Big Data & Analytics

for Semiconductor Manufacturing

半導体生産におけるビッグデータ活用

Ryuichiro Hattori 服部 隆一郎

Intelligent SCM and MFG solution Leader
Global CoC (Center of Competence) Electronics team
General Business Services
IBM

© 2014 IBM Corporation

Agenda

What is Big Data ?

Big Data in Semiconductor Manufacturing

Big Data and Analytics architecture

Big Data Analytics use case in IBM Microelectronics

Summary

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What is Big Data ? - Big data is about All Data

Volume Velocity Variety Veracity*

Data at rest Data in motion Data in many Data in doubt

forms
Uncertainty due to
Terabytes to Streaming data, Structured, data inconsistency
exabytes of existing milliseconds to unstructured, text, & incompleteness,
data to process seconds to respond multimedia ambiguities, latency,
deception, model
approximations

© 2014 IBM Corporation

3
Big Data in Semiconductor Manufacturing

Fall 2013

Problem statement:

“Conventional or standard analytical methods and technologies are built for predictive
modeling on a small scale, not for investigation of hundreds or thousands of potential
factors and interactions”

“Engineers with standard analytical techniques and tools have become the bottleneck,
outpaced by data volumes and complexity”

“New methods and software are needed to bridge the gap between analysis and action”

“Automated data mining and analysis tools are needed to explore and uncover problems
and opportunities that lead to action and potential manufacturing operation improvements
that differentiate one company from its competition”
© 2014 IBM Corporation
 Big Data Hadoop

≠
“There’s a belief that if you want big data, you need to go out and buy Hadoop
and then you’re pretty much set. People shouldn’t get ideas about turning off
their relational systems and replacing them with Hadoop…
As we start thinking about big data from the perspective of business needs,
we’re realizing that Hadoop isn’t always the best tool for everything we need to
do, and that using the wrong tool can sometimes be painful.”

Ken Rudin
Head of Analytics at Facebook

© 2014 IBM Corporation

IBM PoV on Big Data and Analytics architecture
New/Enhanced
All Data
Applications

Real-time Data Processing & Analytics What is

happening?
Discovery and
exploration
Deep
Analytics What action
data zone should I What did Why did it
Operational Landing, take? I learn, happen?
data zone Exploration what’s best? Reporting and
EDW and Decision analysis
and Archive management Cognitive
data zone data mart
zone What could
happen?
Predictive
analytics and
modeling
Information Integration & Governance

Systems Security Storage

On premise, Cloud, As a service

© 2014 IBM Corporation

Transformation to target architecture - start
Leverage column-store and in-memory capabilities to improve performance
and enable reporting & analysis directly against operational data

Data types Actionable insight

Operational
systems
Predictive analytics
Staging area Enterprise and modeling
Warehouse

Reporting &
Transaction and
interactive Reporting and
analysis analysis
application data

Archive

© 2014 IBM Corporation

Transformation to target architecture – stage1
Provide dedicated analytics processing for faster, deeper analysis and
modeling

Data types Actionable insight

Deep
Operational analytics &
systems modeling
Predictive
Staging area Enterprise analytics
Warehouse and modeling

Reporting &
Transaction and
interactive Reporting and
analysis analysis
application data

Archive

© 2014 IBM Corporation

Transformation to target architecture – stage2
Leverage Hadoop to capture operational data, leverage additional data types
and enable exploration of data prior to normalization

Data types Actionable insight

Deep
Operational Exploration and analytics &
systems landing modeling
Image and video Predictive
Trusted data analytics
and modeling
Enterprise
content
Reporting &
Transaction and
interactive Reporting,
analysis analysis, content
application data analytics

Social data

Archive Discovery and

Third-party data exploration

© 2014 IBM Corporation

Transformation to target architecture – stage3
Leverage Hadoop for “queryable” archive

Data types Actionable insight

Deep
Operational Exploration, analytics &
systems landing and modeling
archive Predictive
Image and video
Trusted data analytics
and modeling
Enterprise
content
Reporting &
Transaction and
interactive Reporting,
analysis analysis, content
application data analytics

Social data

Archive Discovery and

Third-party data exploration

© 2014 IBM Corporation

Transformation to target architecture – stage4
Leverage data in motion and streamline processing of extreme volumes

Data types Real-time processing & analytics Actionable insight

Decision
management
Machine and Deep
sensor data Operational Exploration, analytics &
systems landing and modeling
archive Predictive
Image and video
Trusted data analytics
and modeling
Enterprise
content
Reporting &
Transaction and
interactive Reporting,
analysis analysis, content
application data analytics

Social data

Discovery and
Third-party data exploration

© 2014 IBM Corporation

Transformation to target architecture – stage5
Extend transformation, matching, security and governance capabilities to
ALL data

Data types Real-time processing & analytics Actionable insight

Decision
management
Machine and Deep
sensor data Operational Exploration, analytics &
systems landing and modeling
archive Predictive
Image and video
Trusted data analytics
and modeling
Enterprise
content
Reporting &
Transaction and
interactive Reporting,
analysis analysis, content
application data analytics

Social data

Discovery and
Third-party data exploration

Information Data Matching Metadata & Security & Lifecycle

Integration & MDM Lineage Privacy Management
Information Integration & Governance

© 2014 IBM Corporation

IBM Big Data & Analytics Offerings

Watson Foundations

Data types Real-time processing & analytics Actionable insight

STREAMS, DATA REPLICATION
Decision
management
Machine and Deep SPSS MODELER
sensor data Operational Exploration, analytics & GOLD
systems landing and modeling
archive Predictive
Image and video
Trusted data PUREDATA analytics
and modeling
Enterprise ANALYTICS SPSS MODELER
content
DB2 Reporting &
DB2, INFORMIX WAREHOUSE interactive Reporting,
Transaction and analysis, content
application data PUREDATA analysis
PUREDATA DB2 BLU analytics
TRANSACTIONS OPERATIONA COGNOS BI
L ANALYTICS PUREDATA
Social data ANALYTICS COGNOS TM1
BIGINSIGHTS Discovery and
Third-party data PUREDATA exploration
HADOOP DATA EXPLORER
SPSS ANALYTIC
CATALYST
Information Integration & Governance
INFORMATION SERVER, MDM, G2, GUARDIUM, OPTIM

© 2014 IBM Corporation

Big Data Analytics approach in IBM Microelectronics

Combination of :
1) IBM’s Big Data platform and 2) custom applications
largely developed, built and driven by IBM Research expertise

Leverages all data available in fab: logistics, metrology, inspection, test, tool sensors

Equipment Sensor Data Yield analysis routines

~10 Billion data points per day Identifies variables and provides prediction

© 2014 IBM Corporation

Big Data Analytics use case in IBM Microelectronics
Several real use cases are described on following pages

Information
Warehouse Product Part Number
Demand/Supply Demand Build
&
E-biz interface
Planning Management Enterprise

Product Factory
Recipe
Dispatch
Mgt Manufacturing Execution System
(MES)
Equipment Engineering
Maintenance Analysis
And Sensor Equipment AMHS
Scheduling Systems Control Control Advanced
Process
Controls
Energy
Management

Adaptive Test
Process, Measurement and Automated Material Handling
Engine
Test Equipment Communications Automated Reticle Handling

Tools
© 2014 IBM Corporation
Use Case 1: Big Data approach to the problem of large
dataset analysis
Traditional

Tester Large Large

Data dataset analysis Review
Ware retrieval routine reports
house

Challenge: Existing analysis methods struggle with current data volumes

pulling and manipulating data takes too long

thousands of charts and graphs that require manual review

analysis may not be complete before product is shipped

New approach “In-flight Analytics”

Tester Near real-time analysis

Interactive
InfoSphere review
Streams

Model results
in-memory
© 2014 IBM Corporation
Use Case 1: Real-time multivariate analysis of wafer test
patterns with Streams
Partial Least Squares (PLS) model compares actual yield to previous results

analysis output highlights what has changed Automated Streams solution:

Yield Contribution • compares yield by test pattern to historical

By Pattern data

• identifies unusual yield behavior, based on

multivariate model

• larger bars indicate larger deviation from

historical yield

• has been used to immediately identify

problems on leading edge of new production

• problem identified before the first wafer had

completed testing

• new data added to existing model and kept in

memory for fast and easy analysis

Not Benefits:
enough
‘All Goods’
• 20% reduction in engineering labor
Too many • first quality escape prevented - $650k in
‘Partial avoided warranty expense
Goods’

© 2014 IBM Corporation

Use Case 2: Adaptive Testing that enables global
visibility and decision-making with Big Data

From IBM presentation at SemiKorea, Feb2014

© 2014 IBM Corporation
Use Case 3: Usage of Sensor data in IBM fab for yield
control and asset optimization
Challenge:

Yield learning is the most direct contributor to fab
profitability and time to market

Huge volume of data (billions of points per day) with
many subtle interpretations

Want to maximize usefulness of semi-structured tool
sensor data for variety of problem solving

Large engineering team, with varying skills in analysis,
statistics, data mining
What we did:

Collected and enabled quick review of massive amounts of sensor data, in a simple dashboard

Identified tool issues and parameters that influence critical product measurements

Developed scoring algorithms, including advanced info theory to highlight relationships
 ease of use, guides analyst to significant findings

Fully automated, with linked reports for full drill-down capability

Benefits:

Documented savings > $13M during first two years of use

Drives actions for tool stability and control, process centering, yield learning, scrap avoidance

Systematic implementation has continued throughout the fab
© 2014 IBM Corporation
Use Case 3: Visualization of Sensor data with scoring
algorithms and full drill-down capability

© 2014 IBM Corporation

Use Case 4: Quality Early Warning System (QEWS) to
identify trends in Supply Chain before traditional SPC
Challenge
Challenge
Quality and supply chain
managers need advanced
techniques to examine
quality date from tens of
thousands of parts
(incoming, manufactured,
deployed) and to provide
better, more proactive
quality management
Results from QEWS Proof of Concept at external client
Solution
Solution Business
Business Value
Value at
at IBM
IBM
Software system which uses
Cost savings – $39M in hard warranty
proprietary IBM technology to savings, with additional soft savings and
detect & prioritize quality benefits in other areas

Proactive quality mgt – identify and
problems earlier with fewer false
resolve issues before they become
alarms, coupled with push alert problems, up to 6 weeks earlier than
functionality for IBM & suppliers traditional SPC
to proactively detect & manage
Improved quality processes – improves
quality issues at any stage of quality process efficiency & effectiveness
product lifecycle
Key Innovations

Earlier identification of quality issues
through proprietary analytic techniques

Fewer false alarms

Structured issue prioritization,
management, follow-up
Distills an ocean of supply chain quality
data into prioritized, actionable issues
© 2014 IBM Corporation
Semiconductor firms see significant opportunities
for Big Data to optimize the way they execute
across functions GPS

External Data
Market Research &
Product Ideation Supply Chain & Distribution
... align product concepts with ... optimize inventory and assets and
consumer desires, improve new deliver a reduction in supply chain and
product ideas, and new product distribution costs with single view product
launch effectiveness for IoT

Product Procurement &

Development & Vendor
Manufacturing Management
… compress design, ... embed insight into
development & business processes from
manufacturing lead time Manufacturer to Distributor
and improve yield and to Customer to Consumer
asset utilization

Field and Warranty
Management
... collect field data from connected
devices, understand part behavior,
predict failures, reduce warranty
cost
Finance
...grow revenue and improve margins
Massive with greater business performance
Internal Data insight, and improved forecasting and
planning
Marketing & Sales
... design and execute more effective
marketing with optimized product © 2014 IBM Corporation
assortments, affinities and pricing
Summary
Three Key Imperatives for Big Data & Analytics Success

Build a culture Invest in a Be confident

that infuses big data & with privacy,
analytics analytics security and
everywhere platform governance

Imagine It. Realize It. Trust It.

Focus on business needs

Apply how well use data

© 2014 IBM Corporation

Big Data and Analytics to Cognitive Computing
New/Enhanced
All Data
Applications

Real-time Data Processing & Analytics What is

happening?
Discovery and
exploration
Deep
Analytics What action
data zone should I What did Why did it
Operational Landing, take? I learn, happen?
data zone Exploration what’s best? Reporting and
EDW and Decision analysis
and Archive management Cognitive
data zone data mart
zone What could
happen?
Predictive
analytics and
modeling
Information Integration & Governance

Systems Security Storage

On premise, Cloud, As a service

© 2014 IBM Corporation

© 2014 IBM Corporation