CHEMICAL VAPOUR DEPOSITION

 PRIYANSH AGARWAL
 SAKSHAM JAIN
 SHARAD KASHYAP
 SHREY JAIN
 UJJWAL JINDAL
 INTODUCTION
• What is CVD?
“CVD is a process where gaseous precursors react to form a solid coating on a
heated substrate”.
COMPONENTS OF CVD
Application of CVD
 Wear resistance
• E.g. Tungsten carbide coated extrusion dies .

Corrosion resistance
• E.g. Silicon nitride for semiconductor use
• Tungsten for resistance against plasmas
Barrier /interface layer
• E.g. Erbium oxide –hydrogen diffusion barrier
• Silicon carbide layers for semiconductor processing jigs

Net shape products

• E.g. Crucibles, tubes and cones