Introduction

An electron or ion gun is a scientific instrument that generates

either electrons or ions, and forms them into a usable beam.

The energy of the electrons produced :

low-energy models (5 eV - 1000 eV)

high-energy models (1keV-100 keV)

Different kinds of ions can be produced depending on the gun:

positive ions of most gases

reactive ions
alkali metal ions.

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 Ion Gun

The key features of the EX05

ion gun are:

Noble gas ions

Differentially pumped
Twin filament source
Two lenses
Floating drift tube
Scannable

This gun provides a high flux,

small spot beam of noble gas
ions at energies 100eV to5 keV

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 Construction
Filament: The
source is fitted with two tungsten filaments,
one on either side of a cylindrical grid that
forms the ionization region.
Ionization region:.
The filament is heated by passing a current
through it. The hot filament emits electrons
which are attracted to the grid by the ~ 70 V
potential applied to it and ionize the gas atoms.
Extractor :
Negative electrode that accelerates the positive
ions out of the ionization region and into the
remainder of the ion optical column.
Optical Lens:
Two-lens (condenser and focus). Diameter of
the beam is changed by the condenser lens. The
beam further focused down to the sample by
the objective lens.
Scan plates:
Two pairs of parallel electrostatic plates which
can scan or shift the beam in the x and y
directions.

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 Ion gun

Differentially pump:
A vacuum pump is used for pumping the gas from the ion gun(2*10-2 mbar).This
allows lower pressure in the main chamber and different pressure in the ion gun.

Gas is introduced to the ion gun by the leak valve which is attached by
stainless steel tubing to a tank of Helium.

Additionally there is a bleed valve located near the ion gun to allow the helium
to fill almost the entire length of the line.

When the ion gun is operating , the pressure in this line is maintained 2*10-6
mbar .

Controlled parameters: Filament voltage, Emission current from the filament

by power supply, acceleration voltage, focus voltage, extraction voltage, drift and
condenser voltage.

Size of the ion beam spot~ 120m.

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 Electron Gun
a three dimensional drawing
showing a cross-section of the gun.
The cathode is heated to very high
temperatures by the supply labeled
Source, the cathode generates free
electrons, the grid provides control of
the electrons, and the anode attracts
the electrons. This three-part
structure (the triode) is the basis of
many guns . The various elements in
the gun, usually tubes or plates with
an aperture (a hole), can act as lenses
to control and focus the beam, similar
to the lenses in light optics. The grid
provides the first control of the
electron beam, usually focusing it to a
cross-over point.

is a plot of the electrons paths in the

gun due to the fields set up by
different potentials on the gun
elements; this illustrates how electron
optics is similar to light optics.

is a schematic block diagram

showing the power supplies
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 Channeltron
Channel electron multipliers (CEMs) are
detectors, which respond to charged particles,
hard and soft X-rays, and ultraviolet radiation.

A CEM has a high surface resistance. When a

potential is applied, the resistive surface forms a
continuous dynode.

A dynode has the property of emitting

secondary electrons when primary particles
impinge upon it. This process is called secondary
electron emission. http://www.sjuts.com/Introduction
_Principles.html
Through this process, a CEM is capable of
detecting a particle or photon that has entered
its funnel-shaped input aperture.

108 electrons with a duration ~8 nanoseconds.

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 Reference
[1] http://www.kimphys.com/electron_guns/catalog_PDFs/Gun_intro_prelim.pdf

[2]http://www.thermoscientific.com/content/dam/tfs/ATG/CAD/CAD%20Documents/Application%20&%20Technical%20Notes/Su

rface%20Analysis/D16098~.pdf

[3] http://www.sjuts.com/Introduction_Principles.html

[4] https://www.pfeiffer-vacuum.com/en/products/rotary-vane-pumps/two-stage/duoline/duo-5-m/?detailPdoId=1904

[5] http://jjones.mse.ufl.edu/temp/Edwards_XDS10_XDS5_Dry_scroll_Vacuum_Pump_Users_Manual.pdf

[6] http://mmrc.caltech.edu/Vacuum/Pfeiffer%20Turbo/TMH-TMU_071P.pdf

[7] https://www3.nd.edu/~nsl/Lectures/urls/Introduction_to_vacuum_gauges.pdf
[8] Oil Sealed Rotary Pumps Understanding Gas Ballast www2.avs.org/chapters/nccavs/pdf/Gas_Ballast_OilSealedPumps.pdf
[9] http://www.apc.com/products/resource/include/techspec_index.cfm?base_sku=SUA3000-
BR&xtmc=SUA3000&xtcr=2&tab=features
[10] https://www.cdw.com/shop/products/APC-Smart-UPS-3000VA-USB-Serial-120V/730244.aspx#PO

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 Thank you
for
your attention.