JSM-6380LV

The JSM-6380 is a high-performance, low cost, scanning electron microscope with a high resolution of 3.0nm.

The customizable GUI interface allows the instrument to be intuitively operated, and Smile Shot™ software

ensures optimum operation settings. The JSM-6380 specimen chamber can accommodate a specimen of up to

6-inches in diameter. Standard automated features include auto focus/auto stigmator,auto gun (saturation and

alignment), and automatic contrast and brightness.

Other features include eucentric stage and conical lens. The JSM-6380 is used in many and varied applications

with several options that increase its versatility.

Other highlights include:

• Fast, unattended data acquisition (with optional stage automation)

• Smart settings for common samples

• Streamlined design

• Compact footprint

• Customized toolbars for repetitive functions

• Enhanced SE imaging

• Super conical lens

Specifications

Resolution 3.0 nm(30kV, WD8mm, SEI)

Accelerating voltage 0.5 to 30 kV (53 steps)

Magnification x5 to 300,000 (149 steps)

Filament Pre-centered W hairpin filament

Objective lens Super conical lens

Objective lens apertures Three position, controllable in X/Y directions

Maximum specimen size 5" full coverage (152.4mm dia. loadable)

Specimen stage Eucentric goniometer

X=80mm, Y=40mm, Z=5mm-48mm

R=360° (endless)

(Computer controlled 2, 3 or 5 axis motor drive: option)

Display LCD 18.1 inch, high resolution FPD