2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO)
Theoretical Investigation of Energetic Efficiency of
Impulse High Voltage Glow Discharge Electron
Sources
S.V. Denbnovetsky, I.V. Melnyk, V.G. Melnyk, B.A. Tugai, S.B. Tuhai
National Technical University of Ukraine “KPI”, Electronic Faculty, Electronic Devices Department
Kyiv, Ukraine
imelnik@edd.ntu-kpi.kiev.ua
Abstract — This paper is devoted to the theoretical
estimations of energetic efficiency of High Voltage Glow
Discharge (HVGD) electron sources in the impulse regime of
operation. Balance of energy on the discharge electrodes is
analyzed, estimation of energy dissipation in anode plasma is also
provided. As a result of investigation obtained the analytical
relation for calculation the efficiency of HVGD electron sources.
Obtained simulation results are in the good agreement with
experimental data.
Keywords — Electron Sources, Impulse Regime, High Voltage
Glow Discharge, Energetic Efficiency
I. INTRODUCTION
High voltage glow discharge electron sources with the cold
cathodes are widely used in industry for realizing such
complex technological operations, as high-rate welding in the
soft vacuum, annealing, deposition of ceramic coatings in the
medium of active gases, as well as for refusing of refractory
materials [1 – 3]. In the papers [4] was pointed out the
advantages of triode high voltage glow discharge electron
sources, which can operated in the impulse regime. Among
these advantages most important are the small value of
regulation time of discharge current and the greater value of
beam current. In the papers [4, 5] was obtained the analytical
relations for estimation the discharge current and energetic
efficiency of triode high voltage glow discharge electron
sources, where the additional discharge is used for regulation
the beam power. This analyze is based on considering the
processes of interaction of beam electrons with residual gas
and in estimation the parameters of low-temperature discharge
plasma. But these significant results were not generalized for
the impulse regime of operation of high voltage glow
discharge electron sources; balance of energy on discharge
electrodes also was not considered complexly. Therefore, the
aim of this paper is obtaining on the base of pervious
investigations the analytical relations for calculation the
energetic efficiency of impulse high voltage glow discharge
electron guns. The theoretical analyze is based on considering
the balance of energy on the electrodes and on the estimations
of anode plasma parameters. Obtained theoretical results have
been compared with known experimental data.
978-1-5090-1431-6/16/$31.00 ©2016 IEEE
II. ANALYZING OF POWER DISSIPATION ON ELECTRODES
It is well-known from the theory of high voltage glow
discharge, that discharge gap can be divided for convenience
into two regions: the cathode-fall region and the region of
anode plasma [6, 7]. In the cathode-fall region electrons and
ions are ordered moving under the action of strong electric
field, defined by applied acceleration voltage and by the posi-
tion of anode plasma boundary. Plasma boundary in HVGD
electrodes systems is considered as the source of ions and as
the electrode, transparent for electrons [4, 6, 7]. For physical
conditions of HVGD can be accepted, that ionization in the
discharge gap is mostly provided by the slow secondary
electrons from anode plasma. Accelerated beam electrons are
weekly interacted with ionized gas by the reason of its high
velocity and low pressure in the discharge gap [4]. Emission
of electrons from the cathode surface is result of its bombard-
ment by the accelerated ions and fast neutral atoms [4, 7].
In impulse regime of operation with durability of impulse
and pause grater then few ms conservation of energy in the
discharge gap not put into effect [5]. Therefore, all applied
energy is dissipated in the discharge gap. Namely, greater part
of energy transported to collector by the electron beam, and
residual energy dissipated in the gap on the electrodes and on
the operation gas. In such physical condition the equation of
power balance in the discharge gap is:
WȈ = Wb + Wel + Wv + Wad , (1)
where Wb – power of electron beam, Wel – power, dissipated
on electrodes, Wv – power, dissipated in the gap volume and
defined by the beam interaction with the anode plasma, Wad –
power of low-voltage control discharge. Difference between
equation (1) and known estimation of power balance for diode
HVGD electrodes systems [6, 7] is taking into account the
power of additional discharge Wad .
The average power, which dissipated in the volume of
discharge gap, without taking into account convection
exchanging of heat, can be defined as [8]:
ve =vmax
ve mve2
Wv = ³ ne dV ⋅ ³ χ Fe (ve )dve , (2)
V ve =0 λ e 2
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 2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO)
where V – the volume of discharge gap, ve – velocity of beam §τ ·
of impulses, Ti – period of impulses, ᨨ i ¸¸ – coefficient for
electrons, ne – average concentration of electrons, λ e – free © Ti ¹
path of electrons, Fe (ve ) – function of distribution of taking into account the discharge power for maximal current in
electrons’ velocity. In equation (2) main parameters defined impulses and for minimal current between impulses.
by using following equations [8]: Estimations for power of low-voltage discharge will be
given in the section IV.
2eU ac 2me 1
v max = , χ= , λe = , (3)
me ma na s a + ni si III. RELATIONS FOR ESTIMATION OF GAS HEATING BY
where U ac – acceleration voltage, me – mass of electron, HEAT FLUXES FROM ELECTRODES AND BY CONVECTION
ma – mass of gas atoms, na – average concentration of gas Heating of operation gas by the heat fluxes from the
atoms, s a and si – cross-section of electrons’ retardation, electrodes is defined by the heat conduction equation. The
fluxes of heating energy for the electrodes of axial-symmetry
defined as [8]: systems, presented at Fig. 1, for impulse regime of operation
2 can be written by following equations [8]:
§ e2 · § m v2 ·
s a = 4π¨ ¸ ln¨ e e ¸, (4) βλ g τi § ∂Tg · βλ g τi § ∂Tg ·
¨ (m v )2 ¸ ¨ 3 n e 2 ¸ J Rad = ¨ ¸ , J zc = ¨ ¸ ,
© e e ¹ © a ¹ Ti ¨© ∂r ¸ Ti ¨ ∂z ¸
¹ r = Rad © ¹ z = Cc
2
§ e2 · § m v2 ·
si = 4π¨ ¸ ln¨ e e ¸ . βλ g τi § ∂Tg ·
¨ (m v )2 ¸ ¨ 3 n e 2 ¸ J za = ¨ ¸ , (7)
© e e ¹ © i ¹ Ti ¨© ∂z ¸
¹ z =Cca
From equations (2 – 4) is clear, that in condition of HVGD
lighting, with acceleration voltage range of tens kV and §τ ·
where λg – gases thermal ⨨ i ¸¸ –
conductivity,
operation pressure range of few Pa, average free path of © Ti ¹
electrons λ e is usually grater, than the length of gap, which is dimensionless coefficient for taking into accounts the time
in range of few hundreds mm [6, 7]. Therefore, in equation (1) parameters of impulse, J zc – flux from the cathode surface,
the component Wb can be neglected. But the discharge J za – flux from the anode surface, J Rad – flux from the
volume is heated by heat exchange and convection transfer of
heat. Corresponded estimations will be given in the section III. additional electrode. Main geometry parameters of considered
Precision estimation for atoms and ions concentration in discharge gap are also pointed out at Fig. 1.
discharge gap is based on analyzing of beam interaction with l
discharge plasma and will be given in section IV.
dcp dp
Power of electron beam in impulse regime defined as [6, 7]:
3 Cɚ 2
Wb = 0,4eni (t )U a Da (γ + 1)
2kTe
ma
( )
1 − Qe0 p g d p , (5) Cc J Rad
Jzɚ
1

η=
γ
(1 + γ )
(1 − Qe0 p g d p ) . 0
Jzc
z

where η – energetic efficiency of electron source, γ – Rad rc

generalized coefficient of electron-ion emission for the
cathode material for maximal discharge current, p g – 4 5
pressure in the discharge gap, Qe0 – average cross-section of
Uac r 6 Uad
ionizing gas by the beam electrons, d p – longitudes length of
gap, Da – transparent coefficient of anode plasma, Te –
temperature of slow electrons in anode plasma. Therefore, the
power, dissipated on the cathode and on the anode of HVGD
in the impulse regime of operation can be estimated as [6, 7]:
ατ i I d U a
Wc = , Wa = Wc γQɟ0 p g d p , (6)
Ti (γ + 1)
where Wc – power, dissipated on the cathode, Wa – power, Fig. 1. Distribution of heat fluxes in the triode high voltage glow
discharge electrodes’ system. 1 – cathode, 2 – collector, 3 – additional
dissipated on the anode, I d – discharge current, τi – durability electrode, 4 – electron beam, 5 – anode plasma, 6 – plasma boundary; Cc and
Ca – cathode and anode coordinates, Rad – radius of additional electrode,
rc – cathode radius, dcp – distance between the cathode and anode plasma,

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 2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO)
dp – longitudinal dimension of anode plasma, l – longitudinal dimension of
discharge gap.
Taking into account, that all electrodes are heated to
certain average temperature and cooled by the water [10, 11],
and the gas temperature also can be considered as average
value of the gap volume, the equation system (7) can be
rewritten as follows [8]:
J Rad =
(
βλ g τi Tad − Tg ); J =
βλ g τ i Tc − Tg
2 zc
Ti d cp
J za =
(
βλ g τ i Tc − Tg ),
2 lume [4]. In such physical conditions for impulse regime of
Ti d cp
where Tad – temperature of additional electrode, Tc – cathode
temperature, Tc – anode temperature, Tg – gas temperature in
the discharge gap.
In the real HVGD electrodes’ systems taking into account
the transferring of heat energy, connected with flowing of gas
trough the length of gap, is also necessary. It is caused by
method of regulation of beam power in HVGD technological
electron sources. During operation of such technological
sources stable value of discharge current maintained by
changing of input gas flow in the gap volume with its’
uninterrupted pumping [9]. Therefore the gas, which flow
through the gap, heated from the hot electrodes, and the
electrodes’ system is cooled by this physical process. To
taking onto account this important convention process to
equation system (8) must be added additional relations [8]:
IV. SIMULATION OF PHYSICAL PROCESSES IN ANODE
PLASMA AND ESTIMATION THE POWER OF ADDITIONAL
DISCHARGE
Anode plasma in high voltage glow discharge is created as
a result of gas ionization by different groups of electrons. For
convenience the fluxes of fast electrons of beam, reflected
from the anode surface, and of slow electrons, which are for-
med as a result of gas ionization in anode plasma, are usually
(
); (8)
considered [6]. In triode impulse HVGD electrodes systems
2 from the anode of additional discharge under its’ bombard-
Ti d cp
ment by the ions generated the additional flow of slow elect-
ron, which also effectively ionized the gas in the plasma vo-
operation of HVGD electron guns the equation of balance of
charged particles in anode plasma can be written as [4]:
z f + z s + z dis = z dif , (12)
with zf – efficiency of gas ionization by fast electrons of beam,
zs – efficiency of gas ionization by slow electrons, emitted from
the anode surface after its bombardment by fast electrons, zdis –
efficiency of gas ionization in low-voltage discharge, zdif –
decreasing of ions concentration in anode plasma as a result of its
leaving by diffusion process. The equation for calculation the
values of efficiency of gas ionization and of diffusion dissipation
of electrons was considered and analyzed in papers [4].
The most important parameter of impulse HVGD
electrodes’ systems is the length of plasma boundary dp, pointed
out at Fig. 1. Volume of anode plasma is very important for
estimation of ion current and the powers of main and additional
discharge [4, 6]. Analytical solution of equation (12) relatively

IF =
(
βτ i c gv na Tg − Tg 0 )v vF =
2u
to parameter dp given such result [4]:
F; , (9)
2
Ti d cp Ca − ai
R1 = AiU ac (− ai
AiU ac +1 ) kTe + eU ad
2πme
−a
, R2 = fηi ηU i k e ,
where Tg 0 – the gas temperature in the place of inlet into
discharge gap, c gv – heat conductivity per unit volume, u – § ·
kTe + eU ad ¨ Ui ¸
velocity of pumping, vF – velocity of gas flux. Therefore the R3 = 3(kTe + eU ad )N 0 α i exp¨ − ¸,
heat flux defined by simple relation [8]: 2πme ¨ kTe ¸
¨ + U ad ¸
© e ¹
J = J Rad + J zc + J za − I F . (10) 2
§ π · § γRad ·
For using relations (8 – 10) the gases thermal conductivity R4 = μ i 0 (kTe + eU ad )¨¨ ¸ ¨1 +
¸ ¨
¸, (13)
λ g can be calculated as [8]: © pa 0 ¹ © λ e ¸¹
R + R3 + R1R2 R
R5 = R1R2 p a 0Qep 0 , ɋeq = − 1 , Deq = 4 ,
3kTg k R5 R5
λg = ⋅ , (11)
8m g πa g2 2
ɋ eq 3
2ɋ eq 3 2
§ p· §q·
where m g – mass of gas atoms, ag – average diameter of gas p=− , q= + Deq , D = ¨ ¸ + ¨ ¸ ,
3 27 ©3¹ © 2¹
atoms.
q q
The methods for estimation the values of discharge current u=3− + D , v = 3 − − D , y =u+v,
2 2
and the power of additional discharge Wc will be given in the
Section IV. 2.25kTe (eU d + kTe )2
λe = ,
§ ·
¨ kTe (eU d + kTe )3 ¸
πe 4 pa 0 ln¨1.5 − ¸¸
¨ πpa 0
© ¹
ɋɭ
d cp =l −dp , dp = y− ,
3

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 2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO)
where pa 0 – reduced pressure in the discharge gap, Și and ȘU – WΣ − Wel − Wad
η= . (19)
coefficients of electrons reflection from the anode by the current WΣ
and by the voltage correspondently, f – transparent coefficient
for anode plasma, Qep0 – cross-section of ions scattering at the V. OBTAINED SIMULATION RESULTS AND ITS’ DISCUSSION
residual gas molecules, ke – coefficient of electrons’ trajectories
longitude, Ui – potential of gas ionization, N0 – Loschmidt cons- Calculation with using equations system (1 – 19) was
tant, Įi , Ai and ai – empirical constant for given operation gas, provided for aluminum cathode and cooper anode, and the
ȝi0 – mobility of ions’ in anode plasma, Ȝe – free path of nitrogen was considered as operation gas. In conformity with
electrons in anode plasma, R1, R2, R3, R4, R5, p, q, u, v and y – this physical conditions such values of coefficients were choose:
additional variables, Ceq and Deq – coefficient of solved cubic U i = 18 V; Te = 800 K; a i = 0.343; α i = 1.452; η i = 0.7;
equation, obtained form (12), D – discriminant of this equation, m2
Te – temperature of slow electrons in anode plasma, ηU = 0.95; γ = 4.6; f = 0.99; μ i 0 = 1.27 ⋅10 −4 ;
k – Boltsman constant, e and me – electron’s charge and mass V⋅s
correspondently. Qep 0 = 5.3 ⋅10 −19 m −2 ; Ai = 3.8 ⋅10 −6. Considered range of
With known value dp, taking into account the equation of operation pressure was pa0 = 0.1 – 1 Pa, range of acceleration
HVGD self-consistent [6]: voltage Uac = 5 – 30 kV, and range of the voltage of additional
discharge is Ud = 100 – 300 V. At the same time the geometrical
kTe dimensions of simulated discharge gap was: l = 0.07 m,
jec
2me Rad = 0.035 m and rc = 0.025 m. The duty time of control
ni =
− ai
e AiU ac +1
,
( (14)
) T
impulse, defined as S = i , was choose in range 1 – 10, and
τi
concentration of ions in anode plasma ni can be calculated
from such analytical relations [4]: impulses frequency was from 500 Gz to 500 kGz. Obtained
simulation results for different values of duty factor S and
-ai
C1 = AiU ac ( -ai
1 + AiU ac )( (
1 + Și Șu-ai 1 − f 1 − d p pa 0Qep 0 ( ))) , voltage on additional electrode Uad are presented at Fig. 2.
Increasing of energetic efficiency with reducing the duty
e(kTe + eU ad ) factor of impulses can be simply explained by the more
C4 = 3N 0 α i , effective using the electron beam in the time, mathematically
2 ʌme
it is clear from equations (18, 19). Reducing of energetic
ʌ 2ȝ i 0 § ȖRad · efficiency with decreasing of voltage of additional discharge
C2 = ¨1 + ¸ − C4 , (15) Uad is explained by strong reducing the current of HVGD
(d p pa0 ) 2 ¨
© λe ¸
¹ relatively to the current of additional discharge.
§ · Mathematically this relation is explained by equations (16,
¨ U ¸ 17).
C3 = (kTe + eU ad ) exp¨ − i ¸C 2 , ni = C1 ,
¨ kTe ¸ C3 Ș, %
¨ + U ad ¸
© e ¹ 90
where jec – density of electron current at the cathode surface,
C1, C2, C3 and C4 is the additional variables. 1
Taking into account equations (13 – 15), relation for the
current of high voltage glow discharge can be written as [4]: 2
80
3
ʌed p (kTe + eU ad )
Id = rc2 ni (1 + -ai
AiU ac ) 2me
, (16)

and the current of additional discharge is defined as [4]:

70
1 2 3 4 5 6 S, rel. unit
(
I ad = eni ʌRad (1 + Ȗ ) Rad + 2d p ) 2eU ad
mi
. (17)
Fig. 2. Dependences of energetic efficiency of impulse HVGD electron
sources from duty-factor of impulses and from the voltage of additional
The relation for the total power, which applied to the discharge. Uac = 15 kV, p = 0,5 Pa, IJi = 1 ms; 1 – Uad = 300 V, 2 – Uad = 200 V,
discharge gap, corresponded to formula (1), is: 3 – Uad = 100 V.

U ac I d τi U ad I ad τi It is clear from obtained simulation results that for the big

WΣ = + . (18) values of voltage of additional discharge and small duty-
Ti Ti
factors of control impulses energetic efficiency of impulse
Therefore, the relation for defining energetic efficiency of HVGD electron sources close to 90%. With such great value
impulse HVGD electron sources can be written as: of energetic efficiency, taking into account small value of time

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 2016 IEEE 36th International Conference on Electronics and Nanotechnology (ELNANO)
regulation constant [5] and high power density of electron
beam during the action of impulse, such electron sources can
be successfully used for realizing such complex technological
operations, as deposition of polymetal and ceramic films [1, 3]
and refusing of refractory alloys [2].
Obtained results of simulation were compared with expe-
rimental data, and the disagreement between the measurement
and calculation results was usually smaller, then 10%.
Corresponded calculated and experimental values for currents
of main and additional discharges are presented in table 1.
Simulation and experimental data was obtained for
acceleration voltage 15 kV, voltage of additional discharge
300 V and for pressure in the discharge gap 0.5 Pa.
TABLE 1. COMPARISON OF SIMULATION AND EXPERIMANTAL DATA
Measured Calculated
Parameters Disagreement, %
Value Value
HVGD
1.66 1.5 9.6
current, A
Current of
additional 7.8 8 2.5
discharge, A
Calculations with using equations (1 – 19) were realized in
computer program complex, adjusted to simulation of impulse
HVGD electron sources. The main advanteges of realized
program is combining of thermodynamic, gas-dynamic and
electronic models, which are presented at considered equations.
The most important fact is that position of plasma boundary and
currents of main and additional discharge are defined from
simple algebraic equations (13 – 17) without using complex
numerical relations, based on iteration procedures. Its lead also
to reducing the time of calculation and given the possibility of
solving complex multicriterial optimization task during
elaboration of impulse HVGD electron guns.
VI. CONCLUSION
Considered in this article analytical model allow to
estimate the energetic efficiency of HVGD electron sources in
impulse regime. Obtained simulation results are compared
with experimental data, and disagreement between theoretical
and experimental results was smaller, than 10%. Obtained
results shown, that the energetic efficiency of impulse HVGD
369
electron sources for small value of impulse duty factor S is
nearly 90%, and for big value of duty factor it reduced to 75 –
80%. The energetic efficiency of HVGD electron sources also
increased with increasing of voltage of additional discharge.
Impulse electron sources with such high energetic
efficiency can be successfully used in different branches of
industry, for example, for deposition of complex polymetal
coatings or for refusing of alloys. Therefore provided theore-
tical investigation and obtained results are very important to
the specialists, which elaborated the technological electron-
beam equipment. Elaboration and using of novel impulse
HVGD electron guns lead to creation of new generation of
modern electron-beam installations.
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