Name

Reg. No.

NEHRU COLLEGE OF ENGINEERING & RESEARCH CENTRE

(Accredited by NAAC)
PAMPADY, THIRUVILWAMALA, THRISSUR, KERALA 680 588

SERIES TEST I
MT09 501: MICROFABRICATION PROCESS
Year / Semester & Branch: III / S5 B.Tech. Mechatronics Engineering
Faculty Name: Neethu K
Exam Date:
Time: 90 Min
Max. Marks: 45

1.
2.
3.
4.
5.

PART-A
Answer ALL Questions (5 x 2 = 10 Marks)
Define etch rate, selectivity, aspect ratio, over etch, under etch
List out the electron beam process parameters
List out the etchants used for isotropic and anisotropic etching
List out the different micro drilling operations used for micromachining
Define micro turning and micro milling operations
PART- B

6.
7.
8.
9.

Answer any THREE Questions (3 x 5 = 15 Marks)

What are the drawbacks of plasma etching and what is the solution for that? Explain
the method
Explain about lasing action
write down the steps for photolithography process
Explain different types of micro turning operations
PART- C
Answer ALL Questions (2 x 10 = 20 Marks)

10. In electrochemical machining of pure iron a material removal rate of 600 mm3/min is
required. Estimate current requirement. Atomic weight of iron is 56 and valency is 2
and density 7.8 gm/cc
OR
11. Identify the steps in surface machining with figures
12. Process parameters associated with machining characteristics in micro turning
process:
OR
13. Briefly explain about micro drilling operation