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Introduction To The Technology of Microwave Integrated Circuits
Introduction To The Technology of Microwave Integrated Circuits
MODULE I
Advantages of MICs
SUBSTRATES
Criteria for the choice of substrate material
Thin film Hybrid Circuits Most commonly used technique for the production of MICs is the thin film hybrid technology. Technology get its name from the method producing conductors, resistances and capacitance rather than from the thickness of the substrate. Conductors are produced either by vapour deposition or sputtering, both of which are performed in vacuum and provide layers wih a thickness of less than 1um. For use in microwaves the conductors are galvanically thickened to between 5um and 10 um to reduce the losses Resistance and capacitance as well as conductors can be produced as integrated components For thin film circuits with capacitors,the surface must be locally glazed or we must use saphire. If the MIC is to have magnetic components,such as circulators then ferrite or garnet must be used as substrates Plastic substrates cannot be used for thin-film technology because they cannot withstand the high temperatures and their outgassing makes a high vacuum very difficult to attain.