Scribd Logo
Upload

Welcome to Scribd!

  • PolyMUMPs MetalMUMPs Waferspec

    Uploaded by

    api-3748599
    23 views1 page
    Especificacion del tipo de sustrato que se utiliza en el proceso de fabricacion MetalMumps. Util para encapsulados de los dados, etc.

    Original Title

    PolyMUMPs.MetalMUMPs.waferspec

    Copyright

    © Attribution Non-Commercial (BY-NC)

    Available Formats

    PDF, TXT or read online from Scribd

    Did you find this document useful?

    Is this content inappropriate?

    Report this Document
    Especificacion del tipo de sustrato que se utiliza en el proceso de fabricacion MetalMumps. Util para encapsulados de los dados, etc.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    23 views1 page

    PolyMUMPs MetalMUMPs Waferspec

    Uploaded by

    api-3748599
    Especificacion del tipo de sustrato que se utiliza en el proceso de fabricacion MetalMumps. Util para encapsulados de los dados, etc.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Flag for inappropriate content
    of 1

    POLYMUMPs and MetalMUMPs

    Wafer Specifications

    Parameter Requirements
    Approved Vendor Confidential
    Wafer Traceability Traceable to vendor lot #
    Lot Size: min/max # of wafers from Not specified
    One vendor lot
    Backside Not specified
    Diameter 150.0 mm ± 0.5 mm
    Dopant N/Phosphorus
    Flats One SEMI-Standard Primary Flat
    Grade Prime
    Surface Orientation (100)
    Primary Flat Orientation Not Specified
    Resistivity 1 – 2 Ohm-cm
    Thickness 675 microns ± 15 microns
    Type N
    Surface Single Sided Polished
    Growth Method Czochralski
    Cleanliness Meet or exceed SEMI-Standard
    Material Silicon
    Laser Marking At flat, 4 unique digits

    Document ID Title Security Code Revision Page


    INV_10080522 10080522, 150mm Silicon Wafer, SSP, 675 um Confidential 3.0 1/1

    You might also like