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X-Ray Diffraction Techniques For Thin Films
X-Ray Diffraction Techniques For Thin Films
X-ray reflectivity
Advantage of X-ray diffraction (XRD) method Probed depth control by incidence angle Nondestructive Measurement under atmosphere pressure
Structure parameters
Structure Parameter Thickness Layer Structure Density Roughness Phase ID Crystal System Lattice Crystal Constant Structure Crystal quality Preferred Orientation Orientation Relation Order 1~103nm Precision :~several % H2O~Heavy Metals 0.2~several nm ~several nm Precision : 0.05~0.00005nm Poly~Single, Perfect Crystals Random~Preferred Orientation ~Single Crystal Relation between Film & Substrate Analysis Method Xray Reflectivity Xray Reflectivity Xray Reflectivity In-Plane XRD Out-of-Plane XRD etc In-Plane XRD Out-of-Plane XRD etc In-Plane XRD Out-of-Plane XRD etc In-Plane XRD Out-of-Plane XRD etc Pole Figure ect Rocking Curve Reciprocal Space Map etc
X-ray reflectivity
7
X-ray reflectivity
8
Diffraction angle 2B
Reflected x-ray
Grazing incidence (fixed angle) Observing planes are perpendicular to the surface.
10
11
In-plane effect
100
Intensity (cps)
Intensity (cps)
80 60 40 20 0 20 30 40
022
1400
In Plane
111
Out of Plane
111 311
50 60
400133 422
70 80 90
2/ (degree)
2/ (degree)
50
60
70
80
90
111
In -Plane In-Plane
12
100
0.01
0.001 10 0.0001 0.0 0.2 0.4 0.6 0.8 1.0 incident angle (degree)
Sample:Al Wavelength:1.54056CuK1
13
200
Intensity (cps)
150
Al ~300nm
Al(220) Al(311) Cu(220) Al(222)
60 70 80
100
50
Cu SiO2 Si (substrate) Ta
0 30 40 50
2/(degree)
14
X-ray reflectivity
15
Single crystal
Fiber orientation
Random orientation
16
Random orientation
=90
=270
=90
=270
=180 =90=0
=180
=70.5
=90
=90=0
=35.3
=90
=270
=270
=180 =90=0
=180 =90=0
=90
=270
=90
=270
=180
=180
17
X-ray reflectivity
18
kg
19
Strain
00l
Misorientation
substrate[001] 00l cubic[112] film[001] tetragonal[112]
hh0
hh0
hh0
20
10
qy/-1
AlGaAs115
Mismatch (strained)
qx/-1
X-ray reflectivity
22
11