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  • Cleanroom Certificate Report: Cleanroom Information Particle Counter Used

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    Sridhar Sri
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    The cleanroom certificate report showed that the filter tool room failed to meet the target ISO 14644-1 class 9 specifications. Particle counting was performed at 9 locations in the room over a period of 13 minutes using a particle counter. Particle concentrations exceeded the limit thresholds at the 0.5, 1, and 5 micron sizes indicating the room was not suitable for class 9 cleanroom use.

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    The cleanroom certificate report showed that the filter tool room failed to meet the target ISO 14644-1 class 9 specifications. Particle counting was performed at 9 locations in the room over a period of 13 minutes using a particle counter. Particle concentrations exceeded the limit thresholds at the 0.5, 1, and 5 micron sizes indicating the room was not suitable for class 9 cleanroom use.

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    © All Rights Reserved
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    8 views4 pages

    Cleanroom Certificate Report: Cleanroom Information Particle Counter Used

    Uploaded by

    Sridhar Sri
    The cleanroom certificate report showed that the filter tool room failed to meet the target ISO 14644-1 class 9 specifications. Particle counting was performed at 9 locations in the room over a period of 13 minutes using a particle counter. Particle concentrations exceeded the limit thresholds at the 0.5, 1, and 5 micron sizes indicating the room was not suitable for class 9 cleanroom use.

    Copyright:

    © All Rights Reserved
    Download as XLS, PDF, TXT or read online from Scribd
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    of 4

    Cleanroom Certificate Report

    ISO 14644-1:1999

    Date Format: dd/MM/yyyy

    Report: FILTER DIVISION-TOOL Date Data Taken 13-09-2022 - 13-09-2022


    ROOM(G.F)
    Certificate Result: Fail Time Data Taken 02:02:59 PM - 02:14:57 PM

    Cleanroom Information Particle Counter Used


    Zone Name filter toolroom Instrument 9306-V2
    Recipe Name filter shop Serial # 93062136032
    Target Class 9 Last Calibration Date 10-01-2022
    Area 79.0 m²
    OccupancyState AtRest
    Air Flow Direction Unidirectional

    Minimum Actual
    Locations/Zone 9 9
    Samples/Location 1 1
    Total Samples 9 9
    Sample Volume 2L 2.83 L
    Sample Time 00:01:00 00:01:00

    Particle Data Size Max Mean Std Dev 95% UCL


    Cumulative, #/m³ 0.5 10810950 9932549 669402 10356504
    Cumulative, #/m³ 1.0 3856537 3383903 324710 3589553
    Cumulative, #/m³ 5.0 475618 351786 67002 394221

    Location Averages Location # of Samples Size (µm) Conc (#/m³)


    Location01 1 0.5 9212368
    1.0 3036396
    5.0 247703
    Location02 1 0.5 9478799
    1.0 3084452

    page 1 of 4
    5.0 297527
    Location03 1 0.5 10762900
    1.0 3825442
    5.0 393993
    Location04 1 0.5 10810950
    1.0 3856537
    5.0 475618
    Location05 1 0.5 10540990
    1.0 3532156
    5.0 357597
    Location06 1 0.5 10115550
    1.0 3613074
    5.0 409187
    Location07 1 0.5 9165725
    1.0 3160778
    5.0 331449
    Location08 1 0.5 9298587
    1.0 3144876
    5.0 326148
    Location09 1 0.5 10007070
    1.0 3201414
    5.0 326855

    Comments

    Name (Operator): Date:


    Name (Reviewer): Date:

    Report Created by: SuperUser

    Date/Time Report Created: 14-09-2022 12:00:59 PM

    page 2 of 4
    -09-2022 - 13-09-2022

    :02:59 PM - 02:14:57 PM

    9306-V2
    93062136032
    10-01-2022

    Actual
    9
    1
    9
    2.83 L
    00:01:00

    Conc Limit
    35200000
    8320000
    293000

    Conc (#/m³)
    9212368
    3036396
    247703
    9478799
    3084452

    page 3 of 4
    297527
    10762900
    3825442
    393993
    10810950
    3856537
    475618
    10540990
    3532156
    357597
    10115550
    3613074
    409187
    9165725
    3160778
    331449
    9298587
    3144876
    326148
    10007070
    3201414
    326855

    page 4 of 4

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