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  • Microstructure of CVD

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    imam bahrudin
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    The document outlines the 13 step parameters for the first test of a process involving washing, drying, heating, plasma treatment, titanium coating, and cooling of an item. The steps include washing with neophaline for 30 minutes, drying with hot then cold air, plasma treatment at varying pressures and temperatures from 2 to 20 minutes, titanium coating for 20 minutes, and a two-step cooling process down to 150 degrees Celsius over 35 minutes.

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    materi teknik pelapisan

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    The document outlines the 13 step parameters for the first test of a process involving washing, drying, heating, plasma treatment, titanium coating, and cooling of an item. The steps include washing with neophaline for 30 minutes, drying with hot then cold air, plasma treatment at varying pressures and temperatures from 2 to 20 minutes, titanium coating for 20 minutes, and a two-step cooling process down to 150 degrees Celsius over 35 minutes.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as DOCX, PDF, TXT or read online from Scribd
    Flag for inappropriate content
    16 views2 pages

    Microstructure of CVD

    Uploaded by

    imam bahrudin
    The document outlines the 13 step parameters for the first test of a process involving washing, drying, heating, plasma treatment, titanium coating, and cooling of an item. The steps include washing with neophaline for 30 minutes, drying with hot then cold air, plasma treatment at varying pressures and temperatures from 2 to 20 minutes, titanium coating for 20 minutes, and a two-step cooling process down to 150 degrees Celsius over 35 minutes.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as DOCX, PDF, TXT or read online from Scribd
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    of 2

    Table 5.

    Parameters for the first test


    No. Operation Parametric time pressure temperature 1. Washing neophaline 30 min 2. Washing in distilled water (purities 0,1 max) 15 min 3. Cold air drying 4. Hot air drying 300C 5. High vacuum 45 min 1,1e 2mbar 6. Hallow cathod preheating 2 min Hallow cathod initiating 2 min Power round table 7. Electron heating + plasma Argon I 20 min 1,2e 2mbar 402C II 9,1e 3mbar 8. Bias voltage ramp. (heating supplement) 10 min 9,6e 3mbar 425C 9. Ion cleaning time 20 min 8,8e 3mbar 359C 10. Titanium Coating 20 min 11. Start Nitrogen 2,4e 2mbar 326C 12. Cooling down I 15 min 180C II 20 min 150C 13. Veating (equalize pressure with the outside) 45 min 90C

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