Manufacturing Smart Surfaces with Embedded

Sensors via Physical Vapor Deposition and Laser Scribing

Javier Díez-Sierra1, Alazne Martínez1, Ion Etxarri1, Borja Pozo1, Iban Quintana1
(1)
Tekniker, Basque Research and Technology Alliance (BRTA), C/ Iñaki Goenaga 5, 20600 Eibar, Spain

What do we want to do? Manufacturing process

The project is based on the development of SMART surfaces Integration of sensors on a component via Physical Vapor
that integrate functional systems to add active monitoring and/or Deposition (PVD) and Laser Scribing (LS). Substrate
actuation capabilities.
1. The component is coated with an insulator
The aim is to manufacture smart components with different types
layer (Al2O3, SiO2, Si3N4,…) by PVD, or with a
of sensors/actuators: Insulator layer
dielectric lacquer applied by spray coating
• RESISTIVE TEMPERATURE DETECTORS  Temperature
• STRAIN GAUGES  Force / Strain 2. A second coating consisting in a conductive
• CAPACITIVE SENSORS  Humidity, Pressure, … layer is applied (Al, Ti, W, Cu, NiCr, ITO, …) Conductive layer

3. The conductor is selectively removed by LS

These components can be used in without removing the insulator to draw a circuit
applications such as: isolated from the piece Sensor
scribing
The type of sensor depends on the material
• Smart tool holder for machining process monitoring (based selection and the shape of the circuit
on strain gauges)
• Leak detector in space propulsion systems (based on
temperature sensors)

Temperature sensors Strain Gauges

The temperature sensors consist of a ~3 µm metallic oxide layer Strain gauges consist of an insulator layer, either a ~3 µm metal
(Al2O3 or a multilayer of SiO2/Si3N4) and a ~500 nm metallic layer oxide or a ~15 µm dielectric lacquer, and a ~500 nm layer of a
(W, Cu, Ti, Al,…) conductor with low α, such as NiCr
W

NiCr

SiO2/Si3N4
SiO2/Si3N4 lacquer The principle of measurement is
The principle of measurement is
the linear variation of resistance
the linear variation of resistance
: Temperature coeff. of resistance with elastic deformation:
with temperature:

Elastic Plastic
: Gauge factor, : Strain

NiCr:

Advantages
1. No adhesives, polymers, humidity, organics or air between the
sensor and the piece  More accurate, more reliable

2. Ultra thin sensors (4-15 µm) 

dimensional tolerance unaffected

3. Sensors in components with complex

geometries in places inaccessible
with traditional sensors

4. RESEARCH CENTERS
Femtosecond laser  extremely quick (~200 mm/s) and
accurate (~30 µm space resolution) manufacturing of sensors
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