Report: ResDeptUtilization.

rpt Run Date: 5/2/2011

Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx STEM JEOL 200cx STEM
Yu
Brenner
Yu Brenner
Sematech Sematech

Dunn

Metrology Staff Dunn Metrology

Staff

Efstathiadis
Efstathiadis
Elter Elter

Department Utilization by Count Utilization by Hours

Brenner 2 0.3% 5.5 0.2%
Dunn 5 0.8% 15.0 0.6%
Efstathiadis 2 0.3% 9.0 0.4%
Elter 3 0.5% 9.0 0.4%
Metrology Staff 5 0.8% 18.0 0.8%
Sematech 1 0.2% 3.0 0.1%
Yu 1 0.2% 3.5 0.1%
JEOL 200cx STEM 19 3.0% 63.0 2.6%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

XPS ThetaProbe XPS ThetaProbe
Bergkvist
Wang Cady Bergkvist
TEL Wang Cady
TEL

Metrology
Metrology Staff Staff

Denbeaux

Denbeaux
Eisenbraun

Eisenbraun
Efstathiadis

Efstathiadis

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.2% 7.5 0.3%
Cady 1 0.2% 9.0 0.4%
Denbeaux 28 4.4% 280.8 11.8%
Efstathiadis 2 0.3% 22.3 0.9%
Eisenbraun 3 0.5% 41.0 1.7%
Metrology Staff 10 1.6% 148.3 6.2%
TEL 3 0.5% 23.0 1.0%
Wang 2 0.3% 10.0 0.4%
XPS ThetaProbe 50 7.9% 541.8 22.7%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI Dualbeam 600 FEI Dualbeam 600
Wang Wang
Thiel Atotech
Thiel Oktyabrsky
Atotech

Dunn
Oktyabrsky

Eisenbraun
Marko

Dunn

Metrology Staff
Metrology
Eisenbraun Staff
Marko

Department Utilization by Count Utilization by Hours

Atotech 10 1.6% 34.0 1.4%
Dunn 10 1.6% 43.0 1.8%
Eisenbraun 3 0.5% 4.0 0.2%
Marko 1 0.2% 2.5 0.1%
Metrology Staff 12 1.9% 178.8 7.5%
Oktyabrsky 7 1.1% 15.0 0.6%
Thiel 3 0.5% 11.8 0.5%
Wang 3 0.5% 10.3 0.4%
FEI Dualbeam 600 49 7.8% 299.3 12.6%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI E SEM 600 FEI E SEM 600
Xie
Xie

Carpenter

Carpenter

Thiel

Thiel

Castracane
Hartley Hartley Castracane

Department Utilization by Count Utilization by Hours

Carpenter 5 0.8% 17.0 0.7%
Castracane 3 0.5% 5.5 0.2%
Hartley 2 0.3% 3.0 0.1%
Thiel 4 0.6% 11.5 0.5%
Xie 2 0.3% 7.0 0.3%
FEI E SEM 600 16 2.5% 44.0 1.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

AES660 AES660
Wang Efstathiadis Wang Efstathiadis
Oktyabrsky Oktyabrsky

Metrology Staff Metrology

Staff

Eisenbraun
Eisenbraun

Department Utilization by Count Utilization by Hours

Efstathiadis 2 0.3% 4.0 0.2%
Eisenbraun 23 3.7% 151.5 6.4%
Metrology Staff 2 0.3% 21.5 0.9%
Oktyabrsky 1 0.2% 1.0 0.0%
Wang 2 0.3% 17.0 0.7%
AES660 30 4.8% 195.0 8.2%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Gatan Ilion+ Gatan Ilion+

Metrology Staff Metrology

Staff

Department Utilization by Count Utilization by Hours

Metrology Staff 4 0.6% 17.0 0.7%
Gatan Ilion+ 4 0.6% 17.0 0.7%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Olympus Lext OLS4000 Olympus Lext OLS4000

Atotech Atotech

Department Utilization by Count Utilization by Hours

Atotech 1 0.2% 2.5 0.1%
Olympus Lext OLS4000 1 0.2% 2.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leo1550 Leo1550
Yu n/a Yu Bergkvist
Bergkvist Carpenter
Carpenter n/a
Shahedipour-Sandvik
Shahedipour-Sandvik
Castracane Castracane
Oktyabrsky
Denbeaux Oktyabrsky
Dunn Denbeaux
Efstathiadis
Dunn
Metrology Staff
Efstathiadis
Metrology
Staff

Lee
Eisenbraun Lee
Eisenbraun

Haldar
Haldar
Elter Elter

Department Utilization by Count Utilization by Hours

n/a 4 0.6% 5.0 0.2%
Bergkvist 3 0.5% 5.0 0.2%
Carpenter 1 0.2% 1.5 0.1%
Castracane 8 1.3% 16.0 0.7%
Denbeaux 1 0.2% 3.0 0.1%
Dunn 1 0.2% 1.5 0.1%
Efstathiadis 1 0.2% 3.0 0.1%
Eisenbraun 29 4.6% 42.0 1.8%
Elter 10 1.6% 17.5 0.7%
Haldar 1 0.2% 2.0 0.1%
Lee 15 2.4% 12.8 0.5%
Metrology Staff 8 1.3% 18.5 0.8%
Oktyabrsky 4 0.6% 6.5 0.3%
Shahedipour-Sandvik 7 1.1% 14.0 0.6%
Yu 5 0.8% 9.0 0.4%
Leo1550 98 15.6% 157.3 6.6%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 2010F JEOL 2010F
Cady Cady

Metrology Staff
CNSE

Metrology
Staff
CNSE
Dunn Dunn

Department Utilization by Count Utilization by Hours

Cady 2 0.3% 5.0 0.2%
CNSE 16 2.5% 44.0 1.8%
Dunn 1 0.2% 5.0 0.2%
Metrology Staff 10 1.6% 88.5 3.7%
JEOL 2010F 29 4.6% 142.5 6.0%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Acid Bench Acid Bench

Eisenbraun

Eisenbraun

Diebold

Diebold

Department Utilization by Count Utilization by Hours

Diebold 2 0.3% 3.0 0.1%
Eisenbraun 1 0.2% 0.5 0.0%
Acid Bench 3 0.5% 3.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Contact Aligner ContactAcademic
Aligner
Sharfstein
Academic ESG SharfsteinESG
Bakhru
Cady
Bakhru Castracane

Cady
Eisenbraun
Castracane Haldar

Oktyabrsky Eisenbraun
Oktyabrsky

Haldar

Lee

Lee

Department Utilization by Count Utilization by Hours

Academic ESG 4 0.6% 6.3 0.3%
Bakhru 5 0.8% 3.3 0.1%
Cady 1 0.2% 1.0 0.0%
Castracane 4 0.6% 6.3 0.3%
Eisenbraun 4 0.6% 5.8 0.2%
Haldar 1 0.2% 1.0 0.0%
Lee 16 2.5% 46.3 1.9%
Oktyabrsky 30 4.8% 55.0 2.3%
Sharfstein 1 0.2% 3.0 0.1%
Contact Aligner 66 10.5% 127.8 5.4%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

PlasmaTherm PlasmaTherm

Hartley

Eisenbraun

Hartley

Eisenbraun

Department Utilization by Count Utilization by Hours

Eisenbraun 2 0.3% 12.8 0.5%
Hartley 4 0.6% 4.5 0.2%
PlasmaTherm 6 1.0% 17.3 0.7%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Profilometer Profilometer

Academic
ESG

Academic ESG

Haldar

Haldar

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.2% 0.5 0.0%
Haldar 2 0.3% 2.0 0.1%
Profilometer 3 0.5% 2.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Solvent Bench Solvent Bench
Sharfstein Sharfstein
Cady

Cady
Castracane

Eisenbraun

LaBella Castracane
LaBella

Eisenbraun
Hartley

Hartley

Department Utilization by Count Utilization by Hours

Cady 3 0.5% 11.0 0.5%
Castracane 1 0.2% 3.0 0.1%
Eisenbraun 3 0.5% 6.0 0.3%
Hartley 5 0.8% 5.5 0.2%
LaBella 12 1.9% 17.5 0.7%
Sharfstein 1 0.2% 4.0 0.2%
Solvent Bench 25 4.0% 47.0 2.0%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Spin Coater Spin Coater
Sharfstein Sharfstein Bakhru
Lee
Bakhru Lee

LaBella
LaBella Cady

Cady

Hartley

Hartley

Castracane Castracane
Eisenbraun
Eisenbraun

Department Utilization by Count Utilization by Hours

Bakhru 4 0.6% 1.5 0.1%
Cady 4 0.6% 6.5 0.3%
Castracane 6 1.0% 5.0 0.2%
Eisenbraun 3 0.5% 4.0 0.2%
Hartley 4 0.6% 4.5 0.2%
LaBella 6 1.0% 2.8 0.1%
Lee 1 0.2% 1.0 0.0%
Sharfstein 1 0.2% 1.5 0.1%
Spin Coater 29 4.6% 26.8 1.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Wafer Bonder Wafer Bonder

Castracane Castracane

Department Utilization by Count Utilization by Hours

Castracane 1 0.2% 5.0 0.2%
Wafer Bonder 1 0.2% 5.0 0.2%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Wire Bonder Wire Bonder

LaBella LaBella

Department Utilization by Count Utilization by Hours

LaBella 6 1.0% 5.5 0.2%
Wire Bonder 6 1.0% 5.5 0.2%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Dimension SPM Dimension SPM
Yu Yu n/a
n/a

Cady

Shahedipour-Sandvik
Cady

Shahedipour-Sandvik

Haldar

Haldar Geer Geer

Department Utilization by Count Utilization by Hours

n/a 2 0.3% 4.0 0.2%
Cady 3 0.5% 7.0 0.3%
Geer 6 1.0% 29.0 1.2%
Haldar 2 0.3% 4.5 0.2%
Shahedipour-Sandvik 6 1.0% 15.8 0.7%
Yu 1 0.2% 2.0 0.1%
Dimension SPM 20 3.2% 62.3 2.6%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FIB200 FIB200

Yu
Yu

Dunn
Dunn

Oktyabrsky
Metrology
Staff

Oktyabrsky

Metrology Staff

Haldar
Haldar
Efstathiadis
Efstathiadis

Department Utilization by Count Utilization by Hours

Dunn 14 2.2% 36.5 1.5%
Efstathiadis 3 0.5% 10.0 0.4%
Haldar 4 0.6% 18.5 0.8%
Metrology Staff 1 0.2% 0.5 0.0%
Oktyabrsky 1 0.2% 0.8 0.0%
Yu 10 1.6% 24.5 1.0%
FIB200 33 5.2% 90.8 3.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

4-Point Probe 4-Point Probe

Efstathiadis Efstathiadis

Department Utilization by Count Utilization by Hours

Efstathiadis 1 0.2% 1.0 0.0%
4-Point Probe 1 0.2% 1.0 0.0%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

E-beam Evaporator Academic
E-beam Evaporator
Academic ESG
Bergkvist ESG
Yu Yu Bergkvist
Cady
Cady
Carpenter
Carpenter

Eisenbraun Eisenbraun

Hartley
Hartley

Oktyabrsky LaBella
Oktyabrsky
LaBella

Lee
Lee

Department Utilization by Count Utilization by Hours

Academic ESG 2 0.3% 11.0 0.5%
Bergkvist 1 0.2% 3.0 0.1%
Cady 3 0.5% 15.0 0.6%
Carpenter 3 0.5% 7.0 0.3%
Eisenbraun 4 0.6% 12.0 0.5%
Hartley 7 1.1% 20.0 0.8%
LaBella 4 0.6% 15.3 0.6%
Lee 7 1.1% 23.5 1.0%
Oktyabrsky 24 3.8% 96.0 4.0%
Yu 8 1.3% 31.0 1.3%
E-beam Evaporator 63 10.0% 233.8 9.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Flexus Flexus

Academic ESG Academic

ESG

Department Utilization by Count Utilization by Hours

Academic ESG 2 0.3% 12.0 0.5%
Flexus 2 0.3% 12.0 0.5%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

He Leakchecker He Leakchecker

Lee Lee

Department Utilization by Count Utilization by Hours

Lee 1 0.2% 1.5 0.1%
He Leakchecker 1 0.2% 1.5 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

4mm Jig 4mm Jig

Bergkvist Bergkvist

Department Utilization by Count Utilization by Hours

Bergkvist 5 0.8% 20.0 0.8%
4mm Jig 5 0.8% 20.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Pull Tester Pull Tester

Castracane Castracane

Department Utilization by Count Utilization by Hours

Castracane 2 0.3% 18.0 0.8%
Pull Tester 2 0.3% 18.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

He Leakchecker He Leakchecker

Shahedipour-Sandvik Shahedipour-Sandvik

Department Utilization by Count Utilization by Hours

Shahedipour-Sandvik 1 0.2% 3.0 0.1%
He Leakchecker 1 0.2% 3.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx JEOL 200cx

Efstathiadis Efstathiadis

Metrology Staff Metrology

Staff

Department Utilization by Count Utilization by Hours

Efstathiadis 1 0.2% 4.0 0.2%
Metrology Staff 4 0.6% 16.0 0.7%
JEOL 200cx 5 0.8% 20.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Autoprobe SPM Autoprobe SPM

Groves Groves

Department Utilization by Count Utilization by Hours

Groves 1 0.2% 2.0 0.1%
Autoprobe SPM 1 0.2% 2.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leica Confocal Leica Confocal
Bergkvist Bergkvist
Tenenbaum
Cady Tenenbaum Cady

Castracane Castracane

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.2% 5.0 0.2%
Cady 8 1.3% 27.3 1.1%
Castracane 43 6.8% 142.3 6.0%
Tenenbaum 6 1.0% 32.0 1.3%
Leica Confocal 58 9.2% 206.5 8.7%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Lateral Furnace Lateral Furnace

Eisenbraun

Dunn

Eisenbraun

Dunn

Department Utilization by Count Utilization by Hours

Dunn 2 0.3% 6.0 0.3%
Eisenbraun 1 0.2% 8.0 0.3%
Lateral Furnace 3 0.5% 14.0 0.6%

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Report: ResDeptUtilization.rpt Run Date: 5/2/2011
Resource Utilization by
Scope: All Resources Run Time: 8:08:42AM
Department
Range: 04/01/2011 - 04/30/2011 User Name: Warfield, Steven

Total - All Resources : 630 Bookings 2,382.3 Hours

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