Professional Documents
Culture Documents
FrC08.5
I. INTRODUCTION
Biological samples can be imaged with AFM in either
of the two imaging modes: contact mode or tapping mode
[1][2]. For AFM studies, biological materials are often
both delicate and tenuously immobilized on a surface,
even more so in fluid than in air. As a result, the vertical
and shear forces exerted on the sample via the tip in
contact mode can damage the sample by compressing,
tearing, or removing it from the surface[3].
Applications of fluid tapping mode AFM [4] [5] in
biology are constantly growing and the data obtained with
this technique are improving, especially in terms of
resolution. Even dynamic processes can be observed
almost as they would occur in vivo [6]. So far, in the
literature there exists an AFM which is developed using
CD/DVD PUH [7] [8] [9]. A PUH is light enough to be
carried for rapid scan so that the sample can remain fully
stationary. Besides, a cost-effective, and lightweight
system with good scanning performance will be needed
for scientific development and is valuable in industrial
applications. The goal of this research is to design an AFM
with the aforementioned features. Utilizing an optical
pickup device as the measuring system and developing an
advanced feedback controller are the appropriate methods
to realize such a system [10][11]. For the former, there
still exists difficulty in employing CD/DVD PUH in liquid,
namely, the measuring system will encounter refraction
problem when the light has to go through different media,
and hence a novel mechanical design has been hereby
designed to solve this tough situation. As for the latter, this
research build an adaptive Q control, for adjusting the Q
S. H. Yen and J. W. Wu are with the Department of Electrical
Engineering, National Taiwan University, Taipei, Taiwan, ROC.
(e-mail:d96921004@ntu.edu.tw)
L. C. Fu is with the Department of Electrical Engineering and
Department of Computer Science and Information Engineering,
National
Taiwan
University,
Taipei,
Taiwan,
ROC.
(e-mail:lichen@ntu.edu.tw)
This work was supported by National Science of Council under the
grant NSC 98-2218-E-002-014.
6549
(a)
(b)
Figure 3. (a) The view of reduced refraction design, (b) the views of
the enlarged kernel parts of the AFM system.
A. Operation Scheme
Tapping mode is a very useful technique. The cantilever
of the probe is oscillated vertically by a small
piezoelectric element near it is resonance frequency. The
amplitude and phase of the cantilever during the scanning
process is usually measured by a lock-in amplifier, and the
topography image is obtained by monitoring these
changes. Because of the short intermittent contact, tapping
mode AFM greatly reduces irreversible destructions on
sample surfaces, so that it has been widely used for
non-destructive imaging of soft and fragile materials such
6550
z + a1 z + a0 z = bu ,
(3)
e =
zd + a1 z + a0 z bu + wc + wv
satisfies || wc
(4)
s = e + e
(5)
s = e + e
= (
zd + a1 z + a0 z bu + wc + wv ) + e
(6)
u AS = b1 (a1 z + a0 z +
zd + w c + e + s + sat ( s))
(7)
where > 0 and > |wmax|. Moreover, b and w c are the
estimated values of b and wc, respectively, and sat(.) is the
saturation function with boundary layer width defined
as:
s
sat ( s )
(1)
e =
zd ( a1 z a0 z + bu )
=
zd + a1 z + a0 z bu
s >
if
s ,
(8)
s <
e = a1 z + a 0 z + w c + w v b u A S e
s sa t ( s )
(9)
a1 = a1 a1 , a0 = a0 a0
b = b b , w c = wc w c
(10)
6551
1 + w w 1
V = ss + a1a1 11 + a0 a 0 1 + bb
2
c c 3
(12)
Substituting eqs. (6) and (9) into eq. (12), we can derive
the following:
1
V = s [sat (s) wv ] s2 + a1 (a11 + sz)
1
1
1
+ a0 (a0 0 + sz) + b(b 2 suAS ) + w c (w c 3 + s)
By the latent purpose to make
adaptation law as
(13)
V 0 , we design the
a1 = a1 = 1sz 1 1a1
a0 = a0 = 0 sz 0 0 a0
b = b = 2 su AS 2 2b
w c = w c = 3 s 3 3 w c
V = s [ sat ( s ) wv ] s 2 + a1a?1 1 + a 0 a0 0 + bb
2
+ w c w c 3
C. Numerical simulation
Referring to sweep-sine identification experiment, the
parameters of the plant are listed below: a0 = 1.02 108 ,
1 a1 + 1 a1 a1
[ a1 a1 ]
2
2
2
2
V s [ sat ( s ) wv ] 1 [ a1 a1 ] 0 [ a 0 a0 ]
2
2
2 2
2
2
2
[ b b ] 3 [ w c wc ]
2
(17)
(16)
(19)
1
w2
V + 1a12 +0a02 +2b2 +3wc2 + max
2
4
(15)
1
1 2 1 2
= 1[ ( a1 a1 )2 + a1 a1 ]
2
2
2
s ,
1
V s[sat(s) wv ] V + 1a12 +0a02 +2b2 +3wc2
2
s
1
1
2
= s swv V + 1a12 +0a02 +2b2 +3wc2
2
1
2
s + s wmax V + 1a12 +0a02 +2b2 +3wc2
2
2
2
wmax
wmax
1
2
+
V + 1a12 +0a02 +2b2 +3wc2
= s + wmax s
4
4
2
(14)
Substituting eq. (14) and the inequality > |wmax| into eq.
(13), we can then derive:
Case 2.
s > ,
1
V s [ sat ( s ) wv ] V + 1a12 + 0 a02 + 2b 2 + 3 wc2
2
s
1
= s wv V + 1a12 + 0 a02 + 2b 2 + 3 wc2
2
s
1
= s + swv V + 1a12 + 0 a02 + 2b 2 + 3 wc2
2
1
s + s wmax V + 1a12 + 0 a02 + 2b 2 + 3 wc2
2
1
= s ( wmsx ) V + 1a12 + 0 a02 + 2b 2 + 3 wc2
2
1
2
2
V + 1a1 + 0 a0 + 2b 2 + 3 wc2
(18)
2
6552
Figure 7. The enlarged picture of the core parts of the AFM system.
Figure 6.
and G
set
= 50,G 0 = 10
IV. Experiments
A. Hardware Setup
The core parts of the experimental setup is illustrated in
Fig. 7. As shown in Fig. 7, the CD/DVD PUH is fixed on
the frame and relatively above the probe mount, and
furthermore the cover slip which are attached to the
precision tuning mechanism and cover slip holder.
The sample used in the following experiment is a test
grating (Calibration grating set TGS1 is intended for z-axis
calibration of the scanning probe microscope and
nonlinearity measurements, and is formed on the layer of
SiO2. The vertical depth is 107.5 nm, and the horizontal
pitch is 3 m, NT-MDT Inc.) with three-dimensional array
of small squares on the sample surface as shown in Fig. 8.
This calibration grating is a silicon step height standard
mounted on 15 mm puck.
To ensure the cantilever beam is totally immersed in the
liquid, a cover slip is placed over the probe. The liquid will
be absorbed between this cover slip and the sample, and
hence we can avoid operating the probe at the surface of
6553
[4]
[5]
[6]
[7]
[8]
[9]
[10]
Fig. 9. Scanning topography and the virtual 3D topography image in
liquid. The total scanning range is 12 m12 m.
[11]
[12]
[13]
[14]
[15]
V. Conclusion
[16]
[17]
[18]
[19]
[20]
[21]
REFERENCES
[1]
[2]
[3]
6554