AEROSPACE & SEMICONDUCTOR FLOW

ASFLOW VALVE SERIES

AEROSPACE & SEMICONDUCTOR FLOW

Best Quality is our managing strategy!

Leading company in field of Semiconductor, LCD and Bio-industry!

Head Office
#797-13, Seobong-Ro, Jungnam-Myun, Hwasung-City, Gyeonggi-Do, KOREA
Tel. 82 31 352 2301 Fax. 82 31 352 2309

R&D Center
#7, Saneop-Ro 156beon-Gil, Gwonseon-Gu, Suwon-City, Gyeonggi-Do, KOREA
Tel. 82 31 352 2301 Fax. 82 31 352 2507
www.asflow.com www.asflow.com
 AEROSPACE & SEMICONDUCTOR FLOW

TECHNICAL DATA DIAPHRAGM VALVE SERIES

Material Electropolished Surfaces-Surface Finish STRAIGHT TYPE BRANCH TYPE BLOCK TYPE
SM Single Melt • Surface Defects : maximum 25 for any one location, with
maximum average of 15.
DM Double Melt
(Standard spec : SEMASPEC 90120401-STD)
VM VIM/VAR

Chemical Composition
Chemmical
Composition C Si Mn P S Ni Cr Mo Cu Al BRANCH TYPE FLOW BLOCK TYPE FLOW
(Wt%)
≤ ≤ ≤ ≤ ≤ 12.0 16.0 2.0 ≤
SM(VOD) 0.03 0.75 0.80 0.040 0.005 16.0 18.0 3.0 0.50 -
≤ ≤ ≤ ≤ ≤ 14.5 16.5 2.2 ≤ ≤
DM(VAR) 0.01 0.3 0.4 0.03 0.003 15.0 17.0 2.5 0.25 0.01
≤ ≤ ≤ ≤ ≤ 14.5 16.5 2.2 ≤ ≤ • Surface Chrominum Enhancement Ratio :
VM(VIM+VAR) 0.010 0.200 0.050 0.020 0.003 15.0 17.0 2.5 0.20 0.01
(Standard spec : SEMI F20 - S≤0.01%) "1V25" Type "5V12" Type "1H23" Type "3H12" Type
"1" Type
"1" Type "2" Type
"2" Type "3" Type
"3" Type "1V25" Type "5V12" Type "1H23" Type "3H12" Type

Dimensional Specification
ASFLOW valves meet the end-to-end length and overall envelope. Surface Roughness Switch Circuit Diagram
(Standard spec : SEMA TECH 96063137-ENG)
EP Ra ≤ 5unich Ry ≤ 0.7 ㎛
Surface Roughness BA Ra ≤ 10unich Ry ≤ 3.0 ㎛
AP Ra ≤ 100unich Ry ≤ 25 ㎛
EP Ra ≤ 5unich Ry ≤ 0.7 ㎛ • Cr to Fe ratio≥2:1
BA Ra ≤ 10unich Ry ≤ 3.0 ㎛ • CrO to FeO ratio≥3:1
(Standard spec : SEMASPEC 90120403-STD) Specifications Material
AP Ra ≤ 100unich Ry ≤ 25 ㎛ • The valves meet the oxide layer depth and surface contamination
as the depth of the oxide layer≥20 after substration of the Switch Specification Valve parts Name Material
He Leak Test carbon layer. Valve Body SUS316L (Single Melt / Double Melt)
• The carbon layer is layer≤10. Working Voltage DC + 5V ~ +24V
• All valves are 100% helium leak tested. Tests are performed Seat PCTFE
• The Maximum Surface Contamination is according to: Working Current 20mA
using a helium leak detector machine with a sensitivity of Actuator Cap Aluminum
1x10-9 atm cc/sec Element Atomic percentage Operation Type NC Handle ABS
• Inboard Leak Integrity : ≤3x10-9 atm cc/sec
Carbon 30.0 Wire Length 3m Diaphragm Co-Ni Alloy
(Standard spec : SEMI F1)
• Leak across the seat : ≤3x10-9 atm cc/sec Sulfur 1.0
(Standard spec : SEMASPEC 90120391B-STD) Phosphorus 2.0
* Held for at least 15 seconds. Specifications
Silicon 1.5
Size 1/4" 3/8" , 1/2" 3/4"
Particles Nitrogen 2.0
Cv Value 0.3 0.7 0.7
for particles≥0.1㎛, contribution ≤20Particles/ft3 (This test is in accordance with SEMASPEC 91060573-STD)
Maximum Working Pressure 1MPa
for particles≥0.02㎛, contribution ≤75Particles/ft3
Orifice Size 4mm 7mm 7mm
(Standard spec : SEMASPEC 90120390-STD) Cleaning
Actuator Operating Pressure 0.4 ~ 0.7MPa
All parts are free of emulsion composition and residues involved
Moisture Test in the machining process ,and ASREIN Valves are assembled, Maximum Working Temp. -10˚C ~ 8O˚C
Test procedures per SEMI F58 For low surface area component inspected, tested and packaged in a Class 10 Clean room. Atmospheric Temp. -10˚C ~ 6O˚C
(valve, regulator), time to recover to baseline from a 200 ppb
Across the Seat He Leak Test Rates ≤1X10-9 atm cc/sec
spike (SEMI F58) is 1 hour. Packging
(Standard spec : SEMI F58) Inbord He Leak Test Rates ≤1X10-9 atm cc/sec
Standard packed in a double bad and the inner bag contains
ultra pure nitrogen. Particle Inspection (EP only) Pressure:
Reliability No Count
60~80psi N2 Gas (Particles≥0.1μm)
• More than 3 million cycles for pneumatic valves. Manual Type 100,000 Cycle
Cycle Durability
• More than 100,000 cycles for manual valves.
Test Pneumatic Type 3,000,000 Cycle
(Standard spec : SEMASPEC 90120395-STD, SEMASPEC 91060573-STD)

www.asflow.com 02 03
STRAIGHT TYPE Ordering Number STRAIGHT TYPE Ordering Number
MANUAL DIAPHRAGM FDV / SDV 04 MV B 316LS PNEUMATIC DIAPHRAGM NDV 04 MV AC B 316LS
VALVES VALVES
PRODUCT SIZE CONNECTION GRADE MATERIAL PRODUCT SIZE CONNECTION ACTUATION GRADE MATERIAL

Product Dimension (mm) Product Dimension (mm)

Model Connection Size A B C D E F G H Model Connection Size A B C D E F G H

1/4" 57 28 65 11 45 17 - - 1/4" 57 28 60 11 39.6 25.4 28 -

3/8" 77 38 79 16 45 28 - - AERO SPAC E & SEM IC O NDUC TO R FLO W C O .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT
3/8" 77 38 76 16 52 28 38 -
Male Male
1/2" 77 38 79 16 45 28 - - 1/2" 77 38 76 16 52 28 38 -

3/4" 122 38 85 22 45 28 - - 3/4" 122 38 90 22 52 28 38 -

1/4" 78 28 65 11 45 17 - - 1/4" 70.6 28 60 11 39.6 25.4 28 -

3/8" 104.6 38 79 16 45 28 - - A ERO SPAC E & SEM IC O NDUC TO R FLO W C O .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT 3/8" 83 38 76 16 52 28 38 -
Female Female
1/2" 104.6 38 79 16 45 28 - - 1/2" 83 38 76 16 52 28 38 -

3/4" 122 38 85 22 45 28 - - 3/4" 122 38 90 22 52 28 38 -

1/4" 55 28 65 11 45 17 - - 1/4" 55 28 60 11 39.6 25.4 28 -

PRODUCT : FDV - Manual Diaphragm Valve (Forged Body) 3/8" 70 38 79 16 45 28 - - AERO SPAC E & SEM IC O NDUC TO R FLO W C O .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT
3/8" 70 38 76 16 52 28 38 -
SDV - Manual Diaphragm Valve (Square Body) Lok PRODUCT : NDV - Pneumatic Diaphragm Valve Lok
1/2" 70 38 79 16 45 28 - - 1/2" 70 38 76 16 52 28 38 -
SIZE CONNECTION GRADE MATERIAL SIZE CONNECTION ACTUATION GRADE MATERIAL
3/4" 84 38 85 22 45 28 - - 3/4" 84 38 90 22 52 28 38 -
04 1/4" MV Male B BA 316LS SUS316L Single melt 04 1/4" MV Male AC Normal SUS316L
Close B BA 316LS Single melt
1/4" 54 28 65 11 45 17 - - 1/4" 54 28 60 11 39.6 25.4 28 -
06 3/8" FV Female E EP 316LD SUS316L Double melt 06 3/8" FV Female AO Normal SUS316L
Open E EP 316LD Double melt
3/8" 69 38 79 16 45 28 - - 3/8" 69 38 76 16 52 28 38 -
A ERO SPA C E & SEM IC O N DUC TO R FLO W C O .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT

08 1/2" LOK Lok 304 SUS304 Butt Weld 08 1/2" LOK Lok 304 SUS304 Butt Weld
1/2" 69 38 79 16 45 28 - - 1/2" 69 38 76 16 52 28 38 -
12 3/4" BW Butt Weld 12 3/4" BW Butt Weld
3/4" 150 38 85 22 45 28 - - 3/4" 150 38 90 22 52 28 38 -

STRAIGHT TYPE Ordering Number STRAIGHT TYPE Ordering Number

QUARTER-TURN QDV 04 MV B 316LS SWITCH DIAPHRAGM NDV 04 MV ACS B 316LS
DIAPHRAGM VALVES VALVES
PRODUCT SIZE CONNECTION GRADE MATERIAL PRODUCT SIZE CONNECTION ACTUATION GRADE MATERIAL

Product Dimension (mm) Product Dimension (mm)

Model Connection Size A B C D E F G H Model Connection Size A B C D E F G H

1/4" 57 28 80 11 37 25.4 28 -

3/8" 77 38 100 16 52 28 38 -
Male AERO SPAC E & SEM IC O NDUC TO R FLO W C O .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT
Male 1/4" 57 28 60 11 42 25.4 28 -
1/2" 77 38 100 16 52 28 38 -

3/4" 122 38 110 22 52 28 38 -

1/4" 70.6 28 80 11 37 25.4 28 -

3/8" 83 38 100 16 52 28 38 -
Female AERO SPACE & SEM IC O NDUCTO R FLO W CO .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT
Female 1/4" 70.6 28 60 11 42 25.4 28 -
1/2" 83 38 100 16 52 28 38 -

3/4" 122 38 110 22 52 28 38 -

1/4" 55 28 80 11 37 25.4 28 -

3/8" 70 38 100 16 52 28 38 -
PRODUCT : QDV - Quarter-Turn Diaphragm Valve Lok PRODUCT : NDV - Pneumatic Diaphragm Valve
Lok 1/4" 55 28 60 11 42 25.4 28 -
AERO SPACE & SEM IC O NDUCTO R FLO W CO .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT

1/2" 70 38 100 16 52 28 38 -
SIZE CONNECTION GRADE MATERIAL SIZE CONNECTION ACTUATION GRADE MATERIAL
3/4" 84 38 110 22 52 28 38 - SUS316L
04 1/4" MV Male B BA 316LS SUS316L Single melt 04 1/4" MV Male B BA 316LS Single melt
1/4" 54 28 80 11 37 25.4 28 - Normal E EP 316LD SUS316L
06 3/8" FV Female E EP 316LD SUS316L Double melt FV Female Double melt
Close
3/8" 69 38 100 16 52 28 38 - ACS Switch
08 1/2" LOK Lok 304 SUS304 Butt Weld LOK Lok Type 304 SUS304 AERO SPACE & SEM IC O NDUCTO R FLO W CO .,LTD.

DIAPHRAGMVALVE
PCTFE-SEAT
Butt Weld 1/4" 54 28 60 11 42 25.4 28 -
1/2" 69 38 100 16 52 28 38 -
12 3/4" BW Butt Weld BW Butt Weld
3/4" 150 38 110 22 52 28 38 -

www.asflow.com 04 05
BRANCH TYPE Ordering Number BRANCH TYPE Ordering Number
MANUAL DIAPHRAGM TDV 04 MV 1 B 316LS PNEUMATIC DIAPHRAGM TNDV 04 MV 1 AC B 316LS
VALVES VALVES
PRODUCT SIZE CONNECTION FLOW GRADE MATERIAL PRODUCT SIZE CONNECTION FLOW ACTUATION GRADE MATERIAL

Product Dimension (mm) Product Dimension (mm)

Model Connection Size A B C D E F G H Model Connection Size A B C D E F G H

1/4" 57 28 63 11 45 25.4 28 28.5 1/4" 57 28 60 11 39.6 25.4 28 28.5

3/8" 77 38 76 16 45 28 38 38.5 3/8" 77 38 76 16 52 28 38 38.5

A ERO
ERO S
SPA
PA C E & SEM
EM IIC
SE C O N DUC
D UC TO
TO R FLO
FLO W C O .,LTD.
., LTD .

DIIA
APHRAGMVALVE
-SEAT
PCTFE-S

Male Male
1/2" 77 38 76 16 45 28 38 38.5 1/2" 77 38 76 16 52 28 38 38.5

3/4" 122 38 82 22 45 28 38 61 3/4" 122 38 90 22 52 28 38 61

1/4" 70.6 28 63 11 45 25.4 28 35.3 1/4" 70.6 28 60 11 39.6 25.4 28 35.3

3/8" 83 38 76 16 45 28 38 41.5 3/8" 83 38 76 16 52 28 38 41.5

AERO
A ERO S
SPAC
PA C E & SE
SEM
M IIC
CO N
NDUCTO
D UC TO R F
FLO
LO W C
COO .,
.,LTD.
LTD .

DIIA
APHRAGMVALVE
PCTFE-S
-SEAT

Female Female
1/2" 83 38 76 16 45 28 38 41.5 1/2" 83 38 76 16 52 28 38 41.5

3/4" 122 38 82 22 45 28 38 61 3/4" 122 38 90 22 52 28 38 61

1/4" 55 28 63 11 45 25.4 28 27.5 1/4" 55 28 60 11 39.6 25.4 28 27.5

3/8" 70 38 76 16 45 28 38 35 3/8" 70 38 76 16 52 28 38 35
A ERO
ERO SPA
SPA C E & SEM
S M IC
SE I C O N DUCTO
D UC TO R FLO
FLO W CO
C O .,LTD.
., LTD .

DIIA
APHRAGMMVVALVE
PCTFE-S
-SEAT

PRODUCT : TDV - Manual Diaphragm Valve (Branch Type) Lok PRODUCT : TNDV - Pneumatic Diaphragm Valve (Branch Type) Lok
1/2" 70 38 76 16 45 28 38 35 1/2" 70 38 76 16 52 28 38 35
SIZE CONNECTION FLOW GRADE MATERIAL SIZE CONNECTION FLOW ACTUATION GRADE MATERIAL
SUS316L 3/4" 84 38 82 22 45 28 38 42 3/4" 84 38 90 22 52 28 38 42
04 1/4" MV Male 1 B BA 316LS Single melt 04 1/4" MV Male 1 AC Normal SUS316L
Close B BA 316LS Single melt
SUS316L 1/4" 54 28 63 11 45 25.4 28 27 1/4" 54 28 60 11 39.6 25.4 28 27
06 3/8" FV Female 2 E EP 316LD Double melt 06 3/8" FV Female 2 AO Normal SUS316L
Open E EP 316LD Double melt
3/8" 69 38 76 16 45 28 38 34.5 A ERO
ERO SPA
SPA C E & SEM
SEM IIC
C O N DUC
D UC TO
TO R FLO
FLO W C O .,LTD.
. , LTD .

DIIA
APHRAGM
PCTFE-S
MV
-SEAT
VALVE

3/8" 69 38 76 16 52 28 38 34.5
08 1/2" LOK Lok 3 304 SUS304 Butt Weld 08 1/2" LOK Lok 3 304 SUS304 Butt Weld
1/2" 69 38 76 16 45 28 38 34.5 Butt 1/2" 69 38 76 16 52 28 38 34.5
12 3/4" BW Butt Weld 12 3/4" BW Weld
3/4" 150 38 82 22 45 28 38 75 3/4" 150 38 90 22 52 28 38 75

BRANCH TYPE Ordering Number BLOCK TYPE Ordering Number

QUARTER-TURN TQDV 04 MV 1 B 316LS MANUAL DIAPHRAGM BDV 04 MV 1V25 B 316LS
DIAPHRAGM VALVES VALVES
PRODUCT SIZE CONNECTION FLOW GRADE MATERIAL PRODUCT SIZE CONNECTION ACTUATION GRADE MATERIAL

Product Dimension (mm) Product Dimension (mm)

Model Connection Size A B C D E F G H Model Connection Size A B C D E F G H I

1/4" 57 28 80 11 37 25.4 28 28.5

3/8" 77 38 100 16 52 28 38 38.5

Male Male 1/4" 128.7 64 70 11 118 64.3 28 15 40
1/2" 77 38 100 16 52 28 38 38.5 A
AEROSPACE
EROSPACE & S
SEMICOND
EMICOND UCTOR
UCTOR FLOW
FLOW CO.
CO.,, LTD.
LTD.

. , LTD..

3/4" 122 38 110 22 52 28 38 61 . , LTD..

. , LTD..

1/4" 70.6 28 80 11 37 25.4 28 35.3

3/8" 83 38 100 16 52 28 38 41.5

Female . , LTD..

Female 1/4" 107.6 64 70 11 118 53.8 28 15 40

1/2" 83 38 100 16 52 28 38 41.5 AEROSPACE
AEROSPACE & SEMICOND
SEMICOND U
UCTOR
CTOR FLOW
FLOW CO.
CO. , LTD.
LTD.

. , LTD..

3/4" 122 38 110 22 52 28 38 61

. , LTD..

1/4" 55 28 80 11 37 25.4 28 27.5

3/8" 70 38 100 16 52 28 38 35 ., LTD..

PRODUCT : TQDV - Quarter-Turn Diaphragm Valve (Branch Type) Lok PRODUCT : BDV - Manual Diaphragm Valve (Block Type) ., LTD..

Male 1/4" 128.7 64 70 11 118 46.3 28 15 40

1/2" 70 38 100 16 52 28 38 35 A
AEROSPACE
EROSP
PACE & SEMICOND
SEMIC
COND UCTOR
UCTOR
R FLOW
FLOW C
CO.,
O., LT
LTD.
D.

SIZE CONNECTION FLOW GRADE MATERIAL SIZE CONNECTION FLOW GRADE MATERIAL ., LTD..

SUS316L 3/4" 84 38 110 22 52 28 38 42 SUS316L

04 1/4" MV Male 1 B BA 316LS Single melt 04 1/4" MV Male 1V25 B BA 316LS Single melt
SUS316L 1/4" 54 28 80 11 37 25.4 28 27 SUS316L
06 3/8" FV Female 2 E EP 316LD Double melt FV Female 5V12 E EP 316LD Double melt ., LTD..

3/8" 69 38 100 16 52 28 38 34.5

08 1/2" LOK Lok 3 304 SUS304 1H23 304 SUS304
., LTD..

Butt Weld ., LTD..

Female 1/4" 107.6 64 70 11 118 35.8 28 15 40

1/2" 69 38 100 16 52 28 38 34.5 A
AEROSPACE
EROSPACE & SEMICOND
SEMICOND UCTOR
UCTOR F
FLOW
LOW C
CO.,
O., L
LTD.
TD.

12 3/4" BW Butt Weld 3H12

3/4" 150 38 110 22 52 28 38 75

www.asflow.com 06 07
BLOCK TYPE Ordering Number High Purity Gas

Regulator Series
PNEUMATIC DIAPHRAGM BNDV 04 MV 1V25 AC B 316LS
VALVES
PRODUCT SIZE CONNECTION FLOW ACTUATION GRADE MATERIAL
Economical / High Reliability
Product Dimension (mm)
Model Connection Size A B C D E F G H I

ALL D.
-SSSEE GM .,L,LTD LT

VVEE
HR CCO.
AAG O
AT VVA VAL
AAPP O W
FLO

AER
A
FL

ER
AT
R

O
CTO
TO

-SE

SSPA
IIAP
CT

FEES

PA
DIA
UC

TFE
NDU

CTF

C
D

E
PPC
N

&
O

SSEM
IIC
C

EM
SSEM
EM

IIC
C
O
&

N
NDU
E

D
Male 1/4" 128.7 64 71 11 120 64.3 28 15

C
40

UC
SPA
A

CT
CTO
SP

TO
O

R
AER
ER

FL
FFLO
DA
D
AE

IIA
IAPH
AAPPPH FEES

W
PPC
HR SEAT
CTFE

C
CO.
T
TF
AAG

O
GM T

. ,,LTD E
-S

LT
D
VAL
VA
V
A

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LLVVVE
AE
AEROSPACE
R SPA
S C E & SE
SEMICOND
MIC OND UC
UCTOR
T OR FFLOW
LOW CCO.,
O., LTLTD.
D.

., LTD..

., LTD..

., LTD..

M ,LTD.
A O .,LTD
VVEE
AALLLV
PH W CO.

AATT VVAL
C

SSEE GMV

AER
A
RAG
FFLO LO

ER
O
OSP
R
AAPPH

SP
-SE
CTO
TO

IIAP
FFEEES -S
DIA

ACE
A
TFE
UC

C
CTTF
NDU
DU

E
PPC

&
N
IICO
O

SSEM
EM
C
SEM
EM
M

IICO
C
SE

O
N
NDU
&

D
ACE
E

UC
C

CT
CTO
A

TO
OSP
SP

R
O

FFLO
AER
ER

L
DA
D
A

IIA
IAP

W
AAPH
APP FE
PPC

C
CO.
HR SSEEAATT
CTF

O
TTFE

. ,,LTD
AAG
FE-S

LT
GM
Female 1/4" 107.6 64 71 11 120 53.8 28 15 40

-SE
MV

D
.
VAL
VAAL
LVVE
VE
., LTD..

AEROSPACE
AEROSPACE
SPACE & SEM
SEMICOND
MICOND UC
UCTOR
TOR F
FLOW
LOW C
CO.,
O., L
LTD.
TD.

., LTD..

., LTD..
MV ,LTTDDD..
..,LT

VE
LLVE
LVVE
AT VAL
HR CCOO
VA
AAPP O W
GM

AE
AER
-SSEE AAG
FFLO

ER
L

AT

O
OSP
TTOR
R

SP
-SE
FESE
IAP
O

EES
DIIA

AC
A
TFE
DUC
UC

C
CF
TTF

E
D

PC
PC

&
ON
N
O

SE
SEM
EM
IIC
C

M
SEM
M

IIC
C
SE

O
ON
N
&

D
DUC
E

UC
AC
C

TTOR
O
OSP
SP

., LTD..
R
O

FFLO

PRODUCT : BNDV - Pneumatic Diaphragm Valve (Block Type)

AER
ER

LO
DIIA
A

IAP

W
AP FE
AP

Male 1/4" 128.7 64 71 11 120 46.3 28 15 40

PPC

C
CO
HR SSEEAATT
CTTF

O
TFE

..,LT
AAG
FEES

, LT
LTD
GM
-SE
-
MV

D
D.
.
VVA
VAL
AALLLV
VE
VE

., LTD..

A
AEROSPACE
EROSP
SPACE & SEM
SEMICOND
MICOND UC
UCTOR
TOR F
FLOW
LOW CO
CO.,
., LT
LTD.
D.

SIZE CONNECTION FLOW ACTUATION GRADE MATERIAL ., LTD..

04 1/4" MV Male 1V25 AC Normal SUS316L

Close B BA 316LS Single melt
FV Female 5V12 AO Normal SUS316L
Open E EP 316LD Double melt ., LTD..
AR100 Series AR200 Series
MV ,LTTDDD..
AAG ..,LT
ALVE
LVVEE
LV
VAL
HR CCOO
AATT VVA
AP O W
SE GM

AE
AER
FFLO

ER
L

O
OSP
TTOR
R

SP
-SE
-SSE
O

IAP
PC AP
FEES
DIIA

A
AC
TTFFE
TFE
DUC
UC

C
E

1H23 304 SUS304

D

PC

&
ON
N
O

SE
SEM

., LTD..
EM
IIC
C

M
SEM
M

IIC
C
SE

O
ON
N
&

D
DUC
E

UC
AC
C
A

TTOR
OSP
SP

O
R
O

Female 1/4" 107.6 64 71 11 120 35.8 28 15 40

FFLO
AER
ER

LO
AE

DIA
IIAP

W
AP
APPH FFEEES
PC
PC

C
CO
HR SSEEAT

O
TTFE
TF

..,LT
AAG

, LT
LTD
GMV
--SE
M

D
D.
.
VVA
VAL
AT
AALLLV
VE
VE

., LTD..

3H12
Specifications Features
A
AEROSPACE
EROSP
SPACE & SEM
SEMICOND
MICOND UC
UCTOR
TOR F
FLOW
LOW CO
CO.,
., LT
LTD.
D.

CHECK Ordering Number Operating Conditions • Asflow’s Regulator features excellent stability of set pressure with
accuracy & sensibility to be applied for pressure reduction or
Maximum rated inlet pressure 3500 psig (240barg)
VALVES CV 04 MV B 316LS 600 psig (40barg)
sustenance in Special high purity gas line, Bulk gas, Equipment and
Gas cabinets of semiconductor manufacturing.
Outlet pressure ranges 0-30 psig (2barg)
0-60 psig (4barg), 0-100 psig (7barg)
PRODUCT SIZE CONNECTION GRADE MATERIAL • Inner surface that gas flows is treated to get 5Ra or 10Ra.
0-150 psig (10.4barg)
0-250 psig (17barg)
Product Dimension (mm) Surface Roughness Operating temperature -15℉ to 176℉ (-20℃ to 80℃)
• Metal to metal diaphragm to body seal assures high leak integrity.
Model Connection Size A B C EP Ra ≤ 5μinch Ry ≤ 0.7μm Certified inboard leak rate 1 x 10-9 atm cc/sec He
• Minimal particle generation and entrapment.
Flow capacity (Cv) 1/4“ = 0.06(3500psig)
BA Ra ≤ 10μinch Ry ≤ 3.0μm
1/4" 19 53.65 25.4 0.2(600psig)
• 100% Helium leak Tested.
1/2“ = 0.5
Male
Specifications Design proof pressure 150% of Maximum rated pressure
• All stage of assembled, in-spected,
PRODUCT : CV - Check Valve 1/2" 27 69 32 tested and packaged in a Class 10 Clean room.
Size 1/4" 1/2"
SIZE
CONNECTION GRADE MATERIAL
Cv Value 0.35 1.1
Material of Construction
04 1/4" MV Male Body 316L Stainless Steel
B BA 316LS SUS316L Single melt Maximum Operating Pressure 16.2 MPa
1/4" 19 70 25.4 Seat PCTFE, optional Vespel®
06 3/8" FV Female
Cracking Pressure 2.26 kPa Diaphragm Hastelloy C-22®
E EP 316LD SUS316L Double melt Female
08 1/2" LOK Lok
Back Pressure Seal 29.4 kPa Poppet 316L Stainless Steel
1/2" 27 79 32 Poppet Spring 316L Stainless Steel
Maximum Working Temp. -10℃ ~ 80℃
Hand wheel ABS Plastic
Material Atmospheric Temp. -10℃ ~ 60℃ (3500 psig – White)
Valve Parts Name Material
Inbord He Leak Test Rates ≤1X10-9atm cc/sec
(600 psig – Black)
1/4" 19 46 25.4
Inlet/Outlet Body SUS316L (Single Melt / Double Melt)

Gasket SUS316
Internal Surface Finish(Ra)
Seat O-Ring ISOLAST® J9650 Lok 3/8" 27 55.9 32 BA Grade ≤ 10 m inch
EP Grade ≤ 5 m inch
Poppet SUS316L Recommendation
Asflow’s regulator is designed for maximum safety.
Spring SUS316 WPA
1/2" 27 57.8 32 Weight In order to achieve precise control and durability, utilization within 70% of Max.
(without gauges) 1/4" = 0.9kg / 1/2" = 1.6kg working pressure is ideal.

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AR100 Series AR200 Series
Ordering Number Ordering Number
AR-100 04 FV 2 3 B B S AR-200 08 FV 2 3 B B S

Product Connection Connection Max. Outlet Pressure Gauge Port Grade Material Product Connection Connection Max. Outlet Pressure Gauge Port Grade Material
size type Inlet Pressure Range Option size type Inlet Pressure Range Option

Product AR100 Series A No Gauge Port (Fig. A) Product AR200 Series A No Gauge Port (Fig. A)
Connection Size 04 – 1/4" B 1/4“ Internal Seal (Fig. B) 06 – 3/8“ B 1/4“ Internal Seal (Fig. B)
C 1/4“ Internal Seal (Fig. C) Connection Size C 1/4“ Internal Seal (Fig. C)
08 – 1/2“
MV – Male type D 1/4“ Internal Seal (Fig. D) D 1/4“ Internal Seal (Fig. D)
FV – Female type E 1/4“ Male (Fig. B) MV – Male type E 1/4“ Male (Fig. B)
Connection Type LOK – Lok type F 1/4“ Male (Fig. C) FV – Female type F 1/4“ Male (Fig. C)
BW – Butt weld type Gauge Port Option G 1/4“ Male (Fig. D) Connection Type LOK – Lok type Gauge Port Option G 1/4“ Male (Fig. D)
NP – Female NPT Thread H 1/4“ Female (Fig. B) BW – Butt weld type H 1/4“ Female (Fig. B)
I 1/4“ Female (Fig. C) NP – Female NPT Thread I 1/4“ Female (Fig. C)
1 – 3500 psig J 1/4“ Female (Fig. D) J 1/4“ Female (Fig. D)
Max. Inlet Pressure
2 – 600 psig K 1/4“ Female NPT (Fig. B) 1 – 3500 psig K 1/4“ Female NPT (Fig. B)
L 1/4“ Female NPT (Fig. C) Max. Inlet Pressure 2 – 1000 psig L 1/4“ Female NPT (Fig. C)
M 1/4“ Female NPT (Fig. D) 3 – 600 psig M 1/4“ Female NPT (Fig. D)
0 – 1 ~ 30 psig
1 – 1 ~ 60 psig B BA (10 Ra μin) B BA (10 Ra μin)
Outlet Pressure Range 2 – 1 ~ 100 psig Grade 0 – 1 ~ 30 psig Grade
E EP (5 Ra μin) 1 – 1 ~ 60 psig E EP (5 Ra μin)
3 – 1 ~ 150 psig Outlet Pressure Range
4 – 1 ~ 250 psig 2 – 1 ~ 100 psig
S STS 316L Single Melt S STS 316L Single Melt
Material 3 – 1 ~ 150 psig Material
D STS 316L Double Melt D STS 316L Double Melt

Dimensional Drawing Porting Configurations Dimensional Drawing Porting Configurations

Fig. A (No Gauge) Fig. B (1 Gauge) Fig. A (No Gauge) Fig. B (1 Gauge)

Out

Out
Out In Out In Out In Out In

Fig. C (2 Gauge) Fig. D (2 Out Gauge) Fig. C (2 Gauge) Fig. D (2 Out Gauge)
Out

Out
In

In
Ou

Ou
t

t
Out In Out In Out In Out In
Out

Out
Flow Curves Flow Curves
MODEL NO. : AR – 100 – 04FV23B – E – S MODEL NO. : AR – 200 – 08FV23B – E – S
80
100
OUTLET PRESSURE - PSIG

OUTLET PRESSURE - PSIG

INLET : 100 PSIG
80 60

60
40
40

Dimension (mm) Dimension (mm) 20

20
INLET : 120 PSIG
Size 1/4" Size 1/2"
0 0
Connection MV FV LOK BW NP Connection MV FV LOK BW NP
0 20 40 60 80 100 0 100 200 300 400 500
“A”(±0.5) 94 94 95 76 50 “A”(±0.5) 142 142 116.4 94 60
FLOW RATE – SLPM (N2) FLOW RATE – SLPM (N2)

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