Scanning Electron

Microscope
Theory. Principle of work. By Daniyar Orazbayev

Microscopes: Background
The most common types of microscopes are:
Optical
Electron (which includes TEM and SEM)

First simple microscopes were optical ones and were invented in 17th
century
Applications of optical microscopes:
Microelectronics
Microbiology

Mineralogy
Pharmaceutic research and etc.

Microscopes: Background
The resolution of optical microscopes are limited with the wavelength of the
light
By the rise of demand for more magnification electron microscopes were
developed in 1930s
First electronic microscopes used transmission electron technique
This technique is based on transmission of beam of electrons through ultrathin specimen, and the magnified image is generated by this interaction
Because of smaller de Broglie wavelengths of electrons the magnification
of TEMs is much higher

SEM: Overview and Concept

In 1937, the first SEM was invented with high
magnification and finely focused electron beams.
The principle of generation of image is based on
scanning of a sample with focused beams of electron.
There are several types of SEMs depending on the
types of signals generated.

SEM: Overview and Concept

How does it work:
1.

Electron beam is ejected by electron gun

2.

Anode and magnetic lens focus the beam to a sample

3.

Then, detectors convert emitted electrons to an image

Main parts of SEM

Electron gun is an electrical component in a vacuum tube, which emits
electrons with precise kinetic energy. One of the most widespread electron
gun is cathode-ray tube (CRT) used in old TVs and computers
Magnetic lens is a device which is used for focusing or deflection of some
particles with the help of Lorentz force.

Secondary electron detector

This detector collects ejected low
energy secondary electrons
They are collected by attraction
to scintillator with +2000V grid
Accelerated electrons enables
scintillator to emit flashes of light,
which are then displayed on a
screen.

SEM Industry
Manufacturing companies:
Hitachi (Japan)
Carl Zeiss Microscopy (Germany)
JEOL (Japan)

FEI Company (USA)

Typical resolution presented by industry is between 1nm and 20nm

However, SEMs may be used for low magnification scales, too.
The highest obtained resolution is 0.4nm by Hitachi SU-9000

SEM Paper: Quick Overview

The effect of intermetallics on the fracture mechanism in AlSi1MgMn alloy
by G. Mrowka-Nowotnik, Rzeszow University of Technology
The author extensively uses TEM and SEM to investigate the fracture modes
during the tensile tests
It was found that mostly fracture happens due to nucleation of void by
debonding of matrix and due to fracture of intermetallic particles.