1

KLASIFIKASI TEKNOLOGI
MIKROELEKTRONIKA
 DEFINE THIN FILMS

Athin filmis alayerof material ranging from

fractions of ananometer(monolayer) to
severalmicrometersin thickness.

Thin film technology is a "self organizing" structural

evolution.

Ex: In ancient times, people already knew how to

beat gold into a thin film (< 1 m thickness) with
hammers and knew how use this "gold leaf" for
coating all kinds of stuff.
 PURPOSE OF THIN FILM
DEVELOPMENT

oTo maintain surface uniformity.

oTo reduce the amount (or mass) of light

absorbing material.

oSpray Coating Technology for Superior

Functional Medical Coatings.

oTo decrease the weight and bulkiness of the

materials.
PROSES FILM TEBAL VS FILM
TIPIS
TECHNOLOGY FOCUS
 THIN FILM TECHNOLOGY

Thin film technology involves deposition of

individual molecules or atoms.

Uniform ultra-thin film coatings onto stents,

catheters, balloons, endoscopic instruments,
pacemakers, heart valves, glucose monitors,
sensors, medical textiles, blood collection tubes,
surgical implants, orthopedic implants, and
diagnostic devices.

Example for industrial thin films produced are:

1. 1.Amorphous Silicon (a-Si)
2. 2.Cadmium Telluride (CdTe)
 PROPERTIES TO BE
CONSIDERED
8

FILM THICKNESS : The physical properties of a thin

film are highly dependent on their thickness. Thickness
measurement methods are applied during deposition
("in situ") and methods by which the thickness can be
determined after finishing a coating run ("ex situ").
a) Gravimetric Method b) Optical Method
ROUGHNESS : In Ultrathin Films, it can influence all
film properties such as mechanical, electrical,
magnetical or optical properties. roughness types, the
mechanisms of their origin, roughness measurement
and roughness quantification needs to be taken into
consideration.
 CHEMICAL PROPERTIES

Conventional methods of chemical analysis as

atomic emission, atomic absorption spectral
analysis, X-ray fluorescence and mass spectrometry
play an important role for the production of the
coating materials.

Interaction of photons, electrons, ions or other

particles with the coating or surface has to be
analyzed.
SPECIAL PROPERTIES OF
THIN FILMS
APPLICATIONS
 USE OF THIN FILM
DEPOSITION

Thin Film Growth or Deposition:

It is a thin layer of coating on a substrate or
template. It serves one or multiple physical
purposes including protection, decoration,
conducting, reflection, data storage,
insulation, etc.
Examples: Colorful coatings on cars, golden
watches and many others.
 USE OF THIN FILM
DEPOSITION

Corrosion resistive coatings and superhard

coatings (petroleum industry, chemical
factories, etc.)

Semiconductor industry (Pentium

processors, microchips, memories, iPod,
etc.)