Low Vacuum

Pump

Oil Rotary Vacuum Pump [VD Series]

VD series is a direct-drive low noise oil rotary vacuum pump. This pump is suitable for a wide range of applications such as
evaporator, sputtering and food packaging.

VD901

Feat ures A p p lic a tio n s

Low Vacuum Pump

Optimized Design Operation for Quiet Evaporation, sputtering, and ion plating

Easy Maintenance Analytical instrument and leak test system

Pump head can be removed without disconnecting the vacuum piping
(except VD151, VD201). ＊ See attached figure. Gas exchange, gas filling, and vacuum insulation
Oil level gauge and drain valve accessible for easy oil exchange and
daily inspection. Vacuum drying, freeze drying, vacuum degassing, vacuum packing,
vacuum chuck and vacuum molding, etc.
Forced Oil Circulation System Ensures Stable Pumping Speed Below
Atmospheric Pressure
When equipped with the optional oil mist trap and oil return
mechanism, the VD301, VD401 and VD601 can continuously run at all
pressure ranges below atmospheric pressure.
Oil Rotary Vacuum Pump [VD Series]

Dimensions

V D 151

Inlet (JIS B 8365 KF25 equivalency) Unit: mm

Oil cap G3/4

Outlet G1
Gas ballast valve

（option）
Oil mist trap
Totally-enclosed fan-cooled
Flange inducton motor
3phase 0.55kW 4P Oil level gauge

Oil mist trap TMX-1

Oil drain plug M12 37 33
53 64 90 84
(395)

222
Ｇ.Ｌ.
104 260 100 9 43 42 Filter cap

47
18
Rubber legs 20 513 20 20 130 20
170

V D 201

Inlet (JIS B 8365 KF25 equivalency) Oil cap G3/4 Unit: mm

Outlet G1

Gas ballast valve

Oil mist trap (option) Oil level gauge

Totally-enclosed fan-cooled
Flange inducton motor
3phase 0.75kW 4P
Oil mist trap TMX-1

19 34 90 75 40 44 32
(439)

242
52

G.L.
120 260 116 34 Oil drain valve G3/8
23

Rubber legs 20 536 20 20 130 20

170

V D 301, 401

Gas ballast port G3/8 Oil cap G1 (PF1) Unit: mm

(215)
236

Outlet flange 4-M8 tap,

131

Central diameter Ø85 Oil mist trap (option)

200 40
JIS B 2290 VG40 equivalency
Inlet flange 4-M8 tap,
Central diameter Ø85
Drip-proof protected JIS B 2290 VG40 equivalency
Oil mist trap TM401

Flange induction motor

Oil mist trap TM201

3phase 1.5kW 4P 232 363 [383]

210 [230] 47 33
(629)
135

(559)
(324)
Ø166

281
31140

Oil level gauge

128 365 63
4-Ø10 Oil drain valve G1/2
395 150
Note :[ ]VD401 dimension 603 [623] 210
 V D 601

Gas ballast port G3/8 Oil cap G1 Unit: mm

Outlet flange 4-M8 tap,

Central diameter Ø85
298

JIS B 2290 VG40 equivalency Oil mist trap (option)

158

180 45 Inlet flange 4-M8 tap, Central diameter Ø100

JIS B 2290 VG50 equivalency
Drip-proof protected
Flange induction motor

Oil mist trap TM401

3phase 2.2kW 4P 281 435
255 56 36

(676)
(371)
Ø166

328
164
Oil level gauge G.L.

41
92 360 4-Ø11 87
390 230 Oil drain valve G1/2
(724) 280

V D 901

Gas ballast port G3/8 Oil cap G1 Unit: mm

Outlet flange
4-M8 tap, Central diameter Ø85 Oil mist trap (option)
291

JIS B 2290 VG40 equivalency

151

270 45 Inlet flange 4-M8 tap, Central diameter Ø100

JIS B 2290 VG50 equivalency
Totally-enclosed Fan-cooled
Oil mist trap TM401

Flange induction 326 486

Motor 3phase 306 56 36
(676)

3.7kW 4P
Oil level gauge
(371)
328
Ø214

164

G.L.
41

182 87
540 8-Ø11 200 Oil drain valve G1/2
570 230
(820) 280

When a pump is removed (VD301〜VD901)

Piping

Motor

Pump
Oil Rotary Vacuum Pump [VD Series]

S p e c ific a tio n s

Model VD151 VD201 VD301 VD401 VD601 VD901

Designed 50Hz m3/h 14.4 20.2 30 40 60 90

pumping speed L/min 240 336 500 670 1000 1500
CFM 8.47 11.89 17.66 23.54 35.31 52.97
60Hz m3/h 17.3 24.2 36 48 72 108
L/min 288 403 600 800 1200 1800
CFM 10.18 14.24 21.29 28.25 42.38 63.57
Ultimate GP close Pa 0.67
pressure ＊1 Torr 5×10-3
mbar 6.7×10-3
GP open Pa 6.7 2
Torr 5×10-2 1.5×10-2
mbar 6.7×10-2 2.0×10-2
Motor 2 ＊ Type Totally Enclosed Fan Cooled Motor Drip-proof protected Flange Motor Totally Enclosed Fan Cooled Motor
kw (number of poles) 0.55 (4) 0.75 (4) 1.5 (4) 2.2 (4) 3.7 (4)
HP (number of poles) 0.75 (4) 1 (2) 2 (4) 2.95 (4) 4.96 (4)
Voltage/Freqency ＊3 200V / 220V / 230V / 240V / 380V / 400V / 415V-50Hz 220V-240V/380V-415V
200V / 50Hz, (50Hz)
60Hz
200V / 220V / 230V / 240V / 380V / 400V / 440V / 460V-60Hz 208V-240V/380V-460V
220V / 60Hz(60Hz)
Oil ＊4 ULVOIL R-7
Oil capacity 0.7 to 1.1 L 1.0 to 2.5 L 2.5 to 4.0 L
Cooling method Air cooled
Inlet KF25
JIS B 8365 (NW25)
KF25 equivalency KF40 JIS
(NW40)
B 2290or VG40(JIS
VG40 B2290)
equivalency KF50(NW50) or VG50
JIS B 2290 VG50 (JIS B2290)
equivalency
Outlet G1 KF40
JIS B(NW40) or VG40(JIS
2290 VG40 equivalency B2290)
Weight 29 kg 34 kg 59 kg 61 kg 88 kg 105 kg
External dimensions W×L×H 170×514×240mm 170×536×265mm 236×603×324mm 236×623×324mm 298×725×371mm 294×820×371mm
Certification CE cTUVus (equivalent ofCE UL listed and CSA), CE
(Option)
Standard accessories Motor, Oil for 1 pump, Operation manual
Options ＊5 Oil mist trap Oil mist trap, Gas ballast valve, Oil return mechanism, Helium tight, CE
＊
1 Measured with a Pirani gauge. (Approx. 6.7×10 Pa when measured with a McLeod vacuum gauge.)
-2

＊
2 Options: The pump is also compatible with a totally-enclosed fan-cooled motor, increased safety explosion-resistant motor, and pressure resistant explosion-resistant flange motor.
＊
3 Other voltage is available upon request.
＊
4 Other oil types are available upon request.
＊
5 TM401 and TM-2 are available oil mist trap for VD601 and VD901. Please use TM-2 if repeated intake pressure exceeds 10,000Pa.

Pu m p in g S p e e d C u r v e s

VD151, 201 VD301, 401 VD601, 901

25
Gas Ballast Closed VD201 60Hz VD201 50Hz Gas Ballast Closed Gas Ballast Closed
Gas Ballast Opened 40 VD401 60Hz 100 VD901 60Hz
Gas Ballast Opened Gas Ballast Opened
20
VD401 50Hz VD901 50Hz
80
Pumping Speed [m3/h]

Pumping Speed [m3/h]

VD301 60Hz
Pumping Speed [m3/h]

30 VD601 60Hz
15
VD301 50Hz 60 VD601 50Hz
20
10
VD151 60Hz VD151 50Hz 40

Pumping Speed (JIS B8316/1985) 10 Pumping Speed (JIS B8316/1985) Pumping Speed (JIS B8316/1985)
5 Type：VD151,VD201 Type：VD301,VD401 20 Type：VD601,VD901
Power：3φ 0.55kw, 0.75kw 50/60Hz Power：3φ 1.5kw 50/60Hz Power：3φ 2.2kw, 3.7kw 50/60Hz
Oil：ULVOIL R-7 Oil：ULVOIL R-7 Oil：ULVOIL R-7
0 0 0
10 –1 1 10 10 2 10 3 10 4 10 5 10 –1 1 10 10 2 10 3 10 4 10 5 10 –1 1 10 10 2 10 3 10 4 10 5
Pa Pa Pa
10 –3 10 –2 10 –1 1 10 10 2 760 10 –3 10 –2 10 –1 1 10 10 2 760 10 –3 10 –2 10 –1 1 10 10 2 760
Torr Torr Torr
(Note : 1mbar=100Pa) (Note : 1mbar=100Pa) (Note : 1mbar=100Pa)
Pressure Pressure Pressure

ULVAC, Inc. Components Division www.ulvac.co.jp/eng

w w w. u l va c. c o. j p
Overseas Sales in Japan TEL +81-467-89-2261
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This catalog is subject to change without notice.
This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1171E/2012062000UYO