A-81053E-314 01 Aging PDF

The aging procedure of the FANUC laser
1. Outline
In the maintenance work of mirror cleaning and mirror replacement, it is necessary to make
a mirror alignment by reasonable procedure after performance of enough aging. There are
some cases to be not able to make an accurate mirror alignment after lacking performance of
aging.
It has been necessary to perform aging by pulse power command a long time for enough
aging. This time, we developed the new aging procedure “High power aging” to perform
enough and reliable aging at the almost same time of conventional procedure.
Procedure of “High power aging” comprises the repetition of internal discharge by rated
power command, laser gas exchange, and aging by pulse power command. This document
describes the detail of procedure of “High power aging”.
After mirror cleaning or mirror replacement, be sure to perform the “High power aging”, and
afterwards make a mirror alignment. If aging after maintenance except for mirror cleaning
and replacement is necessary, perform the “High power aging” for enough aging.
2. Purpose
We found that below laser troubles occurred after cavity mirror maintenance and alignment
with only conventional aging (by pulse power command).
“Shifting the beam mode at cold state or hot state”,
“Laser power down”,
“Power calibration coefficient increasing”
We know that no enough aging before a mirror alignment causes these laser troubles. It is
possible to make a mirror alignment after enough aging that perform aging by rated power
command after aging by pulse power command. Conventional aging (by pulse power
command) do not warrant to perform enough aging, it is not actualized the trouble in the field
maintenance. We confirm the enough aging by performing aging by rated power command
after performing aging by pulse power command.
Be sure to perform the “High power aging” for enough aging before a mirror alignment in
order to keep performance and quality of FANUC laser.
3. Application
3-1. Apply the High power aging to the following oscillator models.
1kW Laser 2kW Laser 4kW Laser 5kW Laser 6kW Laser
C1000-E C2000-C C4000-A C5000-E C6000-B
C1000i–A C2000-E C4000-E C5000i-A C6000-E
Model C1000i-C C2000i-A C4000i-A C6000i-A
C2000i-B C4000i-B C6000i-B
C2000i-C C4000i-C C6000i-C
Note 1) Do not apply to C6000-A and other old models except models above.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 1/11
ED Date Design Description

Date 2013.7.26 Design T.Sato Approve Murakami
3-2. Apply the “High power aging” after following maintenance works.
・Cleaning of cavity mirrors
・Replacing of cavity mirrors
・Maintenance work that is opened the vacuum chamber
・Reuse the oscillator after a long storage
Note) When there is problem at the oscillator like the discharge voltage (RFV) is higher
200V compared with voltage of data sheet or laser power that is over 500W at the
1kW laser model or over 1000W at other laser mode is dropped in regard to power
command, and it is necessary to aging, perform conventional aging by pulse
power command.
After that, if discharge voltage and laser power meets standards, perform the
“High power aging”. Do not shorten the time of aging by rated power command.
4. Procedure of the “High power aging”

Aging by pulse power command
Perform leak check and evacuate once. At first the parameter of gas pressure
(Parameter No.15242) decreasing 10 Torr and start the oscillator. Perform "Aging by
pulse power command" under the following condition after it becomes the state (LSTR)
of oscillation preparation completion.
Gas pressure : Subtract 100 from Parameter No.15242
(-10 Torr)
Power command : Refer to the following table.
Frequency command : Refer to the following table.(100Hz)
Aging by
Duty command : Refer to the following table.
Pulse
Internal discharge time : Specified times (Note.1) power
Turn on the discharge start signal [HVON] from 1 to 0 to put command
1 set
into the state (LRDY) of discharge preparation completion.
And turn on the discharge start signal [HVON] from 0 to 1 for
the state (LSTR) of oscillation preparation completion. Repeat
this discharge cycle (Aging by pulse power command: 1 set)
specified times. (Note.1)
Power 700W 1500W 2000W 2000W 4000W
Frequency 100Hz 100Hz 100Hz 100Hz 100Hz
Duty 50% 50% 50% 50% 30%
Note.1) Refer to the chapter 6 (See following table) for the specific procedure of the High power
aging. It is described about procedure of maintenance, aging condition, intervals, and times.
Section No. Section name Page No.
6-1 Aging for cleaning, replacement of cavity mirrors Page 5
6-2 Aging for cleaning or replacement of all cavity mirrors one time Page 6
6-3 Aging for installation or after a long storage Page 6, 7
6-4 Aging for overhaul or replacement of Turbo Blower Page 7
6-5 Aging for replacement of discharge tubes Page 8
6-6 Aging after opening vacuum chamber of oscillator at the failure Page 9
Note.2) Refer to the chapter 7 (Page 10,11) for how to perform the High power aging by
automatic aging function.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 2/11

Temporary alignment (Peaking: Refer to the section [5-2])
When you make a mirror alignment after aging at the mirror cleaning or replacement, and
when you make a mirror alignment at installation of oscillator, be sure to make a
“temporary alignment” before the aging by rated power command. Temporary alignment is
adjustment to obtain the maximum output laser power by peaking of the micrometers of
designated mirrors. It is not necessary to make a temporary alignment, if you do not make
a mirror alignment.
Aging by rated power command

If aging by pulse power command ends, turn on the discharge start signal [HVON]
from 1 to 0 to put into the state (LRDY) of the discharge preparation completion. And
turn on the discharge start signal [HVON] from 0 to 1 for the state (LSTR) of the
oscillation preparation completion.
Perform "Aging by rated power command" under the following condition.
Gas pressure : Original setting value
Power command : Refer to the following table.
Frequency command : Refer to the following table.(100Hz) Aging by
Duty command : Refer to the following table.(100%) rated power
Internal discharge time : Specified times (Note.2) command
1 set
Turn on the discharge start signal [HVON] from 1 to 0 to put
into the state (LRDY) of the discharge preparation completion.
And turn on the discharge start signal [HVON] from 0 to 1 for
the state (LSTR) of the oscillation preparation completion.
Repeat this discharge cycle (Aging by rated power command :
1 set) specified times. (Note.2)
Power 1000W 2000W 4000W 5000W 6000W
Frequency 100Hz 100Hz 100Hz 100Hz 100Hz
Duty 100% 100% 100% 100% 100%
Note.1) Refer to the chapter 6 (See following table) for the specific procedure of the High power
aging. It is described about procedure of maintenance, aging condition, intervals, and times.
Section No. Section name Page No.
6-1 Aging for cleaning, replacement of cavity mirrors Page 5
6-2 Aging for cleaning or replacement of all cavity mirrors one time Page 6
6-3 Aging for installation or after a long storage Page 6, 7
6-4 Aging for overhaul or replacement of Turbo Blower Page 7
6-5 Aging for replacement of discharge tubes Page 8
6-6 Aging after opening vacuum chamber of oscillator at the failure Page 9
Note.2) Refer to the chapter 7 (Page 10,11) for how to perform the High power aging by
automatic aging function.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 3/11

Normal alignment
(Obtaining a maximum power by adjusting all mirrors or peaking: Refer to maintenance
manual)
Make a mirror alignment after the aging by rated power command, if you need a mirror
alignment. After aging by rated power command ends, wait 10 minutes at the state
(LSTR) of oscillation preparation completion (Base discharge）.
Next, wait 5 minutes after starting internal discharge for alignment condition, and make
a mirror alignment of resonator.
5. About aging and making an mirror alignment of resonator

5-1 About aging before making an alignment of resonator
Be sure to perform “Aging by rated power command” before making an alignment of
resonator, even when you perform aging for a long time by using the automatic aging
function etc. after maintenance.
5-2 Temporary alignment (For shorten “Temp. alignment")

When you make a mirror alignment after aging at the mirror cleaning or replacement, and
when you make a mirror alignment at installation of oscillator, be sure to make a
“temporary alignment” before the aging by rated power command. Temporary alignment is
adjustment to obtain the maximum output laser power by peaking of the micrometers of
designated mirrors. It is not necessary to make a temporary alignment, if you do not make
a mirror alignment.
After “Aging by pulse power command" ends, turn off the discharge start signal [HVON]
from 1 to 0, return the parameter of gas pressure (Parameter No.15242) to the value before.
And turn on the discharge start signal [HVON] from 0 to 1 to go the state (LSTR) of
oscillation preparation completion. Wait 10 minutes at this state, and start internal
discharge for a mirror alignment. Wait 5 minutes, and start to make a mirror alignment.
Adjust to obtain a maximum power by designated mirror. After cleaning or replacing of
cavity mirrors, you make sure to make a temporary alignment (to obtain the maximum
output laser power by peaking of the micrometers of a designated mirror that clean or
replacement). Do peaking by one or two mirrors at same time.
Adjust to peak the following folding mirrors at the installation and all mirror cleaning and
replacement.
Table 5-2 Folding mirrors for peaking at the installation and all mirror cleaning and replacement
Mirror for Folding Folding Folding Folding Folding
peaking mirror mirror mirror mirror mirrors
(FM3) (FM1) (FM4) (FM4) (FM1 and FM4)
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 4/11

6. Specific procedure of the “High power aging”
6-1. Aging for cleaning, replacement of cavity mirrors (According to the Maintenance Manual)
Perform the “High power aging”, interval time, times, at the aging in the following procedure
for the cleaning or replacement of cavity mirrors for periodical maintenance.
Refer to the Chapter 4 and section 5-2 for the

Cleaning or replacement of OC
detail of 1 to 4 following.
Condition, interval, and times of aging

Cleaning or replacement of RM 1. Pulse power command 5 minutes, 5 times
2. Temp. alignment (Peaking by OC and RM)
3. Rated power command 3 minutes, 5 times
4. Normal alignment (Peaking by OC and RM)
Leakage check, Aging, Alignment
Cleaning or replacement of
FM (2 or 3 pieces) 1. Pulse power command 5 minutes, 5 times
2. Temp. alignment (Peaking by one FM)
Leakage check, Aging, Alignment 4. Normal alignment (Peaking by one FM)
Cleaning or replacement of
FM (2 or 4 pieces) Condition, interval, and times of aging
1. Pulse power command 5 minutes, 5 times
2. Temp. alignment (Peaking by 1 or 2 FM)
Leakage check, Aging, Alignment 4. Normal alignment (Peaking by 1 or 2 FM)
If burn pattern is not good,

go to adjust the all mirrors. Condition, interval, and times of aging
3. Rated power command
7 minutes, 10 times
4. Normal alignment Obtaining a maximum
Aging, Alignment by all mirrors power by all mirrors
Close the openings of mirror holder with masking tape to prevent to enter the air or
contamination while mirror cleaning and replacement.
It is not necessary to clean all folding mirrors at the periodic maintenance.
Select to rotate folding mirrors to clean for recommended cleaning interval to decrease
working time and cleaning interval.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 5/11

6-2. Aging for cleaning or replacement of all cavity mirrors one time
At the failure or overhaul, perform the “High power aging”, interval time, times, at the
aging in the following procedure at the cleaning or replacement of all cavity mirrors one
time from necessity. At the periodic maintenance and not necessary to clean all mirrors
same time, clean or replace the mirrors according to section [6-1].


Cleaning or replacement of all mirrors 1. Pulse power command 5 minutes, 5 times
2. Temp. alignment Peaking by FM
Refer to Table [5-2]
Leakage check, Aging, Alignment 3. Rated power command 7 minutes, 10 times
4. Normal alignment
(Obtain a maximum power by all mirrors.)
6-3. Aging for installation or after a long storage

6-3-1 Aging for over 2 weeks passed after storage or stopping the oscillator
Perform the aging that following contents for over 2 weeks passed after storage or
stopping the oscillator. You can stop the aging by pulse power command after
performing aging 8 hours.
1. Pulse power command 15 minutes, 30 times (Over 8 hours)
2. Temp. alignment Peaking with FM : Refer to Table [5-2]
3. Rated power command 7 minutes, 15 times (Over 2 hours)
4. Normal alignment Peaking with FM: Refer to Table [5-2]
If necessary, obtain a maximum
power by all mirrors.
If you cannot perform aging from the day before of making an alignment, perform the
following “High power aging”, intervals and times the work day. You can stop the aging
by rated power command after performing aging 4 hours.

Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 6/11

6-3-2 Aging for within 2 weeks passed after storage or stopping the oscillator
Perform the aging that following contents for within 2 weeks passed after storage or
stopping the oscillator.
6-4. Aging for overhaul or replacement of Turbo Blower

6-4-1 Aging for only Turbo Blower overhaul or replacement
Perform the “High power aging” that following contents for Turbo Blower overhaul or
replacement. You can stop the aging by rated power command after performing aging 2
hours.
Refer to the Chapter 4 for the detail of 1 and
3 following.
6-4-2 Aging for two days work both Turbo Blower overhaul and cavity mirror cleaning.
Perform the “High power aging” that following contents for Turbo Blower overhaul or
replacement. You can stop the aging by pulse power command after performing aging 8
hours. After that, clean or replacement of cavity mirror after the aging by pulse power
command.
Refer to the Chapter 4 for the detail of 1 and
3 following.
Turbo Blower Overhaul or replacement Condition, interval, and times of aging
(Over 8 hours)
Leakage check, Aging 3. Rated power command 3 minutes, 5 times
At the case of section [6-1]
Cleaning or replacement by all mirrors.

Refer to the section[6-1].
Perform the section [6-1]
Leakage check, Aging, Alignment
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 7/11

6-5 Aging for replacement of discharge tubes
6-5-1 Aging for replacement of one or several discharge tubes at the failure
Perform the aging that following contents for replacement of one or several discharge
tubes at the failure.
Refer to the Chapter 4 for the detail of 1
and 3 following.
6-5-2 Aging for two days work both replacement of all discharge tubes and mirror cleaning or
replacement
Perform the aging that following contents for replacement of all discharge tubes at the
failure or periodic maintenance. You can stop the aging by pulse power command after
performing aging 8 hours. After that, clean or replace the cavity mirrors after the aging
by pulse power command.
Refer to the Chapter 4 for the detail of 1
and 3 following.
Replacement of all discharge tubes Condition, interval, and times of aging

(Over 8 hours)
Leakage check, Aging
At the case of section [6-1]
Cleaning or replacement of all mirrors.

Refer to the section [6-1].
Perform the section [6-1].
Leakage check, Aging, alignment
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 8/11

6-6 Aging after opening vacuum chamber of oscillator at the failure
6-6-1 Aging for two days work for replacement of heat exchanger at the water leakage failure
Perform the aging that following contents for replacement of heat exchanger at the
water leakage failure. You can stop the aging by pulse power command after performing
aging 8 hours, stop the aging by rated power command after performing aging 2 hours.
Refer to the Chapter 4 for the detail of 1 and 3 following.

1. Pulse power command 15 minutes, 30 times (Over 8 hours)
6-6-2 Aging for one-day work for replacement of heat exchanger at the water leakage failure
Perform the aging that following contents for replacement of heat exchanger at the
water leakage failure. You can stop the aging by rated power command after performing
aging 4 hours.
We will recommend performing the section [6-6-1]. You have to perform this work plan,
explain this risk to the MTB and customer enough, in addition to perform carefully.
Refer to the Chapter 4 for the detail of 1 and 3 following.
Note) There is serious risk to break discharge tubes because water will vaporize
suddenly when discharge tubes are discharged by high input power at the water
remained in the vacuum chamber of oscillator.
When there is problem at the oscillator like the discharge voltage (RFV) is higher
200V compared with voltage of data sheet or laser power that is over 500W at the
1kW laser model or over 1000W at other laser model is dropped in regard to
power command. If it is necessary to perform aging, perform conventional aging
by pulse power command. After that, if discharge voltage and laser power meets
standards, perform the “High power aging”. Do not shorten the time of aging by
rated power command.
6-7 Risk in cleaning and replacement work

In the work of cleaning or replacement, there are some cases that removing many gas pipes
and tubes, and open the vacuum chamber of oscillator to the air.
Although we will prevent to enter dust, contamination, and vapor at the opening to air,
there are cases that cannot protect to enter dust, contamination, and vapor by environment
around oscillator.
Because cavity mirrors are contaminated in a short time by dust and vapor entered to
vacuum chamber, there is case that it is necessary to clean the cavity mirror again in a
short time.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 9/11

7. How to perform the “High power aging” by automatic aging function.
You can perform the aging automatically by the automatic aging function of number manual
input. Input aging number at the state (LRDY) of discharge preparation completion.
Aging by pulse power command

(1). Change the following parameters.
Parameter No.15008#6 0 → 1 Automatic aging function is valid
If the model of CNC is 30i/31i-LB, change the parameter together.
Parameter No.15000#4 → 1 Power calibration is valid.
Parameter No.29500#1 1 → 0 After aging, calibration is not performed.
(2). Next, change the following parameter of aging condition in the table.
Parameter No.15326 : Power command for aging
Parameter No.15327 : Frequency command for aging
Parameter No.15328 : Duty command for aging
Parameter No.15329 : Internal discharge time for aging
Parameter No.15330 : Gas pressure for aging
Power (No.15326) 700W 1500W 2000W 2000W 4000W
Frequency (No.15327) 100Hz 100Hz 100Hz 100Hz 100Hz

Duty (No.15328) 50% 50% 50% 50% 30%
Time (No.15329) Specified time
Gas press. (No.15330) Subtract 100 from setting value of parameter No.15242
(3). Start the oscillator to the state (LRDY) of discharge preparation completion.
(4). Input the aging number in the following parameter, turn on the discharge start signal
[HVON], start the aging by pulse power command.
Parameter No.15334 = Specified number: Number of aging operations
(5). Turn on the discharge start signal [HVON] from 0 to 1, then the aging by pulse power
command starts automatically. After aging by pulse power command, the oscillator goes to
the state (LSTR) of oscillation preparation completion.
Temporary alignment (Perform in the case of making an alignment after aging)

(1). After aging by pulsed power command. If necessary, make a temporary alignment of the
section [5-2].
(2). After a temporary alignment, turn off the oscillator at the state (PURGE) .
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 10/11

Aging by rated power command
(1). Change the following parameter of aging condition in the table
Parameter No.15326 : Power command for aging
Parameter No.15327 : Frequency command for aging
Parameter No.15328 : Duty command for aging
Parameter No.15329 : Internal discharge time for aging
Parameter No.15330 : Gas pressure for aging
Power (No.15326) 1000W 2000W 4000W 5000W 6000W
Frequency (No.15327) 100Hz 100Hz 100Hz 100Hz 100Hz
Duty (No.15328) 100% 100% 100% 100% 100%
Time (No.15329) Specified time
Gas press. (No.15330) Original value of parameter No.15242
(2). Turn off the oscillator start signal [RUN] from 1 to 0. At the state (LRDY) of discharge
preparation completion, input the aging number in the following parameter.
Parameter No.15334 = Specified number: Number of aging operations
(3). Turn on the discharge start signal [HVON] from 0 to 1, start the aging by rated power
command. After aging by rated power command end, go to the state (LSTR) of oscillation
preparation completion.
(4). Return the parameter changed at the section 7- -(1),7- -(2), 7- -(1) to original value.
The “High power aging” is end at this.
Title
The aging procedure
of the FANUC laser
Draw
No. A-81053E-314 Sheet 11/11


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The aging procedure of the FANUC laser

ED Date Design Description

4. Procedure of the “High power aging”

ED Date Design Description

Aging by rated power command

ED Date Design Description

5. About aging and making an mirror alignment of resonator

5-2 Temporary alignment (For shorten “Temp. alignment")

ED Date Design Description

Refer to the Chapter 4 and section 5-2 for the

Condition, interval, and times of aging

If burn pattern is not good,

ED Date Design Description

Refer to the Chapter 4 and section 5-2 for the

Condition, interval, and times of aging

6-3. Aging for installation or after a long storage

Refer to the Chapter 4 and section 5-2 for the

ED Date Design Description

6-4. Aging for overhaul or replacement of Turbo Blower

Cleaning or replacement by all mirrors.

ED Date Design Description

Replacement of all discharge tubes Condition, interval, and times of aging

Cleaning or replacement of all mirrors.

ED Date Design Description

Refer to the Chapter 4 for the detail of 1 and 3 following.

6-7 Risk in cleaning and replacement work

ED Date Design Description

Aging by pulse power command

Frequency (No.15327) 100Hz 100Hz 100Hz 100Hz 100Hz

Temporary alignment (Perform in the case of making an alignment after aging)

ED Date Design Description

ED Date Design Description

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