Spectroscopic

Ellipsometry
University of Texas at El Paso
Lynn Santiago
Dr. Elizabeth Gardner
Chem 5369
[The ellipsometry] methods are
the workhorse analyses
of a laboratory, as they are used on
almost every project involving
surface chemistry, whether it be a
silicon surface or a metal surface.
James, D.K., Tour, J.M.. Analytica Chimica Acta 568 (2006) 2-19
Ellipsometry An Essential Tool for
Characterizing Nanomaterials
Outline
Spectroscopic
Ellipsometry
Introduction
How it works
Setup
Light Source
Components and Functions
Equation
Advantages
Single Wavelength
Ellipsometry
Setup
Components and Functions
Advantages/Disadvantages

Imaging Ellipsometry
Setup
Components and Functions
Advantages/Disadvantages

Introduction to Spectroscopic Ellipsometry
It is used for a variety of measurements:
Thickness of films.
Optical properties.
Modeling of surface roughness.

Ellipsometry is:
well known
non-destructive
precise
accurate
analytical technique

Using Ellipsometry to Characterize
Nano-electronic-based Materials
The technique is used for the determination of physical
properties of organic molecular electronic-based
devices.
It is commonly used for the characterization of self-
assembled monolayers (SAMS), substrates, polymers
and thin layers.
It can probe molecular assemblies such as SAMS.
Doesnt change their physical characteristics.
Determines whether you have single or multiple layers
assembled on a surface.

How does ellipsometry work?

1. Light is shined from a light source.
2. The light is polarized by passing through a linear polarizer.
3. The light is then elliptically polarized by passing through a
compensator.
4. The light hits the sample, is reflected and is linearly
polarized.
5. The analyzer detects the change of polarization.
6. The detector catches the light and send it to the computer
to process the data.
7. The measured data combined with computerized optical
modeling gives information of the film thickness and
refractive index values of a sample.
Spectroscopic Ellipsometry Setup
1. Light Source
2. Linear Polarizer
3. Compensator
4. Analyzer
5. Detector
Sample
Unpolarized Light
Elliptically Polarized Light
Linearly Polarized Light
Multiple Wavelengths
Light Source
1. The light source consists of wavelengths in the
following regions
Ultraviolet
185nm 260nm
Visible
0.4nm 0.7nm
Infrared
0.7nm 1.1m
http://www.flame-detection.net/flame_detector/flame_detection_school/flame_spectrum.htm
SWE Components and Functions

2. Polarizer - produces light in a special state of
polarization at the output
3. Compensator - used to shift the phase of one
component of the incident light
Depending on orientation, it transforms the ellipse
of polarization
Linearly polarized light into elliptically polarized light
when set to 45 in respect to the linear polarization
axis.
4. Analyzer second polarizer that detects the
linearly polarized light reflected off the sample
5. Detector
http://www.nanofilm.de/fileadmin/cnt_pdf/technology/Ellipsometry_principle__150dpi_s.pdf
Calculating Change in Polarization
This is the equation used to calculate the change
in polarization.

= R
p
/R
s
= tan()e
i

= change in polarization
R
p
= component oscillating in the plane of incidence
R
s
= component is oscillating perpendicular to the plane
of incidence
Tan = amplitude ratio of reflection
= phase shift









r
p

r
s
R
p
= |r
p
|
2

R
s
= |r
s
|
2
What are R
p
and R
s

components?
SE Advantages
No contact with the films is required for the
analysis of films
Technique does not require a reference or
standards
It provides both the phase and amplitude ratio of
a sample
Analysis is less sensitive to the fluctuations of
light intensity
Concentrating the Light Source
We have seen that spectroscopic ellipsometry
uses a range of wavelengths to analyze a sample.
Now we will see an instrument that uses the
same concept but uses one particular
wavelength of light to analyze a sample.
Single Wavelength Ellipsometry

Also known as Laser Ellipsometry

Used in Imaging Ellipsometry

Uses a light source with a specific wavelength

http://www.eas.asu.edu/nanofab/capabilities/metrology.html
Single Wavelength Ellipsometry
Setup
1. Light Source
2. Linear Polarizer
3. Compensator
4. Analyzer
5. Detector
Sample
Unpolarized Light
Elliptically Polarized Light
Linearly Polarized Light
One Wavelength
SWE Light Source
Light Source This is a laser with a specific
wavelength
Commonly a HeNe laser with the wavelength of
632.8 nm
http://www.technology.niagarac.on.ca/courses/phtn1333/
This is not from an
ellipsometer but shows what
a HeNe laser looks like.
Pros and Cons of SWE
Advantages:
Laser can focus on a specific spot
Lasers have a higher power than broad
band light sources

Disadvantage:
Experimental output is restricted to one
set of and values per measurement
Taking it a Step Further
Now there exists the technology to use
ellipsometry and view a sample while it is
being analyzed.
Imaging Ellipsometry
Combines SWE with
Microscopy
High Lateral Resolution
Possible to see tiny samples
High contrast imaging
capabilities to detect various
properties of samples
surface defects
Inhomogenities
Provides spatial resolution
for a variety of areas
Microanalysis
Microelectronics
Bio-analysis
http://www.soem.ecu.edu.au/physics/physics_facilities.htm
Two New
Components
Imaging Ellipsometry Setup
Laser Light Source
Linear Polarizer
Compensator
Analyzer
Objective
CCD Camera
Sample
Unpolarized Light
Elliptically Polarized Light
Linearly Polarized Light
Imaging Components and
Functions
Objective images the illuminated
area of the sample onto the camera

CCD Camera - a camera with an
image sensor that is an integrated
circuit made with light sensitive
capacitors

http://www.nanofilm.de/fileadmin/cnt_pdf/technology/Ellipsometry_principle__150dpi_s.pdf
Pros and Cons of Imaging Ellipsometry
Advantages:
Provides film thickness and refractive index
Provides a real time contrast image of the sample
Ability to restrict ellipsometric analysis to a
particular region of interest within the field-of-view
The signal provided is spatially resolved to show
the details of the sample

Disadvantages:
The inclined observation angle
Only a limited area of the image appears to be
well-focused when using conventional optics
Acknowledgements
David Echevarra Torres
Dr. Elizabeth Gardner

References

James, D.K., Tour, J.M.. Analytica Chimica Acta 568 (2006) 2-19.
Goncalves, D., Irene, E.A.. Quim. Nova, Vol. 25, No. 5, 794-800.
Nanofilm Surface Analysis
http://www.nanofilm.de/fileadmin/cnt_pdf/technology/Ellipsom
etry_principle__150dpi_s.pdf
http://www.wikipedia.org