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Laser Interferometer Measurements Guide

The document discusses the use of laser interferometry for precision measurements. It describes how laser interferometers can be used to measure distance, velocity, angles, flatness, straightness and positioning accuracy to resolutions of less than 1 micron or 0.1 arcseconds. It provides equations to relate Doppler shift measurements to displacement and discusses various potential sources of error in laser interferometry measurements.

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285 views71 pages

Laser Interferometer Measurements Guide

The document discusses the use of laser interferometry for precision measurements. It describes how laser interferometers can be used to measure distance, velocity, angles, flatness, straightness and positioning accuracy to resolutions of less than 1 micron or 0.1 arcseconds. It provides equations to relate Doppler shift measurements to displacement and discusses various potential sources of error in laser interferometry measurements.

Uploaded by

n_aparna
Copyright
© Attribution Non-Commercial (BY-NC)
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PPT, PDF, TXT or read online on Scribd

LASER INTERFEROMETER

Dr.B.Ramamoorthy Manufactuing Engg.Section IIT,Madras 600034

Six Degrees of Freedom

Various Possible Measurements using Laser Interferometer

Distance and velocity Measurements Linear Optics

Retro Reflector Movements

Angular measurements

Flatness Measurements Using Angular Optics

Straightness Measurements

Interferometer Assembly

Interferometer And Retroreflector With Targets

Positioning of Tripod Stand and Laser head

Laser Head And Tripod Positioning Controls

Positioning Of Optics

Three Axis Positioning of Optics

Three Axis Positioning of Optics Pitch Measurements

Three Axis Positioning of Optics Yaw Measurements

Three Axis Positioning of Optics Laser Head Set up

Doppler frequency Shift is expressed as

2 f0 = z 2 c

2 fo = v c

total = 2N +
The total displacement can be expressed as

c ) = z (N + 2 2 f0

Doppler frequency Shift is expressed as

2 f0 = z 2 c
As

2 fo = v c

Where f, , v, z are the Frequency, phase shift, Velocity and displacement of retro reflector

(1)

(2)

total = 2N +
c ) = z (N + 2 2 f0

f 0 is frequency of Laser

Replacing in the eqn. 2 and rearranging The Total Displacement can be expressed as
C is Speed of light

LASER INTERFEROMETER Application ,Range and Resolution

Application

Range

Resolution

Positioning accuracy Velocity Angle Pitch and Yaw Flatness Straightness

up to 50 m 18,000 m/min 36000 arc secs 3600 arcsecs + / - 1 mm + / - 1.5 mm

0.01 m 0.1 mm/min 0.1 arcsec. 0.1 arcsec. 0.01 m 0.01 m

Alignment Gunsight Method

Alignment Overlapping Dots Method

Alignment - Auto Reflection Method

Auto reflection - Adjustments

Visual Indication Of Cosine Error

Flatness Measurement Location of Laser Head

Positioning of Optics First Measurement line

Installing the Angular Interferometer

Installing the Angular Reflector

Optics Required for Flatness Measurement

Surface Plate - Grid Map

Surface Plate Flatness Measurement Optics Set up

Squareness Measurement Positioning of Optics

Positioning of Optics Squareness Measurement

Straightness measurement Flow Chart

Machine Travel and Machine Tool - Misalignment

ERROR COMPONENTS LASER INTERFEROMETER


Intrinsic : Laser Wavelength Electronics error Optics Non linearity Environmental : Atmospheric Compensation Optics Thermal Drift Material Thermal Compensation Installation : Deadpath Error Abbe Error Cosine Error

ABBE - Offset Error

COSINE Error

DEADPATH Error

Retro Reflector Movement - Result

Alignment Turn the Laser Head

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