Nanotechnology 10 (1999) 394–398.

Printed in the UK PII: S0957-4484(99)03108-6

A new piezodriven precision

micropositioning stage utilizing
flexure hinges
Peng Gao†, Shan-Min Swei† and Zhejun Yuan‡
† School of MPE, Nanyang Technological University, Nanyang Avenue, Singapore 639798
‡ Department of ME, Harbin Institute of Technology, Harbin 150001, People’s Republic of
China

Received 30 March 1999

Abstract. A precision micropositioning system with a high displacement resolution and

wide motion range has been required for industrialized applications for a long time. This
paper discusses the design and the characteristics of a new piezodriven precision
micropositioning stage utilizing flexure hinges. Two-grade amplifying and a monolithic
symmetrical mechanism are adopted in the design. An analytical model is presented and a
series of formulae for the static and dynamic behaviour of the stage are derived. Based on the
theoretical analysis, the optimum design schema is put forward. The experimental
demonstration to study the performance of the stage is described, and the method for
reducing nonlinearity errors is proposed. The experimental results are in close agreement
with those predicted by the theoretical analysis.

1. Introduction

Micropositioning is the key technology in many fields,

such as scanning probe microscopy, x-ray lithography,
mask alignment and micromachining. With the further
development of these fields, there is an increasing demand
for precision micropositioning devices providing high
displacement resolution, wide motion range and high-speed
response. As an alternative, the piezoelectric actuator can
offer high resolution and motion accuracy. However, in
order to meet the demand of the wide travel range, a guiding
and magnifying mechanism utilizing flexure hinges is often
adopted. The flexure hinge has numerous advantages, such
as no friction, no clearance, high displacement resolution and
very compact structure.
Scire and Teague [1] developed a micropositioning
stage with a 50 µm travel range and subnanometre Figure 1. The schematic mechanism of the x–y precision
resolution. Yang et al [2] designed a single-axis, low- micropositioning stage.
profile, piezodriven vertical-motion micropositioning stage
for use in laser welding. Xu and King [3] studied applied in many technical fields such as various operations of
aspects of the design of flexure hinges for piezoactuator cell microsurgery, scanning probe microscopy and precision
displacement amplifiers. Chang and Du [4] described a measurement.
precision piezodriven micropositioner mechanism with a
large travel range. However, there are still many researchers
[5–8] who pay much attention to developing various kinds of 2. Description of the stage
piezodriven precision micropositioning devices for different
industrial applications. This paper presents a new optimized Figure 1 is the schematic mechanism of the x–y precision
monolithic piezodriven precision micropositioning stage micropositioning stage. The joint parts are flexure hinges,
with a displacement resolution of over 20 and 18 nm, a motion as shown in figure 2. The spring rate of a flexure hinge is a
range of over 45 and 40 µm, a natural frequency of over major parameter in the design of the stage. An approximate
525 and 558 Hz in dual directions, respectively. It can be formula for a right circular flexure hinge in which t  r,

0957-4484/99/040394+05$30.00 © 1999 IOP Publishing Ltd