Digital Sensor

DPHarp EJA Sereis Pressure

Transmitter

DpHarp EJA
Digital Pressure
Transmitter

1
 Evolution Of Pressure Sensing
Technology Of Transmitter

Silicon
Resonant

Piezo-
Resistance

Metal Resonant
wire

Capacitance

Force Balance

2
 Comparison of Sensing Technology

Principle Capacitance Type Piezo Electric Type Silicon Resonant Type

Electrode

Construction
Center Diaphragm
Small Hysteresis
Small temp. Effect
Small S.Press. Effect
Simple Construction Small Hysteresis
Merits Multi Sensing
Long Experience Multi Sensing
Differential Press.
Static Pressure
Temperature
Big Hysteresis Big Temperature Effect
Demerits
(Bad Repeatability) (Before Compensation)

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4
 Capacitance Sensor and Silicon resonant sensor

Magnetic Field

Seal
Diaphragm
Capsule
Body Filling Cavity
Liquid

Resonator
Diaphragm
Sensing
Diaphragm
Pressure

Sensor
Fixed Moving Fixed Assembly
electrode electrode electrode

Seal Diaphragm
C1 C2

Silicon Oil
Original Gap D D Displacement d HIGH LOW
PRESSURE
S S PRESSURE
Capacitance C1 =  Capacitance C2 =  SIDE SIDE
D-d D+d
C1 - C2 Electrode Displacement
Computation =
C1 + C2
=
d
D
(
Original Gap
) Center Diaphragm

Sensing Diaphragm Movement  mm (100 µm) maximum f 

Small movement cause error L 
1 µm distortion = 1% error
5
 Fully Active Wheatstone Bridge

C T

T C

Resistors diffused below surface

• Analog output requires A/D conversion

• Low output of only 2 to 5% change over
full span
• Complex characterization required

Piezoresistive Sensor
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7
 World’s First & Only True Digital Sensor
Converts analogue Performs all controlling Converts signal
Sensing Converts pressure
signal to a digital input and software functions back to analogue
Technology to electrical signal
for processing for 4-20mA output
Differential
Capacitance A/D CPU D/A

Vibrating CPU D/A

A/D
Wire

Piezoresistive A/D CPU D/A

Sensor

Silicon Resonant
CPU D/A
Sensor

-Poor resolution -Complex compensation -Poor resolution

-Temp Sensitive and linearization -Temp Sensitive
-Less Accurate functions -Less Accurate

8
filename : jupiter.ppt/chan
 Over Pressure Protection

Capacitance Sensor Silicon Resonance Sensor

Sensor
Assembly

Seal
Diaphragm Seal Diaphragm

Capsule Filling
Body Liquid
Silicon Oil
Process
HIGH LOW
Pressure PRESSURE
PRESSURE
SIDE SIDE
Sensing
Diaphragm

Center Diaphragm

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 Technology of New Pressure Sensor

Silicon Resonant Sensor

Using
Micro Machining Technology

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 Digital Sensor

“Proprietary sensors that offer real

added value to a customer are expected
to increase in the market. With the exception
of Yokogawa, however, not many suppliers are
expected to invest time and money into
development of super-sophisticated
new age pressure sensors…”

Automation Research Corporation (April 1995)

DpHarp EJA
Digital Pressure
Transmitter

11
 Construction of Silicon Resonant Sensor

2 Silicon Resonant Sensors

Silicon Resonator

Silicon Diaphragm

Silicon Resonator has H Shape

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 Single Crystal Silicon Wafer

13
 Sensor Element of EJA

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 Sensor Assembly LP Fluid Pressure

“Harp” Sensor
Chip

Low HP Fluid
Pressure (LP) Pressure

P1

Fluid Sensing Principle

High Pressure
(HP)

15 EJA Folder
 Details of Capsule Assembly

Overpressure Construction
16
 Resonant Frequency Change by Differential Pressure

110

100

Frequency
(kHz) 90

80

70
5,000 10,000
Differential Pressure (mmH2O)

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 Removing Noise

Fa - Fb = 2F p

Fa = F p + Fp + Ft
Spacer

Fb = - F p + Fp + Ft Base

Silicon Silicon
Resonant Diaphragm
Sensor
Tension Compression
Process
Permanent Pressure
F p : Signal by Differential Pressure Magnet
Fp : Noise by Static Pressure
Ft : Noise by Temperature Variation

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 Inherent Multivariable Sensor

f1 f2
f1 - f 2 = Proportional to
(Frequency) Differential Pressure

f1 + f2 = Proportional to Static
(Frequency) Pressure

. . R = Proportional to
(Resistance) Temperature
R

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 ..metal based pressure sensors have problems with
hysteresis, material creep and relaxation. Ceramic based
sensors are formed of a matrix of crystals typically bonded
with silicon glass and also exhibit these problems. Glass
based sensors are subject to instability due to phase
changes and viscosity of the glass. It has been recognized
that single crystal materials have superior elastic properties
and that sensors based on such materials can have
improved accuracy.

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 Single crystal materials include sapphire, silicon, quartz,
ruby and diamond. Generally, these are materials with low
hysteresis which are highly stable thereby providing little
creep.

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 OUTSTANDING BENEFITS

LOWER TOTAL COST OF OWNERSHIP

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 STATIC PRESSURE TEST
2
Static Pressure = 43.96kgf/cm
Static Pressure(kgf/cm
2
Series 3000 DP Tx Output(V) EJA Tx output = 1.000V (0.05% zero drift)
)
Series 3000 Tx output = 0.988V (0.325% zero drift)
100.00 EJA 110 DP Tx Output(V) 1.120

Transmitter Voltage Output (V)

2
1 kg/cm = 0.980665 Bar
90.00 1.100
2
Static Pressure (kgf/cm)

1.080
2

80.00
Static Pressure at end 1.060
70.00 of test : 93.43 kgf/cm
EJA 110 Tx output at 1.040

60.00 start of test : 1.002 V EJA 110 Tx output at end of test :

0.999V (0.075% zero drift) 1.020

50.00 1.000

40.00 Series 3000 Tx output at start 0.980

of test : 1.001 V
0.960
30.00 Series 3000 Tx output at end
of test : 0.979V 0.940
20.00 (0.6% zero drift)
0.920

10.00 0.900

0.00 Time start Time (units) Time stop 0.880

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 EJA110A / EJX110A

EJA110A
Stability
> ± 0.1% of URL per 60 months (M, H and V capsules).

EJX110A
Stability (All normal operating condition, including overpressure
effects)
> M and H capsules
> ± 0.1% of URL per 10 years.

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 Total Accuracy
 E1 = Reference accuracy
 E2 = Ambient temperature effect
 E3 = Static span effect
 E4 = Static zero effect
 E5 = Overpressure effect
Root mean square of all the errors
Total Probable Error as
defined by the suppliers of
capacitance technology units
to hide their week point
“Static zero effect”
Total Accuracy
by Yokogawa’s definition
considering all effects at
actual field

2 2 2
E1  E2  ( E3  E4 )  E5
2

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 Benefits of consistent accuracy
Cost of ownership

YOKOGAWA EJA SERIES (5 years no cal) BRAND X ( cal every year)

YEAR 1 $ 0 - Zero Adjust Labor - $ 12000

$ 0 - Repair & Labor - $ 0

YEAR 2 $ 0 - Zero Adjust Labor- $ 12,000 ( $40 #X 300)

$ 1300 - Repair & Labor - $ 1,300

YEAR 3 $ 0 - Zero Adjust Labor- $ 12,000

$ 1300 - Repair & Labor - $ 1,300

YEAR 4 $ 0 - Zero Adjust Labor- $ 12,000

$ 1,300 - Repair & Labor - $ 1,300

YEAR 5 $ 0 - Zero Adjust Labor- $ 12,000

$ 1,300 - Repair & Labor - $ 1,300

$5,200 TOTAL $ 65,200

* Assuming 300 Transmitters installed

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27
 DPharp EJA Series

Applications for Pressure and

Differential Pressure Transmitter

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 Gas Flow Measument

Tap Valve
TRANSMITTER
Vent Plug
TX
Vent Valve

3 Valve
Manifold
Tap position of Gas
application is normally
upperside

Tap Valve
Drain Valve
TX Drain Plug
Orifice
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