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Koper Nik 2011
Koper Nik 2011
Koper Nik 2011
To cite this article: M. Kopernik, A. Milenin, R. Major & J. M. Lackner (2011) Identification of
material model of TiN using numerical simulation of nanoindentation test, Materials Science
and Technology, 27:3, 604-616
Article views: 1
Download by: [University of Saskatchewan Library] Date: 02 April 2016, At: 01:25
Identification of material model of TiN using
numerical simulation of nanoindentation test
M. Kopernik* 1 , A. Milenin 1 , R. Major and J. M. Lackne~
The development of the model of the multistep nanoindentation test with Berkovich indenter,
accounting for the residual stress distribution, is one of the aims of the present paper. The
specimen is unloaded in the intervals between the deformation steps. Substrate, which is
composed of a ferritic steel and biocompatible pulsed laser deposition TiN coating, is
considered. The selection of the TiN was inspired by its perspective application as the coating
for a constructional element of the heart prosthesis (blood chamber and aortic valves). Sensitivity
analysis of the model predictions with respect to its parameters is presented in the present paper.
The theory of elastic-plastic deformations is used in the finite element model, which simulates
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both loading and unloading phases, accounting for the real geometry of the indent. The main goal
of the present paper was to inversely analyse the tests for coating/substrate system. Square root
error between measured and predicted forces is the objective function in the analysis. Results of
the inverse calculations, which are presented in the present paper, may be helpful in simulations
of the behaviour of TiN deposited on substrate in various applications as bionanomaterials.
Keywords: Nanoindentation test, Finite element method, Inverse analysis, TiN, Pulsed laser deposition, Residual stress
the covered substrates (sec Ref. 9). An artificial left modulus) arc studied in the two-stage nanoindcntation
blood chamber shown in Fig. I is an example of future tests. The consistency of experimental results is crucial
application of this material, as discussed in Ref. I. for the identification of different characteristics of the
Authors have already performed simulations of artificial deposited material. On the other hand, there arc various
parts of heart prosthesis using the commercial FE code disturbances in the experiment, which have an cfTcct on
ADINA. A model of aortic valve developed in Ref. I0 is the results. Moreover, the indenter is subjected to clastic
presented in Fig. 2. The opening phase of the process is deformation, which is difficult to evaluate. Thus,
shown. The calculated distribution of the effective stress obtaining the complete material model of coatings
on the outer surface of the open leaflet is presented in directly from the tests is not possible or at least
Fig. 3.
The three-dimensional (3D) FE model of the whole
artificial heart chamber and local multiscalc model was
also developed by the authors. 11 Selected result of
simulations using macromodcl is shown in Fig. 4.
Distribution of the average stress at the inner surface
of the bottom part of the chamber in top view of the
cross-section is presented.
Analysis of results in Refs. I 0 and II confirms the
model's good predictive capability, as far as qualitative
aspects arc considered. The quantitative accuracy
depends, to a large extent, on correctness of selection
of material parameters. Although the micromodcl is
locally adapted, the parameters for model of outer
coating material arc not realistic. Since the real material
parameters of outer biocoatings arc still unknown,
purely clastic model was applied. As a consequence,
the real behaviour of material under working conditions
was not predicted with quantitative accuracy. Supplying
Experimental uf
If)
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~0
N N
r::: til
specific laser and material parameters, ablation takes ::::SQ. 6co 6
co
~C)
place under quasi-equilibrium conditions, as in the laser
induced thermal vapourisation, or far from equilibrium,
as in many cases of pulsed laser ablation. Thin film :i"
:g
formation based on pulsed laser ablation is termed PLD. CD <0
r::: Cil
Pulsed laser deposition is of particular interest because it u
~: 0 co
enables one to fabricate multicomponent stoichiometric J:C) z
films from a single target. In the PLD method applied in
the present work, the high purity titanium targets were "C
0
used for the ablation experiments using a pulsed ...
.s:
Nd:YAG laser system, which provides four beams of
1064 nm wavelength, 0·6 J pulse energy and 10 ns pulse
CD
E
!r:::
u;
2
u;
2
u;
2
-
(/)-
<ll (/)
-<ll
disadvantages at smaller scales in that larger forces arc conclusion that the values of compressive residual
required and specimen gripping may be difficult. In stresses arc bigger when TiN is deposited by PLD
addition, specimen preparation can be expensive and method. Therefore, the compressive residual stress
time consuming. Gripping and alignment arc fraught distribution obtained by the authors 12 was introduced
with potential errors. Strain measurement requires as the initial stress in the mathematical model of
unique approaches. The second known method, which specimen deformed during the nanoindcntation test in
is the nanoindcntation test, is easy to usc and requires the present work.
little specimen preparation. The principal goal of this
testing is to extract clastic modulus and hardness of the Nanoindentation test: experimental procedures
specimen material from experimental readings of inden- and data processing
ter load and depth of penetration. For these reasons, this The application of nanoindcntation test allows exact
method is widely used in testing, especially of thin films determination of hardness and clastic modulus of thin
up to nanometrc scale thickness. On the other hand, films of a minimal film thickness equal several tens of
there arc many factors to consider for extracting nanomctrcs, without noticeable influence of the sub-
quantitatively reliable mechanical properties from a strate hardness. The technique is based on indenting of
nanoindcntation test. the indenter, which is pressed into the surface with the
Recapitulating, there is a lack of mechanical proper- forces in the range from nanoncwton to microncwton.
tics of TiN coating deposited on clastic substrate using As it is done in the universal hardness tests, nanoindcn-
the PLD method. The nanoindcntation test is fully tation depth is measured simultaneously. The Bcrkovich
recommended to obtain mechanical properties of TiN indenter made of diamond is used. The indenter has a
coatings deposited on substrates by applying different top angle of 142·3", which makes it usable for thin films
deposition techniques. of > 100 nm thickness. The very low indentation depth
Results of the authors' earlier research 12 for TiN, allows fulfilling the requirement of the standards of a
performed to obtain the values of residual stress in TiN maximum of one-seventh of the indentation depth/film
after deposition process using PLD method, arc shown thickness ratio. Larger indentation depths would result
in Table 2. Dealing with the thickness from 0·5 J.lm, it in plastic zone formation not only in the film but also in
needs to be concerned that the coating is deposited with the interface and in the substrate material.
the late mechanism of the thin film growth. Thus, the The hardness II and clastic modulus E arc measured
thicker the coating is, the lower are the residual stresses. in the paper on the basis of the clastic contact problem
The crystalline phases present in the TiN coatings of Boussincsq and Hertz from the measured force/
were studied by means of X-ray diffraction. Crystallo- indentation depth ratio of a measuring cycle of loading
graphic texture was observed using the same method. and unloading. The slope of the loading curve increases
The application of a pscudoposition sensitive detector with increasing indentation depth h (due to the
allowed measurement of the macrorcsidual stress increasing contact area between the film and indenter).
When the force maximum is reached, further deforma-
Table 2 Values of residual stress measured12 for TIN tion due to plastic flow during 30 s waiting at this force
deposited by PLD method on polyurethane is seen. The hardness of the material is calculated from
substrate the equation
Residual stress II= Pmax
Number Coating thickness, (compressive stress}, (I)
A max
of specimen ~tm GPa
where Amax is the maximal projected contact area and
1 0·5 2-4 pmax is the maximal indentation force.
2 1 1-7
The calibration of the tip shape is based on the
3 3 15
determination of the shape function of the indenter. 2
4000
substrate
z:::l 3000 deformation
~
fracture or
2000 coating
,g
1000
repeated
0 nucleation
0 30 60 90 120 150 alter fracture
displacement. nm
6 Force-displacement curve measured for TIN
~r C~sv;) + C~iVf)
sample for calibration purposes. The shape function is
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A=!:
4
(!...)2
Er
(4) Transmission electron microscopy
microstructure of TiN coating deposited on PU
where Er is the reduced Young's modulus calculated by Transmission electron microscopy was adopted to
assuming that the measured depth includes contribution analyse the TiN coating. The examined coating of
of both the specimen and the indenter 0·35 11m was assumed to be representative for 'thick'
Table 3 Intervals of TIN properties observed in literature for different deposition processes and measured by authors
->-.4
.:l!:
·Vic: 3
0>
(/)2
I
100 150 65.3 67.5 0.1 0.2
R,nm a., deg j.L, -
cant, especially considering big disturbances of tip radii. a;=Et:; ifa;:S: Y (6)
Therefore, the authors assumed that the spherical tip of
the indenter can be neglected in further studies. In
a;= Y + {J(Et:;- Y) if a;> Y (7)
addition, the results of distribution of effective strain
(sec Fig. 12) arc also not significantly disturbed by the where a; is the intensity of stress, 1;; is the intensity of
spherical tip of indenter; only very small difTcrcnccs were strain, E is the Young's modulus, Y is the yield stress
observed. Recapitulating, the effect of the spherical tip and {J is the hardening coefficient (0 <; P~ I; {J= I for
of the indenter is not worth to be introduced in the new ideal clastic materials, {J=O for ideal plastic materials).
models of nanoindcntation test because of very small This bilinear clastic-plastic material model assumed
influences on force displacement data. for TiN coating is plotted in Fig. 14. The parameters t:~o
The further work was dedicated to the sensitivity analysis r. 2, a 1 and a 2 in the model have to be determined using
with respect to the shape parameter (angle a) of the cone inverse analysis.
indenter (modelled version of Berkovich indenter), which is
presented in Ref. 21. The sensitivity analysis of the model of Basic equations
the nanoindcntation test, with respect to the wide range of The initial stress {a 0 res} is taken into account in the
cone indenter angles, leads to the conclusion that this formulation of boundary problem. The relation between
sensitivity varies for different angles. The maximum value of stresses and strains 23 is written using the matrix form
the sensitivity is observed for an angle of 58", while the
smallest is observed for an angle of 88°. In comparison, the {a}= [D]( {t:}- {1;0 res}) (8)
sensitivity obtained for the angle 70" of the indenter
where
(nominal Bcrkovich indenter) is a medium sized value.
Computed stress distributions in the specimen show that the
cone indenter with an angle of 70" introduces the smallest I~) res }
1:0 res
values of stress. Therefore, the model of indenter with an {l~)res}=. (9)
angle of 70' was selccKod by the authors and was applied in {
1-o res
the present paper. 0
(a) (b)
TiN TiN
Steel Steel
a r=O mm; b r=0·00008 mm
12 Distribution of effective strain for two radii of spherical tip of Indenter
0,30
- F E - Forge 2
0,25 - - - FE - Authors
~ 0,20
2f 0,15
~ 0,10
.E
0,05
0,00 L--,.....----.....-------......_.........._
0 20 40 60 80 100
displacement, nm
13 Comparison between output predicted by Forge 2 and
authors' code
15 Residual stress distribution In TIN/steel specimen
E'
[D]= (l+v)(l-2v)
J~{U}T[B]T[D][B]{U}dV-
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We=
1-v v v 0
v.
v 1-v v 0
v v 1-v 0
(10) J{U}T[B]T[D]{r~lrcs}dV-
v.
0 0 0 (l-2v)/2
(1·
J{U}T[N]T {p}dS (12)
E'=~ (II) s.
f.j
where S is the contact surface between material and
where {a}= { ar a, ao trz }T is the stress tensor. in indenter, {p} is the contact stress, { U} is the displace-
the cylindrical coordinate system, {r.} = {t:r l:z 1:o 21:rz} 1 is ment vector, [B] is the matrix containing the derivations
the strain tensor in the cylindrical coordinate system, v is of shape functions, [D] is the matrix containing the
the Poisson's ratio, {a 0 resl is thee initial (residual) appropriate material properties in equation (10), [N] is
stresses, {f-o res} is the initial (residual) strains, which arc the matrix of shape functions of FE, Vis the volume of
independent of stresses {a}, and £' is the modulus of sample, Vc is the volume of current FE e, is thes.
plasticity, which is equal to Young's modulus in clastic contact surface between current outside element e and
zone in linear elasticity (see equation (6)). ror linearisa- surface of indenter.
tion of boundary problem, the method of iterative The stiffness matrix [K] and load vector {F} arc
calculation of modulus of plasticity is used. written according to forms
The variational principle of the non-linear clastic and
clastic-plastic theory leads to the following functional
form for rE e
[K] = J[B]T[D][B]dV (13)
v.
R= LN. J[aorcs(r-orcs)-irurcsJ dV
2
( 15)
c=l
v.
where e is the number of current FE, N. is the number of
FEs in zone with initial stress, iTo res is the experimental
value of initial stress in current rE e, and ao rcs(r-<, res) is
the calculated distribution of initial stresses dependent
E, of I~) res· In the present work, the value of iTo res is equal to
1·5 GPa (sec Table 2). The value of initial stress is taken
14 Hardening curve of coating from Ref. 12 and, in the present work, is interpreted as
determination Of distribution Of f-o res and ITo res• the E_ 2.5 o Eps22
simulations of loading and unloading stages are
possible. The residual stress distribution in the TiN/steel
~ 2
-Sig21
• Sig22
15
specimen is presented in Fig. 15. There arc two fine mesh · A Eps1.Sig 1.Eps2.Sig2
areas in the PE model of this specimen. They arc located
in the upper coating and in the centre of the specimen. 0.5
The FE model, which is used to solve the boundary 0~~~~3L~----,-----r---~----~
problem, is composed of 3689 four-node FEs and 3840 0 25 50 75 100 125 150
nodes. The average computing time of the complete two- displacement. nm
stage simulation (40 computing steps) using standard PC
16 Results of 1-8 simulations for disturbed parameters
is -0·3 h. Using the commercial FE code (Forge code)
of TIN material models
increases the computational cost about several times.
Modelling of the unloading step is performed follow-
ing the theorem of unloading introduced in Ref. 23. The Sensitivity coefficients
following algorithm is performed for each time step of Sensitivity analysis allows estimation of the influence of
unloading:
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E1 a, MPa E2 a2 , MPa
c., 1,5
- 0.75
c::
(l)
'0
0
~
0
~ 0,5
u 0
~ u
~
-~ ~
~ 0,5 '50
'-'=! •
25
'U)
c::
0
~
Eps11 Eps12 Sig11 Sig12 Eps21 Eps22 S<g21 Sig22 0
parameters of material model
0,0009 0,0011
17 Sensitivity coefficients with respect to material model
thickness of coating, mm
parameters
19 Sensitivity coefficients with respect to thickness of
considered parameter is disturbed by 10'% with respect TIN coating
to its initial value in the study.
coefficients arc small, and the average value of this
Results of sensitivity analysis and discussion coefficient is 0·5.
To estimate the effect of chosen bilinear material model The last step of the sensitivity analysis was dedicated
Downloaded by [University of Saskatchewan Library] at 01:25 02 April 2016
for TiN coating on the output of the FE model, the to evaluation of influence of residual stress. Three
simulations for the data presented in Table 4 arc residual stresses were considered: 1·35 GPa, 1·5 GPa
performed. and 1·65 GPa. The force displacement curves corre-
Force-displacement curves for the data in Table 4 arc sponding to these stresses arc plotted in Fig. 20, and the
plotted in Fig. 16. The sensitivity coefficients determined calculated sensitivity coefficients arc shown in Fig. 21.
using equations (19) and (20) arc shown in Fig. 17. The The contribution of unloading phase into the sensitivity
difference between loading and unloading stage of coefficients is, in this case, significantly bigger in
nanoindentation test is clearly visible in this figure. comparison with the loading phase. The values of
The whole response of the fE model is referred to as sensitivity coefficients arc very small and the average
'Up_Down'. The partial response related to loading value of this coefficient is 0·15. Therefore, there is no
stage is called 'Up', and the part responsible for the need for high precision of evaluation of the residual
unloading stage is called 'Down'. The contribution of stresses.
the unloading phase into the sensitivity coefficients is
smaller than that of the loading phase. The general
conclusion is that all sensitivity coefficients arc small.
Inverse analysis
The biggest value of this coefficient is obtained for The purpose of this part of the work was the
'Sigl2'. The average sensitivity coefficient with respect to identification of the material model parameters on the
the parameters of TiN bilinear model is 0·5. basis of the nanoindcntation test data for biocompatiblc
The thickness of the deposited TiN coating is the coating deposited on substrate. The known analytical
dependent variable in the second step of the sensitivity methods described in Ref. 2 used in experimental
analysis. The three thicknesses were examined: nanoindcntation test lead to the evaluation of material
0·0009 mm, 0·001 mm and 0·0011 mm. Force-displace- properties, and they give good results for the basic
ment curves for these three thicknesses are plotted in material parameters (Young's modulus and hardness)
Fig. 18. The sensitivity coefficients calculated with but not for the complete material models.
respect to thickness of TiN are shown in Fig. 19. The In the previous work, 7 the conformity between the
contribution of unloading phase into the sensitivity inverse approach for indentation and the tension test for
coefficients is, in this case, similar to the contribution of
the loading phase. The values of the sensitivity 0 1,35 GPa
4
4,5
o 0,0009mm
1,5 GPa
4 • 0,001 mm
3.5 o 0.0011 mm z 3 0 1,65 GPa
E
t 3 -2
(l)
.; 2,5 u
~ 2
'-
J2
1,5
0,5 0
25 50 75 100 125 150
0 25 50 75 100 125 150
dcsplacemert. nm displacement, nm
18 Results of simulations for disturbed thickness of TIN 20 Results of simulations for disturbed residual stress of
coating TIN coating
c • Expenment
(1)
0,45
5 •.a. 2
1 run
run
X
·o X 3run
:E 4 :.: 4run
~ 0,3 z 0 Srun
u E
+ 6run
~ ~3
'5 £!
•-ts 0,15 2
c
(1)
V)
0
1,35 1,65
residual stress, GPa displacement. nm
21 Sensitivity coefficients with respect to residual stress 23 Outputs of model: Inverse results of 1-6 computing
of TIN coating runs for 1-6 starting points
experiment gives more consistent results. However, this 1: 2 in the bilinear elastic-plastic material model for the
test cannot be performed for coatings. However, the TiN coating, described by equations (6) and (7). These
good capability of the inverse method to determine the parameters arc determined by searching for the mini-
parameters for the material model of C Mn steel was mum of the goal function (21 ). Stop criterion is achieved
confirmed, and, therefore, this method is used in the if the predicted value of force for the indented specimen
present work to identify parameters of material model is close enough to the experimental one.
for TiN coating using the nanoindcntation test results. The inverse solution used the simplex optimisation
mcthod. 7 •26 Each evaluation of the goal function
Description of method requires FE simulation, which approximately lasts
The idea of the inverse analysis presented in Fig. 22 is to -10 h. Thus, to decrease the computing cost, the
find, using the optimisation procedure, the parameters penalty functions are applied for the forbidden intervals
of material model, which give the best matching between of material model parameters.
results of the FE simulation and experiment. In the
considered case, the specified goal function in optimisa- Results and discussion
tion is the mean square root error between measured The whole inverse analysis for the nanoindcntation test
and predicted loads in the nanoindcntation test of investigated TiN/ferritic steel specimen lasts a few
days. The value of goal function was large in most of the
performed computing runs, but the finally achieved
(21) result considered as the set of parameters of material
model is related to the smallest value of goal function.
where F.:xP is the experimental forces versus depths, The computed results arc shown in Figs. 23-26 for
Fs 1M is the values of forces versus depths predicted by comparison with experimental data, not only consider-
the FE model and N is the number of sampling points in ing the small value ofthc goal function. The analysis and
each test. comparison done among all calculated results lead to the
The output of simulation is force versus depth data at statement that the result of the computing run no. 9
the loading and unloading stages of the nanoindcntation gives the best match between numerical and experi-
test. In the present work, the number of sampling points mental data using developed FE model and code.
N is equal to 40 for both simulation and experiment, 20
8000
7000
2000
1000
0
0 0,025 0.05 0,075
strain
45
· • Expenment the residual stress distribution and coating thickness do
4 •7run
•
X
not have a significant effect on the model output. but
they cannot be totally omitted in the future studies.
3,5
• 8run •><:.
parameters of chosen material model for TiN deposited the development of the efficient optimisation procedure
on fcrritic steel arc as follows: e1 =0·009, u 1 =2614 MPa, using simplex algorithm and penalty functions was
~: 2 =0·166 and a 2 =9107 MPa. According to this solu- performed.
tion, the clastic modulus of TiN is equal to 290·4 GPa. When the optimal coefficients arc introduced in the
The obtained elastic modulus is also observed in ranges model, a quite good conformity is observed between the
of values given in literaturc. 2•15 · 16 results of the FE simulation and the experimental data.
It can be concluded that the bilinear material model The final value of the goal function (21) is not given
docs not introduce the lack of uniqueness in solution because this value is multiplied by penalty functions. On
because only one set of parameters gives the minimum the contrary, the uniqueness of the solution is the
of the goal function. The inverse procedure enables advantage of the chosen bilinear material model, which
determination of parameters of the material model for was not noticed for the Hollomon material model used
coatings using the nanoindentation test data. In addi- in Ref. 7.
tion, the mathematical model of nanoindcntation test Identification of the material properties for the
with initial (residual) stress distribution reproduces the coatings deposited by PLD technique, which arc
experimental conditions, quite adequately describes the supposed to be used for artificial heart prosthesis as
behaviour of the investigated specimen and allows to constructional materials, can be one of the possible
obtain the satisfying results in a reasonably short time. future applications of the developed numerical tool.
Since good capabilities of the approach used in the
Final remarks and prospects present paper was confirmed, the authors intend to usc
this approach to determine the values of more para-
The sensitivities of the output of nanoindentation test meters in the complex material models, even for multi-
model with respect to the thickness of deposited coating, layer coatings, like for example parameters of fatigue
residual stress and parameters of the bilinear material material models.
model arc presented. The results of the sensitivity
analysis unequivocally proved that small disturbances Conclusions
of parameters do not have high influence on model
output. The biggest sensitivity coefficient was obtained The performed research and achieved results lead to the
for parameter u 1 of the material model. Small changes of following conclusions.
I. The conformity between the authors' FE code and
10000 -+-7run the commercial Forge 2 code in the range of deforma-
-.-a run tion during the loading stage in the deformation process
-*- 9run is acceptable.
8000
....,._ 10 run
-<r-11 run
2. The sensitivity analysis of the load in the model of
& 6000
the nanoindcntation test, with respect to the parameters
::!: of the material model for TiN, residual stress in the
lli
(I)
coating and thickness of the coating shows that
11; 4000
sensitivity is highest for the a 1 material model para-
meter. This parameter determines the transition point
between clastic and plastic part of the model. Sensitivity
with respect to residual stress is larger during unloading
stage than during loading. Owing to low values of
sensitivities, the need for precise evaluation of the
stram
residual stress and thickness of coating measured in
26 Material models: Inverse results of 7-12 computing experiments is not so restrictive, but they have to be
runs for 7-12 starting points considered and cannot be omitted in future works.
3. The developed model reproduces well the experi- 4. T. F. Page and S. J. Bull: Philos. Mag. Lett., 2006,86, 5331-5346.
5. S. J. Bull, E. G. Berasetegui and T. F. Page: Wear, 2004, 256, 857-
mental conditions and the behaviour of the investigated
866.
specimen and allows getting the result in a reasonably 6. M. Kopernik and M. Pietrzyk: Arch. Metal/. Mater., 2007, 52, 299-
short time. Since even the optimisation algorithm requires 310.
numerous simulations of the nanoindentation test, the 7. M. Kopernik, M. Spychalski, K. J. Kurzydlowski and M. Pietrzyk:
mentioned features arc important advantages of the code. Mater. Sci. Techno/., 2008, 24, 369-375.
4. The inverse procedure based on the simplex 8. J. M. Lackner, W. Waldhauser, R. Major, L. Major and B. Major:
Surf Coat. Techno/., 2006, 201, 4090-4093.
optimisation technique allowed to determine parameters 9. R. Major, F. Brucker!, J. M. Lackner, W. Waldhauser,
of the material model for TiN coating deposited on steel. M. Pietrzyk and B. Major: Bull. Pol. Amd. Sci. Techno/., 2008,
The following values of the parameters were obtained: 56, 223-228.
r. 1 =0·009, u 1=2614 MPa, r. 2 =0·166 and u 2 =9107 MPa, 10. M. Kopernik and J. Nowak: Arch. Mech., 2009, 61, 171-193.
which lead to Young's modulus of 290 GPa. II. A. Milenin and M. Kopemik: Acta Biomech. Bioeng., 2009, II, 13--
20.
5. The uniqueness of the solution inverse and the 12. R. Major, E. Czamowska, A. Sowiriska, R. Kustosz, J. M.
capability to give the exact values of strain and stress in Lackner, W. Waldhauser, M. Wozniak, T. Wierzchori and
the transition point between clastic and plastic part of B. Major: e-Polymers, 2005, 26, 1-9.
material model arc the advantages of the bilinear 13. D. Carole, N. Frety, S. Etienne-Calas, C. Merlet and R.-M. Marin-
clastic plastic material model for coating. Ayral: Mater. Sd. Eng., 2006, 419, 365-371.
14. M. Guemmaz, A. Mosser and J. Grob: Appl. Phys., 1997, 64,407-
415.
Acknowledgements 15. J. Russias, S. Cardinal, J. Fontaine, G. Fantozzi, C. Esnouf and
K. Bienvenu: Int. J. Refract. Met. liard Mater., 2005, 23, 344-349.
Financial assistance of the MNiSzW (project no. N507
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16. 0. R. Shojaei and A. Karimi: Thin Solid Films, 1998, 332, 202-
136 32/3962) is acknowledged. The Austrian author 208.
would like to thank the Austrian Federal Ministry of 17. J. A. Thornton: J. Vac. Sci. Techno/., 1974, II, 666--670.
Traflic, Innovation and Technology, the Austrian 18. C. S. Oh, H. J. Lee, S. G. Ko, S. W. Kim and H. G. Ahn: Sens.
Actuator, 2005, 117, 151-158.
Industrial Research Promotion Fund (FFG) in the
19. J. E. Greene: 'Multicomponent and multilayered thin films for
frame of the Austrian Nanoinitiativc program, the Gov- advanced microtechnologies: techniques, fundamentals and
ernment ofStyria, and the European Union in the frame devices'; 1993, Dordrecht, Kluwer Academic.
of EFRE for financial support. 20. M. Kopernik and D. Szeliga: Comput. Methods Mater. Sci., 2007,
7, 255-261.
21. H.-J. Albrecht, T. Hannach, A. Hlise, A. Juritza, K. Miiller and
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