ay SAAR ZH SI 8}o] SA FASA aaa és an Aa? hice ee ae f Sp IONE AAA A eee WE an FABRE WO 2011/027973 A2 2011 3-9 10% (10.03.20 PCT 6) FAS AER: 4 Heel: FPN) eal NE PATENT FIRM» ‘HUSH 124 (2006.01) FADE 615-21 19S 3, 135-910 21 FABRIS: PCT/KR2010/004789 sent) 20108 741214 1.072010) OD ABH CREM HAA We Wee 2E SHS ey FARA. 201097219 1.072010) uy e)2] BS SIS): AE, AG, AL, AM, AO, 05) Bade} so] AT, AU, AZ, BA. BB, BG, BH, BR. BW. BY. BZ, CA, yaey _ CH,CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, Dz, 26 SAC: ts EC, FE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, G0) GARRY: HR, HU, 1D, IL, IN, 1S, JP, KE, KG, KM, KN, KP, KZ, 70-2009-0082710 2009 8 9 2 2 (02.09.2009) KR «EA, LG, LK, LR, LS, LT, LU, LY, MA, MID, ME, MG, 10.2009.0113396 2009 41 1103041 0112009) Ke MR, MN, MW, MX. MY, MZ, NA, NG, NI, NO, NZ, OM, PE, 2G, Pl, PL, PT, RO, RS, RU, SC, SD, SE, SG, (7) SAM Us AS) WIA VE 7] Boh A324) * SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, 371257] ASF (KOREA BAST INSTITUTE) [KRIKR], 24] > 408-333 Dacjcon (KR), * 4) ABR CHES) We det ee SH Shu dels 413421: ARIPO (BW, GHl, GM, cy WAAR KE, LR, LS, MW, MZ, NA, SD, SL, SZ, TZ, UG, 2M, 5) PASI Us ol Behe): AEA (SEOK, Dong ZW), he) 4] oF (AM, AZ, BY, Chan) [KR/KR}: oh 214) 4 3 BES} 113, 305-3 KG, KZ, MD, RU, TI, TM), rl (AL, AT, BE, BG, CH, CY, CZ, DE, DK, FE Daejeon (KR). S419 (LOH, Tal Hyeop) [KRIKR], UES, FLFR, GB, GR, HR, HU, TF, 18, TT, LT LU, LV. BA) Sle SESE 113, 205.333 Daejeon KR). AMC, MK. MT, NL, NO, PL, PT, RO. SE, SL SK, SM. @ (¥OO, Seung Rul (KRUKR) 24) fe TR), OAPI (BF, BI, CF, CG. CI, CM, GA, GN, GQ. GW, =. 113, 305.333 Daejon (KR). EBA (HONG, Yong ML, MR, NE, SN, TD, 76) Chea) IKRIKR] LA EF SES 113, 308-333 gag Daejeon (KR). 1 (LER, Bong Ju) (KR/KR; © 4) 95 HFSES 113, 305-333 Daejeon (KR). — Salata Gol Sst BA ay # ole LE BI GTI 48.2@) {64 Tite: LIQUID MEDIUM PLASMA DISCHARGE GENERATING APPARATUS (6 W499] BA O18 1 Be}=o} Wel Baal (67) Abstract: The present invention relates to liquid medium plasma discharge generating apparatus, and has the aim of provid- ing a microtube liquid medium plasma discharge generaing apparatus, capable of applying a high electie Feld even with low ‘wattage by minimizing conduction current, by filling aliquid medium ina gap between a power electrode and a ground electrode and arranging a dielectric disphngm member, defining one or more holes of sis, inthe middle ofthe gap. To achieve the above fim, the present invention provides a liguid medium plasma discharge generaing apparatus comprising: a main body; a power electrode, provided at one side within the main body, for receiving electric power; a diaphragm member provided within the main body, and consisting ofa dielectric defining one or mote holes of slits; and a liquid medium charged inside the main body, where in a ground electrode may be further provided in the main body, oppasite the povvor electrode with the diapbaragm member there between, whereupon the diaphragm member is aranged contacting the ground electrode. 7) 89h: Zo} D1 DABAol ¥ Aes a8 a aa daa AS U9] Stel BA Le cps] Toh} Sete] Bia Halal Ae yas wal Poe, ay jAtso ae Wegees | a alts uae Lae e Selzu, Wal wag 2 BA] Soh. 471 SAS Je Lal 37] Ba Ue azo SPs = S49) AS; 271 ea) wo F019) 32, 3} Y eR Glinel III ams olsolAe Ae Ayr) Ea peo} Sashes oft aS seal wohl dal ae als Apolo) Fab 97] 3 WO 2011/027973 A2 |Illl aayets a2) a 271 BA AeA Ashel walWO 2011/027973 PCT/KR2010/004789 ou (21 (3) [4] [5] [9] [10] ty aA) BV Ba AD da Sao} Ya BysA) EEK Bwge A ual Sesh ya VY AA el] We Bo, c]S Aha) SpA By ul ao] Saad Lay yee] AZ] Hu] gd ya] Asa} a7] Ba) uel FH) S| AOS Sf of Bo] Yo Selo] PYM HAA Ay as EQWORY, AM APSR ASSO] FO AYFORE BS AIR QUAL ZL SLES MIA SE NAH wy AL BeEAMp Ya AYA A ol) BR Blo] eh. he a)b] o.52, ebm} MAY ApS UL AME aad, FP) 71S VOCS: Volatile Organic Compounds) 2) +7] 417] 2. 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By uae Aepol A 42} Z0](d)7} tem] 34, AAI 44 2] Ben daeWO 2011/027973 PCT/KR2010/004789 12] U3] [4] U5] 6) eH AI(A)O] 2x2=deri el J-P-el], BEES] AEM AS 50x10(S/em)o] AA RR)S FA] Red/AxS0l] 2] a] SEF YOM, AA RRYE 150x106 x4) = 5000(Q)O] ICH. ©], AEE S ELAM} YAO] o|U7] Het a7 E7} SkV/em &} 41, 2.2. % 9h Vis V=Exd = SkW/emxlem = SkV 7} SCH. 34] eb BETES Sop] 7b ASHE BF, lM Ss AS ADE I= 5000(V)/S000(2)= 1(A)°] 4, 4141 BW) We SO00(Y) x 1(A) = 5KW) 2] Fh. OO, HAE ue wpSeEro] st, ma) 4S] Zo|(a)7} temo] #4, AMAIA 2] AAAS] 2xd=deni Ql BF-e, where] AMIE S3x10° (Slem)°] 51, 41.4] 8(R) 424] Rad/AxSOl] 2] a SE HF OME, AAR 153x104) = 4,.7Q)0] Ch. oO}, BA S ELAM ALO] O}Y7] 417140] SkV/em eH, SAG AES: SkV 7} AC}, B-4| VE a] FSO] A AFT} MEA SES, O] wy] S. Ae AFD FA T= WR 2) a PSP T= S000(V)/4.7(Q) = 1064(A)°] =], 41 8 OW) W = VxI = S000(V) x 1064(A) = S3(MW)H, 0] WAFS SANA) Malo Sashes SF AA Sol aT le1e Aa GA SAS] YO MAS ASAE Ho] A7KS sth, TEbA P71 Sb BS AS TAMAS ae SA BeAr YAS Wood ach. BQ] YAMA NEA Al upe}A Lube Salo] Lala al 39] AF} 4] AF] Ayo] oy wal 29] FHYohy Selo] Bae Hada ay Aas so] 42 AFORE ABS U7 FW PAB YAbuy Aa SAS Ya YASS Asse u] HAO] Veh shal AA PE Bugs] 2 Swe] pe ya Sear} ed WYAalie, Ys Ao} Sad BA; 37) 2A UW UF) Hy] S| a, AAS aoe we] As; W 237) BA Moll TH) S] at, Ol Bt oO] FS] Te Yo]U SHline) BIS = FAAS OFA AM PAS Sep Bago] Nba Sebzeh ea Wasa, Aut Pals whe] Ase] Ato] MASAY 34] AS OYE) 27 Az] 0] sl uals 4 Ach. BUG 4S Sao] oS Vola Sezer} A wa AAle, As ao] Ad 24); 27) Bal ye AS PHS] a, AAS a Swe we] AS; 71 Ba Mol FS] St, ols SEL} o] 2] TYol} SR lino] BIS = AAR 0] FOU A AUh PA; RW F7) al oy 247] A Ut ales Abo] oT Fat 37] 9] AS3} BsHs AA] ASS LAsbat, 37] Ast Pale a7] al asl dete} ola) aeh. ofWO 2011/027973 PCT/KR2010/004789 u7) [18] 19] [20] (21) (22) [23] [24] [25] [26] (27) [28] Babys) oP gulal Belzvh weal WAAL, 27) Ao} alo VBA FYOH SoS] AS Ab] AM PAS] eal BT AES ES ALE, ag] Ba} ubgol os Duy a Weluh ead MAP abate Ml alah of Dob a el ob yal UbAyg2) 2] al bo) ZA Sh], Ae] Aho] A}o} st7bS] WHS APB SH Boles SS AFT} Cp, EG, EGS YAP Ae] ALK Ao) 4-8 +H ol SB wort HAAS DAB) oF Aol LS] PSA GO] SVM ALI 4° 9% HOPE eh, EMS Uda ay Le VeeHel Pgs Joyajo] Beprehwaygalel oe Seoleh 2s Iubyel AS FAIA Hawa el} o) Bepaop wey Were ag a7] Het So], 3G BBO mS vl oa else ya wea gale) det EWOBA, @ Ha] AU Alt tS] Ase Asbo] MAS Tolar, (DY HALA AM PA} BL] AF OBE] 2B 7] x] 0] 2] ¥Jo} wllalEls Faye Gels Ewolep 2 ubgol UE val Pod Belzvp ya Waal) ae obs 2 WBS] Hanae aba Be}zop yao] AAA outa POP MAD ALES AVS AW Oleh, Aya} o| EOWA] ERS EVA HAA] AHA S49] ela ze) Hz Pla Ses} Ya ASS] Se] SS HES ApS ye EYORA, 262 7] HUA LAE eel potential and field lines) tHE} U| 4S Le] S£ 0] at, ETS YF MAMAS) AG WES YEH eS Ae ZO] st, | BS HAA AM Bayo] HY Uo] o] 74 WAL YES Lao} 9A 11S BBO HAA AMP ahol Fg] vy] Azo} ae ypu Se}ze} YA ASS] Be] PS YASS Ars yep EV OE 7] MUA WL AE e}el (potential and field lines)& L+E}YA= Le] 0] 31, 108 FA} way} 9] A714} WS UCHIS 6], Be Hala AS a] TY UALS) a7] eS UES a oleh, EQUA] & 14 YES valet gua Yad Sep sep ayy Alo getWO 2011/027973 PCT/KR2010/004789 [29] [30] Bu [32] [33] [34] [35] [36] [37] 1 122) 149] AES BLAME PY AA oo} a eA Se Bap) AAS PAS, 16S AES Betsnp PABA |e ya AVS SA Roth BE 172. | 22] o}F HEE EHS Teoleh, wg AS AA aA Ba SAG FSA 7134] VBwS ee] Bese] Aa he ABs) NA Boz oa AOR, Bugs] AWA : 812.0) BBA Et: Belo} BM Aaj ozo 7 oleh, ge] dol IHS ALA ols ch abe WAS heb 4 Vat oleh 7h] Bas TA ENOUGH AA OES VO oA] ohs2 BALA ES Sal Ayalabal dg abst} Beh te] U, os BS) AVI ahs 41] oS SAS MA] Vell AAAS Aol oy, Buse] ape D 71S wala BQt BE WS, TSE ul] VALS Bets Wok o}apsolob acy, AL YEE AD ES) GO HE PY AES AVEO AS +e Qa JA TA BABS B7] BO] So] PAY AE tech 71 BBS ays] FA aA FA MASSE PME HAO Re, olzlg) Bw WES] Ao HE le) ISPS ola] Be A, AL FY Bat AD FY GAR BA Us, HAA ATP Y BAL AL FY BARE wea Fale. Ola FY MATE CHS FAY ALY ad asloyn getup aspw oye ghepse AGH Wholis, LUKE FA AAO) AAA oR Lavo} gy wis asso} 1S PE YAR, SLO LE FAY BATE SALW PH NULL o] ayo] of S Aoleh, Wo, 1S HAY MATE HA BAM AVA Lao} ep E A ASSO" Uchs ATA Mots, Sel] HHS HY BAT} Sa sp] 2] ase WB sp71 Sah S110} eb oleh, FA} a2 APO} oH" 9} "1 2] LAS vpe7PA|, Epa) AB ALBA, w ts ofr} obey 2} Hal Clam Sajal ee, Bh] Hale eT, "anaes vegreey eS "ACH 9] Bolts WAS HA, A, ea, Bh PY BE HER Os Ho] BABS Aah Hola, sh. sek tole] oe BEE EL AA AS Sal Je] MASA BE AO oletsioloy we. Che Bod} Qs we, AOL FOI BS ak OPAWO 2011/027973 PCT/KR2010/004789 [38] [39] [40] [41] [42] [43] APES] BE Fell] 9) 4142 7h Asi] 23 0 TAS 3h qo APB ERE ayaa 92 131°} Se 2a ee] a7 217) 9} ala] SH 2] BAS a i eae aby, 2 BAO Al a. 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SB] Aad Ab PAGO] fea Ae A a aoe) fadWO 2011/027973 PCT/KR2010/004789 dep ey atch. [44] mepy, ATES AHH] JE AGFORN HE AGS U7 [45] [46] [47] [48] [49] [50] [S1] [52] [53] [54] [55] [56] ATH. OS alo] LEASH, A120, 50)2] FA} o] JO] 317-2] ASR AVSS}7] Yoh Ach. EM Y-Pulae] Ak Mel] Tal} ge] 4B = ge} SRO AHN], AAS AA So] uy? Ao] So] MATA SS] SRM ASB NOM, Yael Ayo) al zbo] ZA seep ESE EWS] Plays Yd ulead Sep Ar} Yale] AS PACE 32] (yay YF uh Lol] A] Oo] SEbAMh AY WYSE AVS AY Ke]ch. Awol BAY Seavey MASS Hsp7] HAS EASES es Sth. A718 Bt A] EaVidell 2 a SE ATH O17), Vie Gh, dts ARAN] Aololty, ASE Vis FAI V=abRol 2] Bh PSE UCH. OYA, Re AM AGF, RS ATE AOC}, AK AF Ls A] EVRA) Yai] PSE ACH. ASZEABRE FA RadV/AxSell 2] 2] HF BATH Of 714, AXE AE ANAS] Waa, St 4 ae] A) Ae ol ch, Ses AY AAS We FA] Wevxtol 2] af] TSE ATH. wep, B Ege] ul ayet Nba al Bepzv} Yale] As Ae Ay y-yu-a FAS] Eps} AY ATPL Wd 4 1S So} PRE ACh JAS] YE ws Pel-4 2] BEPAv} WY APS sp] HA ath ch. Ys ville] wp She alle] at, sl] 4] 2] Zl0](d)7} emo] at, FAA A A302] YY) A410] 0.1x0.1=0.01eri, HSS] AERIS 53x10%S/em) 2 BFE AAMZAS BAe AS ABA BRE HAl Read/AxSl] 2] a PE OB, AAR) 1/(53x10°%0.01)= 1887(Q)°] Ef. 74, ae S SEAM} Yao] Ve}uyp7] 9% 2714 B7} SkV/em #} el, 2B A1G}VAS V=Exd = 5kV/emxlem = 5kV 7} ach. aa Sho] A AGH7} VEY SPSL, O] ale We 2]5000(V\/1887(Q) = 2.65(A)°] IT}, 4124] We: W=VxI = SOO0(V) x 2.65(A) = 13.2kW)0] ATH. O71, 2: AGS AS SHA AAO YAS HAL aE ath. ola, dala SS] o] 22] AD ofS FE AAO] U7) ML SS Fal] SATII SHS Soo] Se Art YA Qo] $2] WAU WH7} SS7] Wath. oe} ale Ss WAS 13.2kwaLee Bal Ach mou: Bega} fda A} ea BOpell S42] MP) ATZEaHS] Fuld Y-yula au ea AS] Se] GS AES Ass Yep Eewdo]st, 8 9 yy] a7} fra all 4} aH 30)e1| 27112] MABH] TH) Yeu Be}zv} UA AS] BE] BS ABS AIWO 2011/027973 PCT/KR2010/004789 [57] [58] [59] [60] [61] [62] [63] EW ue le. @H, E127) & 4s AES Plays oy gua yal Sesh YA uy gh E12 YES BeAr} YBa S| OBR yep EWO|S, E138 SES Se Av Ysa] WETS UES Evo|M, & 14s JES Ge}Avp wey sA) 2] Ge Rolch, S12 MAL SE 1A], VERA] ole 2A} ALS, ESI] AAO} ~1.92 kQO] 51, WES 7] BAB SO] ~2 pr}. 27 AMPA AOE agro] ~10 kV, 33) 0] + HEX NEO] Se} (bi polar) 8 3-0] P} , $-E] (duty)7} ~SOusec, Rep £7} ~ 2kHz, 4147 #7] =L(current peak)7} ~5.2A, 414 "4 (power range)7} ~S.2kWO]TH, FILE, LOVE A] Oo] 22] OS SES FAG) BF 363 cm/sec] 51, 8] =A] (OH)2] 84 20.7 em/seco] 4], UEB(Nat)2] BF 5.2 cm/sec] 51, Y 2(C1)2] B-¥ 7.9 em/sec®] Hh. ANACR ESAS RBA SY Solel HAE Lal AAlel) B] spo] eA te alo] Fey} 5e]st, Of=LG10] 2.10] eh. 5 ASO ALLS Heal A IMP AP Ade] ANAS: Of=1e1 sz Bho} PAPE ES 210] 51, YE MAL ae Sho) FA AhR(e)= 800] Ho] Th. Hd ele] aa) AEF A} B0)2) P| a) zkG HAA 2] 7142) A] BS Ube Afol] Oo} a Abed = heh. Vo + €2 dy, +e tdy-e [E,| = |E, |: |E2| = e2:e) OM Ee SAA AM HA ARI A | 1714-2] A171 0131, Eats OL AAA 2] 17182] ATOLH. HAA AME HAL vA) LO]O}31, dy 2 VF MA ASAI] Cololch en® HALA AM PALS] HALA OL, ol ws] Hadroleh, B71 AANA SE 4 SLE, SLA] HALA ofa) eps} vy ale a | ABS FAO] AAAS] A712] YBL Woh ee aso] AB QE. web, FOL ASA SLAG ALAS] HATES 45 MARU Cl Ee ABS 7h leh.WO 2011/027973 PCT/KR2010/004789 [64] [65] [66] [67] [68] [69] [70] ou 237) Ao. AAA S| FTE SES PSO] ae el) He A171 OL 7S Ae LAINE, HALF AAS] PAZ Sha) VFO Mail] 217171 Be] obs Se-AMpTE ABS] Yt 7] Wa AM7} ole al WA EAzLo) S7 hsb Ae ATH alee] AEE(S)E 53mS/emo] 5t, a2] 4] A BRs)-e 18.9Qemo] tf. $47] AM HAO] EY OAS] AEA) BRAS 9.6kQ ©] Eh. 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BR) 10-~_,615 WO 2011027973 PCTIKR2010/004789 (Fig. 6] Potential and Field Lines Electrostatic Potential and Electric Field 34 L 24 ve0 24 3.4 T T T T T 3, 2 1, 0. 1 2 3. x fieldmap_Dielectric_Cave_2Room: Grid#1 P2 Nodes=939 Cells=450 RMS En-6.4e-4 Intrgral=1800.003WO 2011/027973 (Fig. 7] Electric Field Strength 21. 18, Electric Fel Strength 78 PCT/KR2010/004789 i 16:38:22. 19/14/08 Electrostatic Potential and Etre Fiele FlexPDE'50.20 = Blectrc Feld Strength \ from3,-11) 03, 11) an{ (dul 2+ (Gye 2y (1/2) i 1 2 eH 7-—2 ay Q 2B x fieldmap_Dielectrie_Cave_2Room: Grid#1 P2 Nodes=939 Cells=450 RMS En-6.4e-4 Intrgral=1800,003815 WO 2011/027973 PCT/KR2010/004789 (Fig. 8] ect Fleld Strength 38: Bectostatic Potential and Eletic Feld er geoe S020 a Bedtrc File Strength from(9, 3) / 1040, 3) - al (du(Vf2+{ey(vf2) (1/2) Electric Feld Strength fielimap_Dielectric_Cave_2Room: Grd P2 Nodes=939 Calls=450 RMS En-6.4e4 Intryai=39,9986395 WO 2011/027973 PCT/KR2010/004789 (Fig. 9] Potential and Field Lines Erectrostatic Potential and Electric Field 1 L 1 1 L 1 1 3 4 eae fieldmag_Dielectric_Cave: Grid#1 P2 Nodes=654 Cells=309 RMS En=0.0013 Intrgral=856.1232WO 2011/027973 10/15 PCT/KR2010/004789 [Fig. 10] 17:35:04 10/15/08 Bectic Fed Strength FlexPOE 5.0.20 Electrostatic Potential and Electric Field 8 Feld Stenath lectri¢ Fie! mgt fomt-3, -01) ue n M | t0(3, -01) ) \ \ a((du(WY 24 dylof 2y (U2) 2. B 1s. g | Bb. { { Ball | 3 12 L | A 1 2 64 \/ 32 0 4 2 fieldmap_Dielectric_Multi_Cave: Grid#1 P2 Nodes=654 Celis=309 RMS En=0.0013 Introral=71.3055011/15 Wo 20111027973 PCT/KR2010/004789 [Fig. 11] Electric Fleld Strength Electrostatic Potential and Electric Field 17:35;04 10/35/08 FiexPOE 5.0.20 LT] ] [tect Feld Strenath 38 f from{L.5,-2} + to{L.S, 2) 7 b ar((duvy2etey(wy2y(1/2) Ba 3 | : 1 & 20. 2 a 18 pe i AS 05 0 05 1 18 2 fieldmap_Dielectric_Multi_Cave: Grid#1 P2 Nodes=654 Cells=309 RMS En=0.0013 Intrgral=100,038512115 WO 2011/027973 PCT/KR2010/004789 (Fig. 12]13/15 PCT/KR2010/004789 WO 2011/027973 (Fig. 13] Fig. 14] 4WO 2011/027973 (Fig: 15] ani: PCT/KR2010/004789 (Fig. 18] VeMi Ven i XI (Al 191) ISAKRWO 2011/027973 15115, (Fig. 17] ogass (Water 25°C) u im (restv}) Cations Ht 36.23x 10" Nat 5.1910" Kt 7.62.x10° in* 5.47x 10" Arion oH 20.64 x10 a 791x140" Br 8.09. 10% SOF 829x107 BABA (AA M91) ISAKR PCT/KR2010/004789