1 INTRODUCTION

1.1 MEMS AS A MICROSENSOR

1.1.1 Silicon as a mechanical material : Why silicon?
1.2 TRADITIONAL PRESSURE SENSORS
1.3 PRESSURE SENSORS BASED ON MEMS TECHNOLOGY
1.3.1 PEIZORESISTIVE PRESSURE SENSORS
1.3.2 CAPACITIVE PRESSURE SENSORS
1.3.3 RESONANT PRESSURE SENSORS
2 ANALYSIS OF AXIALLY LOADED FIXED BEAM MEMS RESONATORS
2.1 INTRODUCTION TO STRESSES AND STRAIN OF BEAM STRUCTURES (NO AXIAL
FORCE ON THE BEAM):
2.2 FORCES AND MOMENTS IN BEAM STRUCTURES :
2.2.1 AXIAL FORCE OF A BEAM
2.2.2 BENDING MOMENT AND THE MOMENT OF INERTIA
2.3 MATHEMATICAL MODELING OF DOUBLE-CLAMPED BEAMS : DETERMINATION OF
STATIC DEFLECTION,STRESS FUNCTION, MAX. STRESS
2.4 DIFFERENTIAL EQUATION FOR FREE VIBRATION OF A BEAM
2.5 VIBRATION OF A BEAM STRUCTURE SUBJECTED TO AXIAL FORCE
2.5.1 DIFFERENTIAL EQUATION FOR A CLAMPED-CLAMPED BEAM WITH AXIAL FORCE
2.5.2 RAYLEIGH-RITZ METHOD
3 RESULTS AND DISCUSSION
3.1 THE MICROSTRUCTURE UNDER INVESTIGATION
3.2 PLOTS FOR THE BEAM RESONANT FREQUENCY UNDER AXIAL LOAD
3.3.COMPARISON OF RESULTS
3.4 COMMENTS ON THE RESULTS
3.5 PUBLICATION OF RESULTS