LECTURE 15 Ti sputter ion pump ..

contd & Introduction to Cryogenics

(Ref. : Experimental Low-Temperature Physics By Anthony Kent , 1993 , Macmillan Press Ltd.)

9/23/2010

PHL723 / L15

Two Advantages of Getter ion pumps: Complete isolatin from atmosphere (They do not have exhaust) No periodic regeneration required Their life depends on the amount of pumped gas & therefore, they should not be used at higher pressure Not effective for H2: Low sputtering yield of Hydrogen ions for Ti. Hence, Pumping Speed will be low for Hydrogen. (Differences in Mol. wt. and Chemical activities decide the Pumping Speed) However, greater diffusion of H2 (compared to that by implantation) is there inside the target; this results in pumping speed of hydrogen that is 2 times higher than that of N2
9/23/2010 PHL723 / L15 2

Problem: Burried inert molecules come off after the erosion of the target. They cause decrease in pumping speed. Solution: Increase the portion of atoms that rebound from target as neutrals and then are implanted into the anode and the walls of the pump, where they are held permanently. The probability of this reflection depend on (i) mass of target (or cathode) atoms (ii) mass of impinging ions and (iii) the incidence angle (grazing angle produce higher sputtering rate) The higher is the mass of target, more likely is the chance that impinging ions will rebound back and also retain more energy after reflection). They will then get burried on the anode/walls subsequent to the reflection. Use of heavier metals such as Tantalum and Molybdenum as an auxiliary target/cathode material provide improvement. A more effective approach is to slot the target surface which results in low incidence angle for L15 ions (Refln & Sputt. Rate 3) the 9/23/2010 PHL723 /

Cathode surface of a StarCell Sputter Ion Pump (From Varian)

9/23/2010

PHL723 / L15

Conflat (CF) Couplings

9/23/2010

Sharp Knife edge deforms PHL723 / L15 the Cu O-ring

Quickfit (KF) : KF Coupling, Clamp, Centering Ring, O-ring

9/23/2010

PHL723 / L15

What is Low Temperature ?

1. 2. How much low is the temperature (T) depends on context Temperature (T) is a statistical concept applying to system consisting of a large number of particles Single isolated particle having a temperature T is meaningless T defined/introduced by thermal equilibrium or 0th law of thermodynamics (Thermometer is based on this) T in terms of some real quantity, i.e., function of thermal energy of the system, i.e., energy associated with the random motion of the constituents particles (Thermodynamic Temperature indicative of mean KE of a gas system). This defines Absolute Zero (i.e., Eth=0 at T=-273.15C)
[On Kelvin scale: This corresponds to T = 0K]

3.

Quantum Mech. description of matter: Discrete allowed states; at T=0, lowest energy of the system (GND STATE) 9/23/2010 (depends on microscopicL15 PHL723 / nature of the system) 7 E 0

 At T=0, there is no extra energy in the form of thermal motion As system is heated from 0K, the system occupies the higher E-states; probability of occupancy relative to that of GND state, P(E) Absolute Temperature At higher T, systems Eth ~ or EGND then thermal de Broglie wavelenth dB ~ avg. dinterparticle (this demarkates low & high Temp) 1. Free electrons in metal (RT): n~1029 cm-3, & dinterparticle=2 nm h Equating this to, = h = gives T=200,000K.
dB

mv

m (3kT / m)

Thus, RT is a very low T ! 2. Liquid N2 at 77K: Using L-N2=810 kg/m3, mN2=4.6510-26 kg, dinterparticle=3.9 nm, Using above eqn, this corr to 1.5K. Thus, for LN2, 77 is very high T ! Low or High depends on context; Low/Cryogenic T < 77K
9/23/2010 PHL723 / L15 8

THERMODYNAMICS: Macroscopic description of matter based on a few fundamental laws

Zeroth Law of Thermodynamics: Thermal Equilibrium If A B & B C, A C First Law of Thermodynamics : Conservation of Energy Adiabatically, the system Ei Ef E = W (work done or system) Otherwise, E - W= Q (heat exchange with surrounding) Second Law: Heat cant be transfered from a cold body to hot body without expanding work (Clausius Statement) OR It is impossible to construct the ideal refrigerator: they all require external source of power to operate (Kelvin Statement) Converse is Possible: Any amount of work can be converted to heat A thermodynamic system can be characterized; in addition to PHL723 known as Entropy S. 9 its 9/23/2010 energy E, by a quantity/ L15 internal

Two important properties of Entropy 1. The entropy of a thermally isolated system undergoing a change of state tend to increase S 0 2. If the system is undergoing Infinitesimal and reversible change of state involving exchange of heat Q S = Q/T Entropy S can be regarded as degree of disorder in the system Third Law of Thermodynamics: As T 0; S So (independent of all parameters of the system) It is impossible to achieve absolute 0 in finite number of steps
9/23/2010 PHL723 / L15 10

Ex.: Cooling of a perfect gas by repeated isothermal compression followed by adiabatic expansion T Ti Tf 0 So Isothermal compression P2 >P1 P1 Adiabatic expansion, P2P1 ; Q=S=0 S

Convergence of the two curves to SO means that as we approach absolute zero, size of the steps Tf Ti 0, & it would require an infinite number of steps to reach absolute 0K !
9/23/2010 PHL723 / L15 11

Order / Disorder and Low Temperature Cooling Nitrogen gas to 77K,liquifies it. Further cooling to 59K, solidifies it. Each phase has different order (Solid being more ordered) Phase change is an order-disorder transition Entropy change at transition, Cooling decrease of entropy
E

E4 E3 E2 E1 E0

(a)

(b)

(c)

(d)

6 particle system: States (a), (b) & (c) are all distinguishable, but have same energy; (d) There is ONLY one ground state,i.e., (d)
9/23/2010 PHL723 / L15 12

E4 E3 E2 E1 E0

(a)

(b)

(c)

(d)

S = k ln (a ) S = 2k ln 2 + 4k ln 2 = 6 ln 2 (b) S = 4k ln 2 + 2k ln 2 = 6 ln 2 (c) S = 6k ln 2 (d ) S = 6k ln 1 = 0 (Gnd state)

= Number of microscopically distinguishible states accessible to a system (a), (b) & (c) : States at higher T (d) : State at lower T Clearly, as T reduces, S approaches its limiting value SO (in this case, 0) in accordance with 3rd law of thermodynamics i.e., if we are somehow able to induce ordering, T reduces Atomic moment alignment (ordering) by external B cooling
9/23/2010 PHL723 / L15 13

Brief History
1877: Cailletet & Pictet: O2 was liquefied (At TC, no distinction between liquid & dense phases; just one fluid phase) 1882: Dewar developed vacuum flask Dewar also liquefied hydrogen (20.4 K) for the first time 1908: K. Onnes liquefied Helium (He) Superfluidity by K. Onnes 1913: Superconduclinly inMercury (Onnes) 1940: S S Collins designed & developed Helium Liquefier A.D. Little (First commercial liquid He-Liquefier) Lowest T : 50 nK (by Magnetic cooling) and pico Kelvin (recently)
9/23/2010 PHL723 / L15 14

Application of Low Temperatures

Study of quantum phenomena (thermal energy ~ ground state energy at low T) Knowing more about how materials behave at much higher T (At low T, in semiconductor crystals, vibration are reduced; Effect of impurities, etc., can be studied independently) Superconducting magnets Magnetic Resonance Imaging (MRI) Sensitive magnetometer (SQUIDs), Josephson Junction (superconducting electronics) Storage and transport of gases (N2 & He) (Rocket fuels : total weight (fuel + storage vessel) is low in liquified state Lower payloads) Storage of Biological materials (e.g., blood, cells, etc.) Electronic amplifiers in Radio Astronomy (Low noise); Cooling optical detectors and nuclear particles.
9/23/2010 PHL723 / L15 15