Linear Motor Technology

㈱ソディック

---Possible! Only with Linear Motor Technology---

September 29, 2005 
 Major Positioning Axis for Machine Tools

Where Linear motors are used All axes for Wire-cut EDM

Z Axis U Axis V Axis

Tool
Work Piece

Linear Encoder
X Axis

Tapered workpiece
Y Axis

Z-axis

X Axis

Y Axis

For : Machining center,EDM, etc For : Wire-cut EDM

 Linear Motor vs Rotary Motor？

Coil Coupling
Encoder

Magnet plate
Motor Ball screw
Linear scale

Linear scale

Encoder
Encoder

Table Table

Linear motor Motor

Magnet
Guide   Guide

Ball screw

Positioning direction = Direction which accuracy is needed.

 Problem to change Rotary Movement to Linear Movement

Accuracy deteriorates
●Accuracy changes over the years

Friction

●Energy
½･M･V2 ½･M･V2 +½･I･ω2

Table Table

Linear motor Motor

Magnet
Guide    Guide

Ball screw

Positioning direction=Direction which accuracy is needed

 Linear Motor & Rotary Motor？ 
Conclusion

Linear motor

Linear move

Direct drive

Rotary motor

Rotary move
 Linear Axis for Machine Tools

U Axis V Axis
Z Axis
Tool
Work Piece
Linear Encoder Tapered workpiece
X Axis

Y Axis

X Axis
Y Axis

Machining Center, Die-sinker EDM，etc Wire-cut EDM

Linear Motor for Machine Tools
How the magnetic field is formed

Move

U V W U V W U V W

S S S
N N N

Ｓ Ｎ Ｓ Ｎ Ｓ Ｎ
Subject of Linear Motor with Machine Tools
No. 1

Thermal problem
caused by motor

Heat発熱
affects accuracy

• Mechanical accuracy, such as

Linearity accuracy, pitch accuracy, etc
deteriorates.

• Scratch on the guide may shortens

Thermally affected area
the life
Subject of Linear Motor with Machine Tools
No. 2

Problem of motor
attractive force Gap - Attractive Force
between coil and magnet
5000
4500

吸着力 Attractive Force［Ｎ］

吸着力

4000
3500
3000
2500
2000
1500
1000
500
0
Attractive force at time 0.2 0.4 0.6 0.8 1 1.2 1.4
of complete contact:  magnet gap
5kgf/cm2
 Subject of Linear Motor with Machine Tools
No. 3

Weak against outer force

Outer Table Outer force Table

force Total weight of moving portion：Ｍ Total weight of moving portion：Ｍ

Motor
Inertia：Ｉm

Reaction:F2
 Guide
Guide
Friction:F1
Friction: F1

Ball screw
Inertial：Ｉb
Lead ：BP
 Method to Solve the Subject

１．Thermal Linear motor cooling

problem construction

２．Attractive force
problem Machine construction
design

３．Outer force Linear motor selection

problm
 Solution for Thermal Problem
by Linear motor cooling construction (1)

Coil

Coolant circulates inside to maintain

the temperature at the same point.

・Coil used for our SODICK EDM（continuous rating:１３３０Ｎ）

・Cooling fluid: Lubrication fluid（Aluminum piping type) 
Water cooling（Copper piping type）
 Thermal Solution
by Linear motor cooling construction 
(2)  
Top side of coil

  。

Coolant

Coil

Silicon steel plate

 Thermal Solution
by Linear motor cooling construction 
(3)

Ｃｕｒｒｅｎｔ − Ｔｅｍｐｅｒａｔｕｒｅ Ｒｉｓｅ
100
90
rise

80℃ 水冷表面
80
top-surface with water cooling
Temperature Rise[℃]

70 水冷コイル
Temperature

60 coil with water cooling

自然放冷表面
50 top-surface without cooling
40 自然放冷コイル
30 ciol without cooling

20 3℃
10
0
0 2 4 6 8 10 12 14 16 18 20

電流値 Current[Arms]
Temperature rise without coolant

Temperature rise with coolant

 Die-sinker EDM

Machining theory of die-sinker EDM

Resistor

Electrode
Dielectric fluid Transistor

Power supply

Debris particles

Workpiece Shape transfer

Die-sinker EDM: AQ35L
3-axis linear motor is in use

     Main machine spec

• Table size  ：600×400mm
• Inner size of worktank：750×550×320mm
• X-axis travel  ：350mm
• Y-axis travel  ：250mm
• Z-axis travel  ：250mm
• Max. weight of workpiece：550Kg
• Max. load on table：50Kg
• Machine body size：1535×2250×2395mm
• Machine body weight：3900Kg
 ＊Energy reduction:
  Compared with former models: 40% less
 （due to 2 times cutting speed faster, and
modified power supply）
  AQ25L （AM25L）
  AQ55L （AM55L)
 AQ series: Z-axis construction.
1

Cooling pipe  Coil 

Linear scale  Magnet

Ceramic prop
Guide

Ceramic plate

＊By cooling coil itself, temperature of linear motor

is at ambient temperature + 2℃
 AQ series: Z-axis construction
2
Min. move increment:0.1μ, Acceleration speed:1.2G, Max. feed rate: 36m/min
 （High accuracy positioning:±0.1μ）
Magnet
• To increase the acceleration, its weight needs to reduce.
 In-house ceramic is in use.
  High rigidity, light weight, low thermal expansion
(1/3 of cast iron)

•High thrust power is needed Coil

In-house developed AC linear motor with core 
By cooling coil, the temperature of linear motor is within ambient
temperature+2℃
（without cooling: 45℃）

•Linear motor drive & servo control

In-house motion controller is in use.

High speed response

• Linear motors are symmetrically allocated to get rid of

attractive force.
 Magnet plates are adhered onto quill. Coils are arranged on both sides.
High accuracy is achieved.
 Machining sample. 1
(by Die-sinker EDM)

No flush cutting

Current linear motor drive

machine
Machining depth (mm)

When linear machine

was introduced
Electrode ：Copper(2 pc.)
Workpiece ：Die steel
Electrode size ：20㎜x 20 mm
Ball screw Size reduction  ：0.4 mm／side
machine
Machining depth ：30㎜
Surface roughness：5μmRy
Finishing time ：110 minutes

Rough cutting time (min)

 Machining sample, 2
(by die-sinker EDM)

Deep rib machining by graphite electrode (without flushing)

2 h 10 m(70 mm)(no flushing)

Machining depth (mm)

Linear motor MC

2 h(40 mm)

Conventional ball screw MC

Machining time (min)

 Machining sample, 3
(by die-sinker EDM)

Cutting condition：ON300 OFF140 IP10
Electrode  ：Cu (10×10mm)
Workpiece ：SKD11
Flushing
噴射ノズル nozzle
Cutting depth:30mm Left side gap(mm)
左側面ギャップ（ｍｍ） Right side gap(mm)
右側面ギャップ（ｍｍ）
電極
0.3 0.2 0.1 0 １０×１０ｍｍ 0 0.1 0.2 0.3
0 0
Electrode

-5 Jump speed -5
1m/min
Sodick linear motor drive technology (no flush)
ing depth (mm)

-10 -10
加工深さ（ｍｍ）

can produce:
ジャンプ速度
Jump speed
1) Max.Z-axis speed: 36 mm/min １ｍ／ｍｉｎ 1m/min
無噴射
2) Debris particles can be flown out -15 Flush:0.05MPa -15
ジャンプ速度
thanks to high speed jumping. １ｍ／ｍｉｎ
-20 噴射０．０５ＭＰａ -20
Cutt

3) No debris particles, no 2nd discharge Jump speed

4) Wall can be straight without 2nd ジャンプ速度 36m/min
３６ｍ／ｍｉｎ
discharge -25 無噴射 No flush -25

-30 -30
 Machining sample 4
(by Die-siner EDM)

Cutting depth: １[μｍ]

Z-axis cutting
direction
Feed amount: 0.5 mm

  By repeating measurement & cutting,

ultra accurate & micro machining is achieved.
AP1L Premium
 Wire-cut EDM

Basic theory of Wire-cut EDM

Wire electrode

Condenser

Workpiece Power
supply

Dielectric fluid
 Accuracy is maintained over the years,
because of direct drive

Roundness after 4 years installation Roundness after 10 years installation

High speed・high accuracy・high response  Performance deterioration by friction

are maintained cannot be avoided.

Linear
Linear motor
motor maintains
maintains initial
initial accuracy.
accuracy.
 Machining Capability of AP200L

Φ20 mm / Oil fluid / 10th CUT

Taylor Hobson Talyrond 250
Thickness :20mm
Workpiece : SKD11
Model :AP200L

Roundness: 0.68μm 
Measurement mode: Internal 
 Machining Capability of EXC100L

Workpiece : Optical fiber connector

 寸法精度
Hole diameter・pitch accuracy:
within±0.5μm

Workpiece  ：Ｓt t=0.6mm

Wire electrode：φ0.05㎜
Cutting fluid：Oil 0.2500mm
Φ0.1265mm Φ0.7000mm
Linear Milling Machine: MC430L

Main spec:
Travel(X,Y,Z） : 430×300×100㎜
Max. load on table: 10㎏
Machine dimension: 2300×1760×2000㎜
（W × D × H）

(Power supply/service tank are included)

This machine is equipped with in-house

built high performance cooling capacity
linear motor with core

Low portion heavy & rigid construction

MC430L（X-axis construction）

Linear motor (4 pc)

 MC430L – Cutting Sample

Material ：Copper
 
Size : 0.2 mmT 15 mmH Cutting time  ：134 min
（Top Taper ： 0.1 mmT)
Rough  ：48 min  
    Finish ：86 min

Cutting condition :
Spindle speed ：20,000-30,000 min-1
Cutting feed speed ：2,000 – 500
mm/min
Cutting depth(Ad/Rd) :
To be advised
separately
Cutting tool ：2 tools  
This thin slit is cut by very small
chip each-cut. This method is only
possible with high speed spindle &
linear motor accurate move
 No vibration & High speed machining
Model : AZ 150

 Machining optics, medicals, etc with high speed,

high accuracy

Development concept for AZ 150

① In order to minimize the vibration at time of
high speed move, control mechanism is used
to cancel X,Y-axis.

② To minimize the swing & expansion of spindle,

pneumatic static bearing is used for spindle.

③ High frequency induction Shrink-fit holder is

directly mounted onto spindle to enable full
automated operation
 Construction to Enable Vibration Free

Newly developed active vibration-free table, enabling

high speed & micron feed.

A table has dual tables, which move at opposite directions to

balance the movement.

table

Counter-table

Model table to explain counter movement

High Speed Linear Press
 SP100LX
 Construction of SP100LX

• Power-up of linear motor, while minimizing vibration with original

X-axis construction

Linear
Linearmotor
motor
coil（8 pc）
coil（8 pc）

Roller
Roller
guideﾞ
guideﾞ

Move Magnet
Magnet
Move plat（4
plate
plate plat（4pc）
pc）
 Machining Capability of SP100LX

Machining by parts mold for ＢＧＡ tape

  Mold shape             Machining shape  
 Ultra Precision Machine

Nano EDM
Super NANO 100
AE 05
 Element Technology to Produce
Ultra Accuracy Machining
Sodick’s Development starts with the development of basic element.
●NC CONTROL, ● Motion control:
Developed by Sodick Developed by Sodick

● Drive : Linear motor

● Material : Ceramic
(core-less)
 Element Technology
for Ultra Accuracy Machining

Table size : 180×120mm Z-axis , small stroke guide

Guide : 80×80mm
Travel : 100mm

Bearing rigidity : Horizontal : 200N/μm

        Vertical :200N/μm
Air consumption: 7 Nl/min

Linearity: 0.04μｍ/100ｍｍ

Linearity: 0.10μｍ/100ｍｍ

Measurement is done by
reversing, using glass mirror
and electric micrometer.
 NANO Positioning Technology

2.5

2
position[nm]

1.5

0.5

-0.5
0 0.5 1 1.5 2 2.5 3 3.5
ti me[s ec]

Stopping accuracy:±0.18nm(3σ)
 Orifice Drilling Sample
by NANO EDM

Tungsten carbide electrode is formed on the EDM itself.

   
With a minute feed, the drilling smaller than φ3μm has become possible

Φ1.8μｍ Tungsten carbide electrode Φ2.9μｍ orifice（ＳＵＳ３０４ 5μｍｔ）

 Future Popularity for Linear motor

・Large machine
With a thrust ripple of a Core Linear motor and modified
thrust ripple, smaller than 3μm minute cutting has become
possible.

・Small machine
With high rigidity of core-less linear motor and reduced thrust ripple,
1μm cutting feed has become possible.

・Ultra Precision Machine

Small than 1A stop accuracy by higher performance motor.
Cutting move accuracy with less than 10 NANO meter.
Thank you for your attention.

---Possible! Only with Linear Motor Technology---