing at 40 ˚C
Max operating altitude 3000 m
Electronic design EN61010-1
Turbomolecular
274. Pumps
STP MAGNETICALLY LEVITATED
TURBOMOLECULAR PUMPS
The STP magnetically levitated turbomolecular pumps are the first choice for high-up time,
hydrocarbon fre275e pumping. The multi-axis magnetic bearing system is used to suspend the
rotor during operation, ensuring there is no risk of contamination while minimising vibration, noise
and maintenance requirements. The STP pumps can be fully interfaced with advanced controllers
to operate on a wide range of applications and processes. They offer class leading pumping
performance demonstrating exceptional levels of reliability, and are widely accepted in the market
with the installed base of over 140,000 units worldwide.
Features & Benefits Applications

• Excellent pumping performance with speeds from 300 • Metal/Oxide/Silicon Etch.
to 4500l/s covers all potential turbo pump applications. • Ion Implant.
• Advanced material and designs provide class leading • Film deposition CVD.
performance in all classes. • Metrology and analytical instruments.
• Automatic Balancing System (ABS) and Automatic • Load lock and transfer chambers.
Vibration Reduction (AVR) offer very low noise and • PVD coating system.
vibration. • R&D applications.
• Magnetic bearing system will allow installation in any • Heat treatment.
angle.
• Field proven reliability. Pump Range
• Low cost of ownership.
STP Turbo Pump Range
• Wide range of remote signal available- I/O Remote,
• Integrated controller Series - STP-iX455, STP-iXL455,
RS232, RS485, Profibus (optional).
STP-iXR1606, STP-iXR2206, STP-iXA2206, STP-iXA3306
• RoHS Compliant and UL approved.
and STP-iXA4506.
• Ultra High Vacuum (UHV) Series- STP-301, STP-451, STP-
603, STP-1003.
• UHV Low Vibration Series - STP-L301, STP-L451.
• Advanced High Throughput Series - STP-H301,
STP-H451, STP-A803, STP-A1303, STP-A1603,
STP-A2203, STP-XA2703, STP-XA3203, STP-XA4503.
• STP turbo pump series provide a wide range of product
offering to suit all high vacuum pumping applications.
Turbomolecular
STP series have 4 basic product ranges
Integrated Controller Series

The integrated controller series can be fully interfaced with advanced
controllers to operate on a wide range of applications and processes. It
eliminates the need for a conventional, rack-mounted controller and
interconnecting cables. The fully integrated product offers easy installation
and small footprint as an all-in-one solution for all application tools.
• STP-iX455, STP-iXL455, STP-iXR1606, STP-iXR2206, STP-iXA2206, STP-iXA3306,
and STP‑iXA4506.
Ultra High Vacuum (UHV) Series

The multistage pure bladed rotors in the UHV pumps provide the high
vacuums required for clear beamlines on CD SEM machines, mass
spectrometers and ion implanters. They provide optimum pumping
performance with excellent light gas compression ratios.
• STP-301, STP-451, STP-603, STP-1003.
UHV Low Vibration Series

The low vibration series has been designed to meet the low vibration
requirements of advanced spectroscopy and metrology tools. It provides the
advantage of having the vibration system built into the pump body.
• STP-L301, STP-L451.
High Throughput Series

The high throughput pumps incorporate a Holweck drag stage that
increases the pumps throughput at low pressure. Their advanced rotor
design combined with selection of the best materials has allowed the
creation of the next generation of high throughput turbo pump inside the same
footprint as many of the existing models. The range contains pumps with
throughput speeds from 300 l s-1 to 4500 l s-1.
• STP-H301, STP-H451, STP-A803, STP-A1303, STP-A1603, STP-A2203,
STP‑XA2703, STP-XA3203, STP-XA4503.
Turbomolecular
276. Pumps
Proven magnetic bearing technology Safety Backup Bearings
The rotor is entirely suspended by multi-axis magnetic STP pumps have dry lubricated axial and radial
bearings so all contact between the rotor and the mechanical bearings as safety backup bearings. These
remainder of the pump is eliminated. As well as giving support the rotor and protect the pump in the event of
very low vibration, the elimination of contact means no a total disruption of magnetic suspension or a massive
bearing wear and no requirement for consequent pump air inrush which overcomes the magnetic bearing
maintenance. stiffness. These high precision ball bearings are dry
lubricated and are not in contact with the rotor during
Oil Free normal operation.
All STP turbomolecular pumps are oil free. The use of
magnetic bearings eliminates all hydrocarbon lubricants Corrosion Resistant
ensuring no contamination of the vacuum process To ensure a high level of resistance to corrosion, the
from the turbomolecular pump. This feature is vital in corrosion resistant (C) and high throughput pumps have
the semiconductor industry (where device densities nickel coated rotors/stators and pump internals suitable
are constantly increasing) and in surface science or for corrosive applications. Further enhanced levels of
high energy physics applications (where even minute protection are available on request.
degrees of contamination disrupt measurements).
Nitrogen Purging
Maintenance Free The corrosion resistant (C) pumps and the high
Unlike conventional mechanical bearings, magnetic throughput pumps have a nitrogen purge facility as
levitation means there is no frictional contact, standard, a constant flow of nitrogen through the pump
eliminating sources of wear and vibration. This feature dilutes corrosive gases minimising their damage to the
enables STP turbomolecular pumps to run for years pumps motor and sensor coils.
with virtually no maintenance, reducing annual
operating costs to a minimum and ensuring maximum TMS System
up-time is achieved. This maintenance free feature The Edwards Temperature Management System
can be particularly beneficial on processes producing is available on a wide range of turbo pumps. It is
chemical or radioactive contamination. designed to optimize the temperature within the
pump, dramatically reducing the particle condensation
Vibration Free within. This will not only considerably enhance the
Magnetic levitation of the rotor results in an extremely performance of the pump under harsh process
low level of noise and vibration. Peak-to-peak vibration conditions, but also increase its operational life. Higher
level is less than 0.02 μm. This amplitude remains temperature setting option is available for even more
constant throughout the life of the pump and is free harsh processes.
from troublesome sub-harmonics.
Turbomolecular
STP INTEGRATED CONTROLLER PUMP
The STP integrated controller pump series provide industry-leading performance and features a
compact size integrated on-board control unit. An integrated controller eliminates the need for a
conventional, rack-mounted controller and interconnecting cables. The pumping performance is
improved by the newest developed revolutionary rotor design. This fully integrated product offers
easy installation and small footprint as an all-in-one solution for all application tools.
Features & Benefits Applications

• Excellent pumping performance with speeds from • Metrology and microscopic applications.
300 to 4500 l/s. • Pre-clean process.
• Compact design with fully integrated controller and • Glass coating systems.
power supply eliminates cabling requirement. • Inline/Batch coating systems.
• Advanced rotor design technology offers class • Steel Degassing.
leading performance with compact size for all • Solid State Lighting.
classes. • Semiconductor and FPD Etching systems.
• Magnetic bearing system will allow installation in any
angle. On-board Pump Range
• Automatic Balancing System (ABS) and Automatic
STP-iX
Vibration Reduction (AVR) reduces vibration levels
-- STP-iX455
and provide stable operation. -- STP-iXL455
• Various communication available- I/O Remote, -- STP-iXR1606
RS232C, RS485, STP Link are standard ports, -- STP-iXR2206
Profibus® available as option. -- STP-iXA2206
• Protection level IP 54 (expect STP-iX455/iXL455). -- STP-iXA3306C
• Easy installation. -- STP-iXA4506C
Turbomolecular
278. Pumps
STP Integrated Series and the Environment
Reducing Energy Use Switching from Diffusion pumps to the latest Maglev
Reducing global energy consumption is key in the fight turbos from Edwards on an 80 pump glass coating line
against global warming. In addition to minimising the will dramatically reduce your carbon footprint by over
energy our production facilities and offices consume, 3,000 tonnes of CO2e / year.
STP integrated series enable our customers to meet their
energy reduction targets. Future proofing against carbon Economising by switching to the new generation of STP
taxes and potentially qualifying for ‘Green Giants’. Maglev turbo pumps
Example: Benefits of STP Maglev turbo pumps:
In the production of coated products, existing vacuum • Lower utility cost (Power and Water).
pump energy could account for >50% of the total energy • No yearly services or oil changes.
consumed by the process tool. With an installed base of • Increase pumping performance.
140,000 maglev turbo pumps globally in a wide range of • Very low ambient noise and low vibration.
applications, Edwards STP Maglevs typically reduce the • Reduced space requirements.
power consumption of Diffusion by < 90%.
Edwards HT10 Diffusion Pump vs Magnetically Levitated Turbo Pump
CO2 reduction per year

HT10 Diffusion Pump STP-iXA2206 % reduction
(tonnes)**
Power consumption 5.1 kW 0.2 kW* 96% 25.2 pa**
Water consumption 400 lh-1 120 lh-1 70%
EHT16 Diffusion Pump vs Magnetically Levitated Turbo Pump
CO2 reduction per year

HT16 Diffusion Pump STP-iXA3306 % reduction
(tonnes)**
Power consumption 9 kW 0.3 kW* 97% Pa**
Water consumption 700 lh-1 120 lh-1 83% 44.8
* At 300 sccm gas load power = 0.3 kW.

** Energy source units vs kW/h kg CO2= kWh 0.490 Source: Department for Environment, Food, Rural Affairs, UK.
STP-iX455 STP-iXL455 STP-iXR1606 STP-iXR2206 STP-iXA2206 STP-iXA3306 STP-iXA4506
Metrology ● ●
PVD Process ● ● ● ● ● ●
PVD Pre-Clean ● ● ● ● ● ●
Glass Coating ● ● ● ● ●
Inline/Batch coating ● ● ● ● ●
Solid State Lighting ● ● ● ● ●
Oxide Etch ● ● ●
Metal Etch ● ● ●
Solar Cells
A photovoltaic solar cell (PV cell) is a semiconductor device which, in the presence of light, generates electricity. Solar
cells provide clean renewable energy, producing zero air pollution, hazardous waste or noise.
Turbomolecular
Enabling Environmental Technology
Biofuel Production offer considerable energy savings compared to the
The term biofuel applies to any solid, liquid or gaseous traditional multi-stage steam ejector systems, backed
fuel produced from organic (once-living) matter. The with liquid ring pumps.
word biofuel covers a wide range of products, some of
which are commercially available today and some of
Solid State Lighting
which are still in research and development.
Solid-state lighting sources, such as light emitting diodes
(LEDs), offer energy savings and environmental benefits
Glass Coating compared to traditional incandescent or fluorescent
Vacuum coated glass is primarily used to control the lamps. In some cases they can offer a 95% energy saving
solar generated thermal energy load on buildings. over conventional lighting systems.
Multiple layers comprising exotic metal oxides create
infrared reflecting properties. Reducing the heat load
on buildings reduces the need for electrical power to
run air conditioning in hot countries. Conversely in cold
countries these same reflective properties are used to
retain heat and reduce fuel used for heating. We expect
the trend to accelerate as sustainable building principles
become part of International building design standards.
Steel Degassing
Vacuum degassing (VD) and vacuum oxygen
decarburisation (VOD) are used in the production of
speciality steel alloys to reduce the levels of hydrogen,
carbon and other impurities during the secondary steel
making process. Edwards dry mechanical vacuum pumps
STP-iXA4506 STP-iXR1606
STP-iXA4506
STP-iXR1606
Peak Pumping Speed
Peak Pumping Speed
N2 3800 ls-1 / 4000ls-1/ 4300ls-1
N2 1000 ls-1 / 1600 ls-1
H2 2700 ls-1 / 2700ls-1/ 2700ls-1
H2 800 ls-1 / 1200 ls-1
Compression Ratio
Compression Ratio
N2 > 10 8
N2 > 10 8
H2 103
H2 1 x 103
Ultimate pressure
10-7 Pa
STP-iXA2206C STP-iXA3306C
Peak Pumping Speed Peak Pumping Speed
N2 2200 ls -1 N2 2650 ls-1 / 3200 ls-1
H2 1900 ls-1 H2 2050 ls-1 / 2300 ls-1

Compression Ratio Compression Ratio
N2 > 10 8 N2 > 10 8
H2 1 x 104 H2 1 x 103
Order Info Order Info Order Info Order Info

Pg- 283 Pg- 281 Pg- 282 Pg- 282
Turbomolecular
280. Pumps
STP Sectional View Showing Key Features
2
4
5
8
3
9
6
Key
1. Advanced design rotor realizes high performance and compact size. (Reduced pump height and diameter)
2. Latest magnetic bearing technology provides lower power consumption compare to the existing models and
stable operation
3. Upper and lower safety back up bearings support the rotor and protect the pump in the event of a total
disruption of magnetic suspension or a massive air inrush
4. Optimised holweck stages (except for STP-iX455 and iXL455 which have whole bladed rotor) bring high
throughput performance.
5. Reliable on-board platform with reduced power consumption and optimum heat structure
6. IP54 rated specification for protection against water and dust. It is innovatively designed to work in humid and
high ambient temperatures.
7. Efficient motor technology enables to reduce power consumption at high flow condition
8. Purge port can be fitted as an option for all models. (Standard on STP-iXA3306C and STP-iXA4506C)
9. Flexible communication interface - I/O remote, RS232C/RS485 and STP-link port are equipped as standard,
Profibus is available as an option.
Turbomolecular
Performance Curves
STP-iX455 Turbomolecular Vacuum Pump STP-iXL455 Turbomolecular Vacuum Pump

STP-iX455 STP-iXL455
N2 300 ls /450 ls-1 -1
N2 300 ls-1/380 ls-1
H2 300 ls-1/460 ls-1 H2 300 ls-1/380 ls-1
N2 > 10 8
N2 > 10 8
H2 1 x 10 4
H2 1 x 104
Ultimate pressure Ultimate pressure
6.5 x 10-6 order Pa 6.5 x 10-6 order Pa

STP-iX455 Turbomolecular pump ISO100K PT640Z010 STP-iXL455 Turbomolecular pump ISO100K YT642Z030
STP-iX455 Turbomolecular pump ISO160K PT640Z020 STP-iXL455 Turbomolecular pump ISO160K PT642Z020
STP-iX455 Turbomolecular pump DN100CF PT640Z050
STP-iX455 Turbomolecular pump DN160CF PT640Z060
STP-iX455 Performance Curve10 -3 -2 -1

10
0
STP-iXL455 Performance Curve
10 10 (Torr)
-3 -2 -1 0
10 10 10 10 (Torr) -3 -2 -1
10
0
6 10 10 10 (Torr)
10
6 6
10 10
1
5 1
10 1 5
10
5
10
(CR)
(CR)
1 He 1 He
(CR)
2 H2 2 H2
4
10 10
4
4 2 2
10
2
3
3 10
10 -3 -2 -1 0
-3 -2 -1 0 10 10 10 10 (mbar)
10 10 10 10 (mbar)
3
10
-3 -2 -1 0 0 (pa)
10 10
0
10 10 (mbar)
(pa)
10 - 1 10 10 1 10 2
10 - 1 10 10 1 10 2
0 (pa)
10 - 1 10 10 1 10 2
104
10
-6
10
-5
10
-4
10
-3
10
-2 (Torr)
10
-6
10
-5
10
-4
10
-3
10
-2 (Torr)
4
10
10
-6
10
-5
10
-4
10
-3
10
-2 (Torr)
4
10 10 3
3 1 2 3
4 10
10
( ls -1 )
(ls-1)
3 4
10 2
5
6
( ls -1 )
10 2
10
3
10
( ls -1 )
2
10 10
1
10
-4
10
-3
10
-2
10
-1
10
0 (pa)
2
10
101
1 10-4 10-3 10-2 10-1 100 (Pa)
10
10
-4
10
-3
10
-2
10
-1
10
0 (pa)
10-6 10-5 10-4 10-3 10-2 (Torr)
1
10
10
-4
10
-3
10
-2
10
-1
10
0 (pa)
1 N2 450 ls-1 (ISO160, VG150) 1 N2 380 ls-1 (ISO160, VG150)

2 H2 460 ls-1 (ISO160, VG150) 2 H2 380 ls-1 (ISO160, VG150)
3 N2 300 ls (ISO100, VG100)
-1
3 He 390 ls-1 (ISO160, VG150)
4 H2 300 ls-1 (ISO100, VG100) 4 N2 300 ls-1 (ISO100, VG100)
5 H2 300 ls-1 (ISO100, VG100)
6 He 280 ls-1 (ISO100, VG100)
Turbomolecular
282. Pumps
STP-iXR1606 Turbomolecular Vacuum Pump STP-iXR2206 Turbomolecular Vacuum Pump
STP-iXR1606 STP-iXR2206
N2 1000 ls /1600 ls
-1 -1
N2 2200 ls-1
H2 800 ls /1200 ls
-1 -1
H2 1350 ls-1
N2 > 10 8 N2 > 10 8
H2 1 x 103 H2 1 x 103

STP-iXR1606 Turbomolecular pump ISO160F YT790Z070 STP-iXR2206 Turbomolecular pump ISO250F YT850Z000
STP-iXR1606 Turbomolecular pump VG150 YT790Z080 STP-iXR2206 Turbomolecular pump VG250 YT850Z010
STP-iXR1606 Turbomolecular pump ISO200F YT790Z010 STP-iXR2206 Turbomolecular pump DN250CF YT850Z020
STP-iXR1606 Turbomolecular pump VG200 YT790Z020 STP-iXR2206 Turbomolecular pump ISO250F YT850Z030
Profibus
STP-iXR1606 Performance Curve STP-iXR2206 Performance Curve
Turbomolecular
STP-iXA2206 Turbomolecular Vacuum Pump STP-iXA3306C Turbomolecular Vacuum Pump
STP-iXA2206 STP-iXA3306C

N2 2200 ls-1 N2 2650 ls-1/3200 ls-1
Ar 1900 ls-1 H2 2050 ls-1/2300 ls-1
N2 > 10 8 N2 > 10 8
H2 1 x 104
H2 2 x 103
Ultimate pressure
> 10 -7 Pa

STP-iXA2206C ISO250F YT810Z010 STP-iXA3306C ISO250F YT820Z020
STP-iXA2206C VG250 YT810Z020 STP-iXA3306C VG250 YT820Z030
STP-iXA2206C DN250CF YT810Z030 STP-iXA3306C ISO320F YT820Z040
STP-iXA2206C ISO250F Profibus YT810Z040 STP-iXA3306C VG300 YT820Z050
STP-iXA3306C ISO250F with Profibus YT820Z060
STP-iXA3306C ISO320F with Profibus YT820Z070
STP-iXA2206 Performance Curve STP-iXA3306C Performance Curve

104
103
STP-iXA3306
ISO250F/VG250
2050 ls-1 H2
ls-1
2300 ls-1 Ar
2650 ls-1 N2
102
101
10-4 10-3 10-2 10-1 100 Pa
10-6 10-5 10-4 10-3 10-2 Torr
104
103
STP-iXA3306
ls-1
ISO320F/VG300
2300 ls-1 H2
2800 ls-1 Ar
3200 ls-1 N2
102
101
10-4 10-3 10-2 10-2 100 Pa
10-6 10-5 10-4 10-3 10-2 Torr
Turbomolecular
284. Pumps
STP-iXA4506C Turbomolecular Vacuum Pump
STP-iXA4506
Peak Pumping Speed
N2 3800 ls-1/4000 ls-1/4300 ls-1
H2 2700 ls-1/2700 ls-1/2700 ls-1
Compression Ratio
N2 > 10 8
H2 103
Ultimate pressure
10-7 Pa
STP-iXA4506C Turbomolecular pump ISO320F YT780Z010
STP-iXA4506C Turbomolecular pump VG300 YT780Z100
STP-iXA4506C Turbomolecular pump ISO320F Profibus YT780Z050
STP-iXA4506C Turbomolecular pump VG300 Profibus YT780Z110
STP-iXA4506C Turbomolecular pump VG350 Profibus YT780Z060
STP-iXA4506 Performance Curve

104
103
STP-iXA4506C
VG300
ls-1
2700 ls-1 H2
3200 ls-1 Ar
3800 ls-1 N2
102
101
10-4 10-3 10-2 10-1 100 Pa
10-6 10-5 10 -4 10-3 10-2 Torr
104
103
STP-iXA4506C
ISO320F
2700 ls-1 H2
ls-1
3400 ls-1 Ar
4000 ls-1 N2
102
101
10-4 10-3 10-2 10-1 100 Pa
10-6 10-5 10 -4 10-3 10-2 Torr
104
103
STP-iXA4506C
VG350, VG400
ls-1
2700 ls-1 H2
3800 ls-1 Ar
4300 ls-1 N2
102
101
10-4 10-3 10-2 10-1 100 Pa
10-6 10-5 10-4 10-3 10-2 Torr
Turbomolecular
Dimensions
STP-iX455/iX455C Dimensions
D A
255 A
165
B
87
57
B
108
Ø 180
266
237
235
197
205
207
236
167
190
177
Ø1
06
30° 30°
4 x M12 x 25 C 120
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Inlet Flange ISO100ȭ
ȭ
DN100CF VG100 ISO160 DN160CF VG150
A 130 (5.12) 152 (5.98) 182 (7.17) 180 (7.09) 203 (7.99) 235 (9.25)

B 12 (0.47) 21 (0.83) 12 (0.47) 12 (0.47) 22 (0.87) 12 (0.47)

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STP-iXL455 Dimensions
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Inlet port
VG150 VG200 VG250 ISO160F ISO200F ICF250F ICF203 ICF253 ICF305
flange
ØA 235 300 350 225 285 335 203 253 305
ØB 237 237 237 237 237 237 237 237 237
C 15 16 16 15 16 16 22 25 28
D 420 380 380 420 380 380 420 418 380
ØE 210 270 320 200 260 310 181 231.8 284
F 22.5 22.5 15 22.5 15 15 9 7.5 5.625
G 8-Ø12 8-Ø15 12-Ø15 8-Ø12 12-Ø11 12-Ø11 20-Ø8.4 24-Ø8.4 32-Ø8.4
H 313 273 273 313 273 273 313 311 273
I 263 223 223 263 223 223 263 261 223
Turbomolecular
286. Pumps
STP-iXR2206 Dimensions
Inlet port flange VG200 VG250 ISO200F ISO250F ISF253 ICF305

A 300 350 285 335 253 305
B 269 269 269 269 269 269
C 16 16 16 16 25 28
D 405 375 405 375 420 400
E 270 320 260 310 231.8 284
F 22.5° 15° 15° 15° 7.5° 5.625°
G 8-15 12-15 12-11 12-11 24-8.4 32-8.4
H 301 271 301 271 316 296
I 249 219 249 219 264 244
STP-iXA2206 Dimensions
Inlet port flange VG250 ISO250F ICF305

ØA 350 335 305
ØB 296 296 296
C 18 16 28
D 235 245 275
E 395 405 435
F 312 322 352
G 281 291 321
H 283 293 323
I 322 332 322
Turbomolecular
STP-iXA3306C Dimensions
77
20 20
ØA
C
213
19º
187
30º
º
18
17
H
344
317
202
288
G
D
E
F
9
I
ØB
8
19
23 127 80 62
150 167.5
317.5
Inlet port flange VG250 ISO250F VG300 ISO320F ICF305 ICF356

ØA 350 335 400 425 305 356
ØB 358 358 358 358 358 358
C 15 15 18 20 28 28.5
D 281 281 242 242 286 281
E 435 435 396 396 440 435
F 363 363 325 325 368 364
G 320 320 282 282 325 321
H 319 319 281 281 324 320
I 251 251 212 212 256 251
STP-iXA4506C Dimensions No. Item

1 Height of water cooling port (IN)
2 Control Unit
3 Height of the purge port
4 Outlet port flange
5 Screw hole for securing the base
6 Purge port
7 Cooling water port
8 Height of water coolilng port (OUT)
Inlet port flange VG300 VG350 VG400 ISO320F ISO400F ICF458

ØA 400 450 520 425 510 458
ØB 420 420 420 420 420 420
C 18 18 18 20 20 28
D 387 332 332 378 332 332
E 475 420 420 466 420 420
F 266 211 211 256 211 211
G 344 289 289 335 289 289
H 404 349 349 394 349 349
I 362 307 307 353 307 307
Turbomolecular
288. Pumps
Technical Data
STP-iX455 STP-iXL455
Inlet flange ISO100K ISO160K ISO100K ISO160K
Backing port size KF25 KF25
Pumping Speed
N2 300 ls-1 450 ls-1 300 ls-1 380 ls-1
H2 300 ls -1
460 ls -1
300 ls -1
380 ls-1
Compression ratio
N2 > 108
H2 > 1 x 104
Ultimate pressure 6.5 x 10-6 Pa
5 x 10-8 Torr
Max working pressure 1.3 x 10-1 Pa
Allowable backing pressure 67 Pa
Rated speed 55000 rpm
Run-up time to 90% rated speed
Starting time < 6 min
Mounting position Any orientation
Cooling method Natural cooling (Air cooling Fan when baking or gas pumping)
Lubricating oil Not necessary
Backing pump 240 lmin-1
Leakage Magnetic Flux
Axial direction ≤ 100 mGauss
Radial direction ≤ 100 mGauss
Ambient temperature range 0 to 40 ˚C
Storage temperature range -25 to 55 ˚C
Input voltage 48 V a.c.
Maximum input current
Weight 16 kg
* The maximum gas flow is applicable under conditions that N2 or Ar gas is pumped continuously with water cooling temperature between
15-25 ˚C and the backing pump (10,000 lmin-1 size) is used. It is changed on condition.
Turbomolecular
STP-iXR1606 STP-iXR2206
Inlet flange VG150/ISO160F VG200/VG250/ISO200F VG200/ISO200F VG250/ISO250F
/ICF203 /ISO250F/ICF253/ICF305 /ICF253 /ICF305
Backing port size KF40 KF40 KF40 KF40
Pumping Speed
N2 1000 ls-1 1600 ls-1 1850 ls-1 2200 ls-1
H2 800 ls -1
1200 ls -1
1250 ls -1
1350 ls-1
Ar - - 1650 ls-1 2000 ls-1
Compression ratio
N2 > 108
H2 > 1 x 103
Ultimate pressure 10-7 Pa (10-9 Torr)
Max working pressure -
Allowable backing pressure 266 Pa (2 Torr)
Rated speed 36,500 rpm
Run-up time to 90% rated speed
Starting time ≤ 8 min ≤ 10 min
Cooling method Water Cooling
Backing pump -
Axial direction -
Radial direction -
Input voltage 200 to 240 V a.c.
Maximum input current 750 VA
Weight 48 kg
Turbomolecular
290. Pumps
STP-iXA2206C
Inlet flange ISO250F/VG250/ICF305
Backing port size KF40
Pumping Speed
N2 2200 ls-1
H2 1700 ls-1
Ar 1900 ls-1
Compression ratio
N2 >108
H2 1.0 X 104
Ultimate pressure 10-7 Pa (10-9 Torr)
Max working pressure - --
Rated speed 27000 rpm
Run-up time to 90% rated speed - -
Starting time ≤8 min
Cooling method Water cooling
Backing pump - -
Leakage Magnetic Flux - -
Axial direction - -
Radial direction - -
Ambient temperature range 0 to 40 °C
Storage temperature range -25 to 55°C
Input voltage - -
Maximum input power 1200 VA
Weight 62 Kg
Turbomolecular
Inlet flange ISO250F/VG250/ ISO320F/VG300/ VG300 ISO320F VG350/VG400
ICF305 ICF356/VG350
Backing port size KF40
Pumping Speed
N2 2650 ls-1 3200 ls-1 3800 ls-1 4000 ls-1 4300 ls-1
H2 2050 ls-1 2300 ls-1 2700 ls-1 2700 ls-1 2700 ls-1
Ar 2300 ls -1
2800 ls -1
3200 ls -1
3400 ls -1
3800 ls-1
Compression ratio
N2 > 108
H2 2 x 103 1 x 103
Ultimate pressure 10 Pa (10 Torr)
-7 -9
Max working pressure - -

Rated speed 27700 rpm 24240 rpm
Run-up time to 90% rated speed -
Starting time ≤ 10 minutes ≤ 11 minutes
Cooling method Water cooling
Backing pump > 1300 lmin-1
Axial direction < 100m Gauss
Radial direction < 100m Gauss

Input voltage 200 to 240 ±10% ACV
Maximum input power 1500 VA 1700 VA
Weight 80 kg 83 kg 109 kg 111 kg 104 kg/111 kg
Turbomolecular
292. Pumps
STP ULTRA HIGH VACUUM PUMP
A new turbomolecular pump for use in surface science or high energy physics in research applications.
They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels.
Edwards rotor technology gives class-leading performance for maximum process flexibility.
The low vibration STP-L series has been designed to meet the low vibration requirements of advanced
spectroscopy and metrology tools. It provides the advantage of having the vibration system built into
the pump body.

• Advanced rotor technology. • Electron microscope
• Oil free. • Surface analysis tool
• Low vibration. • Mass spectrometer
• Compact size. • Nuclear fusion tool
• High reliability. • Accelerator
• Maintenance free. • R&D
• Corrosion resistant option available. • Semiconductor tool
• RoHS compliant and UL approved.
Pump Range
STP-Series
-- STP-301/STP-451
-- STP-603/STP-1003
STP-L Series
-- STP-L301/L451
Turbomolecular
Performance Curves
STP-301 Turbomolecular Vacuum Pump STP-451 Turbomolecular Vacuum Pump

STP-301 STP-451
Peak pumping speed Peak pumping speed

N2 300 ls-1 N2 480 ls-1
H2 300 ls -1
H2 460 ls-1
Compression ratio Compression ratio
N2 > 10 8
N2 > 108
H2 > 2 x 104 H2 > 2 x 104
10 Pa -8
10-8 Pa
-3 -2 -1 0
10 10 10 10 (Torr)
STP-301 Performance Curve STP-451 Performance Curve
8
10 4
-3 -2 -1 0 10
10 10 10 1 10 (Torr)
4
10
8 1 N2 10
1 N2
pumping speed (l s -1)
10
7 1
2 He 10
3
2 He
1 2
3 H2 3 H2
pumping speed (l s -1)
3
10 3
2
(CR)
7 1 2
10
2
10 3
6
10
2
(CR)
2
10
6
10 10
1
-5 -4 -3 -2 -1
10 10 10 10 10 (Pa)
5
3
10 10
1
-5
10 10
-7 -4
10 10
-6 -3
10 10
-5 -2
10 10
-4 -1 (Torr)
10 10 (Pa)
-3
3
10
5 10
-7
10
-6
10
-5
10
-4
10
-3
(Torr)
-1 -1
1 450 l s-1 N2 2 460 l s He 3 410 l s H
4
10
-3 -2 -1 0
10 10 10 10 (mbar)
4
Ordering 1information
450 l s N 2 460 l s He -1
2
-1 3 410 l s -1 H
10 0 (pa)
10 -- 31
10
10- 2
10 10-11
10 100 2
10 (mbar)
(pa)
STP-451 Turbomolecular pump ISO160K YT21B0460
-1 0
10 10
4 10 10 1 10 2
N2
4
STP-451 Turbomolecular pump VG150 YT210Z000
10
N2 STP-451 Turbomolecular pump DN160CF YT21B0080
3
10
STP-451C Turbomolecular pump ISO160K YT21B0790
( ls -1 ) ( ls -1 )
STP-L301
10
3 Corrosion resistant
10
2
STP-L301 STP-451C Turbomolecular pump VG150 YT21AZ001
Corrosion resistant
STP-451C Turbomolecular pump DN160CF YT21B0880
2
10
10
1 Corrosion resistant
10
-5
10
-4
10
-3
10
-2
10
-1 (pa)
1
10
10
-5
10
-4
10
-3
10
-2
10
-1 (pa)
10
-7
10
-6
10
-5
10
-4
10
-3 (Torr)
10
-7
10
-6
10
-5
10
-4
10
-3 (Torr)

STP-301 Turbomolecular pump ISO100K YT21B0350
STP-301 Turbomolecular pump VG100 YT21B0190
STP-301 Turbomolecular pump DN100CF YT21B0010
STP-301C Turbomolecular pump ISO100K YT21B0660
Corrosion resistant
STP-301C Turbomolecular pump VG100 YT21AZ000
Corrosion resistant
STP-301C Turbomolecular pump DN100CF YT21B0630
Corrosion resistant
Turbomolecular
294. Pumps
STP-603 Turbomolecular Vacuum Pump STP-1003 Turbomolecular Vacuum Pump
STP-603 STP-1003

N2 650 ls -1
N2 1000 ls-1
H2 550 ls-1 H2 800 ls-1
N2 > 108 N2 > 108
H2 > 10 4
H2 > 105
KF40 KF40
STP-603
10 Performance
10 Curve
-3 -2
10
-1
(Torr) STP-1003 Performance Curve
-3 -2 -1
8 10 10 10 (Torr)
10 -3 -2 -1 -3 -2 -1
10 10
1 10 (Torr) 10 10 10 (Torr)
8
10
10
8
1 N2 10
8 1 1 N2
1 1
10
7
2 He 2 He
2
3 H2 10
7
3 H2
7 7
10 10
2
2 2
(CR)
6
10
(CR)
6
10
(CR)
(CR)
6 6
10 10
5
10
3 5
10
5 5
10 10
3
4
3 3
10
10
-3
10
-2
10
-1
(mbar)
4
10
4 -1 0 1 (pa) 4 10
-3
10
-2
10
-1
(mbar)
10 10 10 10 10
10
-3
10
-2
10
-1
(mbar) 10
-3
10
-2
10
-1
(mbar)
0 (pa)
10 - 1 10 10 1
4 0 (pa) 0 (pa)
10 10 - 1 10 10 1 10 - 1 10 10 1
N2
4
10
4 4
10 10
10
3
N2
STP603
( ls -1 )
3
10
3 3
10 10 STP1003
( ls(-1ls) -1 )
2
10 STP1003
STP603
( ls -1 )
2
10
2 2
10 10
1
10
10
-4
10
-3
10
-2
10
-1
10
0 (pa)
1
10
1 1
10 (Torr) 10 -4 -3 -2 -1 0 (pa)
10- 4
-6
10- 3
-5
10 - 2
-4
10- 1
-3
10 0
-2 10 10 10 10 10
10 10 10 10 10 (pa) -4 -3 -2 -1 0 (pa)
10 10 10 10 10
10
-6
10
-5
10
-4
10
-3
10
-2 (Torr)
10
-6
10
-5
10
-4
10
-3
10
-2 (Torr) -6 -5 -4 -3 -2 (Torr)
10 10 10 10 10

STP-603 Turbomolecular pump ISO160F YT39B0030 STP-1003 Turbomolecular pump ISO200F YT390Z001
STP-603 Turbomolecular pump VG150 YT390Z003 STP-1003 Turbomolecular pump VG200 YT390Z004
STP-603 Turbomolecular pump DN160CF YT390Z005 STP-1003 Turbomolecular pump DN200CF YT39B0010
STP-603C Turbomolecular pump ISO160F YT39B0110 STP-1003C Turbomolecular pump ISO200F YT39B0130
Corrosion resistant Corrosion resistant
STP-603C Turbomolecular pump VG150 YT39AZ000 STP-1003C Turbomolecular pump VG200 YT39AZ001
STP-603C Turbomolecular pump DN160CF YT39AZ002 STP-1003C Turbomolecular pump DN200CF YT39AZ003
Turbomolecular
STP-L301 Turbomolecular Vacuum Pump STP-L451 Turbomolecular Vacuum Pump
STP-L301 STP-L451

N2 260 ls-1 N2 450 ls-1
H2 290 ls -1
H2 410 ls-1
N2 > 10 8
N2 > 108
H2 > 2 x 104 H2 > 2 x 104
10-6 Pa 10-6 Pa
STP-L301 Performance Curve STP-L451

10 Performance Curve 4
4
-3 -2 -1 0 10
10 10 10 10 (Torr)
s -1) (l s -1)
8
1 N2 10
3
1 N2
10 2
speed (lspeed
1
1
2 He 10
3 2 He
3
3 H2
pumping
1 2
3 H2 10
2
3
pumping
7
10
2
10
2
(CR)
1
10 -5 -4 -3 -2 -1
10 10 10 10 10 (Pa)
6
10 10
1
-5 -4 -3 -2 -1
1010 -7 1010 -6 1010 -5 1010 -4 (Pa)
1010 -3 (Torr)
10
-7
10
-6
10
-5
10
-4
10
-3
(Torr)
5
3
1 450 l s-1 N 2 2 460 l s -1He 3 410 l s -1 H
10
1 450 l s-1 N 2 2 460 l s -1He 3 410 l s -1 H
10
-3 -2 -1 0
10 10 10 10 (mbar)
STP-L451 Turbomolecular pump ISO160K YT47B0150
10 - 1 10
0
10 1 10 2
(pa) STP-L451 Turbomolecular pump VG150 YT47B0050
STP-L451 Turbomolecular pump DN160CF YT47B0010
4
10
N2
3
10
( ls -1 )
STP-L301
2
10
1
10
10
-5
10
-4
10
-3
10
-2
10
-1 (pa)
10
-7
10
-6
10
-5
10
-4
10
-3 (Torr)

STP-L301 Turbomolecular pump ISO100K YT47B0030
STP-L301 Turbomolecular pump VG100 YT47B0020
STP-L301 Turbomolecular pump DN100CF YT470Z000
STP-L301C ISO100 inlet B75800010
STP-L301 ISO100 inlet B75800090
STP-L301 DN100CF inlet PT470Z000
STP-L301C DN100CF inlet PT47AZ030
Turbomolecular
296. Pumps
22.5°
°
45
8 - Ø9
45
Ø1
Dimensions
22.5°
°
45
8 - Ø9
45
Ø1
STP-301 Dimensions
A Electrical connector
B
B Outlet port
8 x M8 x 16
22.5° 45
108
45
°
C Purge Port (only for corrosion resistance type)
8 - Ø9
60
Ø1
A
45
110
Ø1
99.5
C
B
8 x M8 x 16
45
108
STP-451 Dimensions
60
No. Item
Ø1
A
110
1 Inlet port flange

99.5
Bending dimension of the STP connection

C
2
cable
3 Screw hole of legs
5 Screw hole for earth
6 STP connector
B 7 Viewed from arrow A
8 x M8 x 16
45
STP-451 Series
108
ICF203 VG150 ISO160

60
Ø1
A
ØA 203 235 180
110
B 200 200 200

C 141 141 141
99.5
C
D 22 12 12
STP-603 Dimensions
B Outlet port
ISO200F
Ø260
30°
ISO200F
297
STP-1003 Dimensions
Ø260
30°
ISO200F B Outlet port

147.5
Ø260
297
30°
147.5
297
Turbomolecular
147.5
Ø1
Ø1
22.5°
30.2
60
48.5
Ø1
16 x Ø8
22.5°
11.25°
Ø185 VG100
12
35
Ø115
Ø152 ICF152
21
55
Ø110
Ø115
Ø130 ISO100
ISO100 ICF152 VG100

Ø115
7.5° 7.5° 8 x Ø12
83
30° 30°
15° 15°
45°
166
STP-L301 Dimensions
207
240
Ø180
Ø1
Ø1
22.5°
73
30
60
Ø156
.2
48.5
Ø1
66
16 x Ø8
B Outlet port
33
22.5°
11.25°
8
Ø128
C Purge Port (only with STP-L301C)

Ø185 VG100 ISO100 ICF152 VG100
12
25° B
20° 7.5°
35
Ø115 7.5° 8 x Ø12
30° 30°
8 x M8 x 16
15° 15°
45°
108
M4 x 10 Ø152 ICF152
21
55
20°
Ø1
Ø110
Ø1
22.5°
60
30.2
Ø115
6
Ø1
0
48.5
Ø130 ISO100
Ø1
A
Ø115
16 x Ø8
83
22.5°
99.5 11.25°
166
207
240
Ø180
73
Ø156
Ø185 VG100
12
35
Ø115
66
33
Ø152 ICF152
8
Ø128
21
25° B
55
Ø110
20° Ø115
8 x M8 x 16
108
M4 x 10
Ø130 ISO100
20°
60
STP-L451 Dimensions
Ø1
No. Item
Ø115
83
A
166
1 Inlet port flange

207
240
99.5 Ø180
73
Ø156
Bending dimension of the STP connection

2
cable
66
33
3 Screw hole of legs

8
Ø128
25° B
20°
8 x M8 x 16
108
M4 x 10
20°
Ø1
6 0 5 Screw hole for earth
A 6 STP connector
99.5
7 Viewed from arrow A
STP-L451 Series
VG150 ISO0160 ICF203
ØA 235 180 203
ØB 169 169 169
ØC 214 214 214
D 12 12 22
E 176 176 196
F 250 250 270
G 217 217 237
Turbomolecular
298. Pumps
Technical Data
STP-301 STP-451 STP-603 STP-1003 STP-L301 STP-L451

ISO100 ISO160 ISO100 VG150
Inlet flange ISO160F ISO200F
VG100 ICF152 VG150 ICF203 VG100 ICF152 ISO160 ICF203
Outlet port KF25 KF40 KF25
Purge port KF10 (only for corrosion resistance type)
Pumping speed
N2 300 ls-1 480 ls-1 650 ls-1 1000 ls-1 260 ls-1 450 ls-1
H2 300 ls -1
460 ls -1
550 ls -1
800 ls -1
290 ls -1
410 ls-1
Ar
Compression ratio
N2 > 108
He 5 x 10 5
5 x 105
H2 2 x 104 > 105 2 x 104
Ultimate pressure with bake
6.5 x 10-6 Pa (5 x 10-8 Torr) 10-6 Pa (10-8 Torr)
out heating (VG/ISO flange)
Ultimate pressure with bake 10-7 Pa 10-8 Pa
10-8 Pa (10-10 Torr) 10-6 Pa (10-8 Torr)
out heating (ICF flange) (10-9 Torr) (10-10 Torr)
Max allowable inlet
6.7 x 10-4 Pa (5 x 10-4 Torr) 6.7 x 10-4 Pa (5 x 10-4 Torr)
pressure (ambient cooled)
Max continuous outlet
13 Pa (0.1 Torr)
pressure (ambient cooled)
Rated speed 48000 rpm 35000 rpm 48000 rpm
Starting time 3 min 6 min 3 min
Max inlet flange
120 ˚C
temperature
100 to 120 ±10% V a.c. or
Input voltage AC 100~240 V ±10% V a.c. AC 100~240 V ±10% V a.c.
200 to 240 ±10% V a.c.
Power consumption
350 VA 800 VA 350 VA
at start up
Pump weight 11 kg 12 kg 31 kg 31 kg 14 kg
Controller weight 8 kg 9 kg 8 kg
Turbomolecular
STP HIGH THROUGHPUT PUMP
Edwards high performance high throughput series, STP-H, STP-A and STP-XA pump series
incorporate a Holweck drag stage that increases the pump throughput at low pressure. They have
been designed for use in the harshest of semiconductor and flat panel applications. The pumps
field proven reliability and class leading performance increase the maximum process flow capability
and provide process flexibility. They give a wide process window, from high vacuum, to high flow
requirements with enhanced throughput for all gases. The range contains pumps with throughput
speeds from 300 ls-1 to 4500 ls-1.

• Advanced rotor technology gives industry leading • Plasma etch (chlorine, fluorine and bromine
pumping performance. chemistries) for metal (aluminum), tungsten
• Higher gas throughput gives maximised and dielectric (oxide) and polysilicon.
process flexibility. • Film deposition CVD, PECVD, ECRCVD, MOCVD.
• Optimised temperature distribution provides low • Sputtering.
deposition and increased operating life. • Ion implantation source, beam line pumping
• Harsh process compatible. end station.
• TMS (Temperature Management System) reduces • FPD Etch.
particle accumulation inside the pump and provides
extended overhaul intervals.
Pump Range
• Higher temp setting TMS is available for very STP-H STP-XA
harsh process. -- STP-H301C -- STP-XA2703C
• High reliability. -- STP-H451C -- STP-XA3203C
• RoHS Compliant and UL approved. STP-A -- STP-XA4503C
-- STP-A803C
-- STP-A1303C
-- STP-A1603C
-- STP-A2203C
Turbomolecular
300. Pumps

Edwards Pumps3

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PRODUCT CATALOGUE 2016-17

Chemical and Process Industries 7

Shop online at shop.edwardsvacuum.com Contact our customer service team 3.

Drystar 80 Pump and Booster Package 109 EXT/nEXT Turbo Pumps

Mechanical Boosters 147 STP Turbo Pumps

Shop online at shop.edwardsvacuum.com Contact our customer service team 5.

Chemical and Process Industries 8

Rotary Piston Pumps

Rotary Vane Pumps

Liquid Ring Pumps

Absorption, Adsorption, Desorption ● ● ●

Lowest Cost of Ownership (Typically) ● Preferred Technology or Widespread Use

EDP Chemical Dry Pumps

Speciality and Fine Chemicals

• Normal Distillation • Pervaporation

ZENITH SPECTRA ZW2 ○ ○

Vacuum Insulation Panels / Glass

Space Simulation Chambers

Cryo Interspace Evacuation

Plasma Cleaning Sterilising

Gas Recovery / Circulation

Oil / Resin Degassing

Gas Cylinder Filling

GXS Dry Pumps and MAXX Systems ● ●

Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

ES Single Stage and EH Booster Combinations ● ● ● ● ● ● ● ● ●

EM Double Stage and EH Booster Combinations ○ ○

14. Industrial Vacuum

• Precision Investment Casting – PIC Metallurgy

VIM VAR ESR PIC MIM Sintering

Vapour Booster Pumps ● ● ●

GXS Dry Pumps and MAXX Systems ● ● ● ● ● ●

Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○

GXS Dry Pumps & MAXX Systems ● ● ● ● ● ● ● ●

Microvac Piston Pumps & Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○ ○ ○

ES Single Stage & EH Booster Combinations ● ● ●

16. Industrial Vacuum

Reflective Decorative Coating

Optical Opthalmic Coating

Hard Coating CVD DLC

STP Turbomolecular Pumps ● ● ● ● ● ● ● ● ●

GXS Dry Pumps and MAXX Systems ● ● ● ● ●

Microvac Piston Pumps and Booster Combinations ○ ○ ○ ○ ○ ○ ○ ○ ○

ES Single Stage and EH Booster Combinations ● ● ○ ● ● ○

EM Double Stage and EH Booster Combinations ○ ○

• Book & leather drying

• Freeze drying (lypholisation) of food, pharmaceutical

Transformer Drying Vapour Phase

Lithium Ion Battery Drying

transformers, capacitors and cables

GXS Dry Pumps and MAXX Systems ● ● ● ● ● ●

Microvac Piston Pumps and Booster Combinations ○ ○

ES Single Stage and EH Booster Combinations ● ● ● ○

EM Double Stage and EH booster Combinations ○

18. Industrial Vacuum

Lithium-Ion Battery Glovebox Systems

Electrode Drying Process

Mid-range Dry Pumps ● ● ● ●

GXS Dry Pumps ● ● ● ●

nXDS Dry Scroll Pumps ●

ES Single Stage Oil Sealed Pumps ○ ○ ○

RV Oil Sealed Pumps ○

20. Industrial Vacuum

Applications PVD Implant