PIDim Rev 0 Issue For Design 20221025

CORPORATE SERVICES CONSTRUCTION / TOOL INSTALL DESIGN
P1222 REFERENCE PACKAGE

AMAT DPX IMPLANTER
(PIDim) SITE DESIGN TEAM MEMBERS
PROJ. TEAM REPRESENTATIVE PHONE/PAGER
DRAWING TITLE REVISION DATE
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P1222 RP
PIDim
GENERAL
TITLE SHEET
PIDimG01
NOT FOR CONSTRUCTION INTEL CONFIDENTIAL
CORPORATE SERVICES CONSTRUCTION / TOOL INSTALL DESIGN
P1222 REFERENCE PACKAGE
AMAT DPX IMPLANTER
(PIDim)
DRAWING TITLE REVISION DATE

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
GENERAL
TITLE SHEET
PIDimG01A
GENERAL NOTES
KEYED NOTES
2417
853 2061 3555 447

75
ASSEMBLED TOOL DATUM

FRONT VIEW SIDE VIEW ASSEMBLED TOOL DATUM
IMPLANTER CLEARANCES
DATUM PLANE DATUM PLANE
DATUM PLANE
® 3600 NE
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BACK VIEW ISOMETRIC VIEW

IMPLANTER MAIN BODY
P1222 RP
PIDim
GENERAL
EQUIPMENT TEMPLATE
PIDimG02
HDP
FRONT VIEW
® 3600 NE
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P1222 RP
PIDim
GENERAL
TOP VIEW EQUIPMENT TEMPLATE
FACTORY INTERFACE DETAIL
PIDimG03
GENERAL NOTES
KEYED NOTES
2
2
2
2
2
2
2
1
1
TOP VIEW
EQUIPMENT DETAIL FI & ELECTRICAL POCS
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PLAN VIEW BOTTOM
ASSEMBLED TOOL
P1222 RP
PIDim
GENERAL
EQUIPMENT TEMPLATE
PIDimG04
GENERAL NOTES
KEYED NOTES
PARTIAL BACK VIEW
TOP VIEW
IMAC CLEARANCES
® 3600 NE
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FRONT VIEW LEFT SIDE VIEW

IMAC
P1222 RP
PIDim
GENERAL
EQUIPMENT TEMPLATE
PIDimG05
FRAME, 54.25 [1378.0]
GENERAL NOTES
LcHe, 52.41 [1331.2]
PUMP 2 FORELINE, 44.17 [1121.9]
PUMP 2 EXHAUST, 43.08 [1094.2]
PCWS/PCWR, 27.28 [692.9]
UN2, 27.19 [690.6]
PUMP 2 POWER, 26.81 [681.0]
COG, 26.33 [668.9]
120V POWER, 24.81 [630.2]
PUMP 1 POWER, 22.81 [579.4]
COMMS, 21.00 [533.4]
ACCESSORY 1 & 2 POWER, 17.38 [441.3]
PUMP 1 FORELINE, 9.96 [253.1] (C881 & C882) ACCESSORY 1 & 2 POWER, Ø1.13"
PUMP 1 EXHAUST, 8.87 [225.4]
DATUM, .06 [1.6]
KEYED NOTES
(G824) LcHe
(X838) PUMP 2 EXHAUST
(G823) UN2
PUMP 1 & 2 (X837) PUMP 1 EXHAUST
FRAME
45.00 [1143.0] EXHAUST UN2
42.45 [1078.2] 40.00 [1016.0] (W821) PCWS
ACCESSORY
1 & 2 POWER LcHe
42.00 [1066.8] PCWS (W822) PCWR
42.99 [1091.9]
35.00 [889.0]
PCWR COG (EP-A) COMMUNICATION CONDUIT LANDING ZONE
30.00 [762.0] 20.29 [515.4]
COMMS PUMP 1 & 2
21.00 [533.4] FORELINE (V802) PUMP 2 FORELINE
15.93 [404.7]
(V801) PUMP 1 FORELINE
PUMP1, 2 POWER
10.38 [263.5]
PUMP RACK 1 CLEARANCES
(C802) PUMP 2 POWER, Ø0.88"
120V POWER 8.38 [212.7] TOP (C801) PUMP 1 POWER, Ø0.88"
(C800) 120V POWER, Ø0.88" SINGLE MIDAS TIB

BRACKET
PUMP 1 & 2
FORELINE
83.27 [2114.9]
PUMP 1 PUMP 2
IXH1220H IXH1220H PUMP 1 & 2
EXHAUST
80.00 [2032.0]
PCWS/PCWR
75.25 [1911.4]
ACCESSORY
1 & 2 POWER UN2
LcHe
75.93 [1928.5] FRAME, 74.86 [1901.4]
72.52 [1842.1]
PUMP 1 & 2 POWER,
120V POWER
78.00 [1981.2]
COG
51.17 [1299.8]
HEAT HEAT
EXCHANGER EXCHANGER
1 2
LEFT SIDE FRONT RIGHT SIDE REAR
PUMP RACK 1
® 3600 NE
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P1222 RP
PIDim
GENERAL
EQUIPMENT TEMPLATE
PIDimG06
GENERAL NOTES
KEYED NOTES
FRONT VIEW LEFT SIDE VIEW BACK VIEW

SMC H2000 #1
SMC H2000 #1, #2
DISCONNECT CLEARANCES
BACK VIEW
SMC H2000 #2
DISCONNECT RACK
ELEVATION
6EEP HOSE MITIGATION ® 3600 NE

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FRONT VIEW
DESIGNER NOTES
MONITOR 1 & 2
P1222 RP
PIDim
GENERAL
EQUIPMENT TEMPLATE
PIDimG07
DESIGNER NOTES
Ap/Ac
Kp
Kp
Kp
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PIDim
GENERAL ROUTING
COORDINATION PLAN
PIDimG08
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES
P1222 RP
EB/OHV DETAIL PIDim
ARCHITECTURAL
FAB PARTIAL PLAN (FLOW THRU)
PIDimA01
GENERAL NOTES
KEYED NOTES
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PIDim
ARCHITECTURAL
SUBFAB PARTIAL PLAN
PIDimA02
GENERAL NOTES
NOTES
KEYED NOTES
CAUTION:
OHV SAFETY
ENVELOPE ABOVE
THIS POINT
VVVVVVVVVVVVV
BAY ELEVATION
GLOBAL POST
DETAIL
DESIGNER NOTES
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STICK MOUNT SUPPORT DETAIL
P1222 RP
PIDim
ARCHITECTURAL
BAY ELEVATION ELEVATIONS (FLOW THRU)
PIDimA03
GENERAL NOTES
PERFORATED PERFORATED QUARTER VIEW

QUARTER VIEW TILE ASSEMBLY - 1 OF 2 TILE ASSEMBLY - 2 OF 2
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PIDim
ARCHITECTURAL
DETAILS (FLOW THRU)
PIDimA04
GENERAL NOTES
PERFORATED HALF VIEW TILE

PERFORATED STD STRENGTH ASSEMBLY - 2 OF 2
HALF VIEW TILE ASSEMBLY - 1 OF 2
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PIDim
ARCHITECTURAL
DETAILS (FLOW THRU)
PIDimA05
GENERAL NOTES
VIEW TILE
STOCK TILE MODIFICATION
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PIDim
ARCHITECTURAL
DETAILS
PIDimA06
GENERAL NOTES
OHV PROTECTION GUARDS*

(VERTICAL GUARD w/ HORIZONTAL RUNGS)
OHV PROTECTION GUARD DETAIL -
FOR HORIZONTAL "RUNGS" (TYP) DESIGNER NOTES
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OHV PROTECTION GUARDS AND E84 DROPS OHV PROTECTION GUARD DETAILS PIDim
ARCHITECTURAL
LONGITUDINAL ELEVATION DETAILS (FLOW THRU)
PIDimA07
GENERAL NOTES
OHV PROTECTION GUARD DETAIL - OHV PROTECTION GUARDS* - EXYTE GRID SYSTEM
FOR HORIZONTAL "RUNGS" (TYP) (VERTICAL GUARD w/ HORIZONTAL RUNGS)
DESIGNER NOTES
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OHV PROTECTION GUARD DETAILS P1222 RP

OHV PROTECTION GUARDS AND E84 DROPS PIDim
EXYTE GRID SYSTEM ARCHITECTURAL
LONGITUDINAL ELEVATION - EXYTE GRID SYSTEM DETAILS (FLOW THRU)
PIDimA07A
GENERAL NOTES
BASEPLATE ASSEMBLY
DETAIL
AMHS CABLE ROUTING - EXYTE

GRID SYSTEM
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AMHS CABLE ROUTING PIDim
FLOOR TILE BOLTING BARRIER UNDER RAISED METAL FLOOR ARCHITECTURAL
DETAILS
PIDimA08
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES
P1222 RP
PIDim
EB/OHV DETAIL ARCHITECTURAL
FAB PARTIAL PLAN (BAY/CHASE)
PIDimA09
GENERAL NOTES
KEYED NOTES
BAY ELEVATION CHASE ELEVATION DESIGNER NOTES

NOTES
'D' STYLE ® 3600 NE

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STICK MOUNT SUPPORT DETAIL
P1222 RP
GLOBAL POST PIDim
DETAIL ARCHITECTURAL
ELEVATIONS (BAY/CHASE)
PIDimA10
GENERAL NOTES
1.
2.
3.
4.
5.
6.
GRATED QUARTER
VIEW TILE ASSEMBLY - 2 OF 2
GRATED
QUARTER VIEW TILE ASSEMBLY - 1 OF 2
1.
2.
3.
4.
5.
6.
® 3600 NE
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H , OR 97124
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GRATED GRATED P1222 RP

HALF VIEW TILE ASSEMBLY - 1 OF 2 HALF VIEW TILE ASSEMBLY - 2 OF 2 PIDim
ARCHITECTURAL
DETAILS (BAY/CHASE)
PIDimA11
GENERAL NOTES
KEYED NOTES
B
P
B
P
B
P
B
P
B
P
B
P
DESIGNER NOTES
B
P
B
P
P1222 RP
PIDim
MECHANICAL
SCHEMATIC
PIDimM01
NOT FOR CONSTRUCTION
MECHANICAL SCHEMATIC
INTEL CONFIDENTIAL
GENERAL NOTES
REFERENCE TO MATERIAL CLASS

CONSTRUCTION SPECIFICATION
P1222 RP
PIDim
MECHANICAL
FACILITY DATA
PIDimM02
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES
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PIDim
MECHANICAL
FAB ROUTING PLAN
PIDimM03
GENERAL NOTES
® 3600 NE
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P1222 RP
PIDim
MECHANICAL
SUBFAB ROUTING PLAN
PIDimM04
GENERAL NOTES MAINTENANCE PANEL STICK COMPONENTS
TYPE 1 MAINTENANCE EV FORELINE POPOUT SPOOL PIECE

PANEL & BA BOX
MAINTENANCE PANEL STICK COMPONENTS
CLCS/R PIPE INSULATION TERMINATON ® 3600 NE O e A e

S e 300
H , OR 97124
FLEXIBLE HOSE/TUBING THRU POPOUT T 503-439-8777
P1222 RP
PIDim
EXHAUST TEST AND BALANCE PORT MECHANICAL
DETAILS
PIDimM05
GENERAL NOTES
DESIGNER NOTES
#560
VOLUME DAMPER ASSEMBLY
RECTANGULAR POPOUT RECTANGULAR POPOUT
D1XM2, D1XM3, F34 D1XM1, F42
STANDARD ROUND POPOUT
POPOUT FILL DETAIL - DRY AREAS

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PIDim
HOUSE AND WET VACUUM DETAIL BLASTGATE DAMPER MECHANICAL
DETAILS
PIDimM06
GENERAL NOTES
Kp
KEYED NOTES
Kp
Kp
Gp Hp
Kp
Ap/Ac
Ap/Ac
Kp
Sp1/Sc1
BOX 1
Kp
Ep/Ec Cp/Cc DESIGNER NOTES
Brf
Fc
Drf
P1222 RP
PIDim
ELECTRICAL
SCHEMATIC
PIDimE01
DESIGNER NOTES GENERAL NOTES
KEYED NOTES
P1222 RP
PIDim
ELECTRICAL
FACILITY DATA
PIDimE02
DESIGNER NOTES
P1222 RP
PIDim
ELECTRICAL
50Hz FACILITY DATA
PIDimE02i
GENERAL NOTES
KEYED NOTES
Ap/Ac
Kp
Kp
Kp
®
P1222 RP
PIDim
ELECTRICAL
FAB ROUTING PLAN
PIDimE03
GENERAL NOTES
DESIGNER NOTES
P1222 RP
PIDim
ELECTRICAL
SUBFAB ROUTING PLAN
PIDimE04
GENERAL NOTES
P1222 RP
PIDim
ELECTRICAL
UTILITY ROUTING PLAN
PIDimE05
PIDim_402 AMAT UDS Electrical R6 11-19-2019
FACILITY POWER CONNECTIONS
Nameplate Values Termination Device Data
Short
Circuit Conductor Conductor
Full Conductor Tightening
Connection Location Current Voltage Frequency Size Termination Entry
Circuit Power Conductor Load Connection Size Minimum Torque
(Equipment Rating Rating Maximum Temperature
Identifier Type Designation(s)Rating Of Current Label (AWG or Specification Comments Point
Component) Equipment (V) (Hz) (AWG or Rating Identifier
Component (A) kcmil) (in.lb) (degC)
kcmil)
(A)
C001 IMAC (REMOTE AC) NORMAL L1+L2+L3 22kA 208 50/60 132 CB100 (1) 22 (1) 400 275 75 Facility Power to IMAC CB100 @ 250A. See Detail 2 on E102-01 EP-F
C001 IMAC (REMOTE AC) NORMAL G - 208 50/60 - GND BUS (1) 8 (1) 1/0 90-110 75 See Detail 2 on E102-01 EP-F
PIDim UDS Electrical R2 101619

FACILITY POWER CONNECTIONS
Nameplate Values Termination Device Data
Short Circuit Conductor Conductor
Full Conductor
Connection Location Current Rating Voltage Frequency Size Tightening Torque Termination Entry
Circuit Power Conductor Load Connection Size Minimum
(Equipment
Type Of Equipment Rating Rating Maximum Specification Temperature Comments Point
Identifier Designation(s) Current Label (AWG or Rating
Component) Component (V) (Hz) (AWG or (in.lb) Identifier
(A) kcmil) (degC)
(A) kcmil)
C800 Pump Rack 1 NORMAL L1 5,000 120 50/60 30 120V TB1 (1) 22 AWG (1) 6 AWG 12 75 -
C800 Pump Rack 1 NORMAL N 5,000 120 50/60 30 N (1) 14 AWG (1) 2/0 120 75 -
(1) 14 AWG (1) 10 AWG 35
C800 Pump Rack 1 NORMAL G - 120 50/60 N/A PE (1) 8 AWG (1) 8 AWG 40 75 -
(1) 6 AWG (1) 4 AWG 50
FACILITY SIGNAL/CONTROL CONNECTIONS
Electrical Circuit Data Termination Device Data
Total
Power Upstream Conductor
Power Number Full Conductor Tightening
Connection Location Source Circuit Size Entry
Circuit Connection Located In Source
Voltage Of Cable Load Breaker Trip Size Minimum Maximum Torque Circuit
(Equipment Comments Point
Identifier Label NEC (V) Conductors Configuration Current (AWG or Specification Function
Component) Equipment Or Fuse (AWG or Identifier
Component? Class (Excluding (A) (A) kcmil) (in.lb)
kcmil)
Grounds)
C825 Pump Rack 1 LAN 1 N - - 8 None - - - - N/A VPMS Between Pump Rack 1 and Facilities, CAT5 Cable. EP-A
C826 Pump Rack 1 PL11 - pins 1 & 3 N - - 2 None - - 28 AWG 18 AWG N/A Pump Loss of N2 to LSS Between Pump Rack 1 and Facilities. See Detail #1 in E102 EP-A
SUPPLIER-PROVIDED ELECTRICAL BONDING CONNECTIONS

Number Of
Electrical
Tightening
Bonding Conductor Size Conductor Size
Electrical Bonding Location Torque
Label Connections Minimum Maximum Comments
(Equipment Component) Specification
Available To (AWG or kcmil) (AWG or kcmil)
(in.lb)
Customer
(#)
IMAC (REMOTE AC) GND BUS 7 (1) 22 (1) 1/0 90-110
IMAC (REMOTE AC) GND 1 12 (1) 22 (1) 1/0 75
IMAC (REMOTE AC) GND 2 12 (1) 22 (1) 1/0 75
ASSEMBLED TOOL (MAINFRAME) GND 6 (1) 22 (1) 250 75
20 in.lb for 8-32 screw and 75 for
ASSEMBLED TOOL (CHAMBER A) Ground BUS 10 (1) 14 (1) 1/0 20 and 75
1/4-20 screw.
20 in.lb for 8-32 screw and 75 for
ASSEMBLED TOOL (CHAMBER C) Ground BUS 10 (1) 14 (1) 1/0 20 and 75
1/4-20 screw.
SMC H2000 #1 GND HX 2 (1) 14 (1) 4 27
SMC H2000 #2 GND HX 2 (1) 14 (1) 4 27
SUPPLIER-PROVIDED ELECTRICAL BONDING CONNECTIONS
Number Of
Electrical
Tightening
Electrical Bonding Bonding Conductor Size Conductor Size Torque
Location Label Connections Minimum Maximum Comments
Specification
(Equipment Component) Available To (AWG or kcmil) (AWG or kcmil)
(in.lb)
Customer
(#)
Pump Rack 1 GND Plate 1 14 AWG 2/0 AWG 50 Wire sizing for Cu-stranded wire.
®
P1222 RP
PIDim
ELECTRICAL
SUPPLIER DATA
PIDimE06
SUPPLIER-PROVIDED INTERCONNECT CABLES
Source Destination/Load Circuit Data Cable/Connection Data
Upstream Number Source Dest./Load
Source Dest./Load
Circuit of UL/NEC Insulation Diameter Bending End End Can Customer Bundle
Circuit Connection Locations Connection Connection Locations Connection Voltage Conductor Size Equipment Number Total Connector End Connector End Is Connector Supplier Source Destination
Breaker Conductors of Ground Type Rating Radius Make-Up Make-Up Cut Diameter Entry Point Entry Point
Identifier (Equipment Location) Label (Equipment Location) Label
NEC Class (V) Trip or (AWG or kcmil) Supplier Part (in) Length (ft) Cross-Section Cross-Section Field-Installed? Bundle Comments
Number (Excluding Wires Designation (V) (in) Length Length Cable/Conductor? Identifier (in) Identifier Identifier
(in) (in)
Fuse (A) Grounds) (ft) (ft)
ASSEMBLED TOOL CHAMBER DNET
S001 SMC H2000 #1 - 2 24 - 20 0150-18628 4 1 PLTC 300 0.33 1.65 98.5 6.00 0.00 N 1.060 1.060 N - - Source make-up length calculated from EP_CHA2. EP-CHA2 -
(CHAMBER A) BLOCK
ASSEMBLED TOOL Source make-up length calculated from EP_CHA2. See Detail
S002 (CHAMBER A) RJ CUSTOMER-PROVIDED PUMP #1 - 2 24 - 24 0150-76186 15 0 CMG 300 0.28 2.75 75 3.00 - N 1.685 x 0.63 1.349 N - - EP-CHA2 -
1 on E102-01 for cable Wire List for detail
IMAC (EQUIPMENT Destination make-up length calculated from EP_CHA2. RF
S003 - ASSEMBLED TOOL (CHAMBER A) - RF 500 - 22 0190-63388 1 0 - 7000 0.55 5.45 112.7 5.50 9.00 N 0.910 0.910 N - - EP-C EP-CHA2
RACK) cable must route separate in a noise inmute environment.
ASSEMBLED TOOL RF SOURCE

S004 - IMAC (EQUIPMENT RACK) 2 24 - 24 0150-48760 2 1 CMG 300 0.16 1.60 100 6.00 6.00 N 1.215 x 0.55 1.215 x 0.55 N - - Source make-up length calculated from EP_CHA2. EP-CHA2 EP-C
(CHAMBER A) GEN 1
ASSEMBLED TOOL J106 RF GEN 1
S005 IMAC (EQUIPMENT RACK) RF SOURCE 1 2 24 - 24 0150-48437 2 0 CMG 300 0.16 1.75 100 3.00 6.00 N 2.09 x 0.68 2.09 x 0.68 N - - Source make-up length calculated from EP_CHA2. EP-CHA2 EP-C
(CHAMBER A) ENABLE
IMAC (EQUIPMENT Destination make-up length calculated from EP_CHA2. RF
S006 - ASSEMBLED TOOL (CHAMBER A) - RF 500 - 22 0190-61385 1 0 - 7000 0.55 5.45 112.7 5.50 3.50 N 0.910 0.910 N - - EP-C EP-CHA2
ASSEMBLED TOOL
S007 - IMAC (EQUIPMENT RACK) RF GEN BIAS 2 24 - 24 0150-48761 2 1 CMG 300 0.16 1.60 100 6.00 6.00 N 1.215 x 0.55 1.215 x 0.55 N - - Source make-up length calculated from EP_CHA2. EP-CHA2 EP-C
(CHAMBER A)
ASSEMBLED TOOL J107 RF GEN
S008 IMAC (EQUIPMENT RACK) RF SOURCE 1 2 24 - 24 0140-82658 4 0 CMG 300 0.16 1.75 100 4.00 6.00 N 2.09 x 0.68 1.215 x 0.62 N - - Source make-up length calculated from EP_CHA2. EP-CHA2 EP-C
(CHAMBER A) ENABLE
ASSEMBLED TOOL CHAMBER DNET
S009 SMC H2000 #2 - 2 24 - 20 0150-18628 4 1 PLTC 300 0.33 1.65 98.5 6.00 0.00 N 1.060 1.060 N - - Source make-up length calculated from EP_CHC2. EP-CHC2 -
(CHAMBER C) BLOCK
ASSEMBLED TOOL Source make-up length calculated from EP_CHC2. See Detail
S010 (CHAMBER C) RJ CUSTOMER-PROVIDED PUMP #2 - 2 24 - 24 0150-76186 15 0 CMG 300 0.28 2.75 75 3.00 - N 1.685 x 0.63 1.349 N - - EP-CHC2 -
1 on E102-01 for cable Wire List for detail
IMAC (EQUIPMENT Destination make-up length calculated from EP_CHC2. RF
S011 - ASSEMBLED TOOL (CHAMBER C) - RF 500 - 22 0190-63388 1 0 - 7000 0.55 5.45 112.7 5.50 9.00 N 0.910 0.910 N - - EP-D EP-CHC2
ASSEMBLED TOOL RF SOURCE

S012 - IMAC (EQUIPMENT RACK) 2 24 - 24 0150-48760 2 1 CMG 300 0.16 1.60 100 6.00 6.00 N 1.215 x 0.55 1.215 x 0.55 N - - Source make-up length calculated from EP_CHC2. EP-CHC2 EP-D
(CHAMBER C) GEN 1
ASSEMBLED TOOL J106 RF GEN 1
S013 IMAC (EQUIPMENT RACK) RF SOURCE 1 2 24 - 24 0150-48437 2 0 CMG 300 0.16 1.75 100 3.00 6.00 N 2.09 x 0.68 2.09 x 0.68 N - - Source make-up length calculated from EP_CHC2. EP-CHC2 EP-D
(CHAMBER C) ENABLE
IMAC (EQUIPMENT Destination make-up length calculated from EP_CHC2. RF
S014 - ASSEMBLED TOOL (CHAMBER C) - RF 500 - 22 0190-61385 1 0 - 7000 0.55 5.45 112.7 5.50 3.50 N 0.910 0.910 N - - EP-D EP-CHC2
ASSEMBLED TOOL
S015 - IMAC (EQUIPMENT RACK) RF GEN BIAS 2 24 - 24 0150-48761 2 1 CMG 300 0.16 1.60 100 6.00 6.00 N 1.215 x 0.55 1.215 x 0.55 N - - Source make-up length calculated from EP_CHC2. EP-CHC2 EP-D
(CHAMBER C)
ASSEMBLED TOOL J107 RF GEN
S016 IMAC (EQUIPMENT RACK) RF SOURCE 1 2 24 - 24 0140-82658 4 0 CMG 300 0.16 1.75 100 4.00 6.00 N 2.09 x 0.68 1.215 x 0.62 N - - Source make-up length calculated from EP_CHC2. EP-CHC2 EP-D
(CHAMBER C) ENABLE
S017 IMAC (REMOTE AC) J108 SMC H2000 #1 - 2 24 6 16 0150-76646 4 0 CMP 300 0.20 2.00 75 0.00 0.00 N 0.825 0.825 N - - - -
S018 SMC H2000 #1 - SMC H2000 #2 - 2 24 6 16 0150-20112 4 0 CMP 300 0.20 2.00 6 0.00 0.00 N 0.825 0.825 N - - Supplier will install S018 - -
S021 IMAC (REMOTE AC) J107 ASSEMBLED TOOL (MAINFRAME) EJ9 2 24 6 16 0150-76646 4 0 CMP 300 0.20 2.00 75 0.00 6.00 N 0.825 0.825 N - - - EP-MF2
ASSEMBLED TOOL
S022 J12 IMAC (REMOTE AC) J101 2 24 - 24 0150-15310 4 0 CMG 300 0.21 2.10 75 6.00 0.00 N 2.74 x .80 1.349 N - - EP-MF2 -
(MAINFRAME)
CB210-1,
CB205-1, CB205-2, CB210-3, 0.68 x 0.56 0.68 x 0.56 each AC power IMAC to CHA. Destination make-up length
S023 IMAC (REMOTE AC) ASSEMBLED TOOL (CHAMBER A) P 208 100A 2 0140-87039 3 1 TC-ER 600 1.27 5.09 77.28 8.00 3.67 N N - - EP-E EP-CHA1
CB205-3, GND 1 CB210-5, each lug lug calculated from EP_CHA1
Ground BUS
CB210-1,
CB405-1, CB405-2, CB210-3, 0.68 x 0.56 0.68 x 0.56 each AC power IMAC to CHC. Destination make-up length
S024 IMAC (REMOTE AC) ASSEMBLED TOOL (CHAMBER C) p 208 100A 2 0140-87041 3 1 TC-ER 600 1.27 5.09 78.28 9.00 3.67 N N - - EP-E EP-CHC1
CB405-3, GND 2 CB210-5, each lug lug calculated from EP_CHC1
Ground BUS
CB106-2, CB106-4, L1, L2, L3, 0.398 x 0.314 0.47 x 0.34 each
S025 IMAC (REMOTE AC) ASSEMBLED TOOL (MAINFRAME) p 208 50A 6 0140-87043 3 1 TC-ER 600 0.90 3.60 76.94 9.00 2.33 N N - - AC power IMAC to MF EP-E EP-MF1
CB106-6, GND 1 GND each lug lug
CB202-1, CB202-2, CB-1, CB-3, 0.312 x 0.23 0.52 x 0.225 each AC power IMAC to HE#1. Supplier will terminate AC power
S026 IMAC (REMOTE AC) SMC H2000 #1 CB-5, GND p 208 30A 10 0150-54743 3 1 TC-ER 600 0.58 2.31 60.54 8.00 3.33 N N - - EP-E EP-HX1
CB202-3, GND 1 each lug lug cable at customer provided receptacle.
HX
CB402-1, CB402-2, CB-1, CB-3, 0.312 x 0.23 0.52 x 0.225 each AC power IMAC to HE#2. Supplier will terminate AC power
S027 IMAC (REMOTE AC) SMC H2000 #2 CB-5, GND p 208 30A 10 0150-54744 3 1 TC-ER 600 0.58 2.31 61.54 9.00 3.33 N N - - EP-E EP-HX2
CB402-3, GND 2 each lug lug cable at customer provided receptacle.
HX
GENERAL NOTES
P1222 RP
PIDim
ELECTRICAL
SUPPLIER DATA
PIDimE07
CUSTOMER-PROVIDED INTERCONNECT CABLES
Electrical Circuit Data Source Termination Device Data Destination/Load Termination Device Data
Total Upstream Conductor Conductor Conductor Conductor

Full Conductor Tightening Conductor Tightening Source
Number Of Circuit Size Termination Size
Circuit NEC Voltage Conductor Cable Circuit Load Device Location Connection Size Minimum Torque Connection Size Minimum Torque Termination Entry
Destination
Conductors Breaker Trip Maximum Temperature Device Location Maximum Temperature Comments Entry Point
Identifier Class (V) Designation(s) Configuration Function Current Or Fuse (Equipment Component) Label (AWG or Specification Rating Label (AWG or Specification Rating Point
(Excluding (AWG or (Equipment Component) (AWG or Identifier
(A) kcmil) (in.lb) kcmil) (in.lb) Identifier
Grounds) (A) kcmil) (degC) kcmil) (degC)
Power Pump 1
C801 P 208 L1+L2+L3 3 None 38 - AC Rack - - - - - Pump Rack 1 Disconnect Box DISC1 (1) 12 AWG (1) 4 AWG 25 75 Power disconnect for Pump 1. See Detail #3 in E102. - -
(Cxxx)
Power Pump 1
C801 G 0 G 1 None - - AC Rack - - - - - Pump Rack 1 Disconnect Box DISC1 (1) 12 AWG (1) 4 AWG 25 75 Power disconnect for Pump 1. See Detail #3 in E102. - -
(Cxxx)
Power Pump 2
C802 P 208 L1+L2+L3 3 None 38 - AC Rack - - - - - Pump Rack 1 Disconnect Box DISC2 (1) 12 AWG (1) 4 AWG 25 75 Power disconnect for Pump 2. See Detail #3 in E102. - -
(Cxxx)
Power Pump 2
C802 G 0 G 1 None - - AC Rack - - - - - Pump Rack 1 Disconnect Box DISC2 (1) 12 AWG (1) 4 AWG 25 75 Power disconnect for Pump 2. See Detail #3 in E102. - -
(Cxxx)
Pump Interface Tool to Pump Comms Cable Pump 1 (iXH1220H)
C811 2 - Signal/Control - - - - Assembled Tool - - - - - Pump Rack 1 (TIB) Pump 1 - - - 75 - EP-A
(Sxxx) 16-pin CPC connector. See Detail #2 in E102.
Pump Interface Tool to Pump Comms Cable Pump 2 (iXH1220H)
C812 2 - Signal/Control - - - - Assembled Tool - - - - - Pump Rack 1 (TIB) Pump 2 - - - 75 - EP-A
(Sxxx) 16-pin CPC connector. See Detail #2 in E102.
Pump Rack 1 For Reference Only: Signaling cables between tool supplier equipment
C815 - - - - - (Sxxx) - - - - - - - Assembled Tool - - - - - - EP-A
Heat Exchanger 1
Heat Exchanger 2
Heat Exchanger 1
Heat Exchanger 2
Power Heat
Exchanger 1 Pump Rack 1 Receptacle for Heat Exchanger 1 in Pump Rack 1.
C881 - - - - - - - Assembled Tool - - - - - Junction Box 1 - - - - 75 Edwards to provide cord/plug, customer to terminate cord/plug. - -
Pump Rack 1
Receptacle 1 See Detail #4 in E102.
(Cxxx)
Power Heat
Pump Rack 1 Receptacle for Heat Exchanger 2 in Pump Rack 1.
Exchanger 2
C882 - - - - - - - Assembled Tool - - - - - Junction Box 1 - - - - 75 Edwards to provide cord/plug, customer to terminate cord/plug. - -
Pump Rack 1
Receptacle 2 See Detail #4 in E102.
(Cxxx)

CUSTOMER-PROVIDED INTERCONNECT CABLES
Electrical Circuit Data Source Termination Device Data Destination/Load Termination Device Data
Total Upstream
Conductor Conductor Conductor
Number Circuit Conductor Tightening Conductor Conductor Tightening Source
Full Load Size Termination Termination Destination
Circuit NEC Voltage Conductor Of Cable Circuit Breaker Device Location Connection Size Minimum Torque Connection Size Minimum Size Maximum Torque Entry
Current Maximum Temperature Device Location Temperature Comments Entry Point
Identifier Class (V) Designation(s) Conductors Configuration Function Trip Or (Equipment Component) Label (AWG or Specification Label (AWG or (AWG or Specification Point
(A) (AWG or Rating (Equipment Component) Rating Identifier
(Excluding Fuse kcmil) (in.lb) kcmil) kcmil) (in.lb) Identifier
kcmil) (degC) (degC)
Grounds) (A)
IMAC (REMOTE AC) (1) 10 (1) 4 CUSTOMER-PROVIDED
C301 P 208 L1+L2+L3 3 None Power 38 50 CB204 20 75 - - - - 75 See Detail 2 on E102-01 EP-E -
PUMP #1
C301 G - G 0 None Power - - GND 1 75 75 - - - - 75 See Detail 2 on E102-01 EP-E -
PUMP #1
C302 P 208 L1+L2+L3 3 None Power 38 50 CB404 20 75 - - - - 75 See Detail 2 on E102-01 EP-E -
PUMP #2
C302 G - G 0 None Power - - GND 2 75 75 - - - - 75 See Detail 2 on E102-01 EP-E -
PUMP #2

C401 P 208 L1+L2+L3 3 None Power 12 15 CB203 20 75 - - - - 75 See Detail 2 on E102-01 EP-F -
Remote LOTO BOX #1

C401 G - G 0 None Power - - GND 2 75 75 - - - - 75 See Detail 2 on E102-01 EP-F -
Remote LOTO BOX #1
CUSTOMER-PROVIDED IMAC (REMOTE AC) (1) 14 (1) 10
C402 P 208 L1+L2+L3 3 None Power - - - - - - - J203 - 75 See Detail 1 on E102-02 - EP-B
Remote LOTO BOX #1
C402 G - G 0 None Power - - - - - - - GND 3 75 75 See Detail 1 on E102-02 - EP-B
Remote LOTO BOX #1

Remote LOTO BOX #2

Remote LOTO BOX #2
C404 P 208 L1+L2+L3 3 None Power - - - - - - 75 J601 - 75 See Detail 2 on E102-02 - EP-B
Remote LOTO BOX #2
C404 G - G 0 None Power - - - - - - 75 GND 3 75 75 See Detail 2 on E102-02 - EP-B
Remote LOTO BOX #2

Remote LOTO BOX #3

Remote LOTO BOX #3
C502 P 208 L1+L2+L3 3 None Power - - - - - - - J403 - 75 See Detail 1 on E102-02 - EP-B
Remote LOTO BOX #3
C502 G - G 0 None Power - - - - - - - GND 3 75 75 See Detail 1 on E102-02 - EP-B
Remote LOTO BOX #3
CUSTOMER-PROVIDED
®
C503 P 208 L1+L2+L3 3 None Power 12 15 IMAC (REMOTE AC) CB603 (1) 14 (1) 10 20 75 - - - - 75 See Detail 2 on E102-01 EP-F -
Remote LOTO BOX #4

Remote LOTO BOX #4
C504 P 208 L1+L2+L3 3 None Power - - - - - - 75 J603 - 75 See Detail 2 on E102-02 - EP-B
Remote LOTO BOX #4
C504 G - G 0 None Power - - - - - - 75 GND 3 75 75 See Detail 2 on E102-02 - EP-B
Remote LOTO BOX #4
P1222 RP
PIDim
ELECTRICAL
SUPPLIER DATA
PIDimE0
BONDING CONDUIT TO LADDER TYPE CABLE TRAY
SUBFAB RACE AY/MC CABLE ROUTING
FLO THROUGH FAB

BONDING CONDUIT AT ROXTEC
TYPICAL RACE AY/MC CABLE

SUPPORT UNDER RAISED FLOOR
RF/PO ER/CLASS 1 CABLE

COILING METHOD
STRUT TO RAISED FLOOR P1222 RP

PEDESTAL MOUNTING PIDim
ELECTRICAL
DETAILS
PIDimE0
T O HOLE COMPRESSION PLATE SINGLE HOLE COMPRESSION PLATE
BONDING OF RACE AY
ATTACHED TO METALLIC ENCLOSURE
BONDING ENCLOSURE/ IRE AY TO STRUT SINGLE HOLE COMPRESSION

PLATE CONNECTION
ADDING A SUPPLEMENTARY GROUND BUS
T O HOLE COMPRESSION BONDING CONDUIT TO E UIPMENT

PLATE CONNECTION
BONDING STRUCTURAL PEDESTAL
BONDING E UIPMENT TO
RAISED FLOOR STRINGER P1222 RP
PIDim
ELECTRICAL
DETAILS
PIDimE10
2 GANG OUTLET BOX MOUNTING
BRACKET
GLOBAL COLUMN/POST MOUNTED DE ICE MOUNTED ON RAISED FLOOR STANCHION

FOURPLEX RECEPTACLE
AFM 4 FLOOR BOX AFM 4 FLOOR BOX AFM 4 FLOOR BOX T O DUPLEX
RAISED ACCESS FLOOR CUTOUT ITH SINGLE GANG BOX RECEPTACLES AND ONE DATACOM OUTLET
P1222 RP
PIDim
ELECTRICAL
DETAILS
PIDimE11
GENERAL NOTES GENERAL NOTES (CONT) DESIGNER NOTES

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
GENERAL NOTES
PIDimS00
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES

Suite 300
Hillsboro, OR 97124
T 503-439-8777
PEDESTAL PLAN DATUM DETAIL P1222 RP

PIDim
STRUCTURAL
PEDESTAL PLAN
PIDimS01
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES

Suite 300
Hillsboro, OR 97124
T 503-439-8777

PIDim
STRUCTURAL
PEDESTAL PLAN
PIDimS01A
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES

Suite 300
Hillsboro, OR 97124
T 503-439-8777

PIDim
STRUCTURAL
PEDESTAL PLAN
PIDimS01B
KEYED NOTES CONT. KEYED NOTES GENERAL NOTES
SECTION 1 PEDESTAL PLAN SECTION 1 TOP PLATE PLAN
SECTION 2 TOP PLATE PLAN

SECTION 2 PEDESTAL PLAN
PEDESTAL ELEVATION PEDESTAL SECTION

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
PEDESTAL ELEVATION PEDESTAL ELEVATION PEDESTAL SECTION SECTIONS & DETAILS
PIDimS02
GENERAL NOTES
KEYED NOTES
SECTION 3 PEDESTAL PLAN SECTION 3 TOP PLATE PLAN
PEDESTAL ELEVATION PEDESTAL ELEVATION PEDESTAL SECTION PEDESTAL ELEVATION

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
MOVE-IN PLATE SECTION PIDim
STRUCTURAL
SECTIONS & DETAILS
PIDimS03
GENERAL NOTES
KEYED NOTES
TYPICAL CHAMBER PEDESTAL TYPICAL PEDESTAL CHAMBER

SECTION FRAMING PLAN SECTION TOP PLATE PLAN
PEDESTAL SECTION PEDESTAL ELEVATION

Suite 300
Hillsboro, OR 97124
T 503-439-8777
COVER PLATE P1222 RP

PIDim
STRUCTURAL
SECTIONS & DETAILS
PIDimS04
GENERAL NOTES
KEYED NOTES
CHAMBER A CHAMBER C
PEDESTAL DETAIL PEDESTAL DETAIL

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
PEDESTAL DETAILS
PIDimS05
GENERAL NOTES
KEYED NOTES

Suite 300
Hillsboro, OR 97124
MAINFRAME FACTORY INTERFACE IPUP PROCESS CHAMBER A,C PROCESS CHAMBER (EA) T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
PEDESTAL SEISMIC RESTRAINT PLAN SEISMIC RESTRAINT PLAN
PIDimS06
GENERAL NOTES
KEYED NOTES
MOVE-IN PLATE TOP PLATE DETAIL MOVE-IN PLATE MOVE-IN PLATE
MOVE-IN PLATE

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
DETAILS
PIDimS07
GENERAL NOTES
TYPICAL ANGLE TO
HSS WELD DETAIL
TYPICAL ANGLE TO
ANGLE WELD DETAIL
PEDESTAL FRAMING WELD DETAILS
TYPICAL PLATE TO
HSS WELD DETAIL
FRAMING CORNER WELD DETAILS

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
RAISED ACCESS FLOOR SUPPORT DETAILS
PIDimS0
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES
PUMP RACK IMAC SMC HX

RESTRAINT PLAN RESTRAINT PLAN RESTRAINT PLAN
PEDESTAL " " CLIP RESTRAINT ANGLE RESTRAINT

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
IMAC ANGLE RESTRAINT PEDESTAL " " CLIP RESTRAINT ANGLE RESTRAINT DETAILS
PIDimS0
375 375 FULL 3" HSS CAP PLATE 375 375 FULL CAP PLATE 375 375 ECCENTRIC CAP PLATE
FASTENER INSTALLATION SCHEDULE OPUS LEG ASSEMBLY SCHEDULE

12
09
05
EXTRUSION CUT LENGTH SCHEDULE
OPUS LEG ASSEMBLY DETAILS

Suite 300
Hillsboro, OR 97124
T 503-439-8777
GENERAL NOTES
DESIGNER NOTES
375 200 FULL 2" HSS CAP PLATE P1222 RP
PIDim
STRUCTURAL
PEDESTAL DETAILS
PIDimS10
4 1/2" FULL TAB/SLOT BASEPLATE
4 1/2" HALF TAB/SLOT BASEPLATE
DENSE REBAR
DENSE REBAR
375 200 BENT CHANNEL PLATE 375 375 BENT CHANNEL PLATE

Suite 300
Hillsboro, OR 97124
T 503-439-8777
GENERAL NOTES
DESIGNER NOTES
P1222 RP
PIDim
STRUCTURAL
PEDESTAL DETAILS
PIDimS11
GENERAL NOTES
DESIGNER NOTES
GRAVITY LEG DETAIL
4 1/2" HALF BASEPLATE 4 1/2" FULL BASEPLATE

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL
PEDESTAL DETAILS
PIDimS11A
GENERAL NOTES
KEYED NOTES
DESIGNER NOTES

Suite 300
Hillsboro, OR 97124
T 503-439-8777
FALL PROTECTION PLAN

P1222 RP
PIDim
STRUCTURAL
FALL PROTECTION PLAN
PIDimS12
GENERAL NOTES
DESIGNER NOTES
ALT. HANGER ROD SUPPORT UNDER

"W" BEAM
SINGLE POINT INTERSECTION

BRACKET ELEVATION SINGLE POINT BRACKET CHANNEL TO BEAM CONNECTION
BACK TO BACK CHANNEL

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
NEW CHANNEL TO EXISTING "W" BEAMS PIDim
CHANNEL TO BEAM CONNECTION STRUCTURAL FALL
PROTECTION DETAILS
PIDimS13
GENERAL NOTES
DESIGNER NOTES
SINGLE POINT FALL PROTECTION

BRACKET ELEVATION - EXYTE CEILING

Suite 300
Hillsboro, OR 97124
T 503-439-8777
P1222 RP
PIDim
STRUCTURAL FALL
PROTECTION DETAILS
PIDimS13A
GENERAL NOTES
DESIGNER NOTES
TYPICAL RACK OVERHEAD CONN DETAIL

SUPPORT TO (E) WHITE STEEL
TYPICAL RACK OVERHEAD SUPPORT TO (E) CONC SLAB

Suite 300
Hillsboro, OR 97124
T 503-439-8777
RACK DETAIL WITH

OVERHEAD SUPPORT
P1222 RP
PIDim
STRUCTURAL
TYP. RACK DETAIL WITH TYPICAL RACK DETAILS
OVERHEAD SUPPORT
PIDimS14

PIDim Rev 0 Issue For Design 20221025

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CORPORATE SERVICES CONSTRUCTION / TOOL INSTALL DESIGN

P1222 REFERENCE PACKAGE

DRAWING TITLE REVISION DATE

® 3600 NE John Olsen Ave

® 3600 NE John Olsen Ave

853 2061 3555 447

ASSEMBLED TOOL DATUM

DATUM PLANE DATUM PLANE

BACK VIEW ISOMETRIC VIEW

PLAN VIEW BOTTOM

PARTIAL BACK VIEW

FRONT VIEW LEFT SIDE VIEW

(X838) PUMP 2 EXHAUST

120V POWER 8.38 [212.7] TOP (C801) PUMP 1 POWER, Ø0.88"

(C800) 120V POWER, Ø0.88" SINGLE MIDAS TIB

LEFT SIDE FRONT RIGHT SIDE REAR

FRONT VIEW LEFT SIDE VIEW BACK VIEW

6EEP HOSE MITIGATION ® 3600 NE

STICK MOUNT SUPPORT DETAIL

PERFORATED PERFORATED QUARTER VIEW

PERFORATED HALF VIEW TILE

OHV PROTECTION GUARDS*

OHV PROTECTION GUARD DETAILS P1222 RP

AMHS CABLE ROUTING - EXYTE

BAY ELEVATION CHASE ELEVATION DESIGNER NOTES

'D' STYLE ® 3600 NE

STICK MOUNT SUPPORT DETAIL

GRATED GRATED P1222 RP

REFERENCE TO MATERIAL CLASS

TYPE 1 MAINTENANCE EV FORELINE POPOUT SPOOL PIECE

MAINTENANCE PANEL STICK COMPONENTS

CLCS/R PIPE INSULATION TERMINATON ® 3600 NE O e A e

STANDARD ROUND POPOUT

POPOUT FILL DETAIL - DRY AREAS

PIDim UDS Electrical R2 101619

PIDim_402 AMAT UDS Electrical R6 11-19-2019

SUPPLIER-PROVIDED ELECTRICAL BONDING CONNECTIONS

ASSEMBLED TOOL RF SOURCE

ASSEMBLED TOOL RF SOURCE

Total Upstream Conductor Conductor Conductor Conductor

PIDim_404 AMAT UDS Electrical R2 08-31-2020

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

IMAC (REMOTE AC) (1) 14 (1) 10 CUSTOMER-PROVIDED

SUBFAB RACE AY/MC CABLE ROUTING

FLO THROUGH FAB

TYPICAL RACE AY/MC CABLE

RF/PO ER/CLASS 1 CABLE

STRUT TO RAISED FLOOR P1222 RP

BONDING ENCLOSURE/ IRE AY TO STRUT SINGLE HOLE COMPRESSION

T O HOLE COMPRESSION BONDING CONDUIT TO E UIPMENT

GLOBAL COLUMN/POST MOUNTED DE ICE MOUNTED ON RAISED FLOOR STANCHION

® 3600 NE John Olsen Ave

® 3600 NE John Olsen Ave

PEDESTAL PLAN DATUM DETAIL P1222 RP

® 3600 NE John Olsen Ave

PEDESTAL PLAN DATUM DETAIL P1222 RP

® 3600 NE John Olsen Ave

PEDESTAL PLAN DATUM DETAIL P1222 RP