Report: ResDeptUtilization.

rpt Run Date: 6/1/2011

Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx STEM JEOL 200cx STEM
Yu Brenner Yu Brenner

Dunn Dunn

Sematech
Sematech

Elter
Elter

Lee
Lee

Metrology
Metrology Staff Staff

Department Utilization by Count Utilization by Hours

Brenner 1 0.2% 3.0 0.2%
Dunn 1 0.2% 6.0 0.3%
Elter 1 0.2% 3.0 0.2%
Lee 1 0.2% 5.0 0.3%
Metrology Staff 4 0.8% 13.5 0.7%
Sematech 2 0.4% 7.0 0.4%
Yu 1 0.2% 4.5 0.2%
JEOL 200cx STEM 11 2.1% 42.0 2.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

XPS ThetaProbe XPS ThetaProbe
Ventrice Bergkvist Ventrice Bergkvist
TEL
TEL

Metrology Staff
Denbeaux Metrology
Staff Denbeaux

LaBella
LaBella

Eisenbraun Eisenbraun

Department Utilization by Count Utilization by Hours

Bergkvist 3 0.6% 32.0 1.7%
Denbeaux 16 3.1% 168.8 8.9%
Eisenbraun 9 1.7% 61.0 3.2%
LaBella 6 1.2% 47.5 2.5%
Metrology Staff 10 1.9% 107.0 5.6%
TEL 2 0.4% 16.0 0.8%
Ventrice 3 0.6% 41.0 2.2%
XPS ThetaProbe 49 9.4% 473.3 25.0%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI Dualbeam 600 FEI Dualbeam 600
Wang Wang

Ventrice Atotech
Atotech
Ventrice
Thiel

Thiel Cady
Oktyabrsky
Oktyabrsky
Cady

Metrology
Staff
Metrology Staff

Marko Marko Dunn

Dunn

Department Utilization by Count Utilization by Hours

Atotech 13 2.5% 41.3 2.2%
Cady 2 0.4% 14.0 0.7%
Dunn 13 2.5% 57.0 3.0%
Marko 2 0.4% 18.0 0.9%
Metrology Staff 2 0.4% 9.8 0.5%
Oktyabrsky 9 1.7% 17.0 0.9%
Thiel 1 0.2% 3.3 0.2%
Ventrice 4 0.8% 32.3 1.7%
Wang 3 0.6% 14.0 0.7%
FEI Dualbeam 600 49 9.4% 206.5 10.9%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FEI E SEM 600 FEI E SEM 600
Xie Bergkvist XieBergkvist
Carpenter
Thiel

Carpenter
Castracane

Thiel

Castracane

Metrology Staff Metrology

Staff

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.2% 2.0 0.1%
Carpenter 5 1.0% 18.5 1.0%
Castracane 2 0.4% 7.0 0.4%
Metrology Staff 5 1.0% 90.5 4.8%
Thiel 8 1.5% 15.0 0.8%
Xie 2 0.4% 6.0 0.3%
FEI E SEM 600 23 4.4% 139.0 7.3%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

AES660 AES660
Efstathiadis

Efstathiadis

Eisenbraun

Eisenbraun

Department Utilization by Count Utilization by Hours

Efstathiadis 5 1.0% 11.0 0.6%
Eisenbraun 15 2.9% 85.0 4.5%
AES660 20 3.8% 96.0 5.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Gatan Ilion+ Gatan Ilion+

Atotech Atotech

Department Utilization by Count Utilization by Hours

Atotech 6 1.2% 23.0 1.2%
Gatan Ilion+ 6 1.2% 23.0 1.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Olympus Lext OLS4000 Olympus Lext OLS4000

Atotech Atotech

Department Utilization by Count Utilization by Hours

Atotech 8 1.5% 30.8 1.6%
Olympus Lext OLS4000 8 1.5% 30.8 1.6%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leo1550 Leo1550
Bergkvist Bergkvist
Yu Carpenter Yu Carpenter
Xie Castracane Castracane
Ventrice
Oktyabrsky Dunn
Xie
Dunn
Ventrice
Efstathiadis Oktyabrsky
Metrology Staff Efstathiadis
Metrology
Staff

Eisenbraun

Eisenbraun

Lee
Lee
Elter
Haldar
LaBella Elter
Haldar
LaBella

Department Utilization by Count Utilization by Hours

Bergkvist 5 1.0% 8.5 0.4%
Carpenter 4 0.8% 7.8 0.4%
Castracane 5 1.0% 7.3 0.4%
Dunn 3 0.6% 5.5 0.3%
Efstathiadis 3 0.6% 8.0 0.4%
Eisenbraun 22 4.2% 38.0 2.0%
Elter 3 0.6% 5.5 0.3%
Haldar 1 0.2% 3.0 0.2%
LaBella 1 0.2% 2.0 0.1%
Lee 34 6.5% 37.3 2.0%
Metrology Staff 8 1.5% 15.5 0.8%
Oktyabrsky 2 0.4% 2.0 0.1%
Ventrice 1 0.2% 2.0 0.1%
Xie 2 0.4% 6.0 0.3%
Yu 11 2.1% 21.0 1.1%
Leo1550 105 20.2% 169.3 8.9%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 2010F JEOL 2010F
Wang Cady Cady
Wang

CNSE

CNSE

Dunn

Dunn

Metrology Staff
Metrology
Staff

Department Utilization by Count Utilization by Hours

Cady 2 0.4% 6.0 0.3%
CNSE 3 0.6% 7.5 0.4%
Dunn 2 0.4% 8.0 0.4%
Metrology Staff 11 2.1% 42.0 2.2%
Wang 2 0.4% 8.8 0.5%
JEOL 2010F 20 3.8% 72.3 3.8%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Acid Bench Acid Bench

Cady

Oktyabrsky Cady

Castracane

Oktyabrsky

Castracane

Department Utilization by Count Utilization by Hours

Cady 1 0.2% 1.3 0.1%
Castracane 1 0.2% 1.0 0.1%
Oktyabrsky 1 0.2% 4.0 0.2%
Acid Bench 3 0.6% 6.3 0.3%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Contact Aligner Academic
Contact Aligner
Academic ESG ESG
Bakhru
Bakhru
Bergkvist
Bergkvist
Cady
Cady
Oktyabrsky Oktyabrsky
Castracane

Castracane Eisenbraun

LaBella
Eisenbraun

LaBella

Lee
Lee

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.2% 0.5 0.0%
Bakhru 5 1.0% 7.5 0.4%
Bergkvist 1 0.2% 3.0 0.2%
Cady 3 0.6% 4.5 0.2%
Castracane 5 1.0% 6.0 0.3%
Eisenbraun 1 0.2% 3.0 0.2%
LaBella 2 0.4% 3.0 0.2%
Lee 9 1.7% 19.8 1.0%
Oktyabrsky 18 3.5% 33.0 1.7%
Contact Aligner 45 8.6% 80.3 4.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

PlasmaTherm PlasmaTherm

Academic
Eisenbraun Academic ESG
ESG

Eisenbraun

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.2% 1.5 0.1%
Castracane 2 0.4% 2.5 0.1%
Eisenbraun 1 0.2% 2.5 0.1%
PlasmaTherm 4 0.8% 6.5 0.3%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Profilometer Profilometer

Cady Cady

Department Utilization by Count Utilization by Hours

Cady 1 0.2% 1.0 0.1%
Profilometer 1 0.2% 1.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Solvent Bench Solvent Bench

Cady
Cady

LaBella
LaBella

Department Utilization by Count Utilization by Hours

Cady 5 1.0% 9.3 0.5%
LaBella 9 1.7% 14.0 0.7%
Solvent Bench 14 2.7% 23.3 1.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Spin Coater Spin Coater
Bakhru
Bakhru LaBella
LaBella Bergkvist

Bergkvist
Eisenbraun

Eisenbraun

Cady Cady

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Bakhru 4 0.8% 2.0 0.1%
Bergkvist 1 0.2% 3.0 0.2%
Cady 5 1.0% 9.0 0.5%
Castracane 7 1.3% 7.5 0.4%
Eisenbraun 1 0.2% 3.0 0.2%
LaBella 5 1.0% 4.8 0.3%
Spin Coater 23 4.4% 29.3 1.5%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Wire Bonder Wire Bonder
Castracane
Castracane

LaBella LaBella

Department Utilization by Count Utilization by Hours

Castracane 1 0.2% 0.3 0.0%
LaBella 8 1.5% 4.3 0.2%
Wire Bonder 9 1.7% 4.5 0.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

YES Oven YES Oven

Castracane Castracane

Department Utilization by Count Utilization by Hours

Castracane 2 0.4% 17.0 0.9%
YES Oven 2 0.4% 17.0 0.9%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Dimension SPM Dimension SPM
VentriceBergkvist Bergkvist
Ventrice
Cady
Cady

Shahedipour-Sandvik

Shahedipour-Sandvik

Geer

Geer

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.2% 2.0 0.1%
Cady 2 0.4% 6.0 0.3%
Geer 11 2.1% 43.5 2.3%
Shahedipour-Sandvik 10 1.9% 22.5 1.2%
Ventrice 1 0.2% 3.0 0.2%
Dimension SPM 25 4.8% 77.0 4.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

FIB200 FIB200

Yu
Yu

Dunn Dunn

Huang

Huang

Efstathiadis Efstathiadis
Haldar
Haldar

Department Utilization by Count Utilization by Hours

Dunn 8 1.5% 23.5 1.2%
Efstathiadis 1 0.2% 1.0 0.1%
Haldar 6 1.2% 22.0 1.2%
Huang 2 0.4% 3.8 0.2%
Yu 5 1.0% 12.0 0.6%
FIB200 22 4.2% 62.3 3.3%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

E-beam Evaporator E-beam Academic
Evaporator
Academic ESG
Bergkvist ESG
Yu Yu Bergkvist
Cady
Cady

Carpenter Carpenter

Eisenbraun
Oktyabrsky
Eisenbraun

Hartley
Oktyabrsky
Hartley LaBella

LaBella

Lee Lee

Department Utilization by Count Utilization by Hours

Academic ESG 1 0.2% 6.5 0.3%
Bergkvist 1 0.2% 5.0 0.3%
Cady 4 0.8% 16.5 0.9%
Carpenter 2 0.4% 6.0 0.3%
Eisenbraun 3 0.6% 10.0 0.5%
Hartley 2 0.4% 7.5 0.4%
LaBella 1 0.2% 4.0 0.2%
Lee 6 1.2% 46.5 2.5%
Oktyabrsky 13 2.5% 45.0 2.4%
Yu 5 1.0% 17.8 0.9%
E-beam Evaporator 38 7.3% 164.8 8.7%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

QuadProS-A8 QuadProS-A8

Academic ESG Academic

ESG

Department Utilization by Count Utilization by Hours

Academic ESG 2 0.4% 2.0 0.1%
QuadProS-A8 2 0.4% 2.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Technics Micro RIE Technics Micro RIE

Oktyabrsky Oktyabrsky

Department Utilization by Count Utilization by Hours

Oktyabrsky 1 0.2% 2.0 0.1%
Technics Micro RIE 1 0.2% 2.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

4mm Jig 4mm Jig

Bergkvist Bergkvist

Department Utilization by Count Utilization by Hours

Bergkvist 2 0.4% 8.0 0.4%
4mm Jig 2 0.4% 8.0 0.4%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Pull Tester Pull Tester

Bergkvist Bergkvist

Department Utilization by Count Utilization by Hours

Bergkvist 1 0.2% 1.0 0.1%
Pull Tester 1 0.2% 1.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

He Leakchecker He Leakchecker

Eisenbraun Eisenbraun

Department Utilization by Count Utilization by Hours

Eisenbraun 1 0.2% 1.0 0.1%
He Leakchecker 1 0.2% 1.0 0.1%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

JEOL 200cx JEOL 200cx

Dunn

Dunn

Metrology
Staff

Elter

Metrology Staff

Haldar Elter

Haldar

Department Utilization by Count Utilization by Hours

Dunn 2 0.4% 11.5 0.6%
Elter 1 0.2% 6.0 0.3%
Haldar 1 0.2% 6.0 0.3%
Metrology Staff 6 1.2% 18.0 0.9%
JEOL 200cx 10 1.9% 41.5 2.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Autoprobe SPM Autoprobe SPM

Groves Groves

Department Utilization by Count Utilization by Hours

Groves 2 0.4% 4.5 0.2%
Autoprobe SPM 2 0.4% 4.5 0.2%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Leica Confocal Leica Confocal
Tenenbaum Tenenbaum Begley
Begley

Bergkvist

Bergkvist

Cady Cady

Castracane
Castracane

Department Utilization by Count Utilization by Hours

Begley 3 0.6% 4.5 0.2%
Bergkvist 2 0.4% 16.0 0.8%
Cady 2 0.4% 13.3 0.7%
Castracane 12 2.3% 50.5 2.7%
Tenenbaum 1 0.2% 5.0 0.3%
Leica Confocal 20 3.8% 89.3 4.7%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Lateral Furnace Lateral Furnace

Dunn Dunn

Department Utilization by Count Utilization by Hours

Dunn 3 0.6% 6.5 0.3%
Lateral Furnace 3 0.6% 6.5 0.3%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Utilization by Count Utilization by Hours

Scintag Scintag

Haldar Haldar

Department Utilization by Count Utilization by Hours

Haldar 2 0.4% 15.0 0.8%
Scintag 2 0.4% 15.0 0.8%

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Report: ResDeptUtilization.rpt Run Date: 6/1/2011
Resource Utilization by
Scope: All Resources Run Time: 9:05:41AM
Department
Range: 05/01/2011 - 05/31/2011 User Name: Warfield, Steven

Total - All Resources : 521 Bookings 1,894.8 Hours

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