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Reg. No.

NEHRU COLLEGE OF ENGINEERING & RESEARCH CENTRE

(Accredited by NAAC)
PAMPADY, THIRUVILWAMALA, THRISSUR, KERALA 680 588

SERIES TEST I
MT09 501: MICROFABRICATION PROCESS
Year / Semester & Branch: III / S5 B.Tech. Mechatronics Engineering
Faculty Name: Neethu K
Exam Date:
Time: 90 Min
Max. Marks: 45
PART-A
Answer ALL Questions (5 x 2 = 10 Marks)
1. Define bulk micromachining and list out different etching methods
2. List out the electron beam process parameters
3. Define isotropic, anisotropic, wet and dry etching
4. Identify the process parameters of ultrasonic machining
5. Note about theory of micromachining

PART- B
Answer any THREE Questions (3 x 5 = 15 Marks)
6. Explain about material removal rate of electro chemical machining using the
derivation of equation
7. Compare electron beam and LASER machining
8.

Explain about DRIE

9. Explain different types of micro drilling operations

PART- C
Answer ALL Questions (2 x 10 = 20 Marks)
10. Describe material removal mechanism in EDM and Draw the basic electrical
waveform used in EDM
OR
11. Identify major components of EBM & LBM equipment and State the working
principle of EBM & LBM equipment

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12. Briefly explain about free form optics

OR
13. Process parameters associated with machining characteristics in micro turning process