Scribd Logo
Upload

Welcome to Scribd!

  • Results of Cold Cleaning Tests With PR1 Photoresist Before Optimization (Continued)

    Uploaded by

    palanaruva
    6 views1 page
    This document appears to be a table summarizing the results of cold cleaning tests of a photoresist with different solvent mixtures before optimization. The table includes information on dissolution time, solubility grade, Hildebrand solubility parameters, and Hansen solubility parameters for solvent mixtures containing various combinations of THF, NP, THFA, EHA, PC and Texanol at different volume percentages. Optimization of the solvent mixtures was needed to improve the cleaning results.

    Original Description:

    Pages From 593

    Original Title

    Pages From 593

    Copyright

    © © All Rights Reserved

    Available Formats

    PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    This document appears to be a table summarizing the results of cold cleaning tests of a photoresist with different solvent mixtures before optimization. The table includes information on dissolution time, solubility grade, Hildebrand solubility parameters, and Hansen solubility parameters for solvent mixtures containing various combinations of THF, NP, THFA, EHA, PC and Texanol at different volume percentages. Optimization of the solvent mixtures was needed to improve the cleaning results.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    6 views1 page

    Results of Cold Cleaning Tests With PR1 Photoresist Before Optimization (Continued)

    Uploaded by

    palanaruva
    This document appears to be a table summarizing the results of cold cleaning tests of a photoresist with different solvent mixtures before optimization. The table includes information on dissolution time, solubility grade, Hildebrand solubility parameters, and Hansen solubility parameters for solvent mixtures containing various combinations of THF, NP, THFA, EHA, PC and Texanol at different volume percentages. Optimization of the solvent mixtures was needed to improve the cleaning results.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    Appendix

    592

    Table C4-1 Results of Cold Cleaning Tests with PR1 Photoresist before Optimization (Continued)
    A

    Dissolution
    Time, Min

    d Disperse

    d Polar

    Solubility
    Grade

    MPa

    dH
    Bonding

    HSP
    RA

    48
    BAD
    &
    OUT

    4
    GOOD
    & IN

    7
    BAD
    & IN

    21
    GOOD
    & OUT

    Ai

    1/2

    0.2

    16.6

    12.3

    5.5

    7.986

    0.0505

    THF & NP @ 50% THF

    0.3

    16.7

    9.0

    6.8

    5.534

    0.5864

    THF & NP @ 67% THF

    0.3

    16.7

    7.9

    7.2

    5.004

    0.9960

    THF & NP @ 75% THF

    0.3

    16.8

    7.4

    7.4

    4.839

    1.0000

    THF & NP @ 80% THF

    0.5

    16.8

    7.0

    7.5

    4.767

    1.0000

    THF & NP @ 90% THF

    1.3

    16.8

    6.4

    7.8

    4.700

    0.7405

    THF & NP @ 100% THF

    6.5

    16.8

    5.7

    8.0

    4.738

    0.7696

    THFA & CAP @ 100%


    THFA

    6.5

    17.8

    8.2

    10.2

    8.285

    THFA & EHA @ 50% THFA

    3.0

    16.3

    6.5

    6.8

    3.479

    THFA & EHA @ 67% THFA

    3.0

    16.8

    7.0

    8.0

    5.101

    1.0000

    THFA & EHA @ 75% THFA

    3.0

    17.1

    7.3

    8.5

    5.871

    1.0000

    THFA & EHA @ 80% THFA

    3.0

    17.2

    7.5

    8.8

    6.353

    1.0000

    THFA & EHA @ 90% THFA

    4.0

    17.5

    7.9

    9.5

    7.318

    1.0000

    THFA & EHA @ 100%


    THFA

    6.5

    17.8

    8.2

    10.2

    8.285

    1.0000

    PC & Texanol @ 25% PC

    5.0

    28.8

    13.9

    16.1

    30.987

    1.0000

    PC & Texanol @ 50% PC

    2.5

    25.9

    15.2

    12.1

    25.020

    1.0000

    PC & Texanol @ 70% PC

    2.0

    23.5

    16.3

    8.9

    20.822

    1.0000

    1.0000
    1

    0.2185

    Estimation of HSP from Solvent Mixtures

    THF & NP @ 0% THF

    C4

    Solvent Mixture,
    Vol. %

    You might also like