Installation and Operation Manual

CAMBRIDGE TECHNOLOGY INC.

3-Axis Modular & Enclosed Laser Scanning Systems Installation and Operation Manual
Cambridge Technology Inc. April, 2011 Cambridge Technology Inc. is a registered trademark. P/N: XXXX-XXXX Rev: A Cambridge Technology, Inc. International Headquarters 25 Hartwell Ave Lexington, MA 02421 Tel: +1-781-541-1600 Fax: +1-781-541-1601 E-mail: scanners@cambridgetechnology.com

Cambridge Technology Europe Headquarters Munchener Strasse 2a D-82152 Planegg Germany Tel: +49-89-31707-0 Fax: +49-89-31707250 E-mail: scanners-europe@camtech.com

Cambridge Technology Asia Headquarters 1F, NOF Kanda Iwamoto-cho Bldg, 3-8-16, Iwamoto-cho Chiyoda-ku, Tokyo 101-0032, Japan Tel: +81 (3) 5825-8853 Fax: +81 (3) 5825-8858 E-mail: scanners-asia@camtech.com

Website: http://www.camtech.com/

T able of Contents
IMPORTANT INFORMATION ............................................................................................... 1
Product Overview................................................................................................................................................ 1 ESD Warning ....................................................................................................................................................... 1 Laser Safety......................................................................................................................................................... 2 Shutter Safety...................................................................................................................................................... 2 Warranty Information.......................................................................................................................................... 2 Customer Support............................................................................................................................................... 3

INTRODUCTION ................................................................................................................... 4
Product Families ................................................................................................................................................. 5 3-Axis Scanning System Modules..................................................................................................................... 6 XY Scanning Module.......................................................................................................................................... 6 DFM Module....................................................................................................................................................... 6 Objective Lens.................................................................................................................................................... 7 Servo Electronics ............................................................................................................................................... 7 Optional - Controller Electronics ........................................................................................................................7 Optional Protection Window Kits..................................................................................................................... 7

THEORY OF OPERATION ................................................................................................... 8

System Overview ................................................................................................................................................ 8 Dynamic Focus Module...................................................................................................................................... 8 DFM MODULE Specifications ............................................................................................................................ 9 Input Beam Aperture........................................................................................................................................... 9

MODULAR SYSTEM INSTALLATION ............................................................................... 10

Mechanical Installation..................................................................................................................................... 10 List of Parts ...................................................................................................................................................... 10 XY Scanning Module Installation ..................................................................................................................... 11 Objective Lens Installation ............................................................................................................................... 12 Establish Target Plane ..................................................................................................................................... 13 Electrical Installation ........................................................................................................................................ 14 Servo Electronics ............................................................................................................................................. 14 Power ............................................................................................................................................................... 15

Communication ................................................................................................................................................ 16 Galvo to Servo Cable Connections .................................................................................................................. 17

ENCLOSED SYSTEM INSTALLATION.............................................................................. 18

Mechanical Installation..................................................................................................................................... 18 Electrical Installation ........................................................................................................................................ 18 Water and Air Connections.............................................................................................................................. 19

COMPONENT INSPECTION .............................................................................................. 20

Static Inspection ............................................................................................................................................... 20 XY Scan head Module ..................................................................................................................................... 20 Z Module .......................................................................................................................................................... 20

LASER INSTALLATION AND ALIGNMENT ...................................................................... 21 SETUP AND OPERATION ................................................................................................. 23

Determining Field Size and Working Distance .............................................................................................. 23 Using a Standard Configuration ....................................................................................................................... 24

MAINTENANCE................................................................................................................... 25
Periodic Maintenance ....................................................................................................................................... 25 Initial Service ..................................................................................................................................................... 25 Recommended Daily Service........................................................................................................................... 26 Lens Protection Window Cleaning.................................................................................................................. 26 Basic Cleaning Procedure................................................................................................................................ 26 Back-spatter/Burned-in Damage...................................................................................................................... 27 Mirror Cleaning Procedure............................................................................................................................... 27

OUTLINE DRAWINGS........................................................................................................ 29
PS2 50mm High-Power YAG System ........................................................................................................... 30 PS2 50mm CO2 System................................................................................................................................. 31

List of Figures
Figure 1: Basic 3-Axis Scanning System Configuration........................................................ 4 Figure 2: System Overview .................................................................................................. 8 Figure 3: Input Aperture........................................................................................................ 9 Figure 4: Modular System Configuration ............................................................................. 11 Figure 5: Mounting of scan head to rail (Top view)............................................................. 11 Figure 6: Mounting of the DFM to rail (Top view). .............................................................. 12 Figure 7: Clamping objective lens to scan head. ................................................................. 12 Figure 8: Joining objective lens to DFM.............................................................................. 13 Figure 9: Target plane location with respect to the system.................................................. 13 Figure 10: ProSeries II Analog Servo Assembly................................................................. 14 Figure 11: Lightning II Digital Servo Assembly .................................................................... 14 Figure 12: Typical complete system setup ......................................................................... 22

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

1
Important Information
Product Overview
Congratulations and thank you for purchasing a Cambridge Technology 3-Axis Scanning System. The configuration you have received can be identified by the label found on the rear of the product. The label identifies the model name, part number and serial number.

ESD Warning
The electronics that Cambridge Technology manufactures - including galvanometers and servo controllers - are electrostatic discharge (ESD) sensitive. Improper handling could therefore damage these electronics. Proper handling is required. Cambridge Technology has implemented procedures and precautions for handling these devices and we encourage our customers to do the same. Upon receiving your components, you should note that they are packaged in an ESD-protected container with the appropriate ESD warning labels. The equipment should remain sealed until you are located at a proper static control station. A proper static control station should include: A soft grounded conductive tabletop or grounded conductive mat on the tabletop. A grounded wrist strap with the appropriate (1 Meg) series resistor connected to the tabletop mat and ground. An adequate earth ground connection such as a water pipe or AC ground. Conductive bags, trays, totes, racks or other containers used for storage. Properly grounded power tools. Personnel handling ESD items should wear ESD protective garments and ground straps. NOTE: Any equipment returned to the factory must be shipped in anti-static packaging.

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Laser Safety
Please read all operating instructions completely before installing and using the 3-Axis Scanning System.

Laser Radiation: Do not stare directly into a laser beam. Follow all system laser safety requirements during installation and operation. Cambridge Technology recommends the use of a shutter to prevent unwarranted emission of laser radiation, where practical. Use of controls, adjustments, or procedures other than those specified in this manual without consulting a competent safety professional may result in component damage, and/or exposure to potential hazards. Always follow established industrial safety practices when operating equipment. This system is designed to be operated in conjunction with a laser. Therefore, all applicable rules and regulations for safe operation of lasers must be known and applied when installing and operating the system. Since Cambridge Technology Inc. has no influence over the employed laser or the overall system, the customer is solely responsible for the laser safety of the entire system.

Shutter Safety
For all 3-Axis Scanning Systems, we strongly recommend that you use a laser with an internal shutter mechanism. If this is not possible, consult the laser vendor to design a proper safety shutter that, when activated, will eliminate all possibility of exposure exceeding Class 1 limits. The safety shutter should be located between the laser and the input aperture of the 3-axis system. This is the users responsibility.

Warranty Information
The Customer shall examine each shipment within 10 days of receipt and inform Cambridge Technology of any shortage or damage. If no discrepancies are reported, we shall assume the shipment was delivered complete and defect free. Cambridge Technology warrantees products against defects up to 1 year from manufacture date, barring unauthorized modifications or misuse. Repaired product is warranted 90 days after the repair is made, or one year after manufacture date - whichever is longer. Contact Customer Service at +1-781-541-1600 to obtain a Return Materials Authorization (RMA) number before returning any product for repair. All orders are subject to the Cambridge Technology Terms and Conditions and Limited Warranty. Contact your local sales office for the latest version of these documents and other useful information.

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Customers assume all responsibility for maintaining a laser-safe working environment. OEM customers must assume all responsibility for CDRH (Center for Devices and Radiological Health) certification.

Customer Support
Cambridge Technology has support services to address your questions or concerns with either the product or the manual you are using. Before calling for assistance, be sure to refer to any appropriate sections in the manual that may answer your questions. Call Cambridge Technologys Customer Service Department at +1-781-541-1600 Monday through Friday between 8 A.M. and 5 P.M. local time (GMT 05:00 Eastern Time (US & Canada)). Customer service personnel will be able to give you direct assistance and answers to your questions. See the Copyright page for International, European and Asian contact information.

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

2
Introduction
Cambridge Technology presents the 3-Axis Scanning System, a dynamic focusing scan head offering substantial flexibility to integrators utilizing lasers in manufacturing and lab environments. The 3-Axis Scanning Systems optical leveraging allows for smaller spot sizes and larger field sizes than traditional f-theta two axis systems. In addition, the 3-Axis Systems can adjust to varying working distances and active field sizes, particularly useful for product lines with different sized parts or curved working surfaces. 3-Axis Scanning Systems are not limited with the laser power handling capabilities of traditional f-theta lenses and can handle substantially more laser power. Each 3-Axis System combines Cambridge Technology XY scanning systems with dynamic focusing technology, control electronics, and application software into a three-axis laser scanning system. This system precisely positions focused laser beams to perform industrial laser processing tasks. The information in this manual familiarizes the user with the theory and operation of the 3-Axis Scanning System hardware. The user needs to consider important laser safety considerations when utilizing any laser device.

Figure 1: Basic 3-Axis Scanning System Configuration

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Product Families
Cambridge Technology has two main product families: ProSeries Analog Systems Lightning Digital Systems.

Both 3-Axis families utilize the same optical design. Table below lists some of the standard available configurations by wavelength and mirror-aperture.

ProSeries Analog

Lightning Digital

CO2 Laser Products (9.36um - 10.6um) ProSeries II 30 mm System ProSeries II 50 mm System YAG Laser Products (1060nm - 1080nm) ProSeries II 30 mm System ProSeries II 50 mm System 532nm Laser Products ProSeries II 20 mm System 355nm Laser Products ProSeries II 20 mm System Lightning II 20 mm System Lightning II 20 mm System Lightning II 30 mm System Lightning II 50 mm System Lightning II 30 mm System Lightning II 50 mm System

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

3-Axis Scanning System Modules

All 3-Axis Systems utilize post-objective scanning. The scanning element (XY scan head) is positioned in the optical path after (post) the imaging element (objective lens). Post-objective scanning permits both fixed focus and dynamic focus laser beam configurations. The 3-Axis Scanning System employs a dynamic focus module in all standard variations.

XY Scanning Module The XY scan head module is an OEM unit with a laser-safe enclosure. The enclosure optically seals the input beam aperture and provides an output aperture that limits exposure to radiation outside the intended scan field. The XY Scanning Module deflects the laser beam in the X and Y axes under the control of the X and Y galvanometers that are attached to the mirrors. These galvanometers are closed loop, limited rotation, servomotors.

DFM Module The Dynamic Focus Module (DFM) is a unique Z-axis scanning element that adjusts focus on the fly via a previously generated look-up table. The Dynamic Focus Module contains a lens cell (the dynamic expansion lens) that translates along its optical axis under precise motion control. The Dynamic Focus Module, like the X and Y scanners, is a galvanometer-driven device, a closed-loop, limited rotation, servomotor. It receives its control signal and power from the D-to-A Card.

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Objective Lens The Objective Lens couples the beam from the dynamic expansion element through the XY scan head and onto the target field as a focused spot. Its focal length, the distance from the dynamic expansion lens, and the focal length of the dynamic expansion lens determine the working distance of the target as well as the leverage ratio between the translator motion and the motion of the focused spot.

Servo Electronics The Servo Electronics are tuned individually for each scanning system. The Module comes with a 25pin XY2100 Digital Communication interface and a 9pin power input. The power requirement for each system may vary depending on the model. Please refer to the electrical interface section of this document for detailed information.

Optional - Controller Electronics Cambridge Technology Inc. provides a variety of controller products for each application. Please contact CTI to choose the most suitable controller for your application.

Optional Protection Window Kits Cambridge Technology Inc. offers additional options such as protection window kits for CO2 and Nd: YAG lasers to prevent the scan head mirrors from being contaminated by nearby sources. Check with a CTI technical sales representative for the latest version and compatibility.

C A M B R I D G E T E C H N O L O G Y 3 - A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

3
Theory of Operation
System Overview
Figure 2: System Overview

CTI 3-Axis Scanning Systems working mechanism is commonly referred to as Post-objective scanning or Pre-scanning objective. The raw laser beam enters the optical system either directly or by using turning mirrors for easier alignment of the system. The dynamic expander lens causes the beam to diverge strongly, thereby expanding quickly on its way to the imaging objective. The Objective lens re-images the beam waist formed by the dynamic expander lens onto the target plane. Motion of the dynamic expansion lens via the linear translator varies the image range from the scan head; hence dynamic focus. The mirrors (MX and MY) are located in the XY scan head. They fold the beam and direct it by angular deflection to scan on the target plane. Orchestrated by a Cambridge Technology Controller, each XY coordinate at the work plane will also have its own Z value which adjusts dynamically throughout the whole job

Dynamic Focus Module

The dynamic expansion lens, located in the Dynamic Focus Module (DFM), travels up and down the optical axis to produce an exact focus at each coordinate of the flat field. Digital geometric correction adjusts focus according to scanning geometry through a software look-up table on the fly. Using this technique, the dynamic focusing lens can be used for: Correcting geometrical distortions in large field scanning applications

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Shifting the focus between different work planes Both, which allows the Cambridge Technology 3-Axis System to enable true 3dimensional scanning.

DFM MODULE Specifications

VALUE Linearity Resolution Repeatability Travel: Speed: 15mm lens 25mm lens Mechanical Dimensions 0.038mm 0.038mm 0.013mm 10.0 mm P-P 2ms 3ms 50.8 x 127 x 76.2 mm DESCRIPTION Deviations from true optical axis position Minimum step size Accuracy with which the translator can be returned to its former position Total Linear Travel Typical Small Step Response Time for a 0.025mm linear step LxW xH

Input Beam Aperture

3-Axis Scanning Systems have varieties of input apertures to correspond with the system laser source. In all cases Cambridge Technology recommends an upcollimation stage prior to the input of the dynamic focus. All spot size calculations are made with the assumption that the input beam exactly fills the input aperture of the corresponding system. Lasers will vary in their output beam size and divergence. Before purchasing or designing an upcollimation stage, please check your laser manual or with your laser manufacturer to acquire these two factors.
Input Aperture

Figure 3: Input Aperture

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

4
Modular System Installation
The flexibility and versatility of the Cambridge Technology 3-Axis Scanning Systems require precision alignment. The 3-Axis Scanning Systems come in two varieties: modular and enclosed. In general, modular systems need mechanical alignment and the enclosed systems are mechanically pre-aligned. Also, each setup offers the choice of either a Lightning II Digital Scanning configuration or a ProSeries 2 Analog Scanning configuration. This section will cover the installation a modular 3-Axis System of both configurations.

Mechanical Installation
Regardless of either the Lightning II configuration or the ProSeries 2 configuration, the mechanical installation of the 3-Axis Scanning System should proceed as follows: List of Parts The 3-Axis Modular Scanning System comes in four modules: XY Scanning Module DFM Module Objective Lens Assembly Lightning II or ProSeries 2 Servo Modules

10

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

The XY Scanning Module and the DFM Module have 4 mounting holes each. The Objective Lens is clamped down into the XY Scanning Module. Servo Modules need to be mounted separately and appropriately heat-sinked.
XY Scanning Module Objective Lens Assembly DFM Module

Figure 4: Modular System Configuration

XY Scanning Module Installation Slide the dowel pins of the scan head in the rail slot and support the scan head to prevent dropping and severe damage. Use four M8 socket head cap screws to screw the scan head on the rail.

M8 Screws
Figure 5: Mounting of scan head to rail (Top view).

NOTE: The rail and the mounting hardware are not included with any modular system.

11

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

DFM Module Installation Slide the dowel pins of the DFM in the rail slot and support the DFM to prevent dropping and severe damage. Use four M8 socket head cap screws to screw the DFM on the rail.

M8 Screws
Figure 6: Mounting of the DFM to rail (Top view).

The Dynamic Focusing Module will arrive pre-aligned to the XY Scanning System. This may be enough for most applications. (For applications that require precision alignment, follow the steps included in the Appendix) Objective Lens Installation Insert the Objective Lens in the scan head lens holder clamp and tighten the 3/16 socket head cap screw. (If using a protection tube, slide it on the Objective lens prior to the installation)

Object ive lens

3/16" screw

Figure 7: Clamping objective lens to scan head.

12

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

If using a protection tube, slide it towards the DFM and tighten the 7/64" socket head cap screw of the objective lens protection tube holder.

Lens protection tube

7/64" screw

Figure 8: Joining objective lens to DFM.

If the laser beam is exposed at any location please take necessary precautions for laser safety or place the modular system inside a laser safe enclosure.

Establish Target Plane

Establish the target plane where objects will be marked. Refer to section # Planning and Preparation to determine the working distance and the lens spacing. Consider making the target plane on an adjustable mount for precision setup control.

Working Distance

Lens Spacing

Target Plane

Figure 9: Target plane location with respect to the system

13

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Electrical Installation
Servo Electronics PRO SERIES II ANALOG CONFIGURATION

POWER

COMMUNICATION

Figure 10: ProSeries II Analog Servo Assembly

The XY2-100 data cable and 9pin Dsub cable are connected to the ProSeries II servo module block as shown in figure X, the XY2-100 cable connects to an Electronic Control Interface and the 9pin Dsub cable connects to a +/-24V Power Supply. LIGHTNING II DIGITAL CONFIGURATION

Figure 11: Lightning II Digital Servo Assembly

14

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

The XY2-100 data cable and 9pin Dsub cable are connected to the Lightning II servo module block as shown in figure X, the XY2-100 cable connects to an Electronic Control Interface and the 9pin Dsub cable connects to a +48V Power Supply. IMPORTANT: Do not plug the communication or the power connectors to any servo module when the power supply is on; hot-plugging may lead to system damage. Power Power is supplied to the 3-Axis Scanning System via a Male 9pin Dsub connector. The power supply should be chosen to match the specifications of each 3-Axis Scanning System. It is important to use the correct voltage for the scan head.

ProSeries Analog

Lightning Digital

All ProSeries II 3-Axis Systems use:

All Lightning II 3-Axis Systems use:

+/-24Volts

+48Volts

Interface

Pin

Assignment

Pin 5

Pin 9 Pin 6

4, 5, 9 3, 7, 8 1, 2, 6

+Vin GND -Vin

Pin 1 9-Pin D-sub (Male) Power Connection

15

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Communication Cambridge Technology 3-Axis Scanning Systems are available with the industry standard digital XY2-100 Communication. The connector is a female 25pin Dsub connector. The 3Axis Scanning Systems have the following pin assignment.

Interface

Pin

Assignment XY2-100 Connections CLOCK CLOCK + SYNC SYNC + DATA X DATA X + DATA Y DATA Y + DATA Z DATA Z + STATUS STATUS + Reserved Pins N/A N/A

Pin 1

Pin 14

Pin 13

Pin 25

1 14 2 15 3 16 4 17 5 18 6 19

25-Pin D-sub (Female) Digital Connection 713 2025

16

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Galvo to Servo Cable Connections The Following Figures illustrate the proper cabling connections for the Modular 3-Axis Systems. The servos and the galvos will be clearly labeled X, Y or Z. Failure to connect the galvo to its respective servo may result in system damage. PRO SERIES II ANALOG CONFIGURATION The analog galvos for ProSeries II based systems have detachable cables which should be plugged in to its matching servo board. The X, Y and Z galvos and their corresponding servo board have matching serial numbers.
3-Axis Servo Module 3-Axis System

Y X Z X
LIGHTNING II DIGITAL CONFIGURATION The digital galvos for Lightning II based systems have imbedded cables which should be plugged in to its matching servo board. The X, Y and Z galvos and their corresponding servo board have matching serial numbers
Y

Z Z Y X

IMPORTANT: Do not plug the galvo or the servo connectors when the power supply is on; hot-plugging may lead to system damage.

17

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

5
Enclosed System Installation
The Enclosed System offers a simple and easy installation. CTI offers many different types of enclosures.

Mechanical Installation
Enclosed systems have varying footprints, mounting mechanisms and alignment schemes. Please refer to the appendix section of the manual for specific outline drawings in order to guide with the mechanical integration.

Electrical Installation
Electrical installation of all enclosed systems is the same. All enclosed systems have one female power connector and one female communication connector outside of the enclosure. Locate the 25-pin communication and 9-pin power connections on your system.

POWER

COMMUNICATION

Pin-outs for the power and the communication connectors for both Modular and Enclosed systems are identical. See Chapter 4 Modular System Installation Electrical Installation section. Note that the differences between the electrical installation of ProSeries-2 and Lightning-2 product families also applies to their enclosed versions. If you are not sure which product you have, please contact Cambridge Technology.

18

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Water and Air Connections

Several Cambridge Technology 3-Axis Enclosed Systems require water and air connections. Please use the following guidelines for recommended integration.

Locate connections for water and air (A):

Use the recommended connectors and air & water flow rates. Some applications may require higher flow rates for air, please consult with a Cambridge Technology technical service before increasing it.

19

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

6
Component Inspection
Static Inspection
The static inspection procedure verifies the proper operation of the equipment. It should be carried out prior to laser operation. Before beginning, insure all AC and laser power is OFF. XY Scan head Module Perform a static visual inspection. Do not remove the protective cover. Shine a light source into the input and output apertures to inspect mirror surfaces. Inspect for visible damage such as: Loose or missing screws. Loose or improperly connected scanner cables. Dirty, cracked or scratched mirrors.

Z Module Remove the top cover of the DFM and perform a static mechanical inspection. Loosen the four 2-56 screws in slotted holes on the top and side covers. Remove the covers, retaining the two screws that join the top and side covers. Examine the exposed guide rails and lens surfaces for visible contamination. It may be necessary to remove the module from the rail. If you must do so, first mark the cart position on the rail with tape. With the driver OFF, verify that the translator carriage slides smoothly by gently pushing it back and forth approximately 12 mm. Reassemble the cover.

20

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

7
Laser Installation and Alignment
The flexibility and versatility of the 3-axis system requires precision alignment. This section covers mechanical assembly and alignment of the laser used in your setup. These procedures represent the steps and sequences required for optimum system performance. Any other techniques may result in system misalignment or failure. Read the procedures thoroughly before attempting to set up your rail. The alignment of laser systems is dangerous if you are careless! Read the list of safety warnings below. Never operate the laser without being absolutely sure where the beam is pointing. Be certain the beam is properly terminated in a suitable diffuse beam dump. Do not touch any mirror or lens surfaces. Wear finger cots or cotton gloves when handling optics. Do not operate laser without wearing laser safety goggles. Never look directly into beam. For this procedure, a CCD camera and remote monitor is recommended for viewing beam position with YAG and visible lasers. Any person performing this procedure must be cleared through the users Laser Safety Officer or his deputy. Do not allow beam exposure on skin. Have proper Laser-safe lab. Evaluate any diffuse or specula reflections for laser hazards. When the laser is ON, procedures must be carried out from a remote, laser-safe location, i.e. hands-on, laser-active procedures must be avoided.

Optical Rail We strongly recommend that you make provisions for semi-permanent mounting at this point to minimize the risk of damaging equipment or accidentally exposing yourself to laser radiation. You can accomplish this by bolting the rail to an optical table or some other rigid structure. Laser Intallation Mount the laser, beam-expander, turning-mirror, and input-aperture stop. Establish the laser beam in the required position relative to the rail.

21

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

A typical complete setup is shown in figure 5.1 below. You may also setup your system on a single straight axis where the laser shines directly into the Dynamic Focus Module, but turning mirrors allow for easier fine adjust of the beam path rather than moving the entire laser assembly.
APERTURE STOP
1

TURNING MIRROR 1 2.75

Customer Supplied Rail

2

LASER

BEAM EXPANDER 1

TURNING 1 MIRROR

Figure 12: Typical complete system setup

Note the location of the laser, beam expander, and turning mirrors for simple adjustment of laser beam alignment. All paths of the laser should be completely enclosed from the surrounding environment. Laser Alignment Tools Cambridge Technology offers alignment tools for some of the enclosed scanning systems. Contact Cambridge Technology for more information.

22

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

8
Setup and Operation
Before operating your system, we suggest planning and preparing your system to make the setup easier. Consider doing all of the following while setting up your system: Find the optimal field size and working distance for your application. Determine the input beam diameter and required hardware to achieve it: beam expander or beam reducer, aperture stop, etc.

Determining Field Size and Working Distance

3-Axis Scanning Systems can be configured for a variety of field sizes. Each field size will result in a different size of the focused spot in the target, require a different working distance and a distance between the objective and the Dynamic Focusing Lens (Lens Spacing), and necessitate a different correction-file.

Working Distance

Lens Spacing

23

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Using a Standard Configuration The tables below show the approximate relationship between the field size, working distance and the lens spacing. Please use this table as a starting point. ProSeries II / LIGHTNING II, 30mm, CO2 System
Mirror Aperture: 30mm Wavelength: 9.36um 10.6um Input Beam Aperture: 17mm Field Size Y (mm) 100 150 200 250 300 350 400 500 750 1000 Field Size X (mm) 130 180 230 280 330 380 430 530 780 1030 Working Distance (mm) 85 145 209 270 332 394 456 580 889 1199 Lens Spacing (mm) 104 88 79 73 69 65 63 59 54 51

ProSeries II / LIGHTNING II, 50mm, CO2 System

Mirror Aperture: 50mm Wavelength: 9.36um 10.6um Input Beam Aperture: 17mm Field Size Y (mm) 100 150 200 250 300 350 400 500 750 1000 Field Size X (mm) 154 204 254 304 354 404 454 554 804 1054 Working Distance (mm) 67 129 191 252 314 376 438 561 871 1181 Lens Spacing (mm) 231 206 189 177 169 162 157 149 137 131

24

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Chapter

9
Maintenance
All the components of the scan system (less the laser) are designed to be maintenance-free with the exception of cleaning exposed optics. Only daily safety inspections are recommended for fixed installations. If the system is moved, do static, first power-up, and alignment procedures on the unit. Caution: Perform all of the following inspections with the laser power OFF.

Periodic Maintenance
Like any high quality optical system, it is important to exercise care in handling the equipment to minimize system degradation and possible hazards. For optimum performance, all optics must be clean. Some optical coatings, however, are delicate and can be damaged by frequent cleaning.

Initial Service
If you suspect after the first day or minutes of operation that there is contamination, inspect the XY module by shining a light source through the input and output apertures. Do not remove the XY module cover. Examine the XY mirrors to determine the extent of contamination. If the mirrors are contaminated, consult the factory to arrange for a cleaning by CTI personnel. You should also examine the lens face towards this module and clean if necessary. Do not remove other assemblies. Evidence of contamination may be useful in developing alternate maintenance. All contamination on optical surfaces must be removed prior to operation or serious damage and/or hazard may result.

25

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Recommended Daily Service

Check that all cables and connections are intact Visually inspect safety enclosures for improper cracks and gaps Perform any procedures required by the laser manufacturer Check all adjustment screws to make certain they have not been tampered with. A torque sealant is recommended for this.

Lens Protection Window Cleaning

Optical materials and coatings are relatively soft and incorrect cleaning techniques can lead to surface damage and drastically reduced component life. Surface contamination can be caused by different substances: Dust, grease and other air-borne particles Products from the laser process back spatter or burned-in particles Organic contamination caused by talking, coughing or sneezing near the exposed optics!

The primary goal is to avoid any contamination by appropriate protection of the exposed optics! The basic cleaning technique described here is intended to help prolong the component life by minimizing surface damage during the cleaning process. Special care should be exercised in cleaning a lens that does not have a protection window

Basic Cleaning Procedure Make sure that the laser is off before performing any inspections! Wear finger cots or cotton gloves when handling optics for inspection. 1. Surface dust and loose particles must be blown from the component using an air bulb, ideally one with a non-return valve. 2. Always use cloth or cotton buds which are moistened with pure acetone. Never use cleaning materials that are dry. 3. Use a soft, lint-free lens cloth. The cloth must be moistened with pure acetone, laid gently on one edge of the component and drawn in a continuous movement to the
26

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

opposite edge. DO NOT APPLY PRESSURE OR RUB! Rubbing may cause permanent surface marks. 4. Blow away residue liquid in one direction with an air bulb. 5. Make sure that no visual contaminants remain on the optical surface. 6. Stubborn stuck-on particles may require an attempt to dislodge them by the local application of a cotton bud moistened with pure acetone. Repeat step 3 above after dislodgement. 7. Organic contamination cannot usually be removed using solvents such as acetone. The residue should be removed using distilled water and a lens cloth prior to finishing per step 3 above. Back-spatter/Burned-in Damage Some forms of back-spatter can be reduced or removed using the basic cleaning process. In general, however, metallic back-spatter or laser-burned-in damage cannot be removed by cleaning. If the extent of the contamination is sufficient to cause process problems (for example, thermal lensing), then you should consider replacing the contaminated component.

Mirror Cleaning Procedure

Although the mirrors can be replaced by the user, we do not recommend you do so. Furthermore, Cambridge Technology does not recommend cleaning front surface mirrors. Mirrors damaged by cleaning are not included under the warranty. The surface of these mirrors damages easily. Prevention of hard dust particles from being entrained in the process and causing scratches is difficult. In many cases, small defects in the mirror's surface may be less harmful than the surface damage resulting from continued cleaning. Cleaning requires special equipment typically not available to typical users. There are times, however, when cleaning the mirror becomes a necessity, for example, stains such as fingerprints must be removed immediately to prevent permanent etching of the reflective surface. The information below includes general recommendations for those special occasions when mirrors must be cleaned. Remove lint from mirrors with a jet of low pressure clean air or nitrogen. Blowing on the front surface of mirrors with your mouth deposits moisture that may stain the finish. A thin overcoating of silicon monoxide protects most mirrors from oxidation. Like many optical coatings, it is easily damaged when attempts are made to clean the mirror surface with a dry tissue. The safest method of cleaning is to place a piece of lens tissue wet with reagent grade (highly pure) alcohol. Lay the wet tissue over the surface of the mirror, gently agitate it, then slide the
27

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

tissue off. If an uneven film remains when dry, repeat the process, but use a jet of low pressure clean air or nitrogen to quickly spread remaining liquid. This should remove the problem blemishes. Note that the mirror is not rubbed. Do not let solvent enter the bonded zone of the mirror. Do not let solvent enter the scanner bearings. When wetting the mirror's surface, hold the scan head at an angle so that the liquid does not wet the scanner. If any solvent is found in the bearings of the scanner, the warranty is voided.

28

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

Appendix

A
Outline Drawings

29

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

PS2 50mm High-Power YAG System

30

C A M B R I D G E T E C H N O L O G Y 3 A X I S S C A N N I N G S Y S T E M I N S T A L L A T I O N A N D O P E R A T I O N

M A N U A L

PS2 50mm CO2 System

31