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EPFL

School of Engineering

Microengineering

Research - IMT

Laboratories

SCHOOL OF ENGINEERING
Microengineering Labs
ESPLAB - GR-LVT - ICLAB - INSTANT-LAB - LAI - LAPD - LASA - LBNI - LIB - LIS - LMIS1 - LMIS2 - LMIS4 - LMTS - LO - LOB LPM1 - LPM2 - LPMAT - LSBI - LSRO1 - NAM - OPT - PV-LAB - SAMLAB - STI-SCI

Pierre-Andr FARINE

ELECTR O NICS AND SIGN AL P RO CESSIN G LABO R ATO RY (ESPLAB)

Full Professor GNSS receivers, ultra precise miniature atomic clocks for synchronization systems for mobile telephones such as UMTS and Multi-Mode Sensor Arrays MMSA, UWB communication systems with carrier-less impulse radios for local positioning and ultra low power wireless data transmission. He is also working in active picture sensors APS, in multi-mode sensor arrays MMSA, in video and audio coding, compression and signal processing. Implementation of signal processing algorithms made in CMOS low power integrated circuits.

keywords: Circuits lectroniques faible consommation numriques, analogiques et mixtes pour microsystmes; reconnaissance, compression et codage de l'information (parole, son et images); systmes de positionnement par satellite (GPS) et Ultra Large Bande (UWB).

Peter SEITZ Adjunct Professor Semiconductor image sensors. Smart pixels. High-performance photosensing. Low-noise, high-speed and high-dynamic-range image sensing. Photonic microsystems. Optical

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metrology and measurement systems. Optical time-of-flight 3D range cameras. Organic semiconductors. Polymer optoelectronics. Monolithic photonic microsystems based on organic semiconductors. Entrepreneurship, management, creativity, intellectual property and project management.

keywords: Semiconductor image sensors, Photonic microsystems, Organic semiconductors, Polymer optoelectronics

awards

Best Paper Award, European Optical Society 2009-06-17 Conference on the Frontiers in Electronic Imaging. Title of the paper: "A Low-Noise CMOS Imaging Pixel Circuit with In-Pixel Voltage Amplification" Election: SATW Membership, SATW - Swiss Academy of Technical Sciences 2008-02-13 Election as Individual Member for Life

Guillermo VILLANUEVA

VILLAN UEVA GRO UP ( GR -LVT)


SNF Professor

keywords: MEMS/NEMS - design, analysis, fabrication and characterization; sensors, oscillators, nonlinear and coupled dynamics, fundamental noise processes

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Christian ENZ

INTEGR ATED C IRC UITS LABO RATOR Y ( IC LAB)

Full Professor

1) Semiconductor device modeling Following the development of the EPFL-EKV MOS transistor model (PhD of M. Bucher), we have investigated some fundamental issues on compact noise modeling of nanoscale bulk and double-gate MOS transistors (PhD of A.S. Roy). Another topic of interest is the development of a new compact model of organic devices. 2) Analog and RF IC Design We are exploring how the analog-to-digital converter (ADC), which remains one of the most power hungry block in a digital RF receiver, can be replaced by a phase-ADC taking advantage of a direct quantization of the phase for constant envelope modulations (PhD candidate B. Banerjee). After having investigated the use of high-Q bulk acoustic wave (BAW) resonators in the receiver part of an RF transceiver (PhD of J. Chabloz), keywords: Low-power analog and RF CMOS IC design; wireless sensor networks; device modeling; MOS transistor model (EKV). we now are looking at how BAW resonators can be used in the transmitter and particularly in the power amplifier (PhD candidate M. Contaldo). Another research topic that started recently is about the use of sampled radio for the implementation of ultralow-power RF transceivers. We are investigating whether the sampling radio architectures that were recently developped for cellular, WLAN and Bluetooth applications can be applied for ultralow-power RF transceivers for WSN applications (PhD candidate A. Heragu). Finally, we are also looking at the design of a flexible sensor interface for in-vivo drug delivery systems using an asynchronous ADC with companding, avoiding the need of any clock and allowing for extending the dynamic range (DR), keeping an almost constant signal-to-noise ratio (SNR) (PhD candidate V. Balasubramanian).

Simon HENEIN

P ATEK PHILIPPE CHAIR IN MICR OMECHAN ICAL AN D HO RO LO GICAL DESIGN ( IN STANT-LAB)

Associate Professor The Instant-Lab conducts research in micromechanical design. The key application field on which the research is focused is horology. A wider spectrum of applications is also concerned including: medtech applications, precision robotics, space applications, astrophysics applications and instrumentation for accelerator facilities. Moreover, the laboratory is strongly involved in the teaching of design to

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students of all levels. It focuses on training the creative processes from which the act of design originates and its complementarity with the analytical mind necessary to model, simulate and predict the behaviour of machines.

keywords: Novel mechanisms; technologies and materials for horology; Flexure-based precision mechanisms; Surgical instrumentation; Teaching of micromechanical design with focus on creative processes.

Yves-Olivier PERRIARD

INTEGR ATED AC TUATO RS LABO RATO RY ( LAI)

Adjunct Professor The overall research objective of the laboratory is to establish the scientific base for the nest generation of actuators and contactless energy transfer in the fast-growing fields of transducers. The activities of the Integrated Actuators Laboratory (LAI) are focused on tracking and setting new trends in two domains: design of small electromechanical (micro and MEMS), piezoelectric moving devices (motors and actuators), and of systems for the contactless energy transfer. Constant contacts and feedbacks from our industrila partners enable us to keep staying at the cutting edge in these domains. This includes basic research in sensorless electronic devices. In the world of ever-miniaturizing industrial products, the motion devices have to be optimal from technical (mass, volume, efficiency), industrial (simplicity, riability) and economical (price) point of view. This is always confronted with other constraints imposed by the device specifications (high speed, more than one degree of freedom, strong thermal and mechanical constraints).

keywords: Haptic and fluids actuators; flexible windings; air transformer; piezoelectric actuators and drives; special electric motor and actuators; microelectromechanical systems; high-speed motor; actuator design for self-sensing.

awards

Student awards of best teacher of the STI Faculty, AGEPOLY-EPFL 2006-09-01 Students of each Faculty designates the best teacher of the Faculty

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Senior member IEEE, IEEE 2005-11-01 Student awards of best teacher of the STI Faculty, AGEPOLY-EPFL 2005-09-01 Students of each Faculty designates the best teacher of the Faculty

Christophe MOSER

LABO RATO RY O F APPLIED PHO TO NICS Associate Professor DEVICES ( LAPD)


Solar energy concentrators for high-efficiency photovoltaic systems, efficient transport of optical energy, highly stable light sources with low phase noise, and ultra-sensitive detection and identification of biological substances.

keywords: Solar energy concentrators for high-efficiency photovoltaic systems, efficient transport of optical energy, highly stable light sources with low phase noise, and ultra-sensitive detection and identification of biological substances.

awards

Outstanding Entrepreneurship Award, NSF 2007 for contribution to commercializing ultra-low-loss holographic networks for high-powered lasers

Aude BILLARD

LEARN IN G ALGOR ITHMS AND SYSTEMS LABO R ATO R Y (LASA)

Associate Professor Learning and Dynamical Systems, Neural Computation and Modeling, Human-Machine Interaction, Humanoids Robotics, Mechatronics, Design of Therapeutic and Educational Devices.

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keywords: Learning and Dynamical Systems; neural Computation and Modeling; human-Machine Interaction Humanoids Robotic; mechatronics; design of Therapeutic and Educational Devices.

awards

Best Reviewer Award, IEEE RAS Int. Conf. on Robotics and Automation 2012 Best reviewer award to Aude Billard

Best Paper Award (Cognitive Robotics), IEEE RAS Int. Conf. on Robotics and Automation 2011 Kronander, K., Khansari Zadeh, S. M. and Billard, A. (2011) Learning to Control Planar Hitting Motions in a Monigolf-like Task. in Proceedings of the IEEE/RSJ International Conference on Intelligent Robots and Systems, 2011. (IROS 2011). JTSC Best Paper Award, IEEE Int. Conf. on Robotics and Intelligent Systems 2011 Grollman, D.H and Billard, A. (2011) Donut as I do: Learning from Failed Demonstrations. In Proceedings of IEEE International Conference on Robotics and Automation.

RobotDalen Prize, RobotDalen 2008-12-08 Dr. Sylvain Calinon received the Robotdalen Scientific Award for his PhD thesis on Robot Programming by Demonstration conducted at LASA/EPFL from 2003-2008. The Robotdalen Scientific Award is an international competition for young scientists, with 20 000 in prize money. Robotdalen (Robot Valley) is a Swedish initiative supporting the development of robotics and automation for the industrial, logistics and healthcare sectors.

Georg FANTNER

LABO RATO RY FO R BIO - AN D N AN O -INSTRUMEN TATIO N ( LBN I)

Tenure-Track Assistant Professor High-speed atomic force microscopy (AFM) and its use in high-resolution measurement of forces in nanobiological systems. Also the various underlying multidisciplinary aspects such as nanotechnology,

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microfabrication, mechanical and electrical engineering, biophysics, and biomaterials.

keywords: AFM, nanotechnology, microfabrication, biophysics, biomaterials

awards

Schrdinger Fellowship, Schrdinger foundation 2008 Post doctoral fellowship

I2B, Austrian chamber of commerce 2005 Startup prize

DOC-Fellowship, Austrian Academy of Science 2004 PhD fellowship to pursue an international PhD

Michal UNSER

BIO MEDICAL IMAGIN G LABO R ATO RY ( LIB)

Full Professor

The Biomedical Imaging Group (BIG) pursues research on the development of new algorithms and mathematical tools for the advanced processing of medical and biological images. T opics of interest are image reconstruction, multi-modal imaging, image analysis and visualization. Research efforts are taking place at two complementary levels: (i) fundamental and mathematical aspects of imaging; and (ii) applicationoriented projects in collaboration with researchers in medicine and biology.

The strength of this group lies in the strong interaction between theory and practice, and the use of sophisticated mathematics for solving concrete problems in biomedical imaging. A priority is to develop algorithms that respond to specific needs of the biomedical community. In many cases, these are incorporated into user-friendly software that is made available to researchers over the web.

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keywords: Medical and biological imaging; image processing; multi-modal imaging; image analysis and visualization; splines; wavelets; inverse problems.

awards

Fellow, EURASIP 2009-01-01 Technical Achievement Award, IEEE Signal Processing Society 2008-01-01 Elected Member, Swiss Academy of Engineering Sciences 2007-01-01

Dario FLOREANO

LABO RATO RY O F INTELLIGENT SYSTEMS ( LIS)

Full Professor Principles of biological self-organization, such as evolution, learning, and adaptation; bio-inspired robots capable of autonomous behavior, such as terrestrial, flying, jumping, evolutionary, and networked robots; computational biology.

keywords: Bio-inspired Robotics, Bio-inspired A.I., Systems Biology, Evolutionary Computation, Neural Computation, Swarm Intelligence

awards

Best science video, American Association for Artificial Intelligence 2008-07-15 Best video award for educational video showing development of bio-mimetic robots

Best project, European Commission, Future & Emerging Technologies 2008-01-07 European project Swarmbot, whose robots have been developed at the Laboratory of Intelligent Systems, is nominated Success Story.

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Winner, DREAM Organizers, New York 2007-12-20 Winner of the first International Competition on Reverse Engineering of Gene Regulatory Networks, 5-gene network category Best paper, International Conference on Intelligent Robots and Systems (IROS) 2007-10-30 Best paper award for vision-based indoor flying robot

Jrgen BRUGGER

MICR OSYSTEMS LABOR ATO R Y 1 ( LMIS1)

Associate Professor Our laboratory is devoted to micro/nanosystems (MEMS/NEMS) and to the development of new fabrication techniques for highly miniaturized functional devices and systems. We focus in particular on rapid prototyping techniques to create innovative micro and nanostructures by novel patterning methods (e.g. nano-stenciling and inkjet printing). We share our generic technologies with partners from fundamental material science, applied physics and life-sciences enabling to continously push the limits of experimental investigations. We also include the study of scalability for future cost-effective and eco-friendly micro/nanomanufacturing to enable technology transfer and commercialization of new nanotechnology-based products.

keywords: MEMS, nanotechnology, inkjet printing

Giovanni BOERO Senior Scientist Inductive detection of NMR and ESR with single-chip integrated electronics & miniaturized discrete resonators. Applications to micro-imaging and micro-spectroscopy. X-ray detection of FMR (XFMR). keywords: Methods and microdevices for nuclear magnetic resonance, electron spin resonance, ferromagnetic resonance spectroscopy and imaging on small samples Scanning tunneling microscope (STM) based detection of ESR (STM-ESR). Mechanical detection of NMR (MRFM) with microcantilevers.

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awards

CTI-Agence pour la promotion de l'innovation, Swiss National Science Foundation, European Union 2001 to 2011

Martinus GIJS

MICR OSYSTEMS LABOR ATO R Y 2 ( LMIS2)

Full Professor The laboratory has centered its activities on the following themes: development and use of novel microfabrication technologies, miniaturised magnetic applications, microfluidics and microsystems for biomedical applications (bio-MEMS).

keywords: microfluidics, bioMEMS, technology development, microsystems

awards

Prize DuPont des Matriaux 2009, DuPont company 2009-04-30 Prize attributed for the Ph.D. thesis of Dr. Ulrike Lehmann: Manipulation of magnetic microparticles in liquid phases for on-chip biomedical analysis methods

Best poster award Eurosensors XXII, Dresden, Conference organsiation 2008-09-10 Automated label-free optical sensor for multi-antibiotics detection in milk

Best Poster award 33rd International Conference on Micro- and Nano-Engineering MNE07, Copenhagen, Conference organisation 2007-09-26 Bead-based protein microarrays realized through electrostatic self-assembly of carboxylated beads

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Philippe RENAUD

MICR OSYSTEMS LABOR ATO R Y 4 ( LMIS4)

Full Professor

On-chip flow cytometry: We develop microfluidic devices to be used in fields as hematology, oncology and toxicology. Cell analysis and cell separation is performed by means of dielectrophoretic force spectroscopy in a microfluidic device by opposing forces at multiple frequencies discriminating cells types according to their dielectric properties. Using on-chip flow cytometry, it is possible to measure cell characteristics and subsequently perform cell-sorting and cell lysis. This allows to define new diagnostic tools for diseases related to abnormal cell function or related to cell contamination. Cell-based biosensors: We are are developing autonomous biosensing platforms, based on living cells, with the aim to use them as nodes of a sensor network system for environmental monitoring. Living cells are used in such a system as the sensor, and secondary probes measure in real time the cellular response to changing environmental conditions keywords: BioMEMS, microfluidics, cell chips, bioelectronics, biosensors A chip with genetically bacterial strains is developped for monitoring chemical componds in water The goal of the project is the fabrication of a microfluidic system able to characterize different kinds of cells and more complex biological structures by dielectric spectroscopy. Cells are embedded in a hydrogel 3D scaffold and perfused through microchannels. Impedance spectroscopy measurements are performed using a dual interdigitated microelectrodes array Cells culture chips: We work on news techniques to trap cells in polymer gels directly in a microchannel. This offers the possibility to generate gel structures with layers of different cells for the study of the biochemical environment on cells, cell-cell interactions and tissue engineering. We have developed a chip aimed at develppmental biology experiments, in which the long term culture of dosiphila wing disk can be performed. This allows to get a better understanding of intercellular communication and of the influence of external parameters on the development of organs. Nanofluidics: Our goal is to fabricate single nanopores and nanoporous membranes, to study the transport of biomolecules through them and to investigate how to modify the electrical double layer in the pores and how those modifications affect the transport. Bioelectronic implants: Chemical stimulation of neural tissue is currently studied, by combining electrodes and microfluidic channels on flexible neural probes. The insertion of strain gauges and a wireless telemetry system in a knee prosthesis is studied, for the long term monitoring of ageing of such devices. We study new materials for microeletrode implants

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awards

BioAlps Prize, BioAlps association 2010 Carrer award, in recognition on impact on creation of new companies

Herbert SHEA

MICR OSYSTEMS FO R SPAC E TECHNO LO GIES LABO RATO RY (LMTS) Associate Professor
The mission of the Microsystems for Space Technologies Laboratorys (EPFL-LMTS) is to develop reliable MEMS for use in Spacecraft as well as on Earth. Our activities cut across several MEMS technologies, both silicon and polymer based. Since the lab was founded in 2004, a major focus has been on miniaturized electroactive polymer (EAP) actuators fabricated using low-energy metal ion implantation in silicone elastomers. This research has led to miniaturized EAP device with the largest reported percentage displacement, to flexible metal electrodes conducting reliably at strains greater than 175%, and to arrays of EAP devices on a chip, including tunable lenses, and devices applying cyclic stress on single cells. We have developed two types of Earth Sensors for use on satellites, one based on imaging atmospheric oxygen airglow, the other based on directly measuring the gravity gradient vector using a MEMS pendulum, thus allowing the spacecraft to determine its orientation with respect to the Earth without optical access. keywords: MEMS, Space, Electric propulsion, Artificial Muscle, Dielectric Elastomer Actuator, Chip-scale Plasma, inertial sensing, Tunable Optics, Polymer MEMS, Radiation Hardness of MEMS, Picosatellites We are investigating chip scale plasma light sources to be used in miniature atomic clocks, and have demonstrated the first mm-scale hermetically sealed plasma fabricated at the wafer-scale. We demonstrated a highly efficient compact and integrated MEMS thruster (electric propulsion) which can be tuned to emit either ions or charged droplets. We are actively pursuing the development of this thruster in collaboration with an international consortium. Our laboratory was instrumental in starting the SwissCube project, a 1 kg satellite designed and built primarily at the EPFL, with launch planned in August 2009. The LMTS was responsible for the payload which will demonstrate one of our novel Earth sensor concepts.

Demetri PSALTIS

O PTICS LABO R ATO RY (LO )


Full Professor

The Optics laboratory focuses on optofluidics and biological imaging. With optofluidics, we are focusing on developing technologies for energy

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harvesting purposes by leveraging the advantages of microfluidic systems. Biological imaging deals with a variety of topics: phase conjugation through biological tissues, imaging through biological media and nonlinear optics for biological characterization. Optofluidics : An interdisciplinary subject between optics and microfluidics, optofluidics has made substantial progress towards the integration of versatile optical functions into lab-on-a-chip systems. Integration and reconfigurability are its two major advantages. By combining optical elements into microfluidic devices, optofluidic chips hold promise in the portable devices for applications such as environment monitoring, medical diagnosis and point of care testing. Optically pumped microfluidic dye lasers are of particular interest since they exhibit the advantages of laser emission combined with cost-effective processing and wide choice of emission wavelength, which hold potential as a novel light keywords: Digital phase conjugation; imaging with multimode fibers; digital holography; nonlinear microscopy; optics of nanoparticles; tissue ablation; optofluidics for energy and biological applications; vesicle photonics; photoacoustics. source for on chip spectroscopy and imaging. To fulfill this goal, we have developed multiple novel cavity designs for microfluidic dye lasers. A pressure mediated tuning mechanism has also been invented enabling a broad spectrum of active tunable elastomeric optofluidic devices. Accompanying with the latest progress of optics, advanced micro/nano fabrication technology, new material and other subjects, jointly with microengineering and bioengineering, optofluidics is a field still in infancy and full of promise. Biological imaging: Second harmonic generation (SHG) from nanoparticles is opening new types of imaging applications. These nanoparticles show promise as imaging probes by emitting stable SHG signal over a long time. We refer to these nanoparticles as "Second Harmonic Radiation IMaging Probes (SHRIMPs)". We use crystalline nanoparticles of noncentrosymmetric crystal structures as SHRIMPs due to their high SHG efficiency. In contrary to the conventional fluorescent imaging probes which rely on intensity detection, the coherent nature of SHG allows us to capture the complex SHG field information (amplitude and phase) radiated from the SHRIMPs. This coherent SHG signal facilitates many novel imaging applications, such as scan-free threedimensional (3D) imaging, focusing and imaging through scattering media.

awards

EOS Fellow, 2012-10-16 Emmett N. Leith Medal, The Optical Society (OSA) 2012-03-31 For seminal contributions to holographic storage and optical information processing

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Theo LASSER

LABO RATO IRE D'O PTIQUE BIO MDICALE ( LOB)

Full Professor

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keywords: Optical functional imaging applied to life sciences and medicine, specifically; single molecule detection and imaging with enhanced confinement for biofunctionality studies; high lateral resolution and nonlinear microscopy for cell and tissue imaging; optical Coherence Microscopy and Laser Doppler Imaging for medical application.

awards

Swiss Technology Award, CTI 2007-03-14 Laser Doppler Imaging of Microcirculation.

Jacques JACOT

LABO RATO RY O F MICRO EN GIN EERING Full Professor FO R MAN UFAC TURIN G 1 ( LPM1)
- Product conception, process control, industrialisation and tolerancing - Research & development for new attachement and optimized assembly technics applied to submillimetric scale - Optical and vision systems for assembly and quality control - Aesthetic quality control for high-end products - Robust signal processing algorithms and efficient real-time DSP software for optimized implementation in embedded systems. The research activities in the team cover a wide range of domains and they are published in many different journals. Among them :

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- Mikroproduktion - Revue polytechnique - Bulletin de la socit suisse de chronomtrie - Electronic Letters on Computer Vision and Image Analysis - IEEE transactions on pattern analysis and machine intelligence

keywords: assembly, visionsystems, manufacturing

Max-Olivier HONGLER Adjunct Professor

operations research, (manufacturing and productiion) Non-linear dynamics and optimal control, (multi-agents systems) Applied probability and stochastic processes

keywords: Operational research for manufacturing systems

Peter RYSER

LABO RATO RY O F MICRO EN GIN EERING Associate Professor FO R MAN UFAC TURIN G 2 ( LPM2)
Product development, micro system packaging, thick film technology. Research and development of thick film technology for sensor applications and MEMS packaging Research of new concepts for products in the domain of sensors and micro technology.

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keywords: Product conception, Microsystem packaging, biomedical sensors

Gian-Luca BONA

LABO RATO RY O F PHO TO NIC MATERIALS AND C HARAC TER ISATIO N ( LPMAT)

Full Professor A wide variety of innovative projects in nanoscience, nanodevices and fabrication, spintronics, materials science and computational chemistry simulation that aim to provide new knowledge, methods and tools for creating and using future generations of computer processors, memories and systems.

keywords: photonics, surface magnetism phenomena, optoelectronics

Patrik HOFFMANN Adjunct Professor

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Beam induced surface structuring and 3D deposition of nano-materials. Focus on micro and nano structuring of substrates and functional materials by etching and deposition techniques. By studying the underlying processes, we are developing novel enabling structuring technologies. In more detail, focused electron beam induced deposition of materials (FEB), patterned laser beam induced deposition of different oxides and their mixtures, and other non classical UV Excimer laser applications and chemical coating processes are investigated.

keywords: Wettability, Mico-structuring, Electron-beam Deposition, Photodeposition, Photoablation, Nano-optics

Stphanie LACOUR

LABO RATO RY FO R SO FT BIO ELEC TRO N IC IN TERFACES (LSBI)

Tenure-Track Assistant Professor

The Laboratory for Soft Bioelectronics Interfaces (LSBI) explores how to shape traditionally rigid electronic circuits into conformable, skin-like formats. Our mission is to engineer and implement novel materials and technologies overcoming the hard to soft mechanical mismatch between man-made devices and biological tissues. Electronics will no longer be everywhere but also anywhere. Our research is interdisciplinary combining expertise in materials science, engineering, biotechnology and neural engineering. Applications are vast and encompass soft tactile skins, stretchable electronics, health monitoring and ultra-compliant neuroprostheses. Research Areas: Neuroprosthetic Technology: soft MEAs, chronic electrode interfaces, in vitro cell biomechanics keywords: Thin-film electronics; mechanical sensors; thin-film Electronic Skins: thin-film electronics, tactile sensors
transistors; electronic skins; elastomers; stretchable electronics; micro-electrode arrays; neural engineering; neuroprosthetics.

awards

Zonta Award, Zonta 2011-11-11 Young Innovator award, TR35, MIT Technology Review 2006

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Francesco MONDADA Adjunct Professor My core activity is in the design of mobile miniature robots from a mechatronic perspective. This activity imply research in robot hardware and software architecture, vertical integration of control algorithms, design methodologies exploiting specific phenomena such as morphological computation etc. Because robots can be applied in many areas, we are used to make our research in the frameworks of interdisciplinary collaboration projects where we can find synergies with chemists, biologists, artists, designers, architects or teachers, to cite some of them. This allow us to innovate, for instance, in robot-animal interactions, functional robot design, swarm robotics, integration of robots in our daily life and in educational keywords: miniature mobile robot design, mechatronics, swarm robotics, edutainment programs. The resulting technology is applied in industrial collaborations or by spin-offs.

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Hannes BLEULER

R O BO TIC SYSTEMS LABO RATO RY 1 ( LSR O 1)

Full Professor

The Laboratoire de Systmes Robotiques (LSRO) is a mulitidisiplinary research unit working mostly in the fields of microrobotics, biomedical robotics, haptics, MRI compatible instrumentation and nanotechnologies. Within the large field of "microrobotics", we are interested in various small mobile robots, in high precision motion control and in contact-free and vacuum compatible devices. Project examples include - Haptic mini-invasive surgery simulators (Laparoscopy, Hysteroscopy, Radiology, Colonoscopy) - fMRI compatible haptic devices - Diamagnetic and contact-free devices for sensors or vacuum compatible actuation - Electrostatic Motor for Cesium Atomic Clock (together with Observatoire de Neuchtel, Professor Thomann, and METAS-office, Berne) - Optical Delay Line for the European Southern Observatory (a keywords: Parallel robots, Frictionless bearings, Nanometric project together with the Observatoire de Genve, Prof. Mayor and positioning, Medical robotics and instrumentation, Mechatronic design Didier Queloz, the discoverers of exoplanets) Spark Assisted Chemical Engraving, a method for 3-D structuring of glass, used e.g. for rapid prototyping of microfluidic elements (together with Professor Christos Comninellis, EPFL)

Olivier MARTIN

N AN O PHOTON IC S AND METR O LOGY LABO RATO RY ( N AM)

Full Professor

The main focus of our research is nanophotonics: the study of the interaction of light with structures smaller than the wavelength, with special emphasis on plasmonics: the optics of metallic nanostructures. We try to pursue a broad research that includes modelling, nanofabrication and optical characterization. Applications of our work include optical signal processing, biosensors, and novel optical metamaterials.

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keywords: plasmonics, nanophotonics, photonics, biosensors, metamaterials, modelling, nanofabrication, near-field optics

awards

Best poster, China Nano 2009 2009-09-01 W. Zhang and O.J.F. Martin, "Mode-selective surface-enhanced Raman spectroscopy using nanofabricated plasmonic dipole antennas"

Landry prize, EPFL 2007-01-01 E. Lamothe, "Calculs des forces gnres par des plasmons de surface sur des nano-fils en or"

Toralf SCHARF Senior Scientist

keywords: Electro-optic effects of micro-structured liquid crystals devices and combinations of micro- nanostructures in polymers to realize advanced optical systems

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Hans Peter HERZIG

O PTICS AN D P HO TO N ICS TECHNO LO GY LABOR ATO R Y ( OP T)

Full Professor

The Optics & Photonics T echnology Lab (OPT Lab) has longstanding activities in micro-optics. Micro-fabrication technologies like photolithography, resist processing, and reactive ion etching are used to manufacture refractive and diffractive micro-optical elements, birefringent optics (liquid crystal devices), as well as nano-scale optics (subwavelength structures, photonic crystals, near field microscopy). Building on a number of past and present research projects concerning optical and photonic nanostructures, the OPT Lab has developed a number of capabilities spanning the design, fabrication, and characterization of nanostructured optical and photonic devices. Collectively, these capabilities permit the investigation of a wide range of nanoscale optical effects, which facilitates both an improved understanding of optical phenomena on the nanoscale as well as an accelerated approach to producing optical and photonic devices for practical applications.

keywords: Refractive & diffractive micro-optics; microsystems & metrology; nano-scale optics (subwavelength structures, surface waves, photonic crystals, near-field microscopy); material & process technology; mid-IR photonics; environmental & biomedical sensing.

Christophe BALLIF

P HO TO VO LTAICS AN D THIN FILM ELECTR O NICS LABO RATO RY ( PV- LAB) Full Professor
The focus of the lab is the developpement of new prrocesses and device structures for photovoltaics, ranging from material aspects to full demonstrators. Key points are the the realisation of high efficiency thin film silicon solar cells (based on a-Si and microcrystalline Si) on glass and plastic substrate as well as the physical properties and manufacturing of high efficiency heterojunction crystalline Si solar cells(a-Si/c-Si). A special focus is set on the development of transparent conductive oxydes (TCO) and advanced light trapping structures for thin film Si solar cell and on plasma processes for cell fabrication, including new plasma diagnostic tools and high deposition rate approaches. Encapsulation processes and reliability of PV-Modules, with emphasis on durability of thin film Si modules are also investigated, based on the full infrastructure at the PV-Lab. Finally, thin film electronic devices processing (e.g. TFT) and specialized detectors (e.g. X-Rays) are also considered.

keywords: Photovoltaics, thin film Silicon, amorphous silicon, heterojunction cells, lamination

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awards

Prix Nexans, Nexans 2009-10-19 N. Wyrsch, Prix Nexans 2007 (CHF 20000)

best young scientist oral contribution, IEEE 2008-05-21 - G. Bugnon, best young scientist oral contribution, 31st IEEE PVSC, San Diego 2008

Best visual presentaion category crystalline Si, EU-PVSC conference 2007-09-27 L. Fesquet, best visual presentation, category c-Si, 22nd EUPSCV Milano 2007

Swiss-Electric research award , Swiss-Electric research 2007-09-25 - S. Olibet, Swiss-Electric research award 2007 (CHF 25000)

Acha HESSLER-WYSER Senior Scientist

keywords: metallurgy, materials for energy

Nico DE ROOIJ

THE SEN SO RS/ AC TUATO RS AN D MICR OSYSTEMS LABOR ATO R Y ( SAMLAB)

Full Professor

The research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. The following research areas are currently covered: Time-Frequency: Development of technologies for the realization of components and systems for time-frequnecy applications. Micro Bio Electrochemical Systems: Development of variety of microsystrems, based on electrochemical detection, for environmental monitoring, process control and biomedical applications. Optical MEMS: Development of microsystems for applications in optcal

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fiber based communication networks, advanced instrumentation and displays. Microfluidics: Development of microsystems for biomedical applications, incorporating sample pretreatment, separation and fluid handling. Tools for nanoscience: Development of SPM (Scanning Probe Microscopy) Tools for the observation and manipulation at the nanometer scale.

keywords: BioMEMS and Microfluidics; Printed Microsystems; Piezoelectric and SiC MEMS; Power MEMS and Energy Harvesting; Nanotools and Nanosensors; 3D and Smart System Integration.

awards

IEEE Jun-Ichi Nishizawa Gold Medal, IEEEE 2007-06-16 Award for pioneering contributions to microsystem technology and effective transfer into industrial products and applications

Hans G. LIMBERGER

O PTICAL FIBER DEVIC E GRO UP ( STI-SCI)

Senior Scientist

The following research areas are currently covered: Glass structural changes: Characterization of laser induced photosensitivity in germanium doped and germanium free silica optical fibers using grating writing and measurement of laser induced birefringence changes. Characterization of laser induced stress and inelastic strain changes. Novel all fiber lasers: realization and characterization of bismuth doped silica optical fiber lasers with FBG as laser mirrors. Optical fiber sensors: fiber gratings for extended nondestructive testing Reliability of optical fibers and components: stability of UV-induced refractive index changes Grating characterization tools: development of Optical Low Coherence keywords: Optical waveguides; optical fiber components and fiber Bragg grating components; all-fiber lasers; reliability of fiber components; photosensitivity; luminescence; laser spectroscopy; light matter interaction. Reflectometry systems (phase and amplitude); development of optical fiber sensors; laser glass nanostructuring; fabrication of tomographic birefringence measurement systems.

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