Sol Help Models Mems

Microgripper
Page 1 of 11
Model Library > MEMS Module > Piezoelectric Devices
Microgripper
Introduction
This is a tutorial model of a piezoelectrically actuated microgripper with mechanical contact. The microgripper
contains a piezoelectric actuator that operates in the longitudinal mode. Elongation in the longitudinal direction
creates a lifting movement to the structure. Simultaneous contraction in the transversal direction closes the gripper
and allows it to move objects, Ref. 1.
Model Definition
The model geometry is shown in Figure 1.
Figure 1: Microgripper geometry. The part in the middle represents the piezoelectric actuator.
The actuator is made of lead zirconate titanate (PZT-5A), and the gripper itself consists of polycrystalline silicon
(poly-Si). Both materials are available in COMSOL Multiphysics material libraries. The material properties are
prescribed using the rotated coordinate system shown in Figure 2.
http://127.0.0.1:52176/help/topic/com.comsol.help.models.mems.microgripper/micro... 14-02-2014
Microgripper
Page 2 of 11
Figure 2: Orientation of the coordinate system for the material.

The gripper is operated by applying an electric potential difference at the piezoelectric actuator ends. When the arms
come together, a mechanical contact is modeled including the contact pressure computations.
Results and Discussion

The applied voltage gradually increases from zero to the value of 6000 V. This causes the gripper arms to close up
and eventually come in contact with each other.
The final distributions of the stress and displacement magnitude in the deformed microgripper are shown in Figure 3
and Figure 4, respectively.
Figure 3: Logarithm of the von Mises stress in the gripper for V0 = 6000 V.
Figure 4: Total displacement distribution at V0 = 6000 V.

The resulting contact pressure at the end surfaces is shown in Figure 5.
Microgripper
Page 3 of 11
Figure 5: Contact pressure at V0 = 6000 V.
Notes About the COMSOL Implementation

In this example you learn how to model a piezoelectric material aligned in a user-defined coordinate system and how
to include contact modeling.
You create the geometry within COMSOL Multiphysics. First, draw a 2D footprint as shown in Figure 6, and then
apply extrusion to create the final 3D geometry. Use a swept mesh as shown in Figure 7.
You set up a contact pair for two end surfaces of the gripper arms and obtain the solution via a parametric sweep
over the applied voltage V0.
Figure 6: Intermediate 2D geometry
Microgripper
Page 4 of 11
Figure 7: Meshed final geometry.
References
1. R. Keoschkerjan and H. Wurmus, A Novel Microgripper with Parallel Movement of Gripping Arms, Proc. Actuator
2002, 8th International Conference on New Actuators, Bremen, Germany, June 1012, 2002, pp. 321324.
Model Library path: MEMS_Module/Piezoelectric_Devices/microgripper
Modeling Instructions
MODEL WIZARD
1 Go to the Model Wizard window.
2 Click Next.
3 In the Add physics tree, select Structural Mechanics>Piezoelectric Devices (pzd).
4 Click Next.
5 Find the Studies subsection. In the tree, select Preset Studies>Stationary.
6 Click Finish.
GEOMETRY 1
1 In the Model Builder window, under Model 1 click Geometry 1.
2 In the Geometry settings window, locate the Units section.
3 From the Length unit list, choose m.
Work Plane 1
1 Right-click Model 1>Geometry 1 and choose Work Plane.
This gives the default work plane aligned with the
xy-plane at z = 0.
Rectangle 1
1 In the Model Builder window, under Model 1>Geometry 1>Work Plane 1 right-click Plane Geometry and
choose Rectangle.
2 In the Rectangle settings window, locate the Size section.
3 In the Width edit field, type 10.
4 Locate the Position section. In the xw edit field, type -5.
5 In the yw edit field, type -1.
6 Click the Build Selected button.
7 Click the Zoom Extents button on the Graphics toolbar.
Rectangle 2
choose Rectangle.
3 In the Width edit field, type 2.
4 In the Height edit field, type 10.
Microgripper
Page 5 of 11

Rectangle 3
choose Rectangle.
5 In the yw edit field, type -1.
Rectangle 4
choose Rectangle.
5 In the yw edit field, type 19.5.
Fillet 1
choose Fillet.
2 On the object r4, select Point 3 only.
3 In the Fillet settings window, locate the Radius section.
4 In the Radius edit field, type 0.2.
Next, use the Bzier Polygon as instructed below. Alternatively, you can use the Draw Line tool and click on the top
-left and top-right corners of r3 and the bottom-right and bottom-left corners of fil1.
Bzier Polygon 1
choose Bzier Polygon.
2 In the Bzier Polygon settings window, locate the Polygon Segments section.
3 Find the Added segments subsection. Click the Add Linear button.
4 Find the Control points subsection. In row 1, set xw to -6.
5 In row 1, set yw to 15.
6 In row 2, set xw to -5.
Microgripper
Page 6 of 11

10 In row 2, set yw to 19.5.
16 Click the Close Curve button.
Mirror 1
choose Transforms>Mirror.
2 Select the objects r3, fil1, and b1 only.
3 In the Mirror settings window, locate the Input section.
4 Select the Keep input objects check box.
Microgripper
Page 7 of 11
Extrude 1
1 In the Model Builder window, under Model 1>Geometry 1 right-click Work Plane 1 and choose Extrude.
2 In the Extrude settings window, locate the Distances from Plane section.
3 In the table, enter the following settings:
DISTANCES (M)
2
5 Click the Go to Default 3D View button on the Graphics toolbar.
The model geometry is now complete.
GLOBAL DEFINITIONS
Parameters
1 In the Model Builder window, right-click Global Definitions and choose Parameters.
2 In the Parameters settings window, locate the Parameters section.
NAME
EXPRESSION
DESCRIPTION
V0
6000[V]
Applied voltage
This is a stacked actuator, and V0 corresponds to the number of layers multiplied by the applied potential of the
layer.
DEFINITIONS
Rotated System 2
1 In the Model Builder window, under Model 1 right-click Definitions and choose Coordinate
Systems>Rotated System.
2 In the Rotated System settings window, locate the Settings section.
3 Find the Euler angles (Z-X-Z) subsection. In the edit field, type 90[deg].
Microgripper
Page 8 of 11
This coordinate system defines the orientation of the piezoelectric materials main polarization axis.
4 In the Model Builder window, right-click Definitions and choose Pairs>Contact Pair.
5 Select Boundaries 21 and 27 only.
6 In the Pair settings window, click Activate Selection in the upper-right corner of the Destination Boundaries
section. Select Boundaries 30 and 37 only.
MATERIALS
1 In the Model Builder window, under Model 1 right-click Materials and choose Open Material Browser.
2 In the Material Browser window, locate the Materials section.
3 In the tree, select MEMS>Semiconductors>Poly-Si.
4 Right-click and choose Add Material to Model from the menu.
5 In the Model Builder window, right-click Materials and choose Open Material Browser.
6 In the Material Browser window, locate the Materials section.
7 In the tree, select Piezoelectric>Lead Zirconate Titanate (PZT-5A).
8 Right-click and choose Add Material to Model from the menu.
Lead Zirconate Titanate (PZT-5A)

1 In the Model Builder window, under Model 1>Materials click Lead Zirconate Titanate (PZT-5A).
2 Select Domain 5 only.
All other domains use polysilicon as the material.
PIEZOELECTRIC DEVICES
Piezoelectric Material 1
1 In the Model Builder window, expand the Model 1>Piezoelectric Devices node, then click Piezoelectric
Material 1.
2 In the Piezoelectric Material settings window, locate the Coordinate System Selection section.
3 From the Coordinate system list, choose Rotated System 2.
Linear Elastic Material 1

1 In the Model Builder window, right-click Piezoelectric Devices and choose the domain setting Linear Elastic
Material.
2 Select Domains 14 and 68 only.
Ground 1
1 In the Model Builder window, right-click Piezoelectric Devices and choose the boundary condition
Electrical>Ground.
2 Select Boundary 23 only.
Electric Potential 1
Electrical>Electric Potential.
3 In the Electric Potential settings window, locate the Electric Potential section.
4 In the
V0 edit field, type V0.
Fixed Constraint 1
1
Microgripper
Page 9 of 11
In the Model Builder window, right-click Piezoelectric Devices and choose the boundary condition
Structural>Fixed Constraint.
Contact 1
Pairs>Structural>Contact.
2 In the Contact settings window, locate the Pair Selection section.
3 In the Pairs list, select Contact Pair 1.
MESH 1
Free Triangular 1
1 In the Model Builder window, under Model 1 right-click Mesh 1 and choose More Operations>Free
Triangular.
2 Select Boundaries 4, 8, 12, 19, 25, 35, 36, and 44 only.
You can do this by selecting all boundaries on top of the geometry.
Size 1
1 Right-click Model 1>Mesh 1>Free Triangular 1 and choose Size.
2 In the Size settings window, locate the Element Size section.
3 From the Predefined list, choose Extra fine.
Swept 1
In the Model Builder window, right-click Mesh 1 and choose Swept.
Distribution 1
1 In the Model Builder window, under Model 1>Mesh 1 right-click Swept 1 and choose Distribution.
2 In the Distribution settings window, locate the Distribution section.
3 In the Number of elements edit field, type 2.
STUDY 1
Step 1: Stationary
1 In the Model Builder window, expand the Study 1 node, then click Step 1: Stationary.
2 In the Stationary settings window, click to expand the Study Extensions section.
3 Select the Continuation check box.
4 Click Add.
CONTINUATION PARAMETER
PARAMETER VALUE LIST
V0
range(0,600,6000)
6 In the Model Builder window, right-click Study 1 and choose Show Default Solver.
Before setting up the solver, define a plot to display while solving.
RESULTS
Microgripper
Page 10 of 11
3D Plot Group 1
1 In the Model Builder window, right-click Results and choose 3D Plot Group.
2 Right-click 3D Plot Group 1 and choose Surface.
3 Right-click Results>3D Plot Group 1>Surface 1 and choose Deformation.
4 In the Deformation settings window, locate the Scale section.
5 Select the Scale factor check box.
STUDY 1
Step 1: Stationary
1 In the Model Builder window, under Study 1 click Step 1: Stationary.
2 In the Stationary settings window, locate the Results While Solving section.
3 Select the Plot check box.
Solver 1
1 In the Model Builder window, expand the Study 1>Solver Configurations>Solver 1>Dependent Variables
1 node, then click mod1.V.
2 In the Field settings window, locate the Scaling section.
3 From the Method list, choose Manual.
4 In the Scale edit field, type 1000.
5 In the Model Builder window, under Study 1>Solver Configurations>Solver 1>Dependent Variables 1
click mod1.pzd.Tn_p1.
8 In the Scale edit field, type 1e6.
9 In the Model Builder window, under Study 1>Solver Configurations>Solver 1>Dependent Variables 1
click mod1.u.
12 In the Scale edit field, type 1e-6.
13 In the Model Builder window, right-click Study 1 and choose Compute.
RESULTS
3D Plot Group 1
Compare the finished displacement-field plot with that in Figure 4.
Follow the steps below to reproduce the plot in Figure 3
3D Plot Group 2
1 In the Model Builder window, right-click 3D Plot Group 1 and choose Duplicate.
2 In the Model Builder window, expand the 3D Plot Group 2 node, then click Surface 1.
3 In the Surface settings window, locate the Expression section.
4 In the Expression edit field, type log10(pzd.mises+1).
5 Click the Plot button.
Next, reproduce the plot in Figure 5 of the contact pressure at the end surfaces as follows.
Microgripper
Page 11 of 11
Data Sets
1 In the Model Builder window, under Results right-click Data Sets and choose Surface.
3D Plot Group 3
2 In the 3D Plot Group settings window, locate the Data section.
3 From the Data set list, choose Surface 1.
4 Right-click Results>3D Plot Group 3 and choose Surface.
5 In the Surface settings window, click Replace Expression in the upper-right corner of the Expression section.
From the menu, choose Piezoelectric Devices (Solid Mechanics)>Contact>Contact pressure, contact pair
p1 (pzd.Tn_p1).
Finally, add a coordinate system plot to verify that the piezoelectric material has the correct orientation.
3D Plot Group 4
2 Right-click 3D Plot Group 4 and choose More Plots>Coordinate System Volume.
3 In the Coordinate System Volume settings window, locate the Coordinate System section.
4 From the Coordinate system list, choose Rotated System 2.
Compare the resulting plot with that in Figure 2.

Sol Help Models Mems

Uploaded by

Document Information

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Sol Help Models Mems

Uploaded by

Copyright:

Available Formats

Microgripper

Model Library > MEMS Module > Piezoelectric Devices

Figure 2: Orientation of the coordinate system for the material.

Results and Discussion

Figure 4: Total displacement distribution at V0 = 6000 V.

Figure 5: Contact pressure at V0 = 6000 V.

Notes About the COMSOL Implementation

Figure 6: Intermediate 2D geometry

Figure 7: Meshed final geometry.

5 Locate the Position section. In the xw edit field, type -1.

9 Find the Control points subsection. In row 2, set xw to -1.

Lead Zirconate Titanate (PZT-5A)

Linear Elastic Material 1

V0 edit field, type V0.

PARAMETER VALUE LIST

You might also like