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J. Mater. Res., Vol. 4, No. 2, Mar/Apr 1989 1989 Materials Research Society 385
0 580
0
0
2 Inactive
0 Natural Graphite Crystal
2 Raman (x2 - y2,xy)
2724
0
1 IR,Ellc
0
0
1 IR,E±c 500 1000 1500 2000 2500 3000
(x,y)
0 Wavenumber
FIG. 2. Raman spectra of crystalline graphites.
Lespade, Al-Jishi, and Dresselhaus25 contains a coherence the smallest particle size and be the most disordered of the
length and a line width as fitting parameters. carbons examined.
Figure 4 shows the relation of ID/IG to graphite par-
ticle size for Tuinstra and Koenig's14 original data plus
such additional data as could be gleaned from the litera- D. Diamond-like carbon
ture. A least squares regression produces the power func- The diamond-like carbons are amorphous carbon films
tion shown on the figure. The inverse relation between often formed from dehydrogenation of organic materials.
particle size and intensity ratio is rigorous to the statistical They are characterized by a high hardness and often con-
limitations of the data. tain a certain amount of hydrogen. See Woollam et al.22
The width of the G band and the D/G intensity ratio for an extensive bibliography.
were measured for all graphitic carbons examined in this The Raman spectra of diamond-like carbons (Fig. 3)
study (Table II). Although the data are too sparse to pre- consist of a distinctive broad band which seems to contain
sent as a map, to a rough approximation line width and in- several overlapping components lying between the two
tensity ratio appear to be independent variables. Glassy graphite bands and at higher wavenumbers than the dia-
carbons, amorphous carbons, and crystalline graphites all mond band. Similar spectra have been observed by Wada
plot into distinct regions in terms of these two variables. et al.33 and Ramsteiner et al.34
The graphitic carbon in the diamond films appears to have The question concerning the structure of diamond-like
carbon is whether these materials contain some percent-
age of tetrahedrally coordinated carbon atoms. Calculated
Raman spectra from analysis of multi-atom physical mod-
els of the structure suggest that the percentage of tetrahe-
dral carbon is small,35 a conclusion also reached by Wada
et al.33 The Raman spectra of the four diamond-like carbons
1000
examined are distinctly different from any of the graphitic
carbons and support the idea that diamond-like carbon is
structurally distinct. There was an insufficient number of
"5 specimens to investigate the range of variations that might
appear in the spectra.
100
IV. PHASE CHARACTERIZATION OF
DIAMOND FILMS
A. Diamond and non-diamond carbon
The sharp Raman line at 1332 cm"1 is the characteris-
tic signature of the diamond structure but the scattering ef-
ficiency is only 9 x 10~7 cm"'/sr, whereas the scattering
efficiency for graphite is 500 x 1O~7.33 Because the intrin-
FIG. 4. Literature data relating particle size to band intensity ratio. Cir- sic Raman intensity of the graphite spectrum is 50 times
cles, Ref. 14; triangles, Ref. 19; squares, Ref. 25; diamond, Ref. 20. that of the diamond spectrum, the Raman spectrum is a
very effective means of detecting percentage levels of
graphitic carbon in diamond films but is not a sensitive test
TABLE II. Band shape parameters for various graphitic carbons.
for diamond in the presence of other types of carbon. This
Specimen AvG (cm ')
is illustrated in Fig. 5, which shows the Raman spectra
ID/IG
of a sequence of films prepared with different ratios of
Natural graphite crystal 0 13 methane to hydrogen. The spectrum of the film prepared
HOPG 0 13 with 2% methane is dominated by the bands of graphitic
Pyrolytic graphite 0.07 23 carbon, and it would not be possible from the Raman
High purity, fine-grained graphite 0.11 18
spectrum alone to prove that diamond was present. As the
Polycrystalline graphite 0.20 28
Glassy carbon A 0.91 79 methane concentration is lowered, the diamond line gradu-
Glassy carbon B 1.32 61 ally comes to dominate the spectrum.
Burnt wood 0.77 107 The spectra presented in this investigation were all
Coke 0.76 99
Diamond film (2% CH4) 1.45 115
obtained with a microfocus Raman spectrometer so that
Diamond film (1.5% CH4) 1.23 141 the effective sampling area is on the order of 1-2 pirn in
Diamond film (1.0% CH4) 1.13 187 diameter. This means that one can examine individual
diamond crystals which in these films tend to be 10 to
1332
1574
1%CH4
80 Torr
990'C
1333
520 520
500 750 1000 1250 1500 1750 500 750 1500 1750
FIG. 5. Raman spectra of several diamond films on silicon substrates, showing improved quality with depositional conditions. The band at 520 cm ' is
due to the silicon substrate.
20 /u.m in linear dimension. Likewise one can examine grain range from rather broad down to widths comparable to
boundaries and other features on the diamond films. natural diamonds. The width of the line is sensitively de-
Raman spectra were measured on a suite of natural dia- pendent on the conditions of film growth. All of these mea-
monds including gem quality diamonds, several examples surements were made with a spectral slit width of 0.75 cm"1
of ballas diamonds (a translucent coarsely polycrystalline (75 fim) so that the results represent true line shapes un-
diamond usually found as spheres a few mm in diame- modified by slit functions.
ter36), and several examples of carbonado (a black poly-
crystalline diamond with interlocked crystallites in the
1-20 /xm size range.37'38 One of the ballas diamonds was B. Intensity and film thickness
sectioned and a careful grain-by-grain traverse made across The intensity of the diamond Raman line increases lin-
the surface. Except for the Raman line width and for the early with thickness of the diamond film (Fig. 7). The
occasional occurrence of a satellite band discussed in the thickness was measured with a Talley Surf profilometer on
section on hexagonal diamond, all spectra were identical. a series of films prepared by masking off a portion of the
The diamond spectrum shown in Fig. 1 may be taken as substrate so as to produce a sharp edge. The intensity was
the prototype. measured by drawing a base line along the scattering back-
The full width at half maximum varies with the type ground and measuring the peak count rate above the base
of diamond sample. Some representative data are shown in line. The fact that the plot does not go through zero is sim-
Fig. 6. The narrowest diamond line was produced by a ply an artifact of baseline construction. At the greatest
General Electric Company high pressure diamond with a thickness measured, the plot remains linear. It must even-
width of 1.7 cm"1. Natural diamonds including gem qual- tually level off when the film thickness becomes greater
ity and polycrystalline diamonds tend to have widths in the than the focusing depth of the laser beam. Although the
range of 2 cm" 1 . The lines of the CVD diamond films beam is converging as it emerges from the objective lens
PEAK WIDTH
9 0 0 ° 1% CH 4 60 Torr
7.4 cm" 1
w
20,000
3
o
o
9 8 0 ° .5% CH4 60 Torr
5cm" 1
10,000
I
GE Diamond 1.7 cm"' 10 20
1315 1320 1325 1330 1335 1340 1345 1350
FILM THICKNESS {y.m)
WAVENUMBER FIG. 7. Relation of the 1332 cm"1 Raman line intensity to film thickness.
FIG. 6. Raman line shapes for various diamonds and diamond films.
Full width at half maximum is given on each spectrum.
earlier.40 Three Raman-active modes are predicted. Two of
these, Alg and E2g, correspond to the triply-degenerate
stretching mode of cubic diamond, here split into a compo-
of the microscope, it produces Raman scattering from the nent vibrating in the plane of the hexagonal layers and a
full film thickness and indeed the lines of the silicon sub- component vibrating perpendicular to the layers. Unlike
strate appear on all of these spectra. graphite, the bonding strength of hexagonal diamond is
The absolute position of the thickness-intensity plot comparable parallel and perpendicular to the hexagonal
depends on laser power and other instrumental parameters. layers and the wavenumber separation between the Alg and
A well-defined diamond band was measured on a 0.6 ptm E2g modes is expected to be small. In analogy to wurtzite,
film in another experiment. the third Raman band of Elg symmetry is a shear mode that
would be expected to occur in the low wavenumber re-
V. HEXAGONAL DIAMOND gion. Like cubic diamond, the hexagonal diamond struc-
A. Theoretical considerations ture has no first order infrared absorption.
In the course of their research on high pressure dia-
mond, Bundy and Kasper39 succeeded in preparing a hex- TABLE III. Classification of the normal modes of hexagonal diamond.
agonal form of diamond. They assigned the structure to
NT Acoustic Vibrations Selection rules
space group P63/mmc, but the structure is not to be con-
fused with graphite. Although there are layers of carbon Alg 1 1 Raman: x2 + y2\z1
atoms in a 2H stacking, all carbons are 4-coordinated. A2g 0 0
Hexagonal diamond, also known by the mineral name, 0 0
lonsdaleite, is related to the 3C packing in cubic diamond B2g 1 1 Inactive
by the shift of one carbon layer along the 111 planes. Hex- Eig
1 1 Raman (yz, xz)
1 1 Raman (x2 — y2,xy)
agonal diamond has the same relation to cubic diamond as E2S
the wurtzite form of ZnS has to the sphalerite form of ZnS Alu 0 0
in the structurally similar zinc sulfide polymorphs. A2u 1 z 0
Bu 1 1 Inactive
The normal modes of hexagonal diamond were classi- B2u 0 0
fied among the irreducible representations of factor group Eu 1 (x,y) 0
D6h (Table III). The classification of the inactive B2g and E2u 1 1 Inactive
Bu phonons are interchanged from an analysis published
HEXAGONAL DIAMOND
[SHOCK LOADED]
2. 3
depositional processes including plasma excitation, and hot TABLE IV. Stress-induced Raman lineshifts in diamond films.
wire filament excitation. In nearly all cases, the diamond
line occurred exactly at 1332 cm"1. Substrate v (cm"1) \v (cm"1) Stress (GPa)
The exceptions were diamond films deposited on hard
Alumina 1345 + 13 + 5.5
substrates such as alumina, tungsten carbide, silica glass, 1328 - 4 -1.7
or SiAlON (Fig. 10). On these substrates, the diamond
Tungsten carbide 1327 - 5 -2.1
films gave Raman bands that were shifted in the range of 1328 - 4 -1.7
4-13 wavenumbers, with both positive and negative shifts 1328 - 4 -1.7
being observed (Table IV). The diamond line for films de- SiO2 glass 1337 + 5 +2.1
posited on soft substrates such as silicon were exactly at
SiAlON 1336 + 4 + 1.7
the expected 1332 cm"1 position.
The wavenumber of the diamond Raman line is known
to increase with pressure.41"44 Using the pressure depen-
dence curve of Sharma et al.,A1 it is possible to interpret spectral parameters and the structure state of graphitic car-
the small wavenumber shifts as internal stresses in the bon have been evaluated.
films brought about by mismatch between diamond film The diamond line exhibits changes in line width that
and substrate. These values also are listed in Table IV. The have been related to degree of structural order. In some cut
negative shifts have to be interpreted as films in tension diamonds a satellite line appears which has tentatively
and the positive shifts as films in compression. Much been assigned to regions of hexagonal diamond formed
smaller shifts in the Raman spectrum of silicon on silica during the cutting process. There are small shifts in the
were observed by Zorabedian and Adar45 and were also in- wavenumber position of the diamond line when the dia-
terpreted as due to local stress. mond films are deposited on hard substrates. These have
been correlated with stress state in the diamond.
VII. CONCLUSIONS Overall, the Raman spectrum has proved to be one of
Raman spectra have been measured on a variety of the most versatile signatures of synthetic diamond. Raman
natural and synthetic diamonds, diamond-like carbons, and spectroscopy is a nondestructive measurement and this is en-
graphitic carbons in order to test the applicability of hanced by the ability to use microfocus Raman for examin-
Raman spectroscopy as a characterization tool for synthetic ing grain structure within small areas of a diamond film.
diamonds. The diamond line is a reliable indicator of the
presence of diamond and with a microfocus Raman spec- ACKNOWLEDGMENTS
trometer, the diamond signature can be observed from The following individuals are thanked for the loan
grain to grain on a deposited film. Graphitic carbon has a of carbon materials: Peter Bachmann, Andrzej Badzian,
distinctly different Raman spectrum which is more intense Theresa Badzian, William Drawl, and Ronald Weimer for
than the diamond spectrum, allowing a small amount of CVD diamond films; Peter Thrower for graphites and
graphitic carbon to be recognized in diamond films. Many amorphous carbons; D. Snell for ballas diamond; Miles
of the investigations of the relationship between measured Bailey (Dupont Corp.) for hexagonal diamond powder;
Peter Koidl (Fraunhofer-Institute fur Festkorperphysik) for
diamond-like carbon; and R. C. DeVries (General Electric
1332 Co.) for high pressure diamond. Appreciation is extended
to Russell Messier and other members of the Diamond Re-
1345 search Group for helpful discussions and encouragement.
DIAMOND ON ALUMINA This work was supported by the Office of Naval Research.
NATURAL DIAMOND
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