Seq Operation R1

ST_BCDS_CDM_Sequence of Operation
Sequence of Operation of CDM System
By Hexagon
Revision
01, 15 Feb 2023
Page 1
Document History
Revision Date Details

00 30 Nov 2022 First Release
01 15 Feb 2023 Improvement of System Details
Page 2
TABLE OF CONTENTS
Sequence of Operation of CDM System ....................................................................................................1
By Hexagon ................................................................................................................................................ 1
1. General Description ...............................................................................................................................4
2. Key Equipment & Instruments .............................................................................................................. 4
3. System Operation .................................................................................................................................. 5
3.1 CDM-1 (Chemical line 4. CP360 B) ...............................................................................................5
3.1.1 Manual Mode ................................................................................................................... 5
3.1.2 Auto Mode ........................................................................................................................5
3.2 CDM-2 (Chemical line 6. CP360 Plus C) & VMB-6 ....................................................................... 7
3.2.1 Manual Mode ................................................................................................................... 7
3.2.2 Auto Mode ........................................................................................................................7
3.3 CDM-3 (Chemical line 7. CP360 Plus L) & VMB-7 ........................................................................ 9
3.3.1 Manual Mode ................................................................................................................... 9
3.3.2 Auto Mode ........................................................................................................................9
3.4 CDM-4 (Chemical line 9. Package Bond C50) & VMB-9 .............................................................11
3.4.1 Manual Mode ................................................................................................................. 11
3.4.2 Auto Mode ......................................................................................................................11
3.5 CDM-5 (Chemical line 1.2. 50% H2SO4) & VMB-1.2A & VMB-1.2B .......................................... 13
3.5.1 Manual Mode ................................................................................................................. 13
3.5.2 Auto Mode ......................................................................................................................13
3.6 CDM-6 (Chemical line 2. RTE-CU-30A) ...................................................................................... 16
3.6.1 Manual Mode ................................................................................................................. 16
3.6.2 Auto Mode ......................................................................................................................16
3.7 CDM-7 (Chemical line 5. CP360 Plus B) & VMB-5 ..................................................................... 18
3.7.1 Manual Mode ................................................................................................................. 18
3.7.2 Auto Mode ......................................................................................................................18
3.8 CDM-8 (Chemical line 8. Package Bond 100B) & VMB-8 .......................................................... 20
3.8.1 Manual Mode ................................................................................................................. 20
3.8.2 Auto Mode ......................................................................................................................20
3.9 CDM-9 (Chemical line 10. Package Bond HT-U) & VMB-10 ...................................................... 22
3.9.1 Manual Mode ................................................................................................................. 22
3.9.2 Auto Mode ......................................................................................................................22
3.10 CDM-10 (Chemical line 13. CM300) ........................................................................................ 24
3.10.1 Manual Mode ............................................................................................................... 24
3.10.2 Auto Mode ....................................................................................................................24
3.11 CDM-11 (Chemical line 14. CM500) ........................................................................................ 26
3.11.1 Manual Mode ............................................................................................................... 26
3.11.2 Auto Mode ....................................................................................................................26
3.12 CDM-12 (Chemical line 17. Acetic Acid 10%) .......................................................................... 28
3.12.1 Manual Mode ............................................................................................................... 28
3.12.2 Auto Mode ....................................................................................................................28
3.13 Interlocks ................................................................................................................................. 30
3.13.1 In events that Leak Sensor of CDM & Day Tank & Transfer Pump Box Triggered ....... 30
3.13.2 In events that Leak Sensor for piping along from P1 to P3 Triggered ......................... 30
3.13.3 In events that Leak Sensor of VMB & Inlet Pipeline to Mother Tank Triggered ..........30
3.13.4 In events that Leak Sensor of Pipeline from Inlet of Mother room / VMB to Mother
Tank / Dosing Tank Triggered ..................................................................................................31
3.13.5 In events that Leak Sensor of pipeline from Mother Tank to Production room
Triggered ..................................................................................................................................31
3.14 CDM System Schematic Diagram and IO List .......................................................................... 32
3.15 CDM HMI Screen ..................................................................................................................... 32
3.16 MAIN PLC HMI AND CDM PLC HMI INTERFACE .......................................................................32
Appendix A ...............................................................................................................................................33
Page 3
1. General Description
The Bulk Chemical Dispense System is to transfer chemicals from level 1 to level 3.
There are 12 set of chemical dispense module (CDM) located at level 1 which transfer chemical to P3
mother tanks.
2. Key Equipment & Instruments

The equipment and instruments applicable to this system are tabulated as below.
Group A- CDM by Hexagon

Equipment/ Instrument Tag No. Description
Chemical Dispense Module - CDM
CDM-1 Chemical line 4. CP360 B
CDM-2 Chemical line 6. CP360 Plus C
CDM-3 Chemical line 7. CP360 Plus L
CDM-4 Chemical line 9. Package Bond C50
CDM-5 Chemical line 1.2. 50% H2SO4
CDM-6 Chemical line 2. RTE-CU-30A
CDM-7 Chemical line 5. CP360 Plus B
CDM-8 Chemical line 8. Package Bond 100B
CDM-9 Chemical line 10. Package Bond HT-U
CDM-10 Chemical line 13. CM300
CDM-11 Chemical line 14. CM500
CDM-12 Chemical line 17. Acetic Acid 10%
Group B- CDM by MANZ

CDM-13 Chemical line 1.1 8% H2SO4
CDM-14 Chemical line 3.CP-20A Developer
CDM-15 Chemical line 11.CuSO4.5H2O
CDM-16 Chemical line 12.KOH-840
CDM-17 Chemical line 15. KOH-850 + 16.KOH-985
Group C- VMB by Hexagon

VMB-1.2A Chemical line 1.2. 50% H2SO4 A
VMB-1.2B Chemical line 1.2. 50% H2SO4 B
VMB-3 Chemical line 3.CP-20A Developer
VMB-5 Chemical line 5. CP360 Plus B
VMB-6 Chemical line 6. CP360 Plus C
VMB-7 Chemical line 7. CP360 Plus L
VMB-8 Chemical line 8. Package Bond 100B
VMB-9 Chemical line 9. Package Bond C50
VMB-10 Chemical line 10. Package Bond HT-U
VMB-11 Chemical line 11.CuSO4.5H2O
VMB-12 Chemical line 12.KOH-840
VMB-15_16 Chemical line 15. KOH-850 + 16.KOH-985
Page 4
3. System Operation
3.1 CDM-1 (Chemical line 4. CP360 B)

3.1.1 Manual Mode
When the selector switch in “MANUAL” position, the operator able to start the pump individually
without checking for pump interlock / sensor status.
3.1.2 Auto Mode

When the selector switch in “AUTO” position, the CDM System able to operate automatically based
on predefine sequence. Transfer pump will turn on if fulfilled all the predefine condition.
The tag number please refer to respective P&ID
Predefine condition:
 Make sure the door is always closed
 Make sure door sensor (DS 01) is normal condition
 Make sure leak sensor of CDM-1 top-up box (LS 01) is normal condition
 Make sure bubble sensor of CDM-1 top-up box (BS 01) is normal condition
 Make sure leak sensor of day tank (LS 02) is normal condition
 Make sure leak sensor of piping from CDM-1 to day tank (LSS 01) is normal condition
 Make sure level transmitter of day tank (LT 01) is normal condition
 Make sure High-High capacitive sensor of day tank (HH 01) is normal condition
 Make sure leak sensor of CDM-1 transfer pump box (LS 03) is normal condition
The system can run in Auto mode when there is no fault signal present (tower light (TS 01) indicate
green).
3.1.2.1 Auto Mode Start-Up Sequence
 Pre-Requisite: The CDM-1 shall be switched to Auto from HMI by operator.

 The CDM-1 will initiate the action of top up and transfer of chemical when tower light (TS 01)
(indicates green. If tower light indicate red, check the HMI error and clear the error as below
sequence:
1. When the tower light (TS 01) turns red, check HMI error code.
2. If HMI error indicate carboy/drum is empty, open the door of CDM-1 to change new
carboy/drum.
3. Wear glove to remove the tube connection to carboy/drum. Rinse the carboy/drum and tube.
4. Remove the drum stopper.
5. Remove empty carboy/drum.
6. Use bar-code gun to scan the barcode at carboy/drum to ensure the right chemical and valid
chemical shelf life is top up into CDM-1.
7. Transfer new carboy/drum into CDM-1. Close the CDM-1 door.
8. Wear glove to re-instate the tube connection to drum/carboy.
9. Set to Auto-mode to transfer the chemical to day tank (4. CP360 B). (Auto Transfer)
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (4. CP360 B)
(until tank level reach High level and automatically stop.
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11. Top-up pump (P1 or P2 (n+1)) will start to top up the chemical again once the level of day
tank (4. CP360 B) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (4. CP360 B) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (4. CP360 B) to
Heatsink Plating Autodosing Tank 2 at level 3 when low level sensor of Heatsink Plating
Autodosing Tank 2 by MANZ is detected.
13. The low level signal will send to P3 Manz PLC and thus send to FMCS. FMCS will reflect signal
to P1 Main PLC and thus transfer of chemical will start. (Auto Transfer)
14. The transfer pump (P3 or P4 (n+1)) will stop when Heatsink Plating Autodosing Tank 2 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Heatsink Plating
Autodosing Tank 2 again once Low level is detected.
Page 6
3.2 CDM-2 (Chemical line 6. CP360 Plus C) & VMB-6
3.2.1 Manual Mode
3.2.2 Auto Mode

green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (6. CP360 Plus C). (Auto Transfer)
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (6. CP360 Plus C)
Page 7
tank (6. CP360 Plus C) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (6. CP360 Plus C) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (6. CP360 Plus C)
to Trace Plating Autodosing Tank 3 at level 3 when low level sensor of Trace Plating
13. The operator will open the valve to Trace Plating Autodosing Tank 3 in VMB-6 to allow the
transfer of chemical.
14. The low level signal of Trace Plating Autodosing Tank 3 will send to P3 Manz PLC and thus
send to FMCS. FMCS will reflect signal to P1 Main PLC and thus transfer of chemical will
start. (Auto Transfer)
15. The transfer pump (P3 or P4 (n+1)) will stop when Trace Plating Autodosing Tank 3 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Trace Plating Autodosing
Tank 3 again once Low level is detected.
16. In the other case, the transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank
(6. CP360 Plus C) to Stud Plating Autodosing Tank 3 at level 3 when low level sensor of
Stud Plating Autodosing Tank 3 by MANZ is detected.
17. The operator will open the valve to Stud Plating Autodosing Tank 3 in VMB-6 to allow the
18. The low level signal of Stud Plating Autodosing Tank 3 will send to P3 Manz PLC and thus
19. The transfer pump (P3 or P4 (n+1)) will stop when Stud Plating Autodosing Tank 3 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Stud Plating Autodosing
Page 8
3.3 CDM-3 (Chemical line 7. CP360 Plus L) & VMB-7
3.3.1 Manual Mode
3.3.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (7. CP360 Plus L). (Auto Transfer)
Page 9
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (7. CP360 Plus L)
tank (7. CP360 Plus L) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (7. CP360 Plus L) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (7. CP360 Plus L)
(7. CP360 Plus L) to Stud Plating Autodosing Tank 4 at level 3 when low level sensor of Stud
Plating Autodosing Tank 4 by MANZ is detected.
Page 10
3.4 CDM-4 (Chemical line 9. Package Bond C50) & VMB-9
3.4.1 Manual Mode
3.4.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (9. Package Bond C50). (Auto Transfer)
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10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (9. Package
Bond C50) (until tank level reach High level and automatically stop.
tank (9. Package Bond C50) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when
the carboy/drum is empty or Day tank (9. Package Bond C50) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (9. Package
Bond C50) to Package Bond Autodosing Tank 2 at level 3 when low level sensor of Package
Bond Autodosing Tank 2 by MANZ is detected.
13. The operator will open the valve to Package Bond Autodosing Tank 2 in VMB-9 to allow the
14. The low level signal of Package Bond Autodosing Tank 2 will send to P3 Manz PLC and thus
15. The transfer pump (P3 or P4 (n+1)) will stop when Package Bond Autodosing Tank 2 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Package Bond Autodosing
(9. Package Bond C50) to PreDip Autodosing Tank 2 at level 3 when low level sensor of
PreDip Autodosing Tank 2 by MANZ is detected.
17. The operator will open the valve to PreDip Autodosing Tank 2 in VMB-9 to allow the transfer
of chemical.
18. The low level signal of PreDip Autodosing Tank 2 will send to P3 Manz PLC and thus send to
FMCS. FMCS will reflect signal to P1 Main PLC and thus transfer of chemical will start. (Auto
Transfer)
19. The transfer pump (P3 or P4 (n+1)) will stop when PreDip Autodosing Tank 2 is full. Transfer
pump (P3 or P4 (n+1)) will start to transfer chemical to PreDip Autodosing Tank 2 again
once Low level is detected.
Page 12
3.5 CDM-5 (Chemical line 1.2. 50% H2SO4) & VMB-1.2A &
VMB-1.2B
3.5.1 Manual Mode
3.5.2 Auto Mode
green).

sequence:
carboy/drum.
Page 13

9. Set to Auto-mode to transfer the chemical to day tank (1.2. 50% H2SO4). (Auto Transfer)
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (1.2. 50% H2SO4)
tank (1.2. 50% H2SO4) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (1.2. 50% H2SO4) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (1.2. 50% H2SO4)
to Acid Rinse Autodosing Tank 1 at level 3 when low level sensor of Acid Rinse Autodosing
Tank 1 by MANZ is detected.
13. The operator will open the valve to Acid Rinse Autodosing Tank 1 in VMB-1.2A to allow the
14. The low level signal of Acid Rinse Autodosing Tank 1 will send to P3 Manz PLC and thus send
to FMCS. FMCS will reflect signal to P1 Main PLC and thus transfer of chemical will start.
(Auto Transfer)
15. The transfer pump (P3 or P4 (n+1)) will stop when Acid Rinse Autodosing Tank 1 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Acid Rinse Autodosing
(1.2. 50% H2SO4) to Package Bond Mother Tank at level 3 when low level sensor of
Package Bond Mother Tank by MANZ is detected.
17. The operator will open the valve to Package Bond Mother Tank in VMB-1.2A to allow the
18. The low level signal of Package Bond Mother Tank will send to P3 Manz PLC and thus send to
Transfer)
19. The transfer pump (P3 or P4 (n+1)) will stop when Package Bond Mother Tank is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Package Bond Mother
Tank again once Low level is detected.
(1.2. 50% H2SO4) to Package Bond Autodosing Tank 1 at level 3 when low level sensor of
21. The operator will open the valve to Package Bond Autodosing Tank 1 in VMB-1.2A to allow
the transfer of chemical.
(1.2. 50% H2SO4) to Trace Plating Autodosing Tank 1 at level 3 when low level sensor of
25. The operator will open the valve to Trace Plating Autodosing Tank 1 in VMB-1.2A to allow
the transfer of chemical.
(1.2. 50% H2SO4) to Stud Plating Autodosing Tank 1 at level 3 when low level sensor of
29. The operator will open the valve to Stud Plating Autodosing Tank 1 in VMB-1.2B to allow the
Page 14
(1.2. 50% H2SO4) to Stud Plating Autodosing Tank 1 at level 3 when low level sensor of
33. The operator will open the valve to Heatsink Plating Autodosing Tank 1 in VMB-1.2B to
allow the transfer of chemical.
34. The low level signal of Heatsink Plating Autodosing Tank 1 will send to P3 Manz PLC and thus
35. The transfer pump (P3 or P4 (n+1)) will stop when Heatsink Plating Autodosing Tank 1 is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Heatsink Plating
Autodosing Tank 1 again once Low level is detected.
Page 15
3.6 CDM-6 (Chemical line 2. RTE-CU-30A)
3.6.1 Manual Mode
3.6.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (2. RTE-CU-30A). (Auto Transfer)
Page 16
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (2. RTE-CU-30A)
tank (2. RTE-CU-30A) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (2. RTE-CU-30A) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (2. RTE-CU-30A)
to Cu Etch Mother Tank at level 3 when low level sensor of Cu Etch Mother Tank by MANZ
is detected.
14. The transfer pump (P3 or P4 (n+1)) will stop when Cu Etch Mother Tank is full. Transfer
pump (P3 or P4 (n+1)) will start to transfer chemical to Cu Etch Mother Tank again once
Low level is detected.
Page 17
3.7 CDM-7 (Chemical line 5. CP360 Plus B) & VMB-5
3.7.1 Manual Mode
3.7.2 Auto Mode
green).

sequence:
carboy/drum.
Page 18
9. Set to Auto-mode to transfer the chemical to day tank (5. CP360 Plus B). (Auto Transfer)
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (5. CP360 Plus B)
tank (5. CP360 Plus B) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (5. CP360 Plus B) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (5. CP360 Plus B)
16. In the other hand, the transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day
tank (5. CP360 Plus B) to Stud Plating Autodosing Tank 2 at level 3 when low level sensor of
Stud Plating Autodosing Tank 2 by MANZ is detected.
Page 19
3.8 CDM-8 (Chemical line 8. Package Bond 100B) & VMB-8
3.8.1 Manual Mode
3.8.2 Auto Mode
green).

sequence:
carboy/drum.
Page 20
9. Set to Auto-mode to transfer the chemical to day tank (8. Package Bond 100B). (Auto
Transfer)
Bond 100B) (until tank level reach High level and automatically stop.
tank (8. Package Bond 100B) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when
the carboy/drum is empty or Day tank (8. Package Bond 100B) reach High level again.
Bond 100B) to Pre Dip Autodosing Tank 1 at level 3 when low level sensor of Pre Dip
13. The operator will open the valve to Pre Dip Autodosing Tank 1 in VMB-8 to allow the
14. The low level signal of Pre Dip Autodosing Tank 1 will send to P3 Manz PLC and thus send to
Transfer)
15. The transfer pump (P3 or P4 (n+1)) will stop when Pre Dip Autodosing Tank 1 is full. Transfer
pump (P3 or P4 (n+1)) will start to transfer chemical to Pre Dip Autodosing Tank 1 again
once Low level is detected.
tank (8. Package Bond 100B) to Package Bond Autodosing Tank 4 at level 3 when low level
sensor of Package Bond Autodosing Tank 4 by MANZ is detected.
Page 21
3.9 CDM-9 (Chemical line 10. Package Bond HT-U) & VMB-10
3.9.1 Manual Mode
3.9.2 Auto Mode
green).

sequence:
carboy/drum.
Page 22
9. Set to Auto-mode to transfer the chemical to day tank (10. Package Bond HT-U). (Auto
Transfer)
Bond HT-U) (until tank level reach High level and automatically stop.
tank (10. Package Bond HT-U) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop
when the carboy/drum is empty or Day tank (10. Package Bond HT-U) reach High level
again.
Bond HT-U) to Package Bond Mother Tank at level 3 when low level sensor of Package
Bond Mother Tank by MANZ is detected.
13. The operator will open the valve to Package Bond Mother Tank in VMB-10 to allow the
14. The low level signal of Package Bond Mother Tank will send to P3 Manz PLC and thus send to
Transfer)
15. The transfer pump (P3 or P4 (n+1)) will stop when Package Bond Mother Tank is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to Package Bond Mother
tank (10. Package Bond HT-U) to Package Bond Autodosing Tank 3 at level 3 when low
level sensor of Package Bond Autodosing Tank 3 by MANZ is detected.
Page 23
3.10 CDM-10 (Chemical line 13. CM300)
3.10.1 Manual Mode
3.10.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (13. CM300). (Auto Transfer)
Page 24
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (13. CM300)
tank (13. CM300) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (13. CM300) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (13. CM300) to
CM300 Micro Etch Mother Tank at level 3 when low level sensor of CM300 Micro Etch
Mother Tank by MANZ is detected.
14. The transfer pump (P3 or P4 (n+1)) will stop when CM300 Micro Etch Mother Tank is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to CM300 Micro Etch Mother
Page 25
3.11 CDM-11 (Chemical line 14. CM500)
3.11.1 Manual Mode
3.11.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (14. CM500). (Auto Transfer)
Page 26
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (14. CM500)
tank (14. CM500) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when the
carboy/drum is empty or Day tank (14. CM500) reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (14. CM500) to
CM500 Micro Etch Autodosing Tank at level 3 when low level sensor of CM500 Micro Etch
Autodosing Tank is detected.
14. The transfer pump (P3 or P4 (n+1)) will stop when CM500 Micro Etch Autodosing Tank is full.
Transfer pump (P3 or P4 (n+1)) will start to transfer chemical to CM500 Micro Etch
Autodosing Tank again once Low level is detected.
Page 27
3.12 CDM-12 (Chemical line 17. Acetic Acid 10%)
3.12.1 Manual Mode
3.12.2 Auto Mode
green).

sequence:
carboy/drum.
9. Set to Auto-mode to transfer the chemical to day tank (17. Acetic Acid 10%). (Auto Transfer)
Page 28
10. Top-up pump (P1 or P2 (n+1)) will start to transfer the chemical to day tank (17. Acetic Acid
10%) (until tank level reach High level and automatically stop.
tank (17. Acetic Acid 10%) reach Low level. Top-up pump (P1 or P2 (n+1)) will stop when
the carboy/drum is empty or Day tank (17. Acetic Acid 10% reach High level again.
12. The transfer pump (P3 or P4 (n+1)) will transfer the chemical from Day tank (17. Acetic Acid
10%) to Via Etch Mother Tank at level 3 when low level sensor of Via Etch Mother Tank is
detected.
14. The transfer pump (P3 or P4 (n+1)) will stop when Via Etch Mother Tank is full. Transfer
pump (P3 or P4 (n+1)) will start to transfer chemical to Via Etch Mother Tank again once
Low level is detected.
Page 29
3.13 Interlocks
3.13.1 In events that Leak Sensor of CDM & Day Tank & Transfer Pump
Box Triggered
When leak sensor of CDM being triggered, the signal will be send to corresponding CDM PLC. The
corresponding CDM will stop the transferring of chemical from carboy/drum to day tank by stop the
top up pump of carboy/drum.
When the Leak sensor of Day Tank being triggered, the signal will be send to corresponding CDM PLC.
The corresponding CDM will stop the transferring of chemical from carboy/drum to day tank by stop
the top up pump of carboy/drum.
When leak sensor of Transfer Pump Box being triggered, the signal will be send to corresponding CDM
PLC. The corresponding CDM will stop the transferring of chemical from day tank to P3 by stop the
transfer pump of carboy/drum.
Details refer to Cause & Effect Matrix.
3.13.2 In events that Leak Sensor for piping along from P1 to P3

Triggered
When leak sensor along P1 to P3 which located at the P1/P3 Riser Bottom Box being triggered, the
signal will be send to P1 Main PLC and stop the corresponding CDM. The corresponding CDM will stop
the transfer pump to transfer chemical from CDM to corresponding destination in P3 Mother room.
When leak sensor along P1 to P3 which located at the Roof top corner which at cooling tower side
being triggered, the signal will be send to P3 Main PLC. The P3 Remote I/O will send the signal to
FMCS. FMCS will reflect signal to P1 Main PLC and stop the corresponding CDM. The corresponding
CDM will stop the transfer pump to transfer chemical from CDM to corresponding destination in P3
Mother room.
3.13.3 In events that Leak Sensor of VMB & Inlet Pipeline to Mother
Tank Triggered
When leak sensor of VMB being triggered, the signal will be send to P3 Remote I/O. The P3 Remote
I/O will send the signal to FMCS. FMCS will reflect signal to P1 Main PLC and stop the corresponding
CDM. The corresponding CDM will stop the transfer pump to transfer chemical from CDM to VMB.
When leak sensor of inlet pipeline to mother tank being triggered, the signal will be send to P3
Remote I/O. The P3 Remote I/O will send the signal to FMCS. FMCS will reflect signal to P1 Main PLC
and stop the corresponding CDM. The corresponding CDM will stop the transfer pump to transfer
chemical from CDM to VMB.
Page 30
3.13.4 In events that Leak Sensor of Pipeline from Inlet of Mother room
/ VMB to Mother Tank / Dosing Tank Triggered
When leak sensor of pipeline from inlet of Mother room / VMB to mother tank/ dosing tank being
triggered, the signal will be sent by P3 Remote I/O to FMCS. FMCS will reflect signal to P1 Main PLC
and stop the corresponding CDM. The corresponding CDM will stop the transfer pump to transfer
chemical from CDM to corresponding destination in P3 Mother room.
3.13.5 In events that Leak Sensor of pipeline from Mother Tank to

Production room Triggered
When leak sensor of pipeline from Mother tank to Production room being triggered, the signal will be
sent by P3 Main PLC to FMCS. FMCS will then reflect the signal to P3 Manz PLC and the corresponding
transfer pump of mother tank to be stopped. The transferring of the chemical from mother tank to
production tools will be stopped.
Page 31
3.14 CDM System Schematic Diagram and IO List
The Schematic Diagram and IO List will be attached at the appendix.
3.15 CDM HMI Screen
The CDM HMI Screen is under preperation and will be updated in next version.
3.16 MAIN PLC HMI AND CDM PLC HMI INTERFACE
Kindly refer to the attachment.
Page 32
Appendix A
CDM 1 - I/O List (Chemical 4. CP360 B)
IO
No Tag Name Description Sensor Location Chemical Line Location Type Channel
1 CDM-04-ESB-01 Emergency Stop Button 4. CP360 B CDM Panel DI 00
2 CDM-04-DS-01 Door Sensor A Top Up - Carboy 4. CP360 B CDM Panel DI 01
3 CDM-04-DS-02 Door Sensor B Transfer - Day Tank 4. CP360 B CDM Panel DI 02
4 CDM-04-LS-01 Leak Sensor 01 CDM Top up Box 4. CP360 B CDM Panel DI 03
5 CDM-04-BS-01 Bubble Sensor Carboy/ Top-up Pump 4. CP360 B CDM Panel DI 04
6 CDM-04-HH-01 High-High Level Sensor Day Tank 4. CP360 B CDM Panel DI 05
7 CDM-04-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 4. CP360 B CDM Panel DI 06
8 CDM-04-LS-02 Leak Sensor 03 Day Tank 4. CP360 B CDM Panel DI 07
9 CDM-04-LS-03 Leak Sensor 04 Transfer Pump Box 4. CP360 B CDM Panel DI 08
10 Spare Spare CDM Panel DI 09
15 CDM-04-TL-R-01 Tower Light - Red ( Alarm/Error) 4. CP360 B CDM Panel DQ 00
16 CDM-04-TL-A-01 Tower Light - Amber (Manual Mode) 4. CP360 B CDM Panel DQ 01
17 CDM-04-TL-G-01 Tower Light - Green ( Auto Mode) 4. CP360 B CDM Panel DQ 02
18 CDM-04-TL-B-01 Tower Light - Buzzer 4. CP360 B CDM Panel DQ 03
19 CDM-04-AP-01 Airpump A1 Turn On Top Up - Carboy 4. CP360 B CDM Panel DQ 04
20 CDM-04-AP-02 Airpump A2 Turn On Top Up - Carboy 4. CP360 B CDM Panel DQ 05
21 CDM-04-AP-03 Airpump B1 Turn On Transfer - Day Tank 4. CP360 B CDM Panel DQ 06
22 CDM-04-AP-04 Airpump B2 Turn On Transfer - Day Tank 4. CP360 B CDM Panel DQ 07
23 Spare Spare CDM Panel DQ 08
25 CDM-04-LT-01 Daytank Level Transmitter Day Tank 4. CP360 B CDM Panel AI 00
26 Spare Spare CDM Panel AI 01
Page 33
CDM 2 - I/O List (Chemical 6. CP360 Plus C)
IO
1 CDM-06-ESB-01 Emergency Stop Button 6. CP360 Plus C CDM Panel DI 00
2 CDM-06-DS-01 Door Sensor A Top Up - Carboy 6. CP360 Plus C CDM Panel DI 01
3 CDM-06-DS-02 Door Sensor B Transfer - Day Tank 6. CP360 Plus C CDM Panel DI 02
4 CDM-06-LS-01 Leak Sensor 01 CDM Top up Box 6. CP360 Plus C CDM Panel DI 03
5 CDM-06-BS-01 Bubble Sensor Carboy/ Top-up Pump 6. CP360 Plus C CDM Panel DI 04
6 CDM-06-HH-01 High-High Level Sensor Day Tank 6. CP360 Plus C CDM Panel DI 05
7 CDM-06-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 6. CP360 Plus C CDM Panel DI 06
8 CDM-06-LS-02 Leak Sensor 03 Day Tank 6. CP360 Plus C CDM Panel DI 07
9 CDM-06-LS-03 Leak Sensor 04 Transfer Pump Box 6. CP360 Plus C CDM Panel DI 08
15 CDM-06-TL-R-01 Tower Light - Red ( Alarm/Error) 6. CP360 Plus C CDM Panel DQ 00
16 CDM-06-TL-A-01 Tower Light - Amber (Manual Mode) 6. CP360 Plus C CDM Panel DQ 01
17 CDM-06-TL-G-01 Tower Light - Green ( Auto Mode) 6. CP360 Plus C CDM Panel DQ 02
18 CDM-06-TL-B-01 Tower Light - Buzzer 6. CP360 Plus C CDM Panel DQ 03
19 CDM-06-AP-01 Airpump A1 Turn On Top Up - Carboy 6. CP360 Plus C CDM Panel DQ 04
20 CDM-06-AP-02 Airpump A2 Turn On Top Up - Carboy 6. CP360 Plus C CDM Panel DQ 05
21 CDM-06-AP-03 Airpump B1 Turn On Transfer - Day Tank 6. CP360 Plus C CDM Panel DQ 06
22 CDM-06-AP-04 Airpump B2 Turn On Transfer - Day Tank 6. CP360 Plus C CDM Panel DQ 07
25 CDM-06-LT-01 Daytank Level Transmitter Day Tank 6. CP360 Plus C CDM Panel AI 00
Page 34
CDM 3 - I/O List (Chemical 7. CP360 Plus L)
IO
1 CDM-07-ESB-01 Emergency Stop Button 7. CP360 Plus L CDM Panel DI 00
2 CDM-07-DS-01 Door Sensor A Top Up - Carboy 7. CP360 Plus L CDM Panel DI 01
3 CDM-07-DS-02 Door Sensor B Transfer - Day Tank 7. CP360 Plus L CDM Panel DI 02
4 CDM-07-LS-01 Leak Sensor 01 CDM Top up Box 7. CP360 Plus L CDM Panel DI 03
5 CDM-07-BS-01 Bubble Sensor Carboy/ Top-up Pump 7. CP360 Plus L CDM Panel DI 04
6 CDM-07-HH-01 High-High Level Sensor Day Tank 7. CP360 Plus L CDM Panel DI 05
7 CDM-07-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 7. CP360 Plus L CDM Panel DI 06
8 CDM-07-LS-02 Leak Sensor 03 Day Tank 7. CP360 Plus L CDM Panel DI 07
9 CDM-07-LS-03 Leak Sensor 04 Transfer Pump Box 7. CP360 Plus L CDM Panel DI 08
15 CDM-07-TL-R-01 Tower Light - Red ( Alarm/Error) 7. CP360 Plus L CDM Panel DQ 00
16 CDM-07-TL-A-01 Tower Light - Amber (Manual Mode) 7. CP360 Plus L CDM Panel DQ 01
17 CDM-07-TL-G-01 Tower Light - Green ( Auto Mode) 7. CP360 Plus L CDM Panel DQ 02
18 CDM-07-TL-B-01 Tower Light - Buzzer 7. CP360 Plus L CDM Panel DQ 03
19 CDM-07-AP-01 Airpump A1 Turn On Top Up - Carboy 7. CP360 Plus L CDM Panel DQ 04
20 CDM-07-AP-02 Airpump A2 Turn On Top Up - Carboy 7. CP360 Plus L CDM Panel DQ 05
21 CDM-07-AP-03 Airpump B1 Turn On Transfer - Day Tank 7. CP360 Plus L CDM Panel DQ 06
22 CDM-07-AP-04 Airpump B2 Turn On Transfer - Day Tank 7. CP360 Plus L CDM Panel DQ 07
25 CDM-07-LT-01 Daytank Level Transmitter Day Tank 7. CP360 Plus L CDM Panel AI 00
Page 35
CDM 4 - I/O List (Chemical 9. Package Bond C50)
IO
1 CDM-09-ESB-01 Emergency Stop Button 9. Package Bond C50 CDM Panel DI 00
2 CDM-09-DS-01 Door Sensor A Top Up - Carboy 9. Package Bond C50 CDM Panel DI 01
3 CDM-09-DS-02 Door Sensor B Transfer - Day Tank 9. Package Bond C50 CDM Panel DI 02
4 CDM-09-LS-01 Leak Sensor 01 CDM Top up Box 9. Package Bond C50 CDM Panel DI 03
5 CDM-09-BS-01 Bubble Sensor Carboy/ Top-up Pump 9. Package Bond C50 CDM Panel DI 04
6 CDM-09-HH-01 High-High Level Sensor Day Tank 9. Package Bond C50 CDM Panel DI 05
7 CDM-09-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 9. Package Bond C50 CDM Panel DI 06
8 CDM-09-LS-02 Leak Sensor 03 Day Tank 9. Package Bond C50 CDM Panel DI 07
9 CDM-09-LS-03 Leak Sensor 04 Transfer Pump Box 9. Package Bond C50 CDM Panel DI 08
15 CDM-09-TL-R-01 Tower Light - Red ( Alarm/Error) 9. Package Bond C50 CDM Panel DQ 00
16 CDM-09-TL-A-01 Tower Light - Amber (Manual Mode) 9. Package Bond C50 CDM Panel DQ 01
17 CDM-09-TL-G-01 Tower Light - Green ( Auto Mode) 9. Package Bond C50 CDM Panel DQ 02
18 CDM-09-TL-B-01 Tower Light - Buzzer 9. Package Bond C50 CDM Panel DQ 03
19 CDM-09-AP-01 Airpump A1 Turn On Top Up - Carboy 9. Package Bond C50 CDM Panel DQ 04
20 CDM-09-AP-02 Airpump A2 Turn On Top Up - Carboy 9. Package Bond C50 CDM Panel DQ 05
21 CDM-09-AP-03 Airpump B1 Turn On Transfer - Day Tank 9. Package Bond C50 CDM Panel DQ 06
22 CDM-09-AP-04 Airpump B2 Turn On Transfer - Day Tank 9. Package Bond C50 CDM Panel DQ 07
25 CDM-09-LT-01 Daytank Level Transmitter Day Tank 9. Package Bond C50 CDM Panel AI 00
Page 36
CDM 5 - I/O List (Chemical 1.2. 50% H2SO4)
IO
1 CDM-01.2-ESB-01 Emergency Stop Button 1.2 50% H2SO4 CDM Panel DI 00
2 CDM-01.2-DS-01 Door Sensor A Top Up - Carboy 1.2 50% H2SO4 CDM Panel DI 01
3 CDM-01.2-DS-02 Door Sensor B Transfer - Day Tank 1.2 50% H2SO4 CDM Panel DI 02
4 CDM-01.2-LS-01 Leak Sensor 01 CDM Top up Box 1.2 50% H2SO4 CDM Panel DI 03
5 CDM-01.2-BS-01 Bubble Sensor Carboy/ Top-up Pump 1.2 50% H2SO4 CDM Panel DI 04
6 CDM-01.2-HH-01 High-High Level Sensor Day Tank 1.2 50% H2SO4 CDM Panel DI 05
7 CDM-01.2-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 1.2 50% H2SO4 CDM Panel DI 06
8 CDM-01.2-LS-02 Leak Sensor 03 Day Tank 1.2 50% H2SO4 CDM Panel DI 07
9 CDM-01.2-LS-03 Leak Sensor 04 Transfer Pump Box 1.2 50% H2SO4 CDM Panel DI 08
15 CDM-01.2-TL-R-01 Tower Light - Red ( Alarm/Error) 1.2 50% H2SO4 CDM Panel DQ 00
16 CDM-01.2-TL-A-01 Tower Light - Amber (Manual Mode) 1.2 50% H2SO4 CDM Panel DQ 01
17 CDM-01.2-TL-G-01 Tower Light - Green ( Auto Mode) 1.2 50% H2SO4 CDM Panel DQ 02
18 CDM-01.2-TL-B-01 Tower Light - Buzzer 1.2 50% H2SO4 CDM Panel DQ 03
19 CDM-01.2-AP-01 Airpump A1 Turn On Top Up - Carboy 1.2 50% H2SO4 CDM Panel DQ 04
20 CDM-01.2-AP-02 Airpump A2 Turn On Top Up - Carboy 1.2 50% H2SO4 CDM Panel DQ 05
21 CDM-01.2-AP-03 Airpump B1 Turn On Transfer - Day Tank 1.2 50% H2SO4 CDM Panel DQ 06
22 CDM-01.2-AP-04 Airpump B2 Turn On Transfer - Day Tank 1.2 50% H2SO4 CDM Panel DQ 07
25 CDM-01.2-LT-01 Daytank Level Transmitter Day Tank 1.2 50% H2SO4 CDM Panel AI 00
Page 37
CDM 6 - I/O List (Chemical 2. RTE-Cu30-A)
IO
1 CDM-02-ESB-01 Emergency Stop Button 2.RTE-Cu30-A CDM Panel DI 00
2 CDM-02-DS-01 Door Sensor A Top Up - Carboy 2.RTE-Cu30-A CDM Panel DI 01
3 CDM-02-DS-02 Door Sensor B Transfer - Day Tank 2.RTE-Cu30-A CDM Panel DI 02
4 CDM-02-LS-01 Leak Sensor 01 CDM Top up Box 2.RTE-Cu30-A CDM Panel DI 03
5 CDM-02-BS-01 Bubble Sensor Carboy/ Top-up Pump 2.RTE-Cu30-A CDM Panel DI 04
6 CDM-02-HH-01 High-High Level Sensor Day Tank 2.RTE-Cu30-A CDM Panel DI 05
7 CDM-02-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 2.RTE-Cu30-A CDM Panel DI 06
8 CDM-02-LS-02 Leak Sensor 03 Day Tank 2.RTE-Cu30-A CDM Panel DI 07
9 CDM-02-LS-03 Leak Sensor 04 Transfer Pump Box 2.RTE-Cu30-A CDM Panel DI 08
15 CDM-02-TL-R-01 Tower Light - Red ( Alarm/Error) 2.RTE-Cu30-A CDM Panel DQ 00
16 CDM-02-TL-A-01 Tower Light - Amber (Manual Mode) 2.RTE-Cu30-A CDM Panel DQ 01
17 CDM-02-TL-G-01 Tower Light - Green ( Auto Mode) 2.RTE-Cu30-A CDM Panel DQ 02
18 CDM-02-TL-B-01 Tower Light - Buzzer 2.RTE-Cu30-A CDM Panel DQ 03
19 CDM-02-AP-01 Airpump A1 Turn On Top Up - Carboy 2.RTE-Cu30-A CDM Panel DQ 04
20 CDM-02-AP-02 Airpump A2 Turn On Top Up - Carboy 2.RTE-Cu30-A CDM Panel DQ 05
21 CDM-02-AP-03 Airpump B1 Turn On Transfer - Day Tank 2.RTE-Cu30-A CDM Panel DQ 06
22 CDM-02-AP-04 Airpump B2 Turn On Transfer - Day Tank 2.RTE-Cu30-A CDM Panel DQ 07
25 CDM-02-LT-01 Daytank Level Transmitter Day Tank 2.RTE-Cu30-A CDM Panel AI 00
Page 38
CDM 7 - I/O List (Chemical 5. CP360 Plus B)
IO
1 CDM-05-ESB-01 Emergency Stop Button 5.CP360 Plus B CDM Panel DI 00
2 CDM-05-DS-01 Door Sensor A Top Up - Carboy 5.CP360 Plus B CDM Panel DI 01
3 CDM-05-DS-02 Door Sensor B Transfer - Day Tank 5.CP360 Plus B CDM Panel DI 02
4 CDM-05-LS-01 Leak Sensor 01 CDM Top up Box 5.CP360 Plus B CDM Panel DI 03
5 CDM-05-BS-01 Bubble Sensor Carboy/ Top-up Pump 5.CP360 Plus B CDM Panel DI 04
6 CDM-05-HH-01 High-High Level Sensor Day Tank 5.CP360 Plus B CDM Panel DI 05
7 CDM-05-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 5.CP360 Plus B CDM Panel DI 06
8 CDM-05-LS-02 Leak Sensor 03 Day Tank 5.CP360 Plus B CDM Panel DI 07
9 CDM-05-LS-03 Leak Sensor 04 Transfer Pump Box 5.CP360 Plus B CDM Panel DI 08
15 CDM-05-TL-R-01 Tower Light - Red ( Alarm/Error) 5.CP360 Plus B CDM Panel DQ 00
16 CDM-05-TL-A-01 Tower Light - Amber (Manual Mode) 5.CP360 Plus B CDM Panel DQ 01
17 CDM-05-TL-G-01 Tower Light - Green ( Auto Mode) 5.CP360 Plus B CDM Panel DQ 02
18 CDM-05-TL-B-01 Tower Light - Buzzer 5.CP360 Plus B CDM Panel DQ 03
19 CDM-05-AP-01 Airpump A1 Turn On Top Up - Carboy 5.CP360 Plus B CDM Panel DQ 04
20 CDM-05-AP-02 Airpump A2 Turn On Top Up - Carboy 5.CP360 Plus B CDM Panel DQ 05
21 CDM-05-AP-03 Airpump B1 Turn On Transfer - Day Tank 5.CP360 Plus B CDM Panel DQ 06
22 CDM-05-AP-04 Airpump B2 Turn On Transfer - Day Tank 5.CP360 Plus B CDM Panel DQ 07
25 CDM-05-LT-01 Daytank Level Transmitter Day Tank 5.CP360 Plus B CDM Panel AI 00
Page 39
CDM 8 - I/O List (Chemical 8. Package Bond 100B)
IO
1 CDM-08-ESB-01 Emergency Stop Button 8.Package Bond 100B CDM Panel DI 00
2 CDM-08-DS-01 Door Sensor A Top Up - Carboy 8.Package Bond 100B CDM Panel DI 01
3 CDM-08-DS-02 Door Sensor B Transfer - Day Tank 8.Package Bond 100B CDM Panel DI 02
4 CDM-08-LS-01 Leak Sensor 01 CDM Top up Box 8.Package Bond 100B CDM Panel DI 03
5 CDM-08-BS-01 Bubble Sensor Carboy/ Top-up Pump 8.Package Bond 100B CDM Panel DI 04
6 CDM-08-HH-01 High-High Level Sensor Day Tank 8.Package Bond 100B CDM Panel DI 05
7 CDM-08-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 8.Package Bond 100B CDM Panel DI 06
8 CDM-08-LS-02 Leak Sensor 03 Day Tank 8.Package Bond 100B CDM Panel DI 07
9 CDM-08-LS-03 Leak Sensor 04 Transfer Pump Box 8.Package Bond 100B CDM Panel DI 08
15 CDM-08-TL-R-01 Tower Light - Red ( Alarm/Error) 8.Package Bond 100B CDM Panel DQ 00
16 CDM-08-TL-A-01 Tower Light - Amber (Manual Mode) 8.Package Bond 100B CDM Panel DQ 01
17 CDM-08-TL-G-01 Tower Light - Green ( Auto Mode) 8.Package Bond 100B CDM Panel DQ 02
18 CDM-08-TL-B-01 Tower Light - Buzzer 8.Package Bond 100B CDM Panel DQ 03
19 CDM-08-AP-01 Airpump A1 Turn On Top Up - Carboy 8.Package Bond 100B CDM Panel DQ 04
20 CDM-08-AP-02 Airpump A2 Turn On Top Up - Carboy 8.Package Bond 100B CDM Panel DQ 05
21 CDM-08-AP-03 Airpump B1 Turn On Transfer - Day Tank 8.Package Bond 100B CDM Panel DQ 06
22 CDM-08-AP-04 Airpump B2 Turn On Transfer - Day Tank 8.Package Bond 100B CDM Panel DQ 07
25 CDM-08-LT-01 Daytank Level Transmitter Day Tank 8.Package Bond 100B CDM Panel AI 00
Page 40
CDM 9 - I/O List (Chemical 10. Package Bond HT-U)
IO
1 CDM-10-ESB-01 Emergency Stop Button 10.Package Bond HT-U CDM Panel DI 00
2 CDM-10-DS-01 Door Sensor A Top Up - Carboy 10.Package Bond HT-U CDM Panel DI 01
3 CDM-10-DS-02 Door Sensor B Transfer - Day Tank 10.Package Bond HT-U CDM Panel DI 02
4 CDM-10-LS-01 Leak Sensor 01 CDM Top up Box 10.Package Bond HT-U CDM Panel DI 03
5 CDM-10-BS-01 Bubble Sensor Carboy/ Top-up Pump 10.Package Bond HT-U CDM Panel DI 04
6 CDM-10-HH-01 High-High Level Sensor Day Tank 10.Package Bond HT-U CDM Panel DI 05
7 CDM-10-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 10.Package Bond HT-U CDM Panel DI 06
8 CDM-10-LS-02 Leak Sensor 03 Day Tank 10.Package Bond HT-U CDM Panel DI 07
9 CDM-10-LS-03 Leak Sensor 04 Transfer Pump Box 10.Package Bond HT-U CDM Panel DI 08
15 CDM-10-TL-R-01 Tower Light - Red ( Alarm/Error) 10.Package Bond HT-U CDM Panel DQ 00
16 CDM-10-TL-A-01 Tower Light - Amber (Manual Mode) 10.Package Bond HT-U CDM Panel DQ 01
17 CDM-10-TL-G-01 Tower Light - Green ( Auto Mode) 10.Package Bond HT-U CDM Panel DQ 02
18 CDM-10-TL-B-01 Tower Light - Buzzer 10.Package Bond HT-U CDM Panel DQ 03
19 CDM-10-AP-01 Airpump A1 Turn On Top Up - Carboy 10.Package Bond HT-U CDM Panel DQ 04
20 CDM-10-AP-02 Airpump A2 Turn On Top Up - Carboy 10.Package Bond HT-U CDM Panel DQ 05
21 CDM-10-AP-03 Airpump B1 Turn On Transfer - Day Tank 10.Package Bond HT-U CDM Panel DQ 06
22 CDM-10-AP-04 Airpump B2 Turn On Transfer - Day Tank 10.Package Bond HT-U CDM Panel DQ 07
25 CDM-10-LT-01 Daytank Level Transmitter Day Tank 10.Package Bond HT-U CDM Panel AI 00
Page 41
CDM 10 - I/O List (Chemical 13. CM300)
IO
1 CDM-13-ESB-01 Emergency Stop Button 13.CM-300 CDM Panel DI 00
2 CDM-13-DS-01 Door Sensor A Top Up - Carboy 13.CM-300 CDM Panel DI 01
3 CDM-13-DS-02 Door Sensor B Transfer - Day Tank 13.CM-300 CDM Panel DI 02
4 CDM-13-LS-01 Leak Sensor 01 CDM Top up Box 13.CM-300 CDM Panel DI 03
5 CDM-13-BS-01 Bubble Sensor Carboy/ Top-up Pump 13.CM-300 CDM Panel DI 04
6 CDM-13-HH-01 High-High Level Sensor Day Tank 13.CM-300 CDM Panel DI 05
7 CDM-13-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 13.CM-300 CDM Panel DI 06
8 CDM-13-LS-02 Leak Sensor 03 Day Tank 13.CM-300 CDM Panel DI 07
9 CDM-13-LS-03 Leak Sensor 04 Transfer Pump Box 13.CM-300 CDM Panel DI 08
15 CDM-13-TL-R-01 Tower Light - Red ( Alarm/Error) 13.CM-300 CDM Panel DQ 00
16 CDM-13-TL-A-01 Tower Light - Amber (Manual Mode) 13.CM-300 CDM Panel DQ 01
17 CDM-13-TL-G-01 Tower Light - Green ( Auto Mode) 13.CM-300 CDM Panel DQ 02
18 CDM-13-TL-B-01 Tower Light - Buzzer 13.CM-300 CDM Panel DQ 03
19 CDM-13-AP-01 Airpump A1 Turn On Top Up - Carboy 13.CM-300 CDM Panel DQ 04
21 CDM-13-AP-03 Airpump B1 Turn On Transfer - Day Tank 13.CM-300 CDM Panel DQ 06
25 CDM-13-LT-01 Daytank Level Transmitter Day Tank 13.CM-300 CDM Panel AI 00
Page 42
CDM 11 - I/O List (Chemical 14. CM500)
IO
1 CDM-14-ESB-01 Emergency Stop Button 14.CM-500 CDM Panel DI 00
2 CDM-14-DS-01 Door Sensor A Top Up - Carboy 14.CM-500 CDM Panel DI 01
3 CDM-14-DS-02 Door Sensor B Transfer - Day Tank 14.CM-500 CDM Panel DI 02
4 CDM-14-LS-01 Leak Sensor 01 CDM Top up Box 14.CM-500 CDM Panel DI 03
5 CDM-14-BS-01 Bubble Sensor Carboy/ Top-up Pump 14.CM-500 CDM Panel DI 04
6 CDM-14-HH-01 High-High Level Sensor Day Tank 14.CM-500 CDM Panel DI 05
7 CDM-14-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 14.CM-500 CDM Panel DI 06
8 CDM-14-LS-02 Leak Sensor 03 Day Tank 14.CM-500 CDM Panel DI 07
9 CDM-14-LS-03 Leak Sensor 04 Transfer Pump Box 14.CM-500 CDM Panel DI 08
15 CDM-14-TL-R-01 Tower Light - Red ( Alarm/Error) 14.CM-500 CDM Panel DQ 00
16 CDM-14-TL-A-01 Tower Light - Amber (Manual Mode) 14.CM-500 CDM Panel DQ 01
17 CDM-14-TL-G-01 Tower Light - Green ( Auto Mode) 14.CM-500 CDM Panel DQ 02
18 CDM-14-TL-B-01 Tower Light - Buzzer 14.CM-500 CDM Panel DQ 03
25 CDM-14-LT-01 Daytank Level Transmitter Day Tank 14.CM-500 CDM Panel AI 00
Page 43
CDM 12 - I/O List (Chemical 17. Acetic Acid 10%)
IO
1 CDM-17-ESB-01 Emergency Stop Button 17.Acetic Acid 10% CDM Panel DI 00
2 CDM-17-DS-01 Door Sensor A Top Up - Carboy 17.Acetic Acid 10% CDM Panel DI 01
3 CDM-17-DS-02 Door Sensor B Transfer - Day Tank 17.Acetic Acid 10% CDM Panel DI 02
4 CDM-17-LS-01 Leak Sensor 01 CDM Top up Box 17.Acetic Acid 10% CDM Panel DI 03
5 CDM-17-BS-01 Bubble Sensor Carboy/ Top-up Pump 17.Acetic Acid 10% CDM Panel DI 04
6 CDM-17-HH-01 High-High Level Sensor Day Tank 17.Acetic Acid 10% CDM Panel DI 05
7 CDM-17-LSS-01 Leak Sensor 02 Piping (CDM/Day tank) 17.Acetic Acid 10% CDM Panel DI 06
8 CDM-17-LS-02 Leak Sensor 03 Day Tank 17.Acetic Acid 10% CDM Panel DI 07
9 CDM-17-LS-03 Leak Sensor 04 Transfer Pump Box 17.Acetic Acid 10% CDM Panel DI 08
15 CDM-17-TL-R-01 Tower Light - Red ( Alarm/Error) 17.Acetic Acid 10% CDM Panel DQ 00
16 CDM-17-TL-A-01 Tower Light - Amber (Manual Mode) 17.Acetic Acid 10% CDM Panel DQ 01
17 CDM-17-TL-G-01 Tower Light - Green ( Auto Mode) 17.Acetic Acid 10% CDM Panel DQ 02
18 CDM-17-TL-B-01 Tower Light - Buzzer 17.Acetic Acid 10% CDM Panel DQ 03
19 CDM-17-AP-01 Airpump A1 Turn On Top Up - Carboy 17.Acetic Acid 10% CDM Panel DQ 04
20 CDM-17-AP-02 Airpump A2 Turn On Top Up - Carboy 17.Acetic Acid 10% CDM Panel DQ 05
21 CDM-17-AP-03 Airpump B1 Turn On Transfer - Day Tank 17.Acetic Acid 10% CDM Panel DQ 06
22 CDM-17-AP-04 Airpump B2 Turn On Transfer - Day Tank 17.Acetic Acid 10% CDM Panel DQ 07
25 CDM-17-LT-01 Daytank Level Transmitter Day Tank 17.Acetic Acid 10% CDM Panel AI 00
Page 44
Main PLC System - I/O List
Slot 3 (Main Panel)
IO
No Tag Name Description Sensor Location Chemical Line Location Type Module Slot No CH
1 ES-PB-Main NA NA NA Main Panel DI 16 3 00
2 P3-01.1-LSS-01 P1 Leak Sensor A1.1 Out of P1 Chemical Room (P1/P3 Riser Box) 1.1 50-8% H2SO4 Main Panel DI 16 3 01
3 P3-01.2-LSS-02 P1 Leak Sensor A1.2 Out of P1 Chemical Room (P1/P3 Riser Box) 1.2 50%H2SO4 Main Panel DI 16 3 02
4 P3-02-LSS-02 P1 Leak Sensor A2 Out of P1 Chemical Room (P1/P3 Riser Box) 2. RTE-Cu30-A Main Panel DI 16 3 03
5 P3-03-LSS-01 P1 Leak Sensor A3 Out of P1 Chemical Room (P1/P3 Riser Box) 3. CP-20A Developer Main Panel DI 16 3 04
6 P3-04-LSS-02 P1 Leak Sensor A4 Out of P1 Chemical Room (P1/P3 Riser Box) 4. CP360 B Main Panel DI 16 3 05
7 P3-05-LSS-02 P1 Leak Sensor A5 Out of P1 Chemical Room (P1/P3 Riser Box) 5. CP360 Plus B Main Panel DI 16 3 06
8 P3-06-LSS-02 P1 Leak Sensor A6 Out of P1 Chemical Room (P1/P3 Riser Box) 6. CP360 Plus C Main Panel DI 16 3 07
9 P3-07-LSS-02 P1 Leak Sensor A7 Out of P1 Chemical Room (P1/P3 Riser Box) 7. CP360 Plus L Main Panel DI 16 3 08
10 P3-08-LSS-02 P1 Leak Sensor A8 Out of P1 Chemical Room (P1/P3 Riser Box) 8. Package Bond 100B Main Panel DI 16 3 09
11 P3-09-LSS-02 P1 Leak Sensor A9 Out of P1 Chemical Room (P1/P3 Riser Box) 9. Package Bond C50 Main Panel DI 16 3 10
12 P3-10-LSS-02 P1 Leak Sensor A10 Out of P1 Chemical Room (P1/P3 Riser Box) 10. Package Bond HT-U Main Panel DI 16 3 11
13 P3-11-LSS-01 P1 Leak Sensor A11 Out of P1 Chemical Room (P1/P3 Riser Box) 11. CuSO4.5H2O Main Panel DI 16 3 12
14 P3-12-LSS-01 P1 Leak Sensor A12 Out of P1 Chemical Room (P1/P3 Riser Box) 12. KOH-840 Main Panel DI 16 3 13
15 P3-13-LSS-02 P1 Leak Sensor A13 Out of P1 Chemical Room (P1/P3 Riser Box) 13. CM300 Main Panel DI 16 3 14
16 P3-14-LSS-02 P1 Leak Sensor A14 Out of P1 Chemical Room (P1/P3 Riser Box) 14. CM500 Main Panel DI 16 3 15
Page 45
Slot 4 (Main Panel)
IO
17 P3-15_16-LSS-01 P1 Leak Sensor A15_16 Out of P1 Chemical Room (P1/P3 Riser Box) 15.KOH-850 + 16. KOH-985 Main Panel DI 16 4 00
18 P3-17-LSS-02 P1 Leak Sensor A17 Out of P1 Chemical Room (P1/P3 Riser Box) 17. Acetic Acid 10% Main Panel DI 16 4 01
19 Spare Main Panel DI 16 4 02
Page 46
Slot 1 (Remote Panel)
IO
1 ES-PB-RIO NA NA NA Remote Panel DI 16 1 00
2 P3-01.1-LSS-02 P1 Leak Sensor B1.1 Roof Top Corner (Cooling Tower) 1.1 50-8% H2SO4 Remote Panel DI 16 1 01
3 P3-01.2-LSS-03 P1 Leak Sensor B1.2 Roof Top Corner (Cooling Tower) 1.2 50%H2SO4 Remote Panel DI 16 1 02
4 P3-02-LSS-03 P1 Leak Sensor B2 Roof Top Corner (Cooling Tower) 2. RTE-Cu30-A Remote Panel DI 16 1 03
5 P3-03-LSS-02 P1 Leak Sensor B3 Roof Top Corner (Cooling Tower) 3. CP-20A Developer Remote Panel DI 16 1 04
6 P3-04-LSS-03 P1 Leak Sensor B4 Roof Top Corner (Cooling Tower) 4. CP360 B Remote Panel DI 16 1 05
7 P3-05-LSS-03 P1 Leak Sensor B5 Roof Top Corner (Cooling Tower) 5. CP360 Plus B Remote Panel DI 16 1 06
8 P3-06-LSS-03 P1 Leak Sensor B6 Roof Top Corner (Cooling Tower) 6. CP360 Plus C Remote Panel DI 16 1 07
9 P3-07-LSS-03 P1 Leak Sensor B7 Roof Top Corner (Cooling Tower) 7. CP360 Plus L Remote Panel DI 16 1 08
10 P3-08-LSS-03 P1 Leak Sensor B8 Roof Top Corner (Cooling Tower) 8. Package Bond 100B Remote Panel DI 16 1 09
11 P3-09-LSS-03 P1 Leak Sensor B9 Roof Top Corner (Cooling Tower) 9. Package Bond C50 Remote Panel DI 16 1 10
12 P3-10-LSS-03 P1 Leak Sensor B10 Roof Top Corner (Cooling Tower) 10. Package Bond HT-U Remote Panel DI 16 1 11
13 P3-11-LSS-02 P1 Leak Sensor B11 Roof Top Corner (Cooling Tower) 11. CuSO4.5H2O Remote Panel DI 16 1 12
14 P3-12-LSS-02 P1 Leak Sensor B12 Roof Top Corner (Cooling Tower) 12. KOH-840 Remote Panel DI 16 1 13
15 P3-13-LSS-03 P1 Leak Sensor B13 Roof Top Corner (Cooling Tower) 13. CM300 Remote Panel DI 16 1 14
16 P3-14-LSS-03 P1 Leak Sensor B14 Roof Top Corner (Cooling Tower) 14. CM500 Remote Panel DI 16 1 15
Page 47
IO
17 P3-15_16-LSS-02 P1 Leak Sensor B15_16 Roof Top Corner (Cooling Tower) 15.KOH-850 + 16. KOH-985 Remote Panel DI 16 2 00
18 P3-17-LSS-03 P1 Leak Sensor B17 Roof Top Corner (Cooling Tower) 17.Acetic Acid 10% Remote Panel DI 16 2 01
19 P3-01.1-LSS-03 P3 Leak Sensor C1.1 Inlet Mother Room 1.1 50-8% H2SO4 Remote Panel DI 16 2 02
20 P3-02-LSS-04 P3 Leak Sensor C2 Inlet Mother Room 2. RTE-Cu30-A Remote Panel DI 16 2 03
21 P3-04-LSS-04 P3 Leak Sensor C4 Inlet Mother Room 4. CP360 B Remote Panel DI 16 2 04
22 P3-13-LSS-04 P3 Leak Sensor C13 Inlet Mother Room 13. CM300 Remote Panel DI 16 2 05
23 P3-14-LS-04 P3 Leak Sensor C14 Inlet Mother Room 14. CM500 Remote Panel DI 16 2 06
24 P3-17-LS-04 P3 Leak Sensor C17 Inlet Mother Room 17. Acetic Acid 10% Remote Panel DI 16 2 07
25 VMB-01.2_1-DS-01 Door Sensor V1.2A VMB 1.2 50%H2SO4 A Remote Panel DI 16 2 08
26 VMB-01.2_2-DS-01 Door Sensor V1.2B VMB 1.2 50%H2SO4 B Remote Panel DI 16 2 09
27 VMB-03-DS-01 Door Sensor V3 VMB 3. CP-20A Developer Remote Panel DI 16 2 10
28 VMB-05-DS-01 Door Sensor V5 VMB 5. CP360 Plus B Remote Panel DI 16 2 11
29 VMB-06-DS-01 Door Sensor V6 VMB 6. CP360 Plus C Remote Panel DI 16 2 12
30 VMB-07-DS-01 Door Sensor V7 VMB 7. CP360 Plus L Remote Panel DI 16 2 13
31 VMB-08-DS-01 Door Sensor V8 VMB 8. Package Bond 100B Remote Panel DI 16 2 14
32 VMB-09-DS-01 Door Sensor V9 VMB 9. Package Bond C50 Remote Panel DI 16 2 15
Page 48
IO
33 VMB-10-DS-01 Door Sensor V10 VMB 10. Package Bond HT-U Remote Panel DI 16 3 00
34 VMB-11-DS-01 Door Sensor V11 VMB 11. CuSO4.5H2O Remote Panel DI 16 3 01
35 VMB-12-DS-01 Door Sensor V12 VMB 12. KOH-840 Remote Panel DI 16 3 02
36 VMB-15_16-DS-01 Door Sensor V15_16 VMB 15.KOH-850 + 16. KOH-985 Remote Panel DI 16 3 03
37 VMB-01.2_1-LS-04 VMB Leak Sensor C1.2A VMB 1.2 50%H2SO4 A Remote Panel DI 16 3 04
38 VMB-01.2_2-LS-05 VMB Leak Sensor C1.2B VMB 1.2 50%H2SO4 B Remote Panel DI 16 3 05
39 VMB-03-LS-01 VMB Leak Sensor C3 VMB 3. CP-20A Developer Remote Panel DI 16 3 06
40 VMB-05-LS-04 VMB Leak Sensor C5 VMB 5. CP360 Plus B Remote Panel DI 16 3 07
41 VMB-06-LS-04 VMB Leak Sensor C6 VMB 6. CP360 Plus C Remote Panel DI 16 3 08
42 VMB-07-LS-04 VMB Leak Sensor C7 VMB 7. CP360 Plus L Remote Panel DI 16 3 09
43 VMB-08-LS-04 VMB Leak Sensor C8 VMB 8. Package Bond 100B Remote Panel DI 16 3 10
44 VMB-09-LS-04 VMB Leak Sensor C9 VMB 9. Package Bond C50 Remote Panel DI 16 3 11
45 VMB-10-LS-04 VMB Leak Sensor C10 VMB 10. Package Bond HT-U Remote Panel DI 16 3 12
46 VMB-11-LS-01 VMB Leak Sensor C11 VMB 11. CuSO4.5H2O Remote Panel DI 16 3 13
47 Spare Remote Panel DI 16 3 14
Page 49
IO
49 P3_01.1-LSS-04 P3 Leak Sensor D1.1 To Acid Rinse Mother Tank 1.1 50-8% H2SO4 Remote Panel DI 16 4 00
50 P3_01.2-LSS-04 P3 Leak Sensor D1.2 To Acid Rinse Autodosing Tank 1 1.2 50%H2SO4 Remote Panel DI 16 4 01
51 P3_01.2-LSS-05 P3 Leak Sensor E1.2 To Package Bond Mother Tank 1.2 50%H2SO4 Remote Panel DI 16 4 02
52 P3_01.2-LSS-06 P3 Leak Sensor F1.2 To Package Bond Autodosing Tank 1 1.2 50%H2SO4 Remote Panel DI 16 4 03
53 P3_01.2-LSS-07 P3 Leak Sensor G1.2 To Trace Plating Autodosing Tank 1 1.2 50%H2SO4 Remote Panel DI 16 4 04
54 P3_01.2-LSS-08 P3 Leak Sensor H1.2 To Stud Plating Autodosing Tank 1 1.2 50%H2SO4 Remote Panel DI 16 4 05
55 P3_01.2-LSS-09 P3 Leak Sensor I1.2 To Heatsink Plating Autodosing Tank 1 1.2 50%H2SO4 Remote Panel DI 16 4 06
56 P3_02-LSS-05 P3 Leak Sensor D2 To CuEtch Mother Tank 2. RTE-Cu30-A Remote Panel DI 16 4 07
57 P3_03-LSS-03 P3 Leak Sensor D3 To Developer Mother Tank 1 3. CP-20A Developer Remote Panel DI 16 4 08
58 P3_03-LSS-04 P3 Leak Sensor E3 To Developer Mother Tank 2 3. CP-20A Developer Remote Panel DI 16 4 09
59 P3_03-LSS-05 P3 Leak Sensor F3 To Developer Mother Tank 3 3. CP-20A Developer Remote Panel DI 16 4 10
60 P3_04-LSS-05 P3 Leak Sensor D4 To Heatsink Plating Autodosing Tank 2 4. CP360 B Remote Panel DI 16 4 11
61 P3_05-LSS-04 P3 Leak Sensor D5 To Trace Plating Autodosing Tank 2 5. CP360 Plus B Remote Panel DI 16 4 12
62 P3_05-LSS-05 P3 Leak Sensor E5 To Stud Plating Autodosing Tank 2 5. CP360 Plus B Remote Panel DI 16 4 13
63 P3_06-LSS-04 P3 Leak Sensor D6 To Trace Plating Autodosing Tank 3 6. CP360 Plus C Remote Panel DI 16 4 14
64 P3_06-LSS-05 P3 Leak Sensor E6 To Stud Plating Autodosing Tank 3 6. CP360 Plus C Remote Panel DI 16 4 15
Page 50
IO
65 P3_07-LSS-04 P3 Leak Sensor D7 To Trace Plating Autodosing Tank 4 7. CP360 Plus L Remote Panel DI 16 5 00
66 P3_07-LSS-05 P3 Leak Sensor E7 To Stud Plating Autodosing Tank 4 7. CP360 Plus L Remote Panel DI 16 5 01
67 P3_08-LSS-04 P3 Leak Sensor D8 To PreDip Autodosing Tank 1 8. Package Bond 100B Remote Panel DI 16 5 02
68 P3_08-LSS-05 P3 Leak Sensor E8 To Package Bond Autodosing Tank 4 8. Package Bond 100B Remote Panel DI 16 5 03
69 P3_09-LSS-04 P3 Leak Sensor D9 To PreDip Autodosing Tank 2 9. Package Bond C50 Remote Panel DI 16 5 04
70 P3_09-LSS-05 P3 Leak Sensor E9 To Package Bond Autodosing Tank 2 9. Package Bond C50 Remote Panel DI 16 5 05
71 P3_10-LSS-04 P3 Leak Sensor D10 To Package Bond Mother Tank 10. Package Bond HT-U Remote Panel DI 16 5 06
72 P3_10-LSS-05 P3 Leak Sensor E10 To Package Bond Autodosing Tank 3 10. Package Bond HT-U Remote Panel DI 16 5 07
73 P3_11-LSS-03 P3 Leak Sensor D11 To Trace Plating Mother Tank 11. CuSO4.5H2O Remote Panel DI 16 5 08
74 P3_11-LSS-04 P3 Leak Sensor E11 To Stud Plating Mother Tank 11. CuSO4.5H2O Remote Panel DI 16 5 09
75 P3_11-LSS-05 P3 Leak Sensor F11 To Heatsink Plating Mother Tank 11. CuSO4.5H2O Remote Panel DI 16 5 10
76 P3_12-LSS-03 P3 Leak Sensor D12 To Strip KOH Mother Tank 12. KOH-840 Remote Panel DI 16 5 11
77 P3_12-LSS-04 P3 Leak Sensor E12 To Strip KOH Autodosing Tank 12. KOH-840 Remote Panel DI 16 5 12
78 P3_13-LSS-05 P3 Leak Sensor D13 To CM300 Micro Etch Mother Tank 13. CM300 Remote Panel DI 16 5 13
79 P3_14-LSS-05 P3 Leak Sensor D14 To CM500 Micro Etch Autodosing Tank 14. CM500 Remote Panel DI 16 5 14
80 P3_15_16-LSS-03 P3 Leak Sensor D15_16 To Stripper Solvent Mother Tank 15.KOH-850 + 16. KOH-985 Remote Panel DI 16 5 15
Page 51
IO
No TagName Description Sensor Location Chemical Line Location Type Module Slot No CH
81 P3_15_16-LSS-04 P3 Leak Sensor E15_16 To Stripper Solvent Autodosing Tank 15.KOH-850 + 16. KOH-985 Remote Panel DI 16 6 00
82 P3_17-LSS-05 P3 Leak Sensor D17 To Via Etch Mother Tank 17.Acetic Acid 10% Remote Panel DI 16 6 01
83 P3-01.1-P1S-LSS-05 Production Room Leak Sensor 1 Acid Rinse Mother Tank Transfer Pump 1 Supply To Ultrasonic Acid Rinse Remote Panel DI 16 6 02
84 P3-01.1-P2S-LSS-06 Production Room Leak Sensor 2 Acid Rinse Mother Tank Transfer Pump 2 Supply To Pre Clean Acid Rinse Remote Panel DI 16 6 03
85 P3-01.1-P2R-LSS-10 Production Room Leak Sensor 3 Acid Rinse Mother Tank Transfer Pump 2 Return From Pre Clean Acid Rinse Remote Panel DI 16 6 04
86 P3-01.1-P3S-LSS-07 Production Room Leak Sensor 4 Acid Rinse Mother Tank Transfer Pump 3 Supply To Heatsink Acid Rinse Remote Panel DI 16 6 05
87 P3-01.1-P3R-LSS-11 Production Room Leak Sensor 5 Acid Rinse Mother Tank Transfer Pump 3 Return From Heatsink Acid Rinse Remote Panel DI 16 6 06
88 P3-01.1-P4S-LSS-08 Production Room Leak Sensor 6 Acid Rinse Mother Tank Transfer Pump 4 Supply To Stud Acid Rinse Remote Panel DI 16 6 07
89 P3-01.1-P4R-LSS-12 Production Room Leak Sensor 7 Acid Rinse Mother Tank Transfer Pump 4 Return From Stud Acid Rinse Remote Panel DI 16 6 08
90 P3-01.1-P5S-LSS-09 Production Room Leak Sensor 8 Acid Rinse Mother Tank Transfer Pump 5 Supply To Trace Acid Rinse Remote Panel DI 16 6 09
91 P3-01.1-P5R-LSS-13 Production Room Leak Sensor 9 Acid Rinse Mother Tank Transfer Pump 5 Return FromTrace Acid Rinse Remote Panel DI 16 6 10
92 P3-02-P1S-LSS-06 Production Room Leak Sensor 10 CuEtch Mother Tank Transfer Pump 1 Supply To Wafer 1 Remote Panel DI 16 6 11
93 P3-02-P2S1-LSS-07 Production Room Leak Sensor 11 CuEtch Mother Tank Transfer Pump 2 Supply 1 To Wafer 2 Remote Panel DI 16 6 12
94 P3-02-P2S2-LSS-08 Production Room Leak Sensor 12 CuEtch Mother Tank Transfer Pump 2 Supply 2 To Cu Etch Remote Panel DI 16 6 13
95 P3-03-P1S-LSS-06 Production Room Leak Sensor 13 Na2CO3 Mother Tank Transfer Pump 1 Supply To Developer 1 Remote Panel DI 16 6 14
96 P3-03-P1R-LSS-07 Production Room Leak Sensor 14 Na2CO3 Mother Tank Transfer Pump 1 Return From Developer 1 Remote Panel DI 16 6 15
Page 52
No TagName Description Sensor Location Chemical Line Location IO Type Module Slot No CH
101 P3-PD-P1S-LSS-01 Production Room Leak Sensor 19 PreDip Mother Tank Transfer Pump 1 Supply To PreDip Remote Panel DI 16 7 04
102 P3-PD-P1R-LSS-01 Production Room Leak Sensor 20 PreDip Mother Tank Transfer Pump 1 Return From PreDip Remote Panel DI 16 7 05
103 P3-09-P1S-LSS-06 Production Room Leak Sensor 21 Package Bond Mother Tank Transfer Pump 1 Supply To Package Bond Remote Panel DI 16 7 06
104 P3-09-P1R-LSS-07 Production Room Leak Sensor 22 Package Bond Mother Tank Transfer Pump 1 Return From Package Bond Remote Panel DI 16 7 07
105 P3-11.1-P1S-LSS-06 Production Room Leak Sensor 23 Trace Plating Mother Tank Transfer Pump 1 Supply To Trace 1 Remote Panel DI 16 7 08
106 P3-11.1-P1R-LSS-15 Production Room Leak Sensor 24 Trace Plating Mother Tank Transfer Pump 1 Return From Trace 1 Remote Panel DI 16 7 09
Page 53
Chemical IO
No TagName Description Sensor Location Line Location Type Module Slot No CH
123 P3-11.2-P1S-LSS-24 Production Room Leak Sensor 41 Stud Plating Mother Tank Transfer Pump 1 Supply To Stud 1 Remote Panel DI 16 8 10
124 P3-11.2-P1R-LSS-32 Production Room Leak Sensor 42 Stud Plating Mother Tank Transfer Pump 1 Return From Stud 1 Remote Panel DI 16 8 11
Page 54
IO
139 P3-11.3-P1S-LSS-40 Production Room Leak Sensor 57 Heatsink Plating Mother Tank Transfer Pump 1 Supply To Heatsink 1 Remote Panel DI 16 9 10
140 P3-11.3-P1R-LSS-47 Production Room Leak Sensor 58 Heatsink Plating Mother Tank Transfer Pump 1 Return From Heatsink 1 Remote Panel DI 16 9 11
Page 55
IO
153 P3-13-P1S-LSS-06 Production Room Leak Sensor 71 MicroEtch Mother Tank Transfer Pump 1 Supply To Micro Etch 1 Remote Panel DI 16 10 08
154 P3-13-P1R-LSS-10 Production Room Leak Sensor 72 MicroEtch Mother Tank Transfer Pump 1 Return From Micro Etch 1 Remote Panel DI 16 10 09
155 P3-13-P2S-LSS-07 Production Room Leak Sensor 73 MicroEtch Mother Tank Transfer Pump 2 Supply To JCS 1 Remote Panel DI 16 10 10
156 P3-13-P3S-LSS-08 Production Room Leak Sensor 74 MicroEtch Mother Tank Transfer Pump 3 Supply To JCS 2 Remote Panel DI 16 10 11
157 P3-13-P4S-LSS-09 Production Room Leak Sensor 75 MicroEtch Mother Tank Transfer Pump 4 Supply To Micro Etch 2 Remote Panel DI 16 10 12
158 P3-13-P4R-LSS-11 Production Room Leak Sensor 76 MicroEtch Mother Tank Transfer Pump 4 Return From Micro Etch 2 Remote Panel DI 16 10 13
159 P3-17-P1S1-LSS-06 Production Room Leak Sensor 77 ViaEtch Mother Tank Transfer Pump 1 Supply 1 To Wafer 1 Remote Panel DI 16 10 14
160 P3-17-P1S2-LSS-07 Production Room Leak Sensor 78 ViaEtch Mother Tank Transfer Pump 1 Supply 2 To Wafer 2 Remote Panel DI 16 10 15
Page 56
IO Modul
No TagName Description Sensor Location Chemical Line Location Type e Slot No CH
161 P3-HW-P1S-LSS-01 Production Room Leak Sensor 79 Hard Water Mother Tank Transfer Pump 1 Supply To Hard Water Remote Panel DI 16 11 00
162 P3-12-P1S-LSS-07 Production Room Leak Sensor 80 Strip KOH Mother Tank Transfer Pump 1 Supply To KOH Stripper 3 Remote Panel DI 16 11 01
163 P3-12-P1R-LSS-10 Production Room Leak Sensor 81 Strip KOH Mother Tank Transfer Pump 1 Return From KOH Stripper 3 Remote Panel DI 16 11 02
168 P3-15_16-P1S-LSS-07 Production Room Leak Sensor 86 Stripper Solvent Mother Tank Transfer Pump 1 Supply To APT880T Stripper 3 Remote Panel DI 16 11 07
169 P3-15_16-P1R-LSS-10 Production Room Leak Sensor 87 Stripper Solvent Mother Tank Transfer Pump 1 Return From APT880T Stripper 3 Remote Panel DI 16 11 08
Page 57
Page 58

Seq Operation R1

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Seq Operation R1

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ST_BCDS_CDM_Sequence of Operation

Sequence of Operation of CDM System

Revision Date Details

2. Key Equipment & Instruments

Group A- CDM by Hexagon

Group B- CDM by MANZ

Group C- VMB by Hexagon

3.1 CDM-1 (Chemical line 4. CP360 B)

3.1.2 Auto Mode

The tag number please refer to respective P&ID

3.1.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-1 shall be switched to Auto from HMI by operator.

3.2 CDM-2 (Chemical line 6. CP360 Plus C) & VMB-6

3.2.1 Manual Mode

3.2.2 Auto Mode

The tag number please refer to respective P&ID

3.2.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-2 shall be switched to Auto from HMI by operator.

3.3 CDM-3 (Chemical line 7. CP360 Plus L) & VMB-7

3.3.1 Manual Mode

3.3.2 Auto Mode

The tag number please refer to respective P&ID

3.3.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-3 shall be switched to Auto from HMI by operator.

3.4 CDM-4 (Chemical line 9. Package Bond C50) & VMB-9

3.4.1 Manual Mode

3.4.2 Auto Mode

The tag number please refer to respective P&ID

3.4.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-4 shall be switched to Auto from HMI by operator.

3.5.1 Manual Mode

3.5.2 Auto Mode

The tag number please refer to respective P&ID

3.5.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-5 shall be switched to Auto from HMI by operator.

8. Wear glove to re-instate the tube connection to drum/carboy.

3.6 CDM-6 (Chemical line 2. RTE-CU-30A)

3.6.1 Manual Mode

3.6.2 Auto Mode

The tag number please refer to respective P&ID

3.6.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-6 shall be switched to Auto from HMI by operator.

3.7 CDM-7 (Chemical line 5. CP360 Plus B) & VMB-5

3.7.1 Manual Mode

3.7.2 Auto Mode

The tag number please refer to respective P&ID

3.7.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-7 shall be switched to Auto from HMI by operator.

3.8 CDM-8 (Chemical line 8. Package Bond 100B) & VMB-8

3.8.1 Manual Mode

3.8.2 Auto Mode

The tag number please refer to respective P&ID

3.8.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-8 shall be switched to Auto from HMI by operator.

3.9.1 Manual Mode

3.9.2 Auto Mode

The tag number please refer to respective P&ID

3.9.2.1 Auto Mode Start-Up Sequence

 Pre-Requisite: The CDM-9 shall be switched to Auto from HMI by operator.

3.10 CDM-10 (Chemical line 13. CM300)

3.10.1 Manual Mode

3.10.2 Auto Mode

The tag number please refer to respective P&ID