Optics and Lasers in Engineering 170 (2023) 107774

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Optics and Lasers in Engineering

journal homepage: www.elsevier.com/locate/optlaseng

Novel fabrication and designs for hybrid optical elements with wider angle
field of view by using integrated direct laser lithographic system
Nguyen Nu Hoang Anh a, b, Hyug-Gyo Rhee a, b, *, Young-Sik Ghim a, b, *
a
Department of Science of Measurement, University of Science and Technology (UST), Daejeon 305-350, Republic of Korea
b
Optical imaging and Metrology Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), Daejeon 305-340, Republic of
Korea

A R T I C L E I N F O A B S T R A C T

Keywords: Hybrid optical elements, which are diffraction pattern arrays fabricated on curved refractive optical elements,
Hybrid optical elements have the ability to widen the field of view angle, and improve optical performance, by combining refraction and
Hybrid optics diffraction. As such, they have high potential in next-generation optical devices. However, manufacturing a high
Diffractive optical elements
resolution diffraction pattern array that fully covers the curve of the refracted optical surface, so that the normal
Direct laser lithography
vectors of every pattern are perpendicular to the tangent plane of the refractive lens surface, is challenging.
Furthermore, the lack of diffractive pattern designs corresponding to the curvature makes it difficult to replace
curved microlens arrays with hybrid optics. In this study, a direct laser lithographic system combined with an
auto-focus system and high accuracy rotational system was built to fabricate the diffractive patterns array on a
cylindrical lens. This approach provides a method to manufacture hybrid optical elements with wider field of
view. In addition, we proposed novel designs of a linear zone plate (LZP) and elliptical zone plate (EZP) on a
cylindrical lens that can be used for focusing light beam into lines and points, respectively. These hybrid optics
exhibit superior performance in both diffraction efficiency and resolution, 25% better than traditional diffractive
optical elements. An array of two types of zone plates were fabricated fully along the curve of the cylindrical lens
using the proposed system, giving a 20◦ angle field of view, which acts like a curved cylindrical lens array and 1D
curved microlens array. The performance of these hybrid optical elements were evaluated by optical verification
system and simulation.

1. Introduction
In conventional refractive optical image systems, such as wide-angle
cameras and telescopes [1,2], a series of lenses is combined, aligned and
various aberrations corrected to ensure optimal performance in
capturing wide-angle images. This leads to a bulky, complicated and
costly optical system. To meet the compact requirements of industry,
hybrid optics which can achieve complex functions simultaneously are
desirable. This can be accomplished by combining refractive and dif­
fractive optical devices [3,4]. Due to recent advancements in
micro-manufacturing, spherical artificial compound eyes [5] have been
used as compact optical imaging systems. The metal molds used to form
the microlens array of that device, [6] require high accuracy production,
which involves high cost, prolonged process time and specialized ma­
chine tools. If the diffraction optical elements [7–9] could be integrated
into traditional refractive optics, it would be straightforward to produce
a micro refractive lens array that combines the benefits of refractive and
diffractive optics, and achieve superior performance [10].
While fine patterning on non-planar surfaces [11,12] has been
investigated for many years, it remains difficult to fabricate a high res­
olution diffractive pattern array along the curve of a refractive optical
specimen, to widen the viewing angle of the hybrid elements. Lee et al.
[13] reported a Fresnel zone plate array that was transferred to a flexible
and stretchable polydimethylsiloxane substrate and attached on top of a
cylindrical lens. However, the purpose of the design in that research was
not to extend the viewing angle for hybrid optics. Furthermore, because
of two transference steps, the coordinates of each zone plate on the
cylindrical lens surface could not be precisely determined, which affects
the alignment if it was placed in an optical system. Besides, when
attached to the top surface, the elastic nature of the thin film would
allow the patterns to be easily deformed, resulting in aberrations.
To overcome these disadvantages, direct laser lithography [14–18]

* Corresponding authors at: Department of Science of Measurement, University of Science and Technology (UST), Daejeon 305-350, Republic of Korea.
E-mail addresses: hrhee@kriss.re.kr (H.-G. Rhee), young.ghim@kriss.re.kr (Y.-S. Ghim).

https://doi.org/10.1016/j.optlaseng.2023.107774
Received 23 March 2023; Received in revised form 24 July 2023; Accepted 30 July 2023
Available online 17 August 2023
0143-8166/© 2023 The Author(s). Published by Elsevier Ltd. This is an open access article under the CC BY-NC license (http://creativecommons.org/licenses/by-
nc/4.0/).
N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 1. System configuration for fabricating the diffractive-refractive optical elements.

Fig. 2. Scheme of illumination for the (a) curved linear zone plate and (b) curved elliptical zone plate; (c) side view of the proposed designs.

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 3. Order of steps in the fabrication process: (1) patterning the first zone; (2) Rotate specimen at an angle θ by using hexapod; (3) Move specimen to a distance Δd
using the linear stage; (4) The sensor detects the focal length at the same position as the moving position of the lens.

which uses a high magnification objective lens to directly write a laser
beam on a specimen, is a great solution. It is a maskless and flexible
patterning method with considerable potential for non-planar surface
manufacturing. There are two important factors when using a direct
laser writing system to create next generation hybrid optics with a wider
field of view. First, it is desirable to maintain the focus distance from the
object objective lens to the surface of the sample. Second, each fabri­
cated individual pattern must point in a different direction, and those
directions must all be perpendicular to the tangent plane of the surface
to widen the angle of the field of view. Jun Ai et al. [19] reported a laser
direct-writing lithography system that could fabricate a circular grating
on curved surfaces. However, this system was only capable of patterning
on the top center area of the lens without the ability to rotate the
specimen in specified different directions. So far, a direct laser litho­
graphic system that meets the above criteria has not been introduced.
Nowadays, using micro-refractive lens arrays has become increas­
ingly common due to recent advances in micro-manufacturing. These
arrays are being utilized to enhance imaging ability using artificial
compound eyes [20], Shack-Hartmann wavefront sensors [21], or
bio-medical imaging [22]. In some situations, such as displays or arti­
ficial biomimetic compound eyes with a hemispherical field of view, a
microlens array which is only curved in 1 dimension [23–25] is
required.
As mentioned above, manufacturing microlens arrays on different
shaped surfaces, such as a cylindrical lens, involves high cost and
specialized machine tools. The solution is to develop a new design of
hybrid optics that can replace microlens arrays to focus a beam on cy­
lindrical lenses, and enhance the viewing angle. Lee et al. [13] reported
fabricating a Fresnel zone plate array on a cylindrical lens. Since light
propagates along the horizontal and vertical axes of cylindrical lenses

Fig. 4. Measurement results of a 1 × 3 curved LZP array obtained with a commercial white-light scanning interferometer.

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N.N.H. Anh et al.
Fig. 5. (a) Photographic view of 1 × 15 array and (b) measurement of three different areas of specimen of LZP on a cylindrical lens.
differently, the diffractive pattern design in that research is unable to
focus light into a single point as the microlens function. Instead, it is
necessary to investigate a new design of diffractive pattern-refractive
cylindrical lens which acts like a 1D curved microlens array.
As a typical noncircular microlens array, the cylindrical microlens
array is very important in several applications, for example in the Shack-
Hartmann sensor to increase dynamic range [26], organic light-emitting
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Optics and Lasers in Engineering 170 (2023) 107774
displays [27], a three-dimension light field display [28] and photocon­
ductive antennas [29]. Moreover, some applications have required that
the cylindrical microlens array be fabricated on the curved surface, such
as creating moiré on a curved surface [30]. Fabricating a cylindrical
microlens array on curved surfaces has remained a big challenge to date.
In this study, a direct laser lithographic system combined with an
auto-focus system to maintain the laser focus, and a high accuracy
N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 6. Measurement results of a 3 × 5 curved EZP array obtained with a commercial white-light scanning interferometer.

rotational system for rotating the specimen at specific angles, was built detecting the wavelengths of the reflected light to determine specimen
to fabricate hybrid optical elements with a wider angle field of view. displacement.
This system is capable of manufacturing diffractive-refractive optical
elements with high precision and a flexible pattern that is difficult to 3. Design of hybrid optical element for line and point focus
implement by other fabrication techniques without mask. We also pro­
pose novel designs of a linear zone plate (LZP) and elliptical zone plate Unlike a planar diffractive optical element, a cylindrical lens is
(EZP) on a cylindrical lens, that can be used for focusing a light beam curved in the x-axis, hence it is necessary to design a diffractive optical
into lines and points, respectively. A 1 × 15 curved LZP array and a 3 × pattern that is compatible with the curvature of the lens in order to
15 curved EZP array were fully fabricated along the curve of the cylin­ produce the hybrid optical element with optimum effect.
drical lens using the proposed system, giving a 20◦ angle field of view, as First, for the purpose of line focus, the diffractive pattern is created
an alternative to a curved cylindrical lens array and 1D curved microlens with alternating transparent and opaque straight zones, as shown in
array. The performance of these new designs was also compared with Fig. 2(a). The linear zones are designed such that the optical path dif­
the planar zone plate by experiment and simulation. ference for the light diverted from neighboring zones towards the same
focal line is varied by integral multiples of wavelength, which is
2. Experimental setup expressed as Eq. (1):
√̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
( √̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
√̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅ )2 ( √̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅ )2
A direct laser lithographic system combined with an auto-focus 2
an +
flens .F
+R− 2
R − an 2 −
flens .F
+R− R2 − a2n
system and high accuracy rotational system was built to fabricate the flens − F flens − F
hybrid optical elements, as presented in Fig. 1. A laser source with a nλ
=
wavelength of 488 nm, which was allowed to go through the objective 2
lens by shutter controller, was exposed to the surface of a cylindrical (1)
lens. This specimen was kept on the H-811.I2 6-Axis miniature hexapod As illustrated in Fig. 2(c), an is the radius of the n th zone in the
stage placed on an XY linear stage with a distance movement of 200 mm x-axis. This linear zone plate is patterned on the surface of a cylindrical
in both axes. The hexapod stage, which has a rotational range in θX and lens with the focus length of flens and the curvature radius of R. A light
θY of 20◦ , was used to rotate the chromium-coated glass specimen to beam with a wavelength of λ passes through this specimen before
different positions with high accuracy, and was easily controlled by focusing at a distance of F. After solving Eq. (1), we have a final
inputting parameters on the computer. To fabricate hybrid optical ele­ expression for the x-axis radius of the curved linear zone plate design:
ments with a wide field of view, the combination of rotation and linear √̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
stage systems enables us to rotate the specimen at an accurate angle and √ [ √̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
( ) ]̅
√ flens .F f .F nλ
move it to a position so that the laser beam was illuminated perpen­
√ (2)
lens
an = nλ +R− R2 − nλ +R −
flens − F flens − F 4
dicular to the surface of the lens at the exposure point.
It is particularly difficult to produce a pattern of diffraction elements Second, the hybrid optical element used for point focus, we suggest a
at a level of several micrometers at a certain quality, using a direct design where the light deflected along the horizontal and vertical axes of
exposure laser system on a curved surface. An automatic focusing system a cylindrical lens are focused at the same position, as illustrated in Fig. 2
used in this system measures the shape change of a curved surface in real (b). The radius of the n th zone along the curvature of the cylindrical lens
time using a coaxial confocal microscope displacement sensor, moving is an which is the same as the linear zone plate Eq. (2) above. Along the
the position of the exposure lens in real time and keeping the focal longitudinal y-axis of the cylindrical lens, a sequence of zones consid­
length constant. The coaxial confocal displacement sensor works on the ered with the diffraction properties similar to the planar Fresnel zone
idea of dispersing white light into a variety of color lights, and then

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 7. (a) Photographic view of 3 × 15 array and (b) measurement of three different areas of specimen of EZP on a cylindrical lens.

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

x2 y2
+ =1 (4)
a2n b2n

In the equation above, the proposed pattern structure consists of

alternating transparent and opaque elliptical zone shapes with x and y as
the coordinate of every point on the border of each zone.

4. Fabrication process

Direct laser lithography utilizing a thermal chemical technique was

Fig. 8. Diagram of the focusing property evaluation of the arrays.
plate is focused a light beam at the distance of F which is equal to
compound focal length in x-axis. Thus, the radius bn of the n th zone in
this y-axis is defined as
√̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅̅
n2 λ2
bn = nλF + . (3)
4 is that each zone plate must be patterned perpendicular to a tangent
By combining the diffraction properties of the two axes, the zone
plate pattern on the cylindrical lens which is proposed as a hybrid op­
tical element, with a compound focal length of F used for the point focus,
is suggested, as
utilized to fabricate a diffractive pattern in this study. The lithographic
source was precisely concentrated onto a chromium layer present in the
specimen to form pattern, leading to the formation of chromium oxide
on its surface. Subsequently, the prepared specimen was immersed in an
etchant, resulting in the retention of the chromium oxide on the glass
substrate, while the exposed chromium regions were selectively
removed. This process ultimately yielded a finalized diffractive optical
element with the desired pattern.
To design a zone plate array on a curved surface, an important factor
surface of the curved lens at each contact point with the zone. This
enables high focal performance in different directions. This requires the
use of a high precision rotational system, such as the hexapod stage.
Fig. 3 depicts the movement steps of the specimen, to fabricate the zone
plate array pattern on the curved surface. After the specimen was
positioned at the center of the hexapod stage, a first zone plate was

Fig. 9. Diffraction images of an individual curved LZP in 1 × 15 array at propagation distances of 28 mm, 31.5 mm, and 35 mm.

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 10. (a) Diffraction images of an individual curved EZP in 3 × 15 array at propagation distances of 38.85 mm, 42.85 mm, 46.85 mm and (b) the x and y-axis
intensity distribution at the compound focal length of the EZP from experiment and simulation.

formed by moving the linear stage in a suitable motion. To fabricate
another zone plate next to it, the second step is to rotate the refractive
lens to an angle θ using the hexapod stage. In that position, the specimen
surface is not immediately perpendicular to the laser illumination
direction, so the third step moves the sample by a Δd defined by Eq. (5).
Δd = (R − h)sinθ (5)
where R is the radius curvature of the plano-convex cylindrical lens and

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 11. (a) 3D images of the planar LZP and planar ZP. Diagram of the focus property evaluation from experiment and simulation of (b) the planar LZP and curved
LZP; and (c) the planar ZP and curved EZP.

h is the height from the top hexapod to the surface of the specimen. maintain the focus length between the objective lens and the current top
With this movement, the lithography source forming the objective surface of the cylindrical specimen. And finally, an adjacent zone plate is
lens is perpendicular to the tangent surface of the specimen at the also created using the same stage motion as the first zone.
exposure point. The fourth step is to use the autofocus system to By repeating these steps to pattern the remaining zone plates and

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N.N.H. Anh et al. Optics and Lasers in Engineering 170 (2023) 107774

Fig. 12. Diagram of the evaluation of wider angle field of view.

Fig. 13. Diffraction image at five angle of − 10◦ , − 5◦ , 0◦ , 5◦ , 10◦ of (a) curved LZP array and (b) curved EZP array.

then immersing this specimen (a chromium-coated cylindrical lens with nm was used to illuminate the specimen. A charge-couple device (CCD)
flens = 150 mm and R= 77.5 mm) in etchant, we successfully fabricated a camera was put behind the specimen to record the diffractive image.
1 × 3 (with F= 1.48 mm) and 1 × 15 (with F= 31.5 mm) array of curved To evaluate the ability to focus, the beam propagation of these
linear zone plate, shown in Figs. 4 and 5, a 3 × 5 (with F=1.48 mm) and hybrid elements was thoroughly examined at three different distances
3 × 15 (with F= 42.85 mm) array of curved elliptical zone plate illus­ obtained from the experiment, which were then compared with the
trated in Figs. 6 and 7. As shown in these figures, after removing the simulation results. MATLAB was used to simulate the diffractive images.
cylindrical shape, every zone pattern lay on a straight line in the x-axis, The transmitted function U1 of a parallel beam from (ξ, η) plane to the
and the heights of these zones in the center area or close to the edge of lens at the point (x, y, z1 ), is expressed as:
the specimen were not much different. This demonstrates that every
∫ ∫+∞
zone pattern was fabricated perpendicular to the tangent surface of the ejkz1 jk
(6)
(x− ξ)2 +(y− η)2 ]
U1 (x, y) = δ(ξ, η)⋅e2z1 [ dξdη
plano-convex cylindrical lens. jλz1
− ∞

5. Optical performance evaluation where δ is the Dirac-delta function. After the light beam is refracted by
the cylindrical lens with the refracted function P, the field is defined as:
An optical setup shown in Fig. 8 was used to evaluate the perfor­
mance of the proposed hybrid refractive-diffractive optical elements. (7)
− jk
U2 (x, y) = U1 (x, y) ⋅ P(x, y) ⋅ e 2f (y )
2

The hybrid optical specimen was placed at the center area of a rotational
stage. At the edge of this stage, a He-Ne laser with a wavelength of 632.8 The refracted light beam is diffracted by the pattern on the lens

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N.N.H. Anh et al.
before propagating to the point (u, v, z2 ), the field can be deduced as:
∫ ∫+∞
ejkz2 jk
(u− x)2 +(v− y)2 ]
U3 (u, v) = U2 (x, y)⋅ M(x, y)⋅e2z2 [
jλz2
− ∞
Figs. 9 and 10 show the diffraction images and the intensity profiles
from the experiment and simulation of a beam transformed by an indi­
vidual curved linear zone plate in 1 × 15 array at propagation distances
z of 28 mm, 31.5 mm (compound focal length) and 35 mm; and by a
curved elliptical zone plate in 3 × 15 array at 38.85 mm, 42.85 mm
(compound focal length) and 46.85 mm, respectively. In Fig. 10, the
intensity profile in the x and y axis of the focus point (z = F = 42.85
mm) by EZP are almost the same in both the experiment and simulation
results, which shows the point focus ability of the novel curved EZP
design. In addition, the intensity distributions at different distances
derived from simulation and experiment were in excellent agreement,
indicating that individual focal shapes were successfully formed with
these proposed models of hybrid optical elements.
Furthermore, to assess the advantages of these new hybrid elements
compared to the planar linear zone plate and planar circular zone plate
with the same parameters (number of zones, focal length, wavelength of
light beam), the experiment and simulation intensity results for the
diffractive beams were compared to each other, as shown in Fig. 11. In
this work, the diffraction efficiency is defined as the ratio of the intensity
of the diffracted light at the focal point to the intensity of the incident
light onto the zone plate [31–33]. The results demonstrate the superior
focusing ability of two kinds of diffractive-refractive elements, which
exhibited an increase in diffraction efficiency of nearly 25% and a
reduction in FWHM of approximately 25% for both types.
Another intriguing aspect of our design is its capacity to achieve a
wider angle field of view. The laser source and the CCD camera were
rotated along the angle between each zone to test the focus image of
every zone plate at different angles, as depicted in Fig. 12. Three focused
pictures recorded from three distinct angles in one scan of rotation stage
(− 10◦ , − 5◦ , 0◦ , 5◦ , and 10◦ ) were chosen to represent the entire 20◦
viewing angle, as shown in Fig. 13. While capturing all three diffractive
images, the same camera index exposure was set, and the images dis­
played comparable clarity without perceptible blur or distortion. The
results demonstrate that our hybrid specimen is capable of achieving a
wide-angle field of view.
6. Conclusions
In this study, diffractive-refractive optical elements with broader
viewing angle were successfully fabricated using a novel direct laser
lithographic system combined with an auto-focus system and high ac­
curacy rotational system. This integrated system made it possible to
maintain the focal distance of the objective lens on the specimen surface
while the specimen was moving. Moreover, it was able to rotate the
refractive lens at a specified angle, and move it to a position perpen­
dicular to the laser projection direction, which played a key role in
manufacturing the wide angle field specimen. The designs of a linear
zone plate and an elliptical zone plate pattern were proposed and
fabricated on a cylindrical lens using a line and point focus. The results
show the advantages of these hybrid designs in terms of diffraction ef­
ficiency and resolution, compared to planar zone plates. Efficiency was
increased by 25% for the cylindrical linear zone plate and the cylindrical
elliptical zone plate, and resolution increased by 25% in both hybrid
optical elements. Moreover, the ability to enhance the angle field of view
to 20◦ was also demonstrated by the zone plate array patterned on the
cylindrical lens.
CRediT authorship contribution statement
Nguyen Nu Hoang Anh: Conceptualization, Methodology, Re­
sources, Data curation, Formal analysis, Writing – original draft, Writing
Optics and Lasers in Engineering 170 (2023) 107774
– review & editing. Hyug-Gyo Rhee: Conceptualization, Methodology,
Resources, Data curation, Formal analysis, Writing – review & editing.
Young-Sik Ghim: Conceptualization, Methodology, Resources, Data
(8)
dxdy
curation, Formal analysis, Writing – review & editing.
Declaration of Competing Interest
The authors declare that they have no known competing financial
interests or personal relationships that could have appeared to influence
the work reported in this paper.
Data availability
No data was used for the research described in the article.
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