This educational seminar discusses creating, measuring,

and troubleshooting Rough Vacuum.

Specifically, today’s talk will cover:

• Brief review of Vacuum Fundamentals
• Applications Using Rough Vacuum
• Rough Vacuum Pumps
• Rough Vacuum Gauges
• Troubleshooting Rough Vacuum Applications
• Summary and Preview of High Vacuum Webinar

Previous Webinar (Vacuum Fundamentals) is available for

download at:
http://www.agilent.com/en-us/training-events/eseminars/vacuum
Vacuum History Review

• Credited with first Vacuum Pump

• Magdeburg Experiment (1657)
Von Guericke
(1602-1686)

• Vacuum Tubes for Radio & Radar applications (Klystron

linear vacuum-tube amp)
• Invented ‘sputter-ion’ pump to improve tube life (1956)
• Inventors of Nuclear Magnetic Resonance (NMR)
Varian Brothers
(1898-1961)

2010
Pressure: Molecular Collisions
P = F/A
Momentum transfer from a particle hitting a fixed surface
creates a Force on the wall. PT
P1
F1 F2
F1

Flow Regimes: Viscous vs Molecular

MOLECULAR FLOW VISCOUS FLOW
(P < 1 mTorr) (P > 100 mTorr)
Conductance in Viscous Flow (> 100 mTorr)

D (cm)

L (cm)

 In Viscous Flow, the Conductance of a TUBE can be calculated using

the formula:
C = 180 D4 x P/L (l/sec)
D = Diameter of tube in cm
L = Length in cm Conductance of 1m (100 cm)
P = Pressure in Torr
tubing sizes at 500 mTorr
Diameter Conductance (m3/hr)

Snet = (C x S) ¼”
1” (NW25)
0.15
37

(C + S) 1.5” (NW40) 190

2” (NW50) 600
Conductance in Viscous Flow (> 100 mTorr)

D (cm)

L (cm)

 In Viscous Flow, the Conductance of a TUBE can be calculated using

the formula:
C = 180 D4 x P/L (l/sec)
D = Diameter of tube in cm
L = Length in cm Conductance of 1m (100 cm)
P = Pressure in Torr
tubing sizes at 500 mTorr
Diameter Conductance (cfm)

Snet = (C x S) ¼”
1” (NW25)
0.1
22

(C + S) 1.5” (NW40) 112

2” (NW50) 353
Pressure Regions: Rough Vacuum  UHV

Vacuum Pressure Regions

Transition
Ultra
High Rough
High Vacuum
Vacuum
Vacuum

Pressure (Torr)
Rough Vacuum Applications

Instrumentation & Mass Spec Vacuum Coating

- ‘Backing’ High Vacuum Pumps - Surface coatings for
- ‘Interface’ Pumping (Differential decorative or structural
Vacuum) properties

1 x 10-3 Torr 1 x 10-5 Torr Detector

1 – 3 Torr DUAL-INLET Turbo Pumps

Single Pump evacuates
multiple vacuum regions at
different pressures

Rough Vacuum Pump

Evacuates ‘Interface’ region to a
few Torr AND acts as ‘Backing’
pump for the Turbo
Rough Vacuum Applications

Automotive Water Removal

- Leak Detection (AC & Engine) - Insulation for Electrical
- Brake line filling Transformers
- Freeze Drying food and
pharmaceuticals
Rough Vacuum Applications

Heat Treatment (Furnaces) Vacuum Forming &

- Heating components under vacuum Conveyance
to change mechanical properties
Rough Vacuum Applications
Semiconductor Manufacturing
- Rough vacuum pumps are used for:
• Initial pump down from atmosphere
• Backing HV or UHV pumps
• Wafer transfer and loadlock chambers.
VACUUM PUMP SELECTION

• ROUGH VACUUM pumps are most effective

when gas is moving in VISCOUS FLOW
RANGE PUMP TYPE EXAMPLES

Diaphragm Pumps
Rough Displacement Rotary Vane Pumps
Atm - 10-3 Oil-Free Scroll Pumps
Vacuum Pumps Piston Pumps
Screw Pumps
Diffusion Pumps
Displacement Pumps Capture
High Vacuum 10-3 - 10-9 Turbo Molecular Pumps
Pumps
Cryo Pumps

Cryo Pumps,
Ultra High
< 10-10 Capture Pumps Ion Pumps
Vacuum Sublimation Pumps
Displacement Pumps: Rough Vacuum
ROUGH VACUUM PUMPS

DIAPHRAGM PUMPS
• Pressure differential created by deformation of elastic membrane allows gas
to enter the space above the piston
• Inlet valve closes & exhaust valve opens (discharge to atmosphere or to inlet
of a second chamber)
• Single and multi-stage models available
 Limited base pressure
 Frequent replacement of
diaphragms (annual)
 Maintenance can be
complicated
Rough Vacuum: Oil-Sealed RVP

OIL-SEALED ROTARY VANE PUMPS

• 1.5 m3/hr – 600 m3/hr
• Molecules in VISCOUS FLOW enter the pump inlet
• Gas is Isolated, Compressed (to above 760 Torr),
then Exhausted (or to 2nd stage)

Inlet Isolation Compression/Exhaust

Rough Vacuum: Oil-Free Scroll Pump

DRY SCROLL PUMPS (3 m3/hr – 35 m3/hr)

• Compact, Oil-free pumps with high pump speed and low mTorr base pressure
• Without OIL to achieve sealing, SCROLL PUMPS rely on (field replaceable)
TIP SEALS to achieve vacuum
• Single and Dual Stage Versions available:
- Maintenance Simplicity vs Base Pressure!

15m3/hr
• <50 dB15m3/hr
• Hermetically Sealed
ROUGH VACUUM PUMPS

PISTON PUMPS
• Piston pumps use coated PISTONS (eg.Teflon) and
CYLINDERS, and valving to achieve compression:
- Inline, V-Twin, and Opposed Piston designs
Displacement Pump Comparison

Diaphragm Oil-Sealed Oil-Free Scroll Oil Free

Pump Rotary Vane Pump Piston Pump
Pump (RVP)

 Oil Free  Initial Cost  Oil Free  Oil Free

 Ultimate Vacuum  Ultimate Vacuum  Initial Cost  Light Gases
 Maintenance  Oil 
– Ultimate
UltimateVacuum
Vacuum  Audible Noise
– Initial Cost – Maintenance – Maintenance
Vacuum Measurement Technologies

- Different technologies are required to measure the vacuum

pressure in different vacuum regions
RANGE GAUGE TYPE EXAMPLES

Mechanical Capacitance Manometer

Rough Deflection & Thermocouple
Atm - 10-3
Vacuum Thermal Transfer Convection
Gauges Pirani

Capacitance Manometer
High Mechanical Deflection
10-3 - 10-9 Hot Ion Gauge (BAG)
Vacuum & Ionization Gauges
Cold Cathode

UHV Ionization Gauges

Ultra High Ionization Gauges &
< 10-10 Ion Pump Current
Vacuum Gas Analyzers
Residual Gas Analyzer (RGA)
Vacuum Measurement Technologies

GAUGE TECHNOLOGIES OVERLAP VACUUM REGIONS

Ultra High
Vacuum
High Vacuum Rough Vacuum
Mechanical Deflection Gauges
PT
Directly measure the physical force F1 F2

of gas molecules striking a surface

CAPACITANCE MANOMETER
- DIAPHRAGM (between reference
and ‘test’ pressures) forms part of a
capacitor circuit
- PRESSURE  causes deflection
which alters the capacitance) P  C
- MOST ACCURATE and FASTEST
RESPONSE gas independent gauge;
 Dynamic range ≈ 3.5
decades/gauge
Thermal Transfer Gauges

Exploit the relationship between

heat loss (through convection)
and pressure

CONVECTION GAUGE
- Maintain filament at constant T (above ambient): (P  I)
- Enhanced response time in viscous flow
- Atm – < 1 x 10-3 Torr

THERMOCOUPLE GAUGE
- Temperature of wire filament monitored at constant
Current (P  T)
- Slow response time; non linear above 2 - 5 Torr
Thermal Transfer: Pirani Gauge

Typical Pirani Gauge Response


PIRANI GAUGE
Filament (exposed to vacuum)
forms one leg of a Wheatstone
Bridge circuit;
• Loss of heat changes the resistance of
the filament, unbalancing the bridge
• Voltage is applied to re-establish the
balance: P  Vapplied
- Response is Gas Type Dependent (Gas
Correction factors required)
- Extremely ‘non-linear’ above 1 Torr
Troubleshooting Rough Vacuum Systems

10+3

Volume
Pressure (Torr)

Pressure
10-0 Desorption
Decay
Diffusion

10-3

Time
Troubleshooting Rough Vacuum Pumpdown
Pressure (Torr) 10+3

10+1 The slope of this line is proportional

to the pumping speed
10-1
P
10-3
T Base Pressure
0 5 10 15 20 25 30
Time (min)

Monitoring the CHANGE in Pressure over Time can help to

determine if there is a leak in the vacuum system
• A leak-tight system will display steadily decreasing slope until
we reach the limits of the ROUGH VACUUM pumps
Troubleshooting Rough Vacuum Pumpdown
10+3
Pressure (Torr)

10+1

10-1
P
T Outgassing
10-3
Base Pressure
0 5 10 15 20 25 30
Time (min)

Monitoring the CHANGE in Pressure over Time can help to

determine if there is a leak in the vacuum system
• A vacuum system with OUTGASSING issues will display a fairly
constant rate of decrease in pressure over time
Troubleshooting Rough Vacuum Pumpdown
10+3
Pressure (Torr)

10+1

10-1 Real leak

Outgassing
10-3
Base Pressure
0 5 10 15 20 25 30
Time (min)

Monitoring the CHANGE in Pressure over Time can help to

determine if there is a leak in the vacuum system
• A vacuum system with a REAL LEAK will show a pressure
change that drops, then flattens at the level of the leak
Rough Vacuum Troubleshooting: Rate of Rise TEST

Outgassing/Virtual Leak:

Pressure
P
T
- Rate of Rise (P/ T)
P
DECREASES over time
T

Time

Real Leak:
Pressure
- Rate of Rise (P/ T) remains P
T
STEADY over time P
T

Time
Summary: Rough Vacuum
 Rough Vacuum Pumps (displacement pumps) require gas to be in
Viscous Flow to be effective. EFFECTIVE pumping speed
approaches ZERO around 1 x 10-3 Torr.
 Vacuum Pump choice depends on the importance to the user of:
• Oil vs Oil-free Process • Pump Speed at Operating Pressure
• Base Pressure Requirements • Maintenance Simplicity
• Initial cost vs Lifetime Cost • Audible Noise
• Process Gas Limitations
 Vacuum gauge selection depends on the accuracy required vs the
cost. Gas dependent gauges require correction factor.
 When approaching the lower limits of Rough Vacuum,
OUTGASSING (Desorption and Diffusion) is the dominant factor (vs
chamber volume)
 Techniques for troubleshooting ROUGH VACUUM applications
include Pumpdown Curves (P/T) and Rate-of-Rise or ‘Leak-Up’
Tests.
Vacuum Education Programs

For Information on Agilent’s Vacuum Technology Products and Services,

please e-mail vpl-customercare@agilent.com or call 800-882 7426, and
select option 3.

To learn about more Agilent Vacuum Technology Education programs,

including
• UHV Seminars at your institution
• Scheduled multi-day classes in Vacuum Practice and Leak Detection
• Custom multi-day classes at your site
• Other custom training classes to fit your needs

Please e-mail Robin Arons (robin.arons@agilent.com), or call Customer

Care at 800-882-7426 (Option 3) for more details on these programs

Confidentiality Label
December 12, 2016
29
Next Live Webinar: High Vacuum (Feb-7)

High Vacuum Webinar deals with the process of

generating, measuring, and maintaining High Vacuum
Pressure (10^-3 Torr to approx. 10^-8 Torr). ‘Roots’ type
pumps (covering ‘Transition’ vacuum region) will also be
discussed.
Participants will learn about the benefits and drawbacks of
different High Vacuum pump and Gauge technologies, and
what to consider when constructing a vacuum system or
troubleshooting leaks in the High Vacuum regime.

To Register, Visit:
http://www.agilent.com/en-us/training-events/eseminars/vacuum