0.

2%BeCu
10-8Pa
NEGNEG10-10Pa
0.2%BeCu

4
ICF 203
ICF 152
ICF 114
ICF 070
ICF 034

0.2%BeCuSUS)

EX
IE

MNEX

VAT

ATH 30L/s

IM5402

Pressure (Pa)

10 -3
10 -4

10 -5

10 -5

10 -6

10 -6

10

10 0

24h

230

10 -7

710-8 Pa

10 -8

310-9 Pa

10 1

Time (h)

210-9 Pa

10 2

10

-9

10

Time (h)

100

270

30 L/s
miniTMP

10 -4

-9

0.2%BeCu
NEG100

10 -2
300L/s
TMP

10 -8

NEG

0.2%BeCu

3B
EX(
NEGGP100)
NEG
NEGMIP01
ICF114
DN40
TMPATH)30

10 -7

3B

0.2%BeCu

0.2%BeCu

0.2%BeCu

Be
100%Be
BeO
BeO5nm

0.2%BeCu
510-13Pa(H2)m/s
110-14

( )

1
1
45

50

Sample Chamber
0.2%BeCu or SUS304

15 disks

Gauge
SRG

G
SV

0.2%BeCu
1/4210W/m/k13

0.2%BeCu

(20
10

-3
8
6
4

SUS304
2

10

-4
8
6

Pt
q =2.110-10
Pa(H2)m/s

MV
TMP

10

0.2%BeCu

V
q=
A

P
[ Pa(H2)m/s ]
t

P (SRG)

RGA

0.2%BeCu
0.2%BeCu

0.2%BeCu
3

0.2%BeCu
3

1/

Torr (133 Pa)

0.2%BeCu

24h10-8Pa
10-10Pa

V
= 2 1 0 - 2 m
A

10

P t

6
4

q =5.410-13Pa(H2)m/s
(After 3 weeks)

10

Limit of SRG

-6

0.01

JVST A22, (2004) 181 with 739.

0.2%BeCu

-5

0.1

10

100

Time t (h)

305-0035 2-10-2, SOHO103

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