By aziz

1) Introduction to Ellipsometry
2 ) Ellipsometry
3 ) Principles of Ellipsometry
4 ) Types of Ellipsometry Techniques
Contents 5 ) Spectroscopic Ellipsometry Setup
6) How does ellipsometry work?
7 ) The point of ellipsometry
8 ) video
9) Conclusion
 Introduction to Ellipsometry

This statement emphasizes the critical role of ellipsometry methods as

fundamental analyses in a laboratory setting. It suggests that these
methods serve as essential tools for projects related to surface
chemistry, regardless of the specific material being studied, such as
silicon or metal surfaces. In essence, ellipsometry methods are
considered indispensable and widely applied in various research and
analysis projects involving surface chemistry.
 Ellipsometry

Ellipsometry is a powerful method for determining both the optical

constants and thickness of thin films. For decades, solutions to ill
posed inverse ellipsometric problems require substantial human
expert intervention and have become essentially human in the loop
trial and error processes that are not only tedious and time
consuming but also limit the applicability of ellipsometry.
Principles of Ellipsometry

Reflection

Light Waves
Polarized Light

Atomic Bonds
Types of Ellipsometry Techniques

Variable Angle
Spectroscopic Ellipsometer
Variable
Ellipsometer Angle
Ellipsometer

Polarization Imaging
Modulation EllipsomAeter
Ellipsometer
 Spectroscopic Ellipsometry Setup
Multiple Wavelengths

Unpolarized Light

5. Detector
1. Light Source Linearly Polarized Light

4. Analyzer
2. Linear Polarizer

3. Compensator

Sample
Elliptically Polarized Light
How does ellipsometry work?

1. Light is shined from a light source.

2. The light is polarized by passing through a linear polarizer.
3. The light is then elliptically polarized by passing through a
compensator.
4. The light hits the sample, is reflected and is linearly polarized.
5. The analyzer detects the change of polarization.
6. The detector catches the light and send it to the computer to
process the data.
7. The measured data combined with computerized optical modeling
gives information of the film thickness and refractive index values
of a sample.
 The point of ellipsometry

These parameters are typically extracted from the ellipsometric data, and they
provide valuable information about the optical properties of materials. Here
are some key parameters:
d Film Thickness
Ρ change in polarization
Rp component oscillating in the plane of incidence
Rs component is oscillating perpendicular to the plane of incidence
Ψ amplitude ratio of reflection
Δ phase shift
Calculating Change in Polarization
• This is the equation used to calculate the change in
polarization.

Ρ = Rp/Rs = tan(Ψ)eiΔ

• Ρ = change in polarization
• Rp = component oscillating in the plane of
incidence
• Rs = component is oscillating perpendicular to the
plane of incidence
• Tan Ψ = amplitude ratio of reflection
• Δ = phase shift
What are Rp and Rs components?

rp

Rp = |rp| 2

Rs = |rs|2

rs
 Conclusion

Ellipsometry has the unique ability to measure the optical and

physical properties of surfaces and thin films with high precision
and non-destructively, providing significant advantages over
other measurement techniques. By understanding the
principles, applications, data analysis, and recent advancements
in ellipsometry, scientists and engineers can develop and use it
to solve problems and advance new technologies in various
fields.
Thanks for
listening