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SISTEM PENGUKURAN SISTEM PENGUKURAN SISTEM PENGUKURAN SISTEM PENGUKURAN

Sensor Mekanik
Dr. Yeffry Handoko Putra, S.T, M.T
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1 1
PRINSIP DASAR
SENSOR MEKANIK
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2 2
PRINSIP DASAR
SENSOR MEKANIK:
Velocity and Acceleration Velocity and Acceleration
Capacitive Accelerometers
Piezoresistive Accelerometers
Piezoelectric Accelerometers
Thermal Accelerometers
Heated-Plate Accelerometer
Heated-Gas Accelerometer
Gyroscopes
Rotor Gyroscope
Monolithic Silicon Gyroscopes
Optical Gyroscopes
Velocity and Acceleration Velocity and Acceleration
Capacitive Accelerometers
Piezoresistive Accelerometers
Piezoelectric Accelerometers
Thermal Accelerometers
Heated-Plate Accelerometer
Heated-Gas Accelerometer
Gyroscopes
Rotor Gyroscope
Monolithic Silicon Gyroscopes
Optical Gyroscopes
Force, Strain, and Tactile Sensors Force, Strain, and Tactile Sensors
Strain Gauges
Tactile Sensors .
Piezoelectric Force Sensors
Force, Strain, and Tactile Sensors Force, Strain, and Tactile Sensors
Strain Gauges
Tactile Sensors .
Piezoelectric Force Sensors
Pressure Sensors Pressure Sensors
Mercury Pressure Sensor
Piezoresistive Sensors
Capacitive Sensors
VRP Sensors
Optoelectronic Sensors
Vacuum Sensors
Pirani Gauge
Ionization Gauges
Gas Drag Gauge
Pressure Sensors Pressure Sensors
Mercury Pressure Sensor
Piezoresistive Sensors
Capacitive Sensors
VRP Sensors
Optoelectronic Sensors
Vacuum Sensors
Pirani Gauge
Ionization Gauges
Gas Drag Gauge
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PRINSIP DASAR
SENSOR MEKANIK:
Flow Sensors Flow Sensors
Thermal Transport Sensors
Ultrasonic Sensors
Electromagnetic Sensors
Microflow Sensors
Breeze Sensor
Coriolis Mass Flow Sensors
Drag Force Flow Sensors
Flow Sensors Flow Sensors
Thermal Transport Sensors
Ultrasonic Sensors
Electromagnetic Sensors
Microflow Sensors
Breeze Sensor
Coriolis Mass Flow Sensors
Drag Force Flow Sensors
Acoustic Sensors Acoustic Sensors
Resistive Microphones
Condenser Microphones
Fiber-Optic Microphone
Piezoelectric Microphones
Electret Microphones
Solid-State Acoustic Detectors
Acoustic Sensors Acoustic Sensors
Resistive Microphones
Condenser Microphones
Fiber-Optic Microphone
Piezoelectric Microphones
Electret Microphones
Solid-State Acoustic Detectors
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PRINSIP DASAR
SENSOR MEKANIK:
Occupancy and Motion Detectors Occupancy and Motion Detectors
Ultrasonic Sensors
Microwave Motion Detectors
Capacitive Occupancy Detectors
Triboelectric Detectors
Optoelectronic Motion Detectors
Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Occupancy and Motion Detectors Occupancy and Motion Detectors
Ultrasonic Sensors
Microwave Motion Detectors
Capacitive Occupancy Detectors
Triboelectric Detectors
Optoelectronic Motion Detectors
Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Position, Displacement, and Level Position, Displacement, and Level
Potentiometric Sensors
Gravitational Sensors
Capacitive Sensors
Inductive and Magnetic Sensors
LVDT and RVDT
Eddy Current Sensors & Transverse Inductive Sensor
Hall Effect Sensors & Magnetoresistive Sensors
Optical Sensors
Optical Bridge & Proximity Detector with Polarized Light
Fiber-Optic Sensors & FabryPerot Sensors
Grating Sensors & Linear Optical Sensors (PSD)
Ultrasonic Sensors
Radar Sensors : Micropower Impulse Radar & Ground-Penetrating Radar
Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
Position, Displacement, and Level Position, Displacement, and Level
Potentiometric Sensors
Gravitational Sensors
Capacitive Sensors
Inductive and Magnetic Sensors
LVDT and RVDT
Eddy Current Sensors & Transverse Inductive Sensor
Hall Effect Sensors & Magnetoresistive Sensors
Optical Sensors
Optical Bridge & Proximity Detector with Polarized Light
Fiber-Optic Sensors & FabryPerot Sensors
Grating Sensors & Linear Optical Sensors (PSD)
Ultrasonic Sensors
Radar Sensors : Micropower Impulse Radar & Ground-Penetrating Radar
Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
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PRINSIP DASAR
SENSOR TEKANAN (PRESSURE SENSOR):
Definisi makroskopis Tekanan (P) = Gaya mengenai permukaan
Satuan luas
P = F/A
Definisi mikroskopis Tekanan (P) berdasar teori kinetik gas =
Total energi kinetik molekul gas mengenai permukaan persatuan volume
P = 2/3 (E
k
/V) = NRT
Ek = energi kinetik molekul gas
V = volume gas
N = jumlah molekul gas
R = konstanta gas
T = temperatur gas
Satuan tekanan (P):
1 Pa=1.4510.4 lb/in
2
=9.86910.6 atm=7.510.4 cm Hg.
1 atm=760 torr=101,325 Pa.
1 psi=6.89103Pa=0.0703 atm.(sistem US)
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PRINSIP DASAR
Bellow & Membran Strain-gage Pressure Sensor
plat tipis
membran
Z : defleksi
r : jari-jari membran
S : tensi pada membran
g : tebal membran
: stress pada membran
Untuk plat :
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PRINSIP DASAR
Membran/diaprahm Pressure Sensor
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PRINSIP DASAR
Membran/diaprahm Pressure Sensor
Defleksi yang kecil ditengah-tengah membran jari-jari membran r
n
berubah
Untuk

dimana
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PRINSIP DASAR
Capacitive Transduction
d
A
C
r o
=
( )
( )
( )
2 2
3
2
16
1 3
r R
Eh
P r y

=



=

=
R
r o
R
r o
d
r y
rdr
d
dr
r y d
r
C
0 0
) (
1
2
) (
2


Bagaimana transduksi P C ?
d
A = r
2
d y(r)
...
) (
1
) (
1
... 1
1
1
+
|

\
|
+ =

+ + =

rdr
d
r y
d
r y
rdr
x
x
Maka:
Ingat pendekatan
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PRINSIP DASAR
Capacitive Transduction
( )
( )
(

+ =
(

+ =
|

\
|
=

=


P
Edh
R R
d
rdr r y
d
rdr
d
C
rdr
d
r y
d
d
r y
rdr
C
r o
R R
r o
R
r o
R
r o
3
6 2 2
0 0
0 0
16
1
2
2 1 2
) (
1
2
) (
1
2



Sehingga:
atau
( )
P
h Ed
R
d
R
P C
r o r o
3 2
6 2 2
16
1
) (

+ =
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PRINSIP DASAR
Capacitive Pressure Sensor
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PRINSIP DASAR
Piezoresistive Transduction
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PRINSIP DASAR
Piezoresistive Transduction
and are the
perpendicular/transversal
and parallel/longitudinal
components of stress
transversal
longitudinal
and are the
perpendicular and parallel
piezoresistive coefficients
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PRINSIP DASAR
Piezoresistive Transduction - Circuit
R
a
& R
c
// stress
R
b
& R
d
stress
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PRINSIP DASAR
Piezoresistive Transduction - Circuit
One chip Si-Piezoresistive sensor and signal conditioning
Pressure range: up to 5,2 bar Absolute
Operating temperature: -40 to 125 C
Supply voltage: 5 V 0.25 V
Transfer function: linear, ratiometric
Accuracy over full-scale: 1 % full span (10 to 85 C)