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Bsim 3 V 322
Bsim 3 V 322
2 MOSFET Model
Users Manual
Copyright 1999
The Regents of the University of California
All Rights Reserved
Developers:
The BSIM3v3.2.2 MOSFET model is developed by
Technical Support:
Dr. Weidong Liu: liuwd@bsim.eecs.berkeley.edu
Acknowledgment:
The development of BSIM3v3.2.2 benefited from the input of many
BSIM3 users, especially the Compact Model Council (CMC) member
companies. The developers would like to thank Keith Green, Tom Vrotsos,
Britt Brooks and Doug Weiser at TI, Min-Chie Jeng at WSMC, Joe Watts
and Cal Bittner at IBM, Bob Daniels and Wenliang Zhang at Avant!,
Bhaskar Gadepally, Kiran Gullap and Colin McAndrew at Motorola,
Zhihong Liu and Chune-Sin Yeh at BTA, Paul Humphries and Seamus
Power at Analog Devices, Mishel Matloubian and Sally Liu at Rockwell,
Bernd Lemaitre and Peter Klein at Siemens, Ping-Chin Yeh and Dick
Dowell at HP, Shiuh-Wuu Lee, Sananu Chaudhuri and Ling-Chu Chien at
Intel, Judy An at AMD, Medhat Karam, Ariel Cao and Hisham Haddara at
Mentor Graphics, Peter Lee at Hitachi, Toshiyuki Saito at NEC, Richard
Taylor at NSC, and Boonkhim Liew at TSMC for their valuable assistance
in identifying the desirable modifications and testing of the new model.
Special acknowledgment goes to Dr. Keith Green, Chairman of the
Technical Issue Subcommittee of CMC; Britt Brooks, chair of CMC, Dr.
Joe Watts, Secratary of CMC, and Bhaskar Gadepally, former co-chair of
CMC, and Dr. Min-Chie Jeng for their guidance and support.
The BSIM3 project is partially supported by SRC, CMC and Rockwell
International.
Table of Contents
CHAPTER 1:
Introduction 1-1
CHAPTER 2:
2.1 Non-Uniform Doping and Small Channel Effects on Threshold Voltage 2-1
2.1.1
Vertical Non-Uniform Doping Effect 2-3
2.1.2
Lateral Non-Uniform Doping Effect 2-5
2.1.3
Short Channel Effect 2-7
2.1.4
Narrow Channel Effect 2-12
2.2 Mobility Model 2-15
2.3 Carrier Drift Velocity 2-17
2.4 Bulk Charge Effect
2-18
CHAPTER 3:
2-31
2-33
3-1
3-1
3-6
3-12
3-15
3-15
CHAPTER 4:
Capacitance Modeling
4-1
4-1
CHAPTER 5:
5-1
5-1
5-2
SPICE sub-circuit for NQS model 5-3
Relaxation time 5-4
Terminal charging current and charge partitioning
Derivation of nodal conductances 5-7
5-5
CHAPTER 6:
Parameter Extraction
6-1
6-1
6-2
CHAPTER 7:
CHAPTER 8:
7-1
7-1
7-2
Noise Modeling
8-1
8-5
CHAPTER 9:
9.1.2
9.2.2
9.2.3
9.2.4
APPENDIX A:
Parameter List
A-1
A-1
A-1
A-6
A-8
A-13
APPENDIX B:
A-12
A-14
A-14
Equation List
B-1
APPENDIX C:
References
APPENDIX D:
C-1
D-1
D-2
D-2
D-9
D-12
D-13
D-14
CHAPTER 1: Introduction
A version number checking is added; a warning message will be given if userspecified version number is different from its default value of 3.2.2.
Chapter 2 discusses the physical basis used to derive the I-V model.
Chapter 4 presents C-V modeling and focuses on the charge thickness model.
1-1
1-2
2-1
First, if the gate voltage is greater than the threshold voltage, the inversion charge
density is larger than the substrate doping concentration and MOSFET is operating
in the strong inversion region and drift current is dominant. Second, if the gate
voltage is smaller than Vth, the inversion charge density is smaller than the
substrate doping concentration. The transistor is considered to be operating in the
weak inversion (or subthreshold) region. Diffusion current is now dominant [2].
Lastly, if the gate voltage is very close to Vth, the inversion charge density is close
to the doping concentration and the MOSFET is operating in the transition region.
In such a case, diffusion and drift currents are both important.
For MOSFETs with long channel length/width and uniform substrate doping
concentration, Vth is given by [2]:
(2.1.1)
where VFB is the flat band voltage, VTideal is the threshold voltage of the long
channel device at zero substrate bias, and is the body bias coefficient and is given
by:
(2.1.2)
2 si qN a
Cox
where Na is the substrate doping concentration. The surface potential is given by:
(2.1.3)
s = 2
2-2
k BT N a
ln
q
ni
Equation (2.1.1) assumes that the channel is uniform and makes use of the one
dimensional Poisson equation in the vertical direction of the channel. This model
is valid only when the substrate doping concentration is constant and the channel
length is long. Under these conditions, the potential is uniform along the channel.
Modifications have to be made when the substrate doping concentration is not
uniform and/or when the channel length is short, narrow, or both.
Nch
Nsub
2-3
If the depletion
(2.1.4)
K2 =
( 1 2 )(
2 s
s Vbx s
(2.1.6)
s Vbm s + Vbm
where 1 and 2 are body bias coefficients when the substrate doping
concentration are equal to Nch and Nsub, respectively:
(2.1.7)
1 =
2-4
2q si N ch
Cox
(2.1.8)
2 =
2 q si N sub
Cox
Vbx is the body bias when the depletion width is equal to Xt. Therefore, Vbx
satisfies:
(2.1.9)
2
qN ch X t
= s Vbx
2 si
If the devices are available, K1 and K2 can be determined experimentally. If
the devices are not available but the user knows the doping concentration
distribution, the user can input the appropriate parameters to specify
doping concentration distribution (e.g. Nch, Nsub and Xt). Then, K1 and K2
can be calculated using equations (2.1.5) and (2.1.6).
2-5
(2.1.10)
Neff =
2L Npocket Na
Na (L 2Lx ) + Npocket 2Lx
= Na 1 + x
L
L
Na
Nlx
Na 1+
Vth = Vth 0 + K 1
(2.1.11)
s Vbs s K 2Vbs
Nlx
+ K1 1 +
1 s
Leff
Eq. (2.1.11) can be derived by setting Vbs = 0, and using K1 (Neff)0.5. The
fourth term in Eq. (2.1.11) is used to model the body bias dependence of
the lateral non-uniform doping effect. This effect gets stronger at a lower
body bias. Examination of Eq. (2.1.11) shows that the threshold voltage
will increase as channel length decreases [3].
N(x)
Npocket
Npocket
Na
Lx
Lx
X
Figure 2-2. Lateral doping profile is non-uniform.
2-6
(2.1.12)
Nlx
+ K1 1 +
1 s Vth
Leff
where Vth is the threshold voltage reduction due to the short channel
effect. Many models have been developed to calculate Vth. They used
either numerical solutions [4], a two-dimensional charge sharing approach
[5,6], or a simplified Poisson's equation in the depletion region [7-9]. A
simple, accurate, and physical model was developed by Z. H. Liu et al.
[10]. This model was derived by solving the quasi 2D Poisson equation
along the channel. This quasi-2D model concluded that:
(2.1.13)
2-7
(2.1.14)
Vbi =
KBT
N N
ln( ch 2 d )
q
ni
1 10
20
th ( L ) = [exp( L 2 lt ) + 2 exp( L lt )]
(2.1.15)
si Tox Xdep
ox
2 si ( s Vbs )
qN ch
Xdep is larger near the drain than in the middle of the channel due to the
drain voltage. Xdep / represents the average depletion width along the
channel.
Based on the above discussion, the influences of drain/source charge
sharing and DIBL effects onVth are described by (2.1.15). In order to make
the model fit different technologies, several parameters such as Dvt0, Dvt2,
2-8
Dsub, Eta0 and Etab are introduced, and the following modes are used to
account for charge sharing and DIBL effects separately.
(2.1.18)
si Tox Xdep
ox
(1 + Dvt 2 Vbs )
(2.1.21)
2-9
As channel length L decreases, Vth will increase, and in turn Vth will
decrease. If a MOSFET has a LDD structure, Nd in Eq. (2.1.14) is the
doping concentration in the lightly doped region. Vbi in a LDD-MOSFET
will be smaller as compared to conventional MOSFETs; therefore the
threshold voltage reduction due to the short channel effect will be smaller
in LDD-MOSFETs.
As the body bias becomes more negative, the depletion width will increase
as shown in Eq. (2.1.17). Hence Vth will increase due to the increase in lt.
The term:
2-10
Furthermore, Figure 2-5 shows how this Vth model can fit various channel
lengths under various bias conditions.
Figure 2-3. Threshold voltage versus the drain voltage at different body biases.
2-11
2-12
The right hand side of Eq. (2.1.23) represents the additional voltage
increase. This change in Vth is modeled by Eq. (2.1.24a). This formulation
includes but is not limited to the inverse of channel width due to the fact
that the overall narrow width effect is dependent on process (i.e. isolation
technology) as well. Hence, parameters K3, K3b, and W0 are introduced as
(2.1.24a)
(K 3 + K3bVbs )
Tox
s
Weff '+W0
2ltw
ltw
'
'
When all of the above considerations for non-uniform doping, short and
narrow channel effects on threshold voltage are considered, the final
complete Vth expression implemented in SPICE is as follows:
2-13
(2.1.25)
Vth = Vth0ox + K1ox s Vbseff K2oxVbseff
Nlx
T
+ K1ox 1 +
1 s + (K3 + K3bVbseff ) ox s
Leff
Weff '+W0
W ' L
W 'L
DVT0w exp DVT1w eff eff + 2exp DVT1w eff eff (Vbi s )
ltw
2ltw
L
L
L
L
2lto
lto
Vth0ox =Vth0 K1 s
and
K 1ox = K 1
Tox
Toxm
K 2 ox = K 2
Tox
Toxm
Toxm is the gate oxide thickness at which parameters are extracted with a
default value of Tox.
In Eq. (2.1.25), all Vbs terms have been substituted with a Vbseff expression
as shown in Eq. (2.1.26). This is done in order to set an upper bound for the
body bias value during simulations since unreasonable values can occur if
this expression is not introduced (see Section 3.8 for details).
2-14
Mobility Model
(2.1.26)
Vbseff = Vbc + 0.5[Vbs Vbc 1 + (Vbs Vbc 1) 2 4 1Vbc ]
K1
Vbc = 0.9 s
2
4K 2
(2.2.1)
The physical meaning of Eeff can be interpreted as the average electrical field
experienced by the carriers in the inversion layer [14]. The unified formulation of
mobility is then given by
2-15
Mobility Model
eff =
(2.2.2)
1 + ( Eeff E0 )
Values for 0, E0, and were reported by Liang et al. [15] and Toh et al. [16] to be
the following for electrons and holes
Parameter
Electron (surface)
Hole (surface)
0 (cm2/Vsec)
670
160
E0 (MV/cm)
0.67
0.7
1.6
1.0
For an NMOS transistor with n-type poly-silicon gate, Eq. (2.2.1) can be rewritten
in a more useful form that explicitly relates Eeff to the device parameters [14]
Vgs + Vth
Eeff
6 Tox
(2.2.3)
Eq. (2.2.2) fits experimental data very well [15], but it involves a very time
consuming power function in SPICE simulation. Taylor expansion Eq. (2.2.2) is
used, and the coefficients are left to be determined by experimental data or to be
obtained by fitting the unified formulation. Thus, we have
2-16
(mobMod=1)
o
eff =
V gsteff + 2Vth 2
Vgst
gsteff + 2Vth
1 + (Ua + Uc Vbseff )(
) + Ub ( gst
)
TOX
TOX
(2.2.4)
(2.2.5)
o
eff =
V gsteff
V
Vgsteff
1 + (Ua + UcVbseff )( gst ) + Ub ( gst ) 2
TOX
TOX
The unified mobility expressions in subthreshold and strong inversion regions will
be discussed in Section 3.2.
To consider the body bias dependence of Eq. 2.2.4 further, we have introduced the
following expression:
(For mobMod=3)
eff =
(2.2.6)
o
Vgst
Vgsteff + 2Vth 2
gsteff + 2Vth
1 + [Ua (
) + Ub ( gst
) ](1 + UcVbseff )
TOX
TOX
2-17
v=
eff E
1 + ( E Esat )
(2.3.1)
E < Esat
= vsat ,
E > Esat
The parameter Esat corresponds to the critical electrical field at which the carrier
velocity becomes saturated. In order to have a continuous velocity model at E =
Esat, Esat must satisfy:
(2.3.2)
Esat =
2 vsat
eff
K1ox
Abulk = 1 +
2 s Vbseff
2-18
A0 Leff
Leff
1 AgsVgsteff
+
+
L
2
X
X
L
2
X
X
eff
J dep
J dep
eff
B0
1
+
W '+B 1 + KetaV
eff
1
bseff
where A0, Ags, B0, B1 and Keta are determined by experimental data. Eq. (2.4.1)
shows that Abulk is very close to unity if the channel length is small, and Abulk
increases as channel length increases.
eff E ( y )
1 + E ( y ) E sat
2-19
(2.5.3)
E ( y) =
eff WCox (V
gst
I ds
dV ( y )
=
AbulkV ( y )) I ds E sat
dy
W
1
(Vgs Vth Abulk Vds 2)Vds
L 1 + Vds E sat L
The drain current model in Eq. (2.5.4) is valid before velocity saturates.
For instances when the drain voltage is high (and thus the lateral electrical
field is high at the drain side), the carrier velocity near the drain saturates.
The channel region can now be divided into two portions: one adjacent to
the source where the carrier velocity is field-dependent and the second
where the velocity saturates. At the boundary between these two portions,
the channel voltage is the saturation voltage (Vdsat) and the lateral
electrical is equal to Esat. After the onset of saturation, we can substitute v
= vsat and Vds = Vdsat into Eq. (2.5.1) to get the saturation current:
(2.5.5)
I ds = WCox (V gst AbulkVdsat )v sat
By equating eqs. (2.5.4) and (2.5.5) at E = Esat and V ds = Vdsat, we can
solve for saturation voltage Vdsat
(2.5.6)
Vdsat =
2-20
V ds
V ds
=
R tot
R ch + R ds
= eff C ox
Due to the parasitic resistance, the saturation voltage Vdsat will be larger
than that predicted by Eq. (2.5.6). Let Eq. (2.5.5) be equal to Eq. (2.5.9).
Vdsat with parasitic resistance Rds becomes
(2.5.10)
Vdsat =
b b 2 4 ac
2a
2-21
(2.5.11)
2
a = Abulk
Rds Cox Wv sat + (
1
1) Abulk
2
1) + Abulk E sat L + 3 Abulk Rds Cox Wv sat Vgst )
2
c = Esat LVgst + 2 Rds Cox Wvsat Vgst
= A1Vgst + A 2
b = (Vgst (
(10 W ')
))
Wr
eff
The variable Rdsw is the resistance per unit width, Wr is a fitting parameter,
Prwb and Prwg are the body bias and the gate bias coeffecients, repectively.
2-22
curve can be clearly divided into four regions with distinct Rout
v s. V ds
dependences.
The first region is the triode (or linear) region in which carrier velocity is not
saturated. The output resistance is very small because the drain current has a strong
dependence on the drain voltage. The other three regions belong to the saturation
region. As will be discussed later, there are three physical mechanisms which
affect the output resistance in the saturation region: channel length modulation
(CLM) [4, 14], drain-induced barrier lowering (DIBL) [4, 6, 14], and the substrate
current induced body effect (SCBE) [14, 18, 19]. All three mechanisms affect the
output resistance in the saturation range, but each of them dominates in only a
single region. It will be shown next that channel length modulation (CLM)
dominates in the second region, DIBL in the third region, and SCBE in the fourth
region.
14
3.0
Triode
CLM
DIBL
SCBE
12
2.5
Ids (mA)
8
1.5
6
Rout (KOhms)
10
2.0
1.0
4
0.5
0.0
0
V ds (V)
2-23
Generally, drain current is a function of the gate voltage and the drain voltage. But
the drain current depends on the drain voltage very weakly in the saturation region.
A Taylor series can be used to expand the drain current in the saturation region [3].
(2.6.1)
Ids (Vgs , Vds ) = Ids (Vgs , Vdsat ) +
(Vds Vdsat )
V Vdsat
Idsat (1 + ds
)
VA
where
(2.6.2)
I dsat = I ds ( Vgs ,Vdsat ) = Wv sat Cox ( Vgst Abulk Vdsat )
and
(2.6.3)
VA = I dsat (
Ids 1
)
Vds
The parameter VA is called the Early voltage and is introduced for the analysis of
the output resistance in the saturation region. Only the first order term is kept in the
Taylor series. We also assume that the contributions to the Early voltage from all
three mechanisms are independent and can be calculated separately.
2-24
VACLM =
(2.6.5)
(Vds Vdsat )
l XJ
and the junction depth XJ can not generally be determined very accurately.
Thus, the VACLM became
VACLM =
Pclm
Abulk Esat l
(2.6.6)
( Vds Vdsat )
2-25
I ds Vth 1
1
1
) =
+
(Vgst (
Vth Vds
th ( L )
Abulk Vdsat V
(Vgsteff + 2vt)
AbulkVdsat
2-26
equal to Pdiblc1 and Dvt1 is not equal to Drout is because the gate voltage
modulates the DIBL effect. When the threshold voltage is determined, the
gate voltage is equal to the threshold voltage. But in the saturation region
where the output resistance is modeled, the gate voltage is much larger than
the threshold voltage. Drain induced barrier lowering may not be the same
at different gate bias. Pdiblc2 is usually very small (may be as small as
8.0E-3). If Pdiblc2 is placed into the threshold voltage model, it will not
cause any significant change. However it is an important parameter in
VADIBL for long channel devices, because Pdiblc2 will be dominant in Eq.
(2.6.8) if the channel is long.
1
VACLM
1
VADIBL
) 1
2-27
Vds Vdsat
)
VA
VA = VAsat + (1 +
gsteff
PvagVgs
1
1
+
)(
) 1
E satLeff VACLM VADIBLC
2-28
Ai
Bil
The parameters Ai and Bi are determined from extraction. Isub will affect
the drain current in two ways. The total drain current will change because it
is the sum of the channel current from the source as well as the substrate
current. The total drain current can now be expressed [21] as follows
(2.6.14)
I ds = Idso + I sub
(Vds Vdsat )
= Idso 1 +
Bi
Bil
exp(
)
Ai
Vds Vdsat
The total drain current, including CLM, DIBL and SCBE, can be written as
(2.6.15)
I ds = Wv sat Cox (Vgst Abulk Vdsat )(1 +
Vds Vdsat
Vds Vdsat
)(1 +
)
VA
VASCBE
where VASCBE can also be called as the Early voltage due to the substrate
current induced body effect. Its expression is the following
(2.6.16)
VASCBE
Bi
Bil
= exp(
)
Ai
Vds Vdsat
From Eq. (2.6.16), we can see that VASCBE is a strong function of Vds. In
addition, we also observe that VASCBE is small only when Vds is large. This
is why SCBE is important for devices with high drain voltage bias. The
channel length and gate oxide dependence of VASCBE comes from Vdsat and
l. We replace Bi with PSCBE2 and Ai/Bi with PSCBE1/L to yield the
following expression for VASCBE
2-29
(2.6.17)
1
P
P
l
= SCBE 2 exp( SCBE1 )
VASCBE
L
Vds Vdsat
The variables Pscbe1 and Pscbe2 are determined experimentally.
I s0 = 0
W
L
q si N ch 2
vt
2 s
Here the parameter vt is the thermal voltage and is given by KBT/q. Voff is the
offset voltage, as discussed in Jeng's dissertation [18]. Voff is an important
parameter which determines the drain current at Vgs = 0. In Eq. (2.7.1), the
parameter n is the subthreshold swing parameter. Experimental data shows that the
subthreshold swing is a function of channel length and the interface state density.
These two mechanisms are modeled by the following
(2.7.3)
Leff
Leff
(Cdsc + CdscdVds + Cdscb Vbseff ) exp(DVT1 ) + 2 exp(DVT1 )
Cd
lt Cit
2lt
+
+
n = 1 + Nfactor
Cox
Cox
Cox
2-30
Leff
Leff
(Cdsc + CdscdVds + Cdscb Vbseff ) exp( DVT 1
) + 2 exp( DVT 1
)
lt
2lt
represents the coupling capacitance between the drain or source to the channel.
The parameters Cdsc, Cdscd and Cdscb are extracted. The parameter Cit in Eq. (2.7.3)
is the capacitance due to interface states. From Eq. (2.7.3), it can be seen that
subthreshold swing shares the same exponential dependence on channel length as
the DIBL effect. The parameter Nfactor is introduced to compensate for errors in
the depletion width capacitance calculation. Nfactor is determined experimentally
and is usually very close to 1.
L eff = L drawn 2 dL
(2.8.2a)
Weff = Wdrawn 2 dW
(2.8.2b)
Weff = Wdrawn 2 dW
The only difference between Eq. (2.8.2a) and (2.8.2b) is that the former includes
bias dependencies. The parameters dW and dL are modeled by the following
2-31
(2.8.3)
dW = dW '+ dWgV gsteff + dWb
dW ' = Wint +
Vbseff s
Wl
Ww
W
+ Wwn
+ W ln wl Wwn
W ln
L
W
L W
(2.8.4)
dL = Lint +
Ll
L
Lw
+ Lwn
+ L ln wl Lwn
L ln
W
L
L W
These complicated formulations require some explanation. From Eq. (2.8.3), the
variable Wint models represents the tradition manner from which "delta W" is
extracted (from the intercepts of straights lines on a 1/Rds vs. Wdrawn plot). The
parameters dWg and dWb have been added to account for the contribution of both
front gate and back side (substrate) biasing effects. For dL, the parameter Lint
represents the traditional manner from which "delta L" is extracted (mainly from
the intercepts of lines from a Rds vs. Ldrawn plot).
The remaining terms in both dW and dL are included for the convenience of the
user. They are meant to allow the user to model each parameter as a function of
Wdrawn, Ldrawn and their associated product terms. In addition, the freedom to
model these dependencies as other than just simple inverse functions of W and L is
also provided for the user. For dW, they are Wln and Wwn. For dL they are Lln and
Lwn.
By default all of the above geometrical dependencies for both dW and dL are
turned off. Again, these equations are provided for the convenience of the user. As
such, it is up to the user to adopt the correct extraction strategy to ensure proper
use.
2-32
2-33
Ngate
Figure 2-7. Charge distribution in a MOSFET with the poly gate depletion effect.
The device is in the strong inversion region.
The effective gate voltage can be calculated in the following manner. Assume the
doping concentration in the poly gate is uniform. The voltage drop in the poly gate
(Vpoly) can be calculated as
(2.9.1)
poly =
1
X poly E poly =
2
2
Ngate
qN
poly X poly
2 si
where Epoly is the maximum electrical field in the poly gate. The boundary
condition at the interface of poly gate and the gate oxide is
(2.9.2)
2-34
where Eox is the electrical field in the gate oxide. The gate voltage satisfies
(2.9.3)
where
(2.9.5)
a=
ox 2
2q si N gateTox
By solving the equation (2.9.4), we get the effective gate voltage (Vgs_eff) which is
equal to:
(2.9.6)
Vgs_ eff
2
2
q si NgateTox
2ox (Vgs VFB s )
1+
= VFB + s +
1
2
ox2
q si NgateTox
Figure 2-8 shows Vgs_eff / Vgs versus the gate voltage. The threshold voltage is
assumed to be 0.4V. If Tox = 40 , the effective gate voltage can be reduced by 6%
due to the poly gate depletion effect as the applied gate voltage is equal to 3.5V.
2-35
1.00
Vgs_eff / Vgs
Vgs_eff/Vgs
Tox=80A
80
Tox=60A
60
0.95
To x = 40
Tox=40A
0.90
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
Vgs
V g s (V)
(V)
Figure 2-8. The effective gate voltage versus applied gate voltage at different gate
oxide thickness.
The drain current reduction in the linear region as a function of the gate voltage
can now be determined. Assume the drain voltage is very small, e.g. 50mV. Then
the linear drain current is proportional to Cox(Vgs - Vth). The ratio of the linear drain
current with and without poly gate depletion is equal to:
(2.9.7)
I ds (V gs _ eff )
I ds (V gs )
(V gs _ eff Vth )
(V gs Vth )
Figure 2-9 shows Ids(Vgs_eff) / Ids(Vgs) versus the gate voltage using Eq. (2.9.7). The
drain current can be reduced by several percent due to gate depletion.
2-36
1.00
Ids(Vgs_eff)/Ids(Vgs)
Ids(Vgs_eff) / Ids(Vgs)
Tox=80A
80
60
Tox=60A
0.95
To x = 40
Tox=40A
0.90
0.0
0.5
1.0
1.5
2.0
2.5
3.0
3.5
Vgs
V (V)
(V)
Figure 2-9. Ratio of linear region current with poly gate depletion effect and that
without.
2-37
2-38
2-39
2-40
The development of separate model expressions for such device operation regimes as
subthreshold and strong inversion were discussed in Chapter 2. Although these
expressions can accurately describe device behavior within their own respective region of
operation, problems are likely to occur between two well-described regions or within
transition regions. In order to circumvent this issue, a unified model should be synthesized
to not only preserve region-specific expressions but also to ensure the continuities of
current and conductance and their derivatives in all transition regions as well. Such high
standards are kept in BSIM3v3.2.1 . As a result, convergence and simulation efficiency
are much improved.
This chapter will describe the unified I-V model equations. While most of the parameter
symbols in this chapter are explained in the following text, a complete description of all IV model parameters can be found in Appendix A.
3-1
(3.1.1a)
Qchsubs 0 = Q0 exp(
Vgs Vth
)
nvt
where Q0 is
(3.1.1b)
Q0 =
qsiNch
Voff
vt exp(
)
nvt
2s
(3.1.2)
Qchs 0 = Cox (Vgs Vth )
In both Eqs. (3.1.1a) and (3.1.2), the parameters Qchsubs0 and Qchs0 are the channel
charge densities at the source for very small Vds. To form a unified expression, an
effective (Vgs-Vth) function named Vgsteff is introduced to describe the channel
charge characteristics from subthreshold to strong inversion
(3.1.3)
Vgsteff
Vgs Vth
2 n vt ln 1 + exp(
)
2 n vt
=
2 s
Vgs Vth 2Voff
1 + 2 n COX
exp(
)
2 n vt
qsiNch
The unified channel charge density at the source end for both subthreshold and
inversion region can therefore be written as
(3.1.4)
Qchs0 = CoxVgsteff
Figures 3-1 and 3-2 show the smoothness of Eq. (3.1.4) from subthreshold to
strong inversion regions. The Vgsteff expression will be used again in subsequent
sections of this chapter to model the drain current.
3-2
3.0
Vgsteff Function
2.5
2.0
exp[(Vgs-Vth)/n*vt]
Vgsteff (V)
1.5
1.0
0.5
0.0
Vgs=Vth
-0.5
-1.0
(Vgs-Vth)
-1.5
-1.0
-0.5
0.0
0.5
1.0
VVgs-Vth
gs-Vth (V)(V)
1.5
2.0
Log(Vgsteff)
Log(Vgsteff)
0
-2
(Vgs-Vth)
-4
-6
-8
exp[(Vgs-Vth)/n*vt]
-10
-12
Vgs=Vth
-14
-16
-1.0
-0.5
0.0
0.5
1.0
1.5
2.0
2.5
VVgs-Vth
gs-Vth (V) (V)
Figure 3-2. Vgsteff function vs. (Vgs-Vth) in log scale.
3-3
Eq. (3.1.4) serves as the cornerstone of the unified channel charge expression at
the source for small Vds. To account for the influence of Vds, the Vgsteff function
must keep track of the change in channel potential from the source to the drain. In
other words, Eq. (3.1.4) will have to include a y dependence. To initiate this
formulation, consider first the re-formulation of channel charge density for the
case of strong inversion
(3.1.5)
The term Qchs(y) is the incremental channel charge density induced by the drain
voltage at point y. It can be expressed as
(3.1.7)
Qchs ( y ) = CoxAbulkVF ( y )
For the subthreshold region (Vgs<<Vth), the channel charge density along the
channel from source to drain can be written as
(3.1.8)
3-4
A Taylor series expansion of the right-hand side of Eq. (3.1.8) yields the following
(keeping only the first two terms)
(3.1.9)
AbulkVF( y)
)
nvt
Qchsubs( y) =
AbulkVF ( y )
Qchsubs0
nvt
Note that Eq. (3.1.9) is valid only when VF(y) is very small, which is maintained
fortunately, due to the fact that Eq. (3.1.9) is only used in the linear regime (i.e. Vds
2vt).
Eqs. (3.1.6) and (3.1.10) both have drain voltage dependencies. However, they are
decupled and a unified expression for Qch(y) is needed. To obtain a unified
expression along the channel, we first assume
(3.1.12)
Qchs ( y ) Qchsubs( y )
Qch ( y ) =
Qchs ( y ) + Qchsubs ( y )
Here, Qch(y) is the incremental channel charge density induced by the drain
voltage. Substituting Eq. (3.1.7) and (3.1.11) into Eq. (3.1.12), we obtain
3-5
(3.1.13)
Qch ( y ) =
VF ( y )
Qchs 0
Vb
Vb =
Vgsteff + 2vt
Abulk
VF ( y)
)
Vb
3-6
(mobMod = 1)
eff =
1 + (Ua + Uc Vbseff )(
o
+ 2Vth
Vgsteff
TOX
(3.2.1)
) + Ub (
Vgsteff + 2Vth 2
)
TOX
To account for depletion mode devices, another mobility model option is given by
the following
(mobMod = 2)
(3.2.2)
o
eff =
Vgsteff 2
Vgsteff
1 + (Ua + UcVbseff )(
) + Ub (
)
TOX
TOX
To consider the body bias dependence of Eq. 3.2.1 further, we have introduced the
following expression
(For mobMod = 3)
eff =
(3.2.3)
o
Vgsteff + 2Vth 2
Vgsteff + 2Vth
1 + [Ua (
) + Ub (
) ](1 + UcVbseff )
TOX
TOX
3-7
(3.3.1)
Id ( y ) = WQch ( y ) ne ( y )
dVF ( y )
dy
ne ( y ) =
eff
Ey
1+
Esat
VF ( y ) eff dVF ( y )
)
Vb 1 + Ey dy
Esat
Eq. (3.3.3) resembles the equation used to model drain current in the strong
inversion regime. However, it can now be used to describe the current
characteristics in the subthreshold regime when Vds is very small (Vds<2vt).
Eq. (3.3.3) can now be integrated from the source to drain to get the
expression for linear drain current in the channel. This expression is valid
from the subthreshold regime to the strong inversion regime
(3.3.4)
I ds 0
3-8
V
W eff Q chs 0V ds 1 ds
2V b
V
L 1 + ds
E sat L
Ids =
Idso
RdsIdso
1+
Vds
Ey =
(WQchs 0 eff
WeffQchs 0 EsatLVb
=
2 L( EsatL + Vb )
3-9
Let Vds=Vdsat in Eq. (3.3.4) and set this equal to Eq. (3.4.2), we get the
following expression for Vdsat
(3.4.3)
Vdsat =
EsatL(Vgsteff + 2 vt )
AbulkEsatL + Vgsteff + 2 vt
b b 4ac
2a
2
Vdsat =
where
(3.4.4b)
a = A bulk 2WeffsatCoxR DS + (
1
1) A bulk
(3.4.4c)
(3.4.4d)
(3.4.4e)
= A1Vgsteff + A2
3-10
Ids =
Idso ( Vdsat )
1 + Vds Vdsat 1 + Vds Vdsat
RdsIdso ( Vdsat )
VA
VASCBE
1+
Vdsat
where
(3.5.2)
VA = VAsat + (1 +
PvagVgsteff
1
1
+
)(
) 1
E satLeff VACLM VADIBLC
(3.5.3)
AbulkVdsat
]
2(Vgsteff + 2vt )
2 / 1 + RDSsatCoxWeffAbulk
(3.5.4)
VACLM =
AbulkEsatLeff + Vgsteff
(Vds Vdsat )
PCLMAbulkEsat litl
3-11
Single Current Expression for All Operating Regimes of Vgs and Vds
(3.5.5)
VADIBLC =
(Vgsteff + 2 vt )
AbulkVdsat
Leff
Leff
(3.5.7)
1
VASCBE
Pscbe1 litl
Pscbe 2
exp
Vds Vdsat
Leff
Idso ( Vdseff )
1 + Vds Vdseff 1 + Vds Vdseff
Ids =
RdsIdso( Vdseff )
VA
VASCBE
1+
Vdseff
Most of the previous equations which contain Vds and Vdsat dependencies are now
substituted with the Vdseff function. For example, Eq. (3.5.4) now becomes
3-12
Single Current Expression for All Operating Regimes of Vgs and Vds
(3.6.2)
VACLM =
AbulkEsatLeff + Vgsteff
(Vds Vdseff )
PCLMAbulkEsat litl
1
VASCBE
Pscbe2
Pscbe1 litl
exp
Vds Vdseff
Leff
Vdseff = Vdsat
1
Vdsat Vds + (Vdsat Vds )2 + 4Vdsat
2
(3.6.4)
The expression for Vdsat is that given under Section 3.4. The parameter in the
unit of volts can be extracted. The dependence of Vdseff on Vds is given in Figure 33. The Vdseff function follows Vds in the linear region and tends to Vdsat in the
saturation region. Figure 3-4 shows the effect of on the transition region between
linear and saturation regimes.
3-13
Single Current Expression for All Operating Regimes of Vgs and Vds
1.4
Vdseff=Vdsat
Vdseff=Vds
1.2
Vdseff (V)
1.0
Vgs=1V
Vgs=3V
Vgs=5V
0.8
0.6
0.4
0.2
0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0
Vds (V)
Figure 3-3. Vdseff vs. Vds for =0.01 and different Vgs.
Vdseff=Vdsat
2.0
Vdseff (V)
1.5
Vdseff=Vds
=0.05
=0.01
1.0
=0.001
0.5
0.0
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0
Vds (V)
Figure 3-4. Vdseff vs. Vds for Vgs=3V and different values.
3-14
Substrate Current
0 + 1 Leff
Leff
(V
ds
0
Vdseff )exp
V V
dseff
ds
I ds 0
R I
1 + ds ds 0
Vdseff
Vds Vdseff
1 +
VA
where 1=0.001V.
Parameter Vbc is the maximum allowable Vbs value and is obtained based on the
condition of dVth/dVbs = 0 for the Vth expression of 2.1.4.
3-15
A Note on Vbs
3-16
Accurate modeling of MOSFET capacitance plays equally important role as that of the
DC model. This chapter describes the methodology and device physics considered in both
intrinsic and extrinsic capacitance modeling in BSIM3v3.2.2. Detailed model equations
are given in Appendix B. One of the important features of BSIM3v3.2 is introduction of a
new intrinsic capacitance model (capMod=3 as the default model), considering the finite
charge thickness determined by quantum effect, which becomes more important for
thinner Tox CMOS technologies. This model is smooth, continuous and accurate
throughout all operating regions.
Separate effective channel length and width are used for capacitance models.
The intrinsic capacitance models, capMod=0 and 1, use piece-wise equations.
capMod=2 and 3 are smooth and single equation models; therefore both charge and
capacitance are continous and smooth over all regions.
Threshold voltage is consistent with DC part except for capMod=0, where a longchannel Vth is used. Therefore, those effects such as body bias, short/narrow channel
and DIBL effects are explicitly considered in capMod=1, 2, and 3.
Overlap capacitance comprises two parts: (1) a bias-independent component which
models the effective overlap capacitance between the gate and the heavily doped
source/drain; (2) a gate-bias dependent component between the gate and the lightly
doped source/drain region.
4-1
Bias-independent fringing capacitances are added between the gate and source as well
as the gate and drain.
Name
Function
Default
Unit
capMod
(True)
vfbcv
-1.0
(V)
acde
(m/V)
moin
15
(V0.5)
cgso
Calculated
F/m
cgdo
Calculated
F/m
CGS1
(F/m)
CGD1
(F/m)
CKAPPA
0.6
CF
equation
(4.5.1)
(F/m)
CLC
0.1
CLE
0.6
DWC
Wint
DLC
Lint
4-2
(Lactive) and width (Wactive) when the gate to S/D region is at flat band voltage.
Lactiveand Wactive are defined by Eqs. (4.2.1) through (4.2.4).
(4.2.1)
Leff = DLC+
Llc Lwc
Lwlc
+ Lwn + L ln Lwn
L ln
L
W
L W
(4.2.4)
Weff = DWC +
Wlc Wwc
Wwlc
+ Wwn + W ln Wwn
W ln
L
W
L W
The meanings of DWC and DLC are different from those of Wint and Lint in the IV model. Lactive and Wactive are the effective length and width of the intrinsic
device for capacitance calculations. Unlike the case with I-V, we assumed that
these dimensions have no voltage bias dependence. The parameter Leff is equal to
the source/drain to gate overlap length plus the difference between drawn and
actual POLY CD due to processing (gate printing, etching and oxidation) on one
side. Overall, a distinction should be made between the effective channel length
extracted from the capacitance measurement and from the I-V measurement.
Traditionally, the Leff extracted during I-V model characterization is used to gauge
a technology. However this Leff does not necessarily carry a physical meaning. It is
just a parameter used in the I-V formulation. This Leff is therefore very sensitive to
the I-V equations used and also to the conduction characteristics of the LDD
4-3
region relative to the channel region. A device with a large Leff and a small
parasitic resistance can have a similar current drive as another with a smaller Leff
but larger Rds. In some cases Leff can be larger than the polysilicon gate length
giving Leff a dubious physical meaning.
The Lactive parameter extracted from the capacitance method is a closer
representation of the metallurgical junction length (physical length). Due to the
graded source/ drain junction profile the source to drain length can have a very
strong bias dependence. We therefore define Lactive to be that measured at gate to
source/drain flat band voltage. If DWC, DLC and the newly-introduced length/
width dependence parameters (Llc, Lwc, Lwlc, Wlc, Wwc and Wwlc) are not
specified in technology files, BSIM3v3.2.2 assumes that the DC bias-independent
Leff and Weff (Eqs. (2.8.1) - (2.8.4)) will be used for C-V modeling, and DWC,
DLC,Llc, Lwc, Lwlc, Wlc, Wwc and Wwlc will be set equal to the values of their
DC counterparts (default values).
4-4
The accumulation charge and the substrate charge are associated with the
substrate while the channel charge comes from the source and drain
terminals
(4.3.1)
Qg = (Qsub + Qinv + Qacc )
Qb = Qacc + Qsub
Q = Q + Q
s
d
inv
The substrate charge can be divided into two components - the substrate
charge at zero source-drain bias (Qsub0), which is a function of gate to
substrate bias, and the additional non-uniform substrate charge in the
presence of a drain bias (Qsub). Qg now becomes
(4.3.2)
The total charge is computed by integrating the charge along the channel.
The threshold voltage along the channel is modified due to the nonuniform substrate charge by
(4.3.3)
Vth ( y) = Vth (0) + (Abulk 1)Vy
(4.3.4)
Lactive
Lactive
Lactive
Lactive
Qb = Wactive
0 qbdy = WactiveCox 0 Vth VFB s + Abulk 1 Vy dy
Lactive
Lactive
) )
4-5
dy =
dV y
and
(4.3.5)
I ds =
Wactiveeff Cox
A
2
2
Abulk V ds
Abulk
12 V gt
V ds
2
V ds
Abulk V ds
+
Q g = Q sub 0 + W active L active C ox V gt
A
2
12 V gt bulk V ds
where
4-6
(4.3.7)
Q sub 0 = W active L active 2 si qN sub (2 B V bs )
12 V gt bulk V ds
The inversion charges are supplied from the source and drain electrodes
such that Qinv = Qs + Qd. The ratio of Qd and Qs is the charge partitioning
ratio. Existing charge partitioning schemes are 0/100, 50/50 and 40/60
(XPART = 0, 0.5 and 1) which are the ratios of Qd to Qs in the saturation
region. We will revisit charge partitioning in Section 4.3.4.
All capacitances are derived from the charges to ensure charge
conservation. Since there are four terminals, there are altogether 16
components. For each component
(4.3.8)
Cij =
Qi
V j
ij
ij
=0
4-7
Lactive
V gsteff ,cv
Abulk
4-8
(4.3.10a)
V dsat,cv
cdsat ,cv =
V gsteff ,cv
CLE
CLC
Abulk 1 +
L active
(4.3.10b)
noff
nv
t
Parameters noff and voffcv are introduced to better fit measured data above
subthreshold regions. The parameter Abulk is substituted Abulk0 in the long
channel equation by
(4.3.11)
CLC CLE
active
(4.3.11a)
K1ox
Abulk = 1 +
2 V
s
bseff
A0 Leff
B0
1
L +2 X X
In (4.3.11), parameters CLC and CLE are introduced to consider channellength modulation.
4-9
Q(Vgt ) = Q(Vgsteff,CV )
(4.3.12)
4-10
(4.3.13)
C(Vgt ) = C(Vgsteff,CV )
Vgsteff,CV
Vgs,ds,bs
} where V = vfb V
3
gs
(4.3.14)
+ Vbseff 3 ; 3 = 0.02V
(4.3.15)
(4.3.16)
(4.3.17)
4 Vgs VFBeff Vgsteff,CV Vbseff
K
Qsub0 = WactiveLactiveCox
1 + 1 +
2
2
K1ox
2
1ox
4-11
} whereV = V
4
dsat,cv
(4.3.18)
Vds 4; 4 = 0.02V
(4.3.19)
2
Abulk ' Vcveff
Abulk '
Abulk '
2
Vcveff
12Vgsteff ,cv
(4.3.20)
Qsub
'
'
A
A
V
1
(
)
1 Abulk '
bulk
bulk
cveff
bulk
Vcveff
12Vgsteff ,cv
Below is a list of all the three partitioning schemes for the inversion
charge:
(i) The 50/50 charge partition
This is the simplest of all partitioning schemes in which the inversion
charges are assumed to be contributed equally from the source and drain
nodes.
4-12
(4.3.21)
Qs = Qd = 0.5Qinv =
Vgsteff,cv
Vcveff +
Abulk '
2
2
Vcveff
12Vgsteff,cv
y
dy
Q s = Wactive q c 1
L
active
0
Lactive
y
Q = W
dy
d
active q c
L
active
0
Lactive
(4.3.23)
Qs =
4
2
2
3
2
2
3
VgsteffCV VgsteffCV Abulk'Vcveff + VgsteffCV(Abulk'Vcveff ) (Abulk'Vcveff )
3
3
15
A '
2VgsteffCV bulk Vcveff
2
WactiveLactiveCox
(4.3.24)
Qd =
2 1
3
Wactive LactiveCox
3 5
Vgsteff cv2 Abulk' Vcveff +Vgsteff cv Abulk' Vcveff Abulk' Vcveff
2 Vgsteffcv
3
5
A '
2Vgsteffcv bulk Vcveff
) (
4-13
charges in the saturation region to the source electrode. Notice that this
charge partitioning scheme will still give drain current spikes in the linear
region and aggravate the source current spike problem.
(4.3.25)
2
V
24 Vgsteff,c
Vcveff
gsteffcv
(4.3.26)
2
V
+
Qd = Wactive Lactive Cox
Abulk '
2
4
V
V
8
gsteffcv
cveff
gsteff,c
4-14
and thus
the Vth modeling but is inadequate for CV because they assume zero charge
thickness. Numerical quantum simulation results in Figure 4-1 indicate the
significant charge thickness in all regions of the CV curves [32].
This section describes the concepts used in the charge-thichness model (CTM).
Appendix B lists all charge equations. A full report and anaylsis of the CTM model
1 .0
E
2
0.15
C g g (F /c m )
0.10
C
E
A
0 .8
0 .6
0 .4
0 .2
-4
-3
-2
-1
0
V g s (V )
T ox=30A
0.05
N sub=5e17cm
-3
B
0.00
0
20
40
60
D epth (A )
Figure 4-1. Charge distribution from numerical quantum simulations show significant
charge thickness at various bias conditions shown in the inset.
CTM is a charge-based model and therefore starts with the DC charge thicknss,
XDC. The charge thicknss introduces a capacitance in series with Cox as illustrated
in Figure 4-2, resulting in an effective Cox, Coxeff. Based on numerical selfconsistent solution of Shrodinger, Poisson and Fermi-Dirac equations, universal
and analytical XDC models have been developed. Coxeff can be expressed as
4-15
(4.4.1)
C oxeff =
C ox Ccen
Cox + C cen
where
Ccen =
si
X DC
Vgs
Poly depl.
Vgse
Cox
Cacc
Cdep
Cinv
Figure 4-2. Charge-thickness capacitance concept in CTM. Vgse accounts for the poly
depletion effect.
1
N
4-16
0.25
Vgs Vbs V fb
Tox
where XDC is in the unit of cm and (Vgs - Vbs - vfb) / Tox has a unit of MV/cm. The
model parameter acde is introduced for better fitting with a default value of 1. For
numerical statbility, (4.4.2) is replaced by (4.4.3)
(4.4.3)
X DC = X max
1
X0 +
2
X 02 + 4 x X max
where
X 0 = X max X DC x
and Xmax=Ldebye/3;
x =10-3Tox.
1.9 10
1+
2Tox
0.7
[cm]
4-17
represents the boundary conditions (the average of the electric fields at the top and
Inversion C harge Thickness (A )
the bottom of the charge layers) of the Schrodinger and the Poisson equations.
70
Tox=20A
Tox=70A
60
Tox=50A
Tox=90A
So lid - Nsub=2e16cm
50
O pen - Nsub=2e17cm
+
40
-3
-3
- Nsub=2e18cm
-3
M odel
30
20
10
-0.5
0.0
0.5
1.0
1.5
2.0
2.5
3.0
Figure 4-3. For all Tox and Nsub, modeled inversion charge thickness agrees with numerical
quantum simulations.
from 2 B [32]
(4.4.5)
1
= s 2B = t ln
+
2
moin
K
1ox t
where the model parameter moin (defaulting to 15) is introduced for better fit to
different technologies. The inversion channel charge density is therefore derived
as
4-18
(4.4.6)
Extrinsic Capacitance
Figure 4-4 illustrates the universality of CTM model by compariing Cgg of a SiON/
Ta2O5/TiN gate stack structure with an equivalent Tox of 1.8nm between data,
numerical quantum simulation and modeling [32].
10.0
Measured
7.5
Cgg (pF)
Q.M. simulation
CTM
5.0
TiN
60A Ta2O5
2.5
8A SiON
p-Si
0.0
-2
-1
Vgs (V)
Figure 4-4. Universality of CTM is demonstrated by modeling the Cgg of 1.8nm equivalent
Tox NMOSFET with SiON/Ta2O5/TiN gate stack.
2 ox t poly
ln1 +
Tox
4-19
Extrinsic Capacitance
4-20
4Vgs,overlap
CKAPPA
2
CKAPPA
Extrinsic Capacitance
(4.5.3)
1
2
Vgs,overlap = Vgs + 1 (Vgs + 1 ) + 41 , 1 = 0.02V
2
where CKAPPA is a model parameter. CKAPPA is related to the average
doping of LDD region by
CKAPPA =
2 si qN LDD
2
Cox
5 10
17
cm-3.
4V gd , overlap
CKAPPA
CKAPPA
2
(4.5.5)
V gd , overlap =
1
V gd + 1
2
(V
gd
2
+ 1 ) + 4 1 , 1 = 0.02V
4-21
Extrinsic Capacitance
4-22
5-1
Model Formulation
Name
Function
Default
Unit
nqsMod
none
elm
Elmore constant
none
5-2
Model Formulation
1 10
5-3
Model Formulation
Qdef
Vdef
icheq(t)
C=1Cfact
is determined by
drift ,
drift
and
diff .
which, in turn, is
In
diff
is expressed by
(5.3.2)
1 1
1
=
+
diff drift
Relm in strong inversoin is calculated from the channel resistance as
(5.3.3)
Relm =
5-4
Leff
elm 0Qch
Leff
elm 0Qcheq
Model Formulation
drift
is formulated as
(5.3.4)
CoxWeff Leff
elm 0Qcheq
diff =
qLeff
16 0 kT
Qd , g ,s (t )
t
5-5
Model Formulation
(5.3.7)
Qdef (t ) = Qcheq (t ) Qch (t )
and
(5.3.8a)
Qdef (t ) Qcheq (t ) Qdef (t )
=
t
t
(5.3.8b)
Qd , g , s (t )
t
= D, G, S xpart
Qdef (t )
where D,G,Sxpart are the NQS channel charge partitioning number for
terminals D, G and S, respectively; Dxpart + Sxpart = 1 and Gxpart = -1. It is
important for Dxpart and Sxpart to be consistent with the quasi-static charge
partitioning number XPART and to be equal (Dxpart = Sxpart) at Vds=0 (which
is not the case in the previous version), where the transistor operation mode
changes (between forward and reverse modes). Based on this
consideration, Dxpart is now formulated as
(5.3.9)
D xpart =
Qd
Q
= d
Q d + Q s Qcheq
which is now bias dependent. For example, the derivities of Dxpart can be
easily obtained based on the quasi-static results:
(5.3.10)
dDxpart
dVi
1
(Sxpart Cdi Dxpart Csi )
Qcheq
5-6
Model Formulation
where i represents the four terminals and Cdi and Csi are the intrinsic
capacitances calculated from the quasi-static analysis. The corresponding
values for Sxpart can be derived from the fact that Dxpart + Sxpart = 1.
In the accumulation and depletion regions, Eq. (5.3.9) is simplified as
If XPART < 0.5, Dxpart = 0.4;
Else if XPART > 0.5, Dxpart = 0.0;
Else Dxpart = 0.5;
C fact
dDxpart
dVd
dGtau
dVd
5-7
Model Formulation
5-8
6-1
Extraction Strategies
device performance quite well. Values extracted in this manner will now have
some physical relevance.
6-2
Extraction Procedure
Large W and L
Orthogonal Set of W and L
Wmin
L
Lmin
Figure 6-1. Device geometries used for parameter extraction
6-3
Extraction Procedure
6.3.2 Optimization
The optimization process recommended is a combination of NewtonRaphson's iteration and linear-squares fit of either one, two, or three
variables. This methodology was discussed by M. C. Jeng [18]. A flow
chart of this optimization process is shown in Figure 6-2. The model
equation is first arranged in a form suitable for Newton-Raphson's iteration
as shown in Eq. (6.3.1):
(6.3.1)
fexp(P10,P20, P30) fsim( P1(m) , P2(m) , P3(m) ) =
6-4
Extraction Procedure
Initial Guess of
Parameters P
Model Equations
Measured Data
(m+1)
Pi
=P
P
P
(m)
+
i
i
(m)
i
P
i
<
no
yes
STOP
To change Eq. (6.3.1) into a form that a linear least-squares fit routine can
be used (i.e. in a form of y = a + bx1 + cx2), both sides of the Eq. (6.3.1)
are divided by fsim / P1. This gives the change in P1, P1(m) , for the next
iteration such that:
6-5
Extraction Procedure
(6.3.2)
Physical Meaning
Tox
Nch
Ldrawn
Wdrawn
Xj
Junction depth
6-6
Extraction Procedure
Vth0, K1, K2
Step 2
Extracted Parameters & Fitting Target
Data
0,
U a, Ub, Uc
Step 3
Extracted Parameters & Fitting Target
Data
6-7
Extraction Procedure
Step 4
Extracted Parameters & Fitting Target
Data
Step 5
Extracted Parameters & Fitting Target
Data
Rdsw,Prwb, Wr
Rds(Rdsw, W, Vbs)
Step 6
Extracted Parameters & Fitting Target
Data
6-8
Extraction Procedure
Step 7
Extracted Parameters & Fitting Target
Data
Dvt0w, D vt1w, D vt2w
Fitting Target Exp. Data: Vth(Vbs, L, W)
Step 8
Extracted Parameters & Fitting Target
Data
K3, K3b, W0
Step 9
Extracted Parameters & Fitting Target
Data
Voff, Nfactor, Cdsc, Cdscb
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
Step 10
Extracted Parameters & Fitting Target
Data
6-9
Extraction Procedure
Cdscd
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
Step 11
Extracted Parameters & Fitting Target
Data
dWb
Fitting Target Exp. Data: Strong Inversion region Ids(Vgs, Vbs)
Step 12
Extracted Parameters & Fitting Target
Data
Step 13
Extracted Parameters & Fitting Target
Data
6-10
Extraction Procedure
B0, B1
Fitting Target Exp. Data: Isat(Vgs, Vbs)/W
Step 14
Extracted Parameters & Fitting Target
Data
dWg
Fitting Target Exp. Data: Isat(Vgs, Vbs)/W
Step 15
Extracted Parameters & Fitting Target
Data
Pscbe1, Pscbe2
Step 16
Extracted Parameters & Fitting Target
Data
6-11
Extraction Procedure
Step 17
Extracted Parameters & Fitting Target
Data
Step 18
Extracted Parameters & Fitting Target
Data
Pdibl1cb
Step 19
Extracted Parameters & Fitting Target
Data
6-12
Extraction Procedure
Step 20
Extracted Parameters & Fitting Target
Data
Etab, L)
Step 21
Extracted Parameters & Fitting Target
Data
Keta
Step 22
Extracted Parameters & Fitting Target
Data
0, 1, 0
6-13
Description
Default
Value
Vth0
K1
Unit
Notes
0.7 (NMOS)
-0.7 (PMOS)
nI-1
0.5
V1/2
nI-2
K2
none
nI-2
Vbm
-3
nI-2
Nch
1.7E17
1/cm3
nI-3
gamma1
calculated
V1/2
nI-4
gamma2
calculated
V1/2
nI-5
Vbx
calculated
nI-6
Cgso
calculated
F/m
nC-1
Cgdo
calculated
F/m
nC-2
CF
calculated
F/m
nC-3
6-14
VFB = Vth0 s K1 s
nI-2. If K1 and K2 are not given, they are calculated based on
K1 = 2 2 K 2 s Vbm
K2 =
where
s is
(1 2 )(
s Vbx s
2 s s Vbm s + Vbm
calculated by
N
s = 2Vtm0 ln ch
ni
Vtm 0 =
k BTnom
q
6-15
Eg 0
1. 5
10
Eg 0
1 2 C ox 2
2 q si
If both 1 and Nch are not given, Nch defaults to 1.7e23 m-3 and 1 is
calculated from Nch.
nI-4. If 1 is not given, it is calculated by
2q si Nch
Cox
1 =
2q si N sub
Cox
2 =
qN ch X t
= s Vbx
2 si
6-16
2 ox 4 10 7
CF =
ln 1 +
Tox
6-17
6-18
6-1
Extraction Strategies
device performance quite well. Values extracted in this manner will now have
some physical relevance.
6-2
Extraction Procedure
Large W and L
Orthogonal Set of W and L
Wmin
L
Lmin
Figure 6-1. Device geometries used for parameter extraction
6-3
Extraction Procedure
6.3.2 Optimization
The optimization process recommended is a combination of NewtonRaphson's iteration and linear-squares fit of either one, two, or three
variables. This methodology was discussed by M. C. Jeng [18]. A flow
chart of this optimization process is shown in Figure 6-2. The model
equation is first arranged in a form suitable for Newton-Raphson's iteration
as shown in Eq. (6.3.1):
(6.3.1)
fexp(P10,P20, P30) fsim( P1(m) , P2(m) , P3(m) ) =
6-4
Extraction Procedure
Initial Guess of
Parameters P
Model Equations
Measured Data
(m+1)
Pi
=P
P
P
(m)
+
i
i
(m)
i
P
i
<
no
yes
STOP
To change Eq. (6.3.1) into a form that a linear least-squares fit routine can
be used (i.e. in a form of y = a + bx1 + cx2), both sides of the Eq. (6.3.1)
are divided by fsim / P1. This gives the change in P1, P1(m) , for the next
iteration such that:
6-5
Extraction Procedure
(6.3.2)
Physical Meaning
Tox
Nch
Ldrawn
Wdrawn
Xj
Junction depth
6-6
Extraction Procedure
Vth0, K1, K2
Step 2
Extracted Parameters & Fitting Target
Data
0,
U a, Ub, Uc
Step 3
Extracted Parameters & Fitting Target
Data
6-7
Extraction Procedure
Step 4
Extracted Parameters & Fitting Target
Data
Step 5
Extracted Parameters & Fitting Target
Data
Rdsw,Prwb, Wr
Rds(Rdsw, W, Vbs)
Step 6
Extracted Parameters & Fitting Target
Data
6-8
Extraction Procedure
Step 7
Extracted Parameters & Fitting Target
Data
Dvt0w, D vt1w, D vt2w
Fitting Target Exp. Data: Vth(Vbs, L, W)
Step 8
Extracted Parameters & Fitting Target
Data
K3, K3b, W0
Step 9
Extracted Parameters & Fitting Target
Data
Voff, Nfactor, Cdsc, Cdscb
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
Step 10
Extracted Parameters & Fitting Target
Data
6-9
Extraction Procedure
Cdscd
Fitting Target Exp. Data: Subthreshold
region Ids(Vgs, Vbs)
Step 11
Extracted Parameters & Fitting Target
Data
dWb
Fitting Target Exp. Data: Strong Inversion region Ids(Vgs, Vbs)
Step 12
Extracted Parameters & Fitting Target
Data
Step 13
Extracted Parameters & Fitting Target
Data
6-10
Extraction Procedure
B0, B1
Fitting Target Exp. Data: Isat(Vgs, Vbs)/W
Step 14
Extracted Parameters & Fitting Target
Data
dWg
Fitting Target Exp. Data: Isat(Vgs, Vbs)/W
Step 15
Extracted Parameters & Fitting Target
Data
Pscbe1, Pscbe2
Step 16
Extracted Parameters & Fitting Target
Data
6-11
Extraction Procedure
Step 17
Extracted Parameters & Fitting Target
Data
Step 18
Extracted Parameters & Fitting Target
Data
Pdibl1cb
Step 19
Extracted Parameters & Fitting Target
Data
6-12
Extraction Procedure
Step 20
Extracted Parameters & Fitting Target
Data
Etab, L)
Step 21
Extracted Parameters & Fitting Target
Data
Keta
Step 22
Extracted Parameters & Fitting Target
Data
0, 1, 0
6-13
Description
Default
Value
Vth0
K1
Unit
Notes
0.7 (NMOS)
-0.7 (PMOS)
nI-1
0.5
V1/2
nI-2
K2
none
nI-2
Vbm
-3
nI-2
Nch
1.7E17
1/cm3
nI-3
gamma1
calculated
V1/2
nI-4
gamma2
calculated
V1/2
nI-5
Vbx
calculated
nI-6
Cgso
calculated
F/m
nC-1
Cgdo
calculated
F/m
nC-2
CF
calculated
F/m
nC-3
6-14
VFB = Vth0 s K1 s
nI-2. If K1 and K2 are not given, they are calculated based on
K1 = 2 2 K 2 s Vbm
K2 =
where
s is
(1 2 )(
s Vbx s
2 s s Vbm s + Vbm
calculated by
N
s = 2Vtm0 ln ch
ni
Vtm 0 =
k BTnom
q
6-15
Eg 0
1. 5
10
Eg 0
1 2 C ox 2
2 q si
If both 1 and Nch are not given, Nch defaults to 1.7e23 m-3 and 1 is
calculated from Nch.
nI-4. If 1 is not given, it is calculated by
2q si Nch
Cox
1 =
2q si N sub
Cox
2 =
qN ch X t
= s Vbx
2 si
6-16
2 ox 4 10 7
CF =
ln 1 +
Tox
6-17
6-18
A series of benchmark tests [26] have been performed to check the model robustness,
accuracy and performance. Although not all the benchmark test results are included in this
chapter, the most important ones are demonstrated.
Device Size
Bias Conditions
Notes
Figure
Number
W/L=20/5
Log scale
7-1
W/L=20/5
Linear scale
7-2
W/L=20/0.5
Log scale
7-3
W/L=20/0.5
Linear scale
7-4
W/L=20/5
Log scale
7-5
W/L=20/5
Linear scale
7-6
W/L=20/0.5
Log scale
7-7
W/L=20/0.5
Linear scale
7-8
W/L=20/5
Linear scale
7-9
7-1
Device Size
Bias Conditions
Notes
Figure
Number
W/L=20/0.5
Linear scale
7-10
W/L=20/5
Linear scale
7-11
W/L=20/0.5
Linear scale
7-12
W/L=20/0.5
Linear scale
7-13
W/L=20/5
Linear scale
7-14
W/L=20/0.5
Linear scale
7-15
W/L=20/0.5
Linear scale
7-16
7-2
1.E-02
1.E-03
Vds=3.3V
1.E-04
1.E-05
Vds=0.05V
Ids (A)
1.E-06
1.E-07
1.E-08
1.E-09
1.E-10
1.E-11
1.E-12
0.0
1.0
2.0
Vgs (V)
3.0
4.0
1.8E-03
1.6E-03
1.4E-03
Ids (A)
1.2E-03
1.0E-03
8.0E-04
6.0E-04
Vds=3.3V
4.0E-04
Vds=0.05V
2.0E-04
0.0E+00
0.0
1.0
2.0
3.0
4.0
Vgs (V)
7-3
1.0E+00
1.0E-01
1.0E-02
1.0E-03
1.0E-04
1.0E-05
1.0E-06
1.0E-07
1.0E-08
1.0E-09
1.0E-10
1.0E-11
1.0E-12
Vds=3.3V
Ids (A)
Vds=0.05V
1.0
2.0
3.0
4.0
Vgs (V)
Ids (A)
Figure 7-3. Same as Figure 7-1 but for a short channel device.
1.0E-02
9.0E-03
8.0E-03
7.0E-03
6.0E-03
5.0E-03
4.0E-03
3.0E-03
2.0E-03
1.0E-03
0.0E+00
Vds=3.3V
Vds=0.05V
0.0
1.0
2.0
3.0
4.0
Vgs (V)
Figure 7-4. Same as Figure 7-2 but for a short channel device.
7-4
1.E-03
1.E-04
Vbs=0V
1.E-05
Ids (A)
1.E-06
Vbs=-3.3V
1.E-07
1.E-08
1.E-09
1.E-10
1.E-11
1.E-12
0.0
1.0
2.0
Vgs (V)
3.0
4.0
Ids (A)
7.E-05
Vbs=-3.3V
1.E-05
0.E+00
0.0
1.0
2.0
Vgs (V)
3.0
4.0
7-5
1.E-03
Vbs=0V
1.E-04
1.E-05
Vbs=-3.3V
Ids (A)
1.E-06
1.E-07
1.E-08
1.E-09
1.E-10
1.E-11
1.E-12
0.0
1.0
2.0
Vgs (V)
3.0
4.0
Figure 7-7. Same as Figure 7-5 but for a short channel device.
5.E-04
5.E-04
4.E-04
W/L=20/0.5
Tox=9 nm
Vds=0.05V
3.E-04
Vbs=0V
Ids (A)
4.E-04
3.E-04
Vbs=-3.3V
2.E-04
2.E-04
1.E-04
5.E-05
0.E+00
0.0
1.0
2.0
Vgs (V)
3.0
4.0
Figure 7-8. Same as Figure 7-6 but for a short channel device.
7-6
30
Vds=3.3V
gm/Ids (mho/A)
25
20
15
10
5
Vds=0.05V
0
0.0
1.0
2.0
Vgs (V)
3.0
4.0
gm/Ids (mho/A)
25
20
15
Vds=3.3V
10
Vds=0.05V
5
0
0.0
1.0
2.0
Vgs (V)
3.0
4.0
Figure 7-10. Same as Figure 7-9 but for a short channel device.
7-7
35
Solid lines: Model results
Symbols: Exp. data
W/L=20/5
Tox=9 nm
Vds=0.05V
30
gm/Ids (mho/A)
25
20
15
Vbs=-3.3V
10
5
Vbs=0V
0
0.0
1.0
2.0
Vgs(V)
3.0
4.0
35
Solid lines: Model results
Symbols: Exp. data
W/L=20/0.5
Tox=9 nm
Vds=0.05V
30
Gm/Id
25
20
15
10
5
Vbs=-1.98V
Vbs=0V
0
0.0
1.0
2.0
Vgs (V)
3.0
4.0
Figure 7-12. Same as Figure 7-11 but for a short channel device.
7-8
8.E-05
7.E-05
Ids (A)
6.E-05
5.E-05
Solid lines:
BSIM3v3
Dotted lines:
BSIM3v2
W/L=20/0.5
4.E-05
Vgs =0.6V
3.E-05
2.E-05
Vgs=0.55V
1.E-05
Vgs=0.5V
0.E+00
0.0
0.2
0.4
Vds (V)
0.6
0.8
1.2E-03
Ids (A)
Vgs=3.3V
W/L=20/5
Tox=9 nm
Vbs=0V
1.4E-03
1.0E-03
8.0E-04
6.0E-04
4.0E-04
2.0E-04
Vgs=1.15V
0.0E+00
0.0
0.5
1.0
1.5
2.0
Vds (V)
2.5
3.0
3.5
7-9
9.E-03
8.E-03
7.E-03
Vgs=3.3V
W/L=20/0.5
Tox=9nm
Vbs=0V
Ids (A)
6.E-03
5.E-03
4.E-03
3.E-03
2.E-03
Vgs=1.084V
1.E-03
0.E+00
0.0
0.5
1.0
1.5
2.0
Vds (V)
2.5
3.0
3.5
Figure 7-15. Same as Figure 7-14 but for a short channel device.
2.0E+05
1.8E+05
1.6E+05
1.4E+05
1.2E+05
1.0E+05
8.0E+04
6.0E+04
4.0E+04
2.0E+04
0.0E+00
Vgs=1.084V
Rout (Ohm)
W/L=20/0.5
Tox=9 nm
Vbs=0V
Vgs=3.3V
0.0
1.0
2.0
Vds (V)
3.0
4.0
7-10
Symbols
used in
SPICE
Description
Default
Unit
Noia
noia
Noise parameter A
(NMOS) 1e20
(PMOS) 9.9e18
none
Noib
noib
Noise parameter B
(NMOS) 5e4
(PMOS) 2.4e3
none
Noic
noic
Noise parameter C
(NMOS) -1.4e-12
(PMOS) 1.4e-12
none
Em
em
Saturation field
4.1e7
V/m
Af
af
none
Ef
ef
none
Kf
kf
none
8-1
Flicker Noise
8.1.2 Formulations
1.
Noise density =
K f I ds
af
Cox Leff f ef
(8.2)
Noise density =
+
14
2
10
Nl + 2 10
q 2 kTeff I ds
2
Cox Leff f
ef
Vtm I ds Lclm
Weff Leff f ef 108
2
(N
+ 2 1014
where Vtm is the thermal voltage, eff is the effective mobiity at the given
bias condition, and Leff and Weff are the effective channel length and width,
respectively. The parameter N0 is the charge density at the source side
given by
(8.3)
N0 =
8-2
Flicker Noise
(8.4)
Nl =
Lclm is the channel length reduction due to channel length modulation and
given by
(8.5)
Vds Vdsat
+ Em
0 (otherwise)
Esat =
2 vsat
eff
where
Litl = 3 X jTox
Otherwise
(8.6)
Noise density=
Slimit Swi
Slimit + Swi
Where, Slimit is the flicker noise calculated at Vgs = Vth + 0.1 and Swi is given
by
8-3
(8.7)
8kBT
(Gm + Gmbs + Gds )
3
where Gm, Gmbs and Gds are the transconductances.
2.
4 k B T eff
Leff
Q inv
Qinv is the inversion channel charge computed from the capacitance models
(capMod = 0, 1, 2 or 3).
8-4
Thermal noise
model
SPICE2
SPICE2
BSIM3v3
BSIM3v3
BSIM3v3
SPICE2
SPICE2
BSIM3v3
8-5
8-6
V
Ibs = Isbs exp bs 1 + GminVbs
NVtm
where
NV tm = NJ KbT q ;
emission coefficient.
Case 2 - ijth is non-zero: Current limiting feature.
9-1
Diode IV Model
V
Ibs = Isbs exp bs 1 + GminVbs
NVtm
otherwise
(9.3)
Ibs = ijth+
ijth+ Isbs
(Vbs Vjsm) + GminVbs
NVtm
I sbs = As J s + Ps J ssw
where Js is the junction saturation current density, AS is the source junction
area, Jssw is the sidewall junction saturation current density, Ps is the
perimeter of the source junction. Js and Jssw are functions of temperature
and can be written as
(9.5)
Eg 0 Eg
T
+ XTI ln
Tnom
Vtm0 Vtm
J s = J s 0 exp
NJ
9-2
Diode IV Model
(9.6)
Eg 0 Eg
T
+ XTI ln
T
Vtm0 Vtm
nom
J ssw = J s 0 sw exp
NJ
The energy band-gap Eg0 and Eg at the nominal and operating temperatures
are expressed by (9.7a) and (9.7b), repectively:
(9.7a)
E g 0 = 1.16
7.02 10 4 Tnom
Tnom + 1108
(9.7b)
E g = 1 .16
7 .02 10 T
T + 1108
In the above derivatoins, Js0 is the saturation current density at Tnom. If Js0 is
not given,
J s0 = 1 10
9-3
Diode IV Model
(9.9)
V
Ibd = I sbd exp bd 1 + GminVbd
NVtm
Case 2 - ijth is non-zero: Current limiting feature.
If Vbd < Vjdm
(9.10)
V
Ibd = I sbd exp bd 1 + GminVbd
NVtm
otherwise
(9.11)
I bd = ijth +
ijth + I sbd
(Vbd Vjdm) + GminVbd
NVtm
I sbd = Ad J s + Pd J ssw
where Ad is the drain junction area and Pd is the perimeter of the drain
junction. If Isbd is not positive, Ibd is calculated by
(9.13)
I bd = Gmin Vbd
9-4
Symbols
used in
SPICE
Description
Default
Unit
Js0
js
1e-4
A/m2
Js0sw
jssw
A/m
NJ
nj
Emission coefficient
none
XTI
xti
3.0
none
ijth
ijth
Limiting current
0.1
9-5
Otherwise
(9.15)
Capbs = As C jbs + Ps C jbsswg
where Cjbs is the unit bottom area capacitance of the S/B junction,
Cjbssw is the periphery capacitance of the S/B junction along the
field oxide side, and Cjbsswg is the periphery capacitance of the S/B
junction along the gate oxide side.
If Cj is larger than zero, Cjbs is calculated by
if Vbs < 0
(9.16)
V
C jbs = C j 1 bs
Pb
M j
otherwise
(9.17)
V
C jbs = C j 1 + M j bs
Pb
9-6
(9.18)
V
C jbssw = C jsw 1 bs
Pbsw
M jsw
otherwise
(9.19)
V
C jbssw = C jsw1 + M jsw bs
Pbsw
V
C jbsswg = C jswg1 bs
P
bswg
otherwise
(9.21)
V
C jbsswg = C jswg1 + M jswg bs
Pbswg
9-7
If Pd > Weff
(9.22)
Capbd = Ad C jbd + (Pd Weff )C jbdsw + Weff C jbdswg
Otherwise
(9.23)
Capbd = Ad C jbd + Pd C jbdswg
where Cjbd is the unit bottom area capacitance of the D/B junction,
Cjbdsw is the periphery capacitance of the D/B junction along the
field oxide side, and Cjbdswg is the periphery capacitance of the D/B
junction along the gate oxide side.
If Cj is larger than zero, Cjbd is calculated by
if Vbd < 0
(9.24)
C jbd
V
= C j 1 bd
Pb
M j
otherwise
(9.25)
V
C jbd = C j 1 + M j bd
Pb
9-8
(9.26)
V
C jbdsw = C jsw 1 bd
Pbsw
M jsw
otherwise
(9.27)
V
C jbdsw = C jsw1 + M jsw bd
Pbsw
V
Cjbdswg = Cjswg1 bd
P
bswg
otherwise
(9.29)
V
C jbdswg = C jswg 1 + M jswg bd
Pbswg
9-9
(9.30b)
C jsw (T ) = C jsw (Tnom ) (1 + tcjsw T )
(9.30c)
C jswg (T ) = C jswg (Tnom ) (1 + tcjswg T )
9-10
(9.32)
T = T Tnom
The six new model parameters in the above equations are described
in Table 9-2.
Symbols
used in
equation
Symbols
used in
SPICE
Cj
Description
Default
Unit
cj
5e-4
F/m2
Mj
mj
0.5
none
Pb
pb
1.0
Cjsw
cjsw
5e-10
F/m
Mjsw
mjsw
0.33
none
Pbsw
pbsw
1.0
Cjswg
cjswg
Cjsw
F/m
Mjswg
mjswg
Mjsw
none
Pbswg
pbswg
Pbsw
tpb
tpb
Temperature coefficient of Pb
0.0
V/K
tpbsw
tpbsw
0.0
V/K
9-11
Symbols
used in
equation
Symbols
used in
SPICE
Description
Default
Unit
tpbswg
tpbswg
0.0
V/K
tcj
tcj
Temperature coefficient of Cj
0.0
1/K
tcjsw
tcjsw
0.0
1/K
tcjswg
tcjswg
0.0
1/K
9-12
Symbols
used in
SPICE
level
version
binUnit
paramChk
mobMod
capMod
nqsMod
noiMod
Description
Default
Unit
8
3.2
1
False
none
none
none
none
1
3
0
1
none
none
none
none
Note
A.2 DC Parameters
A-1
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Vth0
vth0
Description
Default
Unit
Note
0.7
(NMOS)
nI-1
Calculated
nI-1
-0.7
(PMOS)
VFB
vfb
Flat-band voltage
K1
k1
0.5
V1/2
nI-2
K2
k2
0.0
none
nI-2
K3
k3
80.0
none
K3b
k3b
0.0
1/V
W0
w0
2.5e-6
Nlx
nlx
1.74e-7
Vbm
vbm
-3.0
Dvt0
dvt0
2.2
none
Dvt1
dvt1
0.53
none
Dvt2
dvt2
-0.032
1/V
Dvt0w
dvt0w
1/m
Dvt1w
dvtw1
5.3e6
1/m
A-2
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Dvt2w
Description
Default
Unit
dvt2w
-0.032
1/V
u0
670.0
250.0
cm2/Vs
Ua
ua
2.25E-9
m/V
Ub
ub
5.87E-19
(m/V)2
Uc
uc
mobMod
=1, 2:
-4.65e-11
mobMod
=3:
-0.046
m/V2
1/V
sat
vsat
8.0E4
m/sec
A0
a0
1.0
none
Ags
ags
0.0
1/V
B0
b0
0.0
B1
b1
0.0
Keta
keta
-0.047
1/V
A1
a1
0.0
1/V
A2
a2
1.0
none
Note
A-3
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Rdsw
rdsw
Prwb
prwb
Prwg
Default
Unit
0.0
-mWr
V-1/2
prwg
1/V
Wr
wr
1.0
none
Wint
wint
0.0
Lint
lint
0.0
dWg
dwg
0.0
m/V
dWb
dwb
0.0
m/V1/2
Voff
voff
-0.08
Nfactor
nfactor
1.0
none
Eta0
eta0
0.08
none
Etab
etab
-0.07
1/V
Dsub
dsub
drout
none
Cit
cit
0.0
F/m2
Cdsc
cdsc
2.4E-4
F/m2
A-4
Description
Note
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Cdscb
cdscb
Cdscd
Description
Default
Unit
0.0
F/Vm2
cdscd
0.0
F/Vm2
Pclm
pclm
1.3
none
Pdiblc1
pdiblc1
0.39
none
Pdiblc2
pdiblc2
0.0086
none
Pdiblcb
pdiblcb
1/V
Drout
drout
0.56
none
Pscbe1
pscbe1
4.24E8
V/m
Pscbe2
pscbe2
1.0E-5
m/V
Pvag
pvag
0.0
none
delta
0.01
Ngate
ngate
cm-3
alpha0
m/V
alpha1
0.0
1/V
beta0
30
Note
nI-3
A-5
Symbols
used in
equation
Symbols
used in
SPICE
Rsh
Description
Default
Unit
Note
rsh
0.0
/
square
Js0sw
jssw
0.0
A/m
Js0
js
1.0E-4
A/m2
ijth
ijth
0.1
nI-3
Default
0.0
Unit
none
Note
Symbols
used in
equation
Symbols
used in
SPICE
Xpart
xpart
CGS0
cgso
calculated
F/m
nC-1
CGD0
cgdo
calculated
F/m
nC-2
CGB0
cgbo
0.0
F/m
Cj
cj
5.0e-4
F/m2
A-6
Description
Symbols
used in
equation
Symbols
used in
SPICE
Mj
mj
0.5
Mjsw
mjsw
0.33
none
Cjsw
cjsw
5.E-10
F/m
Cjswg
cjswg
Cjsw
F/m
Mjswg
mjswg
Mjsw
none
Pbsw
pbsw
1.0
Pb
Pbswg
pb
pbswg
1.0
Pbsw
V
V
CGS1
cgs1
0.0
F/m
CGD1
cgd1
0.0
F/m
CKAPPA
ckappa
0.6
Cf
cf
calculated
F/m
CLC
clc
0.1E-6
CLE
cle
0.6
none
Description
Default
Unit
Note
nC-3
A-7
NQS Parameters
Symbols
used in
equation
Symbols
used in
SPICE
DLC
dlc
DWC
Description
Default
Unit
Note
lint
dwc
wint
Vfbcv
vfbcv
-1
noff
noff
CV parameter in Vgsteff,CV
for weak to strong inversion
1.0
none
nC-4
voffcv
voffcv
CV parameter in Vgsteff,CV
for week to strong inversion
0.0
nC-4
acde
acde
1.0
m/V
nC-4
moin
moin
15.0
none
nC-4
Default
Unit
Note
none
Symbols Symbols
used in
used in
Description
equation SPICE
Elm
elm
Elmore constant of the channel
A-8
dW and dL Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Wl
wl
Wln
Description
Default
Unit
0.0
mWln
wln
1.0
none
Ww
ww
0.0
mWwn
Wwn
wwn
1.0
none
Wwl
wwl
0.0
mWwn+Wln
Ll
ll
0.0
mLln
Lln
lln
1.0
none
Lw
lw
0.0
mLwn
Lwn
lwn
1.0
none
Lwl
lwl
0.0
mLwn+Lln
Llc
Llc
Ll
mLln
Note
A-9
Temperature Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Lwc
Lwc
Lwlc
Description
Default
Unit
Lw
mLwn
Lwlc
Lwl
mLwn+Lln
Wlc
Wlc
Wl
mWln
Wwc
Wwc
Coefficient of widthdependence
for CV channel width offset
Ww
mWwn
Wwlc
Wwlc
Wwl
mWln+Wwn
Note
Symbols
used in
equation
Symbols
used in
SPICE
Tnom
te
A-10
Description
Default
Unit
tnom
27
oC
ute
-1.5
none
Note
Temperature Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Kt1
kt1
Kt1l
kt1l
Kt2
Description
Default
Unit
-0.11
0.0
Vm
kt2
0.022
none
Ua1
ua1
4.31E-9
m/V
Ub1
ub1
-7.61E18
(m/V)2
Uc1
uc1
mobMod=1,
2:
m/V2
Note
-5.6E-11
mobMod=3:
1/V
-0.056
At
at
3.3E4
m/sec
Prt
prt
0.0
-m
At
at
3.3E4
m/sec
nj
nj
1.0
none
XTI
xti
3.0
none
A-11
Symbols
used in
equation
Symbols
used in
SPICE
tpb
Description
Default
Unit
tpb
Temperature coefficient of Pb
0.0
V/K
tpbsw
tpbsw
Temperature coefficient of
Pbsw
0.0
V/K
tpbswg
tpbswg
Temperature coefficient of
Pbswg
0.0
V/K
tcj
tcj
Temperature coefficient of Cj
0.0
1/K
tcjsw
tcjsw
Temperature coefficient of
Cjsw
0.0
1/K
tcjswg
tcjswg
Temperature coefficient of
Cjswg
0.0
1/K
Note
Symbols
used in
equation
Symbols
used in
SPICE
Noia
noia
Description
Noise parameter A
Default
Unit
(NMOS) 1e20
none
Note
(PMOS) 9.9e18
Noib
noib
Noise parameter B
(NMOS) 5e4
none
(PMOS) 2.4e3
Noic
noic
Noise parameter C
(NMOS) -1.4e12
none
(PMOS) 1.4e-12
Em
A-12
em
Saturation field
4.1e7
V/m
Process Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Af
af
Ef
Kf
Description
Default
Unit
none
ef
none
kf
none
Note
Symbols
used in
equation
Symbols
used in
SPICE
Tox
tox
Toxm
toxm
Xj
xj
Description
Default
Unit
1.5e-8
Tox
Junction Depth
1.5e-7
gamma1
calculated
V1/2
nI-5
gamma2
calculated
V1/2
nI-6
Nch
nch
1.7e17
1/cm3
nI-4
Nsub
nsub
6e16
Vbx
vbx
calculated
1/cm3
V
nI-7
Xt
xt
Doping depth
1.55e-7
Note
nI-3
A-13
Symbols
used in
equation
Symbols
used in
SPICE
Lmin
lmin
Lmax
Description
Default
Unit
0.0
lmax
1.0
Wmin
wmin
0.0
Wmax
wmax
1.0
binUnit
binunit
1.0
none
Note
VFB = Vth0 s K1 s
nI-2. If K1 and K2 are not given, they are calculated based on
K1 = 2 2 K 2 s Vbm
A-14
K2 =
(1 2 )(
s Vbx s
2 s s Vbm s + Vbm
where s is calculated by
N
s = 2Vtm0 ln ch
ni
Vtm 0 =
k BTnom
q
1. 5
Eg 0
Tnom
ni = 1.45 10
exp 21.5565981
300
.
15
2
V
tm 0
10
Eg 0 = 1.16
A-15
N ch =
If both 1 and Nch are not given, Nch defaults to 1.7e23 m-3 and 1 is
calculated from Nch.
nI-5. If 1 is not given, it is calculated by
2q si Nch
1 =
Cox
2q si N sub
2 =
Cox
qN ch X t
= s Vbx
2 si
nC-1. If Cgso is not given, it is calculated by
if (dlc is given and is greater 0),
Cgso = dlc * Cox - Cgs1
if (Cgso < 0)
Cgso = 0
else Cgso = 0.6 Xj * Cox
nC-2. If Cgdo is not given, it is calculated by
if (dlc is given and is greater than 0),
A-16
2 ox 4 10 7
ln 1 +
Tox
nC-4.
If (acde < 0.4) or (acde > 1.6), a warning message will be given.
If (moin < 5.0) or (moin > 25.0), a warning message will be given.
If (noff < 0.1) or (noff > 4.0), a warning message will be given.
If (voffcv < -0.5) or (voffcv > 0.5), a warning message will be given.
A-17
A-18
Tox
Nlx
+ K1ox 1 +
1 s + (K 3 + K 3bVbseff )
s
Weff '+W0
Leff
W 'L
W 'L
(Vbi s )
L
L
L
L
Vth0ox = Vth0 K1 s
K 1ox = K 1
Tox
Toxm
K2ox = K2
Tox
Toxm
B-1
I-V Model
lt =
ltw =
2si( s Vbseff )
qNch
Xdep 0 =
2sis
qNch
(1=0.001)
K
Vbc = 0.9 s 1 2
4K 2
Vbi = vt ln(
NchNDS
)
ni 2
Vgsteff
B-2
Vgs Vth
)
2 n vt ln 1 + exp(
2 n vt
=
2s
Vgs Vth 2Voff
exp(
)
1 + 2 n COX
2 n vt
qsiNch
I-V Model
n = 1 + Nfactor
Cd
+
Cox
Leff
Leff
2lt
lt
Cox
Cd =
Cit
Cox
si
Xdep
B.1.3 Mobility
For mobMod=1
eff =
o
Vgsteff + 2Vth 2
Vgsteff + 2Vth
1 + (Ua + Uc Vbseff )(
) + Ub (
)
TOX
TOX
For mobMod=2
eff =
o
Vgsteff 2
Vgsteff
1 + (Ua + UcVbseff )(
) + Ub (
)
TOX
TOX
For mobMod=3
eff =
o
Vgsteff + 2Vth 2
Vgsteff + 2Vth
1 + [Ua (
) + Ub (
) ](1 + UcVbseff )
TOX
TOX
B-3
I-V Model
Vdsat
b b 2 4ac
=
2a
a = A bulk 2WeffsatCoxR DS + (
1
1) A bulk
Vdsat =
Leff
A0Leff
B0
K1ox
Abulk = 1+
1 AgsVgsteff
W '+B 1+ KetaV
bseff
2 s Vbseff Leff + 2 XJ Xdep
Leff + 2 XJ Xdep eff 1
B-4
I-V Model
Esat =
2sat
eff
Vdseff = Vdsat
1
Vdsat Vds + (Vdsat Vds )2 + 4Vdsat
2
Idso ( Vdseff )
1 + Vds Vdseff 1 + Vds Vdseff
RdsIdso( Vdseff )
VA
VASCBE
1+
Vdseff
Ids =
Vdseff
)Vdseff
2(Vgsteff + 2vt )
/ ( EsatLeff )]
WeffeffCoxVgsteff (1 Abulk
Idso =
Leff [1 + Vdseff
VA = VAsat + (1 +
VACLM =
1
1
PvagVgsteff
+
)(
) 1
E satLeff VACLM VADIBLC
AbulkEsatLeff + Vgsteff
(Vds Vdseff )
PCLMAbulkEsat litl
B-5
I-V Model
VADIBLC =
(Vgsteff + 2 vt )
AbulkVdsat
rout (1 + PDIBLCBVbseff )
AbulkVdsat + Vgsteff + 2vt
Leff
Leff
1
VASCBE
Pscbe 2
Pscbe1 litl
exp
Vds Vdseff
Leff
AbulkVdsat
]
2(Vgsteff + 2vt )
2 / 1 + RDSsatCoxWeffAbulk
litl =
si Tox X j
ox
I sub =
B-6
0 + 1 Leff
Leff
(V
ds
0
V dseff )exp
V V
ds
dseff
I ds 0
1 + R ds I ds 0
V dseff
V ds V dseff
1 +
VA
I-V Model
2
Ngate
qN
poly X poly
1
poly = X poly E poly =
2
2 si
a=
Vgs_ eff
ox 2
2q si N gateTox
2
2
2ox (Vgs VFB s )
q si NgateTox
= VFB + s +
1
1+
2
ox2
q si NgateTox
Weff = Wdrawn 2 dW
B-7
I-V Model
Wl
Ww
W
+ Wwn
+ W ln wl Wwn
W ln
L
W
L W
dL = Lint +
Ll
L
Lw
+ Lwn
+ L ln wl Lwn
L ln
W
L
L W
B.1.10Source/Drain Resistance
Rds =
(10 W ')
))
Wr
eff
B.1.11Temperature Effects
o(T ) = o(Tnorm)(
T te
)
Tnorm
B-8
T
Tnorm
1)
Leff = DLC +
Weff = DWC+
Llc Lwc
Lwlc
+ Lwn + L ln Lwn
L ln
L
W
L W
Wlc Wwc
Wwlc
+ Wwn + W ln Wwn
W ln
L
W
L W
B-9
Qoverlap, s
Wactive
= CGS0Vgs
= CGS 0 V gs +
4V gs
CKAPPA CGS 1
1+ 1
2
CKAPPA
Else
Qoverlap, s
Wactive
Qoverlap,s
Wactive
4Vgs,overlap
CKAPPA
2
CKAPPA
1
2
Vgs,overlap = Vgs + 1 (Vgs + 1 ) + 41 , 1 = 0.02
B-10
Qoverlap,d
Wactive
= CGD0Vgd
Qoverlap,d
Wactive
= CGD0 Vgs +
4Vgd
CKAPPA CGD1
1+ 1
2
CKAPPA
Else
Q overlap , d
W active
4Vgd,overlap
CKAPPA
= CGD0 Vgd + CGD1Vgd Vgd,overlap
1+ 1
2
CKAPPA
1
2
Vgd ,overlap = Vgd + 1 (Vgd + 1 ) + 4 1 , 1 = 0.02
B-11
Qsub = Qg
Qinv = 0
b. Subthreshold region (Vgs < Vth)
K
Qsub0 = WactiveLactiveCox 1ox
2
4(V V V )
1 + 1 + gs fbcv bs
2
K1ox
Qg = Qb
B-12
Qinv = 0
c. Strong inversion (Vgs > Vth)
Vdsat , cv =
Vgs Vth
Abulk '
CLC CLE
Abulk ' = Abulk 0 1 +
Leff
K1ox
Abulk0 = 1 +
2 s Vbseff
A0 Leff
B0
1
L +2 X X
Weff '+B1 1 + KetaVbseff
J
dep
eff
2
Vds
Abulk'Vds
A 'V
2
12Vgs Vth bulk ds
B-13
]
Qb = Wactive Lactive Cox [ Vfb Vth + s +
Abulk '
2
Vds )
12(Vgs Vth
2
Vdsat
)
3
1
Qs = Qd = Wactive Lactive Cox (Vgs Vth )
3
B-14
Vds
+
2
]
Abulk '
2
Vds )
12(Vgs Vth
2
+
Abulk ' Vds [
A '
2
2
(Vgs Vth bulk Vds)2
Qs = (Qg + Qb + Qd )
otherwise
Vdsat
)
3
B-15
Qd =
4
Wactive Lactive Cox (Vgs Vth )
15
Qs = ( Qg + Qb + Q d )
Vds
+
2
B-16
A '
2
4
Qs = (Qg + Qb + Qd )
otherwise
Vdsat
)
3
Qd = 0
Qs = (Q g + Qb )
(2) capMod = 1
The flat-band voltage Vfb is calculated from
B-17
where the bias dependences of Vth given in Section B.1.1 are not
considered in calculating Vfb for capMod = 1.
if (Vgs < Vfb + Vbs+ Vgsteffcv)
else
Qg1 = WactiveLactiveCox
2
4(Vgs V fb Vgsteff , CV Vbseff )
K1ox
1 + 1 +
2
2
K1ox
Qb 1 = Qg 1
Vdsat ,cv =
Vgsteffcv
Abulk '
CLC CLE
K1ox
Abulk0 = 1 +
2 s Vbseff
A0 Leff
B0
1
+
L +2 X X
Weff '+B1 1 + KetaVbseff
J
dep
eff
B-18
V gs Vth voffcv
V gsteff ,cv = noff nv t ln1 + exp
noff
nv
if (Vds <=Vdsat)
2
Abulk ' Vds
Vds
+
Qg = Qg 1 + Wactive Lactive Cox Vgsteff cv
Abulk '
12 Vgsteff cv
Vds
A
A
V
1
'
'
(
)
A
1
'
bulk
bulk
ds
bulk
bulk
Vds
12 Vgsteffcv
2
(i) 50/50 Channel-charge Partition
Qs = Qd =
W active L active C ox
2
2
2
A bulk ' V ds
V gsteff cv A bulk ' V ds +
A bulk '
V ds
12 V gsteffcv
B-19
Qs =
4
2
2
2
3
V
3
Vgstefcvf 2 ( Abulk ' Vds ) + Vgsteffcv ( Abulk ' Vds ) ( Abulk ' Vds )
gsteffcv
3
3
15
Qd = (Qg + Qb + Qs )
(iii) 0/100 Channel-charge Partition
2
V
A
V
'
(
Abulk ' Vds
gstefcv
bulk
ds )
Vds
24 Vgsteffcv
Qd = (Qg + Qb + Qs )
if (Vds > Vdsat)
Vdsat
Qg = Qg 1 + Wactive Lactive Cox Vgsteff cv
(V
gsteffcv
Vdsat
B-20
Qs = Qd =
Qs =
Qd = (Qg + Qb + Qs )
(iii) 0/100 Channel-charge Partition
2Vgstefcv
3
Qd = (Qg + Qb + Qs )
(3) capMod = 2
The flat-band voltage Vfb is calculated from
B-21
where the bias dependences of Vth given in Section B.1.1 are not
considered in calculating Vfb for capMod = 2.
Q g = (Q inv + Q acc + Q sub 0 + Q sub )
Q inv = Q s + Q d
Q sub0
2
4(V gs V FBeff V gsteff ,CV Vbseff )
K 1ox
= Wactive LactiveC ox
1+ 1+
2
2
K 1ox
V dsat , cv =
Vgsteff,cv
gstefcvf
A bulk '
CLC CLE
Abulk ' = Abulk 0 1 +
L
active
B-22
K1ox
Abulk0 = 1 +
2 s Vbseff
A0 Leff
B0
1
+
1 + KetaV
L +2 X X
'
+
W
B
1
eff
bseff
J
dep
eff
noff
nv
t
2
2
Abulk '
12 Vgsteff cv
Vcveff
Qsub
2
1 A '
(1 Abulk ' )Abulk ' Vcveff
bulk
= Wactive Lactive Cox
Vcveff
A '
B-23
2
2
Abulk ' Vcveff
Wactive Lactive Cox
Abulk '
. Qinv =
Qs = Qd = 05
V cv
Vcveff +
gsteff
Abulk
2
2
12Vgsteffcv
Vcveff
Qs =
Qd =
2
3
Wactive LactiveCox
4
2
2
3
2
Vgsteffc
Abulk' Vcveff
gstefcvf Abulk ' Vcveff + Vgsteff Abulk ' Vcveff
2 Vgsteffcv
3
3
15
A '
2
3
Wactive LactiveCox
5
1
2
Abulk ' Vcveff
Vgsteffcv3 Vgsteffc
gsteff cv Abulk ' Vcveff + Vgsteff cv Abulk ' Vcveff
2
3
5
A '
2Vgsteffcv bulk Vcveff
2
V
'
A
V
'
A
V
gsteffcv
bulk
cveff
gstefcvf
bulk
cveff
24 Vgsteffcv
Vcveff
2
V
'
A
V
3
'
A
V
bulk
cveff
gsteffcv
bulk
cveff
+
Qd = Wactive Lactive Cox
Abulk '
4
2
8 Vgsteffcv
Vcveff
B-24
V gbacc =
1
V0 + V02 + 4 3V fb
2
V0 = V fb + Vbseff Vgs 3
Coxeff =
C cen =
Cox Ccen
Cox + Ccen
si
X DC
B-25
moin K 1ox t
Qsub0 = WLCoxeff
K1ox
2
Vcveff = Vdsat
2
K1ox
1
V1 + V12 + 4 3Vdsat
2
V1 = Vdsat Vds 3
V dsat =
V gsteff , cv
Abulk '
2
2
12 Vgsteff,cv
B-26
2
1 A '
Vcveff
Abulk 'Vcveff
2
12 V gsteff ,cv
2 2
'
WLC
A
V
1
oxeff
bulk
cveff
Vgsteff,cv 1 Abulk'Vcveff +
QS = QD = Qinv =
Abulk'Vcveff
2
2
2
12 Vgsteff,cv
QS =
QD =
2
2
3 4
2
2
3
(Vgsteff,cv ) 3 (Vgsteff,cv ) Abulk'Vcveff + 3 (Vgsteff,cv )(Abulk'Vcveff) 15(Abulk'Vcveff)
A 'V
WLCoxeff
3 5
2
2 1
3
(Vgsteff,cv ) 3(Vgsteff,cv ) Abulk'Vcveff+(Vgsteff,cv )(Abulk'Vcveff) 5(Abulk'Vcveff)
A 'V
2Vgsteff,cv bulk cveff
2
WLC
oxeff
QS =
WLCoxeff
2
2
2
12 Vgsteff,cv
B-27
QD =
WLCoxeff
2
B-28
APPENDIX C: References
[1] G.S. Gildenblat, VLSI Electronics: Microstructure Science, p.11, vol. 18, 1989.
[2] Muller and Kamins, Devices Electronics for Integrated Circuits, Second Edition.
[3] J. H. Huang, Z. H. Liu, M. C. Jeng, K. Hui, M. Chan, P. K. Ko and C. Hu., BSIM3
Version 2.0 Users Manual, March 1994.
[4] J.A. Greenfield and R.W. Dutton, "Nonplanar VLSI Device Analysis Using the
Solution of Poisson's Equation," IEEE Trans. Electron Devices, vol. ED-27, p.1520,
1980.
[5] H.S. Lee. "An Analysis of the Threshold Voltage for Short-Channel IGFET's," SolidState Electronics, vol.16, p.1407, 1973.
[6] G.W. Taylor, "Subthreshold Conduction in MOSFET's," IEEE Trans. Electron
Devices, vol. ED-25, p.337, 1978.
[7] T. Toyabe and S. Asai, "Analytical Models of Threshold Voltage and Breakdown
Voltage of Short-Channel MOSFET's Derived from Two-Dimensional Analysis,"
IEEE J. Solid-State Circuits, vol. SC-14, p.375, 1979.
[8] D.R. Poole and D.L. Kwong, "Two-Dimensional Analysis Modeling of Threshold
Voltage of Short-Channel MOSFET's," IEEE Electron Device Letter, vol. ED-5,
p.443, 1984.
C-1
[9] J.D. Kendall and A.R. Boothroyd, "A Two-Dimensional Analytical Threshold Voltage
Model for MOSFET's with Arbitrarily Doped Substrate," IEEE Electron Device
Letter, vol. EDL-7, p.407, 1986.
[10] Z.H. Liu, C. Hu, J.H. Huang, T.Y. Chan, M.C. Jeng, P.K. Ko, and Y.C. Cheng,
"Threshold Voltage Model For Deep-Submicrometer MOSFETs,"
IEEE Tran.
C-2
C-3
[27] C. L. Huang and G. Sh. Gildenblat, "Measurements and Modeling of the n-channel
MOSFET Inversion Layer Mobility and Device Characteristics in the Temperature
Range 60-300 K," IEEE Tran. on Electron Devices, vol. ED-37, no.5, pp. 12891300, 1990.
[28] D. S. Jeon, et al, IEEE Tran. on Electron Devices, vol. ED-36, no. 8, pp1456-1463,
1989.
[29] S. M. Sze, Physics of Semiconductor Devices, 2nd Edition.
[30] P. Gray and R. Meyer, Analysis and Design of Analog Integrated Circuits, Second
Edition.
[31] R. Rios, N. D. Arora, C.-L. Huang, N. Khalil, J. Faricelli, and L. Gruber, A physical
compact MOSFET model, including quantum mechanical effects, for statistical
circuit design applications, IEDM Tech. Dig., pp. 937-940, 1995.
[32] Weidong Liu, Xiaodong Jin, Ya-Chin King, and Chenming Hu, An efficient and
accurate compact model for thin-oxide-MOSFET intrinsic capacitance considering
the finite charge layer thickness, IEEE Trans. on Electron Devices, vol. ED-46,
May, 1999.
[33] Mansun Chan, et al, "A Relaxation time Approach to Model the Non-Quasi-Static
Transient Effects in MOSFETs," IEDM, 1994 Technical Digest, pp. 169-172, Dec.
1994.
[34] P. K. Ko, Hot-electron Effects in MOSFETs, Ph. D Dissertation, University of
California, Berkeley, 1982
C-4
[35] K.K. Hung et al, A Physics-Based MOSFET Noise Model for Circuit Simulators,
IEEE Transactions on Electron Devices, vol. 37, no. 5, May 1990.
[36] K.K. Hung et al, A Unified Model for the Flicker Noise in Metal-Oxide
Semiconductor Field-Effect Transistors, IEEE Transactions on Electron Devices,
vol. 37, no. 3, March 1990.
[37] T.P. Tsividis, Operation and Modeling of the MOS Transistor, McGraw-Hill,
New York, 1987.
C-5
C-6
Below is the information on parameter binning regarding which model parameters can or
cannot be binned. All those parameters which can be binned follow this implementation:
P = P0 +
PL
P
PP
+ W +
Leff Weff Leff Weff
For example, for the parameter k1: P0 = k1, PL = lk1, PW = wk1, PP = pk1. binUnit is a
bining unit selector. If binUnit = 1, the units of Leff and Weff used in the binning equation
above have the units of microns; therwise in meters.
For example, for a device with Leff = 0.5m and Weff = 10m. If binUnit = 1, the parameter
values for vsat are 1e5, 1e4, 2e4, and 3e4 for vsat, lvsat, wvsat, and pvsat, respectively.
Therefore, the effective value of vsat for this device is
vsat = 1e5 + 1e4/0.5 + 2e4/10 + 3e4/(0.5*10) = 1.28e5
To get the same effective value of vsat for binUnit = 0, the values of vsat, lvsat, wvsat, and
pvsat would be 1e5, 1e-2, 2e-2, 3e-8, respectively. Thus,
vsat = 1e5 + 1e-2/0.5e6 + 2e-2/10e-6 + 3e-8/(0.5e-6 * 10e-6) = 1.28e5
D-1
Symbols
used in
equation
None
None
None
None
Symbols
used in
SPICE
level
version
binUnit
paramChk
mobMod
capMod
mobMod
capMod
nqsMod
noiMod
nqsMod
noiMod
Description
The model selector
Model version selector
Bining unit selector
Parameter value check
Mobility model selector
Flag for the short channel
capacitance model
Flag for NQS model
Flag for Noise model
Can Be
Binned?
NO
NO
NO
NO
NO
NO
NO
NO
D.2 DC Parameters
D-2
Symbols
used in
equation
Symbols
used in
SPICE
Vth0
vth0
YES
VFB
vfb
YES
K1
k1
YES
K2
k2
YES
Description
Can Be
Binned?
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
K3
k3
YES
K3b
k3b
YES
W0
w0
YES
Nlx
nlx
YES
Dvt0
dvt0
YES
Dvt1
dvt1
YES
Dvt2
dvt2
YES
Dvt0w
dvt0w
YES
Dvt1w
dvtw1
YES
Dvt2w
dvt2w
YES
u0
Description
Can Be
Binned?
YES
Ua
ua
YES
Ub
ub
YES
D-3
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Uc
Description
Can Be
Binned?
uc
YES
sat
vsat
YES
A0
a0
YES
Ags
ags
YES
B0
b0
YES
B1
b1
YES
Keta
keta
YES
A1
a1
YES
A2
a2
YES
Rdsw
rdsw
YES
Prwb
prwb
YES
Prwg
prwg
YES
Wr
wr
YES
Wint
wint
NO
Lint
lint
NO
D-4
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
dWg
dwg
YES
dWb
dwb
YES
Voff
voff
YES
Nfactor
nfactor
YES
Eta0
eta0
YES
Etab
etab
YES
Dsub
dsub
YES
Cit
cit
YES
Cdsc
cdsc
YES
Cdscb
cdscb
YES
Cdscd
cdscd
YES
Pclm
pclm
YES
Pdiblc1
pdiblc1
YES
Pdiblc2
pdiblc2
YES
Pdiblcb
pdiblcb
YES
Description
Can Be
Binned?
D-5
DC Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Drout
Description
Can Be
Binned?
drout
YES
Pscbe1
pscbe1
YES
Pscbe2
pscbe2
YES
Pvag
pvag
YES
delta
YES
Ngate
ngate
YES
alpha0
YES
alpha1
YES
beta0
YES
Rsh
rsh
NO
Js0
js
NO
ijth
ijth
NO
D-6
Symbols
used in
equation
Symbols
used in
SPICE
Xpart
xpart
CGS0
cgso
NO
CGD0
cgdo
NO
CGB0
cgbo
NO
Cj
cj
Mj
mj
NO
Mjsw
mjsw
NO
Cjsw
cjsw
NO
Pb
Pbsw
pb
pbsw
NO
NO
CGS1
cgs1
YES
CGD1
cgd1
YES
Description
Can Be
Binned?
NO
NO
D-7
Symbols
used in
equation
Symbols
used in
SPICE
CKAPPA
ckappa
YES
Cf
cf
YES
CLC
clc
YES
CLE
cle
YES
DLC
dlc
YES
DWC
dwc
YES
Vfbcv
vfbcv
YES
noff
noff
CV parameter in Vgsteff,CV
for weak to strong inversion
YES
voffcv
voffcv
CV parameter in Vgsteff,CV
for weak to strong inversion
YES
acde
acde
YES
moin
moin
YES
Description
Can Be
Binned?
D-8
NQS Parameters
Symbols Symbols
used in
used in
Description
equation SPICE
Elm
elm
Elmore constant of the channel
Can Be
Binned?
YES
Symbols
used in
equation
Symbols
used in
SPICE
Wl
wl
NO
Wln
wln
NO
Ww
ww
NO
Wwn
wwn
NO
Wwl
wwl
NO
Ll
ll
NO
Lln
lln
NO
Description
Can Be
Binned?
D-9
dW and dL Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Lw
lw
NO
Lwn
lwn
NO
Lwl
lwl
NO
Llc
Llc
NO
Lwc
Lwc
NO
Lwlc
Lwlc
NO
Wlc
Wlc
NO
Wwc
Wwc
Coefficient of widthdependence
for CV channel width offset
NO
Wwlc
Wwlc
NO
Description
Can Be
Binned?
D-10
Temperature Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Tnom
Description
Can Be
Binned?
tnom
NO
te
ute
YES
Kt1
kt1
YES
Kt1l
kt1l
YES
Kt2
kt2
YES
Ua1
ua1
YES
Ub1
ub1
YES
Uc1
uc1
YES
At
at
YES
Prt
prt
YES
nj
nj
Emission coefficient
YES
XTI
xti
YES
D-11
Symbols
used in
equation
Symbols
used in
SPICE
tpb
Description
Can Be
Binned?
tpb
Temperature coefficient of Pb
NO
tpbsw
tpbsw
Temperature coefficient of
Pbsw
NO
tpbswg
tpbswg
Temperature coefficient of
Pbswg
NO
tcj
tcj
Temperature coefficient of Cj
NO
tcjsw
tcjsw
Temperature coefficient of
Cjsw
NO
tcjswg
tcjswg
Temperature coefficient of
Cjswg
NO
Symbols
used in
equation
Symbols
used in
SPICE
Noia
noia
Noise parameter A
NO
Noib
noib
Noise parameter B
NO
Noic
noic
Noise parameter C
NO
Em
em
Saturation field
NO
Af
af
NO
Description
Can Be
Binned?
D-12
Process Parameters
Symbols
used in
equation
Symbols
used in
SPICE
Ef
Kf
Description
Can Be
Binned?
ef
NO
kf
NO
Symbols
used in
equation
Symbols
used in
SPICE
Tox
tox
NO
Toxm
toxm
NO
Xj
xj
Junction Depth
YES
gamma1
YES
gamma2
YES
Nch
nch
YES
Nsub
nsub
YES
Vbx
vbx
YES
Vbm
vbm
YES
Xt
xt
Doping depth
YES
Description
Can Be
Binned?
D-13
Symbols
used in
equation
Symbols
used in
SPICE
Lmin
lmin
NO
Lmax
lmax
NO
Wmin
wmin
NO
Wmax
wmax
NO
binUnit
binUnit
NO
Description
Can Be
Binned?
D-14