Nanofabrication

H. Hau Wang
Argonne National Laboratory
Materials Science Division
hau.wang@anl.gov

Symposium on Digital Fabrication

Aug 12, 2005

Argonne National Laboratory is managed by

The University of Chicago for the U.S. Department of Energy
Why going Nano? 1 nm = 10-9 m

Chemistry higher reactivity

High surface area Good for chemical and biochemical sensors
Higher sensitivity and faster response time
Good for heterogeneous catalysis
The larger the surface area, the higher the reactivity.
High level of reaction control
Material better mechanical strength
UNCD Ultra-nano-crystalline diamond (ANL/CNM)
Ultra-thin and tough coating - prolong equipment life time
Carbon-nanotubes Ultra-high mechanical strength
Physics quantum confined phenomena and designed physical properties
Quantum dots,
Near field optics, plasmonics
High density magnetic storage nanoclusters
Ideal spring nanomagnet - High magnetization and coercivity
Nanofabrication current status
Top-down Fabrication techniques
e-beam lithography
FIB focused ion beam
DPN dip pen nanolithography
Requires major facilities, control below 100 nm is a challenge, can not
obtain high aspect ratio.
Bottom-up Synthesis
The nano-scaled objects are limited to simple geometrical shape:
sphere, cube, triangle, thin film, wire, tube, etc.
No standard 3D morphological control
Handling and Alignment are difficult
Lithographically assisted self-assembly Combining top-down and bottom-up

1 x 1 m2 AFM image of 5 x 5 m2 AFM image of

self-assembled PEG- as-prepared AAO
PMMA thin film showing membrane showing
partially ordered domain boundary
structure
Nanotubes

AAO/Al2O3/V2O5 nanostructure has been prepared for

heterogeneous catalysis studies.

Pd nanotubes showed very good hydrogen sensing capability.

Before ALD After ALD Cross-Section of 200 nm Bi NT

Coated AAO
 Nanoparticles

Au, Co, Co/Pt

Nanoparticles
Magnetic
storage
(X. M. Lin et al.)
 Dynamics of Monolayer Nanocrystal Self-assembling Process in Liquid Film
To understand the dynamics of
Grazing Incidence Small Angle
highly ordered nanocrystal X-ray Scattering (GISAXS)
monolayer through evaporation of
a nanocrystal colloidal droplet.
(J. Phys. Chem. B 2001, 105,
3353)

Kinetic effects can play an important role in nanocrystal self-assembly.

Fast initial evaporation rate can induce nanocrystals accumulate at the
liquid-air interface and undergo a 3D to 2D structural transition to form
highly ordered nanocrystal monolayer.

Xiao-Min Lin Suresh Narayanan, Jin Wang

MSD/CHM Advanced Photon Source
 50 nm Au

Nanowires
Various metallic (Au, Ag, Cu, etc.), superconductive
(Pb), ferromagnetic (Co, Ni, etc.) nanowires have
been made with anodized aluminum oxide (AAO)
templates.
Co 20 nm/Cu 20 nm
Multi-segmented (Co/Cu), (Au/Ni Mirkin, Science
2005) nanowires have been prepared with pulsed
electro-deposition.

Multi-segmented SiNi/Si/SiNi nanowires have been

fabricated into integrated nanowire circuits. (Lieber,
Nature 2005) M
Parallel
AP AP
http://WWW.anl.gov/ FM1 (Co) H
NM (Cu) R Parallel
Materials Science Division, MSD
Center for Nanoscale Materials, CNM FM2 (Co) R/R