Professional Documents
Culture Documents
Reading Material
Primary Text :
Semiconductor Device Fundamentals : R. F. Pierret
(Addison Wesley, 1996)
Semiconductor Integrated Circuit Processing
Technology : Runyan, Bean (Addison Wesley,
1996)
References Text:
Solid State Electronic Devices 4th Edition: B. G.
Stretman, S. Banerjee (Prentice Hall, 2000)
Device Electronics for Integrated Circuits 3rd
Edition: R. Muller, T. Kamins (Wiley & Sons, 2003)
2
Electronic Device Team
1. Course : Electronics Device
2. Courses Objective :
3. Grading (%) :
3
Pre Test
1. What do you know about insulator,
conductor, semiconductor?
2. What is the different between unipolar
device and bipolar device?
3. What do you know about MOSFET?
10 Minutes Only
4
Course Organization
5
Overview of IC Devices and
Semiconductor Fundamentals
6
Applications of Semiconductor
Devices
MOSFET
gate
source drain
Semiconductor
Devices
n+ n+
p - Si
7
Evolution of Bipolar Junction Transistors
8
Today and Tomorrow
9
State-of-the-art Transistor Size
10
Advantages of Technology Scaling
More dies per wafer, lower cost
Higher-speed devices and circuits
11
Roadmap of Transistor
12
13
14
Moore Law (Gordon Moore 1965)
15
Bulk Si Wafer to IC Chip
16
CZ (Czochralski) Crystal Growth
17
18
History
19
Conductivity in Solid
Resistivity [ cm]
1018 108 10-3 10-8
Glass Ag
Pure
Si
Diamond
Cu
GaAs
Quartz Al
10-18 10-8 103 108
Conductivity [ cm] -1
Insulators Semiconductors Conductors
20
Semiconductors
Elemental Semiconductor
Si, Ge
Compound Semiconductor
GaAs - Gallium arsenide
GaP - Gallium phosphide
AlAs - Aluminum arsenide
AlP - Aluminum phosphide
InP - Indium Phosphide
ZnO Zinc Oxide
CdSe Cadmium selenide
Etc.
Alloys
Si1-xGex, AlxGa1-xAs
21
22
Important Unit Cells
23
Crystallographic Planes and Si
Wafers
24
Miller Indices
Crystallographic Notation
h: inverse x-intercept
k: inverse y-intercept
l: inverse z-intercept
(Intercept values are in multiples of the lattice constant;
h, k and l are reduced to 3 integers having the same
ratio.)
25
Crystallographic Planes
26
Si (100)
27
Si (111)
28
Si (100) and Si (110)
29
Si (100) and Si (110)
30
Silicon Atom
1s, 2s, 2p orbitals filled by 10
4 nearest neighbors
electrons
unit cell length = 5.43
3s, 3p orbitals filled by 4 5 1022 atoms/cm3
electrons
The Si Atom The Si Crystal
31
Bohr Model
32
33
Conduction Band and Valence Band
Electron
Potential
Energy
34
The Simplified Energy Band
Diagram
35
Semiconductors, Insulators, and
Conductors
36
Density of States
37
Density of States at Conduction Band:
The Greek Theater Analogy
38
Concept of a hole
An unoccupied electronic state in
the valence band is called a hole
Treat as positively charge mobile particle in the semiconductors
39
Bond Model of Electrons and Holes
40
Electrons and Holes
41