Contents

(Note: Page numbers are as in the whole book so that the index remains valid) Acronyms . iii Preface . iv

Electrons and their interaction with the specimen

2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 2.9 2.10 Introduction .. 20 Electrons ... 20 Generating a beam of electrons 24 Deflection of electrons magnetic lenses 27 The scattering of electrons by atoms .... 29 Elastic scattering ... 30 Inelastic scattering .... 31 Secondary effects .. 34 The family of electron microscopes ..... 37 Questions .. 38

Further reading ... 236 Answers . 238 Index ... 243

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).

__________________________________________________________ Electron Microscopy and Analysis, Third Edition (electronic copy) by Peter J. Goodhew, John Humphreys, and Richard Beanland. Reproduced by kind permission of Taylor and Francis Books UK under a Creative Commons Licence (BY-SA).